Ultra-long steel strip grating femtosecond laser manufacturing system and manufacturing method with coordinated control of time and space parameters

Abstract

The present invention discloses a femtosecond laser manufacturing system and manufacturing method of ultra-long steel strip gratings with coordinated control of time and space parameters. The traction roller acts as an active roller and rotates at a spatial angular velocity ω1, driving the steel strip substrate to move horizontally at a uniform speed from the unwinding roller to output; the linear femtosecond laser unit performs local engraving on the steel strip substrate to form a grating scale under the regulation of the electronic shutter time domain switching frequency f; the cleaning unit cleans the grating scale; the winding roller completes the roll storage of the grating scale; the monitoring unit is used for real-time monitoring of the grating manufacturing quality and the outer diameter of the winding; the auxiliary roller system is used to ensure the smooth transmission of the manufacturing system. The present invention realizes the continuous uniform horizontal movement of the ultra-long steel strip substrate with roller system transmission, realizes the ultra-long steel strip grating manufacturing with a linear femtosecond laser controlled by an electronic shutter, realizes the regulation of the scale and accuracy of the steel strip grating structure through the coordinated control of the spatial parameter ω1 and the time domain parameter f, and provides a new technology for the high-precision and efficient manufacturing of ultra-long steel strip gratings.

Description

Technical Field

[0001] The present invention belongs to the field of intelligent manufacturing, and in particular provides an ultra-long steel strip grating laser manufacturing system and a manufacturing method for coordinated control of time and space parameters. Background Art

[0002] Precision grating displacement sensors, as the "eyes" of ultra-precision positioning equipment, are one of the indispensable key sensing components for precision CNC machine tools, electronic manufacturing equipment, three-coordinate measuring machines, etc., and have gradually expanded their application to the field of lithography machines.

[0003] Compared with transmission grating displacement sensors, precision reflection grating displacement sensors have no return error and have higher displacement measurement accuracy. The steel belt grating scale, as the measurement benchmark of precision reflection grating displacement sensors, determines the measurement accuracy and range due to its manufacturing accuracy and manufacturing format. Therefore, the high-precision, high-efficiency, and ultra-long continuous manufacturing of steel belt gratings has become one of the key technologies of precision reflection grating displacement sensors.

[0004] Typical manufacturing processes for steel strip gratings include: 1) Photolithography exposure process, which uses a template as a mask to expose the substrate to form a grating structure. It is the most widely used grating manufacturing process. The grating manufacturing accuracy depends on the template accuracy. When manufacturing long gratings, multiple splicing is required, and there are splicing errors; 2) Holographic exposure process, which uses laser interference to expose the substrate to form a grating structure. The grating pitch accuracy depends on the adjustment accuracy of the interference light path, and the grating manufacturing format is limited by the laser beam radius; 3) Roll-to-roll nanoimprint replication process, which can realize the manufacture of ultra-long gratings in principle, but the manufacturing process is difficult. The accuracy is limited by the manufacturing error and wear of the roller imprinting mold, as well as the slip error of the roller imprinting process; 4) Mechanical micro-scribing process, using diamond tool micro-scribing to achieve grating manufacturing, tool stepping accuracy, tool wear, etc. restrict the grating manufacturing accuracy, and the mechanical scribing efficiency is low; 5) Femtosecond laser direct writing process, using "light knife" instead of "steel knife", using focused laser to scratch the substrate, there is no tool wear problem, and the grating edge is smooth and sharp, but it still faces the problem of manufacturing accuracy being limited by the stepping accuracy of the "light knife" and low efficiency in processing ultra-long gratings.

[0005] Chinese invention patent CN107322170A discloses an ultra-long metal belt grating ruler engraving system using laser interference feedback. The metal belt is transmitted to the laser etching area. The feedback of the laser etching area is composed of a laser interferometer. At this time, there is a repeatedly moving mechanism, which can drive the metal belt to move. Every time it moves a certain distance, the laser is triggered once. Each triggering will etch a line on the protective film of the metal belt. After the mechanism moves a certain distance, the metal belt is locked by the locking device, and the mechanism returns to the initial point by itself and starts engraving again. The ultra-long metal belt grating ruler engraving system adopts a step-by-step movement method for engraving. The engraving accuracy is limited by the accuracy stability of the laser interferometer under long-term operation and the step control accuracy. In addition, the step-by-step movement efficiency is low, making it difficult to achieve mass production.

[0006] Therefore, for the manufacture of ultra-long steel strip gratings, the current manufacturing process faces the problem of contradiction between manufacturing accuracy and manufacturing format and manufacturing efficiency to a certain extent. Summary of the invention

[0007] In order to overcome the shortcomings of the above-mentioned prior art, the present invention provides a femtosecond laser manufacturing system and manufacturing method for ultra-long steel strip gratings with coordinated control of time and space parameters. Compared with the traditional laser direct writing process which takes a quasi-static start and stop substrate as the processing object, the present invention takes a uniformly horizontally moving substrate in the spatial domain as the processing object, and a femtosecond laser regulated by a time domain switch as the energy beam, and realizes high-precision and efficient manufacturing of ultra-long steel strip gratings through the coordinated control of spatial and time domain parameters.

[0008] In order to achieve the above object, the technical solution adopted by the present invention is:

[0009] A femtosecond laser manufacturing system for ultra-long steel strip gratings with coordinated control of time and space parameters, the manufacturing system comprising an unwinding roller, a traction roller and a winding roller, a linear femtosecond laser unit and an electronic shutter are arranged between the unwinding roller and the traction roller, the linear femtosecond laser unit is arranged directly above the electronic shutter, a cleaning unit is arranged between the traction roller and the winding roller, a first detection unit is arranged between the cleaning unit and the winding roller, a second detection unit is arranged directly above the winding roller, and a plurality of auxiliary roller systems are arranged along the conveying direction of the steel strip, all of which are driven rollers, which can realize the horizontal movement of the steel strip from under the electronic shutter, and can also realize the smooth entry of the steel strip into the cleaning unit for cleaning.

[0010] The traction roller is an active roller, which rotates at a spatial angular velocity ω1, and the winding roller is an active roller, whose spatial angular velocity is ω2. The outer cylindrical surface of the traction roller has a magnetic or negative pressure structure, and the horizontal moving speed of the steel strip when passing under the electronic shutter is V=R1ω1, where R1 is the radius of the traction roller.

[0011] The linear femtosecond laser unit is composed of a femtosecond laser, a galvanometer, and a focusing lens group, and outputs a linear femtosecond laser spot. The time domain switching frequency of the electronic shutter is f.

[0012] Furthermore, the length of the linear femtosecond laser spot is 2-10 mm, and the width of the spot is 0.5-200 μm. The steel strip is a stainless steel strip with certain flexibility. Preferably, the thickness of the stainless steel strip is 0.1-1.5 mm, the width is 3-15 mm, and the length is 1-500 m.

[0013] Furthermore, the winding roller is composed of a metal rigid component and a plastic elastic component; the inner ring of the metal rigid component is manufactured with rigid inner teeth; the elastic arm of the plastic elastic component adopts a hollow structure, and its end is manufactured with elastic outer teeth meshing with the rigid inner teeth. The metal rigid component and the plastic elastic component cooperate with each other to achieve overload protection. When (R2+Δr)ω2>R1ω1, the winding roller is overloaded and idle to ensure that the rotation of the winding roller does not affect the speed stability of the traction roller, wherein R2 is the radius of the winding roller, ω2 is the rotational angular velocity of the winding roller, and Δr is the increment of the equivalent radius of the winding roller introduced in the steel strip grating winding process.

[0014] Furthermore, the first detection unit is an optical microscope, and the second detection unit is a laser triangulation displacement sensor. The cleaning agent used by the cleaning unit is anhydrous ethanol.

[0015] A manufacturing process of an ultra-long steel strip grating femtosecond laser manufacturing system using the spatiotemporal parameter coordinated control comprises the following steps:

[0016] S1. Steel strip substrate loading: The steel strip is rolled into the unwinding roller, and the starting end of the steel strip is pulled through the traction roller, cleaning module, winding roller, and auxiliary roller system to complete the pre-tensioning of the steel strip and wait for processing;

[0017] S2. System parameter settings:

[0018] S2-1. Set the spatial angular velocity ω1 and f. The geometric structure characteristics of the steel belt grating scale are controlled by the spatial angular velocity ω1 of the traction roller and the time domain parameter f of the electronic shutter. The period scale of the steel belt grating is P:

[0019] P=V / f=R1ω1 / f (1)

[0020] Wherein, R1 is the radius of the traction roller;

[0021] The radius R1 of the traction roller is a known quantity, and the structural scale P of the steel belt grating is taken as the target value. The spatial angular velocity ω1 of the traction roller and the time domain switching frequency f of the electronic shutter are set to satisfy the constraint condition P=R1ω1 / f;

[0022] S2-2. Set the spatial angular velocity ω2. The radius R2 of the winding roller is a known quantity, and the spatial angular velocity ω2 is set to satisfy the constraint condition R2ω2=(0.7~0.8)R1ω1;

[0023] S3. The steel strip moves at a uniform speed: The traction roller rotates at a spatial angular velocity ω1 driven by the motor, driving the steel strip to be continuously output at a uniform speed from the unwinding roller, passing through the auxiliary roller system, and moving horizontally from under the electronic shutter;

[0024] S4. Femtosecond laser processing grating: The linear femtosecond laser unit performs local processing on the uniformly moving horizontal steel strip under the control of the electronic shutter time domain switching frequency f to form a steel strip grating ruler;

[0025] S5. Cleaning and testing of steel belt grating: The cleaning unit cleans the manufactured steel belt grating ruler, and the first testing unit performs online quality testing on the cleaned steel belt grating ruler;

[0026] S6. Steel belt grating winding and storage: Under the action of the winding roller, the steel belt grating scale is gradually wound on the winding roller, and the second detection unit monitors the equivalent radius increment Δr of the winding roller in real time. When Δr reaches the threshold, the winding roller implements overload protection, and the staff cuts off the steel belt grating, removes the current winding roller outer ring and the steel belt grating roll, and completes the roll storage of the current steel belt grating; replaces the next winding roller outer ring, and continues to roll and store the steel belt grating;

[0027] S7. Continuous loading and processing of steel strip: After the processing of the current steel strip substrate wound on the unwinding roller is completed, the next roll of steel strip is replaced, and the steps of S1 to S6 are repeated to start the grating processing of the next roll of steel strip.

[0028] Furthermore, a speed reducer with a large reduction ratio is connected to the traction roller.

[0029] The large reduction ratio reducer is composed of precision gears and a reduction transmission structure, and the reduction ratio is K; the precision gear is a driving gear, and the rotational airspace angular velocity under the drive of the motor is ω0.

[0030] The traction roller is a driven wheel, and the spatial angular velocity of the driven wheel rotation is ω1=Kω0, then the uniform horizontal moving speed of the super-long steel belt grating is V=R1ω1=KR1ω0, and R1 is the radius of the traction roller.

[0031] A manufacturing process of an ultra-long steel strip grating femtosecond laser manufacturing system using the spatiotemporal parameter coordinated control comprises the following steps:

[0032] S1. Steel strip substrate loading: The steel strip is rolled into the unwinding roller, and the starting end of the steel strip is pulled through the traction roller, cleaning module, winding roller, and auxiliary roller system to complete the pre-tensioning of the steel strip and wait for processing;

[0033] S2. System parameter settings:

[0034] S2-1. Set the spatial angular velocity ω0 and f. The geometric structure characteristics of the steel belt grating are controlled by the spatial angular velocity ω0 of the precision gear and the time domain parameter f of the electronic shutter. The period scale of the steel belt grating is P:

[0035] P=V / f=KR1ω0 / f (2)

[0036] Wherein, R1 is the radius of the traction roller;

[0037] The radius R1 of the traction roller is a known quantity, and the structural scale P of the steel belt grating is taken as the target value. The spatial angular velocity ω0 of the precision gear and the time domain switching frequency f of the electronic shutter are set to satisfy the constraint condition P = KR1ω0 / f;

[0038] S2-2. Set the spatial angular velocity ω2. The radius R2 of the winding roller is a known quantity, and its spatial angular velocity ω2 is set to satisfy the constraint condition R2ω2=(0.7~0.8)R1ω1;

[0039] S3. The steel strip moves at a uniform speed: The traction roller rotates at a spatial angular velocity ω1 driven by the motor, driving the steel strip to be continuously output at a uniform speed from the unwinding roller, passing through the auxiliary roller system, and moving horizontally from under the electronic shutter;

[0040] S4. Femtosecond laser processing grating: The linear femtosecond laser unit performs local processing on the uniformly moving horizontal steel strip under the control of the electronic shutter time domain switching frequency f to form a steel strip grating ruler;

[0041] S5. Cleaning and testing of steel belt grating: The cleaning unit cleans the manufactured steel belt grating ruler, and the first testing unit performs online quality testing on the cleaned steel belt grating ruler;

[0042] S6. Steel belt grating winding and storage: Under the action of the winding roller, the steel belt grating scale is gradually wound on the winding roller, and the second detection unit monitors the equivalent radius increment Δr of the winding roller in real time. When Δr reaches the threshold, the winding roller implements overload protection, and the staff cuts off the steel belt grating, removes the current winding roller outer ring and the steel belt grating roll, and completes the roll storage of the current steel belt grating; replaces the next winding roller outer ring, and continues to roll and store the steel belt grating;

[0043] S7. Continuous loading and processing of steel strip: After the processing of the current steel strip substrate wound on the unwinding roller is completed, the next roll of steel strip is replaced, and the steps of S1 to S6 are repeated to start the grating processing of the next roll of steel strip.

[0044] Compared with the prior art, the present invention has the following beneficial effects:

[0045] (1) The ultra-long steel strip grating laser manufacturing system with coordinated control of time and space parameters proposed in the present invention breaks through the quasi-static step-by-step scratching processing mode, uses the ultra-long steel strip with uniform horizontal movement in the spatial domain realized by roller transmission as the processing object, and uses the femtosecond laser controlled by the time domain switch as the energy beam, thereby realizing the continuous and efficient manufacturing of the ultra-long steel strip grating.

[0046] (2) The ultra-long steel strip grating laser manufacturing system with coordinated control of time and space parameters proposed in the present invention realizes the regulation of the scale and precision of the steel strip grating structure through the coordinated control of the spatial angular velocity ω1 and the time domain parameter f, thereby achieving high-precision and controllable manufacturing of ultra-long steel strip grating.

[0047] (3) The steel belt moves at a constant speed by continuous movement. Compared with the existing step-by-step movement method, the grating processing accuracy is higher and the efficiency is also higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] Figure 1 This is a schematic diagram of the working principle of the system of Embodiment 1 of the present invention;

[0049] Figure 2 This is a schematic diagram of the system structure of Embodiment 1 of the present invention;

[0050] Figure 3 This is a schematic diagram of the structure of the traction roller according to Embodiment 1 of the present invention;

[0051] Figure 4 This is a schematic structural diagram of a linear femtosecond laser module according to Embodiment 1 of the present invention;

[0052] Figure 5 This is a schematic diagram of the winding roller overload protection structure of Example 1 of the present invention;

[0053] Figure 6 This is a schematic diagram of the system structure of Example 2 of the present invention. DETAILED DESCRIPTION

[0054] In order to make the purpose, technical scheme and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0055] Example 1

[0056] refer to Figure 1-5: A femtosecond laser manufacturing system for ultra-long steel strip grating with coordinated control of time and space parameters, the manufacturing system comprises an unwinding roller 2, a traction roller 1 and a winding roller 6, the steel strip is unwound from the unwinding roller 2, passes through the traction roller 1 in sequence, and is finally wound on the winding roller 6. A linear femtosecond laser unit 3 and an electronic shutter 4 are arranged between the unwinding roller 2 and the traction roller 1, the linear femtosecond laser unit 3 is arranged directly above the electronic shutter 4, a cleaning unit 5 is arranged between the traction roller 1 and the winding roller 6, the cleaning unit 5 is used to clean the steel strip grating scale; a first detection unit 7-1 is arranged between the cleaning unit 5 and the winding roller 6, a second detection unit 7-2 is arranged directly above the winding roller 6, and a plurality of auxiliary roller systems 8-i are arranged along the conveying direction of the steel strip, all of which are driven rollers, which can realize the horizontal movement of the steel strip from below the electronic shutter 4, and can also realize the smooth entry of the steel strip into the cleaning unit 5 for cleaning. Among them, the first detection unit 7-1 is used for online detection of grating manufacturing quality, and the second detection unit 7-2 is used for real-time monitoring of the outer diameter of the winding;

[0057] The traction roller 1 is an active roller, which rotates at a spatial angular velocity ω1, driving the steel strip to be output from the unwinding roller 2 at a uniform speed; the winding roller 6 is an active roller, whose spatial angular velocity is ω2, and is used to realize the roll storage of the steel strip grating ruler;

[0058] Preferably, the outer cylindrical surface of the traction roller 1 has a magnetic or negative pressure structure, so that the steel belt and the transmission cylindrical surface of the traction roller 1 are stably fitted, preventing the risk of slippage between the steel belt substrate and the traction roller 1, and realizing continuous uniform horizontal movement of the ultra-long steel belt substrate. When the steel belt passes under the electronic shutter 4, the horizontal movement speed V=R1ω1, where R1 is the radius of the traction roller 1.

[0059] The linear femtosecond laser unit 3 is composed of a femtosecond laser 3-1, a galvanometer 3-2, and a focusing lens group 3-3; the point-shaped light spot output by the femtosecond laser 3-1 is irradiated onto the surface of the galvanometer 3-2. When the galvanometer 3-2 is stationary, the laser is reflected to form a point-shaped light spot. When the galvanometer 3-2 rotates at high speed, the reflection surface changes at high speed, and the point-shaped laser light spot becomes a linear light spot. The focusing lens group 3-3 further focuses the linear light spot to form a linear femtosecond laser light spot with a very small width. It outputs a linear femtosecond laser light spot.

[0060] Preferably, the length of the linear femtosecond laser spot is 2-10 mm, and the width of the spot is 0.5-200 μm.

[0061] The time domain switching frequency of the electronic shutter 4 is f, and the frequency f can be programmed, so as to control the linear femtosecond laser spot to selectively localize the uniformly moving horizontal steel belt to form a steel belt grating ruler.

[0062] Preferably, the cleaning agent used in the cleaning unit 5 is anhydrous ethanol.

[0063] Preferably, the winding roller 6 is composed of a metal rigid component 6-1 and a plastic elastic component 6-2; the inner ring of the metal rigid component 6-1 is manufactured with rigid internal teeth; the elastic arm of the plastic elastic component 6-2 adopts a hollow structure, and its end is manufactured with elastic external teeth that mesh with the rigid internal teeth. The metal rigid component 6-1 and the plastic elastic component 6-2 cooperate with each other to achieve overload protection. When (R2+Δr)ω2>R1ω1, the winding roller 6 is overloaded and idle to ensure that the rotation of the winding roller 6 does not affect the speed stability of the traction roller 1, wherein R2 is the radius of the winding roller 6, ω2 is the rotational angular velocity of the winding roller 6, and Δr is the increment of the equivalent radius of the winding roller 6 introduced in the steel strip grating winding process;

[0064] Preferably, the first detection unit 7 - 1 is an optical microscope; the second detection unit 7 - 2 is a laser triangulation displacement sensor.

[0065] The steel belt is a stainless steel belt with certain flexibility.

[0066] Preferably, the stainless steel belt has a thickness of 0.1-1.5 mm, a width of 3-15 mm, and a length of 1-500 m.

[0067] A manufacturing process of an ultra-long steel strip grating femtosecond laser manufacturing system using the spatiotemporal parameter coordinated control comprises the following steps:

[0068] S1. Steel strip substrate loading: The steel strip is rolled into the unwinding roller 2, and the starting end of the steel strip is pulled through the pulling roller 1, the cleaning module 5, the winding roller 6, the auxiliary roller system 8-i, etc., to complete the pre-tensioning of the steel strip and wait for processing;

[0069] S2. System parameter settings:

[0070] S2-1. Set the spatial angular velocity ω1 and f. The geometric structure characteristics of the steel belt grating scale are controlled by the spatial angular velocity ω1 of the traction roller 1 and the time domain parameter f of the electronic shutter 4. The period scale of the steel belt grating is P:

[0071] P=V / f=R1ω1 / f (1)

[0072] Wherein, R1 is the radius of the traction roller 1;

[0073] From formula (1), it can be seen that the nominal value of P is determined by the parameter matching combination of the spatial angular velocity ω1 and the time domain parameter f, and the accuracy of P is determined by the control accuracy of the spatial angular velocity ω1 and the time domain parameter f;

[0074] The radius R1 of the traction roller 1 is a known quantity, and the structural dimension P of the steel belt grating is taken as the target value. The spatial angular velocity ω1 of the traction roller 1 and the time domain switching frequency f of the electronic shutter are set to satisfy the constraint condition P=R1ω1 / f;

[0075] S2-2. Set the spatial angular velocity ω2. The radius R2 of the winding roller 2 is a known quantity, and the spatial angular velocity ω2 is set to satisfy the constraint condition R2ω2=(0.7~0.8)R1ω1;

[0076] S3. The steel strip moves at a uniform speed: the traction roller 1 rotates at a spatial angular velocity ω1 driven by the motor, driving the steel strip to be continuously output at a uniform speed from the unwinding roller 2, passing through the auxiliary roller system 8-i, and moving horizontally from below the electronic shutter 4;

[0077] S4. Femtosecond laser processing grating: The linear femtosecond laser unit 3 performs local processing on the steel belt moving horizontally at a uniform speed under the control of the time domain switching frequency f of the electronic shutter 4 to form a steel belt grating ruler;

[0078] S5. Cleaning and testing of steel belt grating: The manufactured steel belt grating ruler is cleaned by the cleaning unit 5, and the first detection unit 7-1 performs online quality testing on the cleaned steel belt grating ruler;

[0079] S6. Steel belt grating winding and storage: Under the action of the winding roller 6, the steel belt grating scale is gradually wound on the winding roller 6, and the second detection unit 7-2 monitors the equivalent radius increment Δr of the winding roller 6 in real time. When Δr reaches the threshold, the winding roller 6 implements overload protection, and the staff cuts off the steel belt grating, removes the current winding roller outer ring and the steel belt grating roll, and completes the roll storage of the current steel belt grating; replaces the next winding roller outer ring, and continues to wind and store the steel belt grating;

[0080] S7. Continuous loading and processing of the steel strip: After the processing of the current steel strip substrate wound on the unwinding roller 2 is completed, the next roll of steel strip is replaced, and the steps of S1 to S6 are repeated to start the grating processing of the next roll of steel strip.

[0081] Preferably, the manufacturing scale range of P is 1-400 μm; the manufacturing accuracy range of P is 5-50 nm.

[0082] Example 2

[0083] refer to Figure 6 : Compared with Example 1, a large reduction ratio reducer 9 is connected to the traction roller 1.

[0084] The large reduction ratio reducer 9 is composed of precision gears 9-1 and 9-2 to form a reduction transmission structure, and the reduction ratio is K; the precision gear 9-1 is a driving gear, and the rotational airspace angular velocity under the drive of the motor is ω0.

[0085] The traction roller 1 is a driven wheel, and the spatial angular velocity of the driven wheel rotation is ω1=Kω0. Then the uniform horizontal moving speed of the super-long steel belt grating is V=R1ω1=KR1ω0, where R1 is the radius of the traction roller 1.

[0086] The geometric structure characteristics of the steel strip grating are controlled by the spatial parameter ω0 of the precision gear 9-1 and the temporal parameter f of the electronic shutter 4. The period scale of the steel strip grating is:

[0087] P=V / f=KR1ω0 / f (2)

[0088] In formula (2), K and R1 are known quantities. Therefore, the nominal value of P is determined by the parameter matching combination of the spatial angular velocity ω0 and f, and the accuracy of P is determined by the control accuracy of ω0 and f.

[0089] A manufacturing process of an ultra-long steel strip grating femtosecond laser manufacturing system using the spatiotemporal parameter coordinated control comprises the following steps:

[0090] S1. Steel strip substrate loading: The steel strip is rolled into the unwinding roller 2, and the starting end of the steel strip is pulled through the pulling roller 1, the cleaning module 5, the winding roller 6, the auxiliary roller system 8-i, etc., to complete the pre-tensioning of the steel strip and wait for processing;

[0091] S2. System parameter settings:

[0092] S2-1. Set parameters ω0 and f. The radius R1 of the traction roller 1 is a known quantity, and the structural dimension P of the steel belt grating is taken as the target value. The rotation speed ω0 of the precision gear 9-1 and the time domain switching frequency f of the electronic shutter are set to satisfy the constraint conditions as stated in the formula (2): P = KR1ω0 / f;

[0093] S2-2. Set parameter ω2. The radius R2 of the winding roller 2 is a known quantity, and its rotation speed ω2 is set to satisfy the constraint condition R2ω2=(0.7~0.8)R1ω1;

[0094] S3. The steel strip moves at a uniform speed: the traction roller 1 rotates at an angular velocity ω1 driven by the motor, driving the steel strip to be continuously output at a uniform speed from the unwinding roller 2, passing through the auxiliary roller system 8-i, and moving horizontally from below the electronic shutter 4;

[0095] S4. Femtosecond laser processing grating: The linear femtosecond laser unit 3 performs local processing on the steel belt moving horizontally at a uniform speed under the control of the time domain switching frequency f of the electronic shutter 4 to form a steel belt grating ruler;

[0096] S5. Cleaning and testing of steel belt grating: The manufactured steel belt grating ruler is cleaned by the cleaning unit 5, and the first detection unit 7-1 performs online quality testing on the cleaned steel belt grating ruler;

[0097] S6. Steel belt grating winding and storage: Under the action of the winding roller 6, the steel belt grating scale is gradually wound on the winding roller 6, and the second detection unit 7-2 monitors the equivalent radius increment Δr of the winding roller 6 in real time. When Δr reaches the threshold, the winding roller 6 implements overload protection, and the staff cuts off the steel belt grating, removes the current winding roller outer ring and the steel belt grating roll, and completes the roll storage of the current steel belt grating; replaces the next winding roller outer ring, and continues to wind and store the steel belt grating;

[0098] S7. Continuous loading and processing of the steel strip: After the processing of the current steel strip substrate wound on the unwinding roller 2 is completed, the next roll of steel strip is replaced, and the steps of S1 to S6 are repeated to start the grating processing of the next roll of steel strip.

[0099] Comparing formulas (1) and (2), it can be seen that according to formula (1), assuming that the drive motor generates a speed error Δω at a certain moment i , then for Example 1, the grating scale manufacturing error caused is:

[0100] ΔP1=R1Δω i / f (3)

[0101] According to formula (2), assuming that the drive motor generates a speed error Δω at a certain moment i , then for Example 2, the resulting grating scale manufacturing error is:

[0102] ΔP2=KR1Δω i / f (4)

[0103] Since the reduction ratio K of the large reduction ratio reducer 9 is less than 1, ΔP2 is less than ΔP1. That is, compared with the first embodiment, the second embodiment can provide a higher manufacturing accuracy of the steel belt grating.

[0104] The above is only a preferred embodiment of the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered as the protection scope of the present invention. All components not specified in this embodiment can be implemented by existing technologies.

Claims

1. A super-long steel strip grating femtosecond laser manufacturing system with coordinated control of time and space parameters, the manufacturing system comprising an unwinding roller (2), a traction roller (1) and a winding roller (6), a linear femtosecond laser unit (3) and an electronic shutter (4) are arranged between the unwinding roller (2) and the traction roller (1), the linear femtosecond laser unit (3) is arranged directly above the electronic shutter (4), a cleaning unit (5) is arranged between the traction roller (1) and the winding roller (6), a first detection unit (7-1) is arranged between the cleaning unit (5) and the winding roller (6), a second detection unit (7-2) is arranged directly above the winding roller (6), and a plurality of auxiliary roller systems (8-1) are arranged along the conveying direction of the steel strip. i ), are driven rollers, which can enable the steel strip to move horizontally from below the electronic shutter (4), and can also enable the steel strip to smoothly enter the cleaning unit (5) for cleaning; The traction roller (1) is an active roller, which rotates at a spatial angular velocity ω1, and the winding roller (6) is an active roller, whose spatial angular velocity is ω2; the outer cylindrical surface of the traction roller (1) has a magnetic or negative pressure structure, and the horizontal movement speed of the steel strip when passing under the electronic shutter (4) is V = R1ω1, where R1 is the radius of the traction roller (1); The linear femtosecond laser unit (3) is composed of a femtosecond laser (3-1), a galvanometer (3-2), and a focusing lens group (3-3), and outputs a linear femtosecond laser spot; the time domain switching frequency of the electronic shutter (4) is f ; The length of the linear femtosecond laser spot is 2-10 mm, and the width of the spot is 0.5-200 μm; the steel strip is a stainless steel strip with certain flexibility; the thickness of the stainless steel strip is 0.1-1.5 mm, the width is 3-15 mm, and the length is 1-500 m; The winding roller (6) is composed of a metal rigid component (6-1) and a plastic elastic component (6-2); the inner ring of the metal rigid component (6-1) is manufactured with rigid inner teeth; the elastic arm of the plastic elastic component (6-2) adopts a hollow structure, and its end is manufactured with elastic outer teeth meshing with the rigid inner teeth; the metal rigid component (6-1) and the plastic elastic component (6-2) cooperate with each other to achieve overload protection. When (R2+Δ r )ω2>R1ω1, the winding roller (6) is overloaded and idles to ensure that the rotation of the winding roller (6) does not affect the rotation speed stability of the traction roller (1), wherein R2 is the radius of the winding roller (6), ω2 is the rotation angular velocity of the winding roller (6), Δ r The increment of the equivalent radius of the winding roller (6) introduced in the steel strip grating winding process.

2. The manufacturing system according to claim 1, characterized in that: The first detection unit (7-1) is an optical microscope; the second detection unit (7-2) is a laser triangulation displacement sensor; and the cleaning agent used in the cleaning unit (5) is anhydrous ethanol.

3. The manufacturing system according to claim 1, characterized in that: The traction roller (1) is also connected to a large reduction ratio reducer (9); the large reduction ratio reducer (9) is composed of a precision driving gear (9-1) and a precision driven gear (9-2) to form a reduction transmission structure, and the reduction ratio is K The rotational angular velocity of the precision driving gear (9-1) driven by the motor is ω0, and the traction roller (1) is a driven wheel, and the rotational angular velocity of the driven wheel is ω1= K ω0, uniform horizontal moving speed of the super-long steel belt grating V = R1ω1= K R1ω0, R1 is the radius of the traction roller (1).

4. A method for manufacturing an ultra-long steel strip grating using the manufacturing system according to any one of claims 1 or 2, characterized in that: The steps include: S1. Steel strip substrate loading: The steel strip is rolled into the unwinding roller (2), and the starting end of the steel strip is pulled through the traction roller (1), the cleaning unit (5), the winding roller (6), and the auxiliary roller system (8-i) to complete the pre-tensioning of the steel strip and wait for processing; S2. System parameter settings: S2-1. Set the spatial angular velocity ω1 and the time domain switching frequency f The geometrical structural characteristics of the steel belt grating ruler are determined by the spatial angular velocity ω1 of the traction roller (1) and the time domain parameter of the electronic shutter (4). f Cooperative control, the period scale of the steel strip grating is P: P = V / f = R1ω1 / f (1) Wherein, R1 is the radius of the traction roller (1); V is the horizontal moving speed of the steel belt when it passes under the electronic shutter (4), The radius R1 of the traction roller (1) is a known quantity, and the structural dimension P of the steel belt grating is taken as the target value. The spatial angular velocity ω1 of the traction roller (1) and the time domain switching frequency of the electronic shutter are set as follows: f , so that it satisfies the constraint condition P = R1ω1 / f ; S2-2. Set the airspace angular velocity ω2; the radius R2 of the winding roller (6) is a known quantity, and set its airspace angular velocity ω2 to satisfy the constraint R2ω2=(0.7~0.8)R1ω1; S3. The steel strip moves at a uniform speed: the traction roller (1) is driven by a motor to rotate at a spatial angular velocity ω1, driving the steel strip to be continuously output at a uniform speed from the unwinding roller (2), passing through the auxiliary roller system (8-i), and moving horizontally from below the electronic shutter (4); S4. Femtosecond laser processing grating: Linear femtosecond laser unit (3) switching frequency in the electronic shutter (4) time domain f Under the control of the , the steel belt moving horizontally at a uniform speed is processed in a localized manner to form a steel belt grating ruler; S5. Cleaning and testing of steel belt grating: The manufactured steel belt grating ruler is cleaned by the cleaning unit (5), and the first detection unit (7-1) performs online quality testing on the cleaned steel belt grating ruler; S6. Steel belt grating winding storage: Under the action of the winding roller (6), the steel belt grating ruler is gradually wound on the winding roller (6), and the second detection unit (7-2) increments the equivalent radius of the winding roller (6) by Δ r Real-time monitoring is performed. r After reaching the threshold, the winding roller (6) implements overload protection, and the staff cuts off the steel strip grating, removes the current winding roller outer ring and the steel strip grating roll, and completes the roll storage of the current steel strip grating; replaces the next winding roller outer ring, and continues to roll and store the steel strip grating; S7. Continuous loading and processing of the steel strip: After the processing of the current steel strip substrate wound on the unwinding roller (2) is completed, the next roll of steel strip is replaced, and the steps of S1 to S6 are repeated to start the grating processing of the next roll of steel strip.

5. A method for manufacturing ultra-long steel strip gratings using the manufacturing system of claim 3, characterized in that: The steps include: S1. Steel strip substrate loading: The steel strip is rolled into the unwinding roller (2), and the starting end of the steel strip is pulled through the traction roller (1), the cleaning unit (5), the winding roller (6), and the auxiliary roller system (8-i) to complete the pre-tensioning of the steel strip and wait for processing; S2. System parameter settings: S2-1. Set the spatial angular velocity ω0 and the time domain switching frequency f； The geometrical structural characteristics of the steel strip grating are determined by the spatial angular velocity ω0 of the precision driving gear (9-1) and the time domain parameter of the electronic shutter (4). f Cooperative control, the period scale of the steel strip grating is P: P = V / f = K R1ω0 / f (2) Wherein, R1 is the radius of the traction roller (1); The radius R1 of the traction roller (1) is a known quantity, and the structural dimension P of the steel belt grating is taken as the target value. The spatial angular velocity ω0 of the precision driving gear (9-1) and the time domain switching frequency of the electronic shutter are set. f , so that it satisfies the constraint condition P = K R1ω0 / f； S2-2. Set the airspace angular velocity ω2; the radius R2 of the winding roller (6) is a known quantity, and set its airspace angular velocity ω2 to satisfy the constraint R2ω2=(0.7~0.8)R1ω1; S3. The steel strip moves at a uniform speed: the traction roller (1) is driven by a motor to rotate at a spatial angular velocity ω1, driving the steel strip to be continuously output at a uniform speed from the unwinding roller (2), passing through the auxiliary roller system (8-i), and moving horizontally from below the electronic shutter (4); S4. Femtosecond laser processing grating: Linear femtosecond laser unit (3) switching frequency in the electronic shutter (4) time domain f Under the control of the , the steel belt moving horizontally at a uniform speed is processed in a localized manner to form a steel belt grating ruler; S5. Cleaning and testing of steel belt grating: The manufactured steel belt grating ruler is cleaned by the cleaning unit (5), and the first detection unit (7-1) performs online quality testing on the cleaned steel belt grating ruler; S6. Steel belt grating winding storage: Under the action of the winding roller (6), the steel belt grating ruler is gradually wound on the winding roller (6), and the second detection unit (7-2) increments the equivalent radius of the winding roller (6) by Δ r Real-time monitoring is performed. r After reaching the threshold, the winding roller (6) implements overload protection, and the staff cuts off the steel strip grating, removes the current winding roller outer ring and the steel strip grating roll, and completes the roll storage of the current steel strip grating; replaces the next winding roller outer ring, and continues to roll and store the steel strip grating; S7. Continuous loading and processing of the steel strip: After the processing of the current steel strip substrate wound on the unwinding roller (2) is completed, the next roll of steel strip is replaced, and the steps of S1 to S6 are repeated to start the grating processing of the next roll of steel strip.

6. The method according to claim 4 or 5, characterized in that: The manufacturing scale range of the steel strip grating period P is 1-400 μm; the manufacturing accuracy range of P is 5-50 nm.

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