Height-adjustable induction coil for ICP device and method of adjustment

Abstract

The application provides a height-adjustable induction coil for an ICP device and an adjusting method, and belongs to the technical field of semiconductor devices.The height-adjustable induction coil for the ICP device comprises an outer coil and an inner coil arranged on a machine chamber cover plate of the ICP device, and the outer coil and the inner coil are connected to the machine chamber cover plate through telescopic fixing columns respectively.The telescopic fixing column comprises a threaded cap and a threaded column.The upper end of the threaded cap is connected to the corresponding outer coil or inner coil, the lower end of the threaded cap is threadedly connected to the upper end of the threaded column, and the lower end of the threaded column is rotatably connected to the machine chamber cover plate through an adjusting mechanism.The application realizes the adjustment of the installation height of the coil in real time without stopping the machine during the working process of the ICP device, thereby quickly and accurately adjusting the current size flowing through the radio frequency matching device and the induction coil.The application greatly improves the working efficiency and ensures the performance of the ICP device, and helps to improve the quality of the processed semiconductor devices.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor equipment technology, specifically relating to a height-adjustable induction coil and adjustment method for ICP equipment. Background Technology

[0002] In existing technologies, the plasma generation process using ICP (Inductively Coupled Plasma) devices typically employs multilayer induction coils connected to a radio frequency (RF) power supply, an RF matching unit, and a magnetic field line to generate plasma in a chamber gas via electromagnetic induction. The magnitude of the current flowing through the RF matching unit and coils is closely related to the coil's mounting height. Therefore, in ICP devices using multilayer induction coils, the current flowing through the RF matching unit and coils at the same RF power output is usually controlled by varying the coil's mounting height.

[0003] However, in actual equipment manufacturing processes, it is impractical to adjust the current magnitude by changing the coil installation height in real time, because the multi-layer induction coils in existing ICP equipment have a fixed height, and their structure is as follows: Figure 8 As shown, both the outer coil 2 and the inner coil 3 are directly fixed by the existing fixing post A1, making the distance between the center point of the lowest plane of the coil and the machine chamber cover plate 1 fixed. When the equipment is working, the current in the coil is also fixed when the RF power supply outputs a certain power, and cannot be adjusted. When the process requires higher power, the RF power supply power cannot be further increased due to the limitations of the RF matching unit and the coil current, affecting the process effect. When adjustment is required, the fixing post of the coil must be processed for a long time to adjust the coil to the required height, which is inconvenient, time-consuming and labor-intensive. Summary of the Invention

[0004] Based on the problems existing in the prior art, the present invention provides a height-adjustable induction coil and adjustment method for ICP equipment. It is a multi-layer induction coil with adjustable installation height and its adjustment method, which enables convenient real-time adjustment of the current flowing through the RF matching unit and the multi-layer induction coil under a fixed power during equipment operation.

[0005] According to a first aspect of the technical solution of the present invention, the present invention provides a height-adjustable induction coil for an ICP device, comprising an outer coil and an inner coil disposed on the cover plate of the ICP device's chamber. Both the outer coil and the inner coil are connected to the cover plate of the chamber via telescopic fixing posts. The telescopic fixing post comprises a threaded cap and a threaded post. The upper end of the threaded cap is connected to the corresponding outer coil or inner coil. The outer surface of the threaded post is provided with a scale along its length. The lower end of the threaded cap is threadedly connected to the upper end of the threaded post. The lower end of the threaded post is rotatably connected to the cover plate of the chamber via an adjustment mechanism. The adjustment mechanism is a manual adjustment mechanism or an electric adjustment mechanism.

[0006] Furthermore, both the outer and inner coils are cylindrical helical. Each outer or inner coil has one end connected to the machine chamber cover and grounded via a telescopic fixing post, and the other end connected to a fixed RF matching unit via a connector. The outer and inner coils are connected to their respective RF matching units via their respective connectors.

[0007] Furthermore, both the outer and inner coils are multi-layer induction coils with multi-threaded spirals, consisting of multiple cylindrical spirals. Each cylindrical spiral is a coil, with telescopic fixing posts and connectors at both ends. The connectors are located at the center of the coil, while the telescopic fixing posts are located away from the center of the coil. Multiple telescopic fixing posts are evenly distributed along the circumference of the corresponding outer or inner coil.

[0008] Furthermore, the upper and lower adjacent layers of coils in the multi-threaded spiral shape are insulated from each other or connected by insulated connectors.

[0009] In one embodiment, the adjustment mechanism is an electric adjustment mechanism, including a motor; a receiving through hole is provided on the machine chamber cover plate, and the lower end of the threaded column passes through the receiving through hole and is connected to the motor; it also includes a current sensor connected to an RF matching unit; the motor is connected to a control unit for controlling its operation; the control unit has a reading module for reading the current sensor signal, a data processing module for performing judgment and analysis, and an execution module for controlling the start and stop of the motor and the direction of rotation.

[0010] In another embodiment, the adjustment mechanism is a manual adjustment mechanism, which includes a positioning screw; the lower end of the threaded column is provided with a positioning screw hole, and the machine chamber cover is provided with a mounting through hole. The lower end of the threaded column is in close contact with the machine chamber cover, and the positioning screw passes through the mounting through hole on the machine chamber cover from bottom to top and is threadedly connected to the positioning screw hole.

[0011] Furthermore, a gasket is provided between the positioning screw and the machine chamber cover.

[0012] According to a second aspect of the present invention, the present invention also provides a method for adjusting a height-adjustable induction coil for an ICP device, implemented using the aforementioned height-adjustable induction coil for an ICP device with an electric adjustment mechanism, the steps of which include:

[0013] Step S1: Based on the experiment, a table showing the correspondence between current values ​​and coil height is generated in advance and stored in the data processing module of the control unit; the target current value and the allowable current tolerance value are set in advance in the data processing module of the control unit.

[0014] Step S2: The reading module of the control unit obtains the current current value through the current sensor;

[0015] Step S3: The data processing module of the control unit calculates the difference between the current value and the target current value, and determines whether it is less than or equal to the current tolerance value; if so, no operation is performed.

[0016] In step S4, if step S3 determines no, the data processing module of the control unit obtains the required adjustment height according to the correspondence table between current value and coil height, and sends an instruction to the execution module of the control unit; the execution module performs start-stop control and rotation direction control of the motor according to the instruction.

[0017] Preferably, the method further includes step S5, after adjusting the telescopic fixing column after step S4 is completed, and then returning to step S2.

[0018] Compared with the prior art, the beneficial technical effects of the height-adjustable induction coil and adjustment method for ICP equipment of the present invention are as follows:

[0019] 1. The height-adjustable induction coil for ICP equipment of the present invention provides a solution for adjusting the coil mounting height without re-processing the coil fixing posts. This allows for real-time adjustment of the coil mounting height during ICP equipment operation without shutdown, thereby quickly and accurately regulating the current flowing through the RF matching unit and the induction coil. Compared to existing technologies that require time-consuming re-processing of the coil fixing posts, the present invention significantly improves work efficiency, reducing manual adjustment workload and enabling automatic adjustment. This ensures that the performance of the ICP equipment meets process requirements and helps improve the quality of the processed semiconductor devices.

[0020] 2. The height-adjustable induction coil adjustment method of this invention for ICP equipment is highly practical, with a simple structure, low cost, and easy control. The solution of this invention only requires adding a telescopic fixing column to the traditional structure to achieve the adjustment function. Compared with the prior art, which requires re-processing the coil fixing column, it has the advantages of simple structure and low cost. The prior art requires disassembling and assembling the chamber cover plate for each adjustment, while the solution of this invention allows for convenient manual or automatic adjustment of the coil height after installation without disassembly, facilitating control.

[0021] 3. The height-adjustable induction coil solution of the present invention for ICP equipment allows for simple and quick adjustment of the induction coil height. During the entire adjustment process, the height can be kept consistent by using the scale on the telescopic fixed column, and the induction coil can be tilted at the required angle to adjust and improve the uniformity of plasma concentration. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural schematic diagram of an embodiment of the height-adjustable induction coil for ICP equipment according to the present invention.

[0023] Figure 2 This is a schematic diagram of the structure of a single coil portion in another embodiment of the height-adjustable induction coil for ICP equipment according to the present invention.

[0024] Figure 3 yes Figure 2 A schematic diagram of the structure of the telescopic fixed column section.

[0025] Figure 4 This is a structural block diagram of another embodiment of the present invention.

[0026] Figure 5 yes Figure 4 A schematic diagram of the structure of a single coil section in the embodiment shown.

[0027] Figure 6 Is adopted Figure 4 The illustrated embodiment is a flowchart of a method for adjustment.

[0028] Figure 7 Is adopted Figure 4 A flowchart illustrating another method for adjustment in the illustrated embodiment.

[0029] Figure 8 It is an induction coil used in ICP equipment in the prior art.

[0030] Explanation of reference numerals in the attached figures:

[0031] 1. Machine chamber cover;

[0032] 2. Outer coil;

[0033] 3. Inner coil;

[0034] 4. Telescopic fixed column;

[0035] 5. Threaded cap;

[0036] 6. Threaded column;

[0037] 7. Scale;

[0038] 8. Connector;

[0039] 9. Positioning screws;

[0040] 10. Positioning screw holes;

[0041] 11. Gaskets;

[0042] 12. Electric motor;

[0043] 13. Radio frequency matching unit;

[0044] 14. Current sensor;

[0045] 15. Control unit;

[0046] 16. Radio frequency power supply;

[0047] 17. Couplings;

[0048] A1. Existing fixed columns. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0050] It should also be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings. Unless otherwise specified, the embodiments and features described herein can be combined with each other.

[0051] It should be noted that the concepts of "first" and "second" mentioned in this invention are only used to distinguish different devices, modules or units, and are not used to limit the order of functions performed by these devices, modules or units or their interdependencies.

[0052] It should be noted that the terms "a" and "a plurality of" used in this invention are illustrative rather than restrictive. Those skilled in the art should understand that, unless otherwise expressly indicated in the context, they should be understood as "one or more".

[0053] This invention provides a height-adjustable induction coil and adjustment method for ICP equipment. Belonging to the field of semiconductor equipment technology, the height-adjustable induction coil for ICP equipment includes an outer coil and an inner coil disposed on the chamber cover of the ICP equipment. Both the outer and inner coils are connected to the chamber cover via telescopic fixing posts. Each telescopic fixing post includes a threaded cap and a threaded post. The upper end of the threaded cap is connected to the corresponding outer or inner coil, and the lower end of the threaded cap is threaded to the upper end of the threaded post. The lower end of the threaded post is rotatably connected to the chamber cover via an adjustment mechanism. This invention provides a method for adjusting the coil installation height without reprocessing the coil fixing posts. The coil installation height can be adjusted in real-time without stopping the ICP equipment during operation, thereby quickly and accurately adjusting the current flowing through the RF matching unit and the induction coil. Furthermore, it enables automatic adjustment of the coil height, reducing manual adjustment workload, significantly improving work efficiency, ensuring ICP equipment performance, and contributing to improving the quality of the processed semiconductor devices.

[0054] Please see Figure 1 , Figure 2 This invention discloses a height-adjustable induction coil for an ICP (Internet Content Provider) device, comprising an outer coil 2 and an inner coil 3 disposed on a chamber cover 1 of the ICP device. Both the outer coil 2 and the inner coil 3 are connected to the chamber cover 1 via telescopic fixing posts 4. The telescopic fixing posts 4 are made of a material with low resistivity, such as copper, and include a threaded cap 5 and a threaded post 6. The upper end of the threaded cap 5 is connected to the corresponding outer coil 2 or inner coil 3 (e.g., by welding or threaded connection), and the lower end of the threaded cap 5 is threaded to the upper end of the threaded post 6. The lower end of the threaded post 6 is rotatably connected to the chamber cover 1 via an adjustment mechanism. The connection resistance formed by the threaded cap 5 and the threaded post 6 should be less than 0.1Ω. It should be noted that... Figure 2 The inner coil 3 is used as an example for demonstration. The outer coil 2 has a basically the same structure, except that the outer coil 2 has a larger diameter than the inner coil 3 and is wrapped around the inner coil 3.

[0055] Preferably, such as Figure 3 As shown, a scale 7 is provided on the outer surface of the threaded post 6 along its length, which makes it easy to accurately know the height of the telescopic fixing post 4 during manual adjustment and observation; furthermore, the scale 7 can be incremented from top to bottom, so as to make it easy to see the position of the threaded cap 5 moving up and down; the scale 7 can also be incremented from bottom to top, with the initial scale value calculated based on the length of the threaded cap 5 and the threaded post 6, and the position of the initial scale value is, for example, slightly lower than the lowest point that the bottom of the threaded cap 5 can reach, so as to directly see the total height of the telescopic fixing post 4.

[0056] More specifically, both the outer coil 2 and the inner coil 3 are cylindrical helical in shape. One end of each coil is grounded by connecting to the machine chamber cover 1 via a telescopic fixing post 4, and the other end is connected to a fixedly installed radio frequency matching unit via a connector 8. For example... Figure 2 In the illustrated embodiment, connector 8 is a cylindrical connector. The outer coil 2 and the inner coil 3 are each connected to their respective RF matching devices through the central cylindrical connector. The cylindrical connector ends of the outer coil 2 and the inner coil 3 can be considered to be spaced apart and not connected, while the other ends (the ends welded to the telescopic fixing posts 4) are both grounded. Since the RF matching device in the ICP equipment is fixedly installed, and the positional relationship between the RF matching device and the machine chamber cover 1 is also fixed, the positions of the outer coil 2 and the inner coil 3 connected to the RF matching device are also basically fixed and cannot be displaced or rotated. They can only be raised and lowered by several telescopic fixing posts 4 or tilted due to the uneven height of the telescopic fixing posts 4.

[0057] like Figure 1 As shown, the outer coil 2 and the inner coil 3 are preferably multi-layer induction coils, both of which are multi-threaded, with each cylindrical helix representing a coil (e.g., ...). Figure 2 As shown in the diagram, telescopic fixing posts 4 and connectors 8 are respectively provided at both ends. Connectors 8 are located at the center of the coil, while the telescopic fixing posts 4 are located away from the center of the coil (e.g., on the outside of the coil), which facilitates layout and installation, reduces the tilt caused by adjusting a single telescopic fixing post 4, improves adjustment accuracy, and ensures that the coil remains nearly horizontal even when the lengths of the telescopic fixing posts 4 have small differences). Preferably, multiple telescopic fixing posts 4 are evenly distributed circumferentially along the corresponding outer coil 2 or inner coil 3 for better adjustment. For example... Figure 2 The diagram shows a coil with two layers (turns). A second identical coil is taken, rotated 180 degrees along its central axis, and then interlocked with the first coil (the inner ends are connected to the same connector 8), thus forming... Figure 1 The inner coil 3 shown has four layers and two telescopic fixing posts 4. Depending on the needs, a "three-layer outer layer with four-layer inner layer" structure can be selected. Figure 1 (As shown) There are many different combinations such as the “outer 4 layers nested within an inner 4 layers” structure.

[0058] Furthermore, the upper and lower adjacent layers of coils in the multi-threaded spiral shape are insulated from each other or connected by insulated connectors, thereby fixing the position of the inner coil 3 and / or the outer coil 2 multi-layer coils and forming a whole. In this way, for example, if the two telescopic fixing posts 4 on both sides of the inner coil 3 are one high and one low, the inner coil 3 will tilt to the lower side, thereby adjusting and improving the uniformity of plasma concentration.

[0059] like Figure 2 , Figure 3 As shown, in one specific embodiment, the adjustment mechanism is a manual adjustment mechanism, including a positioning screw 9. A positioning screw hole 10 is provided at the lower end of the threaded post 6, and a mounting through hole is provided on the machine chamber cover plate 1. The lower end area of ​​the threaded post 6 is larger than the mounting through hole, and the lower end of the threaded post 6 is tightly attached to the machine chamber cover plate 1. The positioning screw 9 passes through the mounting through hole on the machine chamber cover plate 1 from bottom to top and is threadedly connected to the positioning screw hole 10. During adjustment, slightly loosening the positioning screw hole 10 allows the threaded post 6 to be rotated for height adjustment. After adjusting to the desired height, the positioning screw hole 10 is tightened to fix it. Preferably, a washer 11 is provided between the positioning screw 9 and the machine chamber cover plate 1 to make the tightening and fixing more secure.

[0060] like Figure 4 , Figure 5 As shown, in another preferred embodiment, the adjustment mechanism is an electric adjustment mechanism, including a motor 12. A receiving through hole is provided on the machine chamber cover 1, which is slightly larger than or matches the lower end of the threaded post 6. The lower end of the threaded post 6 passes through the receiving through hole and is coaxially connected to the output shaft of the motor 12 via a coupling 17. A current sensor 14 connected to the radio frequency matching unit 13 is also included. Specifically, the radio frequency power supply 16, the radio frequency matching unit 13, the current sensor 14, and the induction coil are connected in sequence, that is, a current sensor 14 is added between the radio frequency matching unit 13 and the connector 8. The motor 12 is connected to a control unit 15 for controlling its operation. The control unit 15 has a reading module for reading the signal from the current sensor 14, a data processing module for judgment and analysis, and an execution module for controlling the start, stop, and rotation direction of the motor 12.

[0061] After the RF power supply 16 outputs power, the RF current enters the coil through the RF matching unit 13. The current sensor 14 measures the coil current in real time and feeds the current signal back to the control unit 15. The control unit 15 controls the rotation of the threaded column 6 by controlling the motor 12 connected to the telescopic fixing column 4, thereby adjusting the coil height. In practice, it was found that when the coil current is low, the telescopic fixing column 4 needs to be adjusted to a shorter length; conversely, when the coil current is high, the telescopic fixing column 4 needs to be adjusted to a longer length. The relationship between coil current and coil height can be obtained through multiple experiments, and a table showing the correspondence between coil current and coil height is created based on the experimental results.

[0062] An adjustment method of the above-described embodiment with an electric adjustment mechanism is as follows: Figure 6 As shown, the steps include:

[0063] Step S1, Preliminary preparation: Based on the experiment, a table showing the correspondence between current value and coil height is generated and stored in the data processing module of control unit 15; the target current value I0 and the current tolerance value ΔI are set in the data processing module of control unit 15 in advance.

[0064] Step S2, Read current: The reading module of the control unit 15 obtains the current value I1 through the current sensor 14;

[0065] Step S3, comparison and judgment: The data processing module of the control unit 15 calculates the difference (absolute value) |I1-I0| between the current current value I1 and the target current value I0, and determines whether it is less than or equal to the current tolerance value ΔI; if it is, no operation is performed.

[0066] Step S4, Adjustment: If step S3 determines no, the data processing module of the control unit 15 obtains the required height adjustment amount according to the correspondence table between current value and coil height, and sends an instruction to the execution module of the control unit 15; the execution module controls the start, stop and rotation direction of the motor 12 according to the instruction, so that the motor 12 rotates forward or reverses at a certain speed for a certain period of time, thereby lengthening or shortening the distance between the two ends of the telescopic fixed column 4, and adjusting the height of the corresponding point of the coil to the correct position.

[0067] Another preferred adjustment method includes step S5 after the above steps to verify the current: after step S4 completes the adjustment of the telescopic fixing column 4, return to step S2 and continue from step S2. If the current does not meet the requirements, readjust until it meets the requirements.

[0068] To facilitate understanding, the following data is used as an example: Under the condition of 1000W forward power, the current value (current current value I1) at the initial position of the coil is 30A. The target current value I0 is set to 28A according to the process requirements, and the current tolerance value ΔI is set to 0.5A based on experience. The processing method of the control module 15 is as follows: According to the correspondence table between current value and coil height, the height value corresponding to the current current value and the height value corresponding to the target current value are obtained, the difference between the two is calculated, and the height to be adjusted is obtained. According to the speed of motor 12 and the thread technical parameters on the telescopic fixing column 4, the length of extension or retraction of the telescopic fixing column 4 per unit time after motor 12 is turned on can be calculated (or directly through experiments). Then, the working time required for motor 12 is calculated, and its start is controlled. After reaching the required working position, it is controlled to close. In this way, the telescopic fixing column 4 is adjusted to increase by 8mm, so that the current value reaches the target value.

[0069] It should be noted that the main improvement of this invention lies in replacing the existing non-adjustable fixing post with a telescopic fixing post 4 that can be adjusted manually or electrically (automatically). Other parts, such as the induction coil, can use existing technologies or other technologies that can achieve the same function. For example, the coil material can be bare copper tubing, copper tubing with an outer plating (e.g., gold, silver), or pure gold, silver, etc. The solution of this invention can be applied to various semiconductor devices involving ICP 200mm, 300mm, etc.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A height-adjustable induction coil for an ICP (Internet Content Provider) device, comprising an outer coil and an inner coil disposed on the cover plate of the ICP device's machine chamber, characterized in that, Both the outer and inner coils are connected to the machine chamber cover via telescopic fixing columns; The telescopic fixed column includes a threaded cap and a threaded column; the upper end of the threaded cap is connected to the corresponding outer or inner coil, and the outer surface of the threaded column is provided with a scale along its length. The lower end of the threaded cap is threadedly connected to the upper end of the threaded column, and the lower end of the threaded column is rotatably connected to the machine chamber cover through an adjustment mechanism. The adjustment mechanism is a manual adjustment mechanism or an electric adjustment mechanism. Both the outer and inner coils are cylindrical helical. Each outer or inner coil has one end connected to the machine chamber cover and grounded via a telescopic fixing post, and the other end connected to a fixed RF matching unit via a connector. The outer and inner coils are connected to their respective RF matching units via their respective connectors. Both the outer and inner coils are multi-layer induction coils with multi-wire spirals, consisting of multiple cylindrical spirals. Each cylindrical spiral is a coil, with telescopic fixing posts and connectors at both ends. The connectors are located at the center of the coil, while the telescopic fixing posts are located away from the center of the coil. Multiple telescopic fixing posts are evenly distributed along the circumference of the corresponding outer or inner coil.

2. The height-adjustable induction coil for ICP equipment as described in claim 1, characterized in that, The upper and lower adjacent layers of multi-threaded coils are insulated from each other or connected by insulated connectors.

3. The height-adjustable induction coil for ICP equipment as described in any one of claims 1-2, characterized in that, The adjustment mechanism is an electric adjustment mechanism, including a motor; a receiving through hole is opened on the machine chamber cover plate, and the lower end of the threaded column passes through the receiving through hole and is connected to the motor; it also includes a current sensor connected to the radio frequency matching unit; the motor is connected to a control unit for controlling its operation; the control unit has a reading module for reading the current sensor signal, a data processing module for performing judgment and analysis, and an execution module for controlling the start, stop and rotation direction of the motor.

4. The height-adjustable induction coil for ICP equipment as described in any one of claims 1-2, characterized in that, The adjustment mechanism is a manual adjustment mechanism, which includes a positioning screw; the lower end of the threaded column has a positioning screw hole, and the machine chamber cover plate has an installation through hole. The lower end of the threaded column is in close contact with the machine chamber cover plate, and the positioning screw passes through the installation through hole on the machine chamber cover plate from bottom to top and is threadedly connected to the positioning screw hole.

5. The height-adjustable induction coil for ICP equipment as described in claim 4, characterized in that, A gasket is placed between the positioning screw and the machine chamber cover.

6. A method for adjusting a height-adjustable induction coil for an ICP device, characterized in that, Implemented using the height-adjustable induction coil for an ICP device as described in claim 3, the adjustment method for the height-adjustable induction coil for an ICP device includes the following steps: Step S1: Based on the experiment, a table showing the correspondence between current values ​​and coil height is generated in advance and stored in the data processing module of the control unit; the target current value and the allowable current tolerance value are set in advance in the data processing module of the control unit. Step S2: The reading module of the control unit obtains the current current value through the current sensor; Step S3: The data processing module of the control unit calculates the difference between the current value and the target current value, and determines whether it is less than or equal to the current tolerance value; if so, no operation is performed. In step S4, if step S3 determines no, the data processing module of the control unit obtains the required adjustment height according to the correspondence table between current value and coil height, and sends an instruction to the execution module of the control unit; the execution module controls the motor to start / stop and rotate in the correct direction according to the instruction.

7. The method for adjusting a height-adjustable induction coil for an ICP device as described in claim 6, characterized in that, The method for adjusting the height-adjustable induction coil for ICP equipment further includes step S5 after step S4. After adjusting the telescopic fixing column after step S4 is completed, the process returns to step S2.

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