Method and device for determining the vibration state of an interferometric profilometry apparatus, and measuring system

Abstract

The application discloses a method and device for determining the vibration state of an interferometric profiler and a measuring system. The method comprises: in response to a collection instruction, controlling a signal collection module in the interferometric profiler to collect multiple frames of interference signals; obtaining signal intensity difference values between adjacent signals in the multiple frames of interference signals, and comparing the signal intensity difference values; determining a vibration coefficient according to the comparison result, and determining the collection frequency of the interference signals; and determining the vibration state of the interferometric profiler based on the vibration coefficient and the collection frequency. The method uses the signal collection device of the interferometric profiler to collect interference signals for measurement, thereby reducing the cost without adding additional equipment, and solving the technical problem of being unable to accurately monitor vibration data in real time.

Description

Technical Field

[0001] This application relates to the field of vibration measurement, and more specifically, to a method, apparatus, and measurement system for determining the vibration state of an interference profile device. Background Technology

[0002] Optical interferometry utilizes the interference phenomenon of light to acquire and analyze interference images, thereby obtaining the surface height difference and thus the three-dimensional morphology of the surface. Optical interferometry has advantages such as non-contact operation, fast detection speed, and high longitudinal resolution, and is widely used in surface morphology measurement. However, because interferometric profilometry devices are micro- and nano-scale measurement systems, they are greatly affected by vibration during detection. Currently, methods for measuring vibration using interferometric profilometry devices involve manually acquiring vibration data over a certain period using an additional vibration meter, or observing the fringe jumping phenomenon in the acquired interference signal image with the naked eye. Using a vibration meter not only increases costs, but the vibration conditions at the measurement site are constantly changing due to environmental variations, making it impossible for the vibration meter to reflect the vibration data of the interferometric profilometry device in real time. Furthermore, visual observation cannot accurately determine whether the conditions for vibration measurement by the interferometric profilometry device have been met. Summary of the Invention

[0003] This application provides a method and apparatus for determining the vibration state of an interference profile device. It eliminates the need for additional equipment, reducing costs, and solves the technical problems of not being able to monitor vibration data accurately in real time, determining vibration state based on vibration data, and high costs.

[0004] According to one aspect of the embodiments of this application, a method for determining the vibration state of an interference profile device is provided, comprising: responding to an acquisition command, controlling a signal acquisition module in the interference profile device to acquire multiple frames of interference signals; obtaining the signal intensity difference between adjacent signals in the multiple frames of interference signals, and comparing the magnitude of each signal intensity difference; determining a vibration coefficient based on the comparison result, and determining the acquisition frequency of the multiple frames of interference signals; and determining the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency.

[0005] Optionally, determining the vibration coefficient based on the comparison results includes: determining the signal intensity of each frame of the interference signal in the multi-frame interference signal; determining the signal intensity difference between each frame of the interference signal and the adjacent interference signal; comparing the magnitudes of the various signal intensity differences, and determining the maximum value among the various signal intensity differences in the comparison results; and determining the maximum value as the vibration coefficient.

[0006] Optionally, determining the signal intensity difference between each frame of interference signal and adjacent interference signals includes: traversing all pixels in each frame of interference signal and determining the grayscale value of all pixels in each frame of interference signal; determining the difference between the grayscale value of each pixel in each frame of interference signal and the grayscale value of pixels at the same position in adjacent interference signals; and determining the maximum value among the differences in grayscale values ​​of each pixel as the signal intensity difference between each frame of interference signal and adjacent interference signals.

[0007] Optionally, the vibration change of the interference profile device is determined based on the vibration coefficient; the vibration frequency of the interference profile device is determined based on the acquisition frequency; the vibration quantity of the interference profile device is obtained by combining the vibration change and the vibration frequency; and the vibration state is determined based on the vibration quantity.

[0008] Optionally, the vibration amount of the interference profile device can be obtained by weighted summation, subtraction, quotient, or product of the vibration change and vibration frequency.

[0009] Optionally, determining the vibration frequency of the interference profile device based on the acquisition frequency includes: determining the target location of the pixel with the largest vibration change in the target frame interference signal, wherein the target frame signal belongs to a multi-frame interference signal; acquiring signals at the target location according to the acquisition frequency, and determining the number of acquired signals; and determining the product of the number of signals and the acquisition frequency as the vibration frequency of the interference profile device.

[0010] Optionally, determining the vibration state based on the vibration amount further includes: displaying the vibration state of the interference profile device when the vibration amount of the interference profile device is less than a preset vibration amount threshold, so as to characterize that the interference profile device has met the measurement requirements.

[0011] According to another aspect of the embodiments of this application, a vibration state measurement system for an interference profile device is also provided, comprising: a target processor and an interference profile device; the target processor is connected to the interference profile device; the target processor is configured to, in response to an acquisition command, control the signal acquisition module in the interference profile device to acquire multiple frames of interference signals; acquire the intensity difference between adjacent signals in the multiple frames of interference signals and compare the magnitude of each signal intensity difference; determine the vibration coefficient based on the comparison result and determine the acquisition frequency of the multiple frames of interference signals; determine the vibration amount of the interference profile device based on the vibration coefficient and the acquisition frequency, and determine the vibration state based on the vibration amount; when the vibration amount of the interference profile device is less than a preset vibration amount threshold, the target processor is further configured to control the interference profile device to measure the object under test.

[0012] According to another aspect of the embodiments of this application, a device for determining the vibration state of an interference profile device is also provided, comprising: an acquisition module, configured to control a signal acquisition module in the interference profile device to acquire multiple frames of interference signals in response to an acquisition command; an acquisition module, configured to acquire signal intensity differences between adjacent signals in the multiple frames of interference signals and compare the magnitudes of each signal intensity difference; a first determination module, configured to determine a vibration coefficient based on the comparison results and determine the acquisition frequency of the multiple frames of interference signals; and a second determination module, configured to determine the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency.

[0013] According to another aspect of the embodiments of this application, a non-volatile storage medium is also provided, the non-volatile storage medium including a stored program, wherein, when the program is running, the device where the non-volatile storage medium is located is controlled to execute the above-described method for determining the vibration state of the interference profile device.

[0014] According to another aspect of the embodiments of this application, a computer device is also provided, including a memory and a processor, the processor being configured to run a program, wherein the program executes the above-described method for determining the vibration state of the interference profile device during runtime.

[0015] In this embodiment, multiple frames of interference signals are acquired using the signal acquisition module in the interference profile device; the signal intensity difference between adjacent signals in the multiple frames of interference signals is obtained, and the magnitude of each signal intensity difference is compared; the vibration coefficient is determined based on the comparison result, and the acquisition frequency of the multiple frames of interference signals is determined; the vibration state of the interference profile device is determined based on the vibration coefficient and the acquisition frequency. This method achieves the effect of directly using the interference profile device to determine the vibration state of the interference profile device. This method avoids using the naked eye to observe the vibration state of the interference profile device, and only requires the use of existing interference profile devices to determine the vibration state, thereby solving the technical problem of not being able to monitor vibration data accurately in real time and determine the vibration state based on the vibration data. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0017] Figure 1 This is a hardware structure block diagram of a computer terminal (or mobile device) for a method of determining the vibration state of an interference profile device according to an embodiment of this application.

[0018] Figure 2 This is a flowchart illustrating a method for determining the vibration state of an interference profile device according to this application;

[0019] Figure 3 A schematic diagram of a Mirau-type interference profile device according to an embodiment of this application;

[0020] Figure 4 This is a schematic diagram of a Linnik-type interference profile device according to an embodiment of this application;

[0021] Figure 5 This is a schematic diagram of a Michelson-type interference profile device according to an embodiment of this application;

[0022] Figure 6 This is a schematic diagram of a Fizeau-type interference profile device according to an embodiment of this application;

[0023] Figure 7 This is a schematic diagram of a Twyman-Green type interference profile device according to an embodiment of this application;

[0024] Figure 8 This is a schematic diagram of an optional interference signal frame according to an embodiment of this application;

[0025] Figures 9a to 9e This is a schematic diagram of five consecutive frames of interference signals according to an embodiment of this application;

[0026] Figure 10 This is a schematic flowchart of an optional vibration coefficient determination method according to an embodiment of this application;

[0027] Figure 11 This is a schematic flowchart of an optional method for determining the signal strength difference between each frame of interference signal and the interference signal of adjacent frames according to an embodiment of this application;

[0028] Figure 12 This is a schematic flowchart of an optional method for determining the vibration state of an interference profile device based on vibration coefficient and acquisition frequency according to an embodiment of this application.

[0029] Figure 13 This is a schematic flowchart of an optional method for determining the vibration frequency of an interference profile device based on the acquisition frequency, according to an embodiment of this application.

[0030] Figure 14 This is a schematic diagram of an optional interference signal intensity variation curve according to an embodiment of this application;

[0031] Figure 15 This is a schematic diagram of an optional interferometric measurement system structure according to an embodiment of this application;

[0032] Figure 16 This is a schematic diagram of a device for determining the vibration state of an optional interference profile device according to an embodiment of this application.

[0033] The above figures include the following reference numerals:

[0034] 3-1. First signal acquisition module; 3-2. First imaging lens; 3-3. First beam splitter; 3-4. First collimating lens; 3-5. First light source; 3-6. First objective lens; 3-7. Second beam splitter; 3-8. First reference plane; 3-9. Mirau objective lens; 3-10. First phase difference / optical path difference driving device; 3-11. First object under test; 3-12. First computer; 4-1. Second signal acquisition module; 4-2. Second imaging lens; 4-3. Third beam splitter; 4-4. Second collimating lens; 4-5. Second light source; 4-6. Second objective lens; 4-7. Second reference plane; 4-8. Fourth beam splitter; 4-9. Linnik objective lens; 4-10. Second phase difference / optical path difference driving device; 4-11. Second object under test; 4-12. Second computer; 5-1. Third signal acquisition module; 5-2. Third imaging lens; 5- 3. Fifth beam splitter; 5-4. Third collimating lens; 5-5. Third light source; 5-6. Third reference plane; 5-7. Sixth beam splitter; 5-8. Third objective lens; 5-9. First lens; 5-10. Michelson objective lens; 5-11. Third phase difference / optical path difference driving device; 5-12. Third test object; 5-13. Third computer; 6-1. First light source; 6-2. First beam expander; 6-3. Seventh beam splitter; 6-4. Fourth collimating lens; 6-5. Fourth reference plane; 6-6. First test plane; 6-7. Fourth imaging lens; 6-8. Fourth signal acquisition module; 7-1. Fourth light source; 7-2. Second beam expander; 7-3. Fifth collimating lens; 7-4. Eighth beam splitter; 7-5. Fifth reference plane; 7-6. Second lens; 7-7. Second test plane; 7-8. Fifth imaging lens; 7-9. Fifth signal acquisition module. Detailed Implementation

[0035] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0036] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0037] According to an embodiment of this application, an embodiment of a method for determining the vibration state of an interference profile device is also provided. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than that shown here.

[0038] The methods and embodiments provided in this application can be executed on mobile terminals, computer terminals, cloud servers, or similar computing devices. Figure 1 A hardware block diagram of a computer terminal (or mobile device) for determining the vibration state of an interference profile device is shown. Figure 1 As shown, the computer terminal 10 (or mobile device 10) may include one or more processors 102 (shown as 102a, 102b, ..., 102n in the figure) 102 (processor 102 may include, but is not limited to, a microprocessor MCU or a programmable logic device FPGA, etc.), a memory 104 for storing data, and a transmission module 106 for communication functions. In addition, it may also include: a display, an input / output interface (I / O interface), a universal serial bus (USB) port (which may be included as one of the ports of the I / O interface), a network interface, a power supply, and / or a camera. Those skilled in the art will understand that... Figure 1 The structure shown is for illustrative purposes only and does not limit the structure of the aforementioned electronic device. For example, computer terminal 10 may also include... Figure 1 The more or fewer components shown, or having the same Figure 1 The different configurations shown.

[0039] It should be noted that the aforementioned one or more processors 102 and / or other data processing circuits are generally referred to herein as "data processing circuits". These data processing circuits may be embodied, in whole or in part, in software, hardware, firmware, or any other combination thereof. Furthermore, the data processing circuits may be a single, independent processing module, or may be integrated, in whole or in part, into any other element within the computer terminal 10 (or mobile device). As involved in the embodiments of this application, the data processing circuits serve as a processor control mechanism (e.g., selection of a variable resistor termination path connected to an interface).

[0040] The memory 104 can be used to store software programs and modules of application software, such as the program instructions / data storage device corresponding to the method for determining the vibration state of the interference profile device in the embodiments of this application. The processor 102 executes various functional applications and data processing by running the software programs and modules stored in the memory 104, that is, implementing the above-mentioned method for determining the vibration state of the interference profile device. The memory 104 may include high-speed random access memory, and may also include non-volatile memory, such as one or more magnetic storage devices, flash memory, or other non-volatile solid-state memory. In some instances, the memory 104 may further include memory remotely located relative to the processor 102, and these remote memories can be connected to the computer terminal 10 via a network. Examples of the above-mentioned networks include, but are not limited to, the Internet, corporate intranets, local area networks, mobile communication networks, and combinations thereof.

[0041] The transmission module 106 is used to receive or send data via a network. Specific examples of the network described above may include a wireless network provided by the communication provider of the computer terminal 10. In one example, the transmission module 106 includes a Network Interface Controller (NIC), which can connect to other network devices via a base station to communicate with the Internet. In another example, the transmission module 106 may be a Radio Frequency (RF) module, used for wireless communication with the Internet.

[0042] The display can be, for example, a touchscreen liquid crystal display (LCD) that allows the user to interact with the user interface of the computer terminal 10 (or mobile device).

[0043] According to an embodiment of this application, an embodiment of a method for determining the vibration state of an interference profile device is provided. It should be noted that the steps shown in the flowchart in the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions. Furthermore, although a logical order is shown in the flowchart, in some cases, the steps shown or described may be executed in a different order than that shown here.

[0044] Figure 2 This is a flowchart of the method for determining the vibration state of the interference profile device according to this application, such as... Figure 2 As shown, the method includes the following steps:

[0045] Step S202: In response to the acquisition command, control the signal acquisition module in the interference profile device to acquire multiple frames of interference signals;

[0046] Step S204: Obtain the signal intensity difference between adjacent signals in the multi-frame interference signal and compare the magnitude of each signal intensity difference;

[0047] Step S206: Determine the vibration coefficient based on the comparison results, and determine the acquisition frequency of the multi-frame interference signal;

[0048] Step S208: Determine the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency.

[0049] Through the above steps, in this embodiment of the application, interference signals are acquired using the signal acquisition module in the interference profile device; the signal intensity difference between adjacent frames in multiple interference signals is obtained, and the magnitude of each signal intensity difference is compared. Based on the comparison results, the vibration coefficient is determined, and the acquisition frequency of the multiple interference images is determined. The vibration state of the interference profile device is determined based on the vibration coefficient and the acquisition frequency. This method achieves the effect of directly using the interference profile device to obtain and determine the relevant parameters of the vibration state of the interference profile device. This method avoids using the naked eye to observe the vibration state of the interference profile device. It only requires the use of existing interference profile devices to determine the vibration state, thereby solving the problem of not being able to monitor vibration data accurately in real time and determine the vibration state based on the vibration data.

[0050] It should be noted that the interferometric profiler itself has a built-in beam splitting system, signal acquisition module and storage medium. Vibration measurement is performed directly using the components of the interferometric profiler itself, which simplifies the measurement equipment. This method does not require the addition of additional measurement equipment. The vibration state can be determined using the existing interferometric profiler, thus solving the technical problem of high cost of vibration state measurement caused by the need to add additional equipment.

[0051] Furthermore, this application uses signal strength difference and acquisition frequency to determine the vibration state of the device without considering the type of light source. That is, the vibration state determination method proposed in this application is applicable to a variety of light sources, not limited to laser or natural light.

[0052] Because related technologies for measuring vibration require calculating vibration frequency and velocity based on the movement of one bright fringe (i.e., one of the bright fringe patterns in the interference fringes), but in measurements using interference profilers, the samples are often uneven, making it difficult to distinguish the central bright fringe. Therefore, this application proposes a detection method that uses the intensity difference and acquisition frequency of the interference signal to determine the vibration state. This method eliminates the need to search for the central bright fringe, is not limited to a specific sample, achieves high-precision, interference-free vibration state measurement, and does not require consideration of sample quality, thus improving measurement efficiency.

[0053] It should be further explained that when an interference profiler is used for measurement, environmental vibration has a significant impact on the measurement results. Generally, there are two common methods to determine whether the vibration conditions for measurement are met. The first is to use a vibration meter placed on the interference profiler to obtain specific vibration parameters such as frequency and velocity. The second is for the observer to visually observe the display showing the interference signal. When the equipment vibrates, the optical path difference between the two beams of light that produce the interference fringes changes, and the interference fringes move along a direction perpendicular to the fringe. If the interference fringes do not jump within the observation time, interference measurement can be performed. This application, based on the acquired interference signal, uses the signal intensity difference and the acquisition frequency of the interference signal to obtain parameters characterizing the vibration phenomenon, thus determining the vibration state of the interference profiler. The method provided in this application can also provide real-time evaluation of the measurement environment of the interference profiler and avoid the environmental influence of potential measurement errors.

[0054] Therefore, the method provided in this application is applicable to a variety of interferometric systems, such as: Figure 3 The Mirau type shown Figure 4 The Linnik type shown and Figure 5 The Michelson-type isoscopic interferometry system shown is also applicable to... Figure 6 The Fizeau type interferometer shown Figure 7 The Twyman-Green interferometer and other large-aperture interferometer systems shown are merely examples of interferometer systems to which this invention is applicable and do not limit the scope of application of the methods proposed in this application.

[0055] It is understood that the interference signals in the embodiments of this application include, but are not limited to, interference images, and the vibration state of the obtained interference profile device can be displayed in real time on the display device, so as to avoid the environmental influence of possible measurement errors.

[0056] In step S202, the acquisition command is a command received by a computer connected to the interference profiler to control the interference profiler to acquire interference signals. The signal acquisition module can be a camera in the interference profiler or other signal acquisition devices. Before acquiring the interference signal, the light source of the interference profiler is turned on, and the relative position of the optical system of the interference profiler and the sample under test is adjusted to focus the interference profiler and obtain the interference signal. Figure 8 As shown in the figure, the collected interference signal exhibits an interference phenomenon with alternating bright and dark fringes. Figure 9a , Figure 9b , Figure 9c , Figure 9d and Figure 9e The optional five consecutive frames of interference signal are shown.

[0057] It should be noted that the interference signal acquisition period should be when the interference profiler is not in measurement operation.

[0058] In step S204, the signal strength of the interference signal refers to the grayscale value of all pixels in each frame of the interference signal;

[0059] In step S206, the acquisition frequency of the interference signal can be determined by the interval duration of the signal acquisition module in the interference profile device for acquiring the interference signal.

[0060] The following explains steps S202 to S208 in detail.

[0061] Methods for determining vibration coefficients based on comparison results, such as Figure 10 As shown, it includes:

[0062] Step S1002: Determine the signal strength of each frame of the interference signal in the multi-frame interference signal;

[0063] Step S1004: Determine the signal intensity difference between each frame of interference signal and the adjacent interference signal;

[0064] Step S1006: Compare the magnitudes of each signal strength difference and determine the maximum value among the various signal strength differences from the comparison results;

[0065] Step S1008: Determine the maximum value as the vibration coefficient.

[0066] In one alternative approach, the signal intensity difference between each frame of the interference signal and the interference signals of adjacent frames can be determined by subtracting the gray value of each pixel in the interference signal from the gray value of the pixel at the same position, specifically as follows: Figure 11 As shown, it includes:

[0067] Step S1102: Traverse all pixels in each frame of the interference signal and determine the grayscale value of all pixels in each frame of the interference signal.

[0068] Step S1104: Determine the difference between the gray value of each pixel in each frame image and the gray value of the pixel at the same position in the interference signal of the adjacent frame;

[0069] Step S1106: The maximum value among the differences in grayscale values ​​of each pixel is determined as the signal intensity difference between the interference signal of each frame and the interference signal of the adjacent frame.

[0070] It should be noted that the signal acquisition module can convert the interference light intensity signal into a digital image signal. During a set of interference signal acquisitions, the measurement area of ​​the object under test remains unchanged, and its position can be determined by pixel coordinates. The pixel coordinates of the pixels in each frame of interference signal are the same as the pixel coordinates of the adjacent frame of interference signal, which means that the position of the pixels is the same.

[0071] To facilitate understanding, let's take the calculation of the vibration coefficient of the k-th frame of an interference signal in a set of interference signals as an example. k is a positive integer, and n is the number of frames before and after the k-th frame of the interference signal used to calculate the vibration coefficient in the set of signals, as shown in the following formula:

[0072] I k-n =max(|g k-n (x, y)-g k-n-1 (x, y)|)

[0073]

[0074] I k-2 =max(|g k-2 (x, y)-g k-1 (x, y)|)

[0075] I k-1 =max(|g k-1 (x, y)-g k (x, y)|)

[0076] Already k =max(|g k (x, y)-g k+1 (x, y)|)

[0077] I k+1 =max(|g k+1 (x, y)-g k+2 (x, y)|)

[0078]

[0079] I k+n-1 =max(|gk+n-1 (x, y)-g k+n (x, y)|)

[0080] I k =max(I k-n， ···I k-2 I k-1 I k I k+1 ···I k+n-1 )

[0081] In the formula, I k-n I represents the maximum signal strength difference between the kn-th frame and the (kn-1)-th frame. k-2 I represents the maximum difference in signal strength between the (k-2)th frame and the (k-1)th frame. k-1 I represents the maximum difference in signal strength between the (k-1)th frame and the kth frame. k I represents the maximum difference in signal strength between frame k and frame (k+1). k+1 I represents the maximum difference in signal strength between frame k+1 and frame k+2. k+n-1 I represents the maximum difference in signal strength between the (k+n-1)th frame and the (k+n)th frame. k Let g(x, y) represent the vibration coefficient of the interference signal in the k-th frame, and g(x, y) be the gray value of the pixel with pixel coordinates (x, y).

[0082] The method for determining the vibration state of an interferometric profile device based on vibration coefficient and acquisition frequency is as follows: Figure 12 As shown, it includes:

[0083] Step S1202: Determine the vibration change of the interference profile device based on the vibration coefficient;

[0084] Step S1204: Determine the vibration frequency of the interference profile device based on the acquisition frequency;

[0085] Step S1206: Based on the vibration change and vibration frequency, obtain the vibration amount of the interference profile device;

[0086] Step S1208: Determine the vibration state based on the vibration amount.

[0087] It should be noted that the vibration change IV k =f(I k Based on the relevant mathematical processing of the vibration coefficient of the k-th frame interference signal, there is no limit to any form.

[0088] There are several ways to obtain the vibration amount of an interference profile device based on the vibration change and vibration frequency. For example, the vibration amount of the interference profile device can be obtained by weighted summation, subtraction, quotient, or product of the vibration change and vibration frequency. The above-mentioned calculation methods are just a few optional calculation methods and do not limit the way to determine the vibration amount of the interference profile device.

[0089] One possible method for determining the vibration frequency of an interference profile device based on the acquisition frequency is, for example... Figure 13 As shown, it includes:

[0090] Step S1302: Determine the target location of the pixel with the largest vibration change in the target frame interference signal;

[0091] Step S1304: Acquire signals at the target location according to the acquisition frequency, and determine the number of acquired signals;

[0092] Step S1306: The product of the number of signals and the acquisition frequency is determined as the vibration frequency of the interference profile device.

[0093] It should be noted that the vibration frequency IVP k =f(Fs), which is based on the relevant mathematical processing of the sampling frequency Fs and can take any form.

[0094] In one alternative approach, the vibration frequency can be obtained as follows: A signal intensity variation curve is constructed from the signals collected within a specific time period at the coordinates (target position) of the signal point with the largest change in signal intensity (in this example, the pixel with the largest change in vibration in the interference signal). The vibration frequency IVP is then determined based on the number of signal points N within one vibration cycle of this curve (the time interval between single returns to the origin, e.g., between peaks) and the acquisition frequency fs. k In practical applications, the sampling frequency is generally greater than the vibration frequency. The vibration frequency is calculated as follows:

[0095] IVP k =N·fs

[0096] like Figure 14 The signal intensity variation curve shown has a sampling frequency of the camera frame rate (FrameRate). An average of four signals were acquired within one vibration cycle, therefore the vibration frequency is IVP. k =4·FrameRate.

[0097] Vibration quantity IVQ k =f(IV) k IVP k Based on the correlation processing of the vibration change and vibration frequency of the interference signal in the k-th frame, it is not limited to any form.

[0098] For example, IVQ k It can be written in the following form:

[0099] IVQ k =IV k ·ω1+IVP k ·ω2, where ω1 is the weight of the vibration change and ω2 is the vibration frequency parameter.

[0100] The vibration state of the interference profile device is determined based on the measured vibration amount, and the vibration state is displayed.

[0101] Specifically, the vibration quantity and related parameters calculated based on the vibration quantity are displayed on the control software interface of the interference profile device, thereby displaying the vibration status. Those skilled in the art will understand that the vibration status can be a value, an image, information indicating whether it is measurable, a color mark, or a measurement compliance indicator, etc.

[0102] In this embodiment, when the vibration amount of the interference profile device is less than a preset vibration threshold, the vibration state is displayed to characterize that the interference profile device has met the measurement requirements.

[0103] The method for determining the vibration state of an interference profile device provided in this application embodiment is applied to an interference profile device vibration state measurement system provided in this application embodiment, such as... Figure 15 As shown, the device includes a target processor 100 and an interference profile device 110. The target processor 100 is connected to the interference profile device 110. The target processor 100 is used to control the signal acquisition module in the interference profile device 110 to acquire multiple frames of interference signals in response to an acquisition command; to obtain the signal intensity difference between adjacent signals in the multiple frames of interference signals and compare the magnitude of each signal intensity difference; to determine the vibration coefficient based on the comparison result and to determine the acquisition frequency of the multiple frames of interference signals; to determine the vibration amount of the interference profile device 110 based on the vibration coefficient and the acquisition frequency, and to determine the vibration state based on the vibration amount; when the vibration amount of the interference profile device 110 is less than a preset vibration amount threshold, the target processor 100 is also used to control the interference profile device to measure the object being measured.

[0104] This application also provides a device for determining the vibration state of an interference profile device, such as... Figure 16 As shown, it includes: an acquisition module 20, used to control the signal acquisition module in the interference profile device to acquire multiple frames of interference signals in response to an acquisition command; an acquisition module 22, used to acquire the signal intensity difference between adjacent signals in the multiple frames of interference signals and compare the magnitude of each signal intensity difference; a first determination module 24, used to determine the vibration coefficient based on the comparison result and determine the acquisition frequency of the multiple frames of interference signals; and a second determination module 26, used to determine the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency.

[0105] The first determining module 24 includes: a first determining submodule and a second determining submodule. The first determining submodule is used to determine the signal intensity of each frame of interference signal in the multi-frame interference signal; determine the signal intensity difference between each frame of interference signal and the adjacent interference signal; compare the magnitudes of each signal intensity difference, and determine the maximum value among the various signal intensity differences in the comparison results; and determine the maximum value as the vibration coefficient.

[0106] The second determining submodule is used to traverse all pixels in each frame of the interference signal, determine the gray value of all pixels in each frame of the interference signal, determine the difference between the gray value of each pixel in each frame of the signal and the gray value of the pixel at the same position in the adjacent interference signal, and determine the maximum value among the differences of gray values ​​of each pixel as the signal strength difference between each frame of the interference signal and the adjacent interference signal.

[0107] The second determining module 26 includes a third determining submodule, a fourth determining submodule, and a display submodule: wherein,

[0108] The third determination submodule is used to determine the vibration change of the interference profile device based on the vibration coefficient; determine the vibration frequency of the interference profile device based on the acquisition frequency; obtain the vibration amount of the interference profile device based on the vibration change and the vibration frequency; and determine the vibration state based on the vibration amount. The vibration amount of the interference profile device is obtained by calculating the vibration change and the vibration frequency using one of the following methods: weighted summation, difference, quotient, or product.

[0109] The fourth determination submodule is used to obtain the vibration frequency of the interference profile device based on the acquisition frequency. Specifically, it includes: determining the target position of the pixel with the largest vibration change in the target frame interference signal, wherein the target frame signal belongs to a multi-frame interference signal; acquiring signals at the target position according to the acquisition frequency and determining the number of acquired signals; and determining the product of the number of signals and the acquisition frequency as the vibration frequency of the interference profile device.

[0110] The display submodule is used to display the vibration state of the interference profile device when the vibration amount is less than the preset vibration threshold, which is used to characterize that the interference profile device has met the measurement requirements.

[0111] Specifically, the vibration quantity and related parameters calculated based on the vibration quantity are displayed on the control software interface of the interference profile device, thereby displaying the vibration status. Those skilled in the art will understand that the vibration status can be a value, an image, information indicating whether it is measurable, a color mark, or a measurement compliance indicator, etc.

[0112] In summary, the method, device, and measurement system for determining the vibration state of the interference profile device used in this application have the following advantages:

[0113] 1. This application uses the built-in beam splitting system, signal acquisition module, and storage medium of the interference profiler itself to measure vibration in real time, without interference or additional cost;

[0114] 2: The vibration measurement method used in this application is applicable to various light sources, not limited to the measurement of interference signals from laser or natural light;

[0115] 3: The method for determining the vibration state of the interference profile device provided in this application uses the maximum value of the signal difference between adjacent frames and the sampling frequency for calculation. It does not require searching for bright fringes, does not require considering regional correlation, does not require clearly distinguishable interference fringes or relatively flat planes, and is basically applicable to the measurement samples of all interferometers. Moreover, it requires less calculation and is fast and efficient.

[0116] According to another aspect of the embodiments of this application, a non-volatile storage medium is also provided, including a stored program, wherein, when the program is running, the device where the non-volatile storage medium is located is controlled to execute the method for determining the vibration state of the interference profile device described above.

[0117] According to another aspect of the embodiments of this application, an electronic device is also provided, including: a memory for storing program instructions; and a processor connected to the memory for running the program, wherein the program executes the method for determining the vibration state of the interference profile device.

[0118] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0119] In the above embodiments of this application, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0120] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. The device embodiments described above are merely illustrative; for example, the division of units can be a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some interfaces; indirect couplings or communication connections between units or modules may be electrical or other forms.

[0121] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0122] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0123] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as a USB flash drive, read-only memory (ROM), random access memory (RAM), portable hard drive, magnetic disk, or optical disk.

[0124] The above are merely preferred embodiments of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A method for determining the vibration state of an interference profile device, characterized in that, include: In response to the acquisition command, the signal acquisition module in the interference profile device is controlled to acquire multiple frames of interference signals; Obtain the signal intensity difference between adjacent signals in the multi-frame interference signal, and compare the magnitude of each signal intensity difference; The vibration coefficient is determined based on the comparison results, and the acquisition frequency of the multi-frame interference signal is also determined. The vibration state of the interference profile device is determined based on the vibration coefficient and the acquisition frequency. Determining the vibration coefficient based on the comparison results includes: determining the signal intensity of each frame of the multi-frame interference signal; determining the signal intensity difference between each frame of the interference signal and adjacent interference signals; comparing the magnitudes of the various signal intensity differences, and determining the maximum value among the various signal intensity differences in the comparison results; and determining the maximum value as the vibration coefficient. The signal intensity difference between each frame of interference signal and the adjacent interference signal is determined by subtracting the gray value of each pixel in the interference signal from the gray value of the pixel at the same position. Determining the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency includes: determining the vibration change of the interference profile device based on the vibration coefficient; determining the vibration frequency of the interference profile device based on the acquisition frequency; obtaining the vibration magnitude of the interference profile device based on the vibration change and the vibration frequency; and determining the vibration state based on the vibration magnitude. The step of determining the vibration frequency of the interference profile device based on the acquisition frequency includes: determining the target position of the pixel with the largest vibration change in the target frame interference signal, wherein the target frame interference signal belongs to the multi-frame interference signal; acquiring a signal at the target position according to the acquisition frequency, and determining the number of acquired signals; and determining the product of the number of signals and the acquisition frequency as the vibration frequency of the interference profile device.

2. The method according to claim 1, characterized in that, Determining the signal intensity difference between each frame of interference signal and adjacent interference signals includes: Traverse all pixels in each frame of the interference signal and determine the grayscale value of all pixels in each frame of the interference signal; Determine the difference between the gray value of each pixel in each frame of the interference signal and the gray value of the pixel at the same position in the adjacent interference signal; The maximum value among the differences in grayscale values ​​of each pixel is determined as the signal intensity difference between each frame of interference signal and the adjacent interference signal.

3. The method according to claim 1, characterized in that, The vibration amount of the interference profile device is obtained by calculating either the weighted summation or the product of the vibration change and the vibration frequency.

4. The method according to claim 1, characterized in that, The method for determining vibration state based on vibration quantity further includes: When the vibration amount of the interference profile device is less than a preset vibration threshold, the vibration state of the interference profile device is displayed to characterize that the interference profile device has met the measurement requirements.

5. A vibration state measurement system for an interference profile device, characterized in that, include: Target processor and interference profiler; The target processor is connected to the interference contour device; The target processor is used to respond to the acquisition command, control the signal acquisition module in the interference profile device to acquire multiple frames of interference signals; obtain the intensity difference between adjacent signals in the multiple frames of interference signals, and compare the magnitude of each signal intensity difference; The vibration coefficient is determined based on the comparison results, and the acquisition frequency of the multi-frame interference signal is determined; the vibration amount of the interference profile device is determined based on the vibration coefficient and the acquisition frequency, and the vibration state is determined based on the vibration amount; When the vibration amount of the interference profile device is less than a preset vibration threshold, the target processor is also used to control the interference profile device to measure the object being measured. Determining the vibration coefficient based on the comparison results includes: determining the signal intensity of each frame of the multi-frame interference signal; determining the signal intensity difference between each frame of the interference signal and adjacent interference signals; comparing the magnitudes of the various signal intensity differences, and determining the maximum value among the various signal intensity differences in the comparison results; and determining the maximum value as the vibration coefficient. The signal intensity difference between each frame of interference signal and the adjacent interference signal is determined by subtracting the gray value of each pixel in the interference signal from the gray value of the pixel at the same position. Determining the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency includes: determining the vibration change of the interference profile device based on the vibration coefficient; determining the vibration frequency of the interference profile device based on the acquisition frequency; obtaining the vibration magnitude of the interference profile device based on the vibration change and the vibration frequency; and determining the vibration state based on the vibration magnitude. The step of determining the vibration frequency of the interference profile device based on the acquisition frequency includes: determining the target position of the pixel with the largest vibration change in the target frame interference signal, wherein the target frame interference signal belongs to the multi-frame interference signal; acquiring a signal at the target position according to the acquisition frequency, and determining the number of acquired signals; and determining the product of the number of signals and the acquisition frequency as the vibration frequency of the interference profile device.

6. A device for determining the vibration state of an interference profile device, characterized in that, include: The acquisition module is used to control the signal acquisition module in the interference profile device to acquire multiple frames of interference signals in response to acquisition commands; The acquisition module is used to acquire the signal intensity difference between adjacent signals in the multi-frame interference signal and compare the magnitude of each signal intensity difference; The first determining module is used to determine the vibration coefficient based on the comparison results and to determine the acquisition frequency of the multi-frame interference signal; The second determining module is used to determine the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency; Determining the vibration coefficient based on the comparison results includes: determining the signal intensity of each frame of the multi-frame interference signal; determining the signal intensity difference between each frame of the interference signal and adjacent interference signals; comparing the magnitudes of the various signal intensity differences, and determining the maximum value among the various signal intensity differences in the comparison results; and determining the maximum value as the vibration coefficient. The signal intensity difference between each frame of interference signal and the adjacent interference signal is determined by subtracting the gray value of each pixel in the interference signal from the gray value of the pixel at the same position. Determining the vibration state of the interference profile device based on the vibration coefficient and the acquisition frequency includes: determining the vibration change of the interference profile device based on the vibration coefficient; determining the vibration frequency of the interference profile device based on the acquisition frequency; obtaining the vibration magnitude of the interference profile device based on the vibration change and the vibration frequency; and determining the vibration state based on the vibration magnitude. The step of determining the vibration frequency of the interference profile device based on the acquisition frequency includes: determining the target position of the pixel with the largest vibration change in the target frame interference signal, wherein the target frame interference signal belongs to the multi-frame interference signal; acquiring a signal at the target position according to the acquisition frequency, and determining the number of acquired signals; and determining the product of the number of signals and the acquisition frequency as the vibration frequency of the interference profile device.

7. A non-volatile storage medium, characterized in that, The non-volatile storage medium includes a stored program, wherein, when the program is executed, it controls the device containing the non-volatile storage medium to perform the method for determining the vibration state of the interference profile device according to any one of claims 1 to 4.

Images