Multi-furnace structure

Abstract

The application discloses a multi-furnace structure which comprises a rack, heating devices, a heat insulation material piece and a support assembly. The rack is provided with a containing cavity. The heating devices are multiple, and the multiple heating devices are sequentially arranged in the containing cavity. The heat insulation material piece is filled between the inner wall of the containing cavity and the heating devices. The support assembly is arranged in the containing cavity to support the heating devices. The multi-furnace structure can better avoid the collapse of the heating devices, and the maintenance and transportation costs are both low.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing equipment technology, and in particular to a multi-furnace structure. Background Technology

[0002] In existing technologies, the furnace body typically consists of heating modules, insulation cotton, and a metal outer shell. During manufacturing, the heating modules are first wrapped with insulation cotton, and then the metal outer shell is used to tighten the insulation cotton, ensuring a tight fit. This process is difficult to implement, and the insulation cotton is compressed and deformed by the weight of the heating modules, causing the lower insulation to become thinner and the upper insulation to have gaps. This can easily lead to the collapse of the heating modules. Furthermore, the furnace requires a wooden crate for transport, resulting in high transportation costs. In addition, existing furnace bodies usually contain multiple heating modules spliced ​​along their circumference. Due to their structural characteristics, if one heating module fails, the entire furnace body needs to be replaced, leading to very high maintenance costs. Summary of the Invention

[0003] The purpose of this invention is to propose a multi-furnace structure that can better prevent the collapse of the heating device and has lower maintenance and transportation costs.

[0004] To achieve the above-mentioned technical effects, the technical solution of the present invention is as follows:

[0005] This invention discloses a multi-furnace structure, comprising: a frame having a receiving cavity; multiple heating devices arranged sequentially within the receiving cavity; a heat insulation material filling the space between the inner wall of the receiving cavity and the heating devices; and a support assembly disposed within the receiving cavity to support the heating devices.

[0006] In some embodiments, there are multiple receiving cavities, which are spaced apart, and the support assembly is provided on the bottom wall of each receiving cavity.

[0007] In some specific embodiments, the support assembly includes a support base and a support rod, the support base being connected to the bottom wall of the receiving cavity, and the support rod being mounted on the support base and used to support the heating device.

[0008] In some more specific embodiments, the support rod is an insulating component, or the surface of the support rod that contacts the heating device is provided with an insulating layer.

[0009] In some embodiments, the support components include a plurality of components spaced apart.

[0010] In some embodiments, the frame includes: a plurality of partitions spaced apart; and two closures, each closure being perpendicular to the partitions; wherein both ends of each partition are connected to the closure.

[0011] In some specific embodiments, the enclosure is provided with at least one openable and closable door.

[0012] In some embodiments, the support assembly includes a pair of support members, the two ends of which are respectively connected to two opposite sidewalls of the receiving cavity, and the pair of support members are respectively supported at both ends of the heating device along its length.

[0013] In some embodiments, the support assembly includes a connector connecting two adjacent heating devices and between the heating devices on both sides and the top wall of the receiving cavity.

[0014] In some embodiments, the multi-furnace structure further includes a wiring board disposed on the frame, the wiring board being used to lead out the leads of the heating device.

[0015] In some embodiments, the multi-furnace structure further includes a sealing plate and a furnace door, which are respectively connected to opposite sides of the frame to close the open end of the receiving cavity.

[0016] The advantages of the multi-furnace structure of this invention are as follows: Since multiple heating devices are installed within the frame, the frame can act as transport packaging during transportation, reducing transportation costs; Because the heating devices are supported by support components, no insulation material is needed, reducing the possibility of thermal collapse; and since insulation material is filled in after the heating devices are fixed, installation is convenient, improving the assembly efficiency of the multi-furnace structure; Since multiple heating devices are arranged sequentially, if a malfunction occurs and replacement is needed, only the corresponding heating device needs to be removed, facilitating heating device replacement.

[0017] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the multi-furnace structure of Embodiment 1 of the present invention;

[0019] Figure 2 This is a schematic diagram of the multi-furnace structure of Embodiment 1 of the present invention from another direction;

[0020] Figure 3This is a schematic diagram of the multi-furnace structure of Embodiment 2 of the present invention.

[0021] Figure label:

[0022] 1. Frame; 11. Partition; 12. Enclosure;

[0023] 2. Heating device; 21. Receptacle;

[0024] 3. Thermal insulation materials;

[0025] 4. Support components; 41. Support base; 42. Support rod;

[0026] 5. Terminal block. Detailed Implementation

[0027] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0028] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0029] Furthermore, features specified as "first" or "second" may explicitly or implicitly include one or more of those features, used to distinguish and describe features, without any order or emphasis. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0030] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0031] The following is for reference. Figures 1-3 The specific structure of the multi-furnace structure in an embodiment of the present invention is described.

[0032] This invention discloses a multi-furnace structure, such as Figures 1-2 As shown, the multi-furnace structure of this embodiment includes a frame 1, heating devices 2, heat insulation material 3, and a support assembly 4. The frame 1 is provided with a receiving cavity. Multiple heating devices 2 are arranged sequentially within the receiving cavity. Each heating device 2 has a receiving cavity 21 for accommodating the material to be processed. The heat insulation material 3 is filled between the inner wall of the receiving cavity and the heating device 2. The support assembly 4 is located within the receiving cavity to support the heating device 2. It can be understood that, since multiple heating devices 2 are installed within the frame 1, the frame 1 can act as transport packaging during transportation, reducing transportation costs. Since the heating devices 2 are supported by the support assembly 4, they do not require the support of the heat insulation material 3, reducing the possibility of thermal collapse. Furthermore, the heat insulation material 3 is filled after the heating devices 2 are fixed, facilitating installation and improving the assembly efficiency of the multi-furnace structure. Since multiple heating devices 2 are arranged sequentially, replacement can be achieved simply by removing the corresponding heating device 2, making it convenient to replace the heating devices 2.

[0033] It should be noted that the cavity formed by the frame 1 can be open in all four directions, or it can be set to be open in a certain direction according to actual needs.

[0034] In some embodiments, such as Figure 1 As shown, there are multiple receiving cavities, spaced apart, with a support assembly 4 on the bottom wall of each cavity. It is understood that each cavity is equipped with multiple heating devices 2. If a malfunction occurs and replacement is needed, only the corresponding heating device 2 needs to be removed and replaced; there is no need to replace the entire multi-furnace structure, saving maintenance time, improving maintenance efficiency, and reducing maintenance costs.

[0035] In some specific embodiments, such as Figure 1 As shown, the support assembly 4 includes a support base 41 and a support rod 42. The support base 41 is connected to the bottom wall of the receiving cavity, and the support rod 42 is mounted on the support base 41 and is used to support the heating device 2. It can be understood that the support base 41 can ensure that the support rod 42 is stably held in a certain position, and the support rod 42 extending along the length direction of the heating device 2 can ensure stable support for the heating device 2 and ensure the stable operation of the multi-furnace structure.

[0036] In some more specific embodiments, the support rod 42 is an insulating component, or the surface of the support rod 42 that contacts the heating device 2 is provided with an insulating layer. This ensures that the support rod 42 stably supports the heating device 2 while preventing the support component and the heating device 2 from becoming electrically connected, thus ensuring the operational stability of the multi-furnace structure. It should be noted that in this embodiment, the support rod 42 can be a ceramic component or a metal component, with the outer peripheral surface of the metal component having an insulating coating or being covered with insulating and heat-insulating cotton.

[0037] In some embodiments, the support assembly 4 includes a plurality of spaced-apart components. This enhances the support capacity for the heating device 2, ensuring that the heating device 2 can be stably held within the receiving cavity.

[0038] In some embodiments, such as Figure 1 As shown, the frame 1 includes multiple partitions 11 and enclosing sections 12. The partitions 11 are spaced apart, and there are two enclosing sections 12, each perpendicular to one of the partitions 11. Both ends of each partition 11 are connected to an enclosing section 12. It is understood that using vertically staggered partitions 11 and enclosing sections 12 to construct the frame 1 simplifies its structure, reduces manufacturing costs, and improves manufacturing efficiency. Furthermore, the frame 1 forms multiple relatively enclosed spaces, allowing for the placement of heating devices 2 and materials to be processed, thus enhancing the compatibility of multi-furnace structures.

[0039] In some embodiments, the enclosure 12 is provided with at least one openable and closable door. Therefore, during actual maintenance, the internal heating device 2 can be removed simply by opening the door, making the operation very convenient.

[0040] In some embodiments, such as Figure 3 As shown, the support assembly 4 includes a pair of support members, with each end of the support member connected to two opposite side walls of the receiving cavity. The pair of support members are respectively supported at both ends of the heating device 2 along its length. It is understood that, compared to the aforementioned support base 41 and support rod 42, which support the heating device 2 along its length, in this embodiment, the pair of support members are respectively supported at both ends of the heating device 2 along its length. This simplifies the structure of the support assembly 4 and reduces the manufacturing cost of the entire multi-furnace structure. Furthermore, it eliminates the need for the partition 11 to divide the space within the frame 1 into multiple sections, simplifying the frame 1's architecture and further reducing the manufacturing cost of the multi-furnace structure.

[0041] Preferably, the support member is an insulating member, or the surface of the support member that contacts the heating device 2 is provided with an insulating layer. This ensures that the support member stably supports the heating device 2 while preventing the support member and the heating device 2 from becoming electrically connected. It should be noted that in this embodiment, the support member can be a ceramic member or a metal member, and the outer peripheral surface of the metal member is provided with an insulating coating or covered with insulating and heat-insulating cotton.

[0042] In some embodiments, the support assembly 4 includes a connector that connects two adjacent heating devices 2, and between the heating devices 2 on both sides and the top wall of the receiving cavity. Thus, the two adjacent heating devices 2 can support each other, thereby further simplifying the overall structure of the multi-furnace structure.

[0043] In some embodiments, such as Figure 1 and Figure 3 As shown, the multi-furnace structure also includes a wiring board 5, which is mounted on the frame 1. The wiring board 5 is used to lead out the leads of the heating device 2. It can be understood that the leads of the heating device 2 can be led to the wiring board 5, gathered together on the wiring board 5, and led out from one side. Alternatively, a wiring hole can be opened on either side of the sealing plate of the frame 1, or a hole can be opened on the furnace door installed on the front side of the frame 1. The specific lead-out location is determined according to the overall furnace frame. This facilitates the lead-out of the heating device 2 and ensures that the heating device 2 can be stably powered.

[0044] In some embodiments, the multi-furnace structure further includes a sealing plate and a furnace door, which are respectively connected to opposite sides of the frame 1 to close the open end of the receiving cavity. Thus, in actual operation, after installing the sealing plate, only the furnace door needs to be closed to make the interior of the multi-furnace structure relatively sealed, ensuring the stable operation of the multi-furnace structure.

[0045] Example 1:

[0046] like Figures 1-2 As shown, the multi-furnace structure of this embodiment includes a frame 1, heating devices 2, heat insulation material 3, support components 4, and a terminal block 5. The frame 1 is provided with six accommodating cavities, which are spaced apart. Each accommodating cavity has a support component 4 on its bottom wall. There are six heating devices 2, each disposed in one accommodating cavity. Each heating device 2 has a accommodating cavity 21 for accommodating the material to be processed. The heat insulation material 3 fills the space between the inner wall of the accommodating cavity and the heating device 2. The support component 4 includes a support base 41 and a support rod 42. The support base 41 is connected to the bottom wall of the accommodating cavity, and the support rod 42 is mounted on the support base 41 and is used to support the heating device 2. The terminal block 5 is disposed on the frame 1, and is disposed one-to-one with each heating device 2, and is used to lead out the leads of the heating device 2.

[0047] Example 2:

[0048] like Figure 3As shown, the multi-furnace structure of this embodiment includes a frame 1, heating devices 2, heat insulation material 3, support assembly 4, and wiring board 5. The frame 1 is provided with a receiving cavity. There are six heating devices 2, which are spaced apart in the receiving cavity. Each heating device 2 has a receiving cavity 21 for receiving the material to be processed. The heat insulation material 3 fills the space between the inner wall of the receiving cavity and the heating device 2. The support assembly 4 includes paired support members, with both ends of the support members connected to two opposite side walls of the receiving cavity. The paired support members support the two ends of the heating device 2 along its length. The wiring board 5 is provided on the frame 1, and is provided one-to-one with the heating device 2, and is used to lead out the leads of the heating device 2.

[0049] The advantages of the multi-furnace structure in Embodiment 1 and Embodiment 2 are as follows:

[0050] First: The frame 1 is equipped with multiple heating devices 2, which facilitates transportation. The frame 1 can also serve as a transport package, reducing transportation costs.

[0051] Second: The heating device 2 is supported by the support component 4, eliminating the need for the insulation material component 3, thus reducing the possibility of thermal collapse;

[0052] Third: After the heating device 2 is fixed, the heat insulation material 3 is filled in, which facilitates installation and improves the assembly efficiency of the multi-furnace structure.

[0053] Fourth: It facilitates the replacement of heating device 2. Multiple heating devices 2 are set at intervals. When replacing, you only need to take out the corresponding heating device 2.

[0054] In the description of this specification, references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0055] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A multi-furnace structure, characterized in that, include: A frame (1) is provided with a receiving cavity; Heating device (2), wherein there are multiple heating devices (2), and the multiple heating devices (2) are arranged sequentially in the receiving cavity, and the heating device (2) has a receiving cavity (21) for receiving the material to be processed; Thermal insulation material component (3), which fills the space between the inner wall of the receiving cavity and the heating device (2); Support assembly (4), the support assembly (4) being disposed within the receiving cavity to support the heating device (2); wherein, The accommodating cavity is multiple, and the multiple accommodating cavities are spaced apart. The support component (4) is provided on the bottom wall of each accommodating cavity. The support assembly (4) includes a pair of support members, the two ends of which are respectively connected to two opposite side walls of the receiving cavity, and the pair of support members are respectively supported at both ends of the heating device (2) along its length. The support assembly (4) includes a connector that connects two adjacent heating devices (2) and the heating devices (2) located on both sides to the top wall of the receiving cavity.

2. The multi-furnace structure according to claim 1, characterized in that, The support assembly (4) includes a support base (41) and a support rod (42). The support base (41) is connected to the bottom wall of the receiving cavity, and the support rod (42) is installed on the support base (41) and is used to support the heating device (2).

3. The multi-furnace structure according to claim 2, characterized in that, The support rod (42) is an insulating component, or the surface of the support rod (42) that contacts the heating device (2) is provided with an insulating layer.

4. The multi-furnace structure according to claim 1, characterized in that, The support component (4) includes multiple components spaced apart.

5. The multi-furnace structure according to any one of claims 2-4, characterized in that, The rack (1) includes: The partition (11) is a plurality of partitions (11), and the plurality of partitions (11) are arranged at intervals; The closure part (12) is two in number, and each closure part (12) is arranged perpendicularly to the partition part (11); wherein both ends of each partition part (11) are connected to the closure part (12).

6. The multi-furnace structure according to claim 5, characterized in that, The enclosure (12) is provided with at least one openable and closable door.

7. The multi-furnace structure according to claim 1, characterized in that, The multi-furnace structure also includes a wiring board (5), which is mounted on the frame (1) and is used to lead out the leads of the heating device (2).

8. The multi-furnace structure according to claim 1, characterized in that, The multi-furnace structure also includes a sealing plate and a furnace door, which are respectively connected to the opposite sides of the frame (1) to close the open end of the receiving cavity.

Images