Electrostatic bar mounting insulating beam and electrostatic bar mounting mechanism
The electrostatic bar mounting beam, composed of an insulating side panel and a blowing plate, combined with an air supply device and a solenoid valve, solves the problems of electrostatic bar leakage and inconvenient dust cleaning. It realizes the insulating installation of electrostatic bars and automatic dust cleaning, improving paper laying efficiency and the safety and aesthetics of the production line.
Patent Information
- Application Number
- CN202310080838.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-01-28
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2043-01-28
AI Technical Summary
The existing method of installing electrostatic bars causes problems such as leakage and inconvenience in cleaning, which affects the paper laying effect and production efficiency.
An insulating beam for installing electrostatic bars, consisting of insulating side panels, insulating blow plates, and insulating top covers, combined with an air supply device and a solenoid valve, enables the insulating installation of electrostatic bars and automatic dust cleaning.
Ensure that the antistatic bar does not leak electricity in an insulated environment, automatically clean dust, improve paper laying success rate, reduce labor intensity, extend the service life of the antistatic bar, and maintain the safety and aesthetics of the production line.
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Figure CN115988722B_ABST
Abstract
Description
Technical Field
[0001] This disclosure relates to the field of electrostatic bar installation technology, and in particular to an insulating crossbeam for electrostatic bar installation and an electrostatic bar installation mechanism. Background Technology
[0002] Finished glass products need to be laid with paper online before they can be stacked. After the paper-laying machine lays the paper on the glass, static electricity needs to be applied to the upper surface of the spacer paper. Before the glass reaches the stacker, it is essential to ensure that the spacer paper and the upper surface of the glass being laid are tightly adhered together. Otherwise, as the glass travels on the conveyor rollers, the spacer paper will be affected by airflow and drift off the paper surface, affecting the paper-laying effect. Currently, our company's paper-laying area has multiple static electricity generators. Static electricity bars are installed on the glass, and the static electricity generator produces high voltage static electricity, which is then applied to the laid spacer paper through the static electricity emitter at the lower end of the static electricity bar.
[0003] Current technology typically uses aluminum alloy profile hangers to install electrostatic discharge (ESD) rods. This installation method has two drawbacks: First, while it meets the requirements when the ESD rod is first used, the insulating shell will soon be broken down by 30 kV high-voltage electrostatic discharge, reducing the insulation between the ESD rod and the aluminum alloy hanger, causing leakage and affecting paper laying performance, which can even lead to paper laying failure in severe cases. Second, because static electricity attracts dust from the atmosphere, the ESD rod needs to be disassembled and reassembled periodically to clean the emitting needles, which is cumbersome and can sometimes disrupt production. Summary of the Invention
[0004] One of the technical problems this disclosure aims to solve is to improve the problem of paper laying failure and inconvenient dust removal caused by leakage due to the existing installation method of the electrostatic bar.
[0005] To solve the above-mentioned technical problems, this disclosure provides an insulating crossbeam for mounting an electrostatic bar, comprising: insulating side panels, an insulating purge plate, and an insulating top cover plate; wherein, the two insulating side panels are arranged opposite each other in the left-right direction, and the insulating top cover plate and the insulating purge plate are arranged opposite each other in the up-down direction at both ends of the two insulating side panels and are connected to the two insulating side panels to form a receiving cavity for accommodating the electrostatic bar; the insulating purge plate has an electrostatic emission channel corresponding to the electrostatic emission needle of the electrostatic bar, and the insulating purge plate is provided with an air inlet, an internal air cavity, and an air purge port connected in sequence, the air purge port is arranged facing the electrostatic emission needle, and the air inlet is used to connect to an air supply device.
[0006] In some embodiments, the electrostatic emission channel divides the insulating purge plate into two sub-insulating purge plates; the electrostatic rod is supported above the two sub-insulating purge plates; the axis of the air inlet is perpendicular to the sub-insulating purge plate; the built-in air cavity is connected to the air inlet through a built-in air inlet channel; the extension direction of the built-in air cavity is parallel to the length direction of the electrostatic rod; and multiple air purge ports are arranged sequentially at intervals along the length direction of the electrostatic rod.
[0007] In some embodiments, the air purge port is arranged obliquely from bottom to top and penetrates the sidewall of the sub-insulating purge plate near the electrostatic emission needle.
[0008] In some embodiments, the air inlet and the air purge port are respectively located on the left and right sides of the insulating side panel; the sub-insulating purge plate with the air inlet forms a solenoid valve mounting position for installing the solenoid valve; the air inlet is connected to the air supply device through the solenoid valve.
[0009] In some embodiments, the insulating side panel has a threaded hole corresponding to the electrostatic bar; the insulating connector is screwed into the threaded hole to fix the electrostatic bar.
[0010] In some embodiments, the electrostatic bar is integrally formed with an insulating crossbeam.
[0011] In some embodiments, at least one end of the front and rear ends of the receiving cavity is covered with an insulating end cap.
[0012] In some embodiments, the insulating crossbeam for mounting the electrostatic bar is made of fiberglass.
[0013] In some embodiments, the electrostatic bar mounting insulating beam further includes: an insulating partition; wherein the insulating partition is disposed between the insulating upper cover plate and the insulating blow plate, and divides the receiving cavity into an upper chamber and a lower chamber, such that the lower chamber is used to place the electrostatic bar and the upper chamber is used to place the pipeline; the insulating partition is provided with a wire hole; the insulating upper cover plate is provided with a wiring operation hole.
[0014] To solve the above-mentioned technical problems, this disclosure provides an electrostatic rod mounting mechanism, including: an electrostatic rod, an air supply device, and an electrostatic rod mounting insulating beam of any one of the above; wherein, the electrostatic rod is disposed in a receiving cavity and its electrostatic emission needle is disposed in accordance with the electrostatic emission channel so as to emit static electricity; the air supply device is connected to an air inlet to blow away the electrostatic emission needle through an air purging port.
[0015] In some embodiments, the electrostatic bar mounting mechanism further includes an insulating connector; wherein the insulating connector is rotated into the insulating side panel in opposite directions in the left-right direction to fix the electrostatic bar.
[0016] In some embodiments, the gas supply device is connected to the air inlet via a solenoid valve.
[0017] Through the above technical solutions, the electrostatic bar mounting insulating beam and electrostatic bar mounting mechanism provided in this disclosure have the following beneficial effects:
[0018] 1. The electrostatic bar of this disclosure is installed using an insulating crossbeam, ensuring an insulated environment for the electrostatic bar. Even if the insulating shell of the electrostatic bar is broken down by high-voltage static electricity, there will be no leakage due to the electrostatic bar itself being installed in an insulated environment. This will not affect the paper laying effect, ensuring successful paper laying, improving paper laying efficiency, and making it safer and more reliable. Simultaneously, the electrostatic bar of this disclosure has a blowing pipe below the insulating crossbeam to blow away the electrostatic emission needles. This allows for automatic cleaning of dust adsorbed on the electrostatic emission needles due to static electricity without disassembling the electrostatic bar, reducing the labor intensity of employees and providing better maintenance and upkeep of the electrostatic emission needles. It is very convenient and will not affect production. Experimental verification shows that this disclosure can extend the service life of the electrostatic bar by more than one year.
[0019] 2. This disclosure utilizes insulating connectors in conjunction with insulating blow plates to achieve the fixed installation of electrostatic bars, which is easy to install and disassemble. Furthermore, the front and rear ends of the insulating crossbeam for installing electrostatic bars can form observation windows, which facilitates the staff to observe the working status of the electrostatic bars. The observation windows can be covered by insulating end caps or left open.
[0020] 3. This disclosure achieves the partitioned arrangement of pipelines (cables connecting the electrostatic bar and air pipes connecting the air inlet) and electrostatic bars by separating the upper and lower chambers, avoiding messy installation of cables and air pipes, and making the exterior of the electrostatic bar installation insulating beam of this disclosure aesthetically pleasing and neat. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is a cross-sectional view of the electrostatic bar mounting mechanism disclosed in this embodiment;
[0023] Figure 2 yes Figure 1 Sectional view of the insulating beam AA for installing the electrostatic bar.
[0024] Explanation of reference numerals in the attached figures:
[0025] 1. Insulating crossbeam for installing electrostatic bar; 101. Insulating side panel; 102. Insulating partition; 103. Insulating purge plate; 104. Insulating top cover; 105. Sub-insulating purge plate; 2. Wiring operation hole; 3. Upper chamber; 4. Wire hole; 5. Electrostatic bar; 6. Electrostatic emission needle; 7. Air purge port; 8. Internal air chamber; 9. Internal air inlet channel; 10. Air inlet; 11. Solenoid valve; 12. Insulating connector; 13. Lower chamber; 14. Electrostatic emission channel; 15. Threaded hole. Detailed Implementation
[0026] The embodiments of this disclosure will be further described in detail below with reference to the accompanying drawings and examples. The detailed description of the embodiments and the accompanying drawings are used to illustrate the principles of this disclosure by way of example, but should not be used to limit the scope of this disclosure. This disclosure can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
[0027] These embodiments are provided to make the disclosure thorough and complete, and to fully express the scope of the disclosure to those skilled in the art. It should be noted that, unless otherwise specifically stated, the relative arrangement of components and steps, material composition, numerical expressions, and values set forth in these embodiments should be interpreted as exemplary only and not as limiting.
[0028] It should be noted that, in the description of this disclosure, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationship, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.
[0029] Furthermore, the terms "first," "second," and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different parts. "Vertical" is not strictly vertical, but within the permissible margin of error. "Parallel" is not strictly parallel, but within the permissible margin of error. Terms such as "including" or "contains" mean that the element preceding the word encompasses the element listed after the word, and do not exclude the possibility of encompassing other elements as well.
[0030] It should also be noted that, in the description of this disclosure, unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this disclosure depending on the specific circumstances. When a particular device is described as being located between a first device and a second device, an intermediary device may or may not be present between the particular device and the first or second device.
[0031] All terms used in this disclosure have the same meaning as understood by one of ordinary skill in the art to which this disclosure pertains, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and not as idealized or highly formalized, unless expressly defined herein.
[0032] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.
[0033] like Figure 1 and Figure 2 As shown, this embodiment of the present disclosure provides an insulating crossbeam 1 for mounting an electrostatic rod, including: an insulating side panel 101, an insulating purge plate 103, and an insulating top cover plate 104; wherein, the two insulating side panels 101 are arranged opposite each other in the left-right direction, and the insulating top cover plate 104 and the insulating purge plate 103 are arranged opposite each other in the up-down direction at both ends of the two insulating side panels 101 and are both connected to the two insulating side panels 101 to form a receiving cavity for accommodating the electrostatic rod 5; the insulating purge plate 103 has an electrostatic emission channel 14 corresponding to the electrostatic emission needle 6 of the electrostatic rod 5, and the insulating purge plate 103 is provided with an air inlet 10, an internal air cavity 8, and an air purge port 7 connected in sequence, the air purge port 7 is arranged facing the electrostatic emission needle 6, and the air inlet 10 is used to connect to an air supply device.
[0034] In this embodiment, the sidewall of the receiving cavity where the electrostatic rod 5 is located is an insulating sidewall (composed of an insulating side panel 101, an insulating blowing plate 103, and an insulating top cover 104, respectively). Therefore, even if the electrostatic rod 5 breaks down its own insulating shell over time, there will be no leakage (because the insulating sidewall is non-conductive). Furthermore, the insulating sidewall has an electrostatic emission channel 14 corresponding to the electrostatic emission needle 6, allowing the electrostatic emission needle 6 to emit high-voltage static electricity towards the target (such as spacer paper). This causes the target to adhere tightly to the covered material (such as glass) due to static electricity, ensuring that it will not detach due to airflow during subsequent transportation and maintaining a good adhesion. Simultaneously, an air supply device (such as an air pump or vacuum pump) automatically blows or sucks up the dust adsorbed by static electricity on the electrostatic emission needle 6. This eliminates the need for manual disassembly of the electrostatic rod 5, making the dust cleaning process convenient and not affecting the production line. In practical applications, cleaning of the electrostatic emission needle 6 should be performed when there is no target or covered object below the electrostatic rod 5 to avoid dust falling onto it and contaminating the target or covered object. In practical applications, the receiving cavity can be adapted to the size of the electrostatic rod 5, or the receiving cavity can be slightly larger than the size of the electrostatic rod 5 to improve the tolerance between the two during installation.
[0035] like Figure 1 As shown, in some embodiments, the electrostatic emission channel 14 divides the insulating purge plate 103 into two sub-insulating purge plates 105; the electrostatic rod 5 is supported above the two sub-insulating purge plates 105; the axis of the air inlet 10 is perpendicular to the sub-insulating purge plate 105; the built-in air cavity 8 is connected to the air inlet 10 through the built-in air inlet channel 9; the extension direction of the built-in air cavity 8 is parallel to the length direction of the electrostatic rod 5; and multiple air purge ports 7 are arranged sequentially at intervals along the length direction of the electrostatic rod 5.
[0036] In this embodiment, each sub-insulating blow plate 105 is provided with an air inlet 10, an internal air intake channel 9, an internal air chamber 8, and an air blowing port 7, thereby achieving cleaning of the opposite sides of the electrostatic emission needle 6, resulting in a more thorough cleaning. Of course, in other embodiments, only one sub-insulating blow plate 105 can be used to clean the electrostatic emission needle 6. In practical applications, the air blowing ports 7 can be set independently or interconnected, depending on the specific needs. To ensure the blowing effect, the air blowing port 7 can be a flared opening, with its flared end positioned near the side of the electrostatic emission needle 6, and the size of the internal air chamber 8 is larger than the size of the air blowing port 7 and the internal air intake channel 9. There can be one or more air inlets 10 and internal air intake channels 9. The electrostatic rod 5 is placed on two sub-insulating blow plates 105, so that when the front and rear ends of the storage cavity are open, the electrostatic rod 5 can be installed by simply sliding directly into the two sub-insulating blow plates 105 from the open ends, which is very convenient and simple.
[0037] In some embodiments, the air purging port 7 is obliquely arranged from bottom to top and penetrates the side wall of the sub-insulating purging plate 105 near the electrostatic emission needle 6. In this embodiment, the airflow blows towards the electrostatic emission needle 6 from bottom to top, ensuring maximum contact between the airflow and the electrostatic emission needle 6, maximizing dust removal, thereby ensuring cleaning effect, allowing the electrostatic emission needle 6 to be well maintained and cared for, and extending its service life as much as possible.
[0038] like Figure 1 As shown, in some embodiments, the air inlet 10 and the air purging port 7 are respectively located on the left and right sides of the insulating side panel 101; the sub-insulating purging plate 105 with the air inlet 10 forms a solenoid valve mounting position for installing the solenoid valve 11; the air inlet 10 is connected to the air supply device through the solenoid valve 11. In this embodiment, the purging air intake and opening / closing are controlled by the solenoid valve 11 to ensure the best purging effect.
[0039] In some embodiments, the insulating side panel 101 is provided with threaded holes 15 corresponding to the electrostatic rod 5; the insulating connector 12 is screwed into the threaded holes 15 to fix the electrostatic rod 5. In this embodiment, the left and right sides of the electrostatic rod 5 are abutted and fixed by the insulating connector 12 (such as insulating screws, insulating bolts, insulating bolts, etc.), thereby avoiding the risk of displacement or falling of the electrostatic rod 5, while ensuring the correspondence between the electrostatic emission needle 6 and the electrostatic emission channel 14, improving the operational stability and reliability of this disclosure. In practical applications, the insulating connector 12 can be a plastic connector or a fiberglass connector to ensure the insulation performance of this disclosure and to minimize the occurrence of leakage of the electrostatic rod 5.
[0040] In some embodiments, the electrostatic rod mounting insulating beam 1 is integrally formed. In this embodiment, the electrostatic rod mounting insulating beam 1 has an overall inverted T-shaped structure, which can be integrally formed by drilling or integral casting. At this time, the front and rear ends of the electrostatic rod mounting insulating beam 1 are open ends. In practical applications, the open ends can also form the inspection window of the electrostatic rod mounting insulating beam 1 of this disclosure. The staff can observe the working status of the electrostatic rod 5 through the open ends and make corresponding judgments in a timely manner based on its working status, thereby improving the safety, stability and reliability of the operation of this disclosure. Moreover, since the electrostatic rod 5 is supported on the two sub-insulating blow plates 105, the open ends will not cause an increase in the amount of dust attracted by the electrostatic emission needle 6.
[0041] In some embodiments, at least one end of the front and rear ends of the receiving cavity is covered with an insulating end cap. In this embodiment, by adding insulating end caps to the front and rear ends of the open end, the front, rear, left, right, top, and bottom sidewalls of the electrostatic rod 5 are all insulating sidewalls, improving a completely insulated installation environment and minimizing the risk and probability of leakage. In practical applications, the insulating end caps can be made of plastic or fiberglass, and can be made of transparent material, or the entire insulating beam 1 of the electrostatic rod installation can be made of transparent material, making it convenient for staff to observe the working status of the electrostatic rod 5 and take corresponding measures in a timely manner. The insulating end caps can be snapped together with the open end, or hinged, or connected through a door lock mechanism, etc.
[0042] In some embodiments, the insulating crossbeam 1 for mounting the electrostatic rod is made of fiberglass. In this embodiment, the excellent properties of fiberglass—lightweight and hard, non-conductive, stable in performance, high in mechanical strength, corrosion resistant, and highly transparent—are utilized to ensure the insulation performance of this disclosure while guaranteeing its service life, thereby reducing its cost.
[0043] In some embodiments, the insulating beam 1 for mounting the electrostatic bar further includes an insulating partition 102; wherein the insulating partition 102 is disposed between the insulating upper cover plate 104 and the insulating purge plate 103, and divides the receiving cavity into an upper chamber 3 and a lower chamber 13, such that the lower chamber 13 is used to place the electrostatic bar 5, and the upper chamber 3 is used to place the pipeline; the insulating partition 102 is provided with a wire-passing hole 4; the insulating upper cover plate 104 is provided with a wiring operation hole 2. In this embodiment, the pipeline includes a cable for connecting to electricity and a gas pipe for circulating gas. The cable is used to connect the insulating bar 5 to the power source or to establish a communication connection with the control system, etc., and the gas pipe is used to connect the air inlet 10 (or solenoid valve 11) to the gas supply device. By running the pipeline above and installing the corresponding equipment below, the pipeline is well organized and arranged, avoiding its messy stacking and affecting visual aesthetics. The cable enters the upper chamber 3 through the wiring operation hole 2, and then connects to the electrostatic bar 5 through the wire-passing hole 4. The air tube can also enter the upper chamber 3 through the wiring operation hole 2, and then connect to the air inlet 10 (or solenoid valve 11) through the open end (if there is an open end cover with an insulating end cover, a hole can be made in the insulating end cover to allow the air tube to run). In this way, all the pipelines can run along the beams, without having to run them haphazardly on the ground. Regardless of whether it is aesthetically pleasing, running the pipelines on the ground can easily trip workers and create safety hazards, and may even lead to air or electric leakage risks. In addition, hanging the pipelines on the ground can easily cause them to tilt and affect the static electricity effect. Therefore, this embodiment not only improves the overall aesthetics of this invention, but also improves the safety of the production line.
[0044] To solve the above-mentioned technical problems, this disclosure provides an electrostatic rod mounting mechanism, including: an electrostatic rod 5, an air supply device, and an electrostatic rod mounting insulating beam 1 of any one of the above; wherein, the electrostatic rod 5 is disposed in a receiving cavity and its electrostatic emission needle 6 is disposed corresponding to the electrostatic emission channel 14 so as to emit static electricity; the air supply device is connected to the air inlet 10 so as to blow the electrostatic emission needle 6 through the air purging port 7.
[0045] In some embodiments, the electrostatic bar mounting mechanism further includes an insulating connector 12; wherein the insulating connector 12 is rotated into the insulating side panel 101 in a left-right direction to fix the electrostatic bar 5.
[0046] In some embodiments, the gas supply device is connected to the air inlet 10 via a solenoid valve 11.
[0047] In some embodiments, the electrostatic bar installation mechanism further includes a hoisting device, wherein the hoisting device may be a gantry frame erected on both sides of the production line to hoist the electrostatic bar installation insulating beam 1.
[0048] In some embodiments, the electrostatic bar installation mechanism further includes a lifting mechanism for raising and lowering the electrostatic bar installation insulating beam 1 to adjust the distance between the electrostatic bar 5 and the glass, thereby ensuring the electrostatic effect. In practical applications, the lifting mechanism can raise and lower the gantry frame to raise and lower the electrostatic bar 5, or it can only raise and lower the electrostatic bar installation insulating beam 1. The lifting mechanism can be a linear motor, cylinder, lead screw pair, gear and rack drive mechanism, or conveyor belt transmission mechanism.
[0049] The embodiments of this disclosure have now been described in detail. To avoid obscuring the concept of this disclosure, some details known in the art have not been described. Those skilled in the art can fully understand how to implement the technical solutions disclosed herein based on the above description.
[0050] While specific embodiments of this disclosure have been described in detail by way of examples, those skilled in the art should understand that the examples are for illustrative purposes only and not intended to limit the scope of this disclosure. Those skilled in the art should understand that modifications can be made to the above embodiments or equivalent substitutions can be made to some technical features without departing from the scope and spirit of this disclosure. In particular, as long as there is no structural conflict, the technical features mentioned in the various embodiments can be combined in any manner.
Claims
1. An insulated crossbar for mounting electrostatic bars, characterized in that The application relates to a static bar mounting insulation crossbeam (1) which comprises the following parts: insulation side wall plates (101), insulation purging plates (103) and insulation upper cover plates (104); wherein the two insulation side wall plates (101) are oppositely arranged along the left-right direction, the insulation upper cover plates (104) and the insulation purging plates (103) are oppositely arranged at the two ends of the two insulation side wall plates (101) along the up-down direction and are connected with the two insulation side wall plates (101) so as to form a containing cavity for containing a static bar (5); the insulation purging plate (103) is provided with an electrostatic emission channel (14) corresponding to an electrostatic emission needle (6) of the static bar (5), the insulation purging plate (103) is provided with an air inlet (10), an internal air cavity (8) and an air purging port (7) which are sequentially communicated, the air purging port (7) is arranged towards the electrostatic emission needle (6), the air inlet (10) is used for being connected with a gas supply device, the electrostatic emission channel (14) divides the insulation purging plate (103) into two sub-insulation purging plates (105); the static bar (5) is supported above the two sub-insulation purging plates (105); the axis of the air inlet (10) is perpendicular to the sub-insulation purging plate (105); the internal air cavity (8) is communicated with the air inlet (10) through an internal air inlet channel (9); the extension direction of the internal air cavity (8) is parallel to the length direction of the static bar (5); a plurality of air purging ports (7) are sequentially and spacedly arranged along the length direction of the static bar (5), the air purging ports (7) are obliquely arranged from bottom to top and penetrate the side wall of the sub-insulation purging plate (105) close to the side of the electrostatic emission needle (6), the air inlet (10) and the air purging port (7) are arranged on the left and right sides of the insulation side wall plate (101); the sub-insulation purging plate (105) provided with the air inlet (10) forms a solenoid valve mounting position for mounting a solenoid valve (11); the air inlet (10) is communicated with the gas supply device through the solenoid valve (11). The insulation side wall plate (101) is provided with a threaded hole (15) corresponding to the static bar (5); an insulation connecting piece (12) is screwed into the threaded hole (15) to fix the static bar (5).
2. The static bar mounting insulated crossbeam according to claim 1, characterized in that The static bar mounting insulation crossbeam is integrally formed; and / or, 3. The static bar mounting insulated crossbeam according to claim 1, characterized in that, At least one end of the containing cavity is covered with an insulation end cover; and / or, The static bar mounting insulation crossbeam is made of glass steel. The application further relates to a static bar (5), a gas supply device and the static bar mounting insulation crossbeam (1) of any one of the preceding claims.
4. The static bar mounting insulated crossbeam according to any one of claims 1-3, characterized in that, The application relates to a static bar (5), a gas supply device and the static bar mounting insulation crossbeam (1) of any one of the preceding claims. 5. An electrostatic chuck mounting mechanism characterized by comprising: The electrostatic bar (5) is arranged in the accommodating cavity, and the electrostatic emitting needle (6) of the electrostatic bar (5) is arranged correspondingly to the electrostatic emitting channel (14) so as to emit electrostatic; the air supply device is communicated with the air inlet (10) to blow the electrostatic emitting needle (6) through the air blowing port (7).
6. The static bar mounting mechanism of claim 5, wherein Further comprising: An insulating connecting piece (12); wherein the insulating connecting piece (12) is screwed in the insulating side wall (101) along the left-right direction to fix the electrostatic bar (5).
7. The static bar mounting mechanism according to claim 5 or 6, characterized by The air supply device is communicated with the air inlet (10) through the electromagnetic valve (11).
Citation Information
Patent Citations
Miniature static electricity removing device
CN212344129U