Substrate holding robot and substrate handling robot

Abstract

The substrate holding robot (1) is provided with: a frame (10); a blade (20) supported to the frame; a pair of front support portions (21a, 21b) provided on the front end portion (20a) side of the blade to support a substrate (W); and a pair of rear support portions (22a, 22b) provided on the base end portion (20b) side of the blade to support the substrate. The frame, the pair of front support portions, and the pair of rear support portions are provided in a V shape.

Description

TECHNICAL FIELD

[0001] The present invention relates to a substrate holding robot and a substrate transfer robot, and particularly relates to a substrate holding robot and a substrate transfer robot provided with a frame and a blade. BACKGROUND

[0002] Conventionally, a substrate holding robot provided with a frame and a blade is known. For example, such a robot is disclosed in Japanese Patent Application Publication No. 2013-69914.

[0003] In Japanese Patent Application Publication No. 2013-69914, a substrate transfer robot (substrate holding robot) for transferring a substrate is disclosed. The substrate transfer robot is provided with a frame and a robot main body portion (blade) supported by the frame and supporting the substrate. The width of the frame of the substrate transfer robot is substantially the same as the width of the robot main body portion.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2013-69914

[0005] In the substrate transfer robot described in Japanese Patent Application Publication No. 2013-69914, the width of the frame is substantially the same as the width of the robot main body portion (blade), and thus there is a problem in that the width of the frame is large. On the other hand, in the substrate transfer robot described in Japanese Patent Application Publication No. 2013-69914, it can be considered that there is a portion in the frame that is not effectively utilized for ensuring the rigidity of the substrate transfer robot, and thus it can be considered that there is room for ensuring the rigidity (mechanical strength) of the substrate holding robot and reducing the width of the frame. Therefore, in the substrate transfer robot described in Japanese Patent Application Publication No. 2013-69914, it can be considered that there is a problem in that it is difficult to ensure the rigidity (mechanical strength) of the substrate holding robot and reduce the width of the frame. In addition, it can be considered that there is a problem in that, in a case where it is not possible to reduce the width of the frame, it is difficult to secure a space for arranging components in the lateral direction of the frame, and it is difficult to easily maintain (service) components arranged in the lateral direction of the frame. SUMMARY

[0006] An object of the present invention is to provide a substrate holding robot and a substrate transfer robot capable of ensuring the rigidity (mechanical strength) of the substrate holding robot, reducing the width of the frame, thereby securing a space for arranging components in the lateral direction of the frame in correspondence therewith, and easily maintaining (servicing) components arranged in the lateral direction of the frame.

[0007] The substrate holding robot according to the first aspect of the present application includes: a frame; a blade supported to the frame; a pair of front support portions provided at a front end portion side of the blade and supporting a substrate; and a pair of rear support portions provided at a base end portion side of the blade and supporting the substrate, the frame, the pair of front support portions, and the pair of rear support portions being provided in a V-shape. In the present application, the V-shape includes not only a shape in which a base end portion of a V is an acute angle, but also a shape in which the base end portion of the V has a rounded corner like a U.

[0008] The substrate handling robot according to the second aspect of the present application includes: a substrate holding robot according to the first aspect of the present application; and an arm that moves the substrate holding robot.

[0009] According to the present application, as described above, the frame, the pair of front support portions, and the pair of rear support portions are provided in a V-shape, whereby a portion in the frame that is not effectively used for securing the rigidity of the substrate holding robot can be suppressed. As a result, the rigidity (mechanical strength) of the substrate holding robot can be secured, and the width of the frame can be reduced, whereby a space in which components are arranged laterally of the frame can be secured, and the components arranged laterally of the frame can be easily repaired (maintained). BRIEF DESCRIPTION OF DRAWINGS

[0010] Figure 1 FIG. 1 is a diagram showing the structure of a substrate handling robot according to an embodiment of the present application.

[0011] Figure 2 FIG. 2 is a perspective view showing the structure of a substrate holding robot according to an embodiment of the present application.

[0012] Figure 3 FIG. 3 is a plan view showing the structure of the substrate holding robot according to an embodiment of the present application.

[0013] Figure 4 FIG. 4 is a diagram for explaining the relationship between a frame, front support portions, and rear support portions of the substrate holding robot according to an embodiment of the present application.

[0014] Figure 5 FIG. 5 is a diagram for explaining the relationship between a frame, front support portions, and rear support portions of a substrate holding robot according to a comparative example.

[0015] Figure 6 FIG. 6 is a diagram for explaining the rigidity of a cantilever beam.

[0016] Figure 7 This is a diagram of a substrate holding robot according to an embodiment of the present invention as viewed in the X1 direction.

[0017] Figure 8 This is a diagram of a substrate holding robot according to an embodiment of the present invention as viewed in the X2 direction. DETAILED DESCRIPTION

[0018] Hereinafter, one embodiment of the present invention which embodies the present invention will be described with reference to the drawings.

[0019] Reference Figures 1-8 , the structure of the substrate transport robot 100 based on this embodiment is described.

[0020] like Figure 1 As shown, the substrate transport robot 100 includes a substrate holding robot 1 and an arm 2 for moving the substrate holding robot 1. Figures 2-4 As shown, the substrate holding robot 1 includes a frame 10, a blade 20 supported by the frame 10, a pair of front support portions 21a and 21b provided on the front end 20a side (Y1 direction side) of the blade 20 and supporting a substrate (semiconductor wafer) W, and a pair of rear support portions 22a and 22b provided on the base end 20b side (Y2 direction side) of the blade 20 and supporting the substrate W. The frame 10, the pair of front support portions 21a and 21b, and the pair of rear support portions 22a and 22b are arranged so as to form a V-shape. In the present specification, the V-shape is a broad concept that includes not only a shape in which the base end of the V is an acute angle, but also a shape in which the base end of the V has rounded corners, such as a U-shape.

[0021] According to this embodiment, the frame 10, a pair of front support parts 21a and 21b, and a pair of rear support parts 22a and 22b are arranged in a V-shape, thereby ensuring the rigidity (mechanical strength) of the substrate holding robot 1, and reducing the width of the frame 10, thereby ensuring space for configuring components on the side of the frame 10 accordingly, and making it easy to repair (maintain) the components configured on the side of the frame 10.

[0022] The frame 10 includes a pair of side wall portions 10a and 10b. One side (10a) of the pair of side wall portions 10a and 10b is arranged to be disposed on a first line L1 connecting the base end portion 10c of the frame 10, one side (21a) of the pair of front support portions 21a and 21b, and one side (22a) of the pair of rear support portions 22a and 22b, and extends along the first line L1. The other side (10b) of the pair of side wall portions 10a and 10b is arranged to be disposed on a second line L2 connecting the base end portion 10c of the frame 10, the other side (21b) of the pair of front support portions 21a and 21b, and the other side (22b) of the pair of rear support portions 22a and 22b, and extends along the second line L2. Figure 4 The substrate holding robot 1 according to this embodiment has a different V-shaped structure. Figure 5 In the comparative example shown, the frame is not formed in a shape along a V-shaped line in a plan view, but is formed to have the same width as the width W3 of the base end portion of the blade and the width W4 of the frame.

[0023] Reference Figures 4-6 , the rigidity of the substrate holding robot 1 is described. Figure 6 In the cantilever beam 200 shown, the area secondary moment and the deflection amount are expressed by the following equations (1) and (2), respectively.

[0024] l=b×t 3 / 12···(1)

[0025] v=W / (3×E×l)×L 3 =4×W / (E×b×t 3 )×L 3 ···(2)

[0026] in,

[0027] l: Second moment of cross section;

[0028] b: width;

[0029] t: thickness;

[0030] v: deflection;

[0031] W: load;

[0032] E: Young's modulus;

[0033] L: length.

[0034] According to equations (1) and (2), the second moment of area of ​​the cantilever beam 200 is directly proportional to the cube of the thickness t, and the deflection of the cantilever beam 200 is inversely proportional to the cube of the thickness t. In other words, the thickness t has a significant impact on the rigidity of the cantilever beam 200.

[0035] The rigidity of the substrate holding robot is considered in the same manner as the cantilever beam 200. In the substrate holding robot, the frame, which is a portion having a large thickness t, greatly contributes to the rigidity, but in the substrate holding robot based on the comparative example shown in FIG. 6, the side wall portion of the frame having a large thickness t is not disposed on the ideal configuration disposition lines, i.e., the first line Ll and the second line L2, for ensuring the rigidity. Therefore, in the substrate holding robot based on the comparative example shown in FIG. 6, the side wall portion of the frame having a large thickness t is not effectively utilized for ensuring the rigidity. Figure 5 Figure 5 In the substrate holding robot based on the comparative example shown in FIG. 6, the side wall portion of the frame having a large thickness t is not effectively utilized for ensuring the rigidity.

[0036] On the other hand, in the substrate holding robot 1 based on the present embodiment shown in FIG. 1, the side wall portions 10a and 10b of the frame 10 having a large thickness t are disposed on the ideal configuration disposition lines, i.e., the first line Ll and the second line L2, for ensuring the rigidity. Therefore, in the substrate holding robot 1 based on the present embodiment shown in FIG. 1, the side wall portions 10a and 10b of the frame 10 having a large thickness t are effectively utilized for ensuring the rigidity. Figure 4 Figure 4 In the substrate holding robot 1 based on the present embodiment shown in FIG. 1, unlike the substrate holding robot based on the comparative example shown in FIG. 6, the side wall portions 10a and 10b of the frame 10 having a large thickness t are effectively utilized for ensuring the rigidity. As a result, in the substrate holding robot 1 based on the present embodiment shown in FIG. 1, high rigidity can be achieved. Figure 5 Figure 4

[0037] The width Wl of the frame 10 in the direction parallel to the direction in which the pair of front support portions 21a and 21b are aligned (X direction) is smaller than the width W2 of the base end portion 20b of the blade 20.

[0038] The substrate holding robot 1 further includes frame outer side members 30a and 30b disposed outside the frame 10 in the direction parallel to the direction in which the pair of front support portions 21a and 21b are aligned (X direction).

[0039] The frame outer side member 30a includes a speed controller for a cylinder. The frame outer side member 30b includes a read amplifier for a sensor. In addition, the frame outer side member can include only either one of the read amplifier for the sensor and the speed controller for the cylinder.

[0040] The frame outer side members 30a and 30b are disposed outside the pair of side wall portions 10a and 10b, respectively, in the direction parallel to the direction in which the pair of front support portions 21a and 21b are aligned (X direction).

[0041] As shown in FIG. 1, an opening portion 60a for communicating the inside with the outside is provided in the side wall portion 10a of the frame 10. As shown in FIG. 1, an opening portion 60b for communicating the inside with the outside is provided in the side wall portion 10b of the frame 10. Figure 7 Figure 3 Figure 7 ​​​​​​As shown, a connection member (air piping) 50a that connects the frame outer member 30a and the frame inner member (cylinder) 40a disposed inside the frame 10 is inserted through the opening 60a. Figure 8 As shown, the side wall portion 10b of the frame 10 is provided with an opening portion 60b that connects the inside and the outside. Figure 3 and Figure 8 As shown, a connection member (wiring) 50b that connects the frame outer member 30b and the frame inner member (substrate detection sensor) 40b disposed at a position corresponding to the inner side of the frame 10 is inserted through the opening 60b.

[0042] The opening 60a also serves as an opening for maintenance of the frame inner member 40a.

[0043] like Figure 3 and Figure 7 As shown, the frame inner member 40a includes a cylinder. The opening 60a is provided at a position overlapping the cylinder (frame inner member 40a) disposed inside the frame 10 when viewed from a direction (X direction) parallel to the direction in which the pair of front support portions 21a and 21b are arranged.

[0044] like Figure 1 As shown, the arm 2 is a horizontal multi-joint robot arm. The arm 2 includes a first arm 2a and a second arm 2b. The first arm 2a is configured to be rotatable relative to a base 3 described later with one end as the center of rotation. Specifically, one end of the first arm 2a is rotatably connected to the base 3 via a first joint. The second arm 2b is configured to be rotatable relative to the first arm 2a with one end as the center of rotation. Specifically, one end of the second arm 2b is rotatably connected to the other end of the first arm 2a via a second joint. In addition, a substrate holding robot 1 is rotatably connected to the other end of the second arm 2b via a third joint. A driving mechanism including a servo motor as a driving source for rotational drive, a rotation position sensor for detecting the rotation position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the joint is provided at each joint of the first joint, the second joint, and the third joint.

[0045] The substrate transport robot 100 also includes a base 3 to which the arm 2 is mounted, and an arm lift mechanism 4 to which the base 3 is mounted. The base 3 is configured such that one end is connected to one end of the first arm 2a, and the other end is connected to the arm lift mechanism 4. The arm lift mechanism 4 is configured to raise and lower the arm 2 by raising and lowering the base 3. The arm lift mechanism 4 includes a servo motor as a driving source for the raising and lowering drive, a rotational position sensor that detects the rotational position of the output shaft of the servo motor, and a power transmission mechanism that transmits the output of the servo motor to the base 3 (arm 2).

[0046] likeFigure 2 As shown, the substrate holding robot 1 is provided with a plurality of (four) blades 20. That is, the substrate holding robot 1 is configured to be able to carry (be able to hold) a plurality of (four) substrates W.

[0047] As shown, the substrate holding robot 1 is provided with a plurality of (four) blades 20. That is, the substrate holding robot 1 is configured to be able to carry (be able to hold) a plurality of (four) substrates W. Figure 2 and Figure 3 As shown, the substrate holding robot 1 is provided with a plurality of (four) blades 20. That is, the substrate holding robot 1 is configured to be able to carry (be able to hold) a plurality of (four) substrates W.

[0048] The blade 20 is a thin plate-shaped support plate that supports the substrate W. The blade 20 has a shape in which the front end portion 20a side is divided into two. In the blade 20, a pair of front support portions 21a and 21b are separately provided at the portions divided into two. The pair of front support portions 21a and 21b has a plurality of (two) support surfaces provided at different heights from each other. In addition, a pair of rear support portions 22a and 22b has support surfaces provided at substantially the same height as the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 21a and 21b. Furthermore, the "height" refers to the distance from the main surface 20c of the blade 20 in the direction perpendicular to the main surface 20c of the blade 20 (Z direction).

[0049] The pair of front support portions 21a and 21b and the pair of rear support portions 22a and 22b are provided on the main surface 20c of the blade 20. Each support surface of the pair of front support portions 21a and 21b and the pair of rear support portions 22a and 22b is configured to support the back surface (Z2 direction side surface) of the outer peripheral portion of the substantially circular-shaped substrate W from the lower side.

[0050] In a direction (X direction) parallel to the direction in which the pair of front support portions 21a and 21b are arranged, the pair of rear support portions 22a and 22b is disposed at a position inward of the pair of front support portions 21a and 21b (on the side closer to the center line L3). In addition, in the direction (X direction) parallel to the direction in which the pair of front support portions 21a and 21b are arranged, the pair of side wall portions 10a and 10b is disposed at a position inward of the pair of rear support portions 22a and 22b (on the side closer to the center line L3). Thus, the first line LI and the second line L2 (refer to Figure 4 ) become lines inclined with respect to the center line L3. In addition, the first line LI and the second line L2 are inclined toward opposite sides from each other with the center line L3 interposed therebetween. Further, the center line L3 is a center line extending in a direction (Y direction) orthogonal to the direction in which the pair of front support portions 21a and 21b are arranged and parallel to the main surface 20c of the blade 20.

[0051] In addition, the substrate holding robot 1 further has a movable support unit 71 for supporting the substrate W to move forward and backward, and a first movable pressing unit 72 and a second movable pressing unit 73 for pressing the substrate W to move forward and backward. The movable support unit 71 has a pair of support members 71a that support the substrate W, and a cylinder 71b that is an actuator for moving the pair of support members 71a forward and backward in the Y direction. The movable support unit 71 is configured to be able to advance the pair of support members 71a in the Yl direction by the cylinder 71b to dispose them at a support position that supports the substrate W. In addition, the movable support unit 71 is configured to be able to retreat the pair of support members 71a in the Y2 direction by the cylinder 71b to dispose them at a retreat position that does not support the substrate W. In addition, the pair of support members 71a has a support surface provided at substantially the same height as the support surface of the upper side (Zl direction side) of the pair of front support portions 21a and 21b. Each support surface of the pair of support members 71a is configured to support the back surface (the surface on the Z2 direction side) of the outer peripheral portion of the substantially circular substrate W from the lower side.

[0052] The first movable pressing unit 72 has a pair of pressing members 72a that press the substrate W, and a cylinder 72b that is an actuator for moving the pair of pressing members 72a forward and backward in the Y direction. The first movable pressing unit 72 is configured to be able to advance the pair of pressing members 72a in the Yl direction by the cylinder 72b to press the substrate W. In addition, the first movable pressing unit 72 is configured to be able to retreat the pair of pressing members 72a in the Y2 direction by the cylinder 72b to dispose them at a retreat position that does not press the substrate W.

[0053] The second movable pressing unit 73 includes a pair of pressing members 73a for pressing the substrate W, and an air cylinder 73b serving as an actuator for moving the pair of pressing members 73a forward and backward in the Y direction. The second movable pressing unit 73 is configured so that the air cylinder 73b can advance the pair of pressing members 73a in the Y1 direction to press the substrate W. Furthermore, the air cylinder 73b can retract the pair of pressing members 73a in the Y2 direction to dispose them in a retracted position where they are not pressing the substrate W.

[0054] In the substrate holding robot 1, the support surfaces on the upper side (Z1 direction side) of the pair of front support parts 21a and 21b and the support surfaces of the pair of support members 71a of the movable support unit 71 support the processed (cleaned) substrate W. Furthermore, the pair of pressing members 72a of the first movable pressing unit 72 presses the processed (cleaned) substrate W supported by the support surfaces on the upper side (Z1 direction side) of the pair of front support parts 21a and 21b and the support surfaces of the pair of support members 71a of the movable support unit 71.

[0055] In the substrate holding robot 1, the support surfaces on the lower side (Z2 direction side) of the pair of front support parts 21a and 21b and the support surfaces of the pair of rear support parts 22a and 22b support the substrate W before processing (before cleaning). Furthermore, the pair of pressing members 73a of the second movable pressing unit 73 press the substrate W before processing (before cleaning) supported by the support surfaces on the lower side (Z2 direction side) of the pair of front support parts 21a and 21b and the support surfaces of the pair of rear support parts 22a and 22b. The pair of front support parts 21a and 21b, the pair of rear support parts 22a and 22b, the movable supporting unit 71, the first movable pressing unit 72, and the second movable pressing unit 73 are used separately for substrates W before processing (before cleaning) and substrates W after processing (after cleaning).

[0056] The cylinder 71b of the movable support unit 71, the cylinder 72b of the first movable pressing unit 72, and the cylinder 73b of the second movable pressing unit 73 are arranged as the frame inner member 40a on the inner side of the frame 10. Furthermore, the cylinder 71b of the movable support unit 71, the cylinder 72b of the first movable pressing unit 72, and the cylinder 73b of the second movable pressing unit 73 are arranged side by side on the inner side of the frame 10 along a direction (Z direction) perpendicular to the main surface 20c of the blade 20. Specifically, when viewed from the direction (Z direction) perpendicular to the main surface 20c of the blade 20, the cylinder 71b of the movable support unit 71, the cylinder 72b of the first movable pressing unit 72, and the cylinder 73b of the second movable pressing unit 73 are arranged so as to overlap. Thus, since the air cylinders 71b, 72b, and 73b are not arranged side by side in the width direction (X direction) of the frame 10, the air cylinders 71b, 72b, and 73b can be compactly arranged in the width direction (X direction) of the frame 10.

[0057] In addition, the substrate holding robot 1 further includes a cover (housing) 80 provided separately from the frame 10 (see Figure 2 The cover 80 is provided to cover a portion (a portion disposed inside the frame 10 ) of the frame 10 , the movable support unit 71 , the first movable pressing unit 72 , and the second movable pressing unit 73 .

[0058] like Figure 7 As shown, the outer part 30a of the frame is a speed controller (flow rate control valve) for the cylinders 71b, 72b and 73b. Two speed controllers are provided for each of the cylinders 71b, 72b and 73b. That is, a total of 6 speed controllers are provided. In addition, one of the two speed controllers is a speed controller for controlling the flow rate of air when moving forward, and the other is a speed controller for controlling the flow rate of air when moving backward. The multiple speed controllers are arranged in a direction (Z direction) perpendicular to the main surface 20c of the blade 20. In addition, the multiple speed controllers are provided near the end of the opening 60a. In addition, the multiple speed controllers are configured to be exposed to the outside when the cover 80 is removed. In addition, the connecting part 50a is a flexible and bendable air pipe for circulating the driving air supplied to the cylinders 71b, 72b and 73b.

[0059] like Figure 8 As shown, the frame outer part 30b is a substrate detection sensor as the frame inner part 40b (refer to Figure 3) is a readout amplifier (amplifier) ​​for the blade 20. The substrate detection sensor is a sensor that detects whether there is a substrate W on the blade 20. The substrate detection sensor is, for example, a reflective optical sensor. There are a plurality of substrate detection sensors. A plurality of readout amplifiers are provided in a manner corresponding to the plurality of substrate detection sensors. The plurality of readout amplifiers are arranged in a direction (Z direction) perpendicular to the main surface 20c of the blade 20. In addition, the plurality of readout amplifiers are provided near the end of the opening 60b. In addition, the plurality of readout amplifiers are configured to be exposed to the outside when the cover 80 is removed. In addition, the connecting component 50b is a flexible wiring that can be bent, including an electrical wiring for transmitting signals or an optical fiber for transmitting light.

[0060] In addition, if Figure 3 As shown, the frame outer members 30a and 30b are arranged adjacent to the pair of sidewalls 10a and 10b in a direction (X-direction) parallel to the direction in which the pair of front supports 21a and 21b are aligned. Furthermore, the frame outer members 30a and 30b are arranged so as not to extend outward from the base end portion 20b of the blade 20 in a direction (X-direction) parallel to the direction in which the pair of front supports 21a and 21b are aligned. Specifically, the frame outer members 30a and 30b are arranged outside the approximate width W1 of the frame 10 in a direction (X-direction) parallel to the direction in which the pair of front supports 21a and 21b are aligned, but within the approximate width W2 of the base end portion 20b of the blade 20.

[0061] In addition, if Figure 7 and Figure 8 As shown, the openings 60a and 60b are formed to have a substantially rectangular shape (rounded rectangle). In addition, the opening 60a which also serves as an opening for maintenance of the frame inner member 40a is formed to have a larger opening area than the opening 60b through which only the connecting member 50b is inserted.

[0062] [Effects of this embodiment]

[0063] In this embodiment, the following effects can be obtained.

[0064] In this embodiment, as described above, the frame 10, a pair of front support parts 21a and 21b, and a pair of rear support parts 22a and 22b are arranged in a V-shape, thereby ensuring the rigidity (mechanical strength) of the substrate holding robot 1, and reducing the width of the frame 10. Correspondingly, space for configuring components on the side of the frame 10 can be ensured, and the components configured on the side of the frame 10 can be easily repaired (maintained).

[0065] In addition, in the present embodiment, as described above, the frame 10 includes a pair of side wall portions 10a and 10b. In addition, one (10a) of the pair of side wall portions 10a and 10b is disposed so as to be arranged on a first line L1 that links the base end portion 10c of the frame 10, one (21a) of the pair of front support portions 21a and 21b, and one (22a) of the pair of rear support portions 22a and 22b, and extends along the first line L1. In addition, the other (10b) of the pair of side wall portions 10a and 10b is disposed so as to be arranged on a second line L2 that links the base end portion 10c of the frame 10, the other (21b) of the pair of front support portions 21a and 21b, and the other (22b) of the pair of rear support portions 22a and 22b, and extends along the second line L2. Thus, the pair of side wall portions 10a and 10b of the frame 10 can be arranged on the first line L1 and the second line L2, which are lines of arrangement that are desirable for ensuring the rigidity of the substrate holding robot 1, and thus the pair of side wall portions 10a and 10b of the frame 10 can be effectively utilized for ensuring the rigidity of the substrate holding robot 1. As a result, the rigidity of the substrate holding robot 1 can be easily ensured, and the width W1 of the frame 10 can be easily reduced.

[0066] In addition, in the present embodiment, as described above, the width W1 of the frame 10 is smaller than the width W2 of the base end portion 20b of the blade 20 in a direction parallel to the direction in which the pair of front support portions 21a and 21b are arranged. Thus, the width W1 of the frame 10 can be easily and reliably reduced.

[0067] In addition, in the present embodiment, as described above, the substrate holding robot 1 further includes frame outside members 30a and 30b that are arranged outside the frame 10 in a direction parallel to the direction in which the pair of front support portions 21a and 21b are arranged. Thus, unlike the case where members are arranged inside the frame 10, the frame outside members 30a and 30b can be easily contacted without being hindered by the side wall portions 10a and 10b of the frame 10 and the like, and thus maintenance of the frame outside members 30a and 30b can be easily performed. In addition, a prescribed member (in the present embodiment, a sense amplifier and a speed controller) among the members arranged inside the frame 10 can be arranged outside the frame 10 as the frame outside members 30a and 30b, and thus the number of members arranged inside the frame 10 can be reduced. This effect is particularly effective in the structure of the present embodiment in which the inside region of the frame 10 is made small by making the width W1 of the frame 10 small.

[0068] Further, in the present embodiment, as described above, the frame-outer-side members 30a and 30b include a readout amplifier for a sensor and a speed controller for a cylinder. Thus, in the case where the frame-outer-side members 30a and 30b include the readout amplifier, adjustment of the power amplifier function based on operation of an operation button or the like can be easily performed. Further, in the case where the frame-outer-side members 30a and 30b include the speed controller, adjustment of the speed control function based on operation of an adjustment knob or the like can be easily performed.

[0069] Further, in the present embodiment, as described above, the frame 10 includes a pair of side wall portions 10a and 10b. Further, the frame-outer-side members 30a and 30b are arranged outside of each of the pair of side wall portions 10a and 10b in a direction parallel to a direction in which the pair of front support portions 21a and 21b are arranged. Thus, more members can be arranged outside of the frame 10 as the frame-outer-side members 30a and 30b, so that maintenance of more frame-outer-side members 30a and 30b can be easily performed, and the number of members arranged inside of the frame 10 can be further reduced.

[0070] Further, in the present embodiment, as described above, the side wall portions 10a and 10b of the frame 10 are provided with opening portions 60a and 60b that communicate the inside with the outside. Further, the connection members 50a and 50b that connect the frame-outer-side members 30a and 30b and the frame-inner-side members 40a and 40b arranged at a position inside of the frame 10 or corresponding to the inside of the frame 10 are inserted through the opening portions 60a and 60b. Thus, in the case where the frame-outer-side members 30a and 30b are arranged outside of the frame 10, the frame-outer-side members 30a and 30b can be simply connected to the frame-inner-side members 40a and 40b by the connection members 50a and 50b inserted through the opening portions 60a and 60b, and the arrangement path of the connection members 50a and 50b can be further prevented from being complicated.

[0071] Further, in the present embodiment, as described above, the opening portion 60a functions as a maintenance opening portion for the frame-inner-side member 40a. Thus, the opening portion 60a for the connection member 50a can be effectively utilized to easily perform maintenance of the frame-inner-side member 40a.

[0072] In addition, in the present embodiment, as described above, the frame inner side member 40a includes the cylinders 71b, 72b, and 73b. In addition, when viewed in a direction parallel to the direction in which the pair of front support portions 21a and 21b are arranged, the opening portion 60a is provided at a position overlapping the cylinders 71b, 72b, and 73b arranged on the inner side of the frame 10. Thus, the cylinders 71b, 72b, and 73b can be easily worked on via the opening portions 60a and 60b, and thus maintenance of the air piping and maintenance of the electrical wiring, and maintenance of the cylinders, and the like can be easily performed.

[0073] [Modifications]

[0074] Furthermore, the present disclosure should be considered as illustrative and not restrictive, and the scope of the application is not limited by the above-described embodiments, but is indicated by the claims, and includes all modifications (modifications) within the scope of the claims.

[0075] For example, in the above-described embodiments, an example in which the arm is a horizontal multi-joint robot arm is shown, but the present application is not limited thereto. For example, the arm can be an arm other than a horizontal multi-joint robot arm, such as a vertical multi-joint robot arm.

[0076] In addition, in the above-described embodiments, an example in which the substrate holding robot is provided with a plurality of blades is shown, but the present application is not limited thereto. For example, the substrate holding robot can be provided with one blade.

[0077] In addition, in the above-described embodiments, an example in which the substrate holding robot is provided with four blades is shown, but the present application is not limited thereto. For example, the substrate holding robot can be provided with a plurality of blades other than four blades.

[0078] In addition, in the above-described embodiments, an example in which the blade has a shape divided into two branches is shown, but the present application is not limited thereto. For example, the blade can have a shape other than a shape divided into two branches.

[0079] In addition, in the above-described embodiments, an example in which the blade is configured to support two substrates at different heights from each other is shown, but the present application is not limited thereto. For example, the blade can be configured to support only one substrate (to support the substrate at only one height).

[0080] In addition, in the above-described embodiments, an example in which the movable support unit is provided is shown, but the present application is not limited thereto. For example, the movable support unit can not be provided.

[0081] In addition, in the above embodiment, an example in which the two pressing units, the first movable pressing unit and the second movable pressing unit, are provided is shown, but the present application is not limited to this. For example, only one movable pressing unit can be provided.

[0082] In addition, in the above embodiment, an example in which the substrate holding robot is provided with the frame-outer-side member is shown, but the present application is not limited to this. For example, the substrate holding robot can not be provided with the frame-outer-side member.

[0083] In addition, in the above embodiment, an example in which the frame-outer-side member is disposed outside each of the pair of side wall portions is shown, but the present application is not limited to this. For example, the frame-outer-side member can be disposed outside only one side wall portion.

[0084] In addition, in the above embodiment, an example in which the frame-outer-side member is the readout amplifier or the speed controller is shown, but the present application is not limited to this. For example, the frame-outer-side member can be a member other than the readout amplifier or the speed controller.

[0085] Explanation of Reference Numerals

[0086] 1 … substrate holding robot; 2 … arm; 10 … frame; 10a, 10b … side wall portion; 10c … base end portion; 20 … blade; 20a … front end portion; 20b … base end portion; 21a, 21b … front support portion; 22a, 22b … rear support portion; 30a, 30b … frame-outer-side member; 40a, 40b … frame-inner-side member; 50a, 50b … connecting member; 60a, 60b … opening portion; 100 … substrate transfer robot; L1 … first line; L2 … second line; W1 … width of frame; W2 … width of base end portion of blade.

Claims

1. A substrate holding robot, characterized in that: have: frame; a blade supported on the frame; a pair of front support portions provided on the front end side of the blade to support the substrate; a pair of rear support portions provided on the base end side of the blade to support the substrate; and a frame outer member disposed on the outer side of the frame in a direction parallel to the direction in which the pair of front support portions are arranged, The frame, the pair of front support parts, and the pair of rear support parts are arranged in a V-shape. The frame outer member is arranged so as not to protrude outward from the base end of the blade in a direction parallel to the direction in which the pair of front support portions are arranged. An opening is provided on the side wall of the frame to connect the inside with the outside. A connecting member is inserted through the opening, and the connecting member connects the frame outer member and the frame inner member arranged on the inner side of the frame or arranged at a position corresponding to the inner side of the frame. The opening also serves as an opening for maintenance of the inner part of the frame. The frame inner part includes a cylinder, The opening is provided at a position overlapping with the cylinder disposed inside the frame when viewed from a direction parallel to a direction in which the pair of front support portions are arranged.

2. The substrate holding robot according to claim 1, wherein: The frame includes a pair of side wall portions, One of the pair of side walls is disposed on a first line connecting a base end portion of the frame, one of the pair of front support portions, and one of the pair of rear support portions, and extends along the first line. The other of the pair of side walls is disposed on a second line connecting the base end portion of the frame, the other of the pair of front support portions, and the other of the pair of rear support portions, and extends along the second line.

3. The substrate holding robot according to claim 1, wherein: The width of the frame in a direction parallel to a direction in which the pair of front support portions are arranged is smaller than a width of a base end portion of the blade.

4. The substrate holding robot according to claim 1, wherein: The frame outer member includes at least one of a sense amplifier for a sensor and a speed controller for a cylinder.

5. The substrate holding robot according to claim 1, wherein: The frame includes a pair of side wall portions, The frame outer member is arranged outside each of the pair of side wall portions in a direction parallel to a direction in which the pair of front support portions are arranged.

6. A substrate handling robot, characterized in that: have: a substrate holding robot; and an arm that enables the substrate holding robot to move, The substrate holding robot comprises: frame; a blade supported on the frame; a pair of front support portions provided on the front end side of the blade to support the substrate; a pair of rear support portions provided on the base end side of the blade to support the substrate; and a frame outer member disposed on the outer side of the frame in a direction parallel to the direction in which the pair of front support portions are arranged, The frame, the pair of front support parts, and the pair of rear support parts are arranged in a V-shape. The frame outer member is arranged so as not to protrude outward from the base end of the blade in a direction parallel to the direction in which the pair of front support portions are arranged. An opening is provided on the side wall of the frame to connect the inside with the outside. A connecting member is inserted through the opening, and the connecting member connects the frame outer member and the frame inner member arranged on the inner side of the frame or arranged at a position corresponding to the inner side of the frame. The opening also serves as an opening for maintenance of the inner part of the frame. The frame inner part includes a cylinder, The opening is provided at a position overlapping with the cylinder disposed inside the frame when viewed from a direction parallel to a direction in which the pair of front support portions are arranged.

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