Real-time load resistance calibration device and method

Abstract

The present invention provides a real-time load resistance calibration device and method. The real-time load resistance calibration device includes: a target parsing module for receiving and parsing calibration instructions from a tester to obtain a required specified resistance value and a specified ambient temperature corresponding to the specified resistance value; a resistance parsing module for regulating the on / off states of switches in a resistance matrix based on the specified resistance value and the specified ambient temperature, and for calculating in real time the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature and obtaining the resistance difference between the theoretical effective resistance value and the specified resistance value; and a data calibration module for obtaining the actual resistance value of the calibration load based on the theoretical effective resistance value and system parameters of the tester, and transmitting the actual resistance value and the corresponding actual ambient temperature to the tester. The present invention solves the problem of load resistance variation caused by ambient temperature changes and improves the calibration accuracy of ATE equipment.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor testing technology, and in particular to a real-time load resistance calibration device and method. Background Art

[0002] In the semiconductor testing field, high precision is required for integrated circuit (IC) automatic test equipment (ATE), which is used to ensure IC manufacturing quality. During both manufacturing and operation, ATE requires calibration using high-precision standard resistors to ensure reliable operation. ATE equipment undergoes regular accuracy checks using either built-in or external standard loads. Figure 1 The schematic diagram of a structure of an external standard load for ATE equipment is shown. In the field of ATE equipment precision calibration, different ATE equipment or different chips under test require the development of corresponding calibration loads.

[0003] Currently, ATE equipment is calibrated by comparing the test results with a high-precision digital multimeter (DMM). However, due to external interference, especially the influence of external temperature, the DMM cannot provide a high-precision load, which in turn affects the actual measurement accuracy of the ATE.

[0004] Therefore, the present invention proposes a real-time load resistance calibration device and method to solve the technical problem in the prior art that the calibration accuracy of ATE equipment is reduced due to changes in external temperature. Summary of the Invention

[0005] The embodiments of the present invention provide a real-time load resistance calibration device and method to solve the technical problem in the prior art that the calibration accuracy of ATE equipment is reduced due to changes in external temperature.

[0006] In a first aspect, the present invention provides a real-time load resistance calibration device, comprising: a control center unit, a resistance matrix, and a temperature adjustment unit, wherein the control center unit is electrically connected to the resistance matrix and the temperature adjustment unit respectively; the resistance matrix comprises a plurality of resistors and a plurality of switches, and each of the resistors is connected to a corresponding switch to realize on-off; the temperature adjustment unit comprises a temperature sampling component and a temperature adjustment component, the temperature sampling component measures the actual ambient temperature in real time, and the temperature adjustment component adjusts the actual ambient temperature in real time based on the instruction of the control center unit; the control center unit comprises: a target parsing module, a resistance parsing module, a temperature parsing module, and a data calibration module; the target parsing module is used to receive and parse the calibration instruction issued by the test machine to obtain the required specified resistance value and the specified ambient temperature corresponding to the specified resistance value; The resistance analysis module is used to control the on-off state of the switches in the resistance matrix according to the specified resistance value and the specified ambient temperature, so as to ensure that the nominal resistance value of the resistance matrix connected to the calibration circuit at the specified ambient temperature is equal to the specified resistance value, and to calculate in real time the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature, and obtain the resistance difference between the theoretical effective resistance value and the specified resistance value; the temperature analysis module is used to receive the actual ambient temperature and the resistance difference, and control the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature; the data calibration module obtains the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, and transmits the actual resistance value and the corresponding actual ambient temperature to the test machine.

[0007] The beneficial effects of the real-time load resistance calibration device provided by the present invention are as follows: compared with the prior art, the present invention controls the ambient temperature of the calibration load by controlling the temperature adjustment component to adjust the actual ambient temperature in real time, and by real-time calculating the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature and obtaining the resistance difference between the theoretical effective resistance value and the specified resistance value, the change of the theoretical effective resistance value of the resistance matrix with the actual ambient temperature can be obtained; the present invention uses the temperature analysis module to receive the actual ambient temperature and the resistance difference, and controls the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature, thereby controlling the amplitude of the actual ambient temperature change; the present invention uses the data calibration module to obtain the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, thereby obtaining the accurate actual resistance value of the calibration load, solving the problem of load resistance change caused by ambient temperature change, thus avoiding the problem of affecting DMM measurement accuracy due to external temperature change, and improving the calibration accuracy of ATE equipment.

[0008] Optionally, the temperature analysis module includes a first control unit and a second control unit; the first control unit controls the temperature adjustment component to adjust the ambient temperature in real time based on the received actual ambient temperature, so that the actual ambient temperature is within a preset temperature range; the second control unit controls the temperature adjustment component to fine-tune the actual ambient temperature within the preset temperature range based on the resistance difference, so that the resistance difference is within a preset resistance floating range. The beneficial effect of this invention is that, through the first control unit and the second control unit, the technical effect of obtaining a stable target ambient temperature can be achieved.

[0009] Optionally, the preset temperature range is: the specified ambient temperature ±5°C; and the preset resistance floating range satisfies the following relationship: -1 / 1000 ≤ resistance difference specified resistance value ≤ 1 / 1000. This advantageously provides the smaller ranges of the preset temperature range and the preset resistance floating range provided by the present invention, thereby facilitating the acquisition of a more stable target ambient temperature and further improving the calibration accuracy of ATE equipment.

[0010] Optionally, the real-time load resistance calibration device also includes: a communication interface unit, the communication interface unit is electrically connected to the control center unit, and the target analysis module obtains the calibration instructions issued by the test machine through the communication interface unit; the data calibration module transmits the actual resistance value and the corresponding actual ambient temperature to the test machine through the communication interface unit.

[0011] Optionally, the real-time load resistance calibration device also includes a data storage unit electrically connected to the control center unit, and the data storage unit is used to record the system parameters of the testing machine, and the system parameters include the usage time of the resistance matrix, the aging coefficient of the resistance, the specified resistance required for each calibration, and the specified ambient temperature corresponding to the specified resistance.

[0012] Optionally, the temperature adjustment component includes: a heating component and a cooling component, the heating component is used to heat the environment where the resistor matrix is ​​located to increase the actual ambient temperature, and the cooling component is used to dissipate heat from the environment where the resistor matrix is ​​located to reduce the actual ambient temperature.

[0013] Optionally, the temperature increasing component includes a heating pad, and the temperature decreasing component includes a heat sink.

[0014] Optionally, the resistor matrix includes M resistors of varying resistance values, with the number N of resistors of each resistance value being equal, and the resistance ratio of any two adjacent resistors being less than N, where M ≥ 2 and N ≥ 2. This advantageously ensures continuity in resistance switching when selecting resistors by ensuring that the resistance ratio of any two adjacent resistors is less than N.

[0015] Optionally, the resistors in the resistor matrix are arranged in M ​​rows and N columns, the resistors in each row are identical, and the M rows of resistors are arranged in ascending or descending order of resistance value. This advantageously reduces algorithm difficulty and improves algorithm efficiency by ensuring that the resistors in each row are identical and the M rows of resistors are arranged in ascending or descending order of resistance value.

[0016] In a second aspect, the present invention provides a real-time load resistance calibration method, which is applied to a real-time load resistance calibration device as described in any one of the first aspects, comprising: S1, providing a real-time load resistance calibration device as described in any one of the first aspects, the real-time load resistance calibration device comprising: a control center unit, a resistance matrix, and a temperature adjustment unit, the control center unit being electrically connected to the resistance matrix and the temperature adjustment unit respectively; the resistance matrix comprising a plurality of resistors and a plurality of switches, each of the resistors being connected to a corresponding switch to achieve on-off; the temperature adjustment unit comprising a temperature sampling component and a temperature adjustment component, the temperature sampling component measuring the actual ambient temperature in real time, the temperature adjustment component adjusting the actual ambient temperature in real time based on the instruction of the control center unit; the control center unit comprising: a target parsing module, a resistance parsing module, a temperature parsing module, and a data calibration module; S2, the target parsing module receiving and parsing the calibration instruction issued by the test machine Command, to obtain the required specified resistance value and the specified ambient temperature corresponding to the specified resistance value; S3, the resistance analysis module regulates the on-off state of the switch in the resistance matrix according to the specified resistance value and the specified ambient temperature, to ensure that the nominal resistance value of the resistance matrix connected to the calibration circuit at the specified ambient temperature is equal to the specified resistance value, and calculates the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature in real time, and obtains the resistance difference between the theoretical effective resistance value and the specified resistance value; S4, the temperature analysis module receives the actual ambient temperature and the resistance difference, and controls the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature; S5, the data calibration module obtains the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, and transmits the actual resistance value and the corresponding actual ambient temperature to the test machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1A schematic diagram of the connection relationship between an existing ATE device and a calibration load;

[0018] Figure 2 A schematic diagram of an embodiment of a real-time load resistance calibration device provided by the present invention;

[0019] Figure 3 A schematic diagram of a resistor matrix embodiment provided by the present invention;

[0020] Figure 4 A flow chart of a real-time load resistance calibration method provided by the present invention. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present application are described below in conjunction with the drawings in the embodiments of the present application. Among them, in the description of the embodiments of the present application, the terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to be used as limitations on the present application. As used in the specification and claims of the present application, the singular expressions "a", "the", "above", "the" and "this" are intended to also include expressions such as "one or more", unless there is a clear contrary indication in the context. It should also be understood that in the following embodiments of the present application, "at least one", "one or more" refer to one or more (including two). The term "and / or" is used to describe the association relationship of associated objects, indicating that three relationships can exist; for example, A and / or B can represent: the existence of A alone, the existence of A and B at the same time, and the existence of B alone, where A and B can be singular or plural. The character " / " generally indicates that the associated objects before and after are in an "or" relationship.

[0022] References to "one embodiment" or "some embodiments" etc. described in this specification mean that the specific features, structures or characteristics described in conjunction with the embodiment are included in one or more embodiments of the present application. Therefore, the statements "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in another way. The terms "including", "comprising", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized in another way. The term "connected" includes direct and indirect connections, unless otherwise stated. "First" and "second" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated.

[0023] In the embodiments of this application, words such as "exemplarily" or "for example" are used to indicate examples, illustrations, or explanations. Any embodiment or design described as "exemplarily" or "for example" in the embodiments of this application should not be interpreted as being preferred or advantageous over other embodiments or designs. Rather, the use of words such as "exemplarily" or "for example" is intended to present the relevant concepts in a concrete manner.

[0024] In order to solve the technical problem in the prior art that the calibration accuracy of ATE equipment is reduced due to external temperature changes, the present invention provides a real-time load resistance calibration device, such as Figure 2 As shown, it includes: a control center unit 1, a resistance matrix 2, and a temperature adjustment unit 3. The control center unit 1 is electrically connected to the resistance matrix 2 and the temperature adjustment unit 3; the resistance matrix 2 includes a plurality of resistors and a plurality of switches ( Figure 2 Not shown), each resistor is connected to a switch to realize on-off; the temperature adjustment unit 3 includes a temperature sampling component and a temperature adjustment component ( Figure 2 Not shown), the temperature sampling component measures the actual ambient temperature in real time, and the temperature adjustment component adjusts the actual ambient temperature in real time based on the instruction of the control center unit 1; the control center unit 1 includes: a target analysis module, a resistance analysis module, a temperature analysis module, a data calibration module ( Figure 2 (not shown); the target parsing module is used to receive and parse the calibration instructions issued by the test machine to obtain the required specified resistance value and the specified ambient temperature corresponding to the specified resistance value; the resistance parsing module is used to regulate the on-off state of the switch in the resistance matrix 2 according to the specified resistance value and the specified ambient temperature to ensure that the nominal resistance value of the resistance matrix 2 connected to the calibration circuit at the specified ambient temperature is equal to the specified resistance value, and to calculate in real time the theoretical effective resistance value of the resistance matrix 2 at the corresponding actual ambient temperature and obtain the resistance difference between the theoretical effective resistance value and the specified resistance value; the temperature parsing module is used to receive the actual ambient temperature and the resistance difference, and control the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature; the data calibration module obtains the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, and transmits the actual resistance value and the corresponding actual ambient temperature to the test machine.

[0025] In this embodiment, the nominal resistance value is the theoretical resistance value of the resistance matrix connected to the calibration circuit at the specified ambient temperature, that is, the resistance actually connected to the calibration circuit in the resistance matrix is ​​calculated based on the specified ambient temperature and the specified resistance value so that the nominal resistance value is equal to the specified resistance value, and during the corresponding calibration process, the resistance analysis module no longer changes the on-off state of the resistance in the resistance matrix.

[0026] The beneficial effects of the real-time load resistance calibration device provided by the present invention are as follows: compared with the prior art, the present invention controls the ambient temperature of the calibration load by controlling the temperature adjustment component to adjust the actual ambient temperature in real time, and by real-time calculating the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature and obtaining the resistance difference between the theoretical effective resistance value and the specified resistance value, the change of the theoretical effective resistance value of the resistance matrix with the actual ambient temperature can be obtained; the present invention uses the temperature analysis module to receive the actual ambient temperature and the resistance difference, and controls the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature, thereby controlling the amplitude of the actual ambient temperature change; the present invention uses the data calibration module to obtain the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, thereby obtaining the accurate actual resistance value of the calibration load, solving the problem of load resistance change caused by ambient temperature change, thus avoiding the problem of affecting DMM measurement accuracy due to external temperature change, and improving the calibration accuracy of ATE equipment.

[0027] In some embodiments, the temperature analysis module includes a first control unit and a second control unit. The first control unit controls the temperature adjustment component to adjust the ambient temperature in real time based on the received actual ambient temperature, so that the actual ambient temperature is within a preset temperature range. The second control unit controls the temperature adjustment component to fine-tune the actual ambient temperature within the preset temperature range based on the resistance difference, so that the resistance difference is within a preset resistance floating range. In other words, the present invention can either control the temperature adjustment component to adjust the ambient temperature in real time to keep the actual ambient temperature within the preset temperature range, or control the temperature adjustment component to fine-tune the actual ambient temperature within the preset temperature range to keep the resistance difference within the preset resistance floating range. The present invention allows either the first or second control unit to be activated, or both control units to be activated simultaneously, to achieve the goal of obtaining a stable target ambient temperature. The beneficial effect of the present invention is that the first and second control units can achieve the technical effect of obtaining a stable target ambient temperature.

[0028] In some embodiments, the preset temperature range is: the specified ambient temperature ±5°C; and the preset resistance floating range satisfies the following relationship: -1 / 1000 ≤ resistance difference specified resistance value ≤ 1 / 1000. This advantageously provides the smaller ranges of the preset temperature range and the preset resistance floating range provided by the present invention, thereby facilitating a more stable target ambient temperature and further improving the calibration accuracy of ATE equipment.

[0029] In some embodiments, the real-time load resistance calibration device also includes: a communication interface unit, the communication interface unit is electrically connected to the control center unit, and the target analysis module obtains the calibration instructions issued by the test machine through the communication interface unit; the data calibration module transmits the actual resistance value and the corresponding actual ambient temperature to the test machine through the communication interface unit.

[0030] In some embodiments, the real-time load resistance calibration device further includes a data storage unit electrically connected to the control center unit, and the data storage unit is used to record the system parameters of the testing machine. The system parameters include the usage time of the resistance matrix, the aging coefficient of the resistance, the specified resistance required for each calibration, and the specified ambient temperature corresponding to the specified resistance.

[0031] In some embodiments, the temperature adjustment component includes: a heating component and a cooling component, the heating component is used to heat the environment where the resistor matrix is ​​located to increase the actual ambient temperature, and the cooling component is used to dissipate heat from the environment where the resistor matrix is ​​located to lower the actual ambient temperature.

[0032] In some embodiments, the heating component includes a heating pad, and the cooling component includes a heat sink. For example, the heating pad can be made of a high-resistance material, to which a voltage is applied to generate heat, thereby heating the environment; the heat sink includes a hollow tube, through which a cooling medium (water or air) is passed. By varying the flow rate of the cooling medium, varying degrees of cooling can be achieved.

[0033] In some embodiments, the resistor matrix includes M resistors of different resistance values, the number N of resistors of each resistance value is equal, and the resistance ratio of any two adjacent resistors is less than N, wherein M≥2 and N≥2. The beneficial effect is that the present invention can ensure the continuity of switching resistance values ​​when selecting resistors by ensuring that the resistance ratio of any two adjacent resistors is less than N. The resistor matrix includes: a plurality of resistors and a plurality of switches, such as Figure 3As shown, the resistor matrix includes: switch SW10, switch SW11, switch SW12, switch SW1i, switch SW1N, switch SWn0, switch SWn1, switch SWn2, switch SWni, switch SWnN; resistor R11, resistor R12, resistor R1i, resistor R1N, switch SWi0, switch SWiN+1, switch SWn0, switch SWn1, switch SWn2, switch SWni, switch SWnN, switch SWnN+1. Figure 3 The resistor matrix can be electrically connected to the resistance analysis module through the interface FORCE+, interface FORCE-, interface SENSE+ and interface SENSE-. The resistors in the resistor matrix can be of the same type and have the same resistance value. The resistors can be connected in series or in parallel. Figure 3 In the resistor matrix shown, the parallel resistance of the preceding resistors is equal to the resistance of a single resistor in the succeeding stage. The resistance analysis module is further configured to obtain the series-parallel relationship, resistance distribution, and switch distribution of the resistors in the resistor matrix, and to control the theoretical effective resistance of the resistor matrix by controlling the conduction of several switches in the resistor matrix control unit.

[0034] In some embodiments, the resistors in the resistor matrix are arranged in M ​​rows and N columns, with the resistors in each row being identical, and the M rows of resistors being arranged in ascending or descending order of resistance value. The present invention advantageously reduces algorithm difficulty and improves algorithm efficiency by ensuring that the resistors in each row are identical and the M rows of resistors are arranged in ascending or descending order of resistance value. For example, the actual power usage of any enabled resistor in the resistor matrix is ​​less than its rated power, thereby preventing the enabled resistor from overheating and being damaged during use.

[0035] Based on the real-time load resistance calibration device described in any of the above embodiments, the present invention also provides a real-time load resistance calibration method, which is applied to the real-time load resistance calibration device described in any of the above embodiments. The process is as follows: Figure 4 As shown, including:

[0036] S1. Provide a real-time load resistance calibration device as described in any of the above embodiments, the real-time load resistance calibration device comprising: a control center unit, a resistance matrix, and a temperature adjustment unit, the control center unit being electrically connected to the resistance matrix and the temperature adjustment unit respectively; the resistance matrix comprising a plurality of resistors and a plurality of switches, each resistor being connected to a corresponding switch for switching on and off; the temperature adjustment unit comprising a temperature sampling component and a temperature adjustment component, the temperature sampling component measuring the actual ambient temperature in real time, the temperature adjustment component adjusting the actual ambient temperature in real time based on instructions from the control center unit; the control center unit comprising: a target analysis module, a resistance analysis module, a temperature analysis module, and a data calibration module;

[0037] S2, the target parsing module receives and parses the calibration instruction issued by the test machine to obtain the required specified resistance value and the specified ambient temperature corresponding to the specified resistance value;

[0038] S3, the resistance analysis module controls the on-off state of the switches in the resistance matrix according to the specified resistance value and the specified ambient temperature to ensure that the nominal resistance value of the resistance matrix connected to the calibration circuit at the specified ambient temperature is equal to the specified resistance value, and calculates in real time the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature, and obtains the resistance difference between the theoretical effective resistance value and the specified resistance value;

[0039] S4, the temperature analysis module receives the actual ambient temperature and the resistance difference, and controls the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature;

[0040] S5. The data calibration module obtains the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, and transmits the actual resistance value and the corresponding actual ambient temperature to the test machine.

[0041] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A real-time load resistance calibration device, characterized in that: include: A control center unit, a resistance matrix, and a temperature adjustment unit, wherein the control center unit is electrically connected to the resistance matrix and the temperature adjustment unit respectively; The resistor matrix includes a plurality of resistors and a plurality of switches, and each resistor is connected to a corresponding switch to achieve on-off; The temperature adjustment unit includes a temperature sampling component and a temperature adjustment component. The temperature sampling component measures the actual ambient temperature in real time. The temperature adjustment component adjusts the actual ambient temperature in real time based on the instruction of the control center unit. The control center unit includes: a target analysis module, a resistance analysis module, a temperature analysis module, and a data calibration module; The target parsing module is used to receive and parse the calibration instruction issued by the test machine to obtain the required specified resistance value and the specified ambient temperature corresponding to the specified resistance value; The resistance analysis module is used to control the on-off state of the switches in the resistance matrix according to the specified resistance value and the specified ambient temperature to ensure that the nominal resistance value of the resistance matrix connected to the calibration circuit at the specified ambient temperature is equal to the specified resistance value, and to calculate in real time the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature, and to obtain the resistance difference between the theoretical effective resistance value and the specified resistance value; The temperature analysis module is used to receive the actual ambient temperature and the resistance difference, and control the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature; The data calibration module obtains the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, and transmits the actual resistance value and the corresponding actual ambient temperature to the test machine.

2. The real-time load resistance calibration device according to claim 1, characterized in that: The temperature analysis module includes a first control unit and a second control unit; The first regulating unit controls the temperature regulating member to adjust the ambient temperature in real time based on the received actual ambient temperature, so that the actual ambient temperature is within a preset temperature range; The second regulating unit controls the temperature adjusting component to fine-tune the actual ambient temperature within the preset temperature range based on the resistance difference, so that the resistance difference is within a preset resistance floating range.

3. The real-time load resistance calibration device according to claim 2, characterized in that: The preset temperature range is: the specified ambient temperature ±5°C; The preset resistance floating range satisfies the following relationship: -1 / 1000≤resistance difference specified resistance value≤1 / 1000.

4. The real-time load resistance calibration device according to claim 1, characterized in that: Also includes: a communication interface unit, the communication interface unit being electrically connected to the control center unit, and the target parsing module obtaining a calibration instruction issued by the test machine through the communication interface unit; The data calibration module transmits the actual resistance value and the corresponding actual ambient temperature to the tester through the communication interface unit.

5. The real-time load resistance calibration device according to claim 1, characterized in that: It also includes a data storage unit electrically connected to the control center unit, and the data storage unit is used to record the system parameters of the test machine. The system parameters include the usage time of the resistance matrix, the aging coefficient of the resistance, the specified resistance value required for each calibration, and the specified ambient temperature corresponding to the specified resistance value.

6. The real-time load resistance calibration device according to claim 1, characterized in that: The temperature adjustment component includes: a heating component and a cooling component. The heating component is used to heat the environment where the resistor matrix is ​​located to increase the actual ambient temperature, and the cooling component is used to dissipate heat from the environment where the resistor matrix is ​​located to reduce the actual ambient temperature.

7. The real-time load resistance calibration device according to claim 6, characterized in that: The temperature increasing component includes a heating pad, and the temperature decreasing component includes a heat sink.

8. The real-time load resistance calibration device according to claim 1, characterized in that: The resistor matrix includes resistors of M resistance values, the number N of resistors of each resistance value is equal, and the resistance ratio of any two adjacent resistors is less than N, wherein M≥2 and N≥2.

9. The real-time load resistance calibration device according to claim 8, characterized in that: The resistors in the resistor matrix are arranged in M ​​rows and N columns, the resistors in each row are the same, and the M rows of resistors are arranged in increasing or decreasing order of resistance value.

10. A real-time load resistance calibration method, characterized in that: A real-time load resistance calibration device according to any one of claims 1 to 9, comprising: S1. Provide a real-time load resistance calibration device according to any one of claims 1 to 9, the real-time load resistance calibration device comprising: a control center unit, a resistance matrix, and a temperature adjustment unit, the control center unit being electrically connected to the resistance matrix and the temperature adjustment unit, respectively; the resistance matrix comprising a plurality of resistors and a plurality of switches, each resistor being connected to a corresponding switch for switching on and off; the temperature adjustment unit comprising a temperature sampling component and a temperature adjustment component, the temperature sampling component measuring the actual ambient temperature in real time, the temperature adjustment component adjusting the actual ambient temperature in real time based on instructions from the control center unit; the control center unit comprising: a target analysis module, a resistance analysis module, a temperature analysis module, and a data calibration module; S2, the target parsing module receives and parses the calibration instruction issued by the test machine to obtain the required specified resistance value and the specified ambient temperature corresponding to the specified resistance value; S3, the resistance analysis module controls the on-off state of the switches in the resistance matrix according to the specified resistance value and the specified ambient temperature to ensure that the nominal resistance value of the resistance matrix connected to the calibration circuit at the specified ambient temperature is equal to the specified resistance value, and calculates in real time the theoretical effective resistance value of the resistance matrix at the corresponding actual ambient temperature, and obtains the resistance difference between the theoretical effective resistance value and the specified resistance value; S4, the temperature analysis module receives the actual ambient temperature and the resistance difference, and controls the temperature adjustment component to adjust the actual ambient temperature in real time to obtain a stable target ambient temperature; S5. The data calibration module obtains the actual resistance value of the calibration load based on the theoretical effective resistance value and the system parameters of the test machine, and transmits the actual resistance value and the corresponding actual ambient temperature to the test machine.

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