Vacuum suction pen

Abstract

This invention provides a vacuum suction pen, comprising a pen barrel; a vacuum suction head connected to the front end of the pen barrel; an air tube interface connected to the rear end of the pen barrel; a suction channel disposed inside the pen barrel, the suction channel connecting the vacuum suction head and the air tube interface; a sliding groove extending from the outer side of the pen barrel into the pen barrel, the sliding groove passing through the suction channel; a pin disposed within the sliding groove, the front end of the pin protruding from the sliding groove, the rear end passing through the intersection of the sliding groove and the suction channel, the pin being able to slide back and forth along the extension direction of the sliding groove; and a suction hole disposed in the middle of the pin and passing through the pin. Compared with the prior art, the vacuum suction pen provided by this invention can pick up wafers, while ensuring equal air pressure on the inner and outer surfaces of the wafer when detaching it, which is beneficial for wafer detachment, thereby avoiding wafer detachment failure after adsorption, and is easy to operate.

Description

[Technical Field]

[0001] This invention belongs to the field of wafer picking technology, and particularly relates to a vacuum pick-up pen for picking up wafers. [Background Technology]

[0002] In the field of semiconductor device fabrication, especially in the semiconductor device packaging process, the die mounting section needs to manually install chips to make some samples. Due to the fragility and susceptibility of chips, a professional vacuum pen (with a matching nozzle) is needed when handling and installing chips. The vacuum pen achieves adsorption by connecting a vacuum tube and a vacuum pumping device.

[0003] Currently available vacuum suction pens on the market have relatively simple functions. Their structure mostly consists of a pen barrel and a suction nozzle, with air holes on the side of the pen barrel. The suction nozzle's ability to adhere to the crystal is achieved by repeatedly blocking the air holes. For example, patent number 201720533008.3 describes a vacuum suction pen for crystal oscillator quartz wafers, which states: "A vacuum suction pen includes an aluminum alloy pen barrel, a first suction nozzle at the front end of the pen barrel, an air pipe interface for connecting an air pipe at the rear end of the pen barrel, a hollow cavity inside the pen barrel connecting the first suction nozzle and the air pipe interface, an outer sleeve near the rear end of the pen barrel, a third opening on one side of the front end of the pen barrel, and a movable suction nozzle that can slide back and forth within the hollow cavity on the inner side of the front end of the pen barrel. The movable suction nozzle is fitted onto the front end of the pen barrel..." The outer sliding sleeves are magnetically attracted to each other. A front retaining ring is provided at the first suction nozzle at the front end of the pen holder to prevent the sliding sleeve and movable suction nozzle from detaching from the pen holder. A rear retaining ring is provided on the rear side of the sliding sleeve for adsorbing the sliding sleeve. The movable suction nozzle, front retaining ring, and rear retaining ring are all stainless steel components, and the sliding sleeve is a magnet. During use, it achieves the chip adsorption function by blocking the third opening. However, when releasing the chip, although the third opening is open, due to the adsorption effect of air pressure, there is still a certain air pressure difference between the inner and outer surfaces of the chip. When the weight of the chip is less than the adsorption force of the air pressure, the chip is easily unable to detach. Furthermore, during the chip release process, because the third opening is open, the adsorption effect of air pressure easily causes dust, impurities, or small parts in the operating space to be sucked into the vacuum pen. Moreover, this device can only adsorb chips of two sizes, limiting its applicability.

[0004] Therefore, there is an urgent need to propose a new technical solution to address the above problems. [Summary of the Invention]

[0005] One of the objectives of this invention is to provide a vacuum suction pen that can pick up wafers while avoiding wafers from detaching after being attracted, and is easy to operate.

[0006] According to one aspect of the present invention, a vacuum suction pen is provided, comprising a pen barrel; a vacuum suction head connected to the front end of the pen barrel; an air tube interface connected to the rear end of the pen barrel; a suction channel disposed within the pen barrel, the suction channel communicating with the vacuum suction head and the air tube interface; a sliding groove extending from the outer side of the pen barrel into the pen barrel, the sliding groove penetrating the suction channel to divide the suction channel into a first channel and a second channel located on both sides of the sliding groove, wherein the first channel is close to the front end of the pen barrel and the second channel is close to the rear end of the pen barrel; a pin disposed within the sliding groove, the front end of the pin protruding from the sliding groove, the rear end of the pin passing through the intersection of the sliding groove and the suction channel, the pin being slidable back and forth along the extending direction of the sliding groove; and a suction hole disposed in the middle of the pin and penetrating the pin.

[0007] Compared with the prior art, the vacuum suction pen provided by the present invention can pick up the wafer, and at the same time ensures that the air pressure on the inner and outer sides of the wafer is equal when detaching the wafer, which is conducive to the detachment of the wafer. This can avoid the failure of wafer detachment after adsorption, and the operation is simple. [Attached Image Description]

[0008] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0009] Figure 1 This is a schematic diagram of the vacuum suction pen of the present invention from a first-view perspective in one embodiment;

[0010] Figure 2 This is a schematic diagram of the vacuum suction pen of the present invention from a second perspective in one embodiment;

[0011] Figure 3 This is a cross-sectional schematic diagram of a partial structure of the vacuum pen suction device when the pin is in the first position in one embodiment of the present invention;

[0012] Figure 4 This is a cross-sectional schematic diagram of a partial structure of the vacuum pen suction device when the pin is in the second position in one embodiment of the present invention;

[0013] Figure 5 This is a schematic diagram of the structure of a vacuum suction head in one embodiment of the present invention;

[0014] Figure 6 This is a cross-sectional view of a vacuum suction head according to one embodiment of the present invention.

Detailed Implementation Methods

[0015] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0016] The term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the invention. The phrase "in one embodiment" appearing in different places throughout this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments. Unless otherwise specified, the terms "connected," "linked," and "connected" used herein to indicate electrical connection refer to direct or indirect electrical connection.

[0017] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used only for the convenience of describing the invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0018] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," "fixing," and "coupling" should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0019] Please refer to Figure 1 As shown, it is a structural schematic diagram of the vacuum suction pen of the present invention from a first-view perspective in one embodiment; please refer to... Figure 2 As shown, this is a schematic diagram of the vacuum suction pen of the present invention from a second perspective in one embodiment; please refer to... Figure 3 The diagram shown is a cross-sectional schematic of a partial structure of the vacuum pen suction device in one embodiment of the present invention when the pin is in the first position; please refer to... Figure 4 As shown, it is a cross-sectional schematic diagram of a partial structure of the vacuum pen suction device when the pin is in the second position in one embodiment of the present invention. Figure 1-4The vacuum suction pen shown includes a pen holder 2, a vacuum suction head 4, an air tube interface 1, a suction channel 11, a slide 18, a pin 3, and a suction hole 17.

[0020] The vacuum suction head 4 is connected to the front end of the pen holder 2 and is used to pick up (or adsorb) the chip; the air pipe interface 1 is connected to the rear end of the pen holder 2 and is connected to the vacuum suction pipe; the suction channel 11 is set inside the pen holder 2 and connects the vacuum suction head 4 and the air pipe interface 1.

[0021] The groove 18 extends from the outer side of the pen holder 2 into the interior of the pen holder 2, and the groove 18 penetrates the air intake channel 11 to divide the air intake channel 11 into a first channel 112 and a second channel 114 located on both sides of the groove 18. The first channel 112 is closer to the front end of the pen holder 2, and the second channel 114 is closer to the rear end of the pen holder 2. Figure 1-4 In the specific embodiment shown, the slide groove 18 is located at the front of the pen holder 2; the slide groove 18 and the air intake channel 11 are distributed perpendicularly to each other.

[0022] Pin 3 is disposed within slide groove 18, with its front end protruding from the slide groove 18 and its rear end passing through the intersection of slide groove 18 and suction channel 11. Pin 3 can slide back and forth along the extending direction of slide groove 18. Suction hole 17 is disposed in the middle of pin 3 and passes through pin 3. Figure 1-4 In the specific embodiment shown, the air intake hole 17 extends through the pin 3 along the extension direction perpendicular to the pin 3.

[0023] like Figure 3 As shown, when the pin 3 slides along the slide groove 18 to the first position, the air intake hole 17 is located at the intersection of the slide groove 18 and the air intake channel 11. At this time, the air intake hole 17 connects the first channel 112 and the second channel 114 in the pen holder 2.

[0024] like Figure 4 As shown, when the pin 3 slides along the slide groove 18 to the second position, the suction hole 17 leaves the intersection of the slide groove 18 and the suction channel 11. At this time, the pin 3 blocks the intersection of the slide groove 18 and the suction channel 11 to cut off the connection between the first channel 112 and the second channel 114.

[0025] exist Figures 1-4 In the embodiment shown, the vacuum pen also includes a ventilation channel communicating with the outside of the pen holder 2. When the pin 3 slides along the slide groove 18 to the first position, one end of the ventilation channel leaves the intersection of the slide groove 18 and the suction channel 11. At this time, the ventilation channel is not connected to the first channel 112 and the second channel 114. When the pin 3 slides along the slide groove 18 to the second position, one end of the ventilation channel is located at the intersection of the slide groove 18 and the suction channel 11. At this time, the first channel 112 is connected to the outside of the pen holder 2 through the ventilation channel.

[0026] exist Figures 1-4 In the specific embodiment shown, the ventilation channel includes a first ventilation hole 10 and a second ventilation hole 8. The first ventilation hole 10 is located at the rear of the pin 3 (near the bottom of the slide groove 18), extending from the rear end face of the pin 3 into the pin 3 and continuing to the outer side of the rear of the pin 3. One end of the first ventilation hole 10 (which serves as one end of the ventilation channel) is located on the outer side of the rear of the pin 3, and the other end is located at the rear end face of the pin 3. The second ventilation hole 8 extends from the bottom of the slide groove 18 to the outer side of the pen holder 2, and the second ventilation hole 8 communicates with the other end of the first ventilation hole 10 via the bottom of the slide groove 18. The suction hole 17 in the pin 3 is farther from the bottom of the slide groove 18 than the first ventilation hole 10. The first ventilation hole 10 can be an L-shaped structure.

[0027] like Figure 3 As shown, when the pin 3 slides along the slide groove 18 to the first position, one end of the first vent 10 leaves the intersection of the slide groove 18 and the suction channel 11. At this time, the first vent 10 is not connected to the first channel 112 and the second channel 114.

[0028] like Figure 4 As shown, when the pin 3 slides along the slide groove 18 to the second position, one end of the first vent hole 10 is located at the intersection of the slide groove 18 and the suction channel 11. At this time, the first channel 112 is connected to the outside of the pen holder 2 through the first vent hole 10, the bottom of the slide groove 18 and the second vent hole 8 in sequence. The first vent hole 10 is not connected to the second channel 114.

[0029] exist Figures 1-4 In the embodiment shown, the vacuum pen also includes two sealing rings 7, which are respectively disposed on both sides of the intersection of the slide groove 18 and the suction channel 11. The pin 3 passes through one sealing ring 7, the intersection of the slide groove 18 and the suction channel 11, and the other sealing ring 7 in sequence to prevent gas from leaking from the connection between the pin 3 and the slide groove 18.

[0030] exist Figures 1-4 In the embodiment shown, the vacuum pen also includes an elastic component 6 (e.g., a spring) disposed within the groove 18, which is used to reset the pin 3.

[0031] exist Figures 1-4 In the illustrated embodiment, the vacuum suction pen further includes a retaining ring 5 and a retaining ring groove 9. The retaining ring 5 is fixedly sleeved on the outer side of the pin 3. The retaining ring groove 9 is disposed between the opening of the slide groove 18 and the junction of the slide groove 18 and the suction channel 11. The retaining ring 5 is located within the retaining ring groove 9, and the retaining ring groove 9 is used to limit the forward and backward movement range of the retaining ring 5 along the extension direction of the slide groove 18. For example, the retaining ring 5 can be slidably located within the retaining ring groove 9, that is, the retaining ring 5 can only move within the retaining ring groove 9.

[0032] exist Figures 1-4 In the specific embodiment shown, the elastic component 6 is a spring, which is sleeved on the pin 3 and located within the retaining ring groove 9. When the user presses the front end of the pin 3, the pin 3 moves inward along the slide groove 18 to the first position, and the elastic component 6 deforms. When the user removes the pressure on the front end of the pin 3, the elastic component 6 drives the pin 3 to move outward along the slide groove 18 to the second position, so that the pin 3 returns to its original position. Therefore, the retaining ring 5 can prevent the pin 3 from excessively popping out when the spring 6 returns to its original position, thus limiting the movement distance of the pin 3.

[0033] Please refer to Figure 5 As shown, this is a schematic diagram of the vacuum suction head 4 in one embodiment of the present invention; please refer to... Figure 6 The image shown is a cross-sectional view of the vacuum suction head 4 in one embodiment of the present invention. Figure 5 and Figure 6 In the embodiment shown, a third vent 12 is provided inside the vacuum nozzle 4, which connects the front end and the rear end of the vacuum nozzle 4; the third vent 12 is connected to the first channel 112 inside the pen holder 2; and the rear end of the vacuum nozzle 4 is connected to the front end of the pen holder 2.

[0034] exist Figure 5 and Figure 6 In the illustrated embodiment, the front end of the vacuum suction head 4 is provided with an adsorption groove 13, which is connected to the third vent 12; an adsorption plate 14 can be placed inside the adsorption groove 13, and the adsorption plate 14 has several through holes 15. The distance between the adsorption plate 14 and the port of the adsorption groove 13 is adjustable.

[0035] exist Figure 5 and Figure 6 In the specific embodiment shown, the outer side of the adsorption plate 14 is threadedly connected to the adsorption groove 13; a slot 16 is provided in the middle of the adsorption plate 14. The slot 16 can be selected in shape as needed, mainly to facilitate the rotation of the adsorption plate 14 to adjust the position of the adsorption plate 14 in the adsorption groove 13 (or the distance between the adsorption plate 14 and the port of the adsorption groove 13) so as to be suitable for wafers of different thicknesses.

[0036] Based on Figures 1-6 The working principle of the vacuum suction pen provided by this invention will be described in detail below.

[0037] Select vacuum suction heads 4 with different sizes of suction grooves 13 as needed. When the size of the wafer to be suctioned is large, choose a vacuum suction head 4 with a larger opening size of the suction groove 13; conversely, choose a vacuum suction head 4 with a smaller opening size of the suction groove 13. Attach the selected vacuum suction head 4 to the front end of the pen holder 2, ensuring a sealed structure after attachment to prevent gas from escaping from the interface during wafer suction. The attachment method can be threaded or other; the specific structure is not limited. In other words, the vacuum suction head 4 is detachably connected to the front end of the pen holder 2, preferably via a snap-fit ​​connection.

[0038] After installing the vacuum suction head 4, align the suction groove 13 of the vacuum suction head 4 with the wafer to be suctioned, press the pin 3 with your finger, and the pin 3 will move inward under pressure until the suction hole 17 and the suction channel 11 are connected (i.e., the pin 3 slides along the slide groove 18 to the first position), and the vacuum suction head 4 will pick up the wafer; when it is time to put down the suctioned wafer, simply release the finger pressing the pin 3, and the pin 3 will be driven outward by the elastic force of the spring 6 to reset (i.e., the pin 3 slides along the slide groove 18 to the second position). At this time, the suction hole 17 is disconnected from the suction channel 11, and the pin 3 blocks the suction channel 11. At the same time, the first vent hole 10 is connected to the third vent hole 12 in the vacuum suction head 4 and the second vent hole 8 on the pen holder 2, so that the air pressure on both sides of the wafer is the same. Under the action of its own gravity, the wafer is detached from the vacuum suction pen. The above structure solves the problem in a vacuum suction pen described in patent document 201720533008.3 that the wafer is not easy to detach when it is detached due to the air pressure difference between the inside and outside of the wafer.

[0039] The adsorption plate 14 with through holes 15 located in the adsorption groove 13 can prevent larger impurities from being sucked into the pen holder 2. When the thickness of the wafer is thin or thick, the adsorption plate 14 can be rotated by a tool (such as a screwdriver) that matches the slot 16 to adjust the distance between the adsorption plate 14 and the outer port of the adsorption groove 13, so as to adapt to the adsorption of wafers of different thicknesses.

[0040] In summary, the vacuum suction pen provided by this invention has the following advantages: it allows for the selection of vacuum suction heads 4 with different sizes of suction grooves 13 according to the size requirements of the wafer, making it suitable for suctioning wafers of various sizes; it ensures that the air pressure on the inner and outer surfaces of the wafer is equal when detaching the wafer, which is beneficial for the wafer to fall off; and it does not generate negative pressure on the vacuum suction pen when it is not performing a suction operation, thus avoiding the suction of dust or small parts in the operating space.

[0041] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0042] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications and variations to the above embodiments within the scope of the present invention.

Claims

1. A vacuum suction pen, characterized by, It includes: Pen holder; A vacuum suction head is attached to the front end of the pen holder; An airway connector is attached to the rear end of the pen holder; An air intake channel is provided inside the pen holder, and the air intake channel connects the vacuum nozzle and the air tube interface; A groove extends from the outer side of the pen holder into the inside of the pen holder, and the groove passes through the air intake channel to divide the air intake channel into a first channel and a second channel located on both sides of the groove, wherein the first channel is close to the front end of the pen holder and the second channel is close to the rear end of the pen holder. A pin is disposed in the slide groove, with its front end exposed outside the slide groove and its rear end passing through the intersection of the slide groove and the air intake channel. The pin can slide back and forth along the extension direction of the slide groove. An air intake hole is located in the middle of the pin and passes through the pin. When the pin slides along the groove to the first position, the suction hole is located at the intersection of the groove and the suction channel. At this time, the suction hole connects the first channel and the second channel. When the pin slides along the groove to the second position, the suction hole leaves the junction of the groove and the suction channel. At this time, the pin blocks the junction of the groove and the suction channel, thereby cutting off the connection between the first channel and the second channel. It also includes: a ventilation channel communicating with the outside of the pen holder. When the pin slides along the groove to the first position, one end of the ventilation channel leaves the intersection of the groove and the suction channel. At this time, the ventilation channel is not connected to either the first channel or the second channel. When the pin slides along the groove to the second position, one end of the ventilation channel is located at the intersection of the groove and the suction channel. At this time, the first channel is connected to the outside of the pen holder through the ventilation channel.

2. The vacuum suction pen according to claim 1, characterized in that, The ventilation channel includes: A first vent is provided at the rear of the pin. The first vent extends from the rear end face of the pin into the pin and continues to the outer side of the rear of the pin. One end of the first vent is located on the outer side of the rear of the pin, and the other end is located at the rear end face of the pin. A second vent extends from the bottom of the slide groove to the outer side of the pen holder. The second vent communicates with the other end of the first vent. When the pin slides along the groove to the first position, one end of the first vent hole leaves the intersection of the groove and the suction channel. At this time, the first vent hole is not connected to either the first channel or the second channel. When the pin slides along the groove to the second position, one end of the first vent is located at the intersection of the groove and the suction channel. At this time, the first channel communicates with the outside of the pen holder through the first vent and the second vent in sequence.

3. The vacuum suction pen according to claim 1, characterized in that, It also includes two sealing rings and an elastic component disposed within the groove. The two sealing rings are respectively disposed on both sides of the intersection of the slide groove and the air intake channel; The pin passes sequentially through one of the sealing rings, the junction of the slide groove and the air intake channel, and another sealing ring to prevent gas leakage from the connection between the pin and the slide groove. The elastic component is used to reset the pin.

4. The vacuum suction pen according to claim 3, characterized in that, It also includes: a retaining ring, which is fixedly sleeved on the outer side of the pin; a retaining ring groove, which is disposed between the inlet of the slide groove and the junction of the slide groove and the air intake channel, wherein the retaining ring is located in the retaining ring groove, and the retaining ring groove is used to limit the range of forward and backward movement of the retaining ring along the extension direction of the slide groove; The elastic component is sleeved on the pin and located within the retaining ring groove. When the user presses the front end of the pin, the pin moves inward along the groove to the first position, and the elastic component deforms. When the user removes the pressure on the front end of the pin, the elastic component drives the pin to move outward along the groove to the second position, so that the pin is reset.

5. The vacuum suction pen according to claim 1, characterized in that, The vacuum suction head is provided with a third vent, which connects the front end and the rear end of the vacuum suction head. The third vent is connected to the first channel inside the pen holder; The rear end of the vacuum suction head is connected to the front end of the pen holder; The front end of the vacuum suction head is provided with an adsorption groove, which is connected to the third vent hole; An adsorption plate is provided inside the adsorption groove, and the adsorption plate has several through holes.

6. The vacuum suction pen according to claim 5, characterized in that, The distance between the adsorption plate and the port of the adsorption groove is adjustable; The vacuum suction head is detachably connected to the front end of the pen holder; Select the vacuum suction head with different opening sizes for the suction groove as needed.

7. The vacuum suction pen according to claim 6, characterized in that, The adsorption plate and the adsorption groove are connected by a thread. The adsorption plate is also provided with a card slot. The distance between the port of the adsorption plate and the adsorption groove is adjusted using a tool that matches the slot.

8. The vacuum suction pen according to claim 2, characterized in that, The groove is located at the front of the pen holder; The groove and the suction channel are perpendicular to each other; the suction hole extends through the pin along a direction perpendicular to the extension of the pin; and / or The first vent is L-shaped.

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