An electro-optic modulator automated test system

By integrating components such as tunable lasers and polarization controllers into an automated testing system for electro-optic modulators, the problems of limited functionality and low efficiency in electro-optic modulator testing systems have been solved. This system enables integrated testing of multiple performance aspects, improving testing efficiency and product yield.

CN115941034BActive Publication Date: 2025-11-04WUHAN OPTICAL VALLEY INFORMATION OPTOELECTRONICS INNOVATION CENT CO LTD +1
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Patent Information

Application Number
CN202211584235.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-12-10
Publication Date
2025-11-04
Estimated Expiration
2042-12-10

AI Technical Summary

Technical Problem

Existing electro-optic modulator testing systems have limited functionality, low testing efficiency, and cannot test multiple performance aspects simultaneously. Repeated switching of test stations and pin coupling can damage chips, reducing yield and increasing costs.

Method used

Design an automated testing system for electro-optic modulators, including components such as tunable lasers, polarization controllers, optical power meters, optical beam splitters, optical switches, photodetectors, oscilloscopes, and optical wave component analyzers, to achieve integrated testing of DC characteristics, high-frequency characteristics, and bandwidth characteristics through automated programs.

Benefits of technology

A single testing system enables multiple performance tests, improving testing efficiency, reducing costs, and increasing the yield of electro-optic modulators.

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Abstract

The application discloses an automatic test system of an electro-optical modulator, and relates to the field of electro-optical modulator testing for communication, which comprises a first-level test component, a second-level test component and a third-level test component. The first-level test component comprises a tunable laser and a polarization controller connected in sequence. The rear end of the polarization controller is used for connecting a first optical power meter and a to-be-tested electro-optical modulator. The rear end of the to-be-tested electro-optical modulator is connected with a 1x2 optical switch and a second optical power meter. The first-level test component further comprises a current source meter used for being connected with the to-be-tested electro-optical modulator. The second-level test component comprises a photodetector and a second high-frequency switching switch connected in sequence, and a waveform generator, a radio frequency amplifier and a first high-frequency switching switch connected in sequence. The application can greatly improve test efficiency and yield, and is helpful to reduce the production screening cost of the electro-optical modulator and increase the yield of finished products.
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Description

Technical Field

[0001] This invention relates to the field of testing electro-optic modulators for communication, and more specifically to an automated testing system for electro-optic modulators. Background Technology

[0002] Electro-optic modulators for communication are semiconductor devices that convert electrical signals into optical signals. Testing of electro-optic modulators plays a crucial role in device research and development and mass production. Research and development testing helps engineers understand the true performance of the chip, thus providing guidance for device design, improvement, and application. Mass production testing can screen out high-performance devices, improving the yield of the final product.

[0003] Key performance parameters of electro-optic modulators include operating wavelength, insertion loss, polarization-dependent loss, extinction ratio, half-wave voltage, bandwidth, linearity, and modulation loss.

[0004] However, current testing methods typically only allow for testing a single performance characteristic of the electro-optic modulator at a time. Testing other performance characteristics requires changing the test station, leading to low testing efficiency and high costs. Furthermore, repeated handling, pinning, and coupling operations on the chip can damage it, reducing yield. For large-scale mass production testing, due to cost and efficiency considerations, only the modulator's bandwidth is usually tested, failing to accurately assess the electro-optic modulator's performance. This results in lower yields for subsequent packaged products, ultimately increasing packaging costs. Summary of the Invention

[0005] To address the shortcomings of existing technologies, the present invention aims to provide an automated testing system for electro-optic modulators, which can greatly improve testing efficiency and yield, help reduce mass production screening costs of electro-optic modulators, and increase finished product yield.

[0006] To achieve the above objectives, the technical solution adopted by the present invention includes:

[0007] The first-level test assembly includes a tunable laser and a polarization controller connected in sequence. The back end of the polarization controller is used to connect a first optical power meter and an electro-optic modulator under test. The back end of the electro-optic modulator under test is connected to a 1×2 optical switch and a second optical power meter. The first-level test assembly also includes a current source meter for connecting to the electro-optic modulator under test.

[0008] The second-level test component includes a photodetector and a second high-frequency switching device connected in sequence, as well as a waveform generator, an RF amplifier and a first high-frequency switching device connected in sequence. The first high-frequency switching device is connected to the electro-optic modulator under test. The rear end of the second high-frequency switching device is also connected to a spectrum analyzer, a sampling oscilloscope and a real-time oscilloscope, and the waveform generator is also connected to the sampling oscilloscope.

[0009] The third-level test component includes an optical element analyzer, which is connected to both a 1×2 optical switch and a first high-frequency switching switch.

[0010] Based on the above technical solutions,

[0011] The first-level test assembly also includes a first optical beam splitter located at the rear end of the polarization controller, and a second optical beam splitter located at the rear end of the electro-optic modulator under test.

[0012] The front end of the first optical beam splitter is connected to a polarization controller, and the rear end is connected to a first optical power meter and an electro-optic modulator under test.

[0013] The front end of the second optical beam splitter is connected to the electro-optic modulator under test, and the rear end is connected to the second optical power meter and the 1×2 optical switch.

[0014] Based on the above technical solution, the automated testing system for electro-optic modulators uses the devices in the first-level testing component, the second-level testing component, and the third-level testing component to realize the DC characteristic test, high-frequency characteristic test, and bandwidth characteristic test of the electro-optic modulator under test.

[0015] Based on the above technical solution, the DC characteristics of the electro-optic modulator under test are tested through the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter and 1×2 optical switch in the first-level test component.

[0016] Based on the above technical solution, the high-frequency characteristics of the electro-optic modulator under test are tested by using the photodetector, second high-frequency switching switch, waveform generator, RF amplifier, first high-frequency switching switch, spectrum analyzer, sampling oscilloscope and real-time oscilloscope in the second-level test assembly, and the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter and 1×2 optical switch in the first-level test assembly.

[0017] Based on the above technical solution, the bandwidth characteristics of the electro-optic modulator under test are tested by using the optical wave component analyzer in the third-level test assembly, and the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter and 1×2 optical switch in the first-level test assembly.

[0018] Based on the above technical solution, a test computer is also included, which is connected to an optical wave component analyzer, a first high-frequency switching switch, a tunable laser, a polarization controller, a current source meter, a first optical power meter, a second optical power meter, a 1×2 optical switch, a waveform generator, a second high-frequency switching switch, a spectrum analyzer, a sampling oscilloscope, and a real-time oscilloscope.

[0019] Based on the above technical solution, the test computer is connected to the optical wave component analyzer, the first high-frequency switching switch, the tunable laser, the polarization controller, the current source meter, the first optical power meter, the second optical power meter, the 1×2 optical switch, the waveform generator, the second high-frequency switching switch, the spectrum analyzer, the sampling oscilloscope, and the real-time oscilloscope via GPIB.

[0020] Based on the above technical solutions, the interconnection and automated control of various devices in the electro-optic modulator automated testing system are realized through Python, MATLAB, or LabVIEW.

[0021] Compared with the prior art, the advantages of the present invention are: it can complete the testing of some or all electro-optic modulators under different test conditions in one step with only one test system, without the need for multiple switching of test stations and multiple pin coupling, which greatly improves the testing efficiency and yield, helps to reduce the mass production screening cost of electro-optic modulators and increase the yield of finished products. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of an automated testing system for an electro-optic modulator according to an embodiment of the present invention.

[0024] Figure 2 This is a schematic diagram of the structure for automated wafer-level testing of an electro-optic modulator. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this application, but not all embodiments.

[0026] To address the shortcomings of existing electro-optic modulator testing systems, such as limited testing functionality, low efficiency, inability to test certain performance characteristics, and low reliability, this invention provides an automated electro-optic modulator testing system. This system comprises a tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter, 1×2 optical switch, photodetector, second high-frequency switching switch, waveform generator, RF amplifier, first high-frequency switching switch, spectrum analyzer, sampling oscilloscope, real-time oscilloscope, and optical component analyzer. Through automated programming, combined with a wafer-level automated testing platform or chip sorting testing system, it can perform large-scale testing of some or all key performance characteristics of the electro-optic modulator in one step, effectively improving mass production testing efficiency and reliability, reducing testing costs, and increasing finished product yield.

[0027] See Figure 1 As shown, this embodiment of the invention provides an automated testing system for electro-optic modulators, used to perform performance testing on electro-optic modulators in chips, components, devices, and modules containing electro-optic modulators. The automated testing system for electro-optic modulators includes a first-level testing component, a second-level testing component, and a third-level testing component.

[0028] The first-level test assembly includes a tunable laser and a polarization controller connected in sequence. The back end of the polarization controller is used to connect a first optical power meter and the electro-optic modulator under test (EOT). The back end of the EOT is connected to a 1×2 optical switch and a second optical power meter. The first-level test assembly also includes a current source meter connected to the EOT. The second-level test assembly includes a photodetector and a second high-frequency switching device connected in sequence, as well as a waveform generator, an RF amplifier, and a first high-frequency switching device connected in sequence. The first high-frequency switching device is connected to the EOT. The back end of the second high-frequency switching device is also connected to a spectrum analyzer, a sampling oscilloscope, and a real-time oscilloscope. That is, the spectrum analyzer, the sampling oscilloscope, and the real-time oscilloscope are all connected to the second high-frequency switching device, and the waveform generator is also connected to the sampling oscilloscope. The third-level test assembly includes an optical element analyzer, which is connected to both the 1×2 optical switch and the first high-frequency switching device.

[0029] Furthermore, the first-level test assembly also includes a first optical beamsplitter located at the rear end of the polarization controller, and a second optical beamsplitter located at the rear end of the electro-optic modulator under test; the front end of the first optical beamsplitter is connected to the polarization controller, and the rear end is connected to the first optical power meter and the electro-optic modulator under test; the front end of the second optical beamsplitter is connected to the electro-optic modulator under test, and the rear end is connected to the second optical power meter and the 1×2 optical switch.

[0030] The automated testing system for electro-optic modulators of this invention utilizes devices in the first-level, second-level, and third-level testing components to perform DC characteristic testing, high-frequency characteristic testing, and bandwidth characteristic testing on the electro-optic modulator under test. This forms a DC characteristic testing module, a high-frequency characteristic testing module, and a bandwidth characteristic testing module, which are interconnected and share some equipment. It should be noted that in practical applications, between the bandwidth characteristic testing and high-frequency characteristic testing performed by the optical component analyzer, the bandwidth characteristic testing has a higher priority.

[0031] The DC characteristic testing module mainly includes equipment such as a tunable laser, polarization controller, current source meter, and optical power meter, which can test the operating wavelength, insertion loss, DC extinction ratio, DC half-wave voltage, and polarization-dependent loss of the electro-optic modulator. The high-frequency characteristic testing module adds equipment such as a photodetector, high-frequency switching switch, arbitrary waveform generator, RF amplifier, spectrum analyzer, sampling oscilloscope, and real-time oscilloscope, which can test the linearity, RF half-wave voltage, and eye diagram parameters of the electro-optic modulator. The bandwidth characteristic testing module additionally adds a 1×2 optical switch and an optical wave component analyzer, which can test the bandwidth characteristics of the electro-optic modulator.

[0032] Specifically, the DC characteristics of the electro-optic modulator under test are tested using the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter, and 1×2 optical switch in the first-level test components.

[0033] The high-frequency characteristics of the electro-optic modulator under test are tested using the photodetector, second high-frequency switch, waveform generator, RF amplifier, first high-frequency switch, spectrum analyzer, sampling oscilloscope and real-time oscilloscope in the second-level test assembly, and the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter and 1×2 optical switch in the first-level test assembly.

[0034] The bandwidth characteristics of the electro-optic modulator under test are tested using the optical wave component analyzer in the third-level test assembly, and the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter and 1×2 optical switch in the first-level test assembly.

[0035] Furthermore, the automated testing system for electro-optic modulators in this embodiment of the invention also includes a test computer, which is connected to an optical component analyzer, a first high-frequency switching switch, a tunable laser, a polarization controller, a current source meter, a first optical power meter, a second optical power meter, a 1×2 optical switch, a waveform generator, a second high-frequency switching switch, a spectrum analyzer, a sampling oscilloscope, and a real-time oscilloscope. The test computer is connected to the optical component analyzer, the first high-frequency switching switch, the tunable laser, the polarization controller, the current source meter, the first optical power meter, the second optical power meter, the 1×2 optical switch, the waveform generator, the second high-frequency switching switch, the spectrum analyzer, the sampling oscilloscope, and the real-time oscilloscope via GPIB (General-Purpose Interface Bus).

[0036] The automated testing system for electro-optic modulators of this invention is flexibly applicable to chip-level testing systems, wafer-level automated testing systems, chip mass production sorting and testing systems, optical module testing systems, etc. The interconnection and automated control of various devices in the automated testing system can be achieved through Python (a computer programming language), MATLAB (a mathematical software), or LabVIEW (a laboratory virtual instrument engineering platform). Furthermore, based on actual needs, single or multiple required performance parameters can be flexibly selected for testing, and testing equipment can be added or removed as needed to improve testing efficiency and reduce testing costs.

[0037] For the present invention as follows Figure 1 The automated testing system for electro-optic modulators shown can complete the testing of some or all electro-optic modulators under different test conditions in one step with only one test system. It eliminates the need for multiple test station switching and multiple pin coupling, greatly improving testing efficiency and yield. This helps reduce the mass production screening cost of electro-optic modulators and increase the yield of finished products.

[0038] The automated testing system for electro-optic modulators of the present invention will be described below with reference to specific examples.

[0039] Example 1: Wafer-level automated testing for electro-optic modulators. The wafer-level automated testing platform can quickly and efficiently measure each chip on the wafer and automatically record and save the original test data. It can complete automated mapping tests, meeting the needs of high-end research and large-scale mass production.

[0040] By employing a wafer-level automated testing platform in conjunction with the electro-optic modulator automated testing system of this invention, the insertion loss, DC extinction ratio, DC half-wave voltage, polarization-dependent loss, bandwidth, and other data of all electro-optic modulators on a single wafer can be tested in one step under different test conditions. Figure 2 The hardware connection structure shown is implemented using the following steps:

[0041] S1: Connect the electro-optic modulator automated test system of the present invention to the wafer-level automated test system;

[0042] S2: Select the test system configuration according to the test requirements, debug the automated test program, and set the items to be tested, test parameters, filtering thresholds, etc.

[0043] S3: Calibrate the optical component analyzer and debug various devices;

[0044] S4: Place the wafer under test into the wafer test stage chuck, calibrate the wafer position, import the wafer device under test position information, and adjust the positions of the optical probes, RF probes, and DC probes required for testing to ensure that pin insertion and coupling can be performed normally.

[0045] S5: The wafer test stage uses chuck control to move the wafer to the position of the chip under test and start the test;

[0046] S6: Control the RF pin holder to insert the probe into the RF electrode of the electro-optic modulator, control the DC probe to insert into the DC electrode, control the optical probe pin holder to complete optical coupling, and adjust the polarization state of the polarization controller to maximize the output optical power of the modulator.

[0047] S7: Control the current source meter to scan the output optical power of the modulator under different voltages, i.e., the PV curve, analyze and calculate the insertion loss, DC extinction ratio, and DC half-wave voltage of the electro-optic modulator, record the data and archive it; control the tunable laser to change the light wavelength and test the above parameters under different wavelengths.

[0048] S8: Control the polarization controller, current source meter, and tunable laser; test the polarization-dependent loss of the modulator at different wavelengths; record the data and archive it.

[0049] S9: Turn on the optical component analyzer, complete the S-parameter test under different wavelengths and voltages according to the test requirements, automatically calculate the bandwidth test data under different conditions and summarize and archive it;

[0050] S10: Complete the test, turn off all device outputs, lift the RF probe and coupling probe, control the chuck to move to the next device under test, and start the test;

[0051] S11: After scanning all electro-optic modulators on the wafer, the test is completed. All data is automatically analyzed, a test report is generated, test results are statistically analyzed, a wafer mapping diagram is generated, and information such as the location of failed devices and failed test items is marked.

[0052] Example 2, for the performance verification test of R&D-grade electro-optic modulators, can comprehensively verify the performance of various aspects of the electro-optic modulator. The specific implementation steps are as follows:

[0053] A: Construct an automated testing system for the electro-optic modulator of this invention;

[0054] B: Debug the automated test program to ensure all devices are online;

[0055] C: Calibrate the optical component analyzer and debug various devices;

[0056] D: Place the chip under test into the chip test bench, and adjust the positions of the optical probe, RF probe, and DC probe required for testing to ensure that pin insertion and coupling can be performed normally.

[0057] E: Start testing. Control the RF probe holder to insert the probe into the RF electrode of the electro-optic modulator, control the DC probe to insert into the DC electrode, control the optical probe holder to complete the grating coupling, and adjust the polarization state of the polarization controller to maximize the output optical power of the modulator.

[0058] F: Control the current source meter to scan the output optical power of the modulator under different voltages, i.e., the PV curve, analyze and calculate the insertion loss, DC extinction ratio, and DC half-wave voltage of the electro-optic modulator, record the data and archive it; control the tunable laser to change the light wavelength and test the above parameters under different wavelengths.

[0059] G: Control the polarization controller, current source meter, and tunable laser to test the polarization-dependent loss of the modulator at different wavelengths, record the data and archive it;

[0060] H: Turn on the optical component analyzer, control the first high-frequency switching switch to connect it to the system, control the 1×2 optical switch to input the modulator output light into the optical component analyzer, and complete the S-parameter test under different wavelengths and voltages according to the test requirements. Automatically calculate the bandwidth test data under different conditions and summarize and archive it.

[0061] I: Control the polarization controller and current source meter to make the modulator work in normal state, turn on the waveform generator to output two sine signals near 1GHz, control the first high-frequency switching switch to connect it to the system, control the 1×2 optical switch to input the modulator output light into the photodetector, control the second high-frequency switching switch to connect the photodetector output to the spectrum analyzer, and the test computer automatically reads the data and calculates to complete the modulator linearity test.

[0062] J: Control the polarization controller and current source meter to make the modulator work in normal state, turn on the waveform generator to output a large-swing triangular wave signal, control the first high-frequency switching switch to connect it to the system, control the 1×2 optical switch to input the modulator input light into the photodetector, control the second high-frequency switching switch to connect the photodetector output to the real-time oscilloscope, the test computer automatically reads the data and calculates to complete the modulator RF half-wave voltage test. By changing the frequency value of the triangular wave signal, the RF half-wave voltage at different frequencies can be calculated.

[0063] K: Control the polarization controller and current source meter to make the modulator work in normal state, turn on the waveform generator to output eye diagram signal, control the first high frequency switching switch to connect it to the system, control the 1×2 optical switch to input the modulator input light into the photodetector, control the second high frequency switching switch to connect the photodetector output to the sampling oscilloscope, the test computer automatically reads the data and calculates the eye diagram parameters, and by changing the output code and rate of the waveform generator, the eye diagram test of the modulator under different rates and different code patterns can be completed.

[0064] L: Test complete. All data will be automatically analyzed and a test report will be generated.

[0065] The automated testing system for electro-optic modulators in this invention can complete the testing of key performance of some or all electro-optic modulators under different testing conditions in one step with only one testing system. It eliminates the need for multiple switching of test benches and multiple pin couplings, greatly improving testing efficiency and yield. This helps to reduce the mass production screening cost of electro-optic modulators and increase the yield of finished products.

[0066] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0067] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0068] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. An automated testing system for electro-optic modulators, used for performance testing of electro-optic modulators in chips, components, devices, and modules containing electro-optic modulators, characterized in that, include: The first-level test assembly includes a tunable laser and a polarization controller connected in sequence. The back end of the polarization controller is used to connect a first optical power meter and an electro-optic modulator under test. The back end of the electro-optic modulator under test is connected to a 1×2 optical switch and a second optical power meter. The first-level test assembly also includes a current source meter for connecting to the electro-optic modulator under test. The second-level test component includes a photodetector and a second high-frequency switching device connected in sequence, as well as a waveform generator, an RF amplifier, and a first high-frequency switching device connected in sequence. The first high-frequency switching device is connected to the electro-optic modulator under test. The rear end of the second high-frequency switching device is also connected to a spectrum analyzer, a sampling oscilloscope, and a real-time oscilloscope. The waveform generator is also connected to the sampling oscilloscope. The 1×2 optical switch is connected to the photodetector. The third-level test component includes an optical component analyzer, which is connected to both a 1×2 optical switch and a first high-frequency switching switch. in, The first-level test assembly also includes a first optical beam splitter located at the rear end of the polarization controller, and a second optical beam splitter located at the rear end of the electro-optic modulator under test. The front end of the first optical beam splitter is connected to a polarization controller, and the rear end is connected to a first optical power meter and an electro-optic modulator under test. The front end of the second optical beam splitter is connected to the electro-optic modulator under test, and the rear end is connected to the second optical power meter and the 1×2 optical switch.

2. The automated testing system for electro-optic modulators as described in claim 1, characterized in that: The automated testing system for electro-optic modulators uses devices in the first-level test component, the second-level test component, and the third-level test component to perform DC characteristic testing, high-frequency characteristic testing, and bandwidth characteristic testing on the electro-optic modulator under test.

3. The automated testing system for electro-optic modulators as described in claim 2, characterized in that: The DC characteristics of the electro-optic modulator under test are tested using the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter, and 1×2 optical switch in the first-level test assembly.

4. The automated testing system for electro-optic modulators as described in claim 2, characterized in that: The high-frequency characteristics of the electro-optic modulator under test are tested using the photodetector, second high-frequency switch, waveform generator, RF amplifier, first high-frequency switch, spectrum analyzer, sampling oscilloscope and real-time oscilloscope in the second-level test assembly, and the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter and 1×2 optical switch in the first-level test assembly.

5. The automated testing system for electro-optic modulators as described in claim 2, characterized in that: The bandwidth characteristics of the electro-optic modulator under test are tested using the optical wave component analyzer in the third-level test assembly, and the tunable laser, polarization controller, current source meter, first optical power meter, second optical power meter, first optical beam splitter, second optical beam splitter and 1×2 optical switch in the first-level test assembly.

6. The automated testing system for electro-optic modulators as described in claim 1, characterized in that: It also includes a test computer, which is connected to an optical wave component analyzer, a first high-frequency switching switch, a tunable laser, a polarization controller, a current source meter, a first optical power meter, a second optical power meter, a 1×2 optical switch, a waveform generator, a second high-frequency switching switch, a spectrum analyzer, a sampling oscilloscope, and a real-time oscilloscope.

7. The automated testing system for electro-optic modulators as described in claim 6, characterized in that: The test computer is connected via GPIB to an optical component analyzer, a first high-frequency switching switch, a tunable laser, a polarization controller, a current source meter, a first optical power meter, a second optical power meter, a 1×2 optical switch, a waveform generator, a second high-frequency switching switch, a spectrum analyzer, a sampling oscilloscope, and a real-time oscilloscope.

8. The automated testing system for electro-optic modulators as described in claim 1, characterized in that: Implement the interconnection and automated control of various devices in an automated testing system for electro-optic modulators using Python, MATLAB, or LabVIEW.

Citation Information

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