Substrate processing apparatus and method for verifying errors of a flow meter using the same

Abstract

The present inventive concept provides a substrate processing apparatus including: a housing having a processing space for processing a substrate; a support unit configured to support the substrate at the processing space; a nozzle for supplying a liquid to the substrate placed on the support unit; a liquid supply unit configured to supply the liquid to the nozzle and having a flow meter; and a flow rate measuring unit configured to verify an error of the flow meter; and a controller for controlling the liquid supply unit and the flow rate measuring unit, the flow rate measuring unit including: a cup for containing the liquid; a measuring device configured to verify a liquid level of the liquid contained in the cup; a drain line for draining the liquid in the cup and having a drain valve installed on the drain line, the controller controlling the liquid supply unit to drain a first amount of the liquid to the cup for a first time in a state that the drain valve is closed, and controlling the measuring device to determine whether an error has occurred in the flow meter by determining whether the liquid level of the liquid contained in the cup is the first amount.

Description

Technical Field

[0001] The embodiments of the inventive concept described herein relate to a substrate processing apparatus having a liquid supply unit for supplying liquid on a substrate, and a flow meter error verification method using the substrate processing apparatus. Background Technology

[0002] Semiconductor manufacturing processes include liquid handling processes that process substrates by supplying liquid onto them. When using liquid to process substrates, the liquid must be sprayed in a fixed amount according to the formulation of each process. For this purpose, a flow meter is installed in the liquid supply unit that supplies liquid to the substrates to measure the flow rate of the liquid.

[0003] However, if an error occurs in the flow meter, the following problem arises: even if the flow meter is set to supply a fixed amount, the preset amount will not be supplied to the board.

[0004] To address this issue, operators visually inspect the flow rate of the liquid exiting the flow meter, but this is difficult to verify at fixed volumes, requires a significant amount of time to measure the flow rate, and is difficult to automatically store the data.

[0005] To address this issue, the flow rate of the discharged liquid is calculated by measuring its weight. However, calculations reflecting the liquid's properties are necessary, which takes time and costs for operators to install equipment for measuring the liquid's weight. Summary of the Invention

[0006] Embodiments of the present invention provide a substrate processing apparatus and a flow meter error verification method using the substrate processing apparatus to accurately measure flow meter errors.

[0007] The technical objectives of this invention are not limited to those described above, and other unmentioned technical objectives will become apparent to those skilled in the art from the following description.

[0008] The present invention provides a substrate processing apparatus. The substrate processing apparatus includes: a housing having a processing space for processing a substrate therein; a support unit configured to support the substrate in the processing space; a nozzle for supplying liquid to the substrate placed on the support unit; a liquid supply unit configured to supply the liquid to the nozzle and having a flow meter; a flow rate measuring unit configured to verify an error in the flow meter; and a controller for controlling the liquid supply unit and the flow rate measuring unit, wherein the flow rate measuring unit includes: a cup for containing the liquid; a measuring device configured to verify the liquid level contained in the cup; and a discharge line for discharging the liquid in the cup and having a discharge valve installed on the discharge line, wherein the controller controls the liquid supply unit to discharge a first amount of liquid into the cup in a first time while the discharge valve is closed, and controls the measuring device to determine whether an error has occurred in the flow meter by determining whether the liquid level contained in the cup is the first amount.

[0009] In one embodiment, the measuring device includes: an auxiliary container configured to communicate with the interior space of the cup on one side; and a liquid level sensor disposed in the auxiliary container and used to detect the liquid level contained in the cup.

[0010] In one embodiment, the measuring device includes a liquid level sensor disposed above the cup to illuminate the surface of the liquid contained in the cup to detect the liquid level.

[0011] In one embodiment, the measuring device includes a liquid level sensor inserted into one side of the cup and used to detect the liquid level contained in the cup.

[0012] In one embodiment, the measuring device includes: a first tube communicating with the cup at a first height; a second tube communicating with the cup at a second height above the first height; a third tube communicating with the first tube and the second tube; and a liquid level sensor disposed within the third tube and used to detect the liquid level contained in the third tube.

[0013] In one embodiment, the controller further includes an alarm unit for generating an alarm if an error is determined to have occurred in the flow meter.

[0014] In one embodiment, the flow rate measuring unit is housed within the housing.

[0015] The present invention provides a substrate processing device. The substrate processing apparatus includes: a housing having a processing space for processing a substrate therein; a support unit configured to support the substrate in the processing space; a nozzle for supplying liquid to the substrate placed on the support unit; a liquid supply unit configured to supply the liquid to the nozzle and having a flow meter; a flow rate measuring unit configured to verify an error in the flow meter; and a controller for controlling the liquid supply unit and the flow rate measuring unit, wherein the flow rate measuring unit includes: a cup for containing the liquid; a measuring device configured to verify the liquid level contained in the cup; and a discharge line for discharging the liquid from the cup and having a discharge valve installed on the discharge line, wherein the controller controls the liquid supply unit to discharge a first amount of liquid into the cup within a first time while the discharge valve is closed, and determines whether an error has occurred in the flow meter by comparing the first time with the time it takes for the liquid level contained in the cup to reach the first amount, as detected by the measuring device.

[0016] In one embodiment, the measuring device includes: an auxiliary container configured to communicate with the interior space of the cup on one side; and a liquid level sensor disposed in the auxiliary container and used to detect the liquid level contained in the cup.

[0017] In one embodiment, the measuring device includes a liquid level sensor disposed above the cup to illuminate the surface of the liquid contained in the cup to detect the liquid level.

[0018] In one embodiment, the measuring device includes a liquid level sensor inserted into one side of the cup and used to detect the liquid level contained in the cup.

[0019] In one embodiment, the measuring device includes: a first tube communicating with the cup at a first height; a second tube communicating with the cup at a second height above the first height; a third tube communicating with the first tube and the second tube; and a liquid level sensor disposed within the third tube and used to detect the liquid level contained in the third tube.

[0020] In one embodiment, the controller further includes an alarm unit for generating an alarm if an error is determined to have occurred in the flow meter.

[0021] In one embodiment, the flow rate measuring unit is housed within the housing.

[0022] This invention provides a method for verifying an error in a flow meter located at a liquid supply unit using a flow rate measurement unit. The flow rate measurement unit includes: a cup for containing liquid; a measuring device configured to verify the liquid level contained in the cup; and a discharge line for discharging the liquid from the cup, and a discharge valve is installed on the discharge line. The method for verifying the error in the flow meter includes: setting the flow rate of the flow meter; and verifying the error by discharging a first amount of liquid into the cup by the liquid supply unit in a first time period while the discharge valve is closed, and by detecting the liquid level by the measuring device.

[0023] In one embodiment, setting the flow rate of the flow meter includes first setting the position of the measuring device by placing the first amount of liquid, which has already been measured, into the cup with the discharge valve closed.

[0024] In one embodiment, the method for verifying a flow meter error further includes adjusting the flow rate of the flow meter based on whether the liquid level measured by the measuring device after the liquid supply unit discharges the first amount of liquid into the cup within the first time period, in the state where the set position is first set and the discharge valve is closed, corresponds to the first amount.

[0025] In one embodiment, verifying the flow meter's error includes determining by the measuring device whether the liquid level contained in the cup is the first quantity.

[0026] In one embodiment, detecting an error in the flow meter includes comparing the first time with the time it takes for the liquid level in the cup to reach the first amount, as determined by the measuring device.

[0027] In one embodiment, detecting an error in the flow meter includes generating an alarm if an error is determined to have occurred in the flow meter.

[0028] According to embodiments of the present invention, errors in flow meters can be accurately measured.

[0029] The effects of this invention are not limited to those described above, and other effects not mentioned will become apparent to those skilled in the art from the following description. Attached Figure Description

[0030] The above and other objects and features will become apparent from the following description with reference to the accompanying drawings, wherein, unless otherwise stated, the same reference numerals in the various drawings refer to the same parts, and wherein:

[0031] Figure 1 A substrate processing apparatus according to an embodiment of the present invention is illustrated schematically.

[0032] Figure 2 A flow rate measuring unit according to an embodiment of the present invention is shown.

[0033] Figures 3 to 5 Each illustrates a measuring device according to another embodiment of the conception of the present invention.

[0034] Figure 6 A flowchart of a flow meter error verification method according to an embodiment of the present invention is shown.

[0035] Figures 7 to 11 The flow meter error verification method of the present invention is shown in sequence. Detailed Implementation

[0036] The inventive concept can be modified and taken in various forms, and specific embodiments of the inventive concept will be shown and described in detail in the accompanying drawings. However, the embodiments of the inventive concept are not intended to limit the specific forms disclosed, and it should be understood that the inventive concept includes all variations, equivalents, and substitutions included within the spirit and scope of the inventive concept. In the description of the inventive concept, detailed descriptions of relevant prior art may be omitted where it may obscure the essence of the inventive concept.

[0037] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the inventive concept. As used herein, the word “the” is intended to include plural forms unless the context clearly indicates otherwise. It should also be understood that, when used in this specification, the terms “comprise” and / or “comprising” specify the presence of stated features, integrals, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or combinations thereof. As used herein, the terms “and / or” include any and all combinations of one or more of the associated listed items. Furthermore, the term “exemplary” is intended to refer to an example or illustration.

[0038] It should be understood that although the terms "first," "second," "third," etc., may be used herein to describe various elements, components, regions, layers, and / or sections, these elements, components, regions, layers, and / or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, or section from another region, layer, or section. Therefore, without departing from the teachings of the inventive concept, the first element, first component, first region, first layer, or first section discussed below may be referred to as a second element, second component, second region, second layer, or second section.

[0039] In the following, embodiments of the inventive concept will be described in detail with reference to the accompanying drawings.

[0040] In the following, an embodiment of a substrate processing apparatus for liquid processing of a substrate W using a liquid will be described. Figure 1 This is a cross-sectional view illustrating one embodiment of a substrate processing apparatus. (Reference) Figure 1 The substrate processing equipment includes a housing 310, a support unit 300, a nozzle 380, a liquid supply unit 100, and a flow rate measurement unit 200.

[0041] The housing 310 provides space for performing the substrate processing procedure. A support unit 300 is disposed within the housing 310. The support unit 300 supports the substrate during the process. In one embodiment, the support unit 300 supports and rotates the substrate during the process. In one embodiment, the support unit 300 has a top surface that is generally circular when viewed from above.

[0042] Nozzle 380 supplies liquid to substrate W during substrate processing. One or more nozzles 380 may be provided. Liquid supply unit 100 supplies liquid to nozzle 380. For example, the liquid may be an acidic solution such as hydrofluoric acid, sulfuric acid, nitric acid, phosphoric acid, etc., or a chemical solution such as an alkaline solution containing potassium hydroxide, sodium hydroxide, ammonium, etc. Optionally, the liquid may be an organic solvent such as isopropanol or pure water. In addition, the liquid may be a photosensitive liquid, such as a photoresist liquid. The type of liquid is not limited to these. In one embodiment, nozzle 380 is configured to be movable. In one embodiment, when viewed from above, nozzle 380 is configured to be movable between a position corresponding to substrate W placed on support unit 300 and a position corresponding to cup 210, which will be described later.

[0043] The liquid supply unit 100 includes a liquid supply source 110, a supply line 120, a supply valve 140, and a flow meter 160.

[0044] Liquid supply source 110 stores liquid. Supply line 120 supplies the liquid stored in liquid supply source 110 to nozzle 380. Supply valve 140 controls whether the liquid supplied to nozzle 380 through supply line 120 is supplied. Flow meter 160 adjusts the flow rate of the liquid supplied to nozzle 380. In one embodiment, flow meter 160 supplies a user-input flow rate to nozzle 380 for a predetermined time.

[0045] The flow rate measurement unit 200 verifies errors in the flow meter 160. The flow rate measurement unit 200 includes a cup 210, a measuring device 230, a discharge line, and a discharge valve 242. Liquid is contained in the cup 210. In one embodiment, the cup 210 receives liquid supplied from a nozzle. The measuring device 230 detects the liquid level contained in the cup 210. The discharge line 240 is provided with the discharge valve 242. The discharge valve 242 controls whether the liquid contained in the cup 210 is discharged.

[0046] Figure 2 The state of a flow rate measurement unit 200 according to an embodiment of the present invention is shown. (Reference) Figure 2The measuring device 230 includes an auxiliary container 220 and a level sensor 230a. The auxiliary container 220 is configured to communicate with the interior space of the cup 210 on one side. Therefore, if the liquid contained in the cup 210 reaches a predetermined level, the liquid is also contained in the auxiliary container 220. The level sensor 230a is disposed in the auxiliary container 220. In one embodiment, the level sensor 230a may be in contact with the liquid to detect the liquid level. In one embodiment, the level sensor 230a may transmit measurement data to a device such as a controller in real time. For example, the level sensor 230a may transmit data such as the measured liquid level and the time from the time the liquid is discharged until it reaches the predetermined level to a device such as a controller.

[0047] Figures 3 to 5 The states of the measuring device 230 according to another embodiment of the present invention are shown respectively.

[0048] refer to Figure 3 The measuring device 230 includes a liquid level sensor 230b disposed above the cup 210. The liquid level sensor 230b detects the liquid level by illuminating the surface of the liquid contained in the cup 210 with light. That is, the liquid level sensor 230b can measure the liquid level in a non-contact manner without contacting the liquid. In one embodiment, the liquid level sensor 230b may be mounted on a support member 231 fixed to the housing 310.

[0049] refer to Figure 4 The measuring device 230 includes a liquid level sensor 230c mounted on the cup 210. In one example, the measuring device 230 may include a liquid level sensor 230c that is inserted into one side of the cup 210 and detects the liquid level contained in the cup (210). In one example, the liquid level sensor 230c is mounted on a support member 232 fixed to the cup 210. The liquid level sensor 230c may be in contact with the liquid to detect the liquid level.

[0050] refer to Figure 5The measuring device 230 includes a first tube 252, a second tube 256, a third tube 254, and a liquid level sensor 230d. The first tube 252 communicates with the cup 210 at a first height. The second tube 256 communicates with the cup 210 at a second height above the first height. The third tube 254 communicates with both the first tube 252 and the second tube 256. The third tube 254 is positioned perpendicular to both the first tube 252 and the second tube 256. If the liquid contained in the cup 210 exceeds a predetermined level, the liquid escapes through the first hole 212 into the first tube 252. Because the second tube 256 allows the liquid to return to the cup 210 through the second hole 214, the liquid level remains constant. The liquid level sensor 230d is disposed in the third tube 254 to detect the liquid level contained in the third tube 254. The liquid level sensor 230d can contact the liquid to detect the liquid level.

[0051] In one embodiment, if the controller determines that an error exists in the flow meter 160, it may also include an alarm unit (not shown) for generating an alarm.

[0052] In the following text, reference will be made to Figures 6 to 11 A method for verifying the error of the flow meter 160 according to the present invention is described. A controller can control a substrate processing device to execute the method for verifying the error of the flow meter 160 according to the present invention. Hereinafter, a measuring device 230 will be described as being disposed of in an auxiliary container 220 and a level sensor 230a. However, another embodiment of the measuring device 230 described above can be used in contrast.

[0053] Figure 6 A flowchart illustrating an error verification method for a flow meter 160 according to the present invention is shown. (Reference) Figure 6 The error verification method for the flow meter 160 conceived in this invention includes a flow rate setting step S10 and an error verification step S20. In the flow rate setting step S10, the flow rate of the flow meter 160 is set. The flow rate setting step S10 includes a first setting step S11 and a second setting step S12.

[0054] In the first setting step S11, the setting position of the measuring device 230 is set. For example, in the first setting step S11, the setting position of the liquid level sensor 230a is determined. Figures 7 to 8 The first setup step S11 is shown. Assume the amount of liquid to be supplied to the substrate is a first quantity A. First, the liquid is placed in a measuring device such as a beaker 700 to measure whether the liquid is the first quantity A. Afterwards, as... Figure 8As shown, a first quantity A of liquid, to be measured when the discharge valve 242 is locked, is placed in cup 210 to set the position of the measuring device 230. For example, if the first quantity A of liquid is placed in cup 210, the mounting position of the level sensor 230a is set such that when the auxiliary container is filled with liquid, the liquid can contact the level sensor 230a. If the installation of the level sensor 230a is complete, as... Figure 9 As shown, the drain valve 242 is opened to empty the cup 210.

[0055] After the first setting step S11, the second setting step S12 is executed. In the second setting step S12, as follows: Figure 10 As shown, when the discharge valve 242 is locked, the liquid supply unit 100 discharges a first quantity A of liquid into the cup 210 within a first time. In the first setting step S11, it is determined whether the liquid level measured by the level sensor 230a at the set position corresponds to the first quantity A, and the flow rate of the flow meter 160 is adjusted accordingly. If the flow rate measured by the level sensor 230a is different from the flow rate in the first setting step S11, then... Figure 10 As shown, adjust the flow rate of flow meter 160.

[0056] After the second setting step S12, the error verification step S20 is performed. In the error verification step S20, it is determined whether there is an error in the flow meter 160. In the flow rate setting step S10, it is confirmed whether the flow rate of the liquid supplied through the flow meter 160 in the first time corresponds to the first quantity A, but errors may occur in the flow meter 160 due to reuse, etc.

[0057] Therefore, as Figure 11 As shown, when the discharge valve 242 is locked, the liquid supply unit 100 discharges a first amount A of liquid into the cup 210 in the first time, but the measuring device 230 determines whether the liquid level in the cup 210 is the first amount A.

[0058] Alternatively, when the discharge valve 242 is locked, the liquid supply unit 100 discharges a first amount A of liquid into the cup 210 in the first time, but compares the first time with the time when the measuring device 230 detects that the liquid level contained in the cup 210 has reached the first amount A in order to detect whether an error has occurred in the flow meter 160.

[0059] In one embodiment, if the controller determines that an error exists in the flow meter 160, the alarm unit generates an alarm.

[0060] According to the present invention, in order to verify the error of the flow meter 160, the time until a preset amount of liquid reaches a preset liquid level in the cup 210, the liquid height, etc., are transmitted in real time to the controller to verify the error of the flow meter 160 and the log data is stored. Therefore, it has the following advantages: it can be known whether an error has occurred in the flow meter 160, and it can be determined at what point the error occurred in the flow meter 160.

[0061] Furthermore, according to the present invention, the flow rate measuring unit 200 is disposed in the housing 310 to verify errors in the flow meter 160, so that the operator does not need to open the housing 310 to measure the flow rate, thereby ensuring worker safety and reducing the risk of foreign matter entering the housing 310.

[0062] The effects of this invention are not limited to those described above, and any effects not mentioned will be clearly understood by those skilled in the art based on this specification and the accompanying drawings.

[0063] Although preferred embodiments of the inventive concept have been shown and described up to now, the inventive concept is not limited to the specific embodiments described above, and it should be noted that those skilled in the art to which the inventive concept relates can implement the inventive concept differently without departing from the essence of the inventive concept as claimed in the claims, and should not be interpreted or modified separately from the technical spirit or prospect of the inventive concept.

Claims

1. A substrate processing apparatus, comprising: A housing having a processing space therein for processing a substrate; A support unit configured to support the substrate at the processing space; A nozzle for supplying liquid to a substrate placed on the support unit; A liquid supply unit configured to supply the liquid to the nozzle and having a flow meter; as well as A flow velocity measurement unit, configured to verify errors in the flow meter; as well as The controller is used to control the liquid supply unit and the flow rate measurement unit, and The flow rate measuring unit is housed within the housing. The flow rate measurement unit includes: A cup for containing the liquid; A measuring device configured to verify the liquid level contained in the cup; and A drain line is provided for draining the liquid from the cup, and a drain valve is installed on the drain line. The measuring device includes: An auxiliary container, configured to communicate with the interior space of the cup on one side, such that when the liquid contained in the cup reaches a predetermined level, the liquid is also contained in the auxiliary container; and A liquid level sensor, disposed in the auxiliary container and used to detect the liquid level contained in the cup, wherein the controller controls the liquid supply unit to discharge a first amount of liquid into the cup within a first time while the discharge valve is closed. When the first amount of liquid is placed in the cup, the liquid level sensor is positioned such that when the auxiliary container is filled with liquid, the liquid can contact the liquid level sensor to detect the liquid level. The measuring device is controlled to determine whether an error has occurred in the flow meter by determining whether the liquid level contained in the cup is the first amount.

2. The substrate processing apparatus of claim 1, wherein the controller further comprises an alarm unit for generating an alarm upon determining that an error has occurred in the flow meter.

3. A substrate processing apparatus, comprising: A housing having a processing space therein for processing a substrate; A support unit configured to support the substrate at the processing space; A nozzle for supplying liquid to a substrate placed on the support unit; A liquid supply unit configured to supply the liquid to the nozzle and having a flow meter; as well as A flow velocity measurement unit, configured to verify errors in the flow meter; as well as The controller is used to control the liquid supply unit and the flow rate measurement unit, and The flow rate measuring unit is housed within the housing. The flow rate measurement unit includes: A cup for containing the liquid; A measuring device configured to verify the liquid level contained in the cup; and A drain line is provided for draining the liquid from the cup, and a drain valve is installed on the drain line. The measuring device includes: An auxiliary container, configured to communicate with the interior space of the cup on one side, such that when the liquid contained in the cup reaches a predetermined level, the liquid is also contained in the auxiliary container; and A liquid level sensor, disposed in the auxiliary container and used to detect the liquid level contained in the cup, wherein the controller controls the liquid supply unit to discharge a first amount of liquid into the cup within a first time while the discharge valve is closed. When the first amount of liquid is placed in the cup, the liquid level sensor is positioned such that when the auxiliary container is filled with liquid, the liquid can contact the liquid level sensor to detect the liquid level. Whether an error has occurred in the flow meter is determined by comparing the first time with the time it takes for the liquid level in the cup, as detected by the measuring device, to reach the first amount.

4. The substrate processing apparatus of claim 3, wherein the controller further comprises an alarm unit for generating an alarm upon determining that an error has occurred in the flow meter.

5. A method for verifying errors in a flow meter using a flow rate measurement unit, the flow meter being disposed at a liquid supply unit, the flow rate measurement unit being disposed in a housing of a substrate processing apparatus having a processing space therein for processing substrates, and the flow rate measurement unit comprising: A cup, the cup being used to hold liquid; A measuring device configured to verify the liquid level contained in the cup; as well as A drain line is provided for draining the liquid from the cup, and a drain valve is installed on the drain line. The measuring device includes: An auxiliary container, configured to communicate with the interior space of the cup on one side, such that when the liquid contained in the cup reaches a predetermined level, the liquid is also contained in the auxiliary container; and A liquid level sensor, disposed in the auxiliary container and used to detect the liquid level contained in the cup, wherein the method for verifying the error of the flow meter includes: Set the flow rate of the flow meter; and The error of the flow meter is verified by discharging a first amount of liquid into the cup by the liquid supply unit in the first time period while the discharge valve is closed, and by detecting the liquid level by the measuring device. When the first amount of liquid is placed in the cup, the liquid level sensor is positioned such that when the auxiliary container is filled with liquid, the liquid can contact the liquid level sensor to detect the liquid level.

6. The method for verifying errors in a flow meter according to claim 5, wherein setting the flow rate of the flow meter includes first setting the position of the measuring device by placing the first amount of liquid, which has already been measured, into the cup while the discharge valve is closed.

7. The method for verifying errors in a flow meter according to claim 6, further comprising adjusting the flow rate of the flow meter based on whether the liquid level measured by the measuring device after the liquid supply unit discharges the first amount of liquid into the cup within the first time period in the state of first setting the setting position and the discharge valve being closed corresponds to the first amount.

8. The method for verifying an error in the flow meter according to claim 5, wherein verifying an error in the flow meter includes determining by the measuring device whether the liquid level of the liquid contained in the cup is the first amount.

9. The method for verifying an error in a flow meter according to claim 5, wherein detecting an error in the flow meter includes comparing the first time with the time it takes for the liquid level in the cup to reach the first amount by the measuring device.

10. The method for verifying errors in a flow meter according to claim 5, wherein detecting an error in the flow meter includes generating an alarm upon determining that an error has occurred in the flow meter.

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