Substrate handling robot system

Abstract

A substrate transfer robot system includes a robot control unit (2), a robot arm (10) having a substrate holding robot hand (20) at a distal end thereof, a hand sensor (22) provided to the substrate holding robot hand (20), and a hand circuit board (23) provided to the substrate holding robot hand (20) and connected to the hand sensor (22), and a serial communication connection between the robot control unit (2) and the hand circuit board (23) is made via an interior of the robot arm (10).

Description

Technical Field

[0001] This invention relates to a substrate handling robot system, and more particularly to a substrate handling robot system having a sensor for a manipulator disposed on a substrate holding manipulator. Background Technology

[0002] Previously, substrate handling robots equipped with substrate handling robotic arms were known. For example, such a substrate handling robot was disclosed in Japanese Patent Application Publication No. 2013-69914.

[0003] Japanese Patent Application Publication No. 2013-69914 discloses a substrate handling robot composed of a horizontal multi-joint robot. This substrate handling robot includes a base, an arm connected to the base and rotating in a horizontal plane, and a substrate handling manipulator connected to the arm and rotating in a horizontal plane. Furthermore, a control device is connected to the substrate handling robot. The control device controls the starting and stopping actions of the substrate handling robot. Thus, the substrate handling robot handles substrates.

[0004] Furthermore, although not explicitly described in Japanese Patent Application Publication No. 2013-69914, in conventional substrate handling robots as described in that publication, sensors for detecting the substrate held by the substrate handling robot are sometimes installed in the substrate handling manipulator. In this case, signals from the sensors are transmitted to the control device via wiring inside the arm.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2013-69914

[0006] However, in substrate handling robots equipped with the aforementioned sensors, when the sensors communicate with the robot control unit via the inside of the arm, a number of wires corresponding to the number of sensors are connected from the substrate holding manipulator through the inside of the arm to the control unit. Therefore, the wiring becomes complex, and the inside of the arm needs to be relatively large, resulting in the problem of increasing the size of the substrate handling robot. Summary of the Invention

[0007] This invention was made to solve the problems mentioned above, and one object of the invention is to provide a substrate handling robot system that can suppress the complexity of wiring and the large size of the arm (large size of substrate handling robots).

[0008] To achieve the above objectives, a substrate handling robot system based on one aspect of the invention includes: a substrate handling robot; and a robot control unit that controls the substrate handling robot. The substrate handling robot includes: an arm; a substrate holding manipulator that is moved by the arm and connected to be rotatable relative to the arm, and includes blades for supporting the substrate; a manipulator sensor disposed on the substrate holding manipulator; and a manipulator circuit board disposed on the substrate holding manipulator and connected to the manipulator sensor, wherein the robot control unit and the manipulator circuit board are connected via internal serial communication of the arm.

[0009] In a substrate handling robot system based on one aspect of this invention, as described above, the robot control unit and the robot arm circuit board connected to the robot arm sensors are connected via an internal serial communication connection within the arm. Therefore, communication between the robot arm sensors and the robot control unit can be achieved using a relatively small number of wires for serial communication between the robot control unit and the robot arm circuit board. Furthermore, even when multiple robot arm sensors are provided, multiple robot arm sensors are connected to the robot arm circuit board via multiple wires, while communication between the robot control unit and the robot arm circuit board is achieved using a relatively small number of wires. As a result, due to the reduced number of wires, the complexity of the wiring and the increase in arm size (larger substrate handling robot) can be correspondingly suppressed.

[0010] In addition, since the wiring between the robot's sensors and the robot's circuit board is relatively short, it is possible to suppress the increased influence of external noise caused by longer wiring.

[0011] According to the present invention, as described above, it is possible to suppress the increasing complexity of wiring and the increasing size of the arm (the increasing size of the substrate handling robot). Attached Figure Description

[0012] Figure 1 This is a diagram showing the structure of a substrate handling robot based on one embodiment of the present invention.

[0013] Figure 2 This is a simplified diagram of a substrate handling robot system based on one embodiment of the present invention.

[0014] Figure 3 This is a simplified diagram of a substrate handling robot system based on a comparative example.

[0015] Figure 4 This is a simplified diagram of a substrate handling robot system based on a first variation of the present invention.

[0016] Figure 5 This is a simplified diagram of a substrate handling robot system based on the second variation of the present invention.

[0017] Figure 6 This is a simplified diagram of a substrate handling robot system based on the third variation of the present invention.

[0018] Figure 7 This is a simplified diagram of a substrate handling robot system based on the fourth variation of the present invention. Detailed Implementation

[0019] Hereinafter, an embodiment of the present invention, which is embodied in the accompanying drawings, will be described.

[0020] Reference Figure 1 and Figure 2 The structure of the substrate handling robot system 100 based on this embodiment will be described.

[0021] like Figure 1 and Figure 2 As shown, the substrate handling robot system 100 based on this embodiment includes a substrate handling robot 1 and a robot control unit 2 for controlling the substrate handling robot 1 (see reference). Figure 2 The substrate handling robot 1 is configured to move up and down relative to the generally cylindrical housing 50 by means of an arm lifting mechanism (not shown) that raises and lowers the arm 10.

[0022] Furthermore, the substrate handling robot 1 is composed of a horizontal multi-joint robot. Specifically, the substrate handling robot 1 includes: an arm 10; a substrate holding manipulator 20, which is movable by the arm 10 and connected to be rotatable relative to the arm 10, and includes blades 21 supporting the substrate (semiconductor wafer) W; a substrate detection sensor 22 disposed on the substrate holding manipulator 20; and a digital input circuit board 23 disposed on the substrate holding manipulator 20 and connected to the substrate detection sensor 22. The substrate detection sensor 22 and the digital input circuit board 23 are connected via wiring 23a. In addition, the substrate holding manipulator 20 has an upper substrate holding manipulator 20a and a lower substrate holding manipulator 20b disposed below the upper substrate holding manipulator 20a and operating separately from the upper substrate holding manipulator 20a. Furthermore, wiring 23a is a wiring separate from wiring 30 described later.

[0023] In this embodiment, multiple blades 21 are provided, and multiple substrate detection sensors 22 are provided corresponding to the multiple blades 21. Each of the multiple substrate detection sensors 22 is connected to the digital input circuit board 23 via wiring 23a. Furthermore, the multiple blades 21 are arranged separately from each other along the vertical direction. Additionally, the multiple blades 21 include multiple blades 21a mounted on the upper substrate holding robot 20a and blades 21b mounted on the lower substrate holding robot 20b.

[0024] Furthermore, in this embodiment, the robot control unit 2 and the digital input circuit board 23 are connected via serial communication through the inside of the arm 10 (see reference). Figure 2 (wiring 30). In addition, the digital input circuit board 23 is an example of the "robot arm circuit board" of the claims.

[0025] In this embodiment, the substrate handling robot system 100 further includes an analog sensor 11 disposed on the arm 10, an analog input circuit board 12 disposed on the arm 10 and connected to the analog sensor 11, and a digital input / output circuit board 13 connected to the substrate detection sensor 22. The robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23 are connected via a daisy-chain connection through internal serial communication within the arm 10. Furthermore, the analog sensor 11 and the substrate detection sensor 22 are examples of the "arm sensor" and "manipulator sensor" as claimed in the claims, respectively. Additionally, the analog input circuit board 12 is an example of the "arm circuit board" and "first arm circuit board" as claimed in the claims. Furthermore, the digital input / output circuit board 13 is an example of the "arm circuit board" and "second arm circuit board" as claimed in the claims.

[0026] In this embodiment, the robot control unit 2, analog input circuit board 12, and digital input circuit board 23 are connected via a daisy-chain connection through the interior of the arm 10 and a movable part P1 that allows the board to maintain relative movement between the robot arm 20 and the arm 10. Furthermore, a movable part P2, with a movable wiring 30 for serial communication, is also present inside the base 40, which allows the arm 10 to move relative to it. Additionally, a cylindrical component (not shown) is provided in the movable part P1, and the wiring 30 is configured to pass through the interior of this cylindrical component.

[0027] In this embodiment, the arm 10 includes: a first arm 10a configured to rotate about one end as a rotation center; and a second arm 10b, one end of which is rotatably connected to the other end of the first arm 10a, configured to rotate relative to the first arm 10a, and connected to the robot arm 20 by a substrate. An analog input circuit board 12 and a digital input circuit board 23 are disposed on at least one of the first arm 10a and the second arm 10b.

[0028] In addition, such as Figure 2 As shown, both the first arm 10a and the second arm 10b rotate along the horizontal plane. Furthermore, both the first arm 10a and the second arm 10b have internal spaces through which the wiring 30 passes.

[0029] In this embodiment, the analog input circuit board 12 is disposed in the first arm 10a, and the digital input circuit board 23 is disposed in the second arm 10b. The analog input circuit board 12 is disposed in the space inside the first arm 10a, and the digital input circuit board 23 is disposed in the space inside the second arm 10b.

[0030] In this embodiment, a signal from the analog sensor 11 is input to the analog input circuit board 12. The analog sensor 11 is connected to the analog input circuit board 12 via wiring 12a. Wiring 12a is separate from wiring 30a.

[0031] In this embodiment, the analog sensor 11 is a sensor that detects conditions other than the rotation of the motor installed at the joint of the arm 10. Specifically, the analog sensor 11 includes at least one of a temperature sensor 11a, an acceleration sensor 11b, and a pressure sensor 11c. In this embodiment, all of the temperature sensor 11a, acceleration sensor 11b, and pressure sensor 11c are provided.

[0032] In this embodiment, the digital input / output circuit board 13 is connected to the board detection sensor 22 and exchanges signals with the board detection sensor 22. The digital input / output circuit board 13 and the board detection sensor 22 are connected via wiring 13a. Furthermore, wiring 13a is a separate wiring from wiring 30.

[0033] In addition, in this embodiment, the substrate handling robot system 100 also includes a solenoid valve 14, which is disposed on the second arm 10b. This solenoid valve 14 exchanges signals with the digital input / output circuit board 13 and adjusts the air supplied to the cylinder 24 disposed on the substrate holding manipulator 20. The solenoid valve 14 is used to control the opening and closing of the pipe through which fluid (air, etc.) passes. The digital input / output circuit board 13 and the solenoid valve 14 are connected via wiring 13a.

[0034] In this embodiment, the substrate detection sensor 22 is a sensor that detects conditions other than the rotation of the motor. Specifically, the substrate detection sensor 22 detects the presence of the substrate W supported on the blade 21. The digital input circuit board 23 receives signals from the substrate detection sensor 22. Furthermore, the substrate detection sensor 22 can be any one of a reflective optical sensor, a transmissive optical sensor, a capacitive sensor, a distance sensor, or a tactile sensor designed to contact the substrate W. In this embodiment, the substrate detection sensor 22 is a reflective optical sensor.

[0035] Furthermore, in this embodiment, a serial communication connection is established between the robot control unit 2 and the digital input circuit board 23, enabling information sharing between them. Specifically, the robot control unit 2 and the analog input circuit board 12 are interconnected via a wiring 30 for serial communication. Additionally, the analog input circuit board 12 and the digital input / output circuit board 13 are interconnected via the wiring 30 for serial communication. Furthermore, the digital input / output circuit board 13 and the digital input circuit board 23 are interconnected via the wiring 30 for serial communication. Furthermore, ICs for constructing a communication network capable of sharing information are provided on the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23.

[0036] Additionally, an encoder power board 41 (not shown) and an ID (identification) board 42 (not shown) are provided inside the base 40.

[0037] Next, based on Figure 3 A comparative example of a substrate handling robot system 600 will be described.

[0038] Based on Figure 3 As shown in the comparative example of the substrate handling robot system 600, when multiple substrate detection sensors 22 and other sensors (analog sensors 11, solenoid valves 14, etc.) communicate with the robot control unit 2 via the interior of the arm 10, a number of wiring 30 corresponding to the number of substrate detection sensors 22 and other sensors are inserted through the interior of the arm 10 to the robot control unit 2. Therefore, the interior of the arm 10 needs to be relatively large, resulting in a larger substrate handling robot 1. Furthermore, in Figure 3 In the substrate holding robot 20, wiring 30 extending from multiple substrate detection sensors 22 is integrated into one, but in reality, multiple wiring 30 extending from multiple substrate detection sensors 22 are connected to the robot control unit 2 via the inside of the arm 10.

[0039] [Effects of this implementation method]

[0040] In this embodiment, the following effects can be achieved.

[0041] In this embodiment, as described above, a serial communication connection is established between the robot control unit 2 and the digital input circuit board 23, which is connected to the substrate detection sensor 22, via the interior of the arm 10. This allows for communication between the substrate detection sensor 22 and the robot control unit 2 using a relatively small number of wiring 30 for serial communication between the robot control unit 2 and the digital input circuit board 23. Furthermore, even when multiple substrate detection sensors 22 are provided, the multiple substrate detection sensors 22 are connected to the digital input circuit board 23 via multiple wiring 30, while the robot control unit 2 communicates with the digital input circuit board 23 using a relatively small number of wiring 30. As a result, since there are fewer wiring 30s, the complexity of the wiring 30 and the size of the arm 10 (the size of the substrate handling robot 1) can be suppressed accordingly.

[0042] In addition, since the wiring 30 between the substrate detection sensor 22 and the digital input circuit board 23 is relatively short, it is possible to suppress the increased influence of external noise caused by the lengthening of the wiring 30.

[0043] Furthermore, in this embodiment, as described above, an analog sensor 11 is provided on the arm 10, an analog input circuit board 12 is provided on the arm 10 and connected to the analog sensor 11, and a digital input / output circuit board 13 is connected to the board detection sensor 22. Moreover, the robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23 are connected via a daisy-chain connection through internal serial communication within the arm 10. Thus, unlike the case where each of the board detection sensor 22 and the analog sensor 11 is connected to the robot control unit 2 via wiring 30, communication between each of the board detection sensor 22 and the analog sensor 11 and the robot control unit 2 can be achieved using a smaller number of wiring 30 for serial communication connection of the robot control unit 2, the analog input circuit board 12, the digital input / output circuit board 13, and the digital input circuit board 23. As a result, in the structure where the analog input circuit board 12 and the digital input / output circuit board 13 are provided, the complexity of the wiring 30 and the size of the arm 10 (the size of the board handling robot 1) can be suppressed.

[0044] Furthermore, in this embodiment, as described above, the robot control unit 2, analog input circuit board 12, digital input / output circuit board 13, and digital input circuit board 23 are connected in series via a daisy-chain connection, passing through the inside of the arm 10 and a movable part P1 that allows the board to maintain relative movement between the robot arm 20 and the arm 10. Therefore, since the robot control unit 2, analog input circuit board 12, digital input / output circuit board 13, and digital input circuit board 23 are connected in series via a daisy-chain connection, the number of wiring 30 via the movable part P1 is relatively small. As a result, unlike the case where a larger number of wiring 30 passes through the movable part P1, the movable part P1 can be moved more easily.

[0045] Furthermore, in this embodiment, as described above, the arm 10 includes: a first arm 10a configured to rotate about one end as a rotation center; and a second arm 10b, one end of which is rotatably connected to the other end of the first arm 10a, configured to rotate relative to the first arm 10a, and connected to the substrate holding robot 20. An analog input circuit board 12 and a digital input / output circuit board 13 are disposed on at least one of the first arm 10a and the second arm 10b. Thus, in the substrate handling robot system 100 where the analog input circuit board 12 and the digital input / output circuit board 13 are disposed on at least one of the first arm 10a and the second arm 10b, the complexity of the wiring 30 and the enlargement of the arm 10 (enlargement of the substrate handling robot 1) can be suppressed.

[0046] Furthermore, in this embodiment, as described above, an analog input circuit board 12 is provided in the first arm 10a, and a digital input / output circuit board 13 is provided in the second arm 10b. Therefore, in the board handling robot system 100 provided with both the analog input circuit board 12 and the digital input / output circuit board 13, the complexity of the wiring 30 and the size of the arms 10 (the size of the board handling robot 1) can be suppressed.

[0047] Furthermore, in this embodiment, as described above, an analog input circuit board 12 is provided for receiving signals from the analog sensor 11. Therefore, unlike the case where each of the board detection sensor 22 and the analog sensor 11 is connected to the robot control unit 2 via wiring 30, the complexity of wiring 30 can be suppressed, and communication between each of the board detection sensor 22 and the analog sensor 11 and the robot control unit 2 is possible.

[0048] Furthermore, in this embodiment, as described above, the analog sensor 11 is a sensor that detects conditions other than the rotation of the motor installed at the joint of the arm 10. Therefore, even when the analog sensor 11 is installed separately from the sensor that detects the rotation of the motor, since the analog sensor 11 is serially connected to the robot control unit 2 via the analog input circuit board 12, it is possible to suppress the complexity of the wiring 30 and the enlargement of the arm 10 (the enlargement of the board handling robot 1).

[0049] Furthermore, in this embodiment, as described above, the analog sensor 11 includes at least one of a temperature sensor 11a, an acceleration sensor 11b, and a pressure sensor 11c. Therefore, even when at least one of the temperature sensor 11a, acceleration sensor 11b, and pressure sensor 11c is provided, since at least one of the temperature sensor 11a, acceleration sensor 11b, and pressure sensor 11c is serially connected to the robot control unit 2 via the analog input circuit board 12, the complexity of the wiring 30 and the enlargement of the arm 10 (the enlargement of the board handling robot 1) can be suppressed.

[0050] Furthermore, in this embodiment, as described above, a digital input / output circuit board 13 is provided, which is connected to the board detection sensor 22 and exchanges signals with the board detection sensor 22. Therefore, even when the board detection sensor 22 is provided, since the board detection sensor 22 is serially communicated with the robot control unit 2 via the digital input / output circuit board 13, the complexity of the wiring 30 and the enlargement of the arm 10 (the enlargement of the board handling robot 1) can be suppressed.

[0051] Furthermore, in this embodiment, as described above, a solenoid valve 14 is provided on the second arm 10b. This solenoid valve 14 exchanges signals with the digital input / output circuit board 13 and adjusts the air supplied to the cylinder 24 of the board-holding robot 20. Therefore, even when the solenoid valve 14 is provided on the second arm 10b, since the solenoid valve 14 is serially connected to the robot control unit 2 via the digital input / output circuit board 13 of the second arm 10b, the complexity of the wiring 30 and the size of the arm 10 (the size of the board handling robot 1) can be suppressed.

[0052] Furthermore, in this embodiment, as described above, the substrate detection sensor 22 is a sensor that detects conditions other than the rotation of the motor. Therefore, even when the substrate detection sensor 22 is provided separately from the sensor that detects the rotation of the motor, since the substrate detection sensor 22 is serially connected to the robot control unit 2 via the digital input circuit board 23, it is possible to suppress the complexity of the wiring 30 and the enlargement of the arm 10 (the enlargement of the substrate handling robot 1).

[0053] Furthermore, in this embodiment, as described above, a substrate detection sensor 22 is provided to detect the presence of the substrate W supported on the blade 21, and a digital input circuit board 23 receives signals from the substrate detection sensor 22. Therefore, even when the substrate detection sensor 22 is provided separately from the sensor detecting the rotation of the motor, since the substrate detection sensor 22 is serially connected to the robot control unit 2 via the digital input circuit board 23, it is possible to suppress the complexity of the wiring 30 and the increase in the size of the arm 10 (the increase in the size of the substrate handling robot 1).

[0054] Furthermore, in this embodiment, as described above, the robot control unit 2 and the digital input circuit board 23 are connected via a serial communication network that enables information sharing between them. This allows for easy control of the board handling robot system 100, as information can be shared between the robot control unit 2 and the digital input circuit board 23.

[0055] Furthermore, in this embodiment, as described above, multiple blades 21 are provided, and multiple substrate detection sensors 22 are provided in a manner corresponding to the multiple blades 21. Here, with multiple substrate detection sensors 22 provided, the number of wirings 30 extending from the substrate detection sensors 22 increases. Therefore, by connecting the multiple wirings 30 extending from the multiple substrate detection sensors 22 to the digital input circuit board 23, and connecting the digital input circuit board 23 to the robot control unit 2 via internal serial communication of the arm 10, even with multiple substrate detection sensors 22 provided, the complexity of the wirings 30 and the size of the arm 10 (the size of the substrate handling robot 1) can be suppressed.

[0056] [Variation Example]

[0057] Furthermore, all points in the disclosed embodiments should be considered illustrative and not intended to limit the invention. The scope of the invention is not limited by the above description of the embodiments, but is defined by the claims, and includes all modifications (variations) equivalent to the claims and within their scope.

[0058] For example, in the above embodiment, an example is shown where an analog input circuit board 12 is provided in the first arm 10a and a digital input / output circuit board 13 is provided in the second arm 10b; however, the present invention is not limited thereto. For example, it may also be based on... Figure 4 As shown in the first modified example of the substrate handling robot system 200, the analog input circuit board 12 and the digital input / output circuit board 13 are not provided on the arm 10. In this case, the digital input circuit board 23 is serially connected to the robot control unit 2.

[0059] Furthermore, in the above embodiment, an example is shown where an analog input circuit board 12 is provided in the first arm 10a and a digital input / output circuit board 13 is provided in the second arm 10b; however, the present invention is not limited thereto. For example, it may be based on... Figure 5 As shown in the second modified example of the substrate handling robot system 300, a digital input / output circuit board 13 is provided on the arm 10, but an analog input circuit board 12 is not provided. In this case, the digital input circuit board 23, the digital input / output circuit board 13, and the robot control unit 2 are serially connected.

[0060] Furthermore, in the above embodiment, an example is shown where an analog input circuit board 12 is provided in the first arm 10a and a digital input / output circuit board 13 is provided in the second arm 10b; however, the present invention is not limited thereto. For example, it may be based on... Figure 6 As shown in the third modified example of the substrate handling robot system 400, an analog input circuit board 12 is provided on the arm 10, but a digital input / output circuit board 13 is not provided. In this case, the digital input circuit board 23, the analog input circuit board 12, and the robot control unit 2 are serially connected.

[0061] Furthermore, in the above embodiment, an example is shown where an analog input circuit board 12 is provided in the first arm 10a and a digital input / output circuit board 13 is provided in the second arm 10b; however, the present invention is not limited thereto. For example, it may be based on... Figure 7 As shown in the fourth modified example of the substrate handling robot system 500, both the analog input circuit board 12 and the digital input / output circuit board 13 are provided on the second arm 10b. Alternatively, both the analog input circuit board 12 and the digital input / output circuit board 13 may be provided on the first arm 10a.

[0062] Furthermore, the above embodiments show an example where multiple blades 21 and substrate detection sensors 22 are respectively provided, but the present invention is not limited thereto. For example, the present invention can also be applied to a substrate handling robot system in which one blade 21 and one substrate detection sensor 22 are respectively provided.

[0063] Furthermore, in the above embodiment, an example is shown where arm 10 has two arm portions, a first arm 10a and a second arm 10b; however, the present invention is not limited to this. For example, the arm may have more than two arm portions.

[0064] Furthermore, in the above embodiments, an example is shown where the analog sensor 11 includes a temperature sensor 11a, an acceleration sensor 11b, and a pressure sensor 11c; however, the present invention is not limited thereto. In the present invention, the analog sensor 11 may also include sensors other than these.

[0065] Furthermore, in the above embodiment, the "sensor for a robotic arm" of the present invention is shown as an example of a substrate detection sensor 22, but the present invention is not limited thereto. Sensors other than the substrate detection sensor 22 can also be used as the "sensor for a robotic arm" of the present invention.

[0066] Explanation of reference numerals in the attached figures

[0067] 1…Baseboard handling robot; 2…Robot control unit; 10…Arm; 10a…First arm; 10b…Second arm; 11…Analog sensor (arm sensor); 11a…Temperature sensor; 11b…Acceleration sensor; 11c…Pressure sensor; 12…Analog input circuit board (arm circuit board, first arm circuit board); 13…Digital input / output circuit board (arm circuit board, second arm circuit board); 14…Solenoid valve; 20…Baseboard holding robot; 21…Leaf; 22…Baseboard detection sensor (robot sensor); 23…Digital input circuit board (robot circuit board); 24…Cylinder; P1…Modible part; W…Baseboard.

Claims

1. A substrate handling robot system, wherein, The substrate handling robot system includes: Substrate handling robot; and The robot control unit controls the substrate handling robot. The substrate handling robot includes: arm; The substrate holding manipulator is moved by the arm and is connected to be rotatable relative to the arm, and includes blades that support the substrate; A sensor for a robotic arm is mounted on the substrate to hold the robotic arm; and A robotic arm circuit board is disposed on the board to hold the robotic arm and is connected to the robotic arm via sensors. The robot control unit and the robotic arm circuit board are connected via internal serial communication within the arm. The substrate holds two robotic arms. The sensors for the robotic arm are configured in multiple ways, with the robotic arm held in place by being mounted on two of the substrates. The plurality of robotic arm sensors are connected to a robotic arm circuit board shared by the plurality of robotic arm sensors, or connected to an arm circuit board disposed on the arm and shared by the plurality of robotic arm sensors. The arm circuit board shared by the multiple robotic arm sensors, or the robotic arm circuit board shared by the multiple robotic arm sensors, is connected to the robot control unit via a serial communication connection inside the arm.

2. The substrate handling robot system according to claim 1, wherein, It also includes: an arm sensor, which is installed on the arm. The arm circuit board is connected to at least one of the arm sensor and the robotic arm sensor. The robot control unit, the arm circuit board, and the manipulator circuit board are connected via a daisy-chain connection through the internal serial communication of the arm.

3. The substrate handling robot system according to claim 2, wherein, The robot control unit, the arm circuit board, and the manipulator circuit board are connected via a daisy chain for serial communication through the inside of the arm and a movable part. The movable part enables the board to maintain relative movement between the manipulator and the arm.

4. The substrate handling robot system according to claim 2, wherein, The arm includes: a first arm configured to rotate about one end as a center of rotation; and a second arm, one end of which is rotatably connected to the other end of the first arm, configured to rotate relative to the first arm, and for holding the robotic arm connected to the substrate. The arm circuit board is disposed on at least one of the first arm and the second arm.

5. The substrate handling robot system according to claim 4, wherein, The arm circuit board includes a first arm circuit board disposed on the first arm and a second arm circuit board disposed on the second arm.

6. The substrate handling robot system according to claim 5, wherein, The arm sensor includes an analog sensor. At least one of the first arm circuit board and the second arm circuit board includes an analog input circuit board for inputting signals from the analog sensor.

7. The substrate handling robot system according to claim 6, wherein, The analog sensor is a sensor that detects conditions other than the rotation of the motor installed at the joint of the arm.

8. The substrate handling robot system according to claim 7, wherein, The analog sensor includes at least one of a temperature sensor, an acceleration sensor, and a pressure sensor.

9. The substrate handling robot system according to claim 5, wherein, The second arm circuit board includes a digital input / output circuit board, which is connected to the robot arm sensor and exchanges signals with the robot arm sensor.

10. The substrate handling robot system according to claim 9, wherein, It also includes a solenoid valve, which is located on the second arm, to exchange signals with the digital input / output circuit board and to adjust the air supplied to the cylinders that hold the manipulator on the board.

11. The substrate handling robot system according to claim 1, wherein, The sensors used in the robotic arm are sensors that detect conditions other than the rotation of the motor.

12. The substrate handling robot system according to claim 11, wherein, The robotic arm sensor includes a substrate detection sensor that detects the presence of the substrate supported by the blade. The robotic arm circuit board includes a digital input circuit board that receives signals from the board's detection sensors.

13. The substrate handling robot system according to claim 1, wherein, The robot control unit and the robotic arm circuit board are connected via serial communication through a communication network that enables them to share information.

14. The substrate handling robot system according to claim 1, wherein, The blades are provided in multiple quantities. The plurality of robotic arm sensors are arranged in a manner corresponding to the plurality of blades.

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