A high-precision movable lens adjusting device

Abstract

The present invention is a high-precision movable lens adjusting device, which comprises a driving hinge, an outer lens barrel (2), a lens holder (3), a lens (4), an auxiliary support hinge, a motor, a ball head rod and a ball head end cap. The driving hinge is installed on the outer lens barrel (2), and its upper end is connected to the lens holder (3). The lens (4) is installed on the lens holder (3). The motor is installed on the driving hinge and is connected to the ball head rod at the front end, and the front end face of the ball head rod is tangent to the inner end face of the ball head end cap. The auxiliary support hinge is symmetrically arranged with the driving hinge and is fixed on the outer lens barrel (2). The motor drives the ball head rod to move, and the generated driving force is transmitted to the lens holder (3) through the driving hinge, driving the lens (4) to move. The two motors are respectively driven to achieve the adjustment of the X-direction and Y-direction displacements of the lens. The high-precision movable lens adjusting device provided by the present invention has high adjustment precision, good repeatability and strong stability, and can realize the X-direction and Y-direction adjustments of the lens in a limited space in the horizontal direction.

Description

Technical Field

[0001] The present invention is used in the technical field of projection lithography machines, and relates to a high-precision movable lens adjusting device, which can be used for two-degree-of-freedom adjustment in the X and Y directions of special lenses in a projection objective lens. Background Art

[0002] With the rapid development of large-scale integrated circuits, the demand for high-precision projection lithography machines is increasing day by day. Due to the limitations of optical and mechanical processing levels, manufacturing and assembly errors of lenses, and changes in the use environment (temperature, pressure, etc.), the imaging quality of the projection objective lens will decline. In order to improve the imaging quality in real time during the service process of the projection objective lens, it is necessary to adjust specific lenses in the objective lens in two degrees of freedom (X and Y directions). Summary of the Invention

[0003] The purpose of the present invention is to provide a high-precision movable lens adjusting device, which has high precision, good repeatability, strong stability, and good adaptability to the installation environment, can compensate in real time for image quality changes caused by lens processing and assembly errors and environmental changes, and ensure the imaging quality of the objective lens.

[0004] To achieve the above object, the technical solution adopted by the present invention is as follows: a high-precision movable lens adjusting device, which device comprises: a driving hinge, an outer lens barrel 2, a lens holder 3, a lens 4, an auxiliary support hinge, a motor, a ball head rod and a ball head end cap. The driving hinge comprises a first driving hinge 11 and a second driving hinge 12; the auxiliary support hinge comprises a first auxiliary support hinge 51 and a second auxiliary support hinge 52; the motor comprises a first motor 61 and a second motor 62; the ball head rod comprises a first ball head rod 71 and a second ball head rod 72; the ball head end cap comprises a first ball head end cap 81 and a second ball head end cap 82. The lens 4 is provided with three steps, namely a first step A, a second step B and a third step C. The first driving hinge 11 and the second driving hinge 12 have the same structure and are both installed on the outer lens barrel 2. The upper end surfaces 11a of the first driving hinge 11 and 12a of the second driving hinge 12 are connected to the lower end surface 3a of the lens holder 3. The lens 4 is installed on the upper end surface 3b of the lens holder 3 through the first step A, the second step B and the third step C. The auxiliary support hinge is fixed on the outer lens barrel 2. The upper end surfaces 51a of the first auxiliary support hinge 51 and 52a of the second auxiliary support hinge 52 are connected to the lower end surface 3a of the lens holder 3. The first motor 61 and the second motor 62 are respectively installed on the first driving hinge 11 and the second driving hinge 12 and are respectively connected to the first ball head rod 71 and the second ball head rod 72 at the front ends. The spherical surfaces 71a of the first ball head rod 71 and 72a of the second ball head rod 72 are respectively in contact with the main driving surfaces 11b of the first driving hinge 11 and 12b of the second driving hinge 12 and are tangent to the inner end surfaces 81a of the first ball head end cap 81 and 82a of the second ball head end cap 82. The first ball head end cap 81 and the second ball head end cap 82 are respectively fixed on the reverse driving surfaces 11c of the first driving hinge 11 and 12c of the second driving hinge 12. The motor 61 drives the ball head rod 71 to move, and the generated driving force is transmitted to the lens holder 3 through the driving hinge 11, driving the lens holder 3 to move, and thus driving the lens 4 to move. The two motors are respectively driven, and the X-direction and Y-direction displacement adjustment of the lens can be realized. The driving high-precision movable lens adjusting device provided by the present invention has high adjustment precision, good repeatability and strong stability, and can realize the X-direction and Y-direction adjustment of the lens in a limited space in the horizontal direction.

[0005] Further, the structures of the two driving hinges are completely the same and are distributed at 90°, respectively realizing the translational movement in the X-direction and the Y-direction, and simultaneously in the orthogonal direction.

[0006] Further, the driving hinge includes seven fulcrums on the side, namely the first fulcrum H1, the second fulcrum H2, the third fulcrum H3, the fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6, and the seventh fulcrum H7. The main driving surface of the driving hinge is located between the second fulcrum H2 and the third fulcrum H3. The first fulcrum H1, the second fulcrum H2, and the third fulcrum H3 together form a force-saving mechanism to amplify the driving force and simultaneously reduce the driving displacement. The fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6, and the seventh fulcrum H7 form a parallelogram mechanism to guide the X-direction and Y-direction movements of the upper end surface of the driving hinge.

[0007] Further, the front surface of the driving hinge is provided with the eighth fulcrum H8, the ninth fulcrum H9, the tenth fulcrum H10, and the eleventh fulcrum H11, forming a parallelogram mechanism to ensure the flexibility of the driving hinge in the direction perpendicular to the driving direction.

[0008] Further, the structures of the two auxiliary support hinges are exactly the same, and they are symmetrically arranged with the two driving hinges respectively, and both can achieve translational movements in the X-direction and Y-direction.

[0009] Further, the auxiliary support hinge includes four fulcrums on the side, namely the first fulcrum G1, the second fulcrum G2, the third fulcrum G3, and the fourth fulcrum G4, and includes four fulcrums on the front surface, namely the fifth fulcrum G5, the sixth fulcrum G6, the seventh fulcrum G7, and the eighth fulcrum G8, all of which form parallelogram mechanisms to play auxiliary support and guiding roles for the X-direction and Y-direction movements of the mechanism respectively.

[0010] Further, the first driving hinge, the second driving hinge, the first auxiliary support hinge, and the second auxiliary support hinge are all made of 9Cr18 material and quenched, and at the same time, it is necessary to ensure that their heights are equal.

[0011] The beneficial effects of the present invention are as follows: Both the driving hinge and the auxiliary support hinge are made of elastic metal material 9Cr18 and quenched, having good elasticity; the lateral fulcrums of the driving hinge form a force-saving mechanism to improve the movement accuracy of the device; the front fulcrums of the driving hinge form a parallelogram mechanism to guide the movement in the vertical direction; the auxiliary support hinge has two sets of parallelogram mechanisms to play auxiliary support and guiding roles for the X-direction and Y-direction movements respectively. The movement components are supported by two sets of driving hinges and auxiliary support hinges, making the entire mechanism have good stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The specific structural form of the high-precision movable lens adjusting device described in the present invention will be further described in the form of drawings:

[0013] Figure 1This is a top view of a high-precision movable lens adjusting device of the present invention. Among them, 11 is the first driving hinge, 12 is the second driving hinge, 2 is the outer lens barrel, 3 is the lens holder, 4 is the lens, 51 is the first auxiliary support hinge, 52 is the second auxiliary support hinge, 61 is the first motor, 62 is the second motor, A is the first step, B is the second step, and C is the third step.

[0014] Figure 2 This is a sectional view of a high-precision movable lens adjusting device of the present invention. Among them, 11 is the first driving hinge, 11a is the upper end face of the first driving hinge 11, 11b is the main driving face of the first driving hinge 11, 11c is the reverse driving face of the first driving hinge 11, 12 is the second driving hinge, 12a is the upper end face of the second driving hinge 12, 2 is the outer lens barrel, 3 is the lens holder, 3a is the lower end face of the lens holder 3, 3b is the upper end face of the lens holder 3, 4 is the lens, 51 is the first auxiliary support hinge, 51a is the upper end face of the first auxiliary support hinge, 61 is the first motor, 71 is the first ball head rod, 71a is the spherical surface of the first ball head rod 71, 81 is the first ball head end cap, 81a is the inner end face of the first ball head end cap 81, 82 is the second ball head end cap, and A is the first step.

[0015] Figure 3 This is a partial sectional view of a high-precision movable lens adjusting device of the present invention. Among them, 11 is the first driving hinge, 11a is the upper end face of the first driving hinge 11, 11b is the main driving face of the first driving hinge 11, 11c is the reverse driving face of the first driving hinge 11, 12 is the second driving hinge, 12a is the upper end face of the second driving hinge 12, 12b is the main driving face of the second driving hinge 12, 12c is the reverse driving face of the second driving hinge 12, 2 is the outer lens barrel, 3 is the lens holder, 3a is the lower end face of the lens holder 3, 3b is the upper end face of the lens holder 3, 4 is the lens, 51 is the first auxiliary support hinge, 52 is the second auxiliary support hinge, 61 is the first motor, 62 is the second motor, 71 is the first ball head rod, 71a is the spherical surface of the first ball head rod 71, 72 is the second ball head rod, 72a is the spherical surface of the second ball head rod 72, 81 is the first ball head end cap, 81a is the inner end face of the first ball head end cap 81, 82 is the second ball head end cap, and 82a is the inner end face of the second ball head end cap 82.

[0016] Figure 4 This is a sectional view of the driving hinge of the present invention. Among them, 11a is the upper end face of the first driving hinge 11, 11b is the main driving face of the first driving hinge 11, 11c is the reverse driving face of the first driving hinge 11, 11d is the motor mounting face of the first driving hinge 11, H1 is the first fulcrum, H2 is the second fulcrum, H3 is the third fulcrum, H4 is the fourth fulcrum, H5 is the fifth fulcrum, H6 is the sixth fulcrum, and H7 is the seventh fulcrum.

[0017] Figure 5 This is the front view of the drive hinge according to the present invention. Among them, 1.1 is the slider of the drive hinge 1, 101 is the first fulcrum, 102 is the second fulcrum, 103 is the third fulcrum, 104 is the fourth fulcrum, 105 is the fifth fulcrum, 106 is the sixth fulcrum, and 107 is the seventh fulcrum.

[0018] Figure 6 This is the kinematic schematic diagram of the drive hinge mechanism according to the present invention. Among them, 11c is the reverse drive surface of the first drive hinge 11, H8 is the eighth fulcrum, H9 is the ninth fulcrum, H10 is the tenth fulcrum, and H11 is the eleventh fulcrum.

[0019] Figure 7 This is the side view of the auxiliary support hinge according to the present invention. Among them, G1 is the first fulcrum, G2 is the second fulcrum, G3 is the third fulcrum, and G4 is the fourth fulcrum.

[0020] Figure 8 This is the front view of the auxiliary support hinge according to the present invention. Among them, G5 is the fifth fulcrum, G6 is the sixth fulcrum, G7 is the seventh fulcrum, and G8 is the eighth fulcrum. Detailed implementation manners

[0021] To make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.

[0022] Such as Figure 1 、 Figure 2 And Figure 3As shown in the figure, a high-precision movable lens adjusting device includes a driving hinge, an outer lens barrel 2, a lens holder 3, a lens 4, an auxiliary support hinge, a motor, a ball head rod, and a ball head end cap. The driving hinge includes a first driving hinge 11 and a second driving hinge 12; the auxiliary support hinge includes a first auxiliary support hinge 51 and a second auxiliary support hinge 52; the motor includes a first motor 61 and a second motor 62; the ball head rod includes a first ball head rod 71 and a second ball head rod 72; the ball head end cap includes a first ball head end cap 81 and a second ball head end cap 82. The lens 4 is provided with three steps, namely a first step A, a second step B, and a third step C. The first driving hinge 11 and the second driving hinge 12 have the same structure and are both installed on the outer lens barrel 2. The upper end surfaces 11a of the first driving hinge 11 and 12a of the second driving hinge 12 are connected to the lower end surface 3a of the lens holder 3. The lens 4 is installed on the upper end surface 3b of the lens holder 3 through the first step A, the second step B, and the third step C. The auxiliary support hinge is fixed on the outer lens barrel 2. The upper end surfaces 51a of the first auxiliary support hinge 51 and 52a of the second auxiliary support hinge 52 are connected to the lower end surface 3a of the lens holder 3. The first motor 61 and the second motor 62 are respectively installed on the first driving hinge 11 and the second driving hinge 12, and are respectively connected to the first ball head rod 71 and the second ball head rod 72 at the front end. The spherical surfaces 71a of the first ball head rod 71 and 72a of the second ball head rod 72 are respectively in contact with the main driving surfaces 11b of the first driving hinge 11 and 12b of the second driving hinge 12, and are tangent to the inner end surfaces 81a of the first ball head end cap 81 and 82a of the second ball head end cap 82. The first ball head end cap 81 and the second ball head end cap 82 are respectively fixed on the reverse driving surfaces 11c of the first driving hinge 11 and 12c of the second driving hinge 12.

[0023] As Figure 2As shown, since the structures and principles in the X and Y directions of the mechanism are completely the same, the movement in the X direction is taken as an example for illustration here. The first motor 61, the first driving hinge 11, the first ball head rod 71, the first ball head end cover 81, and the first auxiliary support hinge 51 are all located in the X direction. When the shaft of the first motor 61 extends, it drives the first ball head rod 71 to move forward. The spherical surface 71a of the first ball head rod 71 contacts the inner end surface 81a of the first ball head end cover 81, driving the first ball head end cover 81 to move. Since the first ball head end cover 81 is fixed on the reverse driving surface 11c of the first driving hinge 11, the movement of the first ball head end cover 81 is transmitted to the lens holder 3 through the first driving hinge 11, thereby driving the lens 4 to move in the +X direction. Correspondingly, when the shaft of the first motor 61 shortens, it drives the ball head rod 71 to move backward. The spherical surface 71a of the ball head rod 71 contacts the main driving surface 11b of the first driving hinge 11, driving the first driving hinge 11 to move, and it is transmitted to the lens holder 3 through the first driving hinge 11, thereby driving the lens 4 to move in the -X direction. In this way, the translational movement of the lens 4 in the +X and -X directions can be realized. During this process, as the lens holder 3 moves in the +X and -X directions, the auxiliary support hinge 51a synchronously makes slight movements in the +X and -X directions, and plays a supporting role for the lens in the axial direction, while ensuring the rigidity of the lens in the Y and axial directions. When the two motors are driven separately, the displacement adjustment of the lens in the X and Y directions can be realized. The driving high-precision movable lens adjustment device provided by the present invention has high adjustment precision, good repeatability, and strong stability, and can realize the adjustment of the lens in the X and Y directions within a limited space in the horizontal direction.

[0024] As Figure 4As shown, since the structures and working principles of the two driving hinges are the same, the first driving hinge is taken as an example for illustration here. The first driving hinge is arranged in the X direction, and its side includes seven fulcrums: the first fulcrum H1, the second fulcrum H2, the third fulcrum H3, the fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6, and the seventh fulcrum H7. The first fulcrum H1 and the second fulcrum H2 are rigidly connected in the vertical direction, and the third fulcrum H3 is rigidly connected to the second fulcrum H2 and the fourth fulcrum H4 respectively. The main driving surface of the driving hinge is located between the second fulcrum H2 and the third fulcrum H3. The first fulcrum H1, the second fulcrum H2, and the third fulcrum H3 together form a force-saving mechanism to amplify the driving force and reduce the driving displacement at the same time. The fourth fulcrum H4 and the fifth fulcrum H5 are rigidly connected in the vertical direction, and the sixth fulcrum H6 and the seventh fulcrum H7 are rigidly connected in the vertical direction. The fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6, and the seventh fulcrum H7 form a parallelogram mechanism to guide the forward and backward movement of the upper end surface of the driving hinge. The first driving hinge 11 supports the upper lens holder and the lens through the upper end surface 11a, so that the first driving hinge 11 bears the vertically downward pressure. At the same time, the connection directions of each group of rigidly connected fulcrums (including the first fulcrum H1 and the second fulcrum H2, the fourth fulcrum H4 and the fifth fulcrum H5, the sixth fulcrum H6 and the seventh fulcrum H7) are all in the vertical direction, so that the first driving hinge 11 has better rigidity and stability during the support process.

[0025] As Figure 5 shown, according to the structure of the driving hinge, its mechanism kinematic diagram is obtained. Taking the first driving hinge as an example, it includes the 1 fulcrum 101, the 2 fulcrum 102, the 3 fulcrum 103, the 4 fulcrum 104, the 5 fulcrum 105, the 6 fulcrum 106, and the 7 fulcrum 107. The connecting rod between the 2 fulcrum 102 and the 3 fulcrum 103 is driven to drive the slider 1.1 of the driving hinge 1, and the 4 fulcrum 104, the 5 fulcrum 105, the 6 fulcrum 106, and the 7 fulcrum 107 together form a parallelogram structure to guide the forward and backward movement of the slider 1.1 of the driving hinge 1.

[0026] As Figure 6 shown, taking the first driving hinge as an example, the first driving hinge is arranged in the X direction, and its front is provided with the eighth fulcrum H8, the ninth fulcrum H9, the tenth fulcrum H10, and the eleventh fulcrum H11, forming a parallelogram mechanism. When the lens 4 moves translationally in the Y direction, the parallelogram mechanism of the first driving hinge 11 has flexibility in the Y direction, can guide the Y-direction movement of the lens 4, and at the same time ensure rigidity in the X direction and the axial direction, thereby ensuring its stability.

[0027] As Figure 7As shown, taking the first auxiliary support hinge 51 as an example, the first auxiliary support hinge 51 is arranged in the X direction, and the first fulcrum G1, the second fulcrum G2, the third fulcrum G3, and the fourth fulcrum G4 are arranged on its side, forming a parallelogram mechanism. When the lens 4 moves translationally in the X direction, the parallelogram mechanism on the side of the first auxiliary support hinge 51 has flexibility in the X direction and can guide the movement of the lens 4 in the X direction.

[0028] As Figure 8 shown, taking the first auxiliary support hinge 51 as an example, the first auxiliary support hinge 51 is arranged in the X direction, and the fifth fulcrum G5, the sixth fulcrum G6, the seventh fulcrum G7, and the eighth fulcrum G8 are arranged on its front, thus forming a parallelogram mechanism in the Y direction. When the lens 4 moves translationally in the Y direction, the parallelogram mechanism on the front of the first auxiliary support hinge 51 has flexibility in the Y direction and can guide the movement of the lens 4 in the Y direction, while ensuring rigidity in the X direction and the axial direction, thereby ensuring its stability.

Claims

1. A high-precision movable lens adjusting device, characterized in that: Comprising: A driving hinge, an outer lens barrel (2), a lens holder (3), a lens (4), an auxiliary support hinge, a motor, a ball head rod, and a ball head end cap. The driving hinge includes a first driving hinge (11) and a second driving hinge (12); the auxiliary support hinge includes a first auxiliary support hinge (51) and a second auxiliary support hinge (52); the motor includes a first motor (61) and a second motor (62); the ball head rod includes a first ball head rod (71) and a second ball head rod (72); the ball head end cap includes a first ball head end cap (81) and a second ball head end cap (82). The lens (4) is provided with three steps, namely a first step (A), a second step (B), and a third step (C). The first driving hinge (11) and the second driving hinge (12) have the same structure and are both mounted on the outer lens barrel (2). The upper end surfaces (11a) of the first driving hinge (11) and (12a) of the second driving hinge (12) are connected to the lower end surface (3a) of the lens holder (3). The lens (4) is mounted on the upper end surface (3b) of the lens holder (3) through the first step (A), the second step (B), and the third step (C). The auxiliary support hinge is fixed on the outer lens barrel (2). The upper end surfaces (51a) of the first auxiliary support hinge (51) and (52a) of the second auxiliary support hinge (52) are connected to the lower end surface (3a) of the lens holder (3). The first motor (61) and the second motor (62) are respectively mounted on the first driving hinge (11) and the second driving hinge (12), and are respectively connected to the first ball head rod (71) and the second ball head rod (72) at the front end. The spherical surfaces (71a) of the first ball head rod (71) and (72a) of the second ball head rod are respectively in contact with the main driving surfaces (11b) of the first driving hinge (11) and (12b) of the second driving hinge, and are tangent to the inner end surfaces (81a) of the first ball head end cap (81) and (82a) of the second ball head end cap. The first ball head end cap (81) and the second ball head end cap (82) are respectively fixed on the reverse driving surfaces (11c) of the first driving hinge (11) and (12c) of the second driving hinge. The motor drives the ball head rod to move, and the generated driving force is transmitted through the driving hinge to the lens holder (3), driving the lens holder (3) to move, and thus driving the lens (4) to move. The two motors are respectively driven, and the X-direction and Y-direction displacement adjustment of the lens can be realized; The driving hinge includes seven fulcrums, namely a first fulcrum H1, a second fulcrum H2, a third fulcrum H3, a fourth fulcrum H4, a fifth fulcrum H5, a sixth fulcrum H6, and a seventh fulcrum H7, on the side. The main driving surface of the driving hinge is located between the second fulcrum H2 and the third fulcrum H3. The first fulcrum H1, the second fulcrum H2, and the third fulcrum H3 together form a force-saving mechanism to amplify the driving force and simultaneously reduce the driving displacement. The fourth fulcrum H4, the fifth fulcrum H5, the sixth fulcrum H6, and the seventh fulcrum H7 form a parallelogram mechanism to guide the X-direction and Y-direction movement of the upper end surface of the driving hinge.

2. The high-precision movable lens adjusting device according to claim 1, wherein: The structures of the two driving hinges are exactly the same and are distributed at 90°, respectively realizing translational motions in the X and Y directions, and at the same time in the orthogonal direction.

3. The high-precision movable lens adjusting device according to claim 1, wherein: On the front of the driving hinge, an eighth fulcrum H8, a ninth fulcrum H9, a tenth fulcrum H10, and an eleventh fulcrum H11 are provided to form a parallelogram mechanism, ensuring that the driving hinge has flexibility in the direction perpendicular to the driving direction.

4. The high-precision movable lens adjusting device according to claim 1, wherein: The structures of the two auxiliary support hinges are exactly the same and are symmetrically arranged with the two driving hinges respectively, and both can realize translational motions in the X and Y directions.

5. The high-precision movable lens adjusting device according to claim 1, characterized in that: The auxiliary support hinge includes four fulcrums, namely a first fulcrum G1, a second fulcrum G2, a third fulcrum G3, and a fourth fulcrum G4, on the side, and four fulcrums, namely a fifth fulcrum G5, a sixth fulcrum G6, a seventh fulcrum G7, and an eighth fulcrum G8, on the front, all of which form parallelogram mechanisms and play auxiliary support and guiding roles in the X and Y direction motions of the mechanism respectively.

6. The high-precision movable lens adjusting device according to claim 1, wherein: The first driving hinge, the second driving hinge, the first auxiliary support hinge, and the second auxiliary support hinge are all made of 9Cr18 material and are quenched, and at the same time, their heights need to be ensured to be equal.

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