High-precision flow field sensor and measurement method with multi-level flagella structure mimicking mosquito antennae

Abstract

This invention discloses a high-precision flow field sensor and measurement method with a multi-stage flagella structure inspired by mosquito antennae. The biomimetic flow field sensor consists of a central rigid rod and two multi-stage cantilever sensors on both sides. The cantilever sensors are composed of a flexible bottom layer, a flexible top layer, and a piezoresistive flexible sensor. The central rigid rod provides fixation and support for the multi-stage cantilever sensors. The flexible bottom layer is made of a high-elastic-modulus material and mainly senses changes in airflow in the surrounding flow field, oscillating with the airflow. The flexible top layer is made of a low-elastic-modulus material and mainly enhances the sensitivity of the rigid front section to changes in airflow. The piezoresistive flexible sensors are distributed on a secondary cantilever beam composed of the flexible bottom and upper layers. The oscillation of the secondary cantilever beam causes deformation of the two layers of piezoresistive flexible sensors, thereby changing the sensor resistance value. By comprehensively evaluating the resistance change of the piezoresistive flexible sensors, information such as the flow direction, flow rate, and velocity of the airflow in the flow field can be accurately measured.

Description

Technical Field

[0001] This invention relates to the field of gas flow rate and direction measurement technology, and in particular to a high-precision flow field sensor and sensing measurement method with a multi-level flagella structure inspired by mosquito antennae. Background Technology

[0002] Currently, high-precision flow field sensors for fluid velocity and direction measurement all have certain drawbacks, such as low detection accuracy, inability to simultaneously measure flow velocity and direction, reduced accuracy with prolonged operation, high cost, and large size. Therefore, existing flow field sensors are insufficient for measuring the velocity and direction of weak airflows.

[0003] Therefore, existing sensor technologies still need further improvement and development. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this invention is to provide a high-precision flow field sensor and sensing measurement method with a multi-level flagella structure inspired by mosquito antennae. This invention provides a high-precision flow field sensor with a multi-level flagella structure inspired by mosquito antennae, aiming to solve the problems of poor compatibility and accuracy of airflow velocity, flow rate and flow direction in the prior art.

[0005] The technical solution of the present invention is as follows:

[0006] A first aspect of the present invention provides a high-precision flow field sensor with a multi-level flagellar structure mimicking the antennae of a mosquito, comprising:

[0007] A central rigid rod and a multi-stage cantilever sensor arranged on both sides of one end of the central rigid rod; the multi-stage cantilever sensor adopts a multi-stage flagella structure that mimics the antennae of a mosquito and is arranged on both sides of one end of the central rigid rod.

[0008] The cantilever sensor includes: a flexible bottom layer, a flexible top layer, and a piezoresistive flexible sensor; the piezoresistive flexible sensor is distributed on the cantilever beam composed of the flexible bottom layer and the flexible top layer;

[0009] The flexible bottom layer of the cantilever sensor has a concave recessed section at the bottom end, which is used to concentrate the deformation and transfer the external force to the piezoresistive flexible sensor.

[0010] When the cantilever beam swings, it causes the piezoresistive flexible sensor to deform, thereby changing the resistance value of the piezoresistive flexible sensor.

[0011] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, wherein the piezoresistive flexible sensor comprises two layers: a flexible bottom layer circuit disposed on a flexible bottom layer and a flexible upper layer circuit disposed on a flexible upper layer.

[0012] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, wherein the two layers of sensors formed by the flexible bottom layer circuit and the flexible top layer circuit are connected together by laser etching and drilling technology to form a series circuit;

[0013] The swaying of the cantilever beam causes deformation of the two layers of piezoresistive flexible sensors, namely the flexible bottom layer circuit and the flexible top layer circuit, thereby changing the sensor resistance value.

[0014] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae has an elastic modulus that is more than 5 times greater than the elastic modulus of the flexible bottom layer 10.

[0015] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, wherein the cantilever sensor is rigidly connected to the central rigid rod through the flexible bottom layer, so as to fix the multi-level cantilever sensor on the central rigid rod, arranged in a multi-level flagella structure mimicking mosquito antennae.

[0016] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae includes a multi-level cantilever sensor comprising eight cantilever sensors arranged sequentially on both sides of one end of the central rigid rod. The spacing between cantilever sensors on the same side should be greater than the length of the front end of the central rigid rod.

[0017] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, wherein the central rigid rod is made of one of the following materials: copper, steel, alloy, or wood.

[0018] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, wherein the flexible bottom layer is made of one of the following materials: paper-based material, polyethylene terephthalate, polyvinyl alcohol resin, polyimide, or polyethylene naphthalate flexible material; and the flexible top layer is one of the following: polydimethylsiloxane, silicone, silicone rubber, or adhesive tape.

[0019] The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, wherein the piezoresistive flexible sensor is one of the following: a paper-based piezoresistive sensor, a polydimethylsiloxane piezoresistive sensor, a silicone piezoresistive sensor, an epoxy resin piezoresistive sensor, or a silicone rubber piezoresistive sensor; and the piezoresistive flexible sensor is a flexible substrate.

[0020] A sensing and measurement method for a high-precision flow field sensor with a multi-level flagellar structure mimicking a mosquito's antennae, as described in any one of the claims, comprising the steps of...

[0021] When the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae senses external flow excitation, the flexible bottom layer deforms as a whole due to its sensing area and the setting of the recessed section, and the deformation is concentrated in the recessed section. The flexible bottom layer circuit, flexible top layer, and flexible top layer circuit attached to the flexible bottom layer also deform accordingly.

[0022] When the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae deforms towards the side covering the sensor, the overall resistance of the flexible bottom layer circuit and the flexible top layer circuit decreases due to compression. Conversely, when the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae deforms towards the other side covering the sensor, the resistance increases.

[0023] By detecting the change in resistance value of the series circuit formed by connecting the flexible bottom layer circuit and the flexible top layer circuit together, the flow direction, flow rate, and flow velocity information of the airflow in the flow field can be determined.

[0024] Beneficial Effects: This invention provides a high-precision flow field sensor and sensing measurement method with a multi-stage flagella structure mimicking a mosquito's antennae. The flow field sensor of this invention consists of a central rigid rod and two multi-stage cantilever sensors on both sides. The cantilever sensors are composed of a flexible bottom layer, a flexible top layer, and a piezoresistive flexible sensor. The central rigid rod provides fixation and support for the multi-stage cantilever sensors; the flexible bottom layer is made of a high elastic modulus material and mainly senses changes in airflow in the surrounding flow field, oscillating with the airflow; the flexible top layer is made of a low elastic modulus material and mainly enhances the sensitivity of the rigid front section to changes in airflow; the piezoresistive flexible sensors are distributed on the cantilever beam composed of the flexible bottom and flexible top layers. The oscillation of the cantilever beam causes deformation of the two layers of piezoresistive flexible sensors, thereby changing the sensor resistance value. By comprehensively evaluating the resistance change of the piezoresistive flexible sensors, information such as the flow direction, flow rate, and flow velocity of the airflow in the flow field can be accurately measured.

[0025] This invention utilizes the external force of the fluid in the airflow field to cause the flexible bottom layer to oscillate, simultaneously deforming the upper flexible layer. Due to the presence of a contraction, the deformation occurs primarily at the contraction point. This excites the two-layer piezoresistive flexible sensor, affecting its overall resistance. The flow velocity, direction, and flow rate are obtained from the change in resistance value. By changing parameters such as the size, thickness, and aspect ratio of the flexible bottom layer, smaller changes in the flow field can be detected, thereby improving the detection accuracy and range of the gas flow field sensor. Attached Figure Description

[0026] Figure 1 This is a SEM image of the antennae of the mosquito, the biological prototype of this invention.

[0027] Figure 2This is a schematic diagram of a multi-stage cantilever sensor, which is a high-precision flow field sensor with a multi-stage flagella structure mimicking mosquito antennae, according to an embodiment of the present invention.

[0028] Figure 3 This is a schematic diagram of the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, according to an embodiment of the present invention.

[0029] Figure 4 This invention relates to the different resistance changes when subjected to forward and reverse excitation by a micro airflow.

[0030] Figure 5 This is a graph showing the resistance change of the present invention under a wind speed of 6.14 m / s.

[0031] Figure 6 This is an enlarged schematic diagram of a cantilever sensor, which is a high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, according to an embodiment of the present invention. Detailed Implementation

[0032] This invention provides a high-precision flow field sensor and sensing measurement method with a multi-level flagella structure mimicking a mosquito's antennae. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention is further described in detail below. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0034] Mosquitoes, as arthropods, can easily sense the velocity, flow rate, and direction of airflow using their antennae. Inspired by the combined action of long and short cilia on their antennae to sense flow fields, this application presents a high-precision flow field sensor with a multi-level flagellum structure mimicking that of a mosquito's antennae. This invention provides a high-precision flow field sensor with a multi-level flagellum structure mimicking that of a mosquito's antennae, along with a sensing and measurement method.

[0035] Please refer to the accompanying drawings for some embodiments of a biomimetic cantilever beam sensor provided by the present invention.

[0036] like Figure 1 As shown, Figure 1 This is a SEM image of the antennae of the mosquito, the biological prototype of this invention. Figure 1 In the diagram, ① represents the long cilia on the mosquito's antennae, and ② represents the short cilia mainly distributed on the hair shaft.

[0037] like Figure 2 As shown, Figure 2This is a schematic diagram of the multi-stage cantilever sensor of the present invention, wherein 10 is the flexible bottom layer; 20 is the flexible top layer; 30 is the flexible bottom layer circuit; and 40 is the flexible top layer circuit.

[0038] like Figure 3 As shown, Figure 3 This is a schematic diagram of the high-precision flow field sensor with a multi-stage flagella structure mimicking the antennae of a mosquito, as described in this invention. In the diagram, 100 represents a multi-stage cantilever sensor; 200 represents a central rigid rod.

[0039] like Figure 3 As shown, an embodiment of the present invention provides a high-precision flow field sensor with a multi-level flagella structure mimicking a mosquito's antennae, comprising: a central rigid rod 200, and multi-level cantilever sensors 100 arranged on both sides of one end of the central rigid rod 200; in this embodiment, the multi-level cantilever sensors 100 are multiple cantilever sensors 100 arranged sequentially on both sides of one end of the central rigid rod 200, such that the multi-level cantilever sensors 100 adopt a multi-level flagella structure mimicking a mosquito's antennae on both sides of one end of the central rigid rod 200.

[0040] like Figure 2 As shown, the cantilever sensor 100 includes: a flexible bottom layer 10, a flexible top layer 20, and a piezoresistive flexible sensor; the piezoresistive flexible sensor is distributed on the cantilever beam composed of the flexible bottom layer 10 and the flexible top layer 20; as shown... Figure 6 As shown in the embodiment of the present invention, preferably, the piezoresistive flexible sensor includes two layers: a flexible bottom layer circuit 30 disposed on the flexible bottom layer 10 and a flexible upper layer circuit 40 disposed on the flexible upper layer 20. The swing of the cantilever beam will cause the two layers of piezoresistive flexible sensors, the flexible bottom layer circuit 30 and the flexible upper layer circuit 40, to deform, thereby changing the sensor resistance value. By comprehensively evaluating the resistance change of the piezoresistive flexible sensor, information such as the flow direction, flow rate, and flow velocity of the airflow in the flow field can be accurately measured.

[0041] In this embodiment of the invention, the elastic modulus of the central rigid rod 200 should be more than 5 times greater than the elastic modulus of the flexible bottom layer 10, because the central rigid rod plays a supporting role, which allows the sensor to better concentrate the deformation on the biomimetic piezoresistive sensor when it is excited. Figure 2 As shown, the flexible bottom layer 10 of the cantilever sensor 100 has a concave recessed section 11 at its bottom end. Under the action of airflow, the deformation is mainly concentrated in the recessed section 11, and it is relatively lightweight, transferring the external force to the piezoresistive flexible sensor; preferably, as Figure 3As shown, the connection between the flexible bottom layer 10 and the central rigid rod 200 is a rigid connection, and the multi-stage cantilever sensor 100 is fixed on the central rigid rod 200, so that the multi-stage cantilever sensor is fixed on the central rigid rod and arranged in a multi-stage flagella structure that resembles the antennae of a mosquito.

[0042] In this embodiment of the invention, the flexible piezoresistive sensor formed by the two layers of flexible bottom layer circuit 30 disposed on the flexible bottom layer 10 and flexible top layer circuit 40 disposed on the flexible top layer 20 should have the elastic modulus as small as possible. One layer is attached to the flexible bottom layer and the other layer is attached to the flexible top layer. The two layers of sensors are connected together by laser etching and drilling technology to form a series circuit.

[0043] In this embodiment of the invention, by changing the length and thickness of the flexible bottom layer 10, sensors with different sensitivities and ranges can be obtained after calibration with standard wind speed. By installing multi-stage cantilever sensors with different lengths and thicknesses of the flexible bottom layer after the central rigid rod, a biomimetic flow field sensor with higher sensitivity and larger range can be obtained.

[0044] In one embodiment, the high-precision flow field sensor with a multi-level flagella structure inspired by mosquito antennae of the present invention shall include at least eight cantilever sensors. The eight cantilever sensors are arranged sequentially on both sides of one end of the central rigid rod 200 to ensure accurate measurement of the flow direction of the fluid in the flow field. The spacing between the cantilever sensors on the same side shall be greater than the length of the front end of the central rigid rod 200 to ensure that the cantilever sensors do not interfere with each other.

[0045] In one embodiment, the material used to manufacture the central axis rigid rod includes one of copper, steel, and alloy, which allows the central axis rigid rod to have a certain degree of elasticity and reliable use, reducing the risk of breakage.

[0046] In this embodiment of the invention, the flexible bottom layer is made of one of the following flexible materials: paper-based material, PET (polyethylene terephthalate), PVA (polyvinyl alcohol resin), PI (polyimide), PEN (polyethylene naphthalate). The flexible top layer should be one of PDMS (polydimethylsiloxane), silicone, Eco-flex (silicone rubber), or adhesive tape.

[0047] In this embodiment of the invention, the piezoresistive flexible sensor is a flexible substrate with an extremely low elastic modulus. Because the resistance is distributed on one side of the flexible substrate, the electrical signal changes differently only when the resistance changes during stretching and compression. The piezoresistive flexible sensor is one of the following: a paper-based piezoresistive sensor, a PDMS (polydimethylsiloxane) piezoresistive sensor, a silicone piezoresistive sensor, an epoxy resin piezoresistive sensor, or an Ecoflex (silicone rubber) piezoresistive sensor. Due to its low elastic modulus, the flexible sensor formed in this way can generate an electrical signal by deforming along with the flexible substrate when it is excited.

[0048] In this embodiment of the invention, the piezoresistive flexible sensor is distributed on both the flexible bottom layer and the flexible top layer, and the two layers are connected in series by laser etching, so that the entire circuit is connected in series.

[0049] As can be seen from the above, the high-precision flow field sensor with a biomimetic multi-level structure provided by this invention has a larger unfolded sensing area compared to other existing gas flow direction sensors. Therefore, it possesses higher sensing sensitivity and a wider sensing range. This can be confirmed by observing the antennal receptors of mosquitoes. Biologists have discovered that mosquitoes primarily sense the direction and magnitude of changes in airflow through their antennae. The long and short cilia of the antennae work together to accurately sense changes in airflow, and the mosquito antennae possess excellent sensitivity, capable of sensing even extremely subtle changes in airflow. This provides a natural biological blueprint for designing and manufacturing a high-precision flow field sensor with a wide range and high sensitivity, inspired by the multi-level flagellar structure of mosquito antennae.

[0050] like Figure 4 and Figure 5 As shown, Figure 4 This invention relates to the different resistance changes when subjected to forward and reverse excitation by a micro airflow. Figure 5 This is a graph showing the resistance change of the present invention when subjected to a reverse wind speed of 6.14 m / s.

[0051] Based on the high-precision flow field sensor with a multi-level flagellar structure mimicking mosquito antennae described in the above embodiments, this invention also provides a sensing and measurement method for the high-precision flow field sensor with a multi-level flagellar structure mimicking mosquito antennae, comprising the following steps:

[0052] When the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae senses external flow excitation, the flexible bottom layer 10 deforms as a whole due to its small elastic modulus and large sensing area, and due to the presence of the recessed section 11. The deformation is mainly concentrated in the recessed section 11. The flexible bottom layer circuit 30, flexible top layer 20, and flexible top layer circuit 40 attached to the flexible bottom layer 10 also deform accordingly.

[0053] When the high-precision flow field sensor with a multi-level flagella structure mimicking a mosquito's antennae deforms towards the side covering the sensor, the overall resistance of the flexible bottom layer circuit 30 and the flexible top layer circuit 40 decreases due to compression; conversely, if deformation occurs towards the other side, the resistance increases. By detecting the change in resistance, the flow direction, flow rate, and velocity information of the airflow within the flow field can be determined. For example, when a resistance change of 200 is detected, the flow velocity can be determined to be 6.14 m / s and the flow rate to be 30.9456 m³ / s. 3 / h, the flow direction needs to be seen in the specific resistance change graph (refer to...). Figure 4 When the detected resistance change is 0.05, the flow velocity can be determined to be 0.07 m / s and the flow rate to be 0.3528 m³ / s. 3 / h, the flow direction needs to be seen in the specific resistance change graph (refer to...). Figure 4 ).

[0054] Specifically, by detecting the change in resistance of the series circuit formed by the two layers of sensors connected together (the flexible bottom layer circuit 30 and the flexible top layer circuit 40), the flow direction, flow rate, and velocity information of the airflow in the flow field are determined. Figure 5 As shown, Figure 5 This is a graph showing the resistance change of the present invention under a wind speed of 6.14 m / s.

[0055] In summary, this invention provides a high-precision flow field sensor and sensing measurement method with a multi-stage flagella structure mimicking a mosquito's antennae. The flow field sensor consists of a central rigid rod and two multi-stage cantilever sensors on either side. Each cantilever sensor comprises a flexible bottom layer, a flexible top layer, and a piezoresistive flexible sensor. The central rigid rod provides fixation and support for the multi-stage cantilever sensors. The flexible bottom layer, made of a high-elasticity modulus material, primarily senses changes in airflow in the surrounding flow field and oscillates with the airflow. The flexible top layer, made of a low-elasticity modulus material, primarily enhances the sensitivity of the rigid front section to airflow changes. The piezoresistive flexible sensors are distributed on the cantilever beam composed of the flexible bottom and top layers. The oscillation of the cantilever beam causes deformation of the two piezoresistive flexible sensors, thereby changing the sensor resistance value. By comprehensively evaluating the resistance changes of the piezoresistive flexible sensors, information such as the flow direction, flow rate, and velocity of the airflow within the flow field can be accurately measured.

[0056] This invention utilizes the external force of the fluid in the airflow field to cause the flexible bottom layer to oscillate, simultaneously deforming the upper flexible layer. Due to the presence of a contraction, the deformation occurs primarily at the contraction point. This excites the two-layer piezoresistive flexible sensor, affecting its overall resistance. The flow velocity, direction, and flow rate are obtained from the change in resistance value. By changing parameters such as the size, thickness, and aspect ratio of the flexible bottom layer, smaller changes in the flow field can be detected, thereby improving the detection accuracy and range of the gas flow field sensor.

[0057] It should be understood that the application of the present invention is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae, characterized in that, include: A central rigid rod and a multi-stage cantilever sensor arranged on both sides of one end of the central rigid rod; The multi-stage cantilever sensor is set on both sides of one end of the central rigid rod using a multi-stage flagella structure that mimics the antennae of a mosquito. The cantilever sensor includes: a flexible bottom layer, a flexible top layer, and a piezoresistive flexible sensor; the piezoresistive flexible sensor is distributed on the cantilever beam composed of the flexible bottom layer and the flexible top layer; The flexible bottom layer of the cantilever sensor has a concave recessed section at the bottom end, which is used to concentrate the deformation and transfer the external force to the piezoresistive flexible sensor. When the cantilever beam swings, it causes the piezoresistive flexible sensor to deform, thereby changing the resistance value of the piezoresistive flexible sensor.

2. The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae as described in claim 1, characterized in that, The piezoresistive flexible sensor comprises two layers: a flexible bottom layer circuit disposed on a flexible bottom layer and a flexible top layer circuit disposed on a flexible top layer.

3. The high-precision flow field sensor with a multi-level flagellar structure mimicking mosquito antennae as described in claim 2, characterized in that, The two layers of sensors formed by the flexible bottom circuit and the flexible top circuit are connected together by laser etching and drilling technology to form a series circuit. The swaying of the cantilever beam causes deformation of the two layers of piezoresistive flexible sensors, namely the flexible bottom layer circuit and the flexible top layer circuit, thereby changing the sensor resistance value.

4. The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae as described in claim 1, characterized in that, The elastic modulus of the central rigid rod is more than 5 times greater than that of the flexible bottom layer 10.

5. The high-precision flow field sensor with a multi-level flagellar structure mimicking mosquito antennae according to claim 1, characterized in that, The cantilever sensor is rigidly connected to the central rigid rod through the flexible bottom layer, so as to fix the multi-stage cantilever sensor on the central rigid rod in a multi-stage flagella structure that mimics the antennae of a mosquito.

6. The high-precision flow field sensor with a multi-level flagellar structure mimicking mosquito antennae according to claim 1, characterized in that, The multi-stage cantilever sensor includes eight cantilever sensors, which are arranged sequentially on both sides of one end of the central rigid rod. The spacing between the cantilever sensors on the same side should be greater than the length of the front end of the central rigid rod.

7. The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae according to claim 1, characterized in that, The materials used to manufacture the central rigid rod include one of the following: copper, steel, alloy, and wood.

8. The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae according to claim 1, characterized in that, The flexible bottom layer is made of one of the following materials: paper-based material, polyethylene terephthalate, polyvinyl alcohol resin, polyimide, or polyethylene naphthalate flexible material; the flexible top layer should be one of the following: polydimethylsiloxane, silicone, silicone rubber, or adhesive tape.

9. The high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae according to claim 1, characterized in that, The piezoresistive flexible sensor is one of the following: paper-based piezoresistive sensor, polydimethylsiloxane piezoresistive sensor, silicone piezoresistive sensor, epoxy resin piezoresistive sensor, and silicone rubber piezoresistive sensor; the piezoresistive flexible sensor is based on a flexible substrate.

10. A sensing and measurement method for a high-precision flow field sensor with a multi-level flagellar structure mimicking a mosquito's antennae as described in any one of claims 1-9, characterized in that, Including the following steps: When the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae senses external flow excitation, the flexible bottom layer deforms as a whole due to its sensing area and the setting of the recessed section, and the deformation is concentrated in the recessed section. The flexible bottom layer circuit, flexible top layer, and flexible top layer circuit attached to the flexible bottom layer also deform accordingly. When the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae deforms towards the side covering the sensor, the overall resistance of the flexible bottom layer circuit and the flexible top layer circuit decreases due to compression. Conversely, when the high-precision flow field sensor with a multi-level flagella structure mimicking mosquito antennae deforms towards the other side covering the sensor, the resistance increases. By detecting the change in resistance value of the series circuit formed by connecting the flexible bottom layer circuit and the flexible top layer circuit together, the flow direction, flow rate, and flow velocity information of the airflow in the flow field can be determined.

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