Variable-focus high refractive index vacuum ultraviolet lens and its preparation method

Abstract

The present invention provides a variable-focus high-refractive-index vacuum ultraviolet lens and a preparation method thereof. The vacuum ultraviolet lens is composed of components with the following mass percentages: 10-40% SiO2, 5-10% B2O3, 0.2-5% MgO, 0-6% CaO, 15-25% BaO, 16-36% La2O3, 3.5-15% Nb2O5, 0-3% ZrO2, 5-10% TiO2, 15-25% GaN, 0.01-5% Yb2O3. At the same time, the present invention also provides a preparation method of a variable-focus high-refractive-index vacuum ultraviolet lens: raw materials with a specific crystal structure are prepared under certain conditions, and then the raw materials are stirred and melted in a platinum crucible according to the proportional requirements. The prepared mixture is poured into a preheated mold, and then annealing treatment is carried out. Procedures such as cutting, polishing, and assembling are performed on the optical vacuum ultraviolet lens sample block to obtain a variable-focus high-refractive-index vacuum ultraviolet lens. By changing the voltage to mutate the refractive index of the vacuum ultraviolet lens, variable focus is achieved. The component combination and preparation method provided by the present invention can be used to prepare a vacuum ultraviolet lens with variable focus, high refractive index, and a vacuum ultraviolet (for 172 nm) transmittance greater than 90%.

Description

Technical Field

[0001] The present invention relates to the technical field of special vacuum ultraviolet lens materials and preparation technologies, and particularly relates to a variable-focus high-refractive-index vacuum ultraviolet lens and a preparation method thereof. Background Art

[0002] Ozone has extremely strong oxidizing ability and can be applied to many fields, such as disinfection, sterilization, food preservation, etc. At present, the technology for preparing ozone mainly uses vacuum ultraviolet (mainly 172 nm) to irradiate oxygen-containing gas to oxidize oxygen into ozone.

[0003] In the prior art, ozone is often generated by ultraviolet irradiation. However, in the prior art, the concentration of ozone generated by ultraviolet irradiation is small and the efficiency is low. Therefore, how to improve the concentration and efficiency of ozone generated by ultraviolet irradiation has become an urgent problem to be solved. Summary of the Invention

[0004] An embodiment of the present invention provides a variable-focus high-refractive-index vacuum ultraviolet lens and a preparation method thereof, which can improve the concentration and efficiency of ozone generated by ultraviolet irradiation.

[0005] In the first aspect of the embodiment of the present invention, a variable-focus high-refractive-index vacuum ultraviolet lens is provided, including a vacuum ultraviolet lens and a plurality of electrode rods. The plurality of electrode rods vertically penetrate the vacuum ultraviolet lens, and both ends of each electrode rod are electrically connected to the loop wires on the surface of the vacuum ultraviolet lens;

[0006] Wherein, the plurality of electrode rods form a plurality of electrode rings with the vacuum ultraviolet lens as the center, and the adjacent electrode rings have opposite polarities on the same surface of the vacuum ultraviolet lens;

[0007] The vacuum ultraviolet lens comprises the following components in mass percentage:

[0008] SiO 2 : 10-40%, B 2 O 3 : 5-10%, MgO: 0.2-5%, CaO: 0-6%, BaO: 15-25%, La 2 O 3 : 16-36%, Nb 2 O 5 : 3.5-15%, ZrO 2 : 0-3%, TiO 2 : 5-10%, GaN: 15-25%, Yb 2 O 3 : 0.01-5%.

[0009] Optionally, in a possible implementation of the first aspect, the vacuum ultraviolet lens comprises components in the following mass percentages:

[0010] SiO 2 : 10 - 40%, B 2 O 3 : 5 - 7%, MgO: 0.2 - 3%, CaO: 0 - 6%, BaO: 15 - 25%, La 2 O 3 : 16 - 30%, Nb 2 O 5 : 3.5 - 15%, ZrO 2 : 0 - 3%, TiO 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

[0011] Optionally, in a possible implementation of the first aspect, it is characterized in that the vacuum ultraviolet lens comprises components in the following mass percentages:

[0012] SiO 2 : 15 - 40%, B 2 O 3 : 5 - 10%, MgO: 0.2 - 5%, CaO: 0 - 4%, BaO: 15 - 25%, La 2 O 3 : 16 - 36%, Nb 2 O 5 : 3.5 - 10%, ZrO 2 : 0 - 3%, TiO 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

[0013] Optionally, in a possible implementation of the first aspect, the SiO 2 component and the GaN component in the vacuum ultraviolet lens satisfy the following conditions in terms of mass percentage:

[0014] 1 < SiO 2 / GaN < 3.

[0015] Optionally, in a possible implementation of the first aspect, the GaN crystal cell structure is:

[0016] Each GaN unit cell structure contains 6 N atoms and 6 Ga atoms. The distance between Ga atoms is 0.4139 nm, the distance between Ga atoms and N atoms is 0.4657 nm, the included angle between the secondary axes is 120°, and along the main axis direction, Ga atoms and N atoms are stacked in the ABABAB pattern to form a close-packed bilayer plane.

[0017] Optionally, in a possible implementation manner of the first aspect, the distance between Yb atoms in the 2 O 3 is 0.3849 nm, the distance between Yb atoms and O atoms is 0.5963 nm, both secondary axes are perpendicular to the main axis at 90°, and the included angle between the secondary axes is 120°.

[0018] Optionally, in a possible implementation manner of the first aspect, the voltage of the electrode ring increases as the thickness of the vacuum ultraviolet lens increases.

[0019] Optionally, in a possible implementation manner of the first aspect, the functional relationship between voltage and refractive index is expressed by the following equation:

[0020] y = 1.6816e 0.03x

[0021] where y is the voltage and x is the refractive index.

[0022] In the second aspect of the embodiments of the present invention, a method for preparing a variable-focus high-refractive-index vacuum ultraviolet lens is provided, including:

[0023] Step 1: In a nitrogen-ammonia mixed gas with a ratio of 2.77:1, hexagonal unit cell structure GaN is prepared by direct current arc at 1.5 Pa. Through carbonate precipitation, filtration, washing, and then selecting high-temperature calcination at 750 °C, Yb with a lanthanum oxide type structure is prepared in the 2 O 3 ;

[0024] Step 2: Put the raw materials into a platinum crucible according to the proportional requirements, and heat them to 1400 - 1600 °C at a heating rate of 5 - 10 °C per minute in a helium atmosphere for 6 - 10 hours, and stir and homogenize during the melting process to prepare a mixed solution;

[0025] Step 3: Pour the mixed solution into a mold that has been preheated to 1400 °C, and an electrode rod is pre-placed in the mold;

[0026] Step 4: After pouring, put it into an annealing furnace for annealing treatment to obtain a vacuum ultraviolet lens sample block. The annealing temperature is 600 - 650 °C, and the annealing time is 1 - 2 hours;

[0027] Step 5: After cutting, polishing, and assembling the vacuum ultraviolet lens sample block, install the loop wire on the electrode rod to obtain a variable-focus high-refractive-index vacuum ultraviolet lens.

[0028] Optionally, in a possible implementation manner of the second aspect, the control conditions for the programmed temperature reduction in the annealing treatment are as follows:

[0029] First, reduce the temperature from the annealing temperature to below 300°C at a rate of 1-3°C per minute, and then naturally cool to room temperature.

[0030] Through the combined action of various components in the vacuum ultraviolet lens and by changing the voltage through the electrode rod, the present invention can have the following beneficial effects:

[0031] (1) The focal length of the lens is adjustable, and the operation is convenient;

[0032] (2) The lens has a large refractive index, ranging from 1.75 to 1.89, strong focusing ability, and can reduce the thickness of the vacuum ultraviolet lens, thereby reducing costs;

[0033] (3) The transmittance of the lens to vacuum ultraviolet is greater than 90%, with small ultraviolet loss, which can improve the efficiency of ozone generation by ultraviolet irradiation and the concentration of ozone; in addition, when preparing this lens, the present invention not only has a high-efficiency and low-cost preparation method, but also the vacuum ultraviolet lens is easy to process. Description of the Drawings

[0034] Figure 1 It is a top view of a variable-focus high-refractive-index vacuum ultraviolet lens provided by an embodiment of the present invention;

[0035] Figure 2 It is a cross-sectional view of a variable-focus high-refractive-index vacuum ultraviolet lens provided by an embodiment of the present invention;

[0036] Figure 3 It is a relationship diagram between the refractive index and voltage of a variable-focus high-refractive-index vacuum ultraviolet lens provided by an embodiment of the present invention.

[0037] In the figure: 1. Vacuum ultraviolet lens; 2. Electrode rod. Detailed Embodiments

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0039] SeeFigure 1 This is a top view of a variable-focus high-refractive-index vacuum ultraviolet lens 1 provided by an embodiment of the present invention, including a vacuum ultraviolet lens 1 and a plurality of electrode rods 2. The plurality of electrode rods 2 vertically penetrate the vacuum ultraviolet lens 1, and both poles of each electrode rod 2 are electrically connected to the loop wires on the surface of the vacuum ultraviolet lens 1, so that the electrode rods are connected to an external control module to adjust the voltage of the electrode rods by using the control module. Among them, the loop wires on the surface of the vacuum ultraviolet lens 1 can be installed on the electrode rods after the vacuum ultraviolet lens 1 sample block is cut, polished, and assembled.

[0040] Among them, the plurality of electrode rods 2 form a plurality of electrode rings centered on the vacuum ultraviolet lens 1, and the polarities of adjacent electrode rings on the same surface of the vacuum ultraviolet lens 1 are opposite. In addition, the voltage of the electrode rings increases with the increase in the thickness of the vacuum ultraviolet lens 1, and the plurality of electrode rings are evenly distributed in the vacuum ultraviolet lens 1.

[0041] It can be understood that the electrode rods 2 are mainly used to change the voltage. To obtain the same refractive index, different voltages can be applied to the electrode rings at different thicknesses of the vacuum ultraviolet lens 1. Obtaining the same refractive index can increase the 172 nm ultraviolet light intensity per unit area, improve the efficiency of the ultraviolet device for preparing ozone, and thus increase the ozone concentration. When the voltage changes, the refractive index of the vacuum ultraviolet lens 1 changes, realizing the change of the focal length of the lens, achieving the purpose of variable focus, and thus increasing the irradiation area and range of 172 nm ultraviolet light.

[0042] The vacuum ultraviolet lens 1 in the present invention includes the following components by mass percentage:

[0043] SiO 2 : 10 - 40%, B 2 O 3 : 5 - 10%, MgO: 0.2 - 5%, CaO: 0 - 6%, BaO: 15 - 25%, La 2 O 3 : 16 - 36%, Nb 2 O 5 : 3.5 - 15%, ZrO 2 : 0 - 3%, TiO 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

[0044] In some embodiments, the vacuum ultraviolet lens 1 of the present invention may include the following components by mass percentage:

[0045] SiO 2 : 10 - 40%, B 2 O 3: 5 - 7%, MgO: 0.2 - 3%, CaO: 0 - 6%, BaO: 15 - 25%, La 2 O 3 : 16 - 30%, Nb 2 O 5 : 3.5 - 15%, ZrO 2 : 0 - 3%, TiO 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

[0046] In some other embodiments, the vacuum ultraviolet lens 1 of the present invention may comprise components with the following mass percentages:

[0047] SiO 2 : 15 - 40%, B 2 O 3 : 5 - 10%, MgO: 0.2 - 5%, CaO: 0 - 4%, BaO: 15 - 25%, La 2 O 3 : 16 - 36%, Nb 2 O 5 : 3.5 - 10%, ZrO 2 : 0 - 3%, TiO 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

[0048] In the present invention, SiO 2 is the main body forming the framework of the vacuum ultraviolet lens 1, improving the thermal stability, chemical stability, hardness, etc. of the vacuum ultraviolet lens 1. The mass percentage (wt%) is 10 - 40. When the silica content is greater than 40 wt%, the melting temperature of the vacuum ultraviolet lens 1 is high and the melting difficulty increases; when the silica content is less than 10 wt%, the stability of the vacuum ultraviolet lens 1 will be reduced and it is difficult to obtain a vacuum ultraviolet lens 1 with a high refractive index.

[0049] Therefore, in this solution, the content of SiO 2 is controlled within the range of 10 - 40%, which can reduce the melting temperature and melting difficulty while improving the stability of the vacuum ultraviolet lens 1.

[0050] B 2 O 3 is also a component of the framework of the vacuum ultraviolet lens 1, which can improve the toughness of the vacuum ultraviolet lens 1. The boron - oxygen triangular prism BO 3 and the boron - oxygen tetrahedron BO 4 are the structural components. Under different conditions, boron may exist in the form of the triangular prism BO 3 or the boron - oxygen tetrahedron BO4 There are two different forms. Under high-temperature melting conditions, it is generally difficult to form a boron-oxygen tetrahedron, and it can only exist in the form of a trihedron. However, at low temperatures, under certain conditions, B 3+ It has a tendency to capture free oxygen to form tetrahedrons, making the structure compact and able to increase the low-temperature viscosity of the vacuum ultraviolet lens 1. However, because it has the characteristics of reducing the viscosity of the vacuum ultraviolet lens 1 at high temperature and increasing the viscosity of the vacuum ultraviolet lens 1 at low temperature, it is the main component that reduces the refractive index of the vacuum ultraviolet lens 1, so its content range should be relatively small.

[0051] The mass percentage (wt%) of boron trioxide in this solution is 5-10. When the content of boron trioxide is greater than 10wt%, the refractive index of the vacuum ultraviolet lens 1 will be reduced and the phase separation tendency of the vacuum ultraviolet lens 1 will be increased; when the content of boron trioxide is less than 5wt%, the stability of the vacuum ultraviolet lens 1 will be reduced. Therefore, in this solution, B 2 O 3 The content of is controlled within the range of 5-10%, which can improve the refractive index and stability of the vacuum ultraviolet lens 1.

[0052] MgO is an oxide of the outer structure of the vacuum ultraviolet lens 1. The mass percentage (wt%) of magnesium oxide is 0.2-5. When the content of magnesium oxide is greater than 5wt%, the tendency of crystallization of the vacuum ultraviolet lens 1 increases and it is easy to lose transparency; when the content is less than 0.2wt%, the melting temperature is high and the difficulty is great.

[0053] In this solution, the content of MgO is controlled within the range of 0.2-5%, which can reduce the melting temperature of the vacuum ultraviolet lens 1 and reduce the crystallization tendency of the vacuum ultraviolet lens 1 .

[0054] CaO is an oxide outside the structural network of the vacuum ultraviolet lens 1. The mass percentage (wt%) of calcium oxide is 0-6. When the calcium oxide content is greater than 6wt%, the stability of the vacuum ultraviolet lens 1 decreases and the tendency of crystallization increases.

[0055] This solution controls the content of CaO within the range of 0-6%, which can enhance the stability of the vacuum ultraviolet lens 1.

[0056] BaO is an oxide outside the structure network of the vacuum ultraviolet lens 1, which can improve the refractive index of the vacuum ultraviolet lens 1. The mass percentage (wt%) of barium oxide is 15-25. When the content of barium oxide is greater than 25wt%, the crystallization tendency of the vacuum ultraviolet lens 1 increases and the density increases significantly; when the content of barium oxide is less than 15wt%, the goal of high refractive index cannot be achieved.

[0057] In this solution, the content of BaO is controlled within the range of 15-25%, which can improve the refractive index of the vacuum ultraviolet lens 1 .

[0058] La 2 O3 can increase the refractive index of the vacuum ultraviolet lens 1. La 2 O 3 has a mass percentage (wt%) of 16 - 36. When the content of La 2 O 3 is greater than 36 wt%, the tendency of devitrification increases and the stability of the vacuum ultraviolet lens 1 decreases; when the content is less than 16 wt%, the goal of high refractive index cannot be achieved.

[0059] This solution controls the content of La 2 O 3 within the range of 16 - 36%, which can enhance the stability of the vacuum ultraviolet lens 1 and increase the refractive index of the vacuum ultraviolet lens 1.

[0060] Nb 2 O 5 can increase the refractive index of the vacuum ultraviolet lens 1. Nb 2 O 5 has a mass percentage (wt%) of 3.5 - 15. When the content of Nb 2 O 5 is greater than 15 wt%, the density of the vacuum ultraviolet lens 1 increases and the stability of the vacuum ultraviolet lens 1 decreases; when the content is less than 3.5 wt%, the goal of high refractive index cannot be achieved.

[0061] This solution controls the content of Nb 2 O 5 within the range of 3.5 - 15%, which can enhance the stability of the vacuum ultraviolet lens 1 and increase the refractive index of the vacuum ultraviolet lens 1.

[0062] ZrO 2 can increase the refractive index and transmittance of the vacuum ultraviolet lens 1. ZrO 2 has a mass percentage (wt%) of 0 - 3. When the content of ZrO 2 is greater than 3 wt%, the transmittance of the vacuum ultraviolet lens 1 will decrease; when the content of ZrO 2 is too small, the performance of the vacuum ultraviolet lens 1 cannot be improved.

[0063] This solution controls the content of ZrO 2 within the range of 0 - 3%, which can enhance the transmittance and performance of the vacuum ultraviolet lens 1.

[0064] TiO 2 can increase the refractive index and transmittance of the vacuum ultraviolet lens 1. TiO 2 has a mass percentage (wt%) of 5 - 10. When the content of TiO 2 is greater than 10 wt%, the transmittance of the vacuum ultraviolet lens 1 will decrease; when the content of TiO 2When the content is less than 5 wt%, the performance of the vacuum ultraviolet lens 1 cannot be improved.

[0065] In this solution, the content of TiO 2 is controlled within the range of 5-10%, which can enhance the transmittance and performance of the vacuum ultraviolet lens 1.

[0066] GaN can change the refractive index of the vacuum ultraviolet lens 1. The GaN unit cell structure referred to in this invention is the most stable structure. Each unit cell of this structure of gallium nitride contains 6 N atoms and 6 Ga atoms. The distance between Ga atoms is 0.4139 nm, the distance between Ga atoms and N atoms is 0.4657 nm, the included angle between the secondary axes is 120°, and in the main axis direction, Ga atoms and N atoms are stacked in the ABABAB manner to form a double-atom close-packed plane.

[0067] The GaN with a specific structure referred to in this invention can enable electrons to obtain different energies at different voltages, having different refractive indices, and the refractive index changes significantly with the change of voltage.

[0068] For example, the refractive index is 2.63 at 1.25 V, while it is 3.75 at 4.23 V. The mass percentage (wt%) of GaN is 15-25. When the content of GaN is greater than 25 wt%, the refractive index and transmittance of the ultraviolet lens will decrease; when the content of GaN is less than 15 wt%, the purpose of changing the refractive index with the change of voltage cannot be achieved.

[0069] In this solution, the content of GaN is controlled within the range of 15-25%, which can increase the refractive index and transmittance of the vacuum ultraviolet lens 1, and the refractive index can change with the change of voltage.

[0070] Yb 2 O 3 As a rare earth oxide, it can reduce the crystallization rate of the vacuum ultraviolet lens 1 and increase the stability of the structure of the vacuum ultraviolet lens 1. The Yb 2 O 3 space group is P321. The 6 O atoms around Yb form a distorted octahedron, and there is also one O outside the octahedron, together forming a seven-coordinate single-capped octahedron structure. The distance between Yb atoms is 0.3849 nm, and the distance between Yb atoms and O atoms is 0.5963 nm. Both secondary axes are perpendicular to the main axis at 90°, and the included angle between the secondary axes is 120°.

[0071] It can be understood that adding Yb 2 O 3 referred to in this invention can reduce the thermal expansion rate of the vacuum ultraviolet lens 1 and improve safety and reliability. Yb 2 O3 The mass percentage (wt%) is 0.01 - 5. When Yb 2 O 3 When the content is greater than 5 wt%, the transmittance of the vacuum ultraviolet lens 1 will decrease; when the content is less than 0.01 wt%, the goal of good stability of the vacuum ultraviolet lens 1 cannot be achieved.

[0072] This solution controls the content of Yb 2 O 3 within the range of 0.01 - 5%, which can improve the transmittance and stability of the vacuum ultraviolet lens 1.

[0073] In some embodiments, the mass percentages of the components in the vacuum ultraviolet lens 1 can be respectively: SiO 2 : 30.13%, B 2 O 3 : 6.00%, MgO: 0.48%, CaO: 0%, BaO: 15.50%, La 2 O 3 : 19.73%, Nb 2 O 5 : 3.56%, ZrO 2 : 0.71%, TiO 2 : 5.23%, GaN: 18.07%, Yb 2 O 3 : 0.59%.

[0074] In addition, the components of the vacuum ultraviolet lens 1 of the present invention satisfy the following conditions in terms of mass percentage: 1 < SiO 2 / GaN < 3, TiO 2 +BaO > 20, 15 < La 2 O 3 +Nb 2 O 5 +Yb 2 O 3 < 70. Using this ratio to prepare the vacuum ultraviolet lens 1 can ensure that it has high transmittance and refractive index and can also meet the conditions for zooming.

[0075] It can be understood that the above-mentioned vacuum ultraviolet lens 1 contains a variety of substances with high refractive index, ultraviolet transmission, and variable refractive index. Through the combined action of these substances, the vacuum ultraviolet lens 1 can achieve effects such as variable focus and high refractive index.

[0076] See Table 1 for some embodiments of the components of the vacuum ultraviolet lens 1 in terms of mass percentage and the corresponding performance of the vacuum ultraviolet lens 1.

[0077]

[0078]

[0079] As can be seen from Table 1, the prepared variable-focus high-refractive-index vacuum ultraviolet lens 1 has undergone a series of performance tests. The vacuum ultraviolet lens 1 of this solution has a small density, a refractive index that can reach 1.76 - 1.89, strong focusing ability, a transmittance greater than 90% for the 172 nm ultraviolet wavelength, small ultraviolet loss, and good stability of the vacuum ultraviolet lens 1, and its chemical stability is better than Grade II.

[0080] See Figure 3 , in order to obtain the functional relationship between voltage and refractive index by measuring the refractive index of the vacuum ultraviolet lens 1 at different voltages multiple times, the relationship is expressed by the following equation:

[0081] y = 1.6816e 0.03x

[0082] where y is the refractive index and x is the voltage.

[0083] It can be understood that after being irradiated by vacuum ultraviolet (for 172 nm), the refractive index of this vacuum ultraviolet lens 1 changes within the range of 1.752 - 1.894, which indicates that a certain content of gallium nitride has a good effect on changing the refractive index of the vacuum ultraviolet lens 1.

[0084] The second aspect of the present invention proposes a preparation method for a variable-focus high-refractive-index vacuum ultraviolet lens 1, and the specific operation steps are as follows:

[0085] Step 1, in a nitrogen-ammonia mixed gas with a ratio of 2.77:1, prepare hexagonal unit cell structure GaN at 1.5 Pa by the method of direct current arc plasma evaporation, through carbonate precipitation, filtration, washing, and then select to carry out calcination at a high temperature of 750 °C to prepare Yb with a lanthanum oxide type structure 2 O 3 .

[0086] Step 2, put the raw materials into a platinum crucible according to the proportional requirements, and heat them to 1400 - 1600 °C at a heating rate of 5 - 10 °C per minute in a helium atmosphere and melt for 6 - 10 hours, and carry out stirring and homogenization during the melting process to prepare a mixed solution.

[0087] Step 3, pour the mixed solution into a mold that has been preheated to 1400 °C, and an electrode rod is pre-placed in the mold, and cast it into a specified specification.

[0088] Step 4, after casting, put it into an annealing furnace for annealing treatment to obtain a vacuum ultraviolet lens 1 sample block, the annealing temperature is 600 - 650 °C, and the annealing time is 1 - 2 hours.

[0089] The control conditions for programmed temperature reduction during the annealing treatment are:

[0090] First, cool down from the annealing temperature at a rate of 1 - 3 °C per minute to below 300 °C, and then cool down to room temperature naturally.

[0091] Step Five: After cutting, polishing, and assembling the vacuum ultraviolet lens 1 sample block, install the loop wire on the electrode rod to obtain a variable-focus high-refractive-index vacuum ultraviolet lens 1.

[0092] In summary, a variable-focus high-refractive-index vacuum ultraviolet lens 1 and its preparation method provided by the present invention can be used to prepare high-concentration ozone, and have broad application prospects in aspects such as sterilization and disinfection, wastewater and waste gas treatment, and cleaning of high-precision spare parts, which are very beneficial to environmental protection and improving production efficiency.

[0093] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A variable-focus high refractive index vacuum ultraviolet lens, Characterized in that, It includes a vacuum ultraviolet lens (1) and a plurality of electrode rods (2). The plurality of electrode rods (2) vertically penetrate the vacuum ultraviolet lens (1), and both ends of each electrode rod (2) are electrically connected to the loop wire on the surface of the vacuum ultraviolet lens (1); Wherein, the plurality of electrode rods (2) form a plurality of electrode rings with the vacuum ultraviolet lens (1) as the center, and the adjacent electrode rings have opposite polarities on the same surface of the vacuum ultraviolet lens (1); The vacuum ultraviolet lens (1) comprises the following components in mass percentage: Si O 2 : 10 - 40%, B 2 O 3 : 5 - 10%, MgO: 0.2 - 5%, CaO: 0 - 6%, BaO: 15 - 25%, La 2 O 3 : 16 - 36%, Nb 2 O 5 : 3.5 - 15%, ZrO 2 : 0 - 3%, Ti O 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

2. The variable-focus high refractive index vacuum ultraviolet lens according to claim 1, Characterized in that, The vacuum ultraviolet lens (1) comprises the following components in mass percentage: Si O 2 : 10 - 40%, B 2 O 3 : 5 - 7%, MgO: 0.2 - 3%, CaO: 0 - 6%, BaO: 15 - 25%, La 2 O 3 : 16 - 30%, Nb 2 O 5 : 3.5 - 15%, ZrO 2 : 0 - 3%, Ti O 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

3. The variable-focus high refractive index vacuum ultraviolet lens according to claim 1, Characterized in that, The vacuum ultraviolet lens (1) comprises the following components in mass percentage: Si O 2 : 15 - 40%, B 2 O 3 : 5 - 10%, MgO: 0.2 - 5%, CaO: 0 - 4%, BaO: 15 - 25%, La 2 O 3 : 16 - 36%, Nb 2 O 5 : 3.5 - 10%, ZrO 2 : 0 - 3%, TiO 2 : 5 - 10%, GaN: 15 - 25%, Yb 2 O 3 : 0.01 - 5%.

4. The variable-focus high refractive index vacuum ultraviolet lens according to claim 2 or 3, Characterized in that, In the vacuum ultraviolet lens, the SiO 2 component and the GaN component satisfy the following conditions in terms of mass percentage: 1<SiO 2 / GaN < 3。 5. The variable-focus high refractive index vacuum ultraviolet lens according to claim 4, Characterized in that, The GaN crystal cell structure is: Each GaN crystal cell structure contains 6 N atoms and 6 Ga atoms. The distance between Ga atoms is 0.4139 nm, the distance between Ga atoms and N atoms is 0.4657 nm, the included angle between the secondary axes is 120°, and along the main axis direction, Ga atoms and N atoms are stacked in the ABABAB manner to form a double-atom close-packed plane.

6. The variable-focus high refractive index vacuum ultraviolet lens according to claim 4, Characterized in that, The Yb 2 O 3 The distance between Yb atoms in Yb 2 O 3 is 0.3849 nm, the distance between Yb atoms and O atoms is 0.5963 nm, both of the two minor axes are perpendicular to the major axis at 90°, and the included angle between the minor axes is 120°.

7. The variable-focus high refractive index vacuum ultraviolet lens according to claim 1, Characterized in that, The voltage of the electrode ring increases with the increase of the thickness of the vacuum ultraviolet lens (1).

8. The variable-focus high refractive index vacuum ultraviolet lens according to claim 7, Characterized in that, The functional relationship between voltage and refractive index is expressed by the following equation: y = 1.6816e 0.03x Wherein, y is the refractive index and x is the voltage.

9. A preparation method of the variable-focus high refractive index vacuum ultraviolet lens according to any one of claims 1-8, Characterized in that, It includes: Step 1, in a nitrogen-ammonia mixed gas with a ratio of 2.77:1, hexagonal cell structure GaN is prepared by direct current arc at 1.5 Pa. Through carbonate precipitation, filtration, and washing, and then by selecting a high temperature of 750 °C for calcination, Yb with a lanthanum oxide type structure is prepared 2 O 3 ; Step two, put the raw materials into a platinum crucible according to the proportion requirements, heat them up to 1400-1600 °C at a heating rate of 5-10 °C per minute in a helium atmosphere and melt for 6-10 hours, and stir and homogenize during the melting process to prepare a mixed solution; Step three, pour the mixed solution into a mold that has been preheated to 1400 °C, and electrode rods are pre-placed in the mold; Step four, after pouring, put it into an annealing furnace for annealing treatment to obtain a vacuum ultraviolet lens sample block. The annealing temperature is 600-650 °C and the annealing time is 1-2 hours; Step five, after cutting, polishing and assembling the vacuum ultraviolet lens sample block, install the loop wire on the electrode rod to obtain a variable-focus high refractive index vacuum ultraviolet lens.

10. The preparation method of the variable-focus high refractive index vacuum ultraviolet lens according to claim 9, Characterized in that, The control conditions for the programmed cooling in the annealing treatment are as follows: First, cool down from the annealing temperature at a cooling rate of 1-3 °C per minute to below 300 °C, and then naturally cool down to room temperature.

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