Composite coating, mask and manufacturing method thereof

Abstract

The present invention proposes a composite coating, a mask plate and a manufacturing method thereof. The composite coating comprises: an aluminum oxide coating, the aluminum oxide coating having pores; and a Teflon film layer, the Teflon film layer filling the pores of the aluminum oxide coating. Thus, the composite coating has good wear resistance and acid and alkali corrosion resistance. Under vacuum film forming conditions, the composite coating has good resistance to scratches, pressure injuries and electrostatic shocks. Moreover, the composite coating is applied to a mask plate to extend the service life of the mask plate.

Description

Technical Field

[0001] The invention relates to the technical field of coatings, and in particular to a composite coating, a mask plate and a manufacturing method thereof. Background Art

[0002] In a vacuum film-forming environment, the mask plate usually needs to have good resistance to scratches, pressure damage, and electrostatic damage, as well as good wear resistance and acid and alkali corrosion resistance. However, it is difficult for current protective coatings to meet the above requirements at the same time.

[0003] Therefore, the current mask coating, mask and manufacturing method thereof still need to be improved. Summary of the invention

[0004] The present invention is based on the inventor's discovery and understanding of the following facts and problems:

[0005] Existing vacuum film-forming mask protective coatings generally include Teflon coatings, aluminum oxide coatings and other new material coatings (such as PBI engineering plastic coatings, i.e. polybenzimidazole coatings).

[0006] The inventors found that the manufacturing method of Teflon coating is relatively simple, the manufacturing cost is low, and the hardness is low. Teflon coating can resist scratches, bruises and electrostatic shocks, but its physical resistance is poor, it is not wear-resistant, and its service life is short in a plasma environment; the alumina coating has better physical properties, high hardness, and wear resistance, and has a significant advantage in service life over Teflon coating, but the alumina coating is mainly made into a film by sputtering, and the film thickness is 1.5μm to 3.5μm. The cost of sputtering equipment is relatively high, and the alumina film has relatively uniform cracks. Moreover, alumina itself is easy to react with acids and alkalis, and the alumina coating is very easy to rust. Special attention needs to be paid during storage and use, and the alumina coating has a high hardness and basically cannot prevent the mask from being scratched or bruised. After a lot of experimental research, the inventors found that a composite coating of Teflon and alumina can be formed on the mask plate. The alumina coating forms a porous and loose skeleton structure, and the Teflon film layer can fill the pores of the alumina coating. This coating has the advantages of both alumina coating and Teflon coating, with good wear resistance, acid and alkali corrosion resistance, low production cost, and can improve the mask plate's resistance to scratches, pressure injuries, and electrostatic shocks in a vacuum film-forming environment.

[0007] The present invention aims to solve one of the technical problems in the related art at least to a certain extent.

[0008] In view of this, in one aspect of the present invention, a composite coating is proposed. According to an embodiment of the present invention, the composite coating comprises: an aluminum oxide coating having pores; a Teflon film layer, and the Teflon film layer is filled in the pores of the aluminum oxide coating. As a result, the composite coating has good wear resistance and acid and alkali corrosion resistance. Under vacuum film forming conditions, the composite coating has good resistance to scratches, pressure injuries and electrostatic shocks. Moreover, the composite coating is applied to a mask plate to extend the service life of the mask plate.

[0009] According to an embodiment of the present invention, the aluminum oxide coating comprises epoxy resin and aluminum oxide. Therefore, the aluminum oxide coating has a certain degree of adhesion, and when coated on a substrate such as a mask, the aluminum oxide coating can be firmly bonded to the substrate and is not easy to fall off from the substrate.

[0010] According to an embodiment of the present invention, in the composite coating, the particle size of aluminum oxide is 1 μm to 10 μm. When the particle size of aluminum oxide is within the above range, the surface roughness of the obtained film layer is small and the flatness is good, and it will not cause a significant increase in the production cost of the coating or mask.

[0011] According to an embodiment of the present invention, based on the total mass of the aluminum oxide coating, the mass content of the aluminum oxide is 60wt% to 65wt%, thereby, on the one hand, the coating can have a higher strength, and on the other hand, it is beneficial to improve the flatness of the film layer.

[0012] According to an embodiment of the present invention, the thickness of the composite coating is 30 μm to 100 μm. Therefore, the composite coating has a suitable thickness, which is beneficial to improving the strength of the composite coating.

[0013] In another aspect of the present invention, the present invention proposes a mask. According to an embodiment of the present invention, the mask includes: a substrate; a primer layer, the primer layer is disposed on at least a portion of the surface of the substrate; and the aforementioned composite coating, the composite coating is disposed on at least a portion of the surface of the primer layer away from the substrate. Therefore, the mask has all the characteristics and advantages of the aforementioned composite coating, which will not be repeated here. In general, the mask has good scratch resistance, pressure resistance, and electrostatic damage resistance, and has a long service life.

[0014] In another aspect of the present invention, the present invention proposes a method for manufacturing the above-mentioned mask. According to an embodiment of the present invention, the method for manufacturing the above-mentioned mask includes: providing a substrate; forming a primer layer on at least a portion of the surface of the substrate; and forming a composite coating on at least a portion of the surface of the primer layer away from the substrate. The mask prepared by the above method has good scratch resistance, pressure resistance, electrostatic damage resistance and long service life.

[0015] According to an embodiment of the present invention, forming the primer layer includes: mixing a first epoxy resin and a first curing agent to form a first mixture; diluting the first mixture with a first diluent to form a primer liquid; applying the primer liquid on at least a portion of the surface of the substrate, and curing to form the primer layer. Thus, the primer layer formed can be firmly combined with the substrate, and is conducive to the subsequent formation of a composite coating.

[0016] According to an embodiment of the present invention, forming the composite coating comprises: mixing a second epoxy resin, a second curing agent, aluminum oxide powder and a second diluent to form an aluminum oxide coating liquid; coating the aluminum oxide coating liquid on at least a portion of the surface of the base coating away from the substrate, heating and curing to form an aluminum oxide coating; coating Teflon on the aluminum oxide coating to obtain the composite coating. Thus, the composite coating has a high strength and good resistance to scratches, pressure injuries and electrostatic shocks.

[0017] According to an embodiment of the present invention, the first epoxy resin and the second epoxy resin each independently include alicyclic epoxy resin; and / or, the first curing agent and the second curing agent each independently include at least one of aromatic polyamines and polyetheramines; and / or, the first diluent and the second diluent each independently include at least one of acetone, toluene, and styrene; and / or, the temperature for heating and curing the aluminum oxide coating liquid is 80°C to 100°C, and the time is 1.5h to 2.5h. This is conducive to further improving the performance of the mask produced. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram showing the structure of a composite coating according to an embodiment of the present invention is shown;

[0019] Figure 2 A schematic structural diagram of a mask according to an embodiment of the present invention is shown;

[0020] Figure 3 A schematic structural diagram of a mask according to another embodiment of the present invention is shown;

[0021] Figure 4 A schematic diagram of a process of manufacturing a mask according to an embodiment of the present invention is shown;

[0022] Figure 5 shows the microstructure of the aluminum oxide coating in Example 1;

[0023] Figure 6 shows the microstructure of the composite coating in Example 1;

[0024] Figure 7The microstructure of the Teflon coating in Comparative Example 1 is shown;

[0025] Figure 8 A microstructure image of the sputtered aluminum oxide coating in Comparative Example 2 is shown.

[0026] Description of reference numerals:

[0027] 100: composite coating; 110: alumina coating; 111: pores; 120: Teflon film layer; 200: substrate; 300: primer coating. DETAILED DESCRIPTION

[0028] The embodiments of the present invention are described in detail below. The embodiments described below are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention. If no specific techniques or conditions are specified in the embodiments, the techniques or conditions described in the literature in the art or the product specifications are used.

[0029] In one aspect of the present invention, the present invention provides a composite coating. According to an embodiment of the present invention, reference Figure 1 The composite coating 100 may include an aluminum oxide coating 110 and a Teflon film layer 120, wherein the aluminum oxide coating 110 has pores 111, and the Teflon film layer 120 is filled in the pores 111 of the aluminum oxide coating 110. Therefore, the composite coating uses the aluminum oxide coating as a skeleton, and the Teflon film layer is filled in the pores of the aluminum oxide coating. It can have the advantages of both aluminum oxide and Teflon, with high strength, good wear resistance, and good insulation. The coating has obvious hydrophobicity and is not easy to rust. It does not change when immersed in acid and alkali solutions and maintains good stability. It also has good scratch resistance, pressure resistance, and static shock resistance, and has a long service life.

[0030] According to some embodiments of the present invention, in the composite coating 100, the aluminum oxide coating 110 may include epoxy resin and aluminum oxide. Thus, the addition of epoxy resin can make the aluminum oxide coating have better bonding properties, and when coated on a substrate such as a mask, the aluminum oxide coating can be firmly bonded to the substrate and is not easy to fall off from the substrate.

[0031] According to some embodiments of the present invention, the epoxy resin in the aluminum oxide coating can be an alicyclic epoxy resin, which has good properties such as wear resistance, acid and alkali resistance, high temperature resistance, and organic solvent resistance, and has good stability in a vacuum film-forming environment, which is beneficial to improving the overall stability of the composite coating and extending the service life of the composite coating. Of course, those skilled in the art can also choose other epoxy resins, as long as the selected epoxy resin can meet the use requirements of wear resistance, acid and alkali resistance, high temperature resistance, and organic solvent resistance.

[0032] According to some embodiments of the present invention, the epoxy resin in the aluminum oxide coating 110 may also be a modified epoxy resin. By modifying the epoxy resin, the modified epoxy resin has a higher degree of bonding with aluminum oxide and a higher adhesion with a substrate such as a mask. The specific method of the modification is not particularly limited in the present invention, and those skilled in the art may select it according to actual needs.

[0033] According to some embodiments of the present invention, based on the total mass of the aluminum oxide coating, the mass content of aluminum oxide can be 60wt% to 65wt%. For example, the mass content of aluminum oxide can be 60wt%, 61wt%, 62wt%, 63wt%, 64wt%, 65wt%, etc. The aluminum oxide content is set within the above range, which can take into account both the strength and flatness of the coating. The coating has suitable strength and good flatness, which is beneficial to improving the wear resistance and overall flatness of the composite coating.

[0034] According to a specific embodiment of the present invention, based on the total mass of the aluminum oxide coating, the mass content of aluminum oxide is 60%, and the mass content of epoxy resin is 40%. According to another specific embodiment of the present invention, based on the total mass of the aluminum oxide coating, the mass content of aluminum oxide is 62%, and the mass content of epoxy resin is 38%. According to another specific embodiment of the present invention, based on the total mass of the aluminum oxide coating, the mass content of aluminum oxide is 65%, and the mass content of epoxy resin is 35%.

[0035] According to some embodiments of the present invention, in the composite coating 100, the particle size of aluminum oxide can be 1 μm to 10 μm. For example, the particle size of aluminum oxide can be 1 μm, 3 μm, 5 μm, 8 μm, 10 μm, etc. Therefore, the particle size of aluminum oxide is smaller, which is beneficial to reduce the surface roughness of the aluminum oxide coating, thereby improving the flatness of the aluminum oxide coating; and is beneficial to improving the scratch resistance of the composite coating. In addition, the particle size of aluminum oxide within the above range will not significantly increase the raw material cost, thereby better controlling the production cost.

[0036] According to some embodiments of the present invention, reference Figure 1 The thickness H of the composite coating 100 can be 30 μm to 100 μm. For example, the thickness H of the composite coating 100 can be 30 μm, 40 μm, 50 μm, 70 μm, 100 μm, etc. Therefore, the composite coating has high strength, and after the composite coating is coated on a substrate such as a mask, the internal stress of the composite coating is small and it is not easy to cause adverse effects on the substrate.

[0037] In another aspect of the present invention, the present invention provides a mask. According to an embodiment of the present invention, referring to Figure 2 and Figure 3The mask may include a substrate 200, a primer 300 and the aforementioned composite coating 100, wherein the primer 300 is disposed on at least a portion of the surface of the substrate 200, and the composite coating 100 is disposed on at least a portion of the surface of the primer 300 away from the substrate 200. Thus, the mask has all the features and advantages of the aforementioned composite coating, which will not be described in detail here. In general, the mask has good scratch resistance, pressure resistance, and electrostatic damage resistance, and the mask is hydrophobic, not easy to rust, acid and alkali corrosion resistant, and has a long service life.

[0038] According to some embodiments of the present invention, reference Figure 2 , the primer layer 300 can be disposed on one side surface of the substrate 200, and the composite coating 100 can be disposed on the surface of the primer layer 300 away from the substrate, that is, the primer layer 300 and the composite coating 100 are formed only on one surface of the substrate 200. According to other embodiments of the present invention, Figure 3 The primer layer 300 may be disposed on two surfaces of the substrate 200 , and a composite coating 100 is disposed on each surface of the primer layer 300 away from the substrate 200 .

[0039] In another aspect of the present invention, the present invention provides a method for manufacturing the above-mentioned mask. Figure 4 The method for making the mask mentioned above may include the following steps:

[0040] S100: providing a substrate.

[0041] In this step, a substrate is provided so as to form a protective coating on the substrate. According to some embodiments of the present invention, the substrate may include a quartz glass substrate, a metal chromium film layer and a photosensitive adhesive.

[0042] S200: forming a primer layer on at least a portion of the surface of the substrate.

[0043] According to an embodiment of the present invention, in this step, a primer layer is formed on at least a portion of the surface of the substrate so as to improve the bonding strength between the composite coating and the substrate.

[0044] According to some embodiments of the present invention, forming the primer layer may include the following steps:

[0045] S210: Mixing a first epoxy resin and a first curing agent to form a first mixture.

[0046] According to some embodiments of the present invention, the first epoxy resin may include an alicyclic epoxy resin, whereby the first epoxy resin has good adhesion and can be firmly bonded to the surface of the substrate, thereby improving the bonding strength between the subsequently formed composite coating and the substrate; and, the first epoxy resin has good properties such as wear resistance, acid and alkali resistance, high temperature resistance, and organic solvent resistance, and has good stability in a vacuum film-forming environment, which is beneficial to improving the stability of the base coating.

[0047] According to some embodiments of the present invention, the first epoxy resin and the first curing agent are mixed, stirred evenly, and then vacuum degassing is performed to obtain a first mixture.

[0048] According to some embodiments of the present invention, the first curing agent may include at least one of aromatic polyamines (such as m-phenylenediamine, etc.) and polyetheramines. The above curing agent can promote the curing of the first epoxy resin so that the first epoxy resin is firmly bonded to the surface of the substrate. In addition, by using the above curing agent, the subsequent curing time and curing conditions are controllable, which is convenient for operation.

[0049] According to some embodiments of the present invention, based on the total mass of the first mixture, the mass content of the first curing agent can be 20%-50%. For example, the mass content of the first curing agent can be 20%, 30%, 40%, 50%, etc. The mass of the first curing agent can be adjusted within the above range. The curing agent has a suitable content and can effectively promote the curing of the first epoxy resin.

[0050] S220: diluting the first mixture with a first diluent to form a primer.

[0051] According to some embodiments of the present invention, the first mixture may be diluted with a first diluent to form a primer, so as to subsequently form a film layer of uniform thickness on the surface of the substrate. The inventors have found that the first mixture has a high viscosity and can be diluted by adding a non-reactive diluent, so that the primer can be more easily applied and a uniform film layer can be formed.

[0052] According to some embodiments of the present invention, the first diluent may include at least one of acetone, toluene, styrene, etc., and the above diluent can dilute the first mixture. In addition, the above diluent will not react with the epoxy resin, will volatilize during the curing process, and will not affect the performance of the film layer after curing.

[0053] S230: coating a primer liquid on at least a portion of the surface of the substrate, and forming a primer layer after curing.

[0054] After the primer liquid is formed, the primer liquid is coated on at least part of the surface of the substrate, and dried and cured to form a primer layer. The specific curing method, temperature, time, etc. are not specifically limited in the present invention, and those skilled in the art can set and adjust according to the specific type of the first epoxy resin. The next step can be performed when the first epoxy resin is semi-cured, and after the first epoxy resin is semi-cured, it can be firmly combined with the composite coating formed subsequently.

[0055] The present invention does not specifically limit the coating method of the primer liquid, and those skilled in the art can choose according to actual needs. For example, the primer liquid can be coated on at least a portion of the surface of the substrate by at least one of spraying (for example, spraying with an air spray gun), manual coating, spin coating, etc.

[0056] S300: forming a composite coating on at least a portion of the surface of the primer layer away from the substrate.

[0057] According to an embodiment of the present invention, after the primer layer is formed, a composite coating is formed on at least a portion of the surface of the primer layer away from the substrate.

[0058] According to some embodiments of the present invention, forming a composite coating may include the following steps:

[0059] S310: Mix the second epoxy resin, the second curing agent, the aluminum oxide powder and the second diluent to form an aluminum oxide coating liquid.

[0060] According to some embodiments of the present invention, the second epoxy resin may include alicyclic epoxy resin, so that the second epoxy resin has good adhesion, which is beneficial to improving the bonding performance between the composite coating and the substrate; and the second epoxy resin is wear-resistant, acid-resistant, alkali-resistant, high-temperature-resistant, and organic solvent-resistant, which is beneficial to improving the stability of the composite coating.

[0061] According to some embodiments of the present invention, the second curing agent may include at least one of aromatic polyamines (e.g., m-phenylenediamine, etc.) and polyetheramines. The curing agent may catalyze the curing of the second epoxy resin, and the curing time and curing conditions are controllable. In addition, it should be noted that during the heat curing process, the curing agent does not react with the second epoxy resin.

[0062] According to some embodiments of the present invention, the particle size of the aluminum oxide powder may be 1 μm to 10 μm, which is beneficial to improving the surface flatness of the aluminum oxide coating.

[0063] According to some embodiments of the present invention, the second diluent may include at least one of acetone, toluene, styrene, etc., and diluting the mixture with the above diluent can form a more uniform film layer after the mixture is coated. In addition, the above diluent will not react with the epoxy resin, will evaporate during the curing process, and will not have an adverse effect on the performance of the film layer.

[0064] The addition amount of the second curing agent and the second diluent is not particularly limited in the present invention, and those skilled in the art can add them according to actual needs.

[0065] S320: coating an aluminum oxide coating liquid on at least a portion of the surface of the primer layer away from the substrate, and heating and curing the liquid to form an aluminum oxide coating.

[0066] According to some embodiments of the present invention, the temperature for heating and curing the aluminum oxide coating liquid can be 80°C to 100°C, and the time can be 1.5h to 2.5h. For example, the temperature for heating and curing the aluminum oxide coating liquid can be 80°C, 85°C, 90°C, 95°C, 100°C, etc., and the time can be 1.5h, 1.7h, 2h, 2.2h, 2.5h, etc., thereby, the aluminum oxide coating liquid can be cured in a shorter time using a suitable temperature, and the formed coating has a loose and porous structure. According to some embodiments of the present invention, the above-mentioned heating and curing operation can be performed in a heating furnace.

[0067] The coating method of the aluminum oxide coating liquid is not specifically limited in the present invention, and those skilled in the art can choose according to actual needs. For example, the aluminum oxide coating liquid can be coated on the surface of the base coating layer away from the substrate by at least one of spraying (for example, spraying with an air spray gun), manual coating, spin coating, etc.

[0068] According to an embodiment of the present invention, the formed aluminum oxide coating includes epoxy resin (second epoxy resin) and aluminum oxide. Based on the total mass of the aluminum oxide coating, the mass content of the aluminum oxide may be 60% to 65%.

[0069] S330: Teflon is coated on the aluminum oxide coating to obtain a composite coating.

[0070] According to some embodiments of the present invention, Teflon powder may be directly sprayed onto the aluminum oxide coating by spraying, so that the Teflon film layer fills the pores of the aluminum oxide coating.

[0071] According to some other embodiments of the present invention, a suspension of Teflon can also be coated on the aluminum oxide coating. In the suspension, the dispersant is water, and the Teflon powder is dispersed in the water. The suspension of Teflon can be coated on the aluminum oxide coating (by spraying with a spray gun, manually coating or spin coating, etc.), and after heating and curing, a composite coating is obtained, and the Teflon film layer fills the pores of the aluminum oxide coating, and the Teflon film layer forms a firm bond with the aluminum oxide coating. According to some specific embodiments of the present invention, the temperature for heating and curing the suspension can be 400°C to 500°C. For example, the temperature for heating and curing the suspension of Teflon can be 400°C, 430°C, 450°C, 480°C, 500°C, etc. Under the above temperature conditions, Teflon can be quickly cured to form a film layer and fill the pores of the aluminum oxide coating. The Teflon film layer is highly flush with the aluminum oxide coating.

[0072] In general, the mask produced by the above method has the properties of acid and alkali corrosion resistance, oxidation resistance, scratch resistance, pressure resistance, and electrostatic damage resistance, and has a long service life; moreover, the above method has a simple process and easy operation, which is conducive to reducing the production cost of the mask.

[0073] The present invention will be described below by specific examples, and it will be appreciated by those skilled in the art that the following specific examples are only for illustrative purposes, and do not limit the scope of the present invention in any way. In addition, in the following examples, unless otherwise specified, the materials and equipment used are all commercially available. If in the following examples, specific processing conditions and processing methods are not clearly described, then conditions and methods known in the art can be used to process.

[0074] Example 1

[0075] A mask substrate is provided, a primer layer is formed on the surface of the substrate, and then an aluminum oxide coating liquid is sprayed on the surface of the primer layer away from the substrate, and an aluminum oxide coating is formed after heating and curing, and then a Teflon suspension is sprayed on the aluminum oxide coating, and a composite coating is formed after heating and curing to obtain a mask. In Example 1, the aluminum oxide coating includes alicyclic epoxy resin and aluminum oxide, and the mass content of aluminum oxide is 60% based on the total mass of the aluminum oxide coating.

[0076] Example 2

[0077] The preparation method is the same as that of Example 1, except that the mass content of aluminum oxide in the aluminum oxide coating of Example 2 is 62%.

[0078] Example 3

[0079] The preparation method is the same as that of Example 1, except that the mass content of aluminum oxide in the aluminum oxide coating of Example 3 is 65%.

[0080] Comparative Example 1

[0081] A mask substrate is provided, a Teflon suspension is sprayed on the surface of the mask substrate, and a Teflon coating is formed after heating and curing to obtain a mask.

[0082] Comparative Example 2

[0083] A mask substrate is provided, and an aluminum oxide coating is formed on the surface of the mask substrate by sputtering to obtain a mask.

[0084] The coatings in the embodiments and comparative examples were photographed using AOI (automatic optical inspection) to observe the characteristics of the coatings. Figure 5 The microstructure of the aluminum oxide coating in Example 1 is shown. Figure 5 It can be seen that the aluminum oxide coating formed by the method proposed in the present invention has a loose and porous structure. Figure 6 The microstructure of the composite coating in Example 1 is shown, and the Teflon film layer 120 is filled in the pores of the aluminum oxide coating 110. The microstructure of the coating in Examples 2 and 3 is roughly the same as that in Example 1, and the photo is not shown. Through testing the mask plates in Examples 1 to 3, it is known that the mask plates in Examples 1 to 3 can have good scratch resistance, pressure resistance and electrostatic damage resistance under vacuum film forming (for example, plasma treatment under vacuum conditions); and can remain stable when immersed in acid and alkali solutions, have good acid and alkali resistance, and are not easy to rust when exposed to water.

[0085] Figure 7 The microstructure of the Teflon coating in Comparative Example 1 is shown. Figure 7 Teflon coating in Figure 6 The microstructure of the Teflon film layer in the composite coating is quite different. The Teflon coating is directly formed on the surface of the mask substrate by spraying. The production steps are simple and the cost is low. The formed coating has low hardness and is resistant to scratches, pressure injuries and static electricity damage, but it is not wear-resistant and has a short service life in a vacuum film-forming environment.

[0086] Figure 8 The microstructure of the sputtered aluminum oxide coating in Comparative Example 2 is shown. Figure 8 It can be seen that the aluminum oxide coating formed by sputtering has uniform cracks. The coating formed by sputtering is relatively thin, and aluminum oxide itself is easy to react with acids and alkalis, and is easily corroded. The coating has a high hardness and basically has no effect of preventing the substrate from being scratched or crushed. In addition, the cost of sputtering is high, which will significantly increase the production cost of the coating.

[0087] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0088] In the description of this specification, the description with reference to the terms "one embodiment", "another embodiment", "some embodiments", "a specific embodiment" or "another specific embodiment" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0089] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A composite coating, characterized in that: include: an aluminum oxide coating having pores; A Teflon membrane layer, wherein the Teflon membrane layer is filled in the pores of the aluminum oxide coating. The aluminum oxide coating comprises epoxy resin and aluminum oxide, Based on the total mass of the aluminum oxide coating, the mass content of the aluminum oxide is 60wt% to 65wt%, The thickness of the composite coating is 30 μm to 100 μm.

2. The composite coating according to claim 1, characterized in that: The particle size of the aluminum oxide is 1 μm to 10 μm.

3. A mask, characterized in that: include: matrix; a primer layer disposed on at least a portion of the surface of the substrate; The composite coating according to any one of claims 1 to 2, wherein the composite coating is disposed on at least a portion of the surface of the primer coating away from the substrate.

4. A method for manufacturing the mask according to claim 3, characterized in that: include: providing a substrate; forming a primer layer on at least a portion of the surface of the substrate; A composite coating is formed on at least a portion of the surface of the primer layer away from the substrate.

5. The method according to claim 4, characterized in that Forming the primer layer includes: mixing a first epoxy resin and a first curing agent to form a first mixture; diluting the first mixture with a first diluent to form a primer; The primer liquid is coated on at least a portion of the surface of the substrate, and the primer layer is formed after curing.

6. The method according to claim 5, characterized in that Forming the composite coating comprises: Mixing a second epoxy resin, a second curing agent, aluminum oxide powder and a second diluent to form an aluminum oxide coating liquid; Coating the aluminum oxide coating liquid on at least a portion of the surface of the primer layer away from the substrate, and heating and curing to form an aluminum oxide coating; Teflon is coated on the aluminum oxide coating to obtain the composite coating.

7. The method according to claim 6, characterized in that The first epoxy resin and the second epoxy resin each independently comprise a cycloaliphatic epoxy resin; And / or, the first curing agent and the second curing agent each independently include at least one of aromatic polyamines and polyetheramines; And / or, the first diluent and the second diluent each independently include at least one of acetone, toluene, and styrene; And / or, the aluminum oxide coating liquid is heated and cured at a temperature of 80° C. to 100° C. for a time of 1.5 h to 2.5 h.

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