Spectrometer debugging method and auxiliary device
By debugging the spectrometer through a spectroscope and spectral detection equipment, and utilizing the change in reflected spectrum intensity to optimize the image plane coincidence, the problems of time-consuming and poor precision in spectrometer debugging were solved, thus achieving efficient and accurate spectrometer debugging.
Patent Information
- Application Number
- CN202211609995.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-12-12
- Publication Date
- 2025-09-09
- Estimated Expiration
- 2042-12-12
AI Technical Summary
Existing spectrometer debugging methods are time-consuming and have poor accuracy. It is difficult to achieve optimal overlap between the photodetector and the spectrometer image plane, and only standard light sources can be used, which cannot cover all wavelengths.
Using a spectroscope and spectrum detection equipment, the spectrometer is debugged by adjusting the change of reflected spectrum intensity. The image plane conjugation principle and spectrum intensity characteristics are utilized to support multiple incident light sources and optimize the image plane coincidence.
It improves the accuracy and efficiency of spectrometer debugging, simplifies the debugging process, supports multiple light sources, and achieves more comprehensive image plane coincidence optimization.
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Figure CN116026461B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of spectrum analysis, and in particular to a spectrometer debugging method and an auxiliary device. Background Art
[0002] When conventional spectrometers based on the principle of dispersion spectroscopy use planar or linear array photodetectors for spectral acquisition, it is often necessary to adjust the position or angle of the optical elements or photodetectors of the spectrometer to make the photodetector and the spectrometer image plane completely coincide with each other, so as to achieve the optimal optical resolution within the sensing spectrum band. However, the current mainstream debugging method is based on the principle that the narrower the characteristic peak of the standard light source of atomic emission, the higher the degree of image plane coincidence. Specifically, a standard light source (such as a mercury lamp or an argon lamp) is used to illuminate the spectrometer, and then the position or angle of the optical elements inside the spectrometer is adjusted so that the characteristic peak of the standard light source appears as the narrowest spectral peak on the readout signal of the spectrometer. As shown in the attached figure Figure 1 , attached Figure 1 A schematic diagram of the characteristic peaks of a standard light source in the spectrometer readout signal is shown, where the horizontal axis represents the wavelength λ of the light and the vertical axis represents the light intensity p. When each characteristic peak reaches its narrowest, it indicates that the spectrometer's photodetector and the spectrometer image plane coincide. This debugging method is difficult to control and relies primarily on human experience. The debugging process is time-consuming and lacks a clear optimal standard. Furthermore, the accuracy of determining the degree of coincidence between the photodetector and the spectrometer image plane is poor, resulting in the inability to optimize the spectrometer's resolution. Furthermore, the use of a standard light source is necessary, which cannot cover all wavelengths of the spectrometer. Summary of the Invention
[0003] In order to solve the above problems, the present invention provides a spectrometer debugging method and auxiliary device, which are simpler and faster than traditional debugging methods, and have higher debugging accuracy. It can support multiple incident light sources and can more comprehensively realize the image plane coincidence optimization of the spectrometer.
[0004] The present invention is implemented by the following scheme: A spectrometer debugging method includes the steps of:
[0005] Providing a spectroscope, and disposing the spectroscope at the entrance of the spectroscope to be debugged at a certain angle to the principal optical axis of the spectroscope to be debugged, wherein the side of the spectroscope relatively far from the spectroscope to be debugged is defined as a first mirror surface, and the side relatively close to the spectroscope to be debugged is defined as a second mirror surface;
[0006] Providing a light source, using the light source to emit incident light toward the first mirror surface along the direction of the main optical axis, the incident light being split by the spectroscope and then incident upon the spectrometer to be debugged, and being reflected by the spectroscope to be debugged back to the second mirror surface of the spectroscope to form a beam of reflected light;
[0007] A spectral detection device is provided that can disperse the light beam in the wavelength or frequency dimension and characterize the light intensity of different wavelengths. During the debugging of the spectrometer to be debugged, the spectral detection device is used to detect the spectral intensity of the reflected light, and the change in the spectral intensity of each band is observed. The spectrometer to be debugged is debugged in a targeted manner based on the principle that the stronger the spectral intensity, the higher the image plane overlap, until the spectral intensity value of each band reaches a preset spectral intensity standard.
[0008] A further improvement of the spectrometer debugging method of the present invention is that the step of obtaining the preset spectral intensity standard includes:
[0009] Before debugging the spectrometer to be debugged, a debugged standard spectrometer is first provided, wherein the wavelength types adapted by the standard spectrometer cover all the wavelength types adapted by the spectrometer to be debugged;
[0010] emitting the incident light toward the standard spectrometer;
[0011] The spectrum detection device is used to detect the spectrum intensity of the reflected light reflected by the incident light through the standard spectrometer, and the detected spectrum intensity of each band is used as the preset spectrum intensity standard.
[0012] The further improvement of the spectrometer debugging method of the present invention is:
[0013] The spectrometer to be debugged comprises a housing provided with an entrance, and a first focusing mirror, a dispersive element, a second focusing mirror and a photodetector sequentially arranged in the housing;
[0014] The method for debugging the spectrometer to be debugged includes debugging the position and / or angle of any one of the first focusing mirror, the dispersion element, the second focusing mirror and the photodetector, or the position and / or angle of a combination of two or more thereof, based on the principle that the stronger the spectral intensity, the higher the image plane coincidence, until the spectral intensity value of each band reaches a preset spectral intensity standard.
[0015] The present invention also provides a spectrometer debugging auxiliary device, comprising: a spectroscope arranged at an entrance of the spectrometer to be debugged at a certain angle to the main optical axis of the spectrometer to be debugged, wherein the side of the spectroscope relatively far from the spectrometer to be debugged is a first mirror surface, and the side relatively close to the spectrometer to be debugged is a second mirror surface;
[0016] a light source for emitting incident light toward the first mirror surface along the direction of the main optical axis;
[0017] A spectrum detection device is used to detect the spectral intensity of the reflected light reflected by the spectrometer to be debugged to the entrance and reflected by the second mirror. The spectrum detection device can disperse the light beam in the wavelength or frequency dimension and characterize the light intensity of different wavelengths.
[0018] A further improvement of the spectrometer debugging auxiliary device of the present invention is that the spectrometer to be debugged includes a shell with an entrance and a first focusing mirror, a dispersion element, a second focusing mirror and a photodetector which are sequentially arranged in the shell and have adjustable positions and angles.
[0019] A further improvement of the spectrometer debugging auxiliary device of the present invention is that the wavelength types of the incident light cover all wavelength types adapted by the spectrometer to be debugged.
[0020] A further improvement of the spectrometer debugging auxiliary device of the present invention is that the optional types of the spectrum detection equipment include spectrum analyzers, Fourier transform spectrometers, hyperspectral equipment and imaging spectrometers.
[0021] A further improvement of the spectrometer debugging auxiliary device of the present invention is that the light source is a broadband light source.
[0022] A further improvement of the spectrometer debugging auxiliary device of the present invention is that the optional types of the broadband light source include halogen lamps, LED lamps and xenon lamps.
[0023] A further improvement of the spectrometer debugging auxiliary device of the present invention is that the optional types of the spectroscope include a Boca spectroscope, a spectroscopic cube and a plate beam splitter.
[0024] The present invention includes but is not limited to the following beneficial effects:
[0025] 1. The present invention is based on the principle of image plane conjugation and the characteristic that spectral intensity is very sensitive to the distance between the photodetector and the spectrometer image plane. The change in the intensity of the reflected spectrum in each band is used to characterize the degree of overlap between the photodetector and the spectrometer image plane to be tested, greatly improving the accuracy of spectrometer debugging.
[0026] 2. It has clear deviation indicators, which can distinguish the deviation between the photodetector and the spectrometer image plane through the change of spectral shape, and then carry out targeted debugging, making debugging simpler and faster.
[0027] 3. The incident light source supports multiple types, not limited to standard light sources, which can more comprehensively optimize the image plane coincidence of the spectrometer. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] Figure 1 A schematic diagram showing characteristic peaks of a standard light source in a spectrometer readout signal when using a traditional debugging method is shown.
[0029] Figure 2 The figure shows the arrangement of the components when the auxiliary device of the present invention is used to debug the spectrometer.
[0030] Figure 3 An example diagram showing the corresponding relationship between the change in the spectral shape of the reflected light detected by the method of the present invention and the image plane deviation state is shown. DETAILED DESCRIPTION
[0031] See Figure 1 and cooperate with Figure 2 As shown, a typical spectrometer 1 to be debugged includes a housing 11 with an entrance 12, and a first focusing mirror 13, a dispersive element 14, a second focusing mirror 15, and a photodetector 17, which are sequentially arranged within the housing 11 and are adjustable in position and angle. Based on the above-described structure of the spectrometer 1 to be debugged, the principal light entering the spectrometer 1 through the entrance 12 travels along the principal optical axis and passes through the first focusing mirror 13, the dispersive element 14, and the second focusing mirror 15 in sequence before striking the photodetector 17. A virtual spectrometer image plane 16 is then formed in front of the photodetector 17. The dispersive element 14 disperses the principal light according to the diffraction angles of different wavelength bands, and then strikes the photodetector 17 in a golden parallel manner, thereby enabling different wavelength bands of the principal light to correspond to different positions on the photodetector 17. Deviations in the position or angle of the photodetector 17 will result in unclear imaging. Therefore, the spectrometer 1 to be debugged requires image plane debugging before use. A higher degree of image plane overlap results in clearer imaging. The traditional debugging method is to use a standard light source (such as a mercury lamp or an argon lamp) to illuminate the spectrometer 1 to be debugged, and adjust the position or angle of the photodetector 17 or other optical components inside the spectrometer 1 to be debugged based on the principle that the narrower the characteristic peak of the standard light source, the higher the image plane overlap. In other words, during the debugging process, it is necessary to ensure that each characteristic peak presents the narrowest spectral peak on the readout signal of the spectrometer 1 to be debugged, such as Figure 1 This debugging method is difficult to control and relies primarily on human experience. It is time-consuming and lacks a clear optimal standard. Furthermore, the accuracy of determining the overlap between the photodetector and the spectrometer image plane is poor, preventing the spectrometer's resolution from being optimized. Furthermore, a standard light source must be used, which cannot cover all wavelengths of the spectrometer.
[0032] To address the above issues, the present invention provides a spectrometer debugging method and auxiliary device. Compared to traditional debugging methods, these methods are simpler, faster, and more accurate. They support a variety of incident light sources and enable more comprehensive optimization of spectrometer image plane coincidence. The following describes this spectrometer debugging method and auxiliary device using specific embodiments and accompanying drawings.
[0033] See Figure 2As shown, a spectrometer debugging auxiliary device includes: a spectrometer 2 arranged at a certain angle with the main optical axis O of the spectrometer 1 to be debugged at the entrance 12 of the spectrometer 1 to be debugged, wherein the side of the spectrometer 2 relatively far from the spectrometer 1 to be debugged is a first mirror surface, and the side relatively close to the spectrometer 1 to be debugged is a second mirror surface; a light source 3 for emitting incident light 5 toward the first mirror surface along the direction of the main optical axis O; and a spectrum detection device 4 for detecting the spectral intensity of reflected light 53 reflected from the spectrometer 1 to be debugged to the entrance 12 and reflected by the second mirror surface. The spectrum detection device 4 can disperse the light beam in the wavelength or frequency dimension and characterize the light intensity of different wavelengths.
[0034] In this embodiment, the wavelength types of the incident light 5 cover all wavelength types adapted by the spectrometer 1 to be debugged. This wavelength type primarily refers to an optical path with good image-side principal ray parallelism and a high degree of perpendicularity to the surface of the photodetector 17, where the image side refers to the position of the photodetector 17. Preferably, the light source 3 can be a broadband light source such as a halogen lamp, LED lamp, or xenon lamp. The wavelength types adapted by the spectrum detection device 4 cover all wavelength types adapted by the spectrometer 1 to be debugged, so as to cover all wavelength types of the spectrometer 1 to be debugged. Spectral detection devices such as spectrum analyzers, Fourier transform spectrometers, hyperspectral devices, and imaging spectrometers can be used. The spectroscope 2 can be a spectroscopic device such as a Boca spectroscope, a spectroscopic cube, or a beam splitter. The position of the spectroscope 2, the angle between the spectroscope 2 and the principal optical axis O, and the positions of the light source 3 and the spectrum detection device 4 should ensure that the incident light 5 emitted by the light source 3 forms two beams after passing through the spectroscope 2: one is the first incident light 51 that passes through the spectroscope 2 and enters the spectrometer 1 to be debugged, and the other is the second incident light 52 that is reflected by the first mirror surface. The angle between the spectroscope 2 and the principal optical axis O mainly depends on the structure of the spectroscope 2 itself. In this embodiment, the angle is preferably 45°.
[0035] Since the photodetector 17 in the spectrometer to be debugged is generally a semiconductor, it has a certain reflectivity for the incident light and can be used as a reflector. Therefore, based on the principle of image plane conjugation and the characteristic that the spectral intensity is very sensitive to the distance between the photodetector and the spectrometer image plane, the present invention provides a spectrometer debugging method, which is mainly implemented by using the above-mentioned spectrometer debugging auxiliary device, see Figure 2 As shown, the specific steps include:
[0036] Step 1: Provide a spectrometer 1 to be debugged and the above-mentioned spectrometer debugging auxiliary device, and set a spectroscope 2 at the entrance 12 of the spectrometer 1 to be debugged at a certain angle to the main optical axis O of the spectrometer 1 to be debugged. The side of the spectroscope 2 relatively far from the spectrometer 1 to be debugged is set as the first mirror surface, and the side relatively close to the spectrometer 1 to be debugged is set as the second mirror surface.
[0037] Step 2: Use the light source 3 to emit incident light 5 toward the first mirror surface along the direction of the main optical axis O. After the incident light 5 is split by the spectrometer 2, it forms a first incident light 51 that is incident on the spectrometer to be debugged 1. The first incident light 51 is reflected by the photodetector 17 of the spectrometer to be debugged 1 back to the second mirror surface of the spectrometer 2 to form a beam of reflected light 53.
[0038] Step 3: Debug the spectrometer 1 to be debugged. During the debugging process, use the spectrum detection device 4 to detect the spectral intensity of the reflected light 53, observe the changes in the spectral intensity of each band, and debug the spectrometer 1 to be debugged in a targeted manner based on the principle that the stronger the spectral intensity, the higher the image plane overlap, until the spectral intensity value of each band reaches the preset spectral intensity standard.
[0039] Specifically, the method for debugging the spectrometer 1 to be debugged includes adjusting the position and / or angle of any one of the first focusing lens 13, the dispersion element 14, the second focusing lens 15, and the photodetector 17, or the positions and / or angles of any two or more combinations thereof, based on the principle that a higher spectral intensity corresponds to a higher image plane overlap, until the spectral intensity values of each band reach a preset spectral intensity standard. However, to make debugging more intuitive and simple, the position and angle of the photodetector 17 are usually prioritized.
[0040] The steps of obtaining the preset spectral intensity standard include: before debugging the spectrometer 1 to be debugged, first provide a debugged standard spectrometer, the wavelength types adapted by the standard spectrometer cover all wavelength types adapted by the spectrometer to be debugged; emit the incident light 5 to the standard spectrometer; use the spectrum detection device 4 to detect the spectral intensity of the reflected light reflected by the incident light 5 through the standard spectrometer, and use the detected spectral intensity of each band as the preset spectral intensity standard. Among them, the standard spectrometer can adopt a spectrometer of the same specifications as the spectrometer 1 to be debugged, and the debugging method of the standard spectrometer can adopt the traditional debugging method for initial adjustment, and then fine-tune it according to the principle that the stronger the spectral intensity, the higher the image plane overlap. Other debugging methods familiar to the art can also be used for debugging. Of course, the preset spectral intensity standard can also be directly set to the strongest spectral intensity value of each band, or it can be determined by the experience of those skilled in the art combined with calculation. The use of this method sets the preset spectral intensity standard as known.
[0041] This method specifically debugs the spectrometer 1 to be debugged based on the principle that the stronger the spectral intensity, the higher the image plane overlap. The implementation of this targeted debugging is mainly based on: first, the spectrometer 1 to be debugged can itself correspond to different positions on the photodetector 17 for each band of the first incident light 51; second, the photodetector 17 can reflect the first incident light 51 and return it to the entrance 12 along the original path; third, the closer the photodetector 17 is to the spectral image plane 16, the stronger the spectral intensity of the detected reflected light 53, and conversely, the farther the distance, the weaker the spectral intensity.
[0042] Based on the above three aspects, the change in the spectral intensity of each band in the reflected light 53 detected by the spectrum detection device 4 can represent the image plane coincidence. Figure 3 , Figure 3 An example diagram showing the corresponding relationship between the change in the spectral shape of the reflected light detected by the method of the present invention and the image plane deviation state is shown. From left to right, three corresponding relationships are shown: (1) When the photodetector 17 completely coincides with the spectrometer image plane 16, the spectral intensity p of each band of reflected light (i.e., different wavelength λ range segments) detected by the spectrum detection device 4 is the strongest, and the spectrum intensity change curve a is a high-intensity horizontal line; (2) When the photodetector 17 is parallel to the spectrometer image plane 16 (including the photodetector 17 being offset to the left or to the right as a whole), the spectral intensity p of each band of reflected light detected by the spectrum detection device 4 is relatively weak, and the spectrum intensity change curve a is a weak-intensity horizontal line; (3) When the photodetector 17 is partially offset from the spectrometer image plane 16 (i.e., the photodetector 17 is tilted, including tilted to the left or tilted to the right), the spectral intensity p of the band of reflected light detected by the spectrum detection device 4 close to the spectrometer image plane 16 is relatively strong, and the spectral intensity p of the band far from the spectrometer image plane 16 is relatively weak, and the spectral intensity change curve a is a slant line. Therefore, by observing the changes in the spectral intensity of each band, the spectrometer 1 to be debugged can be debugged in a targeted manner.
[0043] The present invention is based on the image plane conjugation principle and the property that spectral intensity is very sensitive to the distance between the photodetector and the spectrometer image plane. The change in the intensity of the reflected spectrum in each band is used to characterize the degree of overlap between the photodetector and the spectrometer image plane to be measured. The deviation between the photodetector and the spectrometer image plane is distinguished by the change in the spectral shape. Then, targeted debugging is carried out, making debugging simpler and faster, greatly improving the accuracy of spectrometer debugging, and is not limited to standard light sources. It can achieve more comprehensive optimization of the spectrometer image plane overlap.
[0044] The present invention has been described in detail above with reference to the embodiments of the accompanying drawings. A person skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details in the embodiments should not be construed as limiting the present invention. The scope of protection of the present invention shall be determined by the scope defined in the appended claims.
Claims
1. A spectrometer debugging method, characterized in that: Including steps: Providing a spectroscope, and disposing the spectroscope at the entrance of the spectroscope to be debugged at a certain angle to the principal optical axis of the spectroscope to be debugged, wherein the side of the spectroscope relatively far from the spectroscope to be debugged is defined as a first mirror surface, and the side relatively close to the spectroscope to be debugged is defined as a second mirror surface; Providing a light source, using the light source to emit incident light toward the first mirror surface along the direction of the main optical axis, the incident light being split by the spectroscope and then incident upon the spectrometer to be debugged, and being reflected by the spectroscope to be debugged back to the second mirror surface of the spectroscope to form a beam of reflected light; A spectral detection device is provided that can disperse the light beam in the wavelength or frequency dimension and characterize the light intensity of different wavelengths. During the debugging of the spectrometer to be debugged, the spectral detection device is used to detect the spectral intensity of the reflected light, and the change in the spectral intensity of each band is observed. The spectrometer to be debugged is debugged in a targeted manner based on the principle that the stronger the spectral intensity, the higher the image plane overlap, until the spectral intensity value of each band reaches a preset spectral intensity standard.
2. The spectrometer debugging method according to claim 1, wherein: The step of obtaining the preset spectral intensity standard includes: Before debugging the spectrometer to be debugged, a debugged standard spectrometer is first provided, wherein the wavelength types adapted by the standard spectrometer cover all the wavelength types adapted by the spectrometer to be debugged; emitting the incident light toward the standard spectrometer; The spectrum detection device is used to detect the spectrum intensity of the reflected light reflected by the incident light through the standard spectrometer, and the detected spectrum intensity of each band is used as the preset spectrum intensity standard.
3. The spectrometer debugging method according to claim 1, wherein: The spectrometer to be debugged comprises a housing provided with an entrance, and a first focusing mirror, a dispersive element, a second focusing mirror and a photodetector sequentially arranged in the housing; The method for debugging the spectrometer to be debugged includes debugging the position and / or angle of any one of the first focusing mirror, the dispersion element, the second focusing mirror and the photodetector, or the position and / or angle of a combination of two or more thereof, based on the principle that the stronger the spectral intensity, the higher the image plane coincidence, until the spectral intensity value of each band reaches a preset spectral intensity standard.
4. A spectrometer debugging auxiliary device, characterized in that: include: A spectroscope is provided at the entrance of the spectrometer to be debugged at a certain angle to the main optical axis of the spectrometer to be debugged, wherein the side of the spectroscope relatively far from the spectrometer to be debugged is a first mirror surface, and the side relatively close to the spectrometer to be debugged is a second mirror surface; a light source for emitting incident light toward the first mirror surface along the direction of the main optical axis; A spectrum detection device is used to detect the spectral intensity of the reflected light reflected by the spectrometer to be debugged to the entrance and reflected by the second mirror. The spectrum detection device can disperse the light beam in the wavelength or frequency dimension and characterize the light intensity of different wavelengths.
5. The spectrometer debugging auxiliary device according to claim 4, characterized in that: The spectrometer to be debugged comprises a shell with an entrance, and a first focusing mirror, a dispersive element, a second focusing mirror and a photoelectric detector which are sequentially arranged in the shell and have adjustable positions and angles.
6. The spectrometer debugging auxiliary device according to claim 4, characterized in that: The wavelength types of the incident light cover all wavelength types adapted by the spectrometer to be debugged.
7. The spectrometer debugging auxiliary device according to claim 4, wherein: The optional types of the spectrum detection device include spectrum analyzers, Fourier transform spectrometers, hyperspectral devices and imaging spectrometers.
8. The spectrometer debugging auxiliary device according to claim 4, wherein: The light source is a broad-spectrum light source.
9. The spectrometer debugging auxiliary device according to claim 8, characterized in that: The optional types of the broad spectrum light source include halogen lamps, LED lamps and xenon lamps.
10. The spectrometer debugging auxiliary device according to claim 4, characterized in that: Optional types of the beam splitter include a Boca beam splitter, a beam splitter cube, and a plate beam splitter.
Citation Information
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