Cantilever probe structure

Abstract

The present invention discloses a cantilever probe structure. The cantilever probe structure includes a fixed section, a travel section connected to the fixed section, and a needle measuring section connected to the travel section. The travel section has a first characteristic portion, an elastic portion, and a second characteristic portion in sequence in the direction away from the fixed section. The first characteristic portion and the second characteristic portion are opposite to each other and spaced apart, and the needle measuring section is connected to the second characteristic portion. When the cantilever probe structure presses a free end of the needle measuring section against an object to be measured, so that the second characteristic portion contacts the first characteristic portion through deformation of the elastic portion, the cantilever probe structure forms a signal transmission path from the free end along the needle measuring section, the second characteristic portion, and the first characteristic portion to the fixed section. Accordingly, the cantilever probe structure effectively optimizes the overall force structure through the elastic portion and greatly shortens the path length of signal transmission.

Description

Technical Field

[0001] The present invention relates to a probe, in particular to a cantilever probe structure. Background Art

[0002] Existing cantilever probes (e.g., Taiwan Patent No. 1429915) have long cantilevers, resulting in longer signal transmission paths. This makes them difficult to use for high-speed or high-frequency signal testing. The inventors, believing these limitations can be addressed, conducted intensive research and applied scientific principles to develop a rationally designed, effective solution to these limitations. Summary of the Invention

[0003] An embodiment of the present invention provides a cantilever probe structure, which can effectively improve the defects that may occur in existing cantilever probes.

[0004] An embodiment of the present invention discloses a cantilever probe structure, which includes a fixed section for welding on a plate; a travel section connected to the fixed section; wherein the travel section has a first characteristic portion, an elastic portion and a second characteristic portion in sequence in a direction away from the fixed section, and the first characteristic portion and the second characteristic portion are arranged opposite to each other and at intervals; and a needle measuring section connected to the second characteristic portion of the travel section, and a free end of the needle measuring section is used to detachably press against an object to be measured; wherein the cantilever probe structure defines a first signal transmission path from the free end along the needle measuring section, the second characteristic portion, the elastic portion and the first characteristic portion to the fixed section; wherein, when the cantilever probe structure presses the free end against the object to be measured so that the second characteristic portion contacts the first characteristic portion through deformation of the elastic portion, the cantilever probe structure forms a second signal transmission path from the free end along the needle measuring section, the second characteristic portion and the first characteristic portion to the fixed section.

[0005] Preferably, the needle measuring section comprises: a top abutting portion having a free end; and a cantilever portion connecting the top abutting portion and the second characteristic portion; wherein the top abutting portion can be displaced by the cantilever portion swinging relative to the elastic portion.

[0006] Preferably, the cantilever portion is formed by extending from the second characteristic portion toward an inclined direction away from the elastic portion and the fixing section.

[0007] Preferably, the cantilever portion is recessed with at least one slot along its length direction.

[0008] Preferably, the abutting portion is hierarchical and has a first trapezoidal section and a second trapezoidal section sequentially extending from the cantilever portion, and a top edge of the first trapezoidal section is larger than a bottom edge of the second trapezoidal section.

[0009] Preferably, the travel section has a support portion extending obliquely from the fixed section to the first characteristic portion, and the support portion and the cantilever portion face each other; wherein the distance between the support portion and the cantilever portion gradually increases in a direction away from the elastic portion.

[0010] Preferably, an impedance value formed by the second characteristic portion, the elastic portion, and the first characteristic portion in the first signal transmission path is greater than an impedance value formed by the second characteristic portion and the first characteristic portion in the second signal transmission path.

[0011] Preferably, the contact between the second feature and the first feature is defined as multi-point contact.

[0012] Preferably, the cantilever probe structure has a width in a direction parallel to the plate and a height in a direction perpendicular to the plate, and a ratio defined by dividing the width of the cantilever probe structure by the height is between 0.7 and 1.5.

[0013] Preferably, the cantilever probe structure is further defined as an integrally formed single-piece structure, and the elastic portion is C-shaped or U-shaped, and when the second feature portion contacts the first feature portion, the first feature portion, the elastic portion, and the second feature portion together form a closed loop.

[0014] In summary, the cantilever probe structure disclosed in the embodiment of the present invention effectively optimizes the overall force structure of the cantilever probe structure by forming the elastic portion that can change the distance between the first characteristic portion and the second characteristic portion, and greatly shortens the path length of signal transmission, thereby providing a shorter transmission path between the plate and the object to be tested (that is, both the first signal transmission path and the second signal transmission path are shorter than the transmission path of the existing cantilever probe).

[0015] Furthermore, the cantilever probe structure disclosed in the embodiment of the present invention can contact the first characteristic portion through the second characteristic portion, so that the signal between the board and the object to be tested can take a shorter path (that is, the second signal transmission path), reducing the loss caused by the path to provide better test performance.

[0016] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and are not intended to limit the scope of protection of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a three-dimensional schematic diagram of a cantilever probe structure fixed to a plate according to a first embodiment of the present invention.

[0018] Figure 2 for Figure 1 Schematic diagram of the floor plan.

[0019] Figure 3 for Figure 2 Schematic diagram of a cantilever probe structure used to test an object under test.

[0020] Figure 4 This is a plan view of the cantilever probe structure according to the first embodiment of the present invention, in which the first characteristic portion and the second characteristic portion are matched in a concave-convex manner.

[0021] Figure 5 This is a planar schematic diagram of a cantilever probe structure fixed to a plate according to a second embodiment of the present invention.

[0022] Figure 6 This is a planar schematic diagram of a cantilever probe structure fixed to a plate according to a third embodiment of the present invention.

[0023] Figure 7 Schematic diagram of a cantilever probe structure fixed to a plate according to a fourth embodiment of the present invention.

[0024] Figure 8 for Figure 7 Schematic diagram of a cantilever probe structure used to test an object under test.

[0025] Figure 9 FIG. 1 is a plan view of another embodiment of the cantilever probe structure of the present invention.

[0026] Figure 10 for Figure 9 Schematic diagram of a cantilever probe structure used to test an object under test. DETAILED DESCRIPTION

[0027] The following is an explanation of the implementation of the "cantilever probe structure" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following embodiments will further explain the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of protection of the present invention.

[0028] It should be understood that although terms such as "first," "second," and "third" may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. In addition, the term "or" as used herein may include any one or more combinations of the associated listed items, as appropriate.

[0029] [Example 1]

[0030] See also Figures 1 to 4 As shown, it is the first embodiment of the present invention. Figures 1 to 3 As shown, this embodiment discloses a cantilever probe structure 100, which is a component used in a cantilever probe card and is suitable for transmitting high-frequency or high-speed signals; that is, any probe structure that is not a cantilever is different from the cantilever probe structure 100 disclosed in this embodiment.

[0031] It should be noted that the cantilever probe structure 100 has a width W100 parallel to the plate 200 and a height H100 perpendicular to the plate 200. The ratio of the width W100 divided by the height H100 of the cantilever probe structure 100 is between 0.7 and 1.5. In other words, any cantilever probe having a width greater than twice its height is not considered the cantilever probe structure 100 in this embodiment.

[0032] Furthermore, the cantilever probe structure 100 in this embodiment is a one-piece, integrally molded structure with a generally rectangular cross-section. The cantilever probe structure 100 includes a fixed section 1, a travel section 2 connected to the fixed section 1, and a probe section 3 connected to the travel section 2.

[0033] Furthermore, the cantilever probe structure 100 can be welded to a board 200 through the fixing section 1, and the welding method between the fixing section 1 and the board 200 can be adjusted according to design requirements, such as: surface mount technology (SMT), pin-in-paste (PIP), or other welding methods, which are not limited in the present invention.

[0034] In this embodiment, the travel section 2 includes a support portion 21, a first feature portion 22, an elastic portion 23, and a second feature portion 24 in the direction away from the fixed section 1, but the present invention is not limited thereto. For example, in other embodiments of the present invention, the travel section 2 may omit the support portion 21.

[0035] In this embodiment, the support portion 21 is formed by obliquely extending from the fixing section 1 to the first characteristic portion 22, and the support portion 21 is roughly formed with the fixing section 1 (or the plate body 200) at an acute angle between 15 degrees and 45 degrees, but the present invention is not limited to the above conditions.

[0036] Furthermore, the elastic portion 23 is C-shaped or U-shaped in this embodiment to have the function of elastic deformation, but the specific structure of the elastic portion 23 can also be adjusted and changed according to design requirements and is not limited to this embodiment.

[0037] Furthermore, the first characteristic portion 22 and the second characteristic portion 24 are respectively located at the two ends of the elastic portion 23; that is, the first characteristic portion 22 is connected between the support portion 21 and the elastic portion 23, and the second characteristic portion 24 is connected between the elastic portion 23 and the stroke section 2, and the first characteristic portion 22 and the second characteristic portion 24 are facing each other and spaced apart.

[0038] It should be noted that the cantilever probe structure 100 can move the second feature portion 24 and contact the first feature portion 22 through the elastic deformation of the elastic portion 23. The first feature portion 22 and the second feature portion 24 are mutually matched structures and can be adjusted and changed according to design requirements. For example, the contact (and structural matching) between the second feature portion 24 and the first feature portion 22 can be as follows: Figure 3 Single point contact shown, or Figure 4 Multiple points of contact are shown.

[0039] like Figures 1 to 3 As shown, the probe section 3 in this embodiment includes a supporting portion 31 and a cantilever portion 32 connecting the supporting portion 31 and the second feature portion 24. The cantilever portion 32 extends from the second feature portion 24 in an inclined direction away from the elastic portion 23 and the fixed section 1. Furthermore, the support portion 21 and the cantilever portion 32 face each other, and the distance between the support portion 21 and the cantilever portion 32 gradually increases in a direction away from the elastic portion 23. Accordingly, in this embodiment, the cantilever probe structure 100 can absorb external forces and provide a certain degree of travel distance through the inclined cantilever portion 32, but the present invention is not limited thereto.

[0040] Furthermore, in this embodiment, the abutting portion 31 is formed at the end of the cantilever portion 32 away from the second characteristic portion 24 (eg, Figure 2 The right end of the cantilever portion 32 (in the cantilever) extends away from the fixed section 1, and the abutting portion 31 is preferably pyramidal, with a sharp free end 311. The free end 311 of the abutting portion 31 (or the probe section 3) can be detachably abutted against an object under test 300 (e.g., a semiconductor chip), and the abutting portion 31 can be displaced by the cantilever portion 32 swinging relative to the elastic portion 23. In other words, the object under test 300 can transmit signals to the plate 200 via the free end 311 and through the cantilever probe structure 100.

[0041] More specifically, the cantilever probe structure 100 defines a first signal transmission path P1 extending from the free end 311 through the probing section 3, the second feature 24, the elastic portion 23, and the first feature 22, to the fixed section 1. In other words, signal transmission between the plate 200 and the object under test 300 can be achieved via the first signal transmission path P1. In this embodiment, the first signal transmission path P1 extends along the entire travel section 2 (including the support portion 21).

[0042] Furthermore, when the cantilever probe structure 100 abuts the object under test 300 with the free end 311, deforming the elastic portion 23 to cause the second feature 24 to contact the first feature 22, the cantilever probe structure 100 forms a second signal transmission path P2 that runs from the free end 311 sequentially through the probing section 3, the second feature 24, and the first feature 22 to the fixed section 1. In other words, signal transmission can also occur between the plate 200 and the object under test 300 via the second signal transmission path P2. In this embodiment, the second signal transmission path P2 only partially passes through the travel section 2; in other words, the second signal transmission path P2 does not extend beyond the elastic portion 23, thereby reducing the overall path length.

[0043] Accordingly, in this embodiment, the cantilever probe structure 100 is formed with the elastic portion 23 that can change the distance between the first feature portion 22 and the second feature portion 24, thereby effectively optimizing the overall force structure of the cantilever probe structure 100 and significantly shortening the path length of signal transmission, thereby providing a shorter transmission path between the plate 200 and the object to be measured 300 (that is, both the first signal transmission path P1 and the second signal transmission path P2 are shorter than the transmission path of the existing cantilever probe).

[0044] Furthermore, in this embodiment, the cantilever probe structure 100 can contact the first feature portion 22 through the second feature portion 24, so that the signal between the board 200 and the object to be tested 300 can take a shorter path (that is, the second signal transmission path P2), reducing the loss caused by the path to provide better test performance.

[0045] It should be additionally explained that an impedance value formed by the second characteristic portion 24, the elastic portion 23, and the first characteristic portion 22 in the first signal transmission path P1 is greater than an impedance value formed by the second characteristic portion 24 and the first characteristic portion 22 in the second signal transmission path P2. Therefore, when the second characteristic portion 24 contacts the first characteristic portion 22, the signal between the board 200 and the object under test 300 will automatically choose to travel along the second signal transmission path P2 with a lower impedance value.

[0046] Furthermore, when the second characteristic portion 24 contacts the first characteristic portion 22, the first characteristic portion 22, the elastic portion 23, and the second characteristic portion 24 together form a closed loop; that is, the closed loop is equivalent to an external loop located outside the second signal transmission path P2, so when the signal between the board 200 and the device under test 300 travels along the second signal transmission path P2, no stub effect will be generated.

[0047] [Example 2]

[0048] See also Figure 5 As shown, this is the second embodiment of the present invention. Since this embodiment is similar to the above-mentioned first embodiment, the similarities between the two embodiments will not be repeated here. The differences between this embodiment and the above-mentioned first embodiment are roughly described as follows:

[0049] In this embodiment, the cantilever portion 32 of the cantilever probe structure 100 is recessed with at least one slot 321 along its length. In this embodiment, the cantilever probe structure 100 is described as having a single slot 321 extending through the cantilever portion 32, but the present invention is not limited thereto. For example, in other embodiments not shown, the cantilever portion 32 may have a non-extending slot 321 recessed on opposite sides thereof; or, the cantilever portion 32 may have multiple slots 321 extending through and arranged in parallel.

[0050] Accordingly, in this embodiment, the cantilever probe structure 100 forms the slot 321 with a preset shape or a design requirement on the cantilever portion 32 to effectively adjust (e.g., reduce) the force that the object under test 300 needs to withstand, thereby preventing the cantilever probe structure 100 from damaging the object under test 300.

[0051] [Example 3]

[0052] See also Figure 6 As shown, this is the third embodiment of the present invention. Since this embodiment is similar to the above-mentioned embodiments 1 and 2, the similarities between the two embodiments will not be repeated here. The differences between this embodiment and the above-mentioned embodiments 1 and 2 are roughly described as follows:

[0053] In this embodiment, the supporting portion 31 is hierarchical and has a first trapezoidal section 312 and a second trapezoidal section 313 extending sequentially from (the end of) the cantilever portion 32, and the top edge of the first trapezoidal section 312 is larger than the bottom edge of the second trapezoidal section 313, and the free end 311 is located at the top edge of the second trapezoidal section 313.

[0054] In addition, the top support portion 31 can also be structurally adjusted differently according to design requirements; for example, in other embodiments not shown in the present invention, the top support portion 31 can also be further provided with a third trapezoidal section above the second trapezoidal section 313, and the top edge of the second trapezoidal section 313 is larger than the bottom edge of the third trapezoidal section, and the free end 311 is located at the top edge of the third trapezoidal section.

[0055] [Example 4]

[0056] See also Figures 7 to 10 As shown, this is the fourth embodiment of the present invention. Since this embodiment is similar to the above-mentioned embodiments 1 to 3, the similarities between the two embodiments will not be repeated here. The differences between this embodiment and the above-mentioned embodiments 1 to 3 are roughly described as follows:

[0057] In this embodiment, the needle detection section 3 only has the top portion 31, and the Figure 2 The cantilever portion 32 is shown; that is, the supporting portion 31 is formed by extending from the second characteristic portion 24 in a direction away from the fixed section 1, thereby effectively reducing the width W100 of the cantilever probe structure 100 and further shortening the length of the first signal transmission path P1 and the length of the second signal transmission path P2, so that the cantilever probe structure 100 can have a structure that meets more usage requirements.

[0058] Furthermore, as in this embodiment Figure 9 and Figure 10As shown, the elastic portion 23 may be substantially V-shaped, and the cantilever probe structure 100 may be further omitted as shown in FIG. Figure 2 The support portion 21 shown (e.g., the portion of the cantilever probe structure 100 other than the probe section 3) may be substantially Z-shaped. Furthermore, the second feature portion 24 may extend toward the first feature portion 22, thereby shortening the distance between the first feature portion 22 and the second feature portion 24. This facilitates contact between the second feature portion 24 and the first feature portion 22, thereby enabling the cantilever probe structure 100 to form the second signal transmission path P2.

[0059] [Technical Effects of the Embodiments of the Invention]

[0060] In summary, the cantilever probe structure disclosed in the embodiment of the present invention effectively optimizes the overall force structure of the cantilever probe structure by forming the elastic portion that can change the distance between the first characteristic portion and the second characteristic portion, and greatly shortens the path length of signal transmission, thereby providing a shorter transmission path between the plate and the object to be tested (that is, both the first signal transmission path and the second signal transmission path are shorter than the transmission path of the existing cantilever probe).

[0061] Furthermore, the cantilever probe structure disclosed in the embodiment of the present invention can contact the first characteristic portion through the second characteristic portion, so that the signal between the board and the object to be tested can take a shorter path (that is, the second signal transmission path), reducing the loss caused by the path to provide better test performance.

[0062] The contents disclosed above are only preferred feasible embodiments of the present invention and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the patent scope of the present invention.

Claims

1. A cantilever probe structure, characterized in that: The cantilever probe structure comprises: a fixing section, used for welding to a plate; a travel section connected to the fixed section; wherein the travel section has a first characteristic portion, an elastic portion, and a second characteristic portion in sequence in a direction away from the fixed section, and the first characteristic portion and the second characteristic portion are disposed facing each other and spaced apart; and a probe section connected to the second characteristic portion of the travel section, and having a free end of the probe section detachably abutting against an object to be measured; wherein the cantilever probe structure defines a first signal transmission path from the free end sequentially along the probe section, through the second characteristic portion, the elastic portion, and the first characteristic portion to the fixed section; When the cantilever probe structure presses the free end against the object to be tested so that the second characteristic portion contacts the first characteristic portion through deformation of the elastic portion, the cantilever probe structure forms a second signal transmission path from the free end along the needle detection section, the second characteristic portion and the first characteristic portion to the fixed section in sequence.

2. The cantilever probe structure according to claim 1, wherein: The needle detection section includes: an abutting portion having the free end; and A cantilever portion connects the abutting portion and the second characteristic portion; wherein the abutting portion can be displaced by the cantilever portion swinging relative to the elastic portion.

3. The cantilever probe structure according to claim 2, wherein: The cantilever portion is formed by extending from the second characteristic portion toward an inclined direction away from the elastic portion and the fixing section.

4. The cantilever probe structure according to claim 2, wherein: The cantilever portion is recessed to form at least one slot along its length direction.

5. The cantilever probe structure according to claim 2, wherein: The supporting portion is in a layered shape and has a first trapezoidal section and a second trapezoidal section sequentially extending from the cantilever portion, and a top edge of the first trapezoidal section is larger than a bottom edge of the second trapezoidal section.

6. The cantilever probe structure according to claim 2, wherein: The travel section has a support portion extending obliquely from the fixed section to the first characteristic portion, and the support portion and the cantilever portion face each other; wherein the distance between the support portion and the cantilever portion gradually increases in a direction away from the elastic portion.

7. The cantilever probe structure according to claim 1, wherein: An impedance value formed by the second characteristic portion, the elastic portion, and the first characteristic portion in the first signal transmission path is greater than an impedance value formed by the second characteristic portion and the first characteristic portion in the second signal transmission path.

8. The cantilever probe structure according to claim 1, wherein: The contact between the second feature and the first feature is defined as multi-point contact.

9. The cantilever probe structure according to claim 1, wherein: The cantilever probe structure has a width in a direction parallel to the plate, and a height in a direction perpendicular to the plate. A ratio defined by dividing the width of the cantilever probe structure by the height is between 0.7 and 1.

5.

10. The cantilever probe structure according to claim 1, wherein: The cantilever probe structure is further defined as an integrally formed single-piece structure, and the elastic portion is C-shaped or U-shaped, and when the second feature portion contacts the first feature portion, the first feature portion, the elastic portion, and the second feature portion together form a closed loop.

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