A large flow bellows pump

Abstract

The present invention discloses a large-flow air bag pump, comprising a pump body and a power assembly connected to the pump body, wherein the pump body has first and second object fluid chambers, both of which are connected with a liquid inlet channel and a liquid outlet channel; first and second air bag assemblies, which periodically expand or contract to pump the object fluid; a push-pull rod, which connects the first and second air bag assemblies, and respectively has a first and a second connecting channel; the power assembly has a first and a second working position, which can respectively deliver a driving fluid to the first and second air bag assemblies; when the first air bag assembly expands to a first preset position, the first air bag assembly is connected to the power assembly via the first connecting channel, and the power assembly switches from the first working position to the second working position; when the second air bag assembly expands to a second preset position, the second air bag assembly is connected to the power assembly via the second connecting channel, and the power assembly switches from the second working position to the first working position. The present invention has a fast switching speed between the first working position and the second working position, a short switching cycle, and sufficient switching power.

Description

Technical Field

[0001] The invention belongs to the technical field of bellows pumps, and in particular relates to a large-flow bellows pump. Background Art

[0002] In the semiconductor industry, reciprocating bellows pumps are commonly used to transport chemical liquids for semiconductors. Reciprocating bellows pumps generally include two target fluid chambers, each of which is equipped with an expandable or contractible bellows. The expansion or contraction of the bellows allows the target fluid to be sucked in or discharged from the target fluid chamber.

[0003] U.S. Patent US10253761B2 has an airbag, a shift tank, a piston and a switching pipeline. When the airbag is inflating, the piston moves in the direction of airbag expansion, the airbag and the shift tank are connected, and the shift tank and the switching pipeline are sealed; until the airbag inflates to a preset position, the airbag and the shift tank are sealed, and the shift tank and the switching pipeline are connected. The high-pressure gas in the shift tank flows through the switching pipeline to the shuttle valve to reverse the slider in the shuttle valve.

[0004] In this technical solution, when the piston pulls the shift pot, the gas in the airbag cannot enter the shift pot, and the slider in the shuttle valve is driven solely by the gas inside the shift pot. Furthermore, due to the presence of the switching pipeline, the gas used to propel the slider decreases in pressure and speed as the distance traveled increases. Consequently, the prior art airbag pump suffers from technical issues such as high switching delay, long cycle time (0.75s), and low fluid output during use. In light of these issues, the present application is filed. Summary of the Invention

[0005] In order to overcome the deficiencies of the prior art, the present invention provides a high-flow air bag pump that is directly connected to a power assembly and a first air bag assembly and a second air bag assembly, has high pumping power, shortens the delivery cycle, and increases the pumping flow.

[0006] The technical solution adopted by the present invention to solve the technical problem is: a large flow air bag pump, including a power component and a pump body, the power component is connected to the pump body to provide driving fluid for the pump body,

[0007] The pump body has:

[0008] The first object fluid chamber and the second object fluid chamber are both connected with a liquid inlet flow channel and a liquid outlet flow channel;

[0009] a first airbag assembly and a second airbag assembly that periodically expand or contract to cause the bellows pump to pump a subject fluid;

[0010] A push-pull rod connects the first airbag assembly and the second airbag assembly and has a first communication channel and a second communication channel at both ends respectively;

[0011] The power assembly has a first working position capable of delivering driving fluid to the first airbag assembly, and a second working position capable of delivering driving fluid to the second airbag assembly;

[0012] When the first airbag assembly is expanded to the first preset position, the first airbag assembly is connected to the power assembly through the first communication channel, and the power assembly switches from the first working position to the second working position;

[0013] When the second airbag assembly expands to the second preset position, the second airbag assembly is connected to the power assembly through the second communication channel, and the power assembly switches from the second working position to the first working position.

[0014] In the air bag pump provided by the present invention, a push-pull rod is connected between the first air bag assembly and the second air bag assembly, and a first connecting flow channel and a second connecting flow channel are set on the push-pull rod. When the power assembly is in the first working position, the first air bag assembly expands to the first preset position. At this time, a large amount of high-pressure gas in the first air bag assembly is directly connected to the power assembly through the first connecting flow channel. The power assembly can be quickly switched from the first working position to the second working position under the push of high pressure. When the power assembly is in the second working position, the second air bag assembly expands to the second preset position. At this time, a large amount of high-pressure gas in the second air bag assembly is directly connected to the power assembly through the second connecting flow channel. The power assembly can be quickly switched from the second working position to the first working position under the push of high pressure. The switching speed between the first working position and the second working position is fast, the cycle of switching the working positions is short, and the power of the first air bag assembly and the second air bag assembly to drive the push-pull rod to move is sufficient, thereby increasing the pumping flow of the air bag pump and making it more stable, thereby improving the delivery efficiency of the air bag pump; there are few structural components, and there is no need to set springs and other structures, and the service life is long.

[0015] Furthermore, the first airbag assembly includes a first airbag, a first cavity connected to the first airbag, and a second cavity connected to the power assembly;

[0016] The second airbag assembly includes a second airbag, a fifth cavity connected to the second airbag, and a fourth cavity connected to the power assembly;

[0017] When the first airbag is expanded to the first preset position, the first communication channel is connected to the first cavity and the second cavity, and the power assembly can be switched from the first working position to the second working position;

[0018] When the second airbag expands to the second preset position, the second communicating channel communicates with the fourth cavity and the fifth cavity, and the power assembly can be switched from the second working position to the first working position.

[0019] The first airbag component is designed as a first cavity and a second cavity structure, and the second airbag component is designed as a fourth cavity and a fifth cavity structure. In the initial position, the first cavity and the second cavity are isolated from each other, and the fourth cavity and the fifth cavity are isolated from each other. When the first airbag is expanded to the first preset position, the first cavity and the second cavity are connected through the first connecting flow channel, and the driving fluid in the second cavity can directly enter the power component. At this time, the flow of the high-pressure driving fluid in the first airbag can be used to complete the switching of the power component from the first working position to the second working position. When the second airbag is expanded to the second preset position, the fourth cavity and the fifth cavity are connected through the second connecting flow channel. At this time, the flow energy of the driving fluid is used to realize the switching of the power component from the second working position to the first working position. The switching process is simple and effective, and the switching power comes from the driving fluid, and there is no need to set up a complex structure.

[0020] Furthermore, the first airbag assembly further includes a first air guide plate, the push-pull rod axially passes through the first air guide plate, and the first air guide plate and the push-pull rod are sealed and cooperated to form the first cavity and the second cavity;

[0021] The second airbag assembly further includes a second air guide plate, the push-pull rod axially passes through the second air guide plate, and the second air guide plate and the push-pull rod are sealed and cooperated to form the fourth cavity and the fifth cavity.

[0022] The above-mentioned first cavity and second cavity can be formed by utilizing the sealing cooperation of the first air guide plate and the push-pull rod, and the fourth cavity and fifth cavity can be formed by utilizing the sealing cooperation of the second air guide plate and the push-pull rod. The assembly structure is simple, and the push-pull rod moves synchronously with the first airbag and the second airbag. The first connecting flow channel arranged on the push-pull rod can connect the first cavity and the second cavity when the first airbag is in the first preset position, and the second connecting flow channel can connect the fourth cavity and the fifth cavity when the second airbag is in the second preset position.

[0023] Furthermore, the first air guide plate is formed with a first intermediate flow channel for connecting the first airbag and the power assembly, and the first intermediate flow channel is always open;

[0024] The second air guide plate is formed with a second intermediate flow channel for connecting the second airbag and the power assembly, and the second intermediate flow channel is always open.

[0025] The first air guide plate forms a first intermediate flow channel, which serves as the main flow channel for the fluid to enter and exit the first airbag. The power assembly is directly connected to the first airbag through the first intermediate flow channel. The communication path is short, and the communication path is directly processed and formed on the first air guide plate, which reduces the difficulty of installation; the second air guide plate forms a second intermediate flow channel, which serves as the main flow channel for the fluid to enter and exit the second airbag. The power assembly is directly connected to the second airbag through the second intermediate flow channel. The communication path is short, and the communication path is directly processed and formed on the second air guide plate, which reduces the difficulty of installation.

[0026] Furthermore, the first air guide plate forms a third intermediate flow channel for connecting the second cavity and the power assembly, and the third intermediate flow channel is always open;

[0027] The second air guide plate forms a fourth intermediate flow channel for connecting the fourth cavity and the power assembly, and the fourth intermediate flow channel is always open.

[0028] A third intermediate flow channel is also formed on the first air guide disc, which connects the second cavity and the power assembly. When the power assembly needs to switch the working position, the driving fluid in the second cavity can directly enter the power assembly through the third intermediate flow channel. No additional components are required, which simplifies the overall structure of the bellows pump. In addition, the switching path is short and the switching power is large, so that the switching speed of the power assembly from the first working position to the second working position is fast; a fourth intermediate flow channel is also formed on the second air guide disc, which connects the fourth cavity and the power assembly. When the power assembly needs to switch the working position, the driving fluid in the fourth cavity can directly enter the power assembly through the fourth intermediate flow channel. No additional components are required, which simplifies the overall structure of the bellows pump. In addition, the switching path is short and the switching power is large, and the switching speed of switching from the second working position to the first working position is fast.

[0029] Furthermore, the first air guide plate forms a fifth intermediate flow channel for connecting the first airbag and the first cavity, and the fifth intermediate flow channel is always open;

[0030] The second air guide plate forms a sixth intermediate flow channel for connecting the second air bag and the fifth cavity, and the sixth intermediate flow channel is always open.

[0031] A first cavity is set between the first airbag and the second cavity. The first cavity can be used to effectively isolate the first airbag from the second cavity, and the first airbag and the first cavity are always connected, so that the driving fluid directly enters the first cavity when entering the first airbag. When it is necessary to switch the workstation, the first cavity and the second cavity are directly connected, and the driving fluid inside the former can quickly enter the latter, and the response time is short; in addition, the fifth intermediate flow channel is located in the first air guide plate, the overall structure is simple, and the function of the first air guide plate is maximized; the fifth cavity is set between the second airbag and the fourth cavity, and the fifth cavity can be used to effectively isolate the second airbag from the fourth cavity, and the second airbag and the fifth cavity are always connected, so that the driving fluid directly enters the fifth cavity when entering the second airbag, and the sixth intermediate flow channel is located in the second air guide plate, the overall structure is simple, and the function of the second air guide plate is maximized.

[0032] Furthermore, the first air guide disc includes a disc-shaped body and a hollow cylindrical body provided outside the disc-shaped body, the hollow cylindrical body axially extends into the first airbag, and the push-pull rod passes through the hollow portion of the hollow cylindrical body;

[0033] The second air guide plate is symmetrically arranged with the first air guide plate.

[0034] The design structure of the first air guide plate and the second air guide plate is simple and reasonable. The hollow cylindrical body faces the direction of the first airbag, which facilitates the fifth intermediate flow channel to connect the first airbag and the first cavity. The disc-shaped body facilitates the direct installation of the air guide plate and the airbag assembly, and also facilitates the third intermediate flow channel to connect the second cavity and the power assembly, and facilitates the first intermediate flow channel to connect the first airbag and the power assembly; at the same time, it also forms a stable support for the push-pull rod.

[0035] Furthermore, the pump body has a first sealing structure, which includes a groove and a grid ring arranged in the groove.

[0036] The first sealing structure is disposed in the first air guide plate and cooperates with the push-pull rod to isolate the first cavity from the second cavity;

[0037] The first sealing structure is arranged in the second air guide plate and cooperates with the push-pull rod to isolate the fourth cavity from the fifth cavity.

[0038] The first sealing structure can achieve sealed isolation between the first cavity and the second cavity, and achieve sealed isolation between the fourth cavity and the fifth cavity. The grooves are set on the first air guide plate and the second air guide plate, and there is no need to set up another mounting structure. A grid ring is selected, and its part protrudes from the groove opening, which not only increases the contact area between the first sealing structure and the push-pull rod, ensuring the sealing effect, but also avoids the failure of the first sealing structure after the push-pull rod moves back and forth multiple times.

[0039] Furthermore, the power assembly is a shuttle valve, which includes a shell with a cavity formed therein, and a slider reciprocatingly moves in the cavity to complete the switching between the first working position and the second working position.

[0040] The slider is driven by the driving fluid to translate in the housing to achieve switching between the first working position and the second working position. The switching structure is simple and effective.

[0041] Furthermore, the shell has a first air inlet and a second air inlet, and the slider has an inlet flow channel. In the first working position, the inlet flow channel connects the first air inlet and the first airbag; in the second working position, the inlet flow channel connects the second air inlet and the second airbag.

[0042] The slider moves in the cavity so that the first air inlet is opposite to the inlet flow channel, and at the same time the inlet flow channel is opposite to the first intermediate flow channel connected to the first airbag; or the second air inlet is opposite to the inlet flow channel, and at the same time the inlet flow channel is opposite to the second intermediate flow channel connected to the second airbag; the switching structure between the first working position and the second working position is simple, the switching path is short, and the switching efficiency is high.

[0043] Furthermore, the housing has a first reversing port that can communicate with the second cavity and a second reversing port that can communicate with the fourth cavity;

[0044] At the first preset position, the driving fluid in the first airbag enters the first reversing port to push the slider to the second working position;

[0045] At the second preset position, the driving fluid in the second airbag enters the second reversing port to push the slider to the first working position;

[0046] The first reversing port and the second reversing port are located on the side surface or end surface of the shell.

[0047] When in the first preset position, the first airbag assembly is connected to the power assembly. At this time, the driving fluid in the first airbag directly enters the first reversing port through the second cavity, and the driving fluid can push the slider downward. At this time, the second cavity and the third cavity are isolated from each other, and the driving fluid has no diversion. The slider quickly switches from the first working position to the second working position, the switching power is sufficient, the switching speed is fast, and the switching cycle is short; when in the second preset position, the second airbag assembly is connected to the power assembly. At this time, the driving fluid in the second airbag directly enters the second reversing port through the fourth cavity, and the driving fluid can push the slider upward. At this time, the fourth cavity and the third cavity are isolated from each other, and the driving fluid has no diversion. The slider quickly switches from the second working position to the first working position, the switching power is sufficient, the switching speed is fast, and the switching cycle is short; setting the first reversing port and the second reversing port on the side or end face of the shell can drive the slider to move horizontally at the end of the slider, and the switching movement of the slider is faster.

[0048] Furthermore, the cavity includes a first air-filled space located on the first working position side and a second air-filled space located on the second working position side;

[0049] The slider has a first guide surface for guiding the driving fluid flowing from the first reversing port into the first air-filled space, and a second guide surface for guiding the driving fluid flowing from the second reversing port into the second air-filled space.

[0050] The first inflation space is connected to the first reversing port, and the second inflation space is connected to the second reversing port. The driving fluid can enter the first inflation space from the first reversing port, or enter the second inflation space from the second reversing port, pushing the slider axially downward or axially upward. The slider will not deviate and can move downward or upward more quickly, making the switching of working positions more efficient. The first guide surface is set to guide the driving fluid more and faster to the first inflation space, or to the second inflation space, thereby guiding the flow of the driving fluid and preventing the driving fluid from not flowing to the target position.

[0051] Furthermore, the shuttle valve is further provided with a first auxiliary flow channel and a second auxiliary flow channel;

[0052] When in the first working position, the second auxiliary flow channel is connected to the second air inlet and the second inflation space to support the slider to remain in the first working position;

[0053] In the second working position, the first auxiliary flow channel is connected to the first air inlet and the first inflation space to support the slider to remain in the second working position.

[0054] When the power component is in the first working position, the fluid enters the second inflation space through the second auxiliary flow channel, and the fourth cavity is in an isolated state. This fluid stays in the second inflation space, which can support the slider upward to prevent the slider from falling; when the power component is in the second working position, the fluid enters the first inflation space through the first auxiliary flow channel, and the second cavity is in an isolated state. This fluid stays in the first inflation space, which can press the slider downward to prevent the slider from moving upward; the driving fluid in the first auxiliary flow channel and the second auxiliary flow channel will not cause the attenuation of the driving fluid air pressure, and will not have an adverse effect on the switching of the power component between the two working positions.

[0055] Furthermore, the second airbag is contracted to a fourth preset position, and the second inflation space is connected to the atmosphere through the fourth cavity;

[0056] When the first airbag is contracted to the third preset position, the first inflation space is connected to the atmosphere through the second cavity.

[0057] At this time, the driving fluid in the second auxiliary flow channel is discharged to the atmosphere, and the air pressure will not hinder the free fall of the slider. The driving fluid in the first auxiliary flow channel is discharged to the atmosphere, and the air pressure will not hinder the upward movement of the slider.

[0058] Furthermore, the pump body also includes a reversing seat, which has a third cavity connected to the atmosphere; when the first airbag shrinks to a third preset position, the second cavity and the third cavity are connected; when the second airbag shrinks to a fourth preset position, the fourth cavity and the third cavity are connected.

[0059] When the first airbag shrinks to the third preset position, the first connecting channel connects the second cavity and the third cavity, and the driving fluid in the first inflation space can be discharged to the outside through the third cavity; when the second airbag shrinks to the fourth preset position, the second connecting channel connects the fourth cavity and the third cavity, and the driving fluid in the second inflation space can be discharged to the outside through the third cavity.

[0060] Furthermore, a second sealing structure is provided between the second cavity and the third cavity, and the second sealing structure includes a groove and a grid ring provided in the groove.

[0061] The second sealing structure can achieve sealed isolation between the third cavity and the second cavity, and achieve sealed isolation between the third cavity and the fourth cavity. The grooves are set on the first air guide plate and the second air guide plate, and there is no need to set up another mounting structure. A grid ring is selected, and its part protrudes from the groove opening, which not only increases the contact area between the second sealing structure and the push-pull rod, ensuring the sealing effect, but also avoids the failure of the second sealing structure after the push-pull rod moves back and forth multiple times.

[0062] Furthermore, the power assembly, the first airbag assembly and the second airbag assembly are installed on the reversing seat, and the first airbag assembly and the second airbag assembly are symmetrically arranged with respect to the reversing seat.

[0063] The setting of the reversing seat facilitates the installation and connection of the power component, the first airbag component and the second airbag component; the first airbag component and the second airbag component are symmetrically arranged, so that the force on both sides of the push-pull rod is relatively uniform during the reciprocating movement, the delivery of the object fluid is more balanced, and the service life is extended, avoiding deformation of the first airbag or the second airbag; the flow channel on the reversing seat and the flow channel on the shuttle valve are connected one by one, and no longer connected through other pipelines, shortening the flow path of the driving fluid.

[0064] Furthermore, the first communicating flow channel and the second communicating flow channel are waist-shaped grooves or annular grooves arranged around the outer circumference of the push-pull rod.

[0065] The first communicating flow channel and the second communicating flow channel have simple structural designs and are easy to manufacture.

[0066] Furthermore, both ends of the push-pull rod are fixedly connected to the first airbag end wall and the second airbag end wall respectively through threaded connectors.

[0067] The connection structure between the push-pull rod and the first and second airbags is simple, and the axial connection of the push-pull rod makes the stretching of the first and second airbags more stable, avoiding deformation of the first and second airbags after long-term use.

[0068] Furthermore, a guide sleeve is provided on the first air guide plate and / or the second air guide plate, and the push-pull rod is slidably connected to the guide sleeve.

[0069] The guide sleeve can guide the translation of the push-pull rod, prevent the push-pull rod from deflecting during the reciprocating movement, and also reduce the translation resistance of the push-pull rod.

[0070] The beneficial effects of the present invention are as follows: the push-pull rod is connected between the first airbag assembly and the second airbag assembly, and the first communicating flow channel and the second communicating flow channel are provided on the push-pull rod. When the power assembly is in the first working position, the first airbag assembly is directly connected to the power assembly through the first communicating flow channel. When the power assembly is in the second working position, the second airbag assembly is directly connected to the power assembly through the second communicating flow channel. The power assembly can quickly switch between the first working position and the second working position, and the cycle of switching the working position is short. Moreover, the power of the first airbag assembly and the second airbag assembly to drive the push-pull rod to move is sufficient, thereby increasing the pumping flow of the airbag pump and improving the delivery efficiency of the airbag pump. The switching process between the first working position and the second working position is simple. , effective, switching path segments, high switching efficiency, and the switching power comes from the driving fluid, without the need to set up a complex structure; there are fewer structural parts, a simple assembly structure, and a long service life; the intermediate flow channels on the first air guide plate and the second air guide plate realize direct connection between the first airbag component and the power component, and the second airbag component and the power component, and the overall structure is simplified; when the power component is in the first working position or the second working position, the driving fluid in the first auxiliary flow channel or the second auxiliary flow channel can keep the slider in the working position state, and the working state of the air bag pump is stable. Once the working position needs to be switched, the driving fluid in the above-mentioned first auxiliary flow channel and the second auxiliary flow channel can be discharged to the outside, and will not increase the air pressure for switching the working position. BRIEF DESCRIPTION OF THE DRAWINGS

[0071] Figure 1 A three-dimensional diagram of the high-flow bellows pump provided by the present invention.

[0072] Figure 2 This is a side view of the high-flow bellows pump provided by the present invention.

[0073] Figure 3 This is a cross-sectional view of the high-flow bellows pump provided by the present invention.

[0074] Figure 4 This is a cross-sectional view of the matching structure of the first airbag assembly, the second airbag assembly, the push-pull rod and the reversing seat in the large-flow airbag pump provided by the present invention.

[0075] Figure 5 for Figure 4 A magnified view of the structure in Figure 2.

[0076] Figure 6 This is a schematic diagram of the matching structure of the first airbag assembly, the second airbag assembly, the push-pull rod and the reversing seat in the large-flow airbag pump provided by the present invention.

[0077] Figure 7 Schematic diagram of the exploded structure of the first airbag assembly, the second airbag assembly, the push-pull rod and the reversing seat in the large flow airbag pump provided by the present invention Figure 1 .

[0078] Figure 8 Schematic diagram of the exploded structure of the first airbag assembly, the second airbag assembly, the push-pull rod and the reversing seat in the large flow airbag pump provided by the present invention Figure 2 .

[0079] Figure 9 The three-dimensional structure of the first air guide disc in the large flow air bag pump provided by the present invention Figure 1 .

[0080] Figure 10 The three-dimensional structure of the first air guide disc in the large flow air bag pump provided by the present invention Figure 2 .

[0081] Figure 11 A cross-sectional view of the first air guide disc in the large flow air bag pump provided by the present invention Figure 1 .

[0082] Figure 12 A cross-sectional view of the first air guide disc in the large flow air bag pump provided by the present invention Figure 2 .

[0083] Figure 13 A cross-sectional view of the second air guide disc in the large flow air bag pump provided by the present invention Figure 1 .

[0084] Figure 14 A cross-sectional view of the second air guide disc in the large flow air bag pump provided by the present invention Figure 2 .

[0085] Figure 15 This is a cross-sectional view of the power assembly in the large-flow bellows pump provided by the present invention.

[0086] Figure 16 for Figure 15 A magnified view of the structure at point B in FIG.

[0087] Figure 17 A three-dimensional diagram of the reversing seat in the large-flow bellows pump provided by the present invention.

[0088] Figure 18 This is a cross-sectional view of the reversing seat in the large-flow bellows pump provided by the present invention.

[0089] Among them, 1- pump body, 11- first object fluid chamber, 12- second object fluid chamber, 13- liquid inlet flow channel, 14- liquid outlet flow channel, 15- reversing seat, 151- third cavity, 2- power assembly, 21- housing, 211- first air inlet, 212- second air inlet, 213- first reversing port, 214- second reversing port, 215- first communication port, 216- second communication port, 22- cavity, 221- first inflation space, 222- second inflation space, 23- slider, 231- inlet flow channel, 232- first guide surface, 233- second guide surface, 24- first auxiliary flow channel, 25- second auxiliary flow channel, 3- first airbag assembly, 31- first airbag, 32-first cavity, 33-second cavity, 34-first air guide plate, 341-first intermediate flow channel, 342-third intermediate flow channel, 343-fifth intermediate flow channel, 344-disc-shaped body, 345-hollow cylindrical body, 4-second airbag assembly, 41-second airbag, 42-fifth cavity, 43-fourth cavity, 44-second air guide plate, 441-second intermediate flow channel, 442-fourth intermediate flow channel, 443-sixth intermediate flow channel, 5-push-pull rod, 51-first connecting flow channel, 52-second connecting flow channel, 53-connecting piece, 54-guide sleeve, 6-first sealing structure, 61-groove, 62-Glay ring, 63-second sealing structure, 64-third sealing structure. DETAILED DESCRIPTION

[0090] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will provide a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0091] like Figure 1 、 Figure 2 As shown, a large-flow bellows pump includes a power assembly 2 and a pump body 1. The power assembly 2 is connected to the pump body 1 to provide driving fluid for the pump body 1.

[0092] like Figure 3As shown, the pump body 1 comprises at least a first target fluid chamber 11 and a second target fluid chamber 12, a first airbag assembly 3 and a second airbag assembly 4, and a push-pull rod 5 connecting the first airbag assembly 3 and the second airbag assembly 4. The first target fluid chamber 11 is connected to a liquid inlet channel 13 and a liquid outlet channel 14, and the second target fluid chamber 12 is also connected to a liquid inlet channel 13 and a liquid outlet channel 14. The first airbag assembly 3 and the second airbag assembly 4 periodically expand or contract, causing the bellows pump to pump the target fluid. The push-pull rod 5 has a first connecting channel 51 and a second connecting channel 52 at each end, respectively. The first connecting channel 51 is located inside the first airbag assembly 3, and the second connecting channel 52 is located inside the second airbag assembly 4.

[0093] In this embodiment, the target fluid may be CMP polishing liquid, acid or alkali in the etching process, organic corrosive agent, etc.

[0094] The power assembly 2 has a first working position and a second working position. In the first working position, the power assembly 2 delivers a driving fluid to the first airbag assembly 3; in the second working position, the power assembly 2 delivers a driving fluid to the second airbag assembly 4. In this embodiment, the driving fluid is gas.

[0095] When the driving fluid is input into the first airbag assembly 3, the first airbag assembly 3 will expand axially outward until it expands to the first preset position. At this time, the first airbag assembly 3 is directly connected to the power assembly 2 through the first connecting channel 51, so that the power assembly 2 can quickly switch from the first working position to the second working position under the push of the high-pressure driving fluid in the first airbag assembly 3.

[0096] When the second airbag assembly 4 inputs driving fluid, the second airbag assembly 4 will expand axially outward until it expands to the second preset position. At this time, the second airbag assembly 4 is directly connected to the power assembly 2 through the second connecting channel 52, so that the power assembly 2 can quickly switch from the second working position to the first working position.

[0097] The power assembly 2 switches back and forth between the first working position and the second working position, so that the first object fluid chamber 11 and the second object fluid chamber 12 periodically pump the object fluid.

[0098] In the above structure, the first airbag assembly 3 and the second airbag assembly 4 are directly connected to the power assembly 2, which can quickly complete the switching of the power assembly 2 between the first working position and the second working position. The first object fluid chamber 11 and the second object fluid chamber 12 have a short cycle for pumping the object fluid. The cycle is measured to be 0.5s under a driving fluid input pressure of 0.6Mpa and an object fluid output pressure of 0.13Mpa, which is more than 30% shorter than the airbag pump cycle in the prior art, thereby making the flow of the airbag pump larger and more stable.

[0099] Specifically, such as Figure 4As shown, the first airbag assembly 3 includes a first airbag 31, a first cavity 32 communicating with the first airbag 31, a second cavity 33 capable of communicating with the power assembly 2, and a first air guide plate 34. A push-pull rod 5 axially passes through the first air guide plate 34, and the first air guide plate 34 and the push-pull rod 5 cooperate in a sealing manner to form the first cavity 32 and the second cavity 33. The end of the push-pull rod 5 is fixedly connected to the end of the first airbag 31 via a threaded connector 53.

[0100] The second airbag assembly 4 includes a second airbag 41, a fifth cavity 42 communicating with the second airbag 41, a fourth cavity 43 capable of communicating with the power assembly 2, and a second air guide plate 44. A push-pull rod 5 axially extends through the second air guide plate 44, and the second air guide plate 44 and the push-pull rod 5 form the aforementioned fifth cavity 42 and fourth cavity 43. The end of the push-pull rod 5 is fixedly connected to the end of the second airbag 41 via a threaded connector 53.

[0101] When the first airbag 31 is inflated to the first preset position, the first communication channel 51 connects the first cavity 32 and the second cavity 33, and the power assembly 2 can switch from the first working position to the second working position. When the second airbag 41 is inflated to the second preset position, the second communication channel 52 connects the fourth cavity 43 and the fifth cavity 42, and the power assembly 2 can switch from the second working position to the first working position.

[0102] In this embodiment, the first communication channel 51 and the second communication channel 52 are waist-shaped grooves or annular grooves arranged around the outer circumference of the push-pull rod 5. In another embodiment, the first communication channel 51 and the second communication channel 52 can also be any other structure, such as a through-slot structure passing through the push-pull rod 5, as long as the following functions can be achieved: in the first preset position, the first communication channel 51 connects the first cavity 32 and the second cavity 33, and in other positions, the first communication channel 51 does not connect the first cavity 32 and the second cavity 33; in the second preset position, the second communication channel 52 connects the fourth cavity 43 and the fifth cavity 42, and in other positions, the second communication channel 52 does not connect the fourth cavity 43 and the fifth cavity 42.

[0103] like Figure 7-12 As shown, the first air guide plate 34 is formed with a first intermediate flow channel 341 for connecting the first airbag 31 and the power assembly 2, and the first intermediate flow channel 341 is always open; the first air guide plate 34 is also formed with a third intermediate flow channel 342 for connecting the second cavity 33 and the power assembly 2, and the third intermediate flow channel 342 is always open; the first air guide plate 34 is also formed with a fifth intermediate flow channel 343 for connecting the first airbag 31 and the first cavity 32, and the fifth intermediate flow channel 343 is always open.

[0104] More specifically, the first air guide plate 34 includes a disc-shaped body 344 and a hollow columnar body 345 disposed outside the disc-shaped body 344. The term "outside" here refers to the direction in which the hollow columnar body 345 is disposed away from the second air guide plate 44. Specifically, the hollow columnar body 345 extends axially into the first airbag 31, and the push-pull rod 5 passes through the hollow portion of the hollow columnar body 345. A first intermediate flow channel 341 extends through the disc-shaped body 344, connecting the first communication port 215 of the power assembly 2 and the first airbag 31. A third intermediate flow channel 342 originates from the inner side of the disc-shaped body, on the second cavity 33 side, and terminates at the end of the disc-shaped body 344 away from the hollow columnar body 345. A fifth intermediate flow channel is disposed on the hollow columnar body 345, connecting the first cavity 32 and the first airbag 31.

[0105] In order to ensure smooth sliding of the push-pull rod 5 relative to the first air guide plate 34 , a guide sleeve 54 is provided in the hollow columnar body 345 of the first air guide plate 34 , and the push-pull rod 5 is connected to the inner wall of the guide sleeve 54 in a sliding fit.

[0106] like Figure 13-14 As shown, the second air guide plate 44 is formed with a second intermediate flow channel 441 for connecting the second airbag 41 and the power assembly 2. This second intermediate flow channel 441 is always open. The second air guide plate 44 also forms a fourth intermediate flow channel 442 for connecting the fourth cavity 43 and the power assembly 2. This fourth intermediate flow channel 442 is always open. The second air guide plate 44 also forms a sixth intermediate flow channel 443 for connecting the second airbag 41 and the fifth cavity 42. This sixth intermediate flow channel 443 is always open. Because the second air guide plate 44 is structurally symmetrical to the first air guide plate 34, the locations of the second intermediate flow channel 441, the fourth intermediate flow channel 442, and the third intermediate flow channel 443 on the second air guide plate 44 are not further described here.

[0107] To ensure smooth sliding of the push-pull rod 5 relative to the second air guide plate 44 and to ensure effective sealing between the fourth cavity 43 and the fifth cavity 42, a guide sleeve 54 is provided within the hollow cylindrical body of the second air guide plate 44. The push-pull rod 5 is slidably engaged with the inner wall of the guide sleeve 54. Alternatively, the guide sleeve 54 may be provided only on the first air guide plate 34 or only on the second air guide plate 44. The number of guide sleeves 54 may also be multiple, and there is no specific limitation.

[0108] In this embodiment, the second air guide plate 44 is symmetrically arranged with respect to the first air guide plate 34 , and the specific structure thereof will not be described in detail.

[0109] It should be noted that if the rigid push-pull rod 5 moves in a non-axial direction, it will cause the flexible first and second airbags 31 and 32 to expand in a non-axial direction, thereby affecting the output flow of the bellows pump and the service life of the first and second airbags. Furthermore, during operation of the bellows pump, the non-axial push-pull rod 5 will rub against the first and second air guide plates 34 and 44, causing wear and tear, thereby affecting the seal between the first cavity 32 and the second cavity 33, as well as the fourth cavity 42 and the fourth cavity 43.

[0110] like Figure 5 As shown, the pump body 1 has a first sealing structure 6, which includes a groove 61 and a grid ring 62 disposed in the groove 61. One groove 61 is provided on the inner wall of the first air guide plate 34, so that the grid ring 62 can be sealed with the outer wall of the push-pull rod 5 to achieve a sealed isolation between the first cavity 32 and the second cavity 33. Another groove is provided on the inner wall of the second air guide plate 44. The grid ring in this groove can be sealed with the outer wall of the push-pull rod 5 to achieve a sealed isolation between the fourth cavity 43 and the fifth cavity 42.

[0111] In this embodiment, the power component 2 is a shuttle valve. Figure 15 As shown, it includes a shell 21 with a cavity 22 formed therein. A slider 23 reciprocates in the cavity 22 to complete the switching between the first working position and the second working position of the power assembly 2.

[0112] Specifically, a first air inlet 211 and a second air inlet 212 are formed on one side of the shell 21, and at least a first reversing port 213, a second reversing port 214, a first connecting port 215 and a second connecting port 216 are formed on the other opposite side of the shell 21, wherein the first connecting port 215 can be connected to the first airbag 31 through the first intermediate flow channel 341, the second connecting port 216 can be connected to the second airbag 41 through the second intermediate flow channel 441, the first reversing port 213 can be connected to the second cavity 33 through the third intermediate flow channel 342, and the second reversing port 214 can be connected to the fourth cavity 43 through the fourth intermediate flow channel 442.

[0113] The slider 23 has an inlet flow channel 231. In the first working position, the first air inlet 211 flows through the inlet flow channel 231 to the first connecting port 215, thereby forming a passage between the second air inlet 211 and the first airbag 31. In the second working position, the second air inlet 212 flows through the inlet flow channel 231 to the second connecting port 216, thereby forming a passage between the second air inlet 212 and the second airbag 41.

[0114] In this embodiment, the first reversing port 213 and the second reversing port 214 are formed on the side of the housing. Of course, in another embodiment, the first reversing port 213 and the second reversing port 214 can also be set on the end surface; when in the first preset position, the gas in the first airbag 31 enters the first reversing port 213, thereby pushing the slider 23 downward (to Figure 15 When in the second preset position, the gas in the second airbag 41 enters the second reversing port 214, thereby pushing the slider 23 to move up to the first working position.

[0115] The cavity 22 includes a first air-filled space 221 located on the first working position side and a second air-filled space 222 located on the second working position side. Figure 15 、 Figure 16 As shown, the slider 23 has a first guide surface 232 and a second guide surface 233. The first guide surface 232 is used to guide the driving fluid flowing in from the first reversing port 213 into the first plenum 221, allowing the driving fluid to smoothly push the slider 23 downward. The second guide surface 233 is used to guide the driving fluid flowing in from the second reversing port 214 into the second plenum 222, allowing the driving fluid to smoothly push the slider 23 upward. In this embodiment, the first guide surface 232 and the second guide surface 233 are both inclined cutting surfaces on the outer ring of the end of the slider 23. The first plenum 221 is formed by the gap between the outer periphery of the slider 23 and the inner wall of the upper end of the housing 21. This gap can be zero and expands after gas enters the first reversing port 213. The second plenum 222 is formed by the gap between the outer periphery of the slider 23 and the inner wall of the lower end of the housing 21. This gap can be zero and expands after gas enters the second reversing port 214.

[0116] The shuttle valve is also provided with a first auxiliary flow channel 24 and a second auxiliary flow channel 25. In the first working position, the second auxiliary flow channel 25 connects the second air inlet 212 and the second inflation space 222, thereby supporting the slider 23 upward and maintaining it in the first working position. At this time, the second inflation space 222 also connects to the fourth cavity 43 through the second reversing port 214. When the second airbag 41 is deflated to the fourth preset position, the second inflation space 222 is connected to the atmosphere through the fourth cavity 43.

[0117] In the second working position, the first auxiliary flow channel 24 connects the first air inlet 211 and the first inflation space 221, thereby pushing the slider 23 downward and maintaining the slider 23 in the second working position. At this time, the first inflation space 221 is also connected to the second cavity 33 through the first reversing port 213. When the first airbag 31 is deflated to the third preset position, the first inflation space 221 is connected to the atmosphere through the second cavity 33.

[0118] The pump body 1 includes a reversing seat 15, which has a third cavity 151 connected to the atmosphere. Therefore, during the above process, when the first airbag 31 is deflated to the third preset position, the second cavity 33 and the third cavity 151 are connected, allowing the first inflatable space 221 to be connected to the atmosphere through the second cavity 33 and the third cavity 151. When the second airbag 41 is deflated to the fourth preset position, the fourth cavity 43 and the third cavity 151 are connected, allowing the second inflatable space 222 to be connected to the atmosphere through the fourth cavity 43 and the third cavity 151. It should be noted that when the first airbag 31 is in the first preset position, the second airbag 41 is exactly in the fourth preset position, so that when the shuttle valve needs to switch from the first working position to the second working position, the air pressure in the second inflation space 222 is equivalent to the atmospheric pressure, thereby reducing the resistance of the slider 23 when sliding; similarly, when the second airbag 41 is in the second preset position, the first airbag 31 is exactly in the third preset position, so that when the shuttle valve needs to switch from the second working position to the first working position, the air pressure in the first inflation space 221 is equivalent to the atmospheric pressure, thereby reducing the resistance of the slider 23 when sliding.

[0119] To achieve a seal between the second cavity 33 and the third cavity 151, a second sealing structure 63 is provided on the inner wall of the first air guide plate 34. To achieve a seal between the fourth cavity 43 and the third cavity 151, a third sealing structure 64 is provided on the inner wall of the second air guide plate 44. The second and third sealing structures 63 and 64 are identical to the first sealing structure, both comprising a groove and a grid ring disposed within the groove. Details thereof are omitted. It should be noted that when the first airbag 31 is in the third preset position, the first connecting channel 51 connects the second cavity 33 and the third cavity 151, and the second sealing structure 63 is eliminated. When the second airbag 41 is in the fourth preset position, the second connecting channel 52 connects the fourth cavity 43 and the third cavity 151, and the third sealing structure 64 is eliminated. Furthermore, when the first airbag 31 is in the first preset position, the second airbag 41 is exactly in the fourth preset position; and when the second airbag 41 is in the second preset position, the first airbag 31 is exactly in the third preset position.

[0120] In this embodiment, the power assembly 2, the first airbag assembly 3 and the second airbag assembly 4 are mounted on the reversing seat 15, and the reversing seat 15 is located in the middle position of the airbag pump; the first airbag assembly 3 and the second airbag assembly 4 are symmetrically arranged about the reversing seat 15.

[0121] Such an installation arrangement can make the connecting flow channel between the first airbag 31, the second airbag 41 and the power component 2 shorter, and the air pressure attenuation of the power component 2 transmitted by the first airbag 31 and the second airbag 41 is smaller, thereby making the power component 2 switch between the first working position and the second working position faster, the cycle of the airbag pump is shorter, and the flow rate of the pumped object fluid is larger.

[0122] The working process of the present invention is:

[0123] In the initial state, the first cavity 32 is connected to the first airbag 31, and the first cavity 32 is isolated from the second cavity 33; the fifth cavity 42 is connected to the second airbag 41, and the fifth cavity 42 is isolated from the fourth cavity 43;

[0124] The power assembly 2 is in the first working position. A driving fluid is input from the first air inlet 211. The driving fluid passes through the inlet flow channel 231, the first communication port 215, and the first intermediate flow channel 341, and enters the first airbag 31. The first airbag 31 expands, pumping the target fluid in the first target fluid chamber 11 out through the liquid outlet channel 14.

[0125] At the same time, another fluid flows from the second air inlet 212 through the second auxiliary flow channel 25 into the second air-filled space 222. Since the second reversing port 214 is connected to the fourth cavity 43, the fourth cavity 43 is not connected to the fifth cavity 42 or the third cavity 151 at this time. The fourth cavity 43 is in an isolated state. This fluid stays in the second air-filled space 222, supporting the slider 23 upward and keeping the slider 23 in the first working position.

[0126] The first airbag 31 drives the push-pull rod 5 to move, and the first communication channel 51 moves leftward from the second cavity 33 to the first sealing structure 6. At this time, the first airbag 31 expands to the first preset position. The first communication channel 51 connects the second cavity 33 and the first cavity 32, driving the fluid from the first airbag 31 through the first cavity 32 into the second cavity 33. At the same time, the second airbag 41 is exactly in the fourth preset position.

[0127] The driving fluid in the second cavity 33 enters the first air-filled space 221 through the first reversing port 213, pushing the slider 23 of the power assembly 2 downward, switching from the first working position to the second working position. At this time, because the second connecting flow channel 52 connects the third cavity 151 and the fourth cavity 43, the fluid entering through the second auxiliary flow channel 25 enters the third cavity through the fourth cavity 43 and is then directly discharged outward through the third cavity 151, without hindering the downward movement of the slider 23.

[0128] The power assembly 2 is in the second working position. A driving fluid is introduced through the second air inlet 212. This driving fluid passes through the inlet flow channel 231, the second connecting port 216, and the second intermediate flow channel 441, and enters the second airbag 41. The second airbag 41 expands, pumping the target fluid in the second target fluid chamber 12 out through the liquid outlet channel. At this time, the first airbag 31 contracts, and the target fluid is pumped into the first target fluid chamber 11 through the liquid inlet channel 13.

[0129] At the same time, another fluid flows from the first air inlet 211 through the first auxiliary flow channel 24 into the first air-filled space 221. Since the first reversing port 213 is connected to the second cavity 33, the second cavity 33 is not connected to the first cavity 32 or the third cavity 151 at this time. The second cavity 33 is in an isolated state. This fluid stays in the first air-filled space 221, pushing the slider 23 downward, keeping the slider 23 in the second working position.

[0130] The second airbag 41 drives the push-pull rod 5 to move, and the second communication channel 52 moves rightward from the fourth cavity 43 to the first sealing structure. At this time, the second airbag 41 expands to the second preset position, and the second communication channel 52 connects the fourth cavity 43 and the fifth cavity 42, driving the fluid from the second airbag 41 through the fifth cavity 42 into the fourth cavity 43. At the same time, the first airbag 31 is exactly in the third preset position.

[0131] The driving fluid in the fourth cavity 43 enters the second air-filled space 222 through the second reversing port 214, pushing the slider 23 of the power assembly 2 upward, switching from the second working position to the first working position. At this time, because the first connecting flow channel 51 connects the third cavity 151 and the second cavity 33, the fluid entering through the first auxiliary flow channel 24 enters the third cavity 151 through the second cavity and is then directly discharged outward through the third cavity 151, without hindering the upward movement of the slider 23.

[0132] Repeat the above steps continuously.

[0133] The above specific embodiments are used to illustrate the present invention rather than to limit the present invention. Any modifications and changes made to the present invention within the spirit of the present invention and the protection scope of the claims shall fall within the protection scope of the present invention.

Claims

1. A large-flow bellows pump, comprising a power assembly and a pump body, wherein the power assembly is connected to the pump body to provide driving fluid for the pump body, characterized in that: The power assembly is a shuttle valve, which includes a housing and a slider; the pump body includes a reversing seat, a first airbag assembly and a second airbag assembly, and the shuttle valve, the first airbag assembly and the second airbag assembly are installed on the reversing seat; The first airbag assembly and the second airbag assembly periodically expand or contract to enable the airbag pump to pump the target fluid; the first airbag assembly includes a first airbag, a first cavity connected to the first airbag, and a second cavity connected to the shuttle valve; the second airbag assembly includes a second airbag, a fifth cavity connected to the second airbag, and a fourth cavity connected to the shuttle valve; The pump body also has: The first object fluid chamber and the second object fluid chamber are both connected with a liquid inlet flow channel and a liquid outlet flow channel; A push-pull rod connects the first airbag assembly and the second airbag assembly and has a first communication channel and a second communication channel at both ends respectively; The power assembly has a first working position for delivering driving fluid to the first airbag assembly, and a second working position for delivering driving fluid to the second airbag assembly; the slider can be moved back and forth in the cavity to complete the switching between the first working position and the second working position; When the first airbag assembly is expanded to the first preset position, the first communication channel connects the first cavity and the second cavity, and the first airbag assembly is connected to the shuttle valve through the first communication channel, and the shuttle valve switches from the first working position to the second working position; When the second airbag assembly expands to the second preset position, the second communicating channel communicates with the fourth cavity and the fifth cavity, and the second airbag assembly communicates with the shuttle valve through the second communicating channel, and the shuttle valve switches from the second working position to the first working position.

2. The large flow bellows pump according to claim 1, characterized in that: The first airbag assembly further includes a first air guide plate, the push-pull rod axially passes through the first air guide plate, and the first air guide plate and the push-pull rod are sealed and cooperated to form the first cavity and the second cavity; The second airbag assembly further includes a second air guide plate, the push-pull rod axially passes through the second air guide plate, and the second air guide plate and the push-pull rod are sealed and cooperated to form the fourth cavity and the fifth cavity.

3. The large flow bellows pump according to claim 2, characterized in that: The first air guide plate is formed with a first intermediate flow channel for connecting the first air bag and the shuttle valve, and the first intermediate flow channel is always open; The second air guide disc is formed with a second intermediate flow channel for connecting the second air bag and the shuttle valve, and the second intermediate flow channel is always open.

4. The large flow bellows pump according to claim 2, characterized in that: The first air guide disc forms a third intermediate flow channel for connecting the second cavity and the shuttle valve, and the third intermediate flow channel is always open; The second air guide plate forms a fourth intermediate flow channel for connecting the fourth cavity and the shuttle valve, and the fourth intermediate flow channel is always open.

5. The large flow bellows pump according to claim 4, characterized in that: The first air guide plate forms a fifth intermediate flow channel for connecting the first air bag and the first cavity, and the fifth intermediate flow channel is always open; The second air guide plate forms a sixth intermediate flow channel for connecting the second air bag and the fifth cavity, and the sixth intermediate flow channel is always open.

6. The high-flow bellows pump according to any one of claims 2 to 5, characterized in that: The first air guide disc includes a disc-shaped body and a hollow cylindrical body provided outside the disc-shaped body, the hollow cylindrical body axially extends into the first airbag, and the push-pull rod passes through the hollow portion of the hollow cylindrical body; The second air guide plate is symmetrically arranged with the first air guide plate.

7. The large flow bellows pump according to claim 2, characterized in that: The pump body has a first sealing structure, which includes a groove and a grid ring arranged in the groove. The first sealing structure is disposed in the first air guide plate and cooperates with the push-pull rod to isolate the first cavity from the second cavity; The first sealing structure is arranged in the second air guide plate and cooperates with the push-pull rod to isolate the fourth cavity from the fifth cavity.

8. The large flow bellows pump according to claim 1, characterized in that: The shell has a first air inlet and a second air inlet, and the slider has an inlet flow channel. When in the first working position, the inlet flow channel connects the first air inlet and the first airbag; when in the second working position, the inlet flow channel connects the second air inlet and the second airbag.

9. The large flow bellows pump according to claim 1, characterized in that: The housing has a first reversing opening and a second reversing opening; At the first preset position, the driving fluid in the first airbag enters the first reversing port to push the slider to the second working position; At the second preset position, the driving fluid in the second airbag enters the second reversing port to push the slider to the first working position; The first reversing port and the second reversing port are located on the side surface or end surface of the shell.

10. The large flow bellows pump according to claim 9, characterized in that: The cavity includes a first air-filled space located on the first working position side and a second air-filled space located on the second working position side; The slider has a first guide surface for guiding the driving fluid flowing from the first reversing port into the first air-filled space, and a second guide surface for guiding the driving fluid flowing from the second reversing port into the second air-filled space.

11. The large flow bellows pump according to claim 10, characterized in that: The shuttle valve is further provided with a first auxiliary flow channel and a second auxiliary flow channel; When in the first working position, the second auxiliary flow channel is connected to the second air inlet and the second inflation space to support the slider to remain in the first working position; In the second working position, the first auxiliary flow channel is connected to the first air inlet and the first inflation space to support the slider to remain in the second working position.

12. The large flow bellows pump according to claim 11, characterized in that: The second airbag is contracted to a fourth preset position, and the second inflatable space is connected to the atmosphere through the fourth cavity; When the first airbag is contracted to the third preset position, the first inflation space is connected to the atmosphere through the second cavity.

13. The high-flow bellows pump according to claim 1, 2 or 12, characterized in that: The reversing seat has a third cavity connected to the atmosphere; when the first airbag shrinks to the third preset position, the second cavity and the third cavity are connected; when the second airbag shrinks to the fourth preset position, the fourth cavity and the third cavity are connected.

14. The large flow bellows pump according to claim 13, characterized in that: A second sealing structure is provided between the second cavity and the third cavity. The second sealing structure includes a groove and a grid ring provided in the groove.

15. The large flow bellows pump according to claim 13, characterized in that: The first airbag assembly and the second airbag assembly are symmetrically arranged about the reversing seat.

16. The large flow bellows pump according to claim 1 or 2, characterized in that: The first communicating flow channel and the second communicating flow channel are waist-shaped grooves or annular grooves arranged around the outer circumference of the push-pull rod.

17. The large flow bellows pump according to claim 1 or 2, characterized in that: The two ends of the push-pull rod are respectively fixedly connected to the first airbag end wall and the second airbag end wall through threaded connectors.

18. The large flow bellows pump according to claim 2, characterized in that: The first air guide plate and / or the second air guide plate is provided with a guide sleeve, and the push-pull rod is slidably connected to the guide sleeve.

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