Fluid control device

Abstract

A fluid control device (10) includes a first plate (21), a frame (22) disposed outward of an outer peripheral end (210) of the first plate (21) with an opening (241, 242) interposed, a link member (23) linking the first plate (21) and the frame (22), a plate member (40) having a through-hole (400) at a portion opposite the first plate (21), and a valve member (60) that regulates a fluid. An outer end (610) of the valve member (60) protrudes outward from the outer peripheral end (210) of the first plate (21). An inner end side of the valve member (60) on a center side of the first plate (21) is fixed to the first plate (21), and the outer end (610) is not fixed. The valve member (60) has a first portion on the outer end side, and a second portion on an inner end side of the first portion. The second portion has a thickness thicker than a thickness of the first portion. The second portion overlaps the outer peripheral end (210) of the first plate (21) when viewed from above.

Description

TECHNICAL FIELD

[0001] The present application relates to a fluid control device that transports fluid in one direction. BACKGROUND

[0002] In Patent Literature 1, a fluid control device in which a pump and a valve are integrated is described. The pump has a pump chamber formed by a diaphragm. The valve has a valve chamber that communicates with the pump chamber.

[0003] A valve film is disposed in the valve chamber. The valve film moves in the valve chamber by the flow of fluid, whereby the fluid is regulated.

[0004] Patent Literature 1: Japanese Patent No. 6536770

[0005] As the structure using a valve film as in the fluid control device described in Patent Literature 1, a configuration in which a valve film is disposed in the pump chamber is also considered. In this case, one end of the valve film in the flow direction of the fluid is fixed to the inner wall of the pump, and the other end is movable. When the fluid flows in a certain direction, the other end of the valve film moves toward the wall surface on which the valve film is fixed, and the fluid is transported. On the other hand, when the fluid is to flow in the opposite direction, the other end of the valve film moves toward the wall surface opposite to the wall surface on which the valve film is fixed, and comes into abutment with the wall surface. Thus, the flow of the fluid is stopped. Therefore, the fluid is regulated.

[0006] However, in the structure in which the valve film is disposed in the pump chamber as such, the portion near the other end of the valve film sometimes comes into contact with the corner portion of the outer peripheral end of the wall that forms the pump chamber. Moreover, if such contact occurs, there is a problem that the valve film is worn or broken. SUMMARY

[0007] Therefore, an object of the present application is to provide a fluid control device that can suppress wear or breakage of a valve film.

[0008] The fluid control device of the present application has a first flat plate having a first opening on the outer side than the outer peripheral end; a frame disposed on the outer side than the outer peripheral end of the first flat plate; a connecting member connecting the first flat plate and the frame; a second flat plate opposing the first flat plate, the frame, and the connecting member, and having a second opening on the portion opposing the first flat plate; a side wall member connecting the frame and the second flat plate, and forming a hollow chamber including the region in which the first flat plate and the second flat plate oppose each other; a driving body mounted to the first flat plate; and a valve member provided on the first surface of the first flat plate on the pump chamber side, and regulating the fluid.

[0009] The outer end of the valve member on the outer peripheral end side of the first flat plate protrudes outward from the outer peripheral end. The inner end side of the valve member on the center side of the first flat plate is fixed to the first flat plate, and the outer end is not fixed. The valve member has a first portion having a first thickness constituting the portion of the outer end side, and a second portion having a second thickness constituting the portion of the inner end side of the first portion. The second thickness is thicker than the first thickness. The second portion overlaps the outer peripheral end.

[0010] In this structure, even if the valve member is bent toward the first flat plate side, the second portion contacts the corner of the first flat plate. Since the second portion is thicker than the first portion, the valve member is less likely to be worn or damaged compared to the case where the first portion contacts the corner of the first flat plate. In addition, since the first portion is thin, it is possible to suppress a decrease in the rectification function required for the valve member.

[0011] According to the present application, it is possible to suppress wear and damage of the valve film. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is an exploded perspective view of a fluid control device according to a first embodiment.

[0013] Figure 2 is a side sectional view showing the structure of the fluid control device according to the first embodiment.

[0014] Figure 3 is an enlarged view of a region including the outer peripheral end of the first flat plate of the fluid control device according to the first embodiment.

[0015] Figure 4 (A) is an enlarged view showing the flow of fluid and the behavior of the valve member in a first state, Figure 4 (B) is an enlarged view showing the flow of fluid and the behavior of the valve member in a second state.

[0016] Figure 5 is a side sectional view showing the structure of a fluid control device according to a second embodiment.

[0017] Figure 6 (A) is a side sectional view showing the structure of a fluid control device according to a third embodiment, Figure 6 (B) is an enlarged view of a region including the outer peripheral end of the first flat plate of the fluid control device.

[0018] Figure 7 is a side sectional view showing the structure of a fluid control device according to a fourth embodiment.

[0019] Figure 8 (A) is a plan view of a plate member for mounting a drive body in a fluid control device according to a fifth embodiment, Figure 8(B) is an enlarged plan view of a portion of a connecting member of the fluid control device.

[0020] Figure 9 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device.

[0021] Figure 10 (A) is a perspective view of the fluid control device. Figure 10 (B) is an enlarged perspective view of a portion of a connecting member of the fluid control device.

[0022] Figure 11 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device.

[0023] Figure 12 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device.

[0024] Figure 13 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device.

[0025] Figure 14 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device. DETAILED DESCRIPTION

[0026] (First Embodiment)

[0027] A fluid control device according to a first embodiment will be described with reference to the drawings. Figure 1 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device. Figure 2 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device. Figure 3 (B) is an enlarged plan view of a portion of a connecting member of the fluid control device.

[0028] As shown in Figs. 1 and 2, the fluid control device 10 includes a plate member 20, a drive body 30, a plate member 40, a side wall member 50, and a valve member 60. Figure 1 Figure 2 Figure 3 As shown in Figs. 1 and 2, the fluid control device 10 includes a plate member 20, a drive body 30, a plate member 40, a side wall member 50, and a valve member 60. ​​

[0029] (Structure of plate member 20)

[0030] The plate member 20 is made of a metal plate or the like, and has a main surface 201 and a main surface 202. The plate member 20 is provided with a first flat plate 21, a frame 22, and a plurality of link members 23. The first flat plate 21, the frame 22, and the plurality of link members 23 are integrally formed using one flat plate, for example.

[0031] The first flat plate 21 is plate-shaped. The first flat plate 21 has an outer peripheral portion including an outer peripheral end 210, and a central portion on a central side from the outer peripheral portion. The central portion is thicker than the outer peripheral portion. The shape (shape viewed in the thickness direction) when viewed from above of the first flat plate 21 is circular. The central portion of the first flat plate 21 protrudes on the main surface 202 side. Conversely, in the first flat plate 21, the main surface 201 is flat at the central portion and the outer peripheral portion including the outer peripheral end.

[0032] The frame 22 is a flat plate, and the shape when viewed from above of the frame 22 is square. An opening is formed in the frame 22. The opening penetrates the flat plate constituting the frame 22 in the thickness direction. The opening is circular when viewed from above, is similar in shape to the outer peripheral shape of the first flat plate 21, and is larger than the outer peripheral shape of the first flat plate 21. The center of the frame 22 coincides with the center of the opening.

[0033] The first flat plate 21 is disposed inside the opening of the frame 22. At this time, the center of the opening coincides with the center of the first flat plate 21. Since the area of the first flat plate 21 is smaller than the area of the opening of the frame 22, even if the first flat plate 21 is disposed inside the opening of the frame 22, an opening remains between the outer peripheral end of the first flat plate 21 and the frame 22.

[0034] The plurality of link members 23 are each beam-shaped. The plurality of link members 23 are disposed in the opening between the first flat plate 21 and the frame 22. The plurality of link members 23 are disposed at intervals from each other along the outer peripheral end 210 of the first flat plate 21.

[0035] The plurality of link members 23 each have a first link portion 231, a second link portion 232, and a third link portion 233. The first link portion 231 is elongated in a radial direction. The radial direction refers to a direction from the outer peripheral end 210 of the first flat plate 21 toward the outer side. The second link portion 232 is arc-shaped when viewed from above (viewed in a direction orthogonal to the main surface 201 and the main surface 202), and extends along the outer peripheral end 210 of the first flat plate 21. The third link portion 233 is elongated in the radial direction.

[0036] One end of the extension direction of the first link member 231 is connected to the outer peripheral end 210 of the first plate 21. The other end of the extension direction of the first link member 231 is connected to the substantially central portion of the extension direction of the second link member 232. Both ends of the extension direction of the second link member 232 are connected to the frame 22 via the third link member 233.

[0037] With this structure, the plurality of link members 23 link the first plate 21 and the frame 22 so that the opening 241 configured to include the region on the first plate 21 side of the second link member 232 and the opening 242 on the region of the frame 22 side of the second link member 232 are provided. These openings 241 and 242 correspond to the "first opening" of the present application.

[0038] Thus, with this structure, the first plate 21 is supported in a bendable vibration state to the frame 22 via the plurality of link members 23.

[0039] The drive body 30 is, for example, a piezoelectric element, and is mounted to the first plate 21. More specifically, the drive body 30 is mounted to the central portion of the first plate 21.

[0040] The plate member 40 has a main surface 401 and a main surface 402. The plate member 40 has a recessed portion recessed from the main surface 401. A plurality of through holes 400 are formed in the bottom of the recessed portion. The plurality of through holes 400 are configured in a circular shape when viewed from above (when viewed in a direction orthogonal to the main surface 401 and the main surface 402). The diameter of the circle in which the plurality of through holes 400 are arranged is smaller than the diameter of the first plate 21. This plate member 40 corresponds to the "second plate" of the present application.

[0041] The plate member 40 is arranged so that the main surface 401 faces the main surface 201 with a distance from the plate member 20. At this time, the plate member 40 is arranged so that the plurality of through holes 400 overlap the first plate 21.

[0042] The side wall member 50 is a ring shape having a hollow 500, and is arranged between the plate member 20 and the plate member 40. The side wall member 50 is connected to the frame 22 and the plate member 40.

[0043] Thus, a hollow chamber surrounded by the plate member 20, the side wall member 50, and the plate member 40 is formed, and functions as a pump chamber 100. The pump chamber 100 communicates with the outside space on the plate member 40 side of the fluid control device 10 through the plurality of through holes 400. In addition, the pump chamber 100 communicates with the outside space on the plate member 20 side of the fluid control device 10 through the plurality of openings 241 and 242.

[0044] The valve member 60 has a valve film 61 and a fixed layer 62. The valve film 61 and the fixed layer 62 are circular. That is, the outer shape of the valve film 61 and the outer shape of the fixed layer 62 are similar to the outer shape (the shape of the outer peripheral end) of the first flat plate 21 and the shape formed by connecting the plurality of second link portions 232 of the link member 23. In addition, the outer shape of the valve film 61 and the outer shape of the fixed layer 62 are larger than the outer shape of the first flat plate 21.

[0045] The valve film 61 is more easily bent than the fixed layer 62. The fixed layer 62 is more easily bent than the first flat plate 21. The relationship of the easiness of bending is adjusted according to the materials and the thicknesses of the valve film 61, the fixed layer 62, and the first flat plate 21. For example, the first flat plate 21 is metal, and the fixed layer 62 has a higher bending elastic modulus than the valve film 61. In addition, the fixed layer 62 is thicker than the valve film 61.

[0046] The valve film 61 is fixed to the main face 201 of the first flat plate 21 by the fixed layer 62. At this time, the center of the valve film 61, the center of the fixed layer 62, and the center of the first flat plate 21 are substantially identical. At this time, since the outer shape of the valve film 61 and the outer shape of the fixed layer 62 are larger than the outer shape of the first flat plate 21, the valve member 60 constituted by the outer shape of the valve film 61 and the outer shape of the fixed layer 62 has a protruding portion that protrudes outward from the outer peripheral end of the first flat plate 21.

[0047] The diameter of the valve film 61 is larger than the diameter of the fixed layer 62. Therefore, a circular region on the center side of the valve film 61 is fixed, and a ring-shaped region on the outer end 610 side is not fixed. In other words, the valve film 61 is fixed to the first flat plate 21 by the fixed layer 62 in a state where the outer end 610 is not fixed. The portion constituted only by the valve film 61 corresponds to the "first portion of the valve member" of the present application, and the stacked portion of the valve film 61 and the fixed layer 62 corresponds to the "second portion of the valve member" of the present application. Furthermore, the portion where the fixed layer 62 abuts against the first flat plate 21 corresponds to the "fixed portion" of the present application.

[0048] The diameter of the fixed layer 62 is larger than the diameter of the first flat plate 21. Therefore, as shown in Figs. 2 and 3, the outer end 620 of the fixed layer 62 is located outward from the outer peripheral end 210 of the first flat plate 21. In other words, the outer end 620 of the fixed layer 62 overlaps the opening 241 when viewed from above. In further other words, when the valve member is viewed from above, the connection portion (the boundary portion) between the first portion of the valve member and the second portion of the valve member does not overlap the first flat plate 21, but is located outward from the outer peripheral end 210 of the first flat plate 21 and overlaps the opening 241. Figure 2 Figure 3 As described above, the fluid control device 10 has the structure in which the valve member 60 is fixed to the first flat plate 21 by the fixed layer 62. Therefore, the fluid control device 10 can be used as a fluid control device that controls the flow of fluid by the valve member 60.

[0049] In such a structure, the fluid control device 10 performs the flow regulation of fluid as follows. Figure 4 ​(A) is an enlarged view showing the flow of fluid and the behavior of the valve member in the first state, Figure 4 (B) is an enlarged view showing the flow of fluid and the behavior of the valve member in the second state.

[0050] As Figure 4 (A) shows, in the first state of the fluid control device 10, fluid is drawn from the outside of the plate member 40 side into the pump chamber 100 via the plurality of through holes 400. The fluid flows within the pump chamber 100 from the central portion of the first flat plate 21 toward the outer peripheral end 210 side (the side wall member 50 side).

[0051] The central side of the valve film 61 is fixed, and the outer end 610 of the valve film 61 is not fixed. Therefore, the valve film 61 is bent toward the first flat plate 21 side, in other words, the opening 241 and the link member 23 side, by the fluid. Thereby, the fluid flows from the pump chamber 100 toward the opening 241, and is discharged from the opening 241 toward the outside of the plate member 20 side. In addition, the fluid is also discharged from the opening 242 toward the outside of the plate member 20 side.

[0052] As Figure 4 (B) shows, in the second state of the fluid control device 10, fluid is drawn from the outside of the plate member 20 side into via the pump chamber 100 via the opening 241 and the opening 242. The fluid flows within the pump chamber 100 from the outer peripheral end 210 side of the first flat plate 21 (the side wall member 50 side) toward the central portion side of the first flat plate 21.

[0053] In this case, the valve film 61 is bent toward the plate member 40 side by the fluid. Then, the portion of the outer end 610 side of the valve film 61 of a prescribed area abuts against the main face 401 of the plate member 40. Thereby, the flow of the fluid toward the central side of the pump chamber 100 is blocked. Therefore, the fluid does not reach the plurality of through holes 400, and the discharge of the fluid toward the outside of the plate member 40 side is prevented.

[0054] In this way, the fluid control device 10 has a flow regulating effect of causing the fluid to flow in one direction.

[0055] The fluid control device 10 also has the following feature. In the fluid control device 10, by having the above structure, the thickness D602 at the position of the valve member 60 that overlaps the outer peripheral end 210 of the first flat plate 21 is thicker than the thickness D601 of the outer end 610 (D602 > D601).

[0056] In this structure, as Figure 4 (A) shows, when the valve film 61 is bent toward the first flat plate 21 side, the portion that contacts the corner portion of the outer peripheral end 210 of the first flat plate 21 is the portion having the thickness D602. That is, the portion that is thicker than the portion including the outer end 610 that is composed of only the valve film 61 contacts the corner portion of the outer peripheral end 210 of the first flat plate 21.

[0057] Therefore, the portion of the valve member 60 that contacts the corner of the outer peripheral end 210 of the first flat plate 21 is harder than the outer end 610, and is less likely to be worn. Thus, the fluid control device 10 can suppress wear and breakage of the valve member 60.

[0058] Further, in such a structure, the laminated portion of the valve film 61 and the fixed layer 62 in the valve member 60 is less likely to be bent. However, the laminated portion is more likely to be bent than the first flat plate 21. Therefore, by appropriately setting the distance by which the fixed layer 62 protrudes from the outer peripheral end 210 of the first flat plate 21 and the distance by which the valve film 61 protrudes from the outer end 620 of the fixed layer 62, it is possible to suppress a decrease in the rectification function of the valve member 60. That is, the fluid control device 10 suppresses wear and breakage, and thus is excellent in reliability, and can achieve a good rectification function.

[0059] Further, in this structure, the fixed layer 62 is bent, and thus the bending stress associated with the valve film 61 is dispersed. Therefore, it is possible to suppress peeling of the fixed layer 62 from the valve film 61 at the outer end 620 of the fixed layer 62, and cracking in the valve film 61.

[0060] Further, in the present embodiment, a manner in which the fixed layer 62 is thicker than the valve film 61 is shown, but the present application is not limited thereto, and it is sufficient that the portion of the valve member 60 that contacts the corner of the outer peripheral end 210 of the first flat plate 21 is thicker than the portion including the outer peripheral end that mainly functions to achieve the rectification function.

[0061] Further, in other words, it is sufficient that the portion of the valve member 60 that contacts the corner of the outer peripheral end 210 of the first flat plate 21 is more likely to be bent than the first flat plate 21, and the portion of the valve member 60 including the outer peripheral end that mainly functions to achieve the rectification function is more likely to be bent than the portion that contacts the corner of the outer peripheral end 210 of the first flat plate 21.

[0062] Further, in the above structure, a manner in which the fixed layer 62 protrudes from the outer peripheral end 210 of the first flat plate 21 is shown. However, the outer end 620 of the fixed layer 62 can coincide with the outer peripheral end 210 of the first flat plate 21. However, by protruding the fixed layer 62 from the outer peripheral end 210 of the first flat plate 21, even if the fixed layer 62 is deviated from the set position of the first flat plate 21, it is possible to suppress the outer end 620 of the fixed layer 62 from being located more toward the center than the outer peripheral end 210 of the first flat plate 21.

[0063] Further, in this structure, the shape of the outer peripheral end 210 of the first flat plate 21, the shape of the outer end 620 of the fixed layer 62, and the shape of the outer end 610 of the valve film 61 are similar shapes, and are circular. Further, the arrangement of the plurality of through holes 400 is also circular. Thus, the flow of the fluid becomes substantially uniform in all directions when viewed from above, and the efficiency of the fluid control device 10 is improved.

[0064] (Second Embodiment)

[0065] A fluid control device according to a second embodiment of the present application will be described with reference to the drawings. Figure 5 (A) is a side sectional view showing the structure of a fluid control device according to the second embodiment,

[0066] As shown in (A) and (B), Figure 5 the fluid control device 10A according to the second embodiment differs from the fluid control device 10 according to the first embodiment in that the recess 241A is provided instead of the opening 241. The other structure of the fluid control device 10A is the same as that of the fluid control device 10, and the description of the same parts will be omitted.

[0067] The recess 241A is arranged between the first plate 21 and the second link part 232 of the link member 23. The recess 241A is a shape recessed from the main face 201 side of the plate member 20. In other words, the recess 241A is a shape in which the opening part on the opposite side to the valve member 60 side of the opening 241 according to the first embodiment is plugged.

[0068] With such a structure, the fluid control device 10A, like the fluid control device 10, can suppress the wear and damage of the valve member 60.

[0069] (Third Embodiment)

[0070] A fluid control device according to a third embodiment of the present application will be described with reference to the drawings. Figure 6 (A) is a side sectional view showing the structure of a fluid control device according to the third embodiment, Figure 6 (B) is an enlarged view of a region of the fluid control device including the outer peripheral end of the first plate.

[0071] As shown in (A) and (B), Figure 6 (A), Figure 6 (B), the fluid control device 10B according to the third embodiment differs from the fluid control device 10 according to the first embodiment in the structure of the valve member 60B. The other structure of the fluid control device 10B is the same as that of the fluid control device 10, and the description of the same parts will be omitted.

[0072] The valve member 60B includes a valve film 61B and a fixing layer 62B. The valve film 61B is fixed to the main face 201 of the first plate 21 by the fixing layer 62B.

[0073] The fixing layer 62B has an outer shape smaller than that of the first plate 21. More specifically, the fixing layer 62B has a diameter smaller than that of the first plate 21.

[0074] The valve film 61 has a first portion including the outer end 610, and a second portion on a central side from the first portion. The thickness D602B of the second portion is thicker than the thickness D601 of the first portion.

[0075] The connecting portion (portion in which the thickness changes) of the second portion to the first portion is located on an outer side from the outer peripheral end 210 of the first flat plate 21.

[0076] In such a structure, even if the outer end 620 of the fixed layer 62B is located on a central side from the outer peripheral end 210 of the first flat plate 21, the portion of the valve film 61B that overlaps the outer peripheral end 210 of the first flat plate 21 becomes the second portion, that is, the thicker portion of the valve film 61B.

[0077] Therefore, even if the valve film 61B is bent toward the outer peripheral end 210 of the first flat plate 21 and comes into contact with the corner portion of the outer peripheral end 210, it is possible to suppress abrasion and breakage. At this time, as shown in Figure 6 (B), it is preferable that the position of the outer end of the second portion be apart from the thickness D62 of the fixed layer 62B by about the outer peripheral end 210 of the first flat plate 21. Thereby, when the valve film 61B comes into contact with the corner portion of the outer peripheral end 210, the second portion more reliably comes into contact with the corner portion of the outer peripheral end 210. Therefore, it is possible to more reliably suppress abrasion and breakage of the valve film 61B.

[0078] (Fourth Embodiment)

[0079] A fluid control device according to a fourth embodiment of the present application will be described with reference to the drawings. Figure 7 is a side sectional view showing the structure of a fluid control device according to the fourth embodiment.

[0080] As shown in Figure 7 , the fluid control device 10C according to the fourth embodiment differs from the fluid control device 10 according to the first embodiment mainly in the shape and arrangement of the valve member 60C. In addition, the fluid control device 10C differs from the fluid control device 10 in the shape of the plate member 20C and the plate member 40C. The other structure of the fluid control device 10C is the same as that of the fluid control device 10, and the description of the same parts will be omitted.

[0081] The fluid control device 10C includes the plate member 20C, the plate member 40C, and the valve member 60C. The plate member 20C includes a first flat plate 21C. The thickness of the first flat plate 21C is uniform.

[0082] The plate member 40C has a uniform thickness. A through-hole 400C is formed in the center when the plate member 40C is viewed from above. The through-hole 400C penetrates the plate member 40C in the thickness direction (a direction orthogonal to the main surface 401 and the main surface 402). The through-hole 400C is, for example, cylindrical.

[0083] The valve member 60C has a valve film 61C and a fixed layer 62C.

[0084] The valve film 61C is a circular ring having a circular opening 619. The outer diameter (diameter) of the valve film 61C is larger than the diameter of the through-hole 400C. The diameter of the opening 619 is smaller than the diameter of the through-hole 400C.

[0085] The outer diameter (diameter) of the fixed layer 62C is larger than the diameter of the through-hole 400C. The diameter of the opening 629 is smaller than the diameter of the through-hole 400C and larger than the diameter of the opening 619 of the valve film 61C.

[0086] The valve film 61C is fixed to the main surface 401 of the pump chamber side of the plate member 40C via the fixed layer 62C. At this time, the center of the opening 619 of the valve film 61C, the center of the opening 629 of the fixed layer 62C, and the center of the through-hole 400C are substantially identical when viewed from above.

[0087] With such a structure, the valve film 61C is fixed to the main surface 401 via the fixed layer 62C in the region of the outer end side. Therefore, in the fluid control device 10C, when fluid is sucked from the openings 241 and 242, the valve member 60C is bent to enter the through-hole 400C. Then, the fluid is discharged to the outside from the through-hole 400C. On the other hand, when fluid is sucked from the through-hole 400C, the valve member 60C is bent to the plate member 20C side, and the region of the inner end 610C side of the valve film 61C abuts against the main surface 201 of the plate member 20C. Thus, the fluid does not flow to the outer peripheral end 210 direction of the plate member 20C.

[0088] In this way, the fluid control device 10C has a flow regulating effect of making fluid flow in one direction.

[0089] Further, in the fluid control device 10C, the inner end 610C of the valve film 61C and the inner end 620C of the fixed layer 62C are closer to the inside (center side) of the through-hole 400C than the wall 410 of the through-hole 400C when viewed from above. In addition, the inner end 610C of the valve film 61C is closer to the inside than the inner end 620C of the fixed layer 62C.

[0090] Therefore, even if the valve member 60C is bent to the through-hole 400C side, the fixed layer 62C is in angular contact with the wall 410 of the through-hole 400C on the pump chamber 100 side, and the valve film 61C is not in contact with the angular contact. Thus, the fluid control device 10C can suppress wear and damage of the valve film 61C.

[0091] (Fifth Embodiment)

[0092] A fluid control device according to the fifth embodiment of the present application will be described with reference to the drawings. Figure 8(A) is a plan view of a plate member for mounting a drive body in the fluid control device according to the fifth embodiment, Figure 8 (B) is a plan view of a portion of a linking member of the fluid control device.

[0093] As Figure 8 (A), Figure 8 (B) show, the fluid control device according to the fifth embodiment differs from the fluid control device 10 according to the first embodiment in the shape of the linking member 23D of the plate member 20D. The other structures of the fluid control device according to the fifth embodiment are the same as those of the fluid control device 10, and the description of the same portions is omitted.

[0094] As Figure 8 (A), Figure 8 (B) show, the linking member 23D includes a first linking portion 231D, a second linking portion 232, and a third linking portion 233. The first linking portion 231D includes an inner side end portion 2311, a relay portion 2312, and an outer side end portion 2313. The inner side end portion 2311 is connected to the outer peripheral end 210 of the first plate 21. The outer side end portion 2313 is connected to the second linking portion 232. The relay portion 2312 is connected to the inner side end portion 2311 and the outer side end portion 2313.

[0095] The relay portion 2312 has a shape in which the width thereof becomes wider as the end portion thereof closer to the inner side end portion 2311 side approaches the end portion thereof closer to the outer side end portion 2313 side.

[0096] With this structure, as Figure 6 (B) show, the area of the portion of the relay portion 2312 that contacts the outer end 610 of the valve film 61 can be increased. Thus, even if the valve film 61 contacts the relay portion 2312, the wear and damage of the valve film 61 and the fixed layer 62 can be suppressed.

[0097] The inner side end portion 2311 does not have a corner portion at the connection portion thereof to the first plate 21. The inner side end portion 2311 has a shape in which the width thereof gradually becomes narrower as the end portion thereof closer to the relay portion 2312 approaches. In addition, the inner side end portion 2311 is connected to the relay portion 2312 without having a corner portion.

[0098] The outer side end portion 2313 does not have a corner portion at the connection portion thereof to the second linking portion 232. The outer side end portion 2313 has a shape in which the width thereof gradually becomes narrower as the end portion thereof closer to the relay portion 2312 approaches. In addition, the outer side end portion 2313 is connected to the relay portion 2312 without having a corner portion.

[0099] With these structures, the outer end 620 of the fixed layer 62 and the outer end 610 of the valve film 61 do not contact a corner portion. Thus, the wear and damage of the valve film 61 and the fixed layer 62 can be further suppressed.

[0100] (Sixth Embodiment)

[0101] A fluid control device according to a sixth embodiment of the present application will be described with reference to the drawings. Figure 9 is an enlarged view of a region including the outer peripheral end of the first flat plate and the connecting member of the fluid control device according to the sixth embodiment. Figure 10 (A), Figure 10 (B) is an enlarged perspective view of a region including the outer peripheral end of the first flat plate and the connecting member of the fluid control device according to the sixth embodiment. Figure 10 (A) shows a state in which the valve film is arranged, Figure 10 (B) shows a state in which the valve film is removed.

[0102] As Figure 9 , Figure 10 (A), Figure 10 (B) shows, the fluid control device 10E according to the sixth embodiment differs from the fluid control device 10 according to the first embodiment in the shape of the first connecting portion 231E of the connecting member. The other structures of the fluid control device 10E are the same as those of the fluid control device 10, and the description of the same portions is omitted.

[0103] The first connecting portion 231E has a recess portion 2310 recessed from the main surface 201 side of the first flat plate 21 with respect to the first flat plate 21 and the second connecting portion 232. In other words, when the valve member 60 is viewed from above, the first connecting portion 231E has the recess portion 2310 recessed from the surface of the first flat plate 21 on which the valve member 60 is arranged, at a portion overlapping the outer end 610 of the valve member 60 and the first portion (the portion constituted only by the valve film 61) of the valve member 60.

[0104] With such a structure, the first portion of the valve member 60 is less likely to come into contact with the first connecting portion 231E. Thus, the fluid control device 10E can suppress wear and damage of the valve film 61.

[0105] (Seventh Embodiment)

[0106] A fluid control device according to a seventh embodiment of the present application will be described with reference to the drawings. Figure 11 is an enlarged view of a region including the outer peripheral end of the first flat plate and the connecting member of the fluid control device according to the seventh embodiment.

[0107] As Figure 11 shows, the fluid control device 10F according to the seventh embodiment differs from the fluid control device 10E according to the sixth embodiment in the shape of the first connecting portion 231F of the connecting member. The other structures of the fluid control device 10F are the same as those of the fluid control device 10E, and the description of the same portions is omitted.

[0108] The first connecting portion 231F has a curved surface at the opening portion on the first plate 21 side of the recessed portion 2310. In other words, the recessed portion 2310 has a shape that gradually deepens from the end portion on the first plate 21 side toward the center of the recessed portion 2310.

[0109] With this structure, even if the valve member 60 is bent toward the first connecting portion 231F and the first plate 21 side, it does not come into contact with the sharp corner. Therefore, the fluid control device 10F can further suppress wear and damage of the valve film 61.

[0110] (Eighth Embodiment)

[0111] A fluid control device according to an eighth embodiment of the present application will be described with reference to the drawings. Figure 12 is an enlarged view of a region including the outer peripheral end of the first plate and the connecting member of the fluid control device according to the eighth embodiment.

[0112] As shown in Figure 12 , the fluid control device 10G according to the eighth embodiment differs from the fluid control device 10E according to the sixth embodiment in the shape of the first connecting portion 231G of the connecting member. The other structure of the fluid control device 10G is the same as that of the fluid control device 10E, and the description of the same portions is omitted.

[0113] The first connecting portion 231 is bent halfway in the direction connecting the first plate 21 and the second connecting portion 232 so as to project toward the main surface 202 side of the first plate 21.

[0114] With this structure, the first connecting portion 231G has the recessed portion 2310, and it is easy to secure a prescribed thickness. Thus, the first connecting portion 231G can secure a prescribed strength. Therefore, the fluid control device 10G can further suppress wear and damage of the valve film 61, and can suppress a decrease in reliability.

[0115] (Ninth Embodiment)

[0116] A fluid control device according to a ninth embodiment of the present application will be described with reference to the drawings. Figure 13 is an enlarged view of a region including the outer peripheral end of the first plate and the connecting member of the fluid control device according to the ninth embodiment.

[0117] As shown in Figure 13As shown, the fluid control device 10H according to the ninth embodiment differs from the fluid control device 10E according to the sixth embodiment in the shape of the first plate 21H and the recess 2310H. The other structure of the fluid control device 10H is the same as that of the fluid control device 10E, and the description of the same parts is omitted. Further, the shape of the first connecting portion 231H of the fluid control device 10H is the same as that of the first connecting portion 231E of the fluid control device 10E, and the description is omitted.

[0118] The first plate 21H has a recess recessed from the main surface 201 side at the outer peripheral end 210. The recess formed in the first plate 21H communicates with the recess formed in the first connecting portion 231H, thereby forming the recess 2310H. In other words, the recess 2310H extends from the first connecting portion 231H to the inner side than the outer peripheral end 210 of the first plate 21H.

[0119] With such a structure, the fluid control device 10H can further suppress the abrasion and breakage of the valve film 61.

[0120] (Tenth Embodiment)

[0121] A fluid control device according to a tenth embodiment of the present application will be described with reference to the drawings. Figure 14 is an enlarged view of a region including the outer peripheral end of the first plate and the connecting member of the fluid control device according to the tenth embodiment.

[0122] As shown, the fluid control device 10I according to the tenth embodiment differs from the fluid control device 10E according to the sixth embodiment in the connection method of the first plate 21I and the connecting member. The other structure of the fluid control device 10I is the same as that of the fluid control device 10E, and the description of the same parts is omitted. Figure 14 The first connecting portion 231I is connected to the main surface 202 near the outer peripheral end 210 of the first plate 21H. In such a structure, the depth of the recess 2310 is the thickness of the first plate 21I or more.

[0123] With such a structure, the fluid control device 10I can further suppress the abrasion and breakage of the valve film 61.

[0124] Further, in each of the above embodiments, an example in which the first plate is circular and the valve member is circular or annular is shown. However, these can also be polygonal, and more preferably equilateral polygonal. However, by being circular, the fluid control device can improve efficiency.

[0125]

[0126] ​Further, in each of the above-described embodiments, the first plate and the valve film are shown to be similar in shape, but for example, a combination of a circular shape and a regular polygonal shape can also be used. However, by being similar in shape, the fluid control device can improve efficiency.

[0127] Further, the second connecting portion of the connecting member and the valve film are similar in shape, whereby the passing efficiency of the fluid through the opening 241 is improved, and the fluid control device can improve efficiency.

[0128] Further, in the above-described description, the drive body is shown to be provided to the first plate, but the drive body can also be provided to the plate member (second plate).

[0129] Further, the structures of each of the above-described embodiments can be appropriately combined, and can achieve the effects corresponding to each combination.

[0130] Explanation of Reference Numerals

[0131] 10, 10A, 10B, 10C, 10E, 10F, 10G, 10H, 10I... fluid control device; 20, 20C, 20D... plate member; 21, 21C, 21H, 21I... first plate; 22... frame; 23, 23D... connecting member; 30... drive body; 40, 40C... plate member; 50... side wall member; 60, 60B, 60C... valve member; 61, 61B, 61C... valve film; 62, 62B, 62C... fixed layer; 100... pump chamber; 201, 202... main face; 210... outer peripheral end; 231, 231D, 231E, 231F, 231G, 231H, 231I... first connecting portion; 232... second connecting portion; 233... third connecting portion; 241, 242... opening; 241A... recess; 400, 400C... through hole; 401, 402... main face; 410... wall; 500... hollow; 610... outer end; 610C... inner end; 619... opening; 620... outer end; 620C... inner end; 629... opening; 2310, 2310H... recess; 2311... inner side end portion; 2313... outer side end portion.

Claims

1. A fluid control device, wherein, have: First tablet; The frame is positioned on the outer side of the outer periphery of the first plate. A connecting component connects the first plate and the frame. The first opening is surrounded by the first flat plate, the frame, and the connecting component; The second plate has a second opening in the portion opposite to the first plate; A sidewall component connects the frame to the second plate and together with the first plate and the second plate, forms a pump chamber; A driving body, disposed on either the first plate or the second plate; and A valve component, disposed on the first surface of the pump chamber side of the first plate, rectifies the fluid flow. The valve component has: The fixing part is fixed to the first plate; and When viewed from above, the protrusion extends outward from the outer peripheral end of the valve component. The protrusion has: The first part has a first thickness; and The second part, located between the first part and the fixing part, has a second thickness. The second thickness is thicker than the first thickness. At least a portion of the second part overlaps with the first opening when viewed from the front of the first plate.

2. The fluid control device according to claim 1, wherein, The connection between the second part and the first part is located on the outer side of the outer peripheral end.

3. The fluid control device according to claim 1 or 2, wherein, The connecting component includes: The first connecting part is connected to the outer peripheral end of the first plate and extends outward from the outer peripheral end of the first plate. and The second connecting part connects to the first connecting part and is connected to the frame at a location different from the connection points between the first connecting part and the first plate. When the valve component is viewed from above, the portion of the first connecting part that overlaps with the first part has a recess that is recessed from the side where the valve component is disposed.

4. The fluid control device according to claim 3, wherein, The outer end of the valve component has a shape that extends along the second connecting portion.

5. The fluid control device according to claim 4, wherein, The first connecting part has: The portion overlapping with the second part of the valve component; and The portion overlapping with the first part of the valve component. The width of the portion overlapping the first portion is greater than the width of the portion overlapping the second portion.

6. The fluid control device according to claim 1 or 2, wherein, The shape of the outer end of the valve component is similar to the shape of the outer peripheral end of the first plate.

7. The fluid control device according to claim 1 or 2, wherein, The valve component includes: The valve diaphragm is flexible; and A fixing layer is used to fix the valve diaphragm. The first part is composed of the valve diaphragm. The second part is composed of the overlap of the valve diaphragm and the fixing layer.

8. The fluid control device according to claim 7, wherein, The fixing layer is more easily deformed than the first plate or the second plate in the direction in which the first plate and the second plate are facing each other. The valve diaphragm is more easily deformed than the fixed layer in the direction in which the first plate and the second plate are opposite each other.

9. The fluid control device according to claim 1 or 2, wherein, The driving body is disposed on the first plate, causing the first plate to vibrate.

10. The fluid control device according to claim 1 or 2, wherein, The driving body is disposed on the second plate, causing the second plate to vibrate.

11. A fluid control device, wherein, have: First tablet; The frame is positioned on the outer side of the outer periphery of the first plate. A connecting component connects the first plate and the frame. The first opening is surrounded by the first flat plate, the frame, and the connecting component; The second plate has a second opening in the portion opposite to the first plate; A sidewall component connects the frame to the second plate and together with the first plate and the second plate, forms a pump chamber; A driving body, disposed on either the first plate or the second plate; and A valve component, disposed on the main surface of the pump chamber side of the second plate, rectifies the fluid flow. A portion of the valve component is fixed to the second plate. When viewed from the opposing direction of the main surfaces of the first plate and the second plate, the inner end of the valve component is not fixed to the second plate but protrudes in a manner that overlaps with the second opening. The valve component has a first portion of a first thickness constituting the inner end and a second portion of a second thickness constituting the outer end side of the first portion. The second thickness is thicker than the first thickness. The second part overlaps with the wall of the second opening when viewed from above on the second plate.

12. The fluid control device according to claim 11, wherein, The shape of the inner end of the valve component is similar to the shape of the wall of the second opening when viewed from above.

13. The fluid control device according to claim 11 or 12, wherein, The valve component includes: The valve diaphragm is flexible; and A fixing layer is used to fix the valve diaphragm. The first part is composed of the valve diaphragm. The second part is composed of the overlap of the valve diaphragm and the fixing layer.

14. The fluid control device according to claim 13, wherein, The fixing layer is more easily deformed than the first plate or the second plate in the direction in which the first plate and the second plate are facing each other. The valve diaphragm is more easily deformed than the fixed layer in the direction in which the first plate and the second plate are opposite each other.

15. The fluid control device according to claim 11 or 12, wherein, The driving body is disposed on the first plate, causing the first plate to vibrate.

16. The fluid control device according to claim 11 or 12, wherein, The driving body is disposed on the second plate, causing the second plate to vibrate.

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