Physical quantity sensor and inertial measurement device

Abstract

The present application provides a physical quantity sensor and an inertial measurement device, which can simultaneously achieve miniaturization and high precision. The physical quantity sensor comprises: a first fixed electrode part and a second fixed electrode part arranged on a substrate; a first movable electrode part arranged in a manner that a movable electrode opposes a fixed electrode of the first fixed electrode part; a second movable electrode part arranged in a manner that a movable electrode opposes a fixed electrode of the second fixed electrode part; a first fixed part and a second fixed part fixed to the substrate; a first support beam having one end connected to the first fixed part; a first connecting part connecting the other end of the first support beam to the first movable electrode part; a second support beam having one end connected to the second fixed part; and a second connecting part connecting the other end of the second support beam to the second movable electrode part. When viewed from a third direction orthogonal to the substrate, the first movable electrode part, the second fixed part, the first fixed part, and the second movable electrode part are arranged in this order along a first direction.

Description

Technical Field

[0001] This invention relates to physical quantity sensors and inertial measurement devices, etc. Background Technology

[0002] Currently, physical quantity sensors that detect physical quantities such as acceleration are known. For example, there is a sensor disclosed in Patent Document 1. Patent Document 1 discloses a physical quantity sensor in which each sensor element has a fixed electrode and a movable electrode, and multiple sensor elements for detecting physical quantities are arranged.

[0003] Patent Document 1: Japanese Patent Application Publication No. 2021-32820

[0004] In the physical quantity sensor of Patent Document 1, multiple sensor elements are arranged side by side along the Y-axis. This easily leads to dead zones and makes miniaturization difficult. Furthermore, since the fixed portions of each sensor element are separately arranged, it is easily affected by substrate warping, making high-precision detection difficult. Summary of the Invention

[0005] One aspect of this disclosure relates to a physical quantity sensor comprising: a first fixed electrode portion and a second fixed electrode portion disposed on a substrate; a first movable electrode portion disposed such that the movable electrode faces the fixed electrode of the first fixed electrode portion; a second movable electrode portion disposed such that the movable electrode faces the fixed electrode of the second fixed electrode portion; a first fixed portion and a second fixed portion fixed to the substrate; a first support beam, one end of which is connected to the first fixed portion; a first connecting portion connecting the other end of the first support beam to the first movable electrode portion; a second support beam, one end of which is connected to the second fixed portion; and a second connecting portion connecting the other end of the second support beam to the second movable electrode portion. When three mutually orthogonal directions are designated as a first direction, a second direction, and a third direction, when viewed from the third direction orthogonal to the substrate, the first movable electrode portion, the second fixed portion, the first fixed portion, and the second movable electrode portion are arranged along the first direction in the order of the first movable electrode portion, the second fixed portion, the first fixed portion, and the second movable electrode portion.

[0006] Furthermore, another aspect of this disclosure relates to an inertial measurement apparatus including the physical quantity sensor described above and a control unit that controls the device based on a detection signal output from the physical quantity sensor. Attached Figure Description

[0007] Figure 1 This is a top view showing an example of the configuration of the physical quantity sensor in this embodiment.

[0008] Figure 2This is a configuration diagram of a physical quantity sensor.

[0009] Figure 3 This is a diagram illustrating the operation of the testing department.

[0010] Figure 4 This is a diagram illustrating the operation of the testing department.

[0011] Figure 5 This is a diagram illustrating the operation of the testing department.

[0012] Figure 6 This is a top view showing other examples of physical quantity sensors.

[0013] Figure 7 This is a top view showing other examples of physical quantity sensors.

[0014] Figure 8 This is a top view showing other examples of physical quantity sensors.

[0015] Figure 9 This is a top view showing other examples of physical quantity sensors.

[0016] Figure 10 It is an exploded three-dimensional diagram showing the general structure of an inertial measurement device with physical quantity sensors.

[0017] Figure 11 This is a 3D view of the circuit board of a physical quantity sensor.

[0018] Explanation of reference numerals in the attached figures

[0019] 1…Physical quantity sensor; 2…Substrate; 3, 4, 5, 6…Fixing part; 10…First fixed electrode part; 11…First fixed electrode; 12…Second fixed electrode; 13…First base fixed electrode; 14…Fixing electrode; 20…First movable electrode part; 21…First movable electrode; 22…Second movable electrode; 23…First base movable electrode; 24…Movable electrode; 30…First connecting part; 31…First part; 32…Second part; 33…Third part; 40…First fixing part; 42…First support beam; 50…Second fixed electrode part; 51…Third fixed electrode; 52…Fourth fixed electrode; 53…Second base fixed electrode; 54…Fixing electrode; 60…Second movable electrode part; 61…Third movable electrode; 62…Fourth movable electrode; 63…Second base movable electrode; 64…Movable electrode; 70…Second connecting part; 71… Four parts; 72… Fifth part; 73… Sixth part; 80… Second fixing part; 82… Second support beam; 91… First component part; 92… Second component part; 2000… Inertial measurement device; 2100… Housing; 2110… Threaded hole; 2200… Connecting part; 2300… Sensor module; 2310… Inner shell; 2311… Recess; 2312… Opening; 2320… Circuit board; 2330… Connector; 2340x, 2340y, 2340z… Angular velocity sensor; 2350… Accelerometer sensor unit; 2360… Control IC; DR1… First direction; DR2… Second direction; DR3… Third direction; DR4… Fourth direction; R1… First region; R2… Second region; R3… Third region; R4… Fourth region; Z1, Z2… Detection part; ax… Acceleration; ay, az… Acceleration; ωx… Angular velocity. Detailed Implementation

[0020] The following describes this embodiment. Furthermore, the embodiments described below do not unduly limit the scope of the claims. Also, not all configurations described in this embodiment are necessarily essential components.

[0021] 1. Physical quantity sensor

[0022] Regarding the configuration example of the physical quantity sensor 1 in this embodiment, an acceleration sensor that detects acceleration in the vertical direction is taken as an example, and reference is made to... Figure 1 Please provide an explanation. Figure 1 This is a top view of the physical quantity sensor 1 from a direction orthogonal to the substrate 2. The physical quantity sensor 1 is a MEMS (Micro Electro Mechanical Systems) device, such as an inertial sensor.

[0023] In addition, Figure 1 Or as will be discussed later Figures 6 to 9 For ease of explanation, the dimensions of each component or the spacing between components are shown schematically, and not all constituent elements are shown. For example, diagrams of electrode wiring, electrode terminals, etc., are omitted. Furthermore, the following explanation primarily uses the case where the physical quantity detected by physical quantity sensor 1 is acceleration as an example; however, the physical quantity is not limited to acceleration and can also be other physical quantities such as velocity, pressure, displacement, angular velocity, or gravity. Physical quantity sensor 1 can also be used as a pressure sensor or a MEMS switch, etc. Additionally, [further details will be provided]. Figure 1 The mutually orthogonal directions are designated as a first direction DR1, a second direction DR2, and a third direction DR3. The first direction DR1, the second direction DR2, and the third direction DR3 are, for example, the X-axis direction, the Y-axis direction, and the Z-axis direction, but are not limited to these. For example, the third direction DR3 corresponding to the Z-axis direction is, for example, a direction orthogonal to the substrate 2 of the physical quantity sensor 1, such as a vertical direction. The first direction DR1 corresponding to the X-axis direction and the second direction DR2 corresponding to the Y-axis direction are directions orthogonal to the third direction DR3. The XY plane along the surface of the first direction DR1 and the second direction DR2 is, for example, a horizontal plane. Furthermore, "orthogonal" includes not only the case of intersecting at 90°, but also the case of intersecting at an angle slightly inclined from 90°.

[0024] Substrate 2 may be a silicon substrate made of semiconductor silicon or a glass substrate made of glass materials such as borosilicate glass. However, there are no particular limitations on the constituent materials of substrate 2, and quartz substrates or SOI (Silicon On Insulator) substrates may also be used.

[0025] Moreover, such as Figure 1 As shown, the physical quantity sensor 1 of this embodiment includes a first fixed electrode section 10, a first movable electrode section 20, a first connecting section 30, a first fixing section 40, and a first support beam 42. These components—the first fixed electrode section 10, the first movable electrode section 20, the first connecting section 30, the first fixing section 40, and the first support beam 42—constitute the first element section 91 of the physical quantity sensor 1. The first element section 91 detects, for example, acceleration in the Z-axis direction, i.e., the third direction DR3, within the detection section Z1.

[0026] Furthermore, the physical quantity sensor 1 includes a second fixed electrode section 50, a second movable electrode section 60, a second connecting section 70, a second fixing section 80, and a second support beam 82. These components—the second fixed electrode section 50, the second movable electrode section 60, the second connecting section 70, the second fixing section 80, and the second support beam 82—constitute the second element section 92 of the physical quantity sensor 1. The second element section 92 detects, for example, acceleration in the Z-axis direction, i.e., the third direction DR3, within the detection section Z2.

[0027] The first fixed electrode portion 10 and the second fixed electrode portion 50 are disposed on the substrate 2. Specifically, the first fixed electrode portion 10 is fixed to the substrate 2 by fixing portions 3 and 4, and the second fixed electrode portion 50 is fixed to the substrate by fixing portions 5 and 6. The first fixed electrode portion 10 and the second fixed electrode portion 50 include a plurality of fixed electrodes. These plurality of fixed electrodes extend, for example, along the X-axis direction, i.e., the first direction DR1. For example, the first fixed electrode portion 10 is a first fixed electrode group, and the second fixed electrode portion 50 is a second fixed electrode group.

[0028] The first movable electrode section 20 is arranged such that the movable electrode faces the fixed electrode of the first fixed electrode section 10. The second movable electrode section 60 is arranged such that the movable electrode faces the fixed electrode of the second fixed electrode section 50. The first movable electrode section 20 and the second movable electrode section 60 include a plurality of movable electrodes. These plurality of movable electrodes extend, for example, along the X-axis direction, i.e., the first direction DR1. For example, the first movable electrode section 20 is a first movable electrode group, and the second movable electrode section 60 is a second movable electrode group. Specifically, the first movable electrode 21 and the second movable electrode 22 of the first movable electrode section 20 face the first fixed electrode 11 and the second fixed electrode 12 of the first fixed electrode section 10 in the Y-axis direction, i.e., the second direction DR2. The third movable electrode 61 and the fourth movable electrode 62 of the second movable electrode section 60 face the third fixed electrode 51 and the fourth fixed electrode 52 of the second fixed electrode section 50 in the Y-axis direction, i.e., the second direction DR2.

[0029] For example, in Figure 1 In this configuration, the first movable electrode section 20 and the second movable electrode section 60 are comb-tooth movable electrode groups, which, when viewed from a third party looking down at DR3, consist of multiple movable electrodes arranged in a comb-tooth configuration. Similarly, the first fixed electrode section 10 and the second fixed electrode section 50, when viewed from a third party looking down at DR3, consist of multiple fixed electrodes arranged in a comb-tooth configuration. Furthermore, in the detection section Z1 of the first element section 91, each movable electrode of the comb-tooth movable electrode group of the first movable electrode section 20 and each fixed electrode of the comb-tooth fixed electrode group of the first fixed electrode section 10 are arranged in an alternating opposing manner. Additionally, in the detection section Z2 of the second element section 92, each movable electrode of the comb-tooth movable electrode group of the second movable electrode section 60 and each fixed electrode of the comb-tooth fixed electrode group of the second fixed electrode section 50 are arranged in an alternating opposing manner.

[0030] The first fixing part 40 and the second fixing part 80 are fixed to the base plate 2. Furthermore, one end of the first support beam 42 is connected to the first fixing part 40. Additionally, one end of the second support beam 82 is connected to the second fixing part 80. For example, the first support beam 42 is a first torsion spring, and the second support beam 82 is a second torsion spring. Figure 1In this configuration, two support beams are provided along the second direction DR2, such as a first support beam 42 extending from the first fixing part 40 towards the second direction DR2 and a first support beam 42 extending from the first fixing part 40 in the opposite direction of the second direction DR2. Similarly, two support beams along the second direction DR2 are provided, such as a second support beam 82 extending from the second fixing part 80 towards the second direction DR2 and a second support beam 82 extending from the second fixing part 80 in the opposite direction of the second direction DR2.

[0031] The first fixing part 40 serves as an anchor for the first movable body, which is composed of the first movable electrode part 20 and the first connecting part 30. Furthermore, the first movable body having the first movable electrode part 20 swings in a lever-like manner around a rotation axis along the second direction DR2, with the first fixing part 40 as a fulcrum. For example, the first movable body swings around a rotation axis along the second direction DR2, with the first support beam 42 as a rotation axis, while the first support beam 42 is torsional deformed. Thus, the first element part 91 with a one-sided lever structure is realized.

[0032] The second fixing part 80 serves as an anchor for the second movable body, which is composed of the second movable electrode part 60 and the second connecting part 70. Furthermore, the second movable body having the second movable electrode part 60 swings in a lever-like manner around a rotation axis along the second direction DR2, with the second fixing part 80 as a fulcrum. For example, the second movable body swings around a second support beam 82 along the second direction DR2, while tortuously deforming the second support beam 82. This realizes the second element part 92 with a one-sided lever structure.

[0033] That is, the first movable body having the first movable electrode portion 20 swings in a lever-like manner with the first fixed portion 40, which is located closer to the first direction DR1 than the first movable electrode portion 20, as the fulcrum. In contrast, the second movable body having the second movable electrode portion 60 swings in a lever-like manner with the second fixed portion 80, which is located on the opposite side of the first direction DR1 than the second movable electrode portion 60. In addition, when viewed from a third party orthogonal to the substrate 2 towards DR3, the first movable electrode portion 20, the first connecting portion 30, and the first fixed portion 40 are arranged along the first direction DR1 in the order of the first movable electrode portion 20, the first connecting portion 30, and the first fixed portion 40, while the second movable electrode portion 60, the second connecting portion 70, and the second fixed portion 80 are arranged in the opposite direction of the first direction DR1 in the order of the second movable electrode portion 60, the second connecting portion 70, and the second fixed portion 80. Therefore, the first element portion 91 and the second element portion 92 are arranged in a point-symmetric manner with respect to the virtual point between the first fixing portion 40 and the second fixing portion 80. Specifically, the first fixing portion 40 and the second fixing portion 80 are arranged in a point-symmetric manner with respect to the virtual point, and the first movable electrode portion 20 and the second movable electrode portion 60 are arranged in a point-symmetric manner with respect to the virtual point.

[0034] The first connecting part 30 connects the other end of the first support beam 42 to the first movable electrode part 20. Specifically, the other ends of the two first support beams 42, one end of which is connected to the first fixing part 40, are connected to the first connecting part 30. The second connecting part 70 connects the other end of the second support beam 82 to the second movable electrode part 60. Specifically, the other ends of the two second support beams 82, one end of which is connected to the second fixing part 80, are connected to the second connecting part 70.

[0035] The first connecting portion 30 has a first part 31 and a second part 32. The first part 31 is arranged with the first support beam 42 and configured along the second direction DR2. The second part 32 is connected to the first part 31 and the first movable electrode part 20 and configured along the first direction DR1. Additionally, the first connecting portion 30 has a third part 33 connected to the second part 32 and configured along the second direction DR2. The first part 31 is connected to the other ends of the two first support beams 42, one end of which is connected to the first fixing part 40. One end of the second part 32 is connected to the first part 31, and the other end of the second part 32 is connected to the third part 33 and the first movable electrode part 20. The first part 31, the second part 32, and the third part 33 of the first connecting portion 30 function as mass parts of the first movable body. In particular, the third part 33, which is farther away from the first support beam 42, which serves as the rotation axis of the first movable body, becomes a mass part effective in improving sensitivity.

[0036] The second connecting portion 70 has a fourth portion 71 and a fifth portion 72. The fourth portion 71 is arranged with the second support beam 82 and configured along the second direction DR2. The fifth portion 72 is connected to the fourth portion 71 and the second movable electrode portion 60 and configured along the first direction DR1. Additionally, the second connecting portion 70 has a sixth portion 73 connected to the fifth portion 72 and configured along the second direction DR2. The fourth portion 71 is connected to the other ends of the two second support beams 82, one end of which is connected to the second fixing portion 80. One end of the fifth portion 72 is connected to the fourth portion 71, and the other end of the fifth portion 72 is connected to the sixth portion 73 and the second movable electrode portion 60. The fourth portion 71, the fifth portion 72, and the sixth portion 73 of the second connecting portion 70 function as mass portions of the second movable body. In particular, the sixth portion 73, which is farther from the second support beam 82, which serves as the rotation axis of the second movable body, becomes a mass portion effective in improving sensitivity.

[0037] As described above, the physical quantity sensor 1 of this embodiment includes: a first fixed electrode portion 10 and a second fixed electrode portion 50, disposed on a substrate 2; a first movable electrode portion 20, disposed such that the movable electrode faces the fixed electrode of the first fixed electrode portion 10; and a second movable electrode portion 60, disposed such that the movable electrode faces the fixed electrode of the second fixed electrode portion 50. Furthermore, the physical quantity sensor 1 includes: a first fixed portion 40 and a second fixed portion 80, fixed on the substrate 2; a first support beam 42, one end of which is connected to the first fixed portion 40; a first connecting portion 30, connecting the other end of the first support beam 42 to the first movable electrode portion 20; a second support beam 82, one end of which is connected to the second fixed portion 80; and a second connecting portion 70, connecting the other end of the second support beam 82 to the second movable electrode portion 60. Moreover, as... Figure 1 , Figure 2 As shown, when viewed from a third point orthogonal to the substrate 2 towards DR3, the first movable electrode portion 20, the second fixed portion 80, the first fixed portion 40, and the second movable electrode portion 60 are arranged along the first direction DR1 in the order of the first movable electrode portion 20, the second fixed portion 80, the first fixed portion 40, and the second movable electrode portion 60.

[0038] According to this physical quantity sensor 1, the second fixing part 80 of the second element part 92 can be arranged in the space between the first fixing part 40 and the first movable electrode part 20 of the first element part 91. Furthermore, the first fixing part 40 of the first element part 91 can be arranged in the space between the second fixing part 80 and the second movable electrode part 60 of the second element part 92. Therefore, the first movable electrode part 20, the second fixing part 80, the first fixing part 40, and the second movable electrode part 60 can be compactly arranged along the first direction DR1, thereby achieving miniaturization of the physical quantity sensor 1. In addition, by arranging the first fixing part 40 and the second fixing part 80 close together, the effect of warping of the substrate 2, etc., of the physical quantity sensor 1 on accuracy deterioration can be suppressed, thereby achieving high accuracy of the physical quantity sensor 1. Therefore, miniaturization and high accuracy of the physical quantity sensor 1 can be achieved simultaneously.

[0039] Furthermore, according to the physical quantity sensor 1 of this embodiment, the first movable electrode 20, which functions as a mass unit, can be arranged by an amount corresponding to the width of the space between the first fixed part 40 and the first support beam 42 and the space where the second fixed part 80 and the second support beam 82 are arranged. Therefore, the displacement of the first movable electrode 20 when acceleration or the like is applied can be increased, thereby achieving high sensitivity in the detection of acceleration or the like in the first element part 91. Additionally, the second movable electrode 60, which functions as a mass unit, can be arranged by an amount corresponding to the width of the space between the second fixed part 80 and the second support beam 82 and the space where the first fixed part 40 and the first support beam 42 are arranged. Therefore, the displacement of the second movable electrode 60 when acceleration or the like is applied can be increased, thereby achieving high sensitivity in the detection of acceleration or the like in the second element part 92. Therefore, it is also possible to simultaneously achieve miniaturization, high precision, and high sensitivity of the physical quantity sensor 1.

[0040] More specifically, in Figure 1 , Figure 2 In the diagram, when viewed from a third-party perspective towards DR3, the first movable electrode 20, the second fixed part 80 and the second support beam 82, the first fixed part 40 and the first support beam 42, and the second movable electrode 60 are arranged in this order along the first direction DR1. This allows the space between the first fixed part 40 and the first support beam 42 and the first movable electrode 20 to be used to arrange the second fixed part 80 and the second support beam 82, and the space between the second fixed part 80 and the second support beam 82 and the second movable electrode 60 to be used to arrange the first fixed part 40 and the first support beam 42. Therefore, the first movable electrode 20, the second fixed part 80 and the second support beam 82, the first fixed part 40 and the first support beam 42, and the second movable electrode 60 can be compactly arranged along the first direction DR1, thereby enabling miniaturization of the physical quantity sensor 1.

[0041] For example, in the physical quantity sensor of Patent Document 1, a first element section and a second element section, each with a single-sided lever structure, are arranged side-by-side along the Y-axis, and the thicknesses of the movable electrode and the fixed electrode in the Z-axis direction are set in a manner that enables differential detection. In this physical quantity sensor, rotational torque is easily generated in each element section of the single-sided lever structure because the mass is concentrated on one side, and high sensitivity is achieved by forming a dual-element configuration. However, in the configuration where the first element section and the second element section are arranged side-by-side along the Y-axis, as in Patent Document 1, dead zones are easily generated, making miniaturization difficult. In addition, when acceleration is applied to other axial directions different from the Z-axis, such as the X-axis direction, the opposing area of ​​the movable electrode and the fixed electrode in one of the first element section and the second element section increases, while the opposing area in the other of the first element section and the second element section decreases, and thus cannot be offset, leading to deterioration of sensitivity in other axes. Furthermore, since the distance between the first fixed part of the first element section and the second fixed part of the second element section is separated, it is easily affected by the warping of the substrate, etc., making high-precision detection difficult.

[0042] Furthermore, as a first comparative example of this embodiment, a physical quantity sensor with a lever structure where the movable electrode and fixed electrode are positioned opposite each other on both sides of the rotation axis, rather than a single-sided lever structure, can be considered. However, in this first comparative example, compared to a single-sided lever structure, it is difficult to produce displacement even if the number of detection units is simply doubled, so the sensitivity does not simply double. Specifically, in the lever structure of the first comparative example, in the region symmetrical about the rotation axis in the movable body, the rotational torque expressed as mass × distance cancels out, so only the asymmetrical part can contribute to the rotational torque. Therefore, as a method to improve sensitivity, increasing the asymmetrical part is difficult to improve sensitivity when compared with a single-sided lever structure with the same area. As another method, there is a method to obtain displacement by reducing the spring stiffness of the torsion spring, but if compared with a single-sided lever structure with the same sensitivity, it will lead to a deterioration in impact resistance.

[0043] Furthermore, as a second comparative example of this embodiment, a physical quantity sensor in which the first fixed part, the second movable electrode part, the first movable electrode part, and the second fixed part are arranged in the second direction in this order can be considered. However, in this second comparative example, since the distance between the first fixed part and the second fixed part is large, when warping occurs on the substrate due to stress, the effects of warping in the first fixed part and the second fixed part are different, and thus the effects of each component cannot be offset. Therefore, there is a problem that it is easily affected by thermal stress and external stress.

[0044] In this respect, in this embodiment, the Z-axis accelerometer, based on an out-of-plane area-varying structure of fixed and movable electrodes of varying thicknesses, adopts a single-sided lever structure and an opening that extends from the support beam (which serves as a torsion spring) to a portion of the movable body up to the movable electrode section. Furthermore, it is configured as a dual-element unit, as in the first element section 91 and the second element section 92, with the fixed portion and support beam of the other element section positioned at the opening of one element section. Additionally, in each single-sided lever structure, the movable electrode extends to both sides in an in-plane direction orthogonal to the rotation axis.

[0045] Specifically, Figure 1 The area-varying Z-axis accelerometer, also known as the physical quantity sensor 1, includes a first fixed electrode portion 10, a second fixed electrode portion 50, a first fixed portion 40, and a second fixed portion 80 fixed on a substrate 2 serving as a support substrate. Furthermore, the physical quantity sensor 1 includes: a first movable electrode portion 20 and a first connecting portion 30 serving as a first movable body; a second movable electrode portion 60 and a second connecting portion 70 serving as a second movable body; a first support beam 42 connected to the first connecting portion 30 and the first fixed portion 40 of the first movable body; and a second support beam 82 connected to the second connecting portion 70 and the second fixed portion 80 of the second movable body. The first movable electrode portion 20 has a first movable electrode 21 and a second movable electrode 22 extending laterally from the first base movable electrode 23 of the first movable body along a first direction DR1. The second movable electrode portion 60 has a third movable electrode 61 and a fourth movable electrode 62 extending laterally from the second base movable electrode 63 of the second movable body along the first direction DR1.

[0046] Moreover, in Figure 1 In the physical quantity sensor 1, when an acceleration in the Z-axis direction is applied, the first movable body of the first element section 91 rotates about the first support beam 42, which serves as a torsion spring, as its rotation axis, and the second movable body of the second element section 92 rotates about the second support beam 82, which also serves as a torsion spring, as its rotation axis. Furthermore, in one of the detection sections Z1 of the first element section 91 and Z2 of the second element section 92, the opposing area between the movable electrode and the fixed electrode decreases; in the other detection section, the opposing area is fixed or increased. (The following will be discussed later.) Figure 5For example, when an acceleration in the positive Z-axis direction (i.e., the third direction DR3) is applied, the opposing area of ​​the detection section Z2 of the second element section 92 decreases, while the opposing area of ​​the detection section Z1 of the first element section 91 remains unchanged. On the other hand, when an acceleration in the negative Z-axis direction (i.e., the fourth direction DR4, opposite to the third direction DR3) is applied, the opposing area of ​​the detection section Z1 of the first element section 91 decreases, while the opposing area of ​​the detection section Z2 of the second element section 92 remains unchanged. By detecting the change in electrostatic capacitance caused by the change in the opposing area of ​​the movable electrode and the fixed electrode, the magnitude and direction of the applied acceleration can be detected.

[0047] As Figure 1 The physical quantity sensor 1 features a structure that employs a one-sided lever structure that opens a portion of the movable body from the support beam to the movable electrode section. For example, the first element section 91 is a one-sided lever structure that opens a portion of the first movable body from the first support beam 42 to the first movable electrode section 20. Specifically, the area surrounded by the first portion 31, the second portion 32, and the third portion 33 of the first connecting portion 30 becomes an opening, and the second fixing portion 80 and the second support beam 82 of the second element section 92 are disposed in this opening. Furthermore, the second element section 92 is a one-sided lever structure that opens a portion of the second movable body from the second support beam 82 to the second movable electrode section 60. Specifically, the area surrounded by the fourth portion 71, the fifth portion 72, and the sixth portion 73 of the second connecting portion 70 becomes an opening, and the first fixing portion 40 and the first support beam 42 of the first element section 91 are disposed in this opening.

[0048] Figure 1 Compared to a conventional lever structure, such a single-sided lever structure allows for displacement as a whole, where the rotational torque is expressed as mass × distance, and the first and second movable bodies contribute as a whole as mass. This is advantageous in terms of high sensitivity.

[0049] In addition, Figure 1In this configuration, a portion of each movable body is made open, but the contribution of the mass to the rotational torque increases with distance. Therefore, even if a portion of the mass near the rotation axis is absent, the displacement will not decrease significantly, resulting in a slight decrease in sensitivity. For example, in the first element section 91, the portion surrounded by the first part 31, the second part 32, and the third part 33 of the first connecting part 30 becomes an opening, and there is no mass there. However, since this opening is located close to the first support beam 42, which serves as the rotation axis, the sensitivity caused by providing the opening is slightly reduced. For example, in the first element section 91, since the first movable electrode section 20 or the third part 33, etc., function as a mass portion far from the first support beam 42, which serves as the rotation axis, high sensitivity can be achieved. Similarly, in the second element section 92, the portion surrounded by the fourth part 71, the fifth part 72, and the sixth part 73 of the second connecting part 70 becomes an opening, and there is no mass there. However, since this opening is located close to the second support beam 82, which serves as the rotation axis, the sensitivity caused by providing the opening is slightly reduced. For example, in the second element section 92, since the second movable electrode section 60 or the sixth section 73 functions as a mass section away from the second support beam 82 which is the axis of rotation, high sensitivity can be achieved.

[0050] Moreover, in Figure 1 In this design, the first element portion 91 and the second element portion 92 employ such a structure, with the fixing portion and support beam of the other element portion disposed within the opening of the movable body of one element portion. For example, the second fixing portion 80 and the second support beam 82 of the second element portion 92 are disposed within the opening of the first movable body of the first element portion 91, i.e., the area surrounded by the first portion 31, the second portion 32, and the third portion 33. Furthermore, the first fixing portion 40 and the first support beam 42 of the first element portion 91 are disposed within the opening of the second movable body of the second element portion 92, i.e., the area surrounded by the fourth portion 71, the fifth portion 72, and the sixth portion 73. By forming such a structure, the space that is a dead zone in the aforementioned Patent Document 1 can be effectively utilized, thus enabling miniaturization of the physical quantity sensor 1.

[0051] In addition, Figure 1 In this structure, the first fixing part 40 and the second fixing part 80, which serve as anchors, are arranged close to each other. Therefore, even if the substrate 2 warps due to stress, the warping has the same effect on each fixing part, thus offsetting the influence of each component part and enabling a structure that is not easily affected by thermal stress or external stress.

[0052] In addition, Figure 1In the movable electrode section, two movable electrodes extend from the base movable electrode to both sides. Therefore, the opposing area between the movable electrode and the fixed electrode does not change with the application of acceleration in other axial directions relative to the length direction of the movable electrode, thus suppressing the deterioration of sensitivity in other axes. For example, in the first movable electrode section 20, the first movable electrode 21 and the second movable electrode 22 extend from the first base movable electrode 23, which extends in the direction along the second direction DR2, to both sides along the first direction DR1. Therefore, with the application of acceleration in other axes, such as the X-axis, the opposing area between the first movable electrode 21, the second movable electrode 22, and the first fixed electrode 11, the second fixed electrode 12 does not change with the application of acceleration in other axes, such as the Z-axis, thus suppressing the deterioration of sensitivity in other axes. In addition, in the second movable electrode section 60, the third movable electrode 61 and the fourth movable electrode 62 extend from the second base movable electrode 63, which extends in the direction along the second direction DR2, to both sides along the first direction DR1. Therefore, relative to the application of acceleration in the direction of other axes, such as the X-axis, the opposing areas between the third movable electrode 61, the fourth movable electrode 62 and the third fixed electrode 51, the fourth fixed electrode 52 do not change, thus suppressing the deterioration of sensitivity on other axes.

[0053] Figure 3 , Figure 4 , Figure 5 This is an operational diagram illustrating the detection units Z1 and Z2, which have a movable electrode and a fixed electrode facing each other. In these detection units Z1 and Z2, the movable electrode and the fixed electrode have different thicknesses on the third-direction DR3. Specifically, as... Figure 3 As shown, in the detection unit Z1, the thickness of the movable electrode 24 of the first movable electrode unit 20 on the third direction DR3 is greater than the thickness of the fixed electrode 14 of the first fixed electrode unit 10 on the third direction DR3. On the other hand, as Figure 4 As shown, in the detection unit Z2, the thickness of the movable electrode 64 of the second movable electrode unit 60 on the third direction DR3 is less than the thickness of the fixed electrode 54 of the second fixed electrode unit 50 on the third direction DR3. Here, the movable electrode 24 in FIG3 corresponds to Figure 1 The first movable electrode 21 and the second movable electrode 22 are respectively, and the fixed electrode 14 corresponds to the first fixed electrode 11 and the second fixed electrode 12. Additionally, Figure 4 The movable electrode 64 corresponds to Figure 1 The third movable electrode 61 and the fourth movable electrode 62 are respectively, and the fixed electrode 54 corresponds to the third fixed electrode 51 and the fourth fixed electrode 52.

[0054] Moreover, such as Figure 5As shown, in the initial state, when viewed from the second direction DR2 side, the movable electrode 24 and the fixed electrode 14 are coplanar at their ends on the fourth direction DR4 side, and the movable electrode 64 and the fixed electrode 54 are also coplanar at their ends on the fourth direction DR4 side. Here, the initial state is the state without applied acceleration, and it is a stationary state. In addition, the fourth direction DR4 is the opposite direction to the third direction DR3, for example, the direction on the negative side of the Z-axis direction.

[0055] When a third-party acceleration is applied to DR3 from this initial state, such as Figure 5 As shown, the movable electrodes 24 and 64 are displaced in the opposite direction to the third direction DR3, i.e., the fourth direction DR4. Consequently, in the detection unit Z2, the opposing area between the movable electrode 64 and the fixed electrode 54 decreases, while in the detection unit Z1, the opposing area between the movable electrode 24 and the fixed electrode 14 remains constant. Therefore, by detecting the change in electrostatic capacitance caused by the reduction in the opposing area in the detection unit Z2, the acceleration in the third direction DR3 can be detected. On the other hand, when the acceleration in the fourth direction DR4 is applied from the initial state, as... Figure 5 As shown, movable electrodes 24 and 64 are displaced towards the third direction DR3. Consequently, in detection unit Z1, the opposing area between movable electrode 24 and fixed electrode 14 decreases, while in detection unit Z2, the opposing area between movable electrode 64 and fixed electrode 54 remains constant. Therefore, by detecting the change in electrostatic capacitance caused by the reduction in the opposing area in detection unit Z1, the acceleration of the fourth direction DR4 can be detected. Specifically, for example, a differential detection circuit is provided, in which the first input terminal for differential amplification is electrically connected to movable electrode 24, and the second input terminal for differential amplification is electrically connected to movable electrode 64. This differential detection circuit detects the acceleration of the third direction DR3 and the fourth direction DR4. One of the first and second input terminals of the differential detection circuit is an inverting input terminal, and the other is a non-inverting input terminal.

[0056] In addition, Figures 3 to 5In the initial state, the movable electrodes 24 and 64 are described as being coplanar with the ends of the fixed electrodes 14 and 54 on the fourth direction DR4 side, but this embodiment is not limited to this. For example, in the initial state, the movable electrode 24 may be shifted towards the third direction DR3 side in the detection unit Z1 so that the ends of the movable electrode 24 and the fixed electrode 14 on the third direction DR3 side and the other end on the fourth direction DR4 side are not aligned. Similarly, the movable electrode 64 may be shifted towards the fourth direction DR4 side in the detection unit Z2 so that the ends of the movable electrode 64 and the fixed electrode 54 on the third direction DR3 side and the other end on the fourth direction DR4 side are not aligned. In this way, for example, when an acceleration is applied to the third direction DR3, the opposing area in the detection unit Z1 increases and the electrostatic capacitance increases, while the opposing area in the detection unit Z2 decreases and the electrostatic capacitance decreases. On the other hand, when an acceleration is applied to the fourth direction DR4, the opposing area in the detection unit Z1 decreases and the electrostatic capacitance decreases, while the opposing area in the detection unit Z2 increases and the electrostatic capacitance increases. As a result, the ratio of the change in electrostatic capacitance to the change in acceleration becomes larger, thus enabling a more sensitive physical quantity sensor 1.

[0057] As described above, in this embodiment, the movable electrode 24 of the first movable electrode section 20 faces the fixed electrode 14 of the first fixed electrode section 10 in the second direction DR2, and the movable electrode 64 of the second movable electrode section 60 faces the fixed electrode 54 of the second fixed electrode section 50 in the second direction DR2. For example, each movable electrode of the movable electrode group of the first movable electrode section 20 faces each fixed electrode of the fixed electrode group of the first fixed electrode section 10 in the second direction DR2, and each movable electrode of the movable electrode group of the second movable electrode section 60 faces each fixed electrode of the fixed electrode group of the second fixed electrode section 50 in the second direction DR2.

[0058] Thus, for example, by detecting the change in electrostatic capacitance caused by the change in the opposing area of ​​the first movable electrode portion 20 and the first fixed electrode portion 10, or the change in electrostatic capacitance caused by the change in the opposing area of ​​the second movable electrode portion 60 and the second fixed electrode portion 50, the change in physical quantities such as acceleration on a third direction orthogonal to the second direction DR2 can be measured.

[0059] In addition, in this embodiment, such as Figure 1As shown, the first movable electrode section 20 includes a first base movable electrode 23, a first movable electrode 21 extending from the first base movable electrode 23 in a first direction DR1, and a second movable electrode 22 extending from the first base movable electrode 23 in the opposite direction to the first direction DR1. Additionally, the first fixed electrode section 10 includes a first fixed electrode 11 opposite to the first movable electrode 21 and a second fixed electrode 12 opposite to the second movable electrode 22. The first base movable electrode 23 is a portion extending from one end of, for example, the first connecting portion 30 along, for example, a second direction DR2, and forms the base of the movable electrode assembly of the first movable electrode section 20.

[0060] In this way, when physical quantities such as acceleration in other axial directions, such as the first direction DR1, change, for example, the opposing area of ​​one of the opposing areas of the first movable electrode 21 and the first fixed electrode 11, and the opposing area of ​​the second movable electrode 22 and the second fixed electrode 12, decreases while the opposing area of ​​the other increases. Therefore, when physical quantities such as acceleration in other axial directions change, the change in the opposing area can be offset, thereby suppressing the deterioration of sensitivity on other axes.

[0061] In addition, in this embodiment, such as Figure 1 As shown, the second movable electrode section 60 includes a second base movable electrode 63, a third movable electrode 61 extending from the second base movable electrode 63 in a first direction DR1, and a fourth movable electrode 62 extending from the second base movable electrode 63 in the opposite direction to the first direction DR1. Additionally, the second fixed electrode section 50 includes a third fixed electrode 51 opposite to the third movable electrode 61 and a fourth fixed electrode 52 opposite to the fourth movable electrode 62. The second base movable electrode 63 is a portion extending from one end of, for example, the second connecting portion 70 along, for example, the second direction DR2, and forms the base of the movable electrode assembly of the second movable electrode section 60.

[0062] Thus, when physical quantities such as acceleration in other axial directions, such as the first direction DR1, change, for example, the opposing area of ​​one of the opposing areas of the third movable electrode 61 and the third fixed electrode 51 and the fourth movable electrode 62 and the fourth fixed electrode 52 decreases while the opposing area of ​​the other increases. Therefore, when physical quantities such as acceleration in other axial directions change, the change in the opposing area can be offset, thereby suppressing the deterioration of sensitivity on other axes.

[0063] In addition, in this embodiment, such as Figure 5As shown, when the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the third direction DR3, the electrostatic capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10 decreases. Specifically, when an acceleration is applied to the fourth direction DR4 side, causing the first movable electrode portion 20 and the second movable electrode portion 60 to be displaced in the third direction DR3, the opposing area between the movable electrode 24 of the first movable electrode portion 20 and the fixed electrode 14 of the first fixed electrode portion 10 decreases, thereby reducing the electrostatic capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10. At this time, the electrostatic capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50 can be reduced as follows: Figure 5 The value shown can remain constant or can be increased.

[0064] In addition, such as Figure 5 As shown, when the first movable electrode portion 20 and the second movable electrode portion 60 are displaced in the fourth direction DR4, which is opposite to the third direction DR3, the electrostatic capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50 decreases. Specifically, when an acceleration is applied to the third direction DR3 side, causing the first movable electrode portion 20 and the second movable electrode portion 60 to be displaced in the fourth direction DR4, the opposing area between the movable electrode 64 of the second movable electrode portion 60 and the fixed electrode 54 of the second fixed electrode portion 50 decreases, thereby reducing the electrostatic capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50. At this time, the electrostatic capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10 can be reduced as follows: Figure 5 The value shown can remain constant or can be increased.

[0065] In this way, by detecting a decrease in the electrostatic capacitance between the first movable electrode portion 20 and the first fixed electrode portion 10, displacement of the first movable electrode portion 20 and the second movable electrode portion 60 in the third direction DR3 can be detected. Furthermore, by detecting a decrease in the electrostatic capacitance between the second movable electrode portion 60 and the second fixed electrode portion 50, displacement of the first movable electrode portion 20 and the second movable electrode portion 60 in the fourth direction DR4 can be detected. Therefore, displacement of the first movable electrode portion 20 and the second movable electrode portion 60 in the third direction DR3 or the fourth direction DR4 can be detected with high sensitivity.

[0066] 2. Other examples of composition

[0067] Next, various configuration examples of this embodiment will be described. Figure 6 Other configuration examples of physical quantity sensor 1 are shown. Figure 1 In the middle, the movable electrode extends from the base movable electrode to both sides, but... Figure 6 In the middle, the fixed electrode extends from the base fixed electrode to both sides.

[0068] Specifically, in Figure 6 In this configuration, the first fixed electrode section 10 includes a first base fixed electrode 13, a first fixed electrode 11 extending from the first base fixed electrode 13 in a first direction DR1, and a second fixed electrode 12 extending from the first base fixed electrode 13 in the opposite direction to the first direction DR1. Additionally, the first movable electrode section 20 includes a first movable electrode 21 opposite to the first fixed electrode 11 and a second movable electrode 22 opposite to the second fixed electrode 12. The first base fixed electrode 13 is a portion extending from, for example, the fixed portion 3 of the first fixed electrode section 10 along, for example, a second direction DR2, and forms the base of the fixed electrode assembly of the first fixed electrode section 10. For example, in... Figure 1 In the middle, the first fixed electrode part 10 is supported at two points by two fixed parts 3 and 4, but... Figure 6 In the middle, the first fixed electrode part 10 is supported at one point by a fixed part 3.

[0069] In this way, when physical quantities such as acceleration in other axial directions, such as the first direction DR1, change, for example, the opposing area of ​​one of the opposing areas of the first movable electrode 21 and the first fixed electrode 11, and the opposing area of ​​the second movable electrode 22 and the second fixed electrode 12, decreases while the opposing area of ​​the other increases. Therefore, when physical quantities such as acceleration in other axial directions change, the change in the opposing area can be offset, thereby suppressing the deterioration of sensitivity on other axes.

[0070] In addition, Figure 6 In this configuration, the second fixed electrode section 50 includes a second base fixed electrode 53, a third fixed electrode 51 extending from the second base fixed electrode 53 in a first direction DR1, and a fourth fixed electrode 52 extending from the second base fixed electrode 53 in the opposite direction to the first direction DR1. Additionally, the second movable electrode section 60 includes a third movable electrode 61 opposite to the third fixed electrode 51 and a fourth movable electrode 62 opposite to the fourth fixed electrode 52. The second base fixed electrode 53 is a portion extending from, for example, the fixed portion 5 of the second fixed electrode section 50 along, for example, a second direction DR2, and forms the base of the fixed electrode assembly of the second fixed electrode section 50. For example, in... Figure 1 In the middle, the second fixed electrode part 50 is supported at two points by two fixed parts 5 and 6, but... Figure 6 In the middle, the second fixed electrode part 50 is supported at one point by a fixed part 5.

[0071] In this way, when physical quantities such as acceleration in other axial directions, such as the first direction DR1, change, for example, the opposing area of ​​one of the opposing areas of the first movable electrode 21 and the first fixed electrode 11, and the opposing area of ​​the second movable electrode 22 and the second fixed electrode 12, decreases while the opposing area of ​​the other increases. Therefore, when physical quantities such as acceleration in other axial directions change, the change in the opposing area can be offset, thereby suppressing the deterioration of sensitivity on other axes.

[0072] In addition, Figure 6 In this configuration, first movable electrode portions 20 are arranged on both sides of the first fixed electrode portion 10, and second movable electrode portions 60 are arranged on both sides of the second fixed electrode portion 50. Therefore, with... Figure 1 In comparison, by obtaining the mass of the first movable body having the first movable electrode portion 20 and the mass of the second movable body having the second movable electrode portion 60, high sensitivity can be achieved. In particular, the portion of the first movable electrode portion 20 opposite to the first direction DR1 of the first fixed electrode portion 10, or the portion of the second movable electrode portion 60 on the first direction DR1 side of the second fixed electrode portion 50, functions as a mass portion away from the rotation axis, thus contributing to the high sensitivity of the physical quantity sensor 1.

[0073] Figure 7 Other configuration examples of physical quantity sensor 1 are shown. Figure 1 In the first element 91, a detection unit Z1, as shown in FIG3, is provided in the arrangement area of ​​the first movable electrode 20 and the first fixed electrode 10. In the second element 92, a detection unit Z1 is provided in the arrangement area of ​​the second movable electrode 60 and the second fixed electrode 50. Figure 4 The detection unit Z2 is described in the text. In contrast, in... Figure 7 In the configuration area of ​​the first movable electrode section 20 and the first fixed electrode section 10, two detection sections are provided in the manner of detection section Z1 and detection section Z2. In the configuration area of ​​the second movable electrode section 60 and the second fixed electrode section 50, two detection sections are provided in the manner of detection section Z1 and detection section Z2.

[0074] like Figure 5As explained, detection unit Z1 is a detection unit that, for example, when an acceleration in the fourth direction DR4 is applied, the movable electrode 24 is displaced in the third direction DR3, reducing its opposing area with the fixed electrode 14, thereby reducing the electrostatic capacitance. Detection unit Z2 is a detection unit that, for example, when an acceleration in the third direction DR3 is applied, the movable electrode 64 is displaced in the fourth direction DR4, reducing its opposing area with the fixed electrode 54, thereby reducing the electrostatic capacitance. In other words, in detection unit Z1, the electrostatic capacitance is reduced by the acceleration in the fourth direction DR4, and in detection unit Z2, the electrostatic capacitance is reduced by the acceleration in the third direction DR3. For example, as... Figure 3 As shown, in the detection unit Z1, the thickness of the movable electrode 24 on the third-direction DR3 is greater than the thickness of the fixed electrode 14, as... Figure 4 As shown, in the detection unit Z2, the thickness of the movable electrode 64 on the third-direction DR3 is less than the thickness of the fixed electrode 54.

[0075] Moreover, in Figure 7 In this configuration, a detection unit Z1 is disposed in a first region R1 within the arrangement region of the first movable electrode section 20 and the first fixed electrode section 10, and a detection unit Z2 is disposed in a second region R2. Furthermore, a detection unit Z2 is disposed in a third region R3 within the arrangement region of the second movable electrode section 60 and the second fixed electrode section 50, and a detection unit Z1 is disposed in a fourth region R4.

[0076] Therefore, in Figure 7 When the first movable electrode 20 and the second movable electrode 60 are displaced in the third direction DR3 by, for example, acceleration in the fourth direction DR4, the electrostatic capacitance between the first movable electrode 20 and the first fixed electrode 10 disposed in the first region R1 of the arrangement region of the first movable electrode 20 and the first fixed electrode 10 decreases. Furthermore, the electrostatic capacitance between the second movable electrode 60 and the second fixed electrode 50 disposed in the fourth region R4 of the arrangement region of the second movable electrode 60 and the second fixed electrode 50 decreases.

[0077] That is, such as Figure 7 As shown, a detection unit Z1 is disposed in the first region R1. When the first movable electrode 20 changes direction DR3, the opposing area between the detection unit Z1 and the first fixed electrode 10 decreases. For example, as... Figure 3As shown, a detection unit Z1 is provided where the thickness of the movable electrode 24 on the third-direction DR3 is greater than the thickness of the fixed electrode 14. Therefore, when the first movable electrode 20 changes direction towards the third-direction DR3, the electrostatic capacitance between the first movable electrode 20 and the first fixed electrode 10 disposed in the first region R1 decreases. Furthermore, a detection unit Z1 is disposed in the fourth region R4, and the opposing area between the detection unit Z1 and the second fixed electrode 50 decreases when the second movable electrode 60 changes direction towards the third-direction DR3. Therefore, when the second movable electrode 60 changes direction towards the third-direction DR3, the electrostatic capacitance between the second movable electrode 60 and the second fixed electrode 50 disposed in the fourth region R4 decreases.

[0078] On the other hand, when the first movable electrode 20 and the second movable electrode 60 are displaced in the fourth direction DR4, opposite to the third direction DR3, by means of, for example, acceleration in the third direction DR3, the electrostatic capacitance between the first movable electrode 20 and the first fixed electrode 10 disposed in the second region R2 of the arrangement region of the first movable electrode 20 and the first fixed electrode 10 decreases. Furthermore, the electrostatic capacitance between the second movable electrode 60 and the second fixed electrode 50 disposed in the third region R3 of the arrangement region of the second movable electrode 60 and the second fixed electrode 50 decreases.

[0079] That is, such as Figure 7 As shown, a detection unit Z2 is disposed in the second region R2. The opposing area between the detection unit Z2 and the first fixed electrode unit 10 decreases when the first movable electrode unit 20 changes in the fourth direction DR4. For example, as... Figure 4 As shown, a detection unit Z2 is provided on the third-direction DR3, the thickness of which is less than the thickness of the fixed electrode 14. Therefore, when the first movable electrode 20 changes in the fourth direction DR4, the electrostatic capacitance between the first movable electrode 20 and the first fixed electrode 10 disposed in the second region R2 decreases. Furthermore, a detection unit Z2 is disposed in the third region R3, and the opposing area between the detection unit Z2 and the second fixed electrode 50 decreases when the second movable electrode 60 changes in the fourth direction DR4. Therefore, when the second movable electrode 60 changes in the fourth direction DR4, the electrostatic capacitance between the second movable electrode 60 and the second fixed electrode 50 disposed in the third region R3 decreases.

[0080] Thus, by detecting a decrease in the electrostatic capacitance between the first movable electrode 20 and the first fixed electrode 10 in the first region R1 where the detection unit Z1 is located, or a decrease in the electrostatic capacitance between the second movable electrode 60 and the second fixed electrode 50 in the fourth region R4 where the detection unit Z1 is located, it is possible to detect that the first movable electrode 20 and the second movable electrode 60 have been displaced in the third direction DR3 due to acceleration, for example, in the fourth direction DR4. Furthermore, by detecting a decrease in the electrostatic capacitance between the first movable electrode 20 and the first fixed electrode 10 in the second region R2 where the detection unit Z2 is located, or a decrease in the electrostatic capacitance between the second movable electrode 60 and the second fixed electrode 50 in the third region R3 where the detection unit Z2 is located, it is possible to detect that the first movable electrode 20 and the second movable electrode 60 have been displaced in the fourth direction DR4 due to acceleration, for example, in the third direction DR3.

[0081] In addition, such as Figure 3 , Figure 4 As shown, when the thicknesses of the movable electrodes 24 and 64 on the third-direction DR3 are different in the detection section Z1 and the detection section Z2, in Figure 7 In this design, detection units Z1 and Z2 are respectively disposed in the first region R1 and the second region R2 of the first movable body, and detection units Z2 and Z1 are respectively disposed in the third region R3 and the fourth region R4 of the second movable body. Specifically, for example, with the vicinity of the center of the physical quantity sensor 1 as a reference, the detection unit Z1 in the first region R1 and the detection unit Z1 in the fourth region R4 are arranged in a point-symmetric manner, and the detection unit Z2 in the second region R2 and the detection unit Z2 in the third region R3 are arranged in a point-symmetric manner. Therefore, the mass of the first movable body having the first movable electrode 20 can be made equal to the mass of the second movable body having the second movable electrode 60, thereby achieving the advantage of good mass balance of the movable body.

[0082] In addition, Figure 7 In this configuration, the first region R1 and the second region R2 are regions arranged along the first direction DR1 in the configuration regions of the first movable electrode section 20 and the first fixed electrode section 10. Additionally, the third region R3 and the fourth region R4 are regions arranged along the first direction DR1 in the configuration regions of the second movable electrode section 60 and the second fixed electrode section 50.

[0083] Thus, when, for example, the first and second movable bodies move in the first direction DR1 (another axis direction), the electrostatic capacitance in the first region R1 where the detection unit Z1 is located decreases, while the electrostatic capacitance in the second region R2 where the detection unit Z2 is located increases. Therefore, the change in electrostatic capacitance is offset, thereby suppressing the deterioration of sensitivity on other axes. Furthermore, the electrostatic capacitance in the third region R3 where the detection unit Z2 is located decreases, while the electrostatic capacitance in the fourth region R4 where the detection unit Z1 is located increases. Therefore, the change in electrostatic capacitance is offset, thereby suppressing the deterioration of sensitivity on other axes.

[0084] In addition, Figure 7 In this configuration, the detection units are arranged along the first direction DR1 in the order of detection units Z1, Z2, Z2, Z1, but they can also be arranged along the first direction DR1 in, for example, the order of detection units Z2, Z1, Z1, Z2.

[0085] Figure 8 Other configuration examples of physical quantity sensor 1 are shown. Figure 8 and Figure 7 The difference lies in the positions of the fixing parts 3 and 4 of the first fixed electrode part 10. Figure 7 In this configuration, fixing portions 3 and 4 are arranged on the opposite side of the second direction DR2, relative to the first fixing electrode portion 10. Figure 8 In this configuration, fixing portions 3 and 4 are arranged on the second direction DR2 side relative to the first fixing electrode portion 10. Thus, both fixing portions 3 and 4 of the first fixing electrode portion 10 and fixing portions 5 and 6 of the second fixing electrode portion 50 are arranged on the second direction DR2 side. Therefore, electrode wiring for fixing electrodes from fixing portions 3 and 4 and electrode wiring for fixing electrodes from fixing portions 5 and 6 can be led out towards the second direction DR2 side, thereby achieving efficient electrode wiring.

[0086] Figure 9 Other configuration examples of physical quantity sensor 1 are shown. Figure 9 In this configuration, the first region R1 and the second region R2 are regions arranged along the second direction DR2 in the configuration regions of the first movable electrode section 20 and the first fixed electrode section 10. Furthermore, the third region R3 and the fourth region R4 are regions arranged along the second direction DR2 in the configuration regions of the second movable electrode section 60 and the second fixed electrode section 50. Even with this configuration, changes in electrostatic capacitance can be offset within the detection sections Z1 and Z2 of each element section, such as the first element section 91 and the second element section 92, thereby suppressing the deterioration of sensitivity on other axes.

[0087] In addition, Figure 7 , Figure 8 , Figure 9In this configuration, the first movable electrode section 20 includes a first base movable electrode 23, a first movable electrode 21 extending from the first base movable electrode 23 in a first direction DR1, and a second movable electrode 22 extending from the first base movable electrode 23 in the opposite direction to the first direction DR1. Furthermore, the first fixed electrode section 10 includes a first fixed electrode 11 opposite to the first movable electrode 21 and a second fixed electrode 12 opposite to the second movable electrode 22. Additionally, the second movable electrode section 60 includes a second base movable electrode 63, a third movable electrode 61 extending from the second base movable electrode 63 in the first direction DR1, and a fourth movable electrode 62 extending from the second base movable electrode 63 in the opposite direction to the first direction DR1. Furthermore, the second fixed electrode section 50 includes a third fixed electrode 51 opposite to the third movable electrode 61 and a fourth fixed electrode 52 opposite to the fourth movable electrode 62.

[0088] Thus, when physical quantities such as acceleration in other axial directions, such as the first direction DR1, change, for example, the opposing area of ​​one of the opposing areas of the first movable electrode 21 and the first fixed electrode 11, and the opposing area of ​​the second movable electrode 22 and the second fixed electrode 12, decreases while the opposing area of ​​the other increases. Furthermore, the opposing area of ​​one of the opposing areas of the third movable electrode 61 and the third fixed electrode 51, and the opposing area of ​​the fourth movable electrode 62 and the fourth fixed electrode 52, decreases while the opposing area of ​​the other increases. Therefore, when physical quantities such as acceleration in other axial directions change, the changes in the opposing areas can be offset, thereby suppressing the deterioration of sensitivity on other axes.

[0089] In addition, Figure 7 , Figure 8 , Figure 9 In, it can also be with Figure 6 The same terrain is configured such that the fixed electrode extends from the base fixed electrode to both sides and is opposite to the corresponding movable electrode.

[0090] 3. Inertial Measurement Device

[0091] Next, use Figure 10 , Figure 11 An example of the inertial measurement device 2000 of this embodiment will be described. Figure 10 The inertial measurement unit (IMU) shown is a device for detecting the inertial motion quantities of moving bodies such as cars and robots, including their posture and behavior. The IMU 2000 is a so-called six-axis motion sensor, equipped with acceleration sensors that detect accelerations along three axes (ax, ay, az) and angular velocity sensors that detect angular velocities around the three axes (ωx, ωy, ωz).

[0092] The inertial measurement unit 2000 is a cuboid with a roughly square planar shape. Furthermore, threaded holes 2110 are formed near two vertices along the diagonal of the square, serving as mounting portions. By passing two screws through these two threaded holes 2110, the inertial measurement unit 2000 can be fixed to the mounting surface of a vehicle, such as an automobile. Moreover, by selecting or modifying components, it can be miniaturized to a size suitable for inclusion in, for example, smartphones or digital cameras.

[0093] The inertial measurement device 2000 is configured to include a housing 2100, a coupling member 2200, and a sensor module 2300, with the sensor module 2300 inserted into the interior of the housing 2100 via the coupling member 2200. The sensor module 2300 has an inner housing 2310 and a circuit board 2320. The inner housing 2310 has a recess 2311 for preventing contact with the circuit board 2320 and an opening 2312 for exposing the connector 2330 (described later). Furthermore, the circuit board 2320 is bonded to the lower surface of the inner housing 2310 via an adhesive.

[0094] like Figure 11 As shown, the upper surface of the circuit board 2320 is equipped with a connector 2330, an angular velocity sensor 2340z for detecting the angular velocity around the Z-axis, and an accelerometer 2350 for detecting the acceleration in each of the X, Y, and Z-axis directions. Additionally, the side surface of the circuit board 2320 is equipped with an angular velocity sensor 2340x for detecting the angular velocity around the X-axis and an angular velocity sensor 2340y for detecting the angular velocity around the Y-axis.

[0095] The acceleration sensor unit 2350 includes at least a physical quantity sensor 1 for measuring acceleration in the Z-axis direction, and can detect acceleration in a single-axis direction, or acceleration in a dual-axis or tri-axis direction, as needed. Furthermore, there are no particular limitations on the angular velocity sensors 2340x, 2340y, and 2340z; for example, a vibrating gyroscope sensor utilizing the Coriolis force can be used.

[0096] In addition, a control IC 2360 is mounted on the lower surface of the circuit board 2320. The control IC 2360, which is a control unit that controls the device based on the detection signal output from the physical quantity sensor 1, is, for example, a microcontroller unit (MCU), which includes a storage unit including non-volatile memory, an A / D converter, etc., and controls various parts of the inertial measurement device 2000. Furthermore, several other electronic components are also mounted on the circuit board 2320.

[0097] As described above, the inertial measurement device 2000 of this embodiment includes a physical quantity sensor 1 and a control IC 2360, which is a control unit that controls based on the detection signal output from the physical quantity sensor 1. According to this inertial measurement device 2000, since an acceleration sensor unit 2350 including the physical quantity sensor 1 is used, an inertial measurement device 2000 that can enjoy the effects of the physical quantity sensor 1 and achieve high precision can be provided.

[0098] Furthermore, the inertial measurement device 2000 is not limited to Figure 10 , Figure 11 The configuration is as follows. For example, the inertial measurement device 2000 may be configured such that angular velocity sensors 2340x, 2340y, and 2340z are not provided, and only physical quantity sensor 1 is provided as an inertial sensor. In this case, the inertial measurement device 2000 can be implemented by, for example, housing physical quantity sensor 1 and control IC 2360 that implements the control unit in a package that serves as a housing.

[0099] As described above, the physical quantity sensor of this embodiment includes: a first fixed electrode portion and a second fixed electrode portion disposed on a substrate; a first movable electrode portion disposed such that the movable electrode faces the fixed electrode of the first fixed electrode portion; and a second movable electrode portion disposed such that the movable electrode faces the fixed electrode of the second fixed electrode portion. Furthermore, the physical quantity sensor includes: a first fixed portion and a second fixed portion fixed on the substrate; a first support beam, one end of which is connected to the first fixed portion; a first connecting portion connecting the other end of the first support beam to the first movable electrode portion; a second support beam, one end of which is connected to the second fixed portion; and a second connecting portion connecting the other end of the second support beam to the second movable electrode portion. Moreover, when the three mutually orthogonal directions are designated as the first direction, the second direction, and the third direction, when viewed from the third direction orthogonal to the substrate, the first movable electrode portion, the second fixed portion, the first fixed portion, and the second movable electrode portion are arranged along the first direction in the order of first movable electrode portion, second fixed portion, first fixed portion, and second movable electrode portion.

[0100] According to this configuration of the physical quantity sensor, the second fixing part can be arranged using the space between the first fixing part and the first movable electrode part, and the first fixing part can be arranged using the space between the second fixing part and the second movable electrode part. Therefore, the first movable electrode part, the second fixing part, the first fixing part, and the second movable electrode part can be arranged compactly along the first direction, thereby achieving miniaturization of the physical quantity sensor. In addition, by arranging the first fixing part and the second fixing part close together, the accuracy degradation caused by the warping of the physical quantity sensor's substrate, etc., can be minimized, thus simultaneously achieving miniaturization and high accuracy of the physical quantity sensor.

[0101] Alternatively, in this embodiment, the movable electrode of the first movable electrode portion may be positioned opposite the fixed electrode of the first fixed electrode portion in a second direction, and the movable electrode of the second movable electrode portion may be positioned opposite the fixed electrode of the second fixed electrode portion in a second direction.

[0102] In this way, for example, the change in electrostatic capacitance caused by the change in the opposing area of ​​the first movable electrode portion and the first fixed electrode portion, or the change in electrostatic capacitance caused by the change in the opposing area of ​​the second movable electrode portion and the second fixed electrode portion, can be detected, thereby measuring a physical quantity.

[0103] Alternatively, in this embodiment, the first movable electrode portion may include a first base movable electrode, a first movable electrode extending from the first base movable electrode in a first direction, and a second movable electrode extending from the first base movable electrode in the opposite direction to the first direction, and the first fixed electrode portion may include a first fixed electrode opposite to the first movable electrode and a second fixed electrode opposite to the second movable electrode.

[0104] In this way, when physical quantities in other axial directions change, such as the opposing area of ​​the first movable electrode and the first fixed electrode decreasing and the opposing area of ​​the second movable electrode and the second fixed electrode increasing, the deterioration of sensitivity in other axes can be suppressed.

[0105] Alternatively, in this embodiment, the second movable electrode portion may include a second base movable electrode, a third movable electrode extending from the second base movable electrode in the first direction, and a fourth movable electrode extending from the second base movable electrode in the opposite direction to the first direction, and the second fixed electrode portion may include a third fixed electrode opposite to the third movable electrode and a fourth fixed electrode opposite to the fourth movable electrode.

[0106] In this way, when physical quantities in other axial directions change, such as when the opposing area of ​​one of the opposing areas of the third movable electrode and the third fixed electrode and the fourth movable electrode and the fourth fixed electrode decreases while the opposing area of ​​the other increases, the deterioration of sensitivity in other axes can be suppressed.

[0107] Alternatively, in this embodiment, the first fixed electrode portion may include a first base fixed electrode, a first fixed electrode extending from the first base fixed electrode in a first direction, and a second fixed electrode extending from the first base fixed electrode in the opposite direction to the first direction, and the first movable electrode portion may include a first movable electrode opposite to the first fixed electrode and a second movable electrode opposite to the second fixed electrode.

[0108] In this way, when physical quantities in other axial directions change, such as the opposing area of ​​the first movable electrode and the first fixed electrode decreasing and the opposing area of ​​the second movable electrode and the second fixed electrode increasing, the deterioration of sensitivity in other axes can be suppressed.

[0109] Alternatively, in this embodiment, the second fixed electrode portion may include a second base fixed electrode, a third fixed electrode extending from the second base fixed electrode in the first direction, and a fourth fixed electrode extending from the second base fixed electrode in the opposite direction to the first direction, and the second movable electrode portion may include a third movable electrode opposite to the third fixed electrode and a fourth movable electrode opposite to the fourth fixed electrode.

[0110] In this way, when physical quantities in other axial directions change, such as when the opposing area of ​​one of the opposing areas of the third movable electrode and the third fixed electrode and the fourth movable electrode and the fourth fixed electrode decreases while the opposing area of ​​the other increases, the deterioration of sensitivity in other axes can be suppressed.

[0111] Alternatively, in this embodiment, when the first movable electrode portion and the second movable electrode portion are displaced in a third direction, the electrostatic capacitance between the first movable electrode portion and the first fixed electrode portion decreases; when the first movable electrode portion and the second movable electrode portion are displaced in a fourth direction opposite to the third direction, the electrostatic capacitance between the second movable electrode portion and the second fixed electrode portion decreases.

[0112] Thus, by detecting a decrease in the electrostatic capacitance between the first movable electrode and the first fixed electrode, displacement of the first movable electrode and the second movable electrode in a third direction can be detected. Furthermore, by detecting a decrease in the electrostatic capacitance between the second movable electrode and the second fixed electrode, displacement of the first movable electrode and the second movable electrode in a fourth direction can be detected.

[0113] Alternatively, in this embodiment, when the first movable electrode portion and the second movable electrode portion are displaced in a third direction, the electrostatic capacitance between the first movable electrode portion and the first fixed electrode portion disposed in the first region of the arrangement area of ​​the first movable electrode portion and the first fixed electrode portion decreases, and the electrostatic capacitance between the second movable electrode portion and the second fixed electrode portion disposed in the fourth region of the arrangement area of ​​the second movable electrode portion and the second fixed electrode portion decreases. Alternatively, when the first movable electrode portion and the second movable electrode portion are displaced in a fourth direction opposite to the third direction, the electrostatic capacitance between the first movable electrode portion and the first fixed electrode portion disposed in the second region of the arrangement area of ​​the first movable electrode portion and the first fixed electrode portion decreases, and the electrostatic capacitance between the second movable electrode portion and the second fixed electrode portion disposed in the third region of the arrangement area of ​​the second movable electrode portion and the second fixed electrode portion decreases.

[0114] Thus, by detecting a decrease in the electrostatic capacitance between the first movable electrode and the first fixed electrode in the first region, or a decrease in the electrostatic capacitance between the second movable electrode and the second fixed electrode in the fourth region, displacement of the first and second movable electrode portions in a third direction can be detected. Furthermore, by detecting a decrease in the electrostatic capacitance between the first movable electrode and the first fixed electrode in the second region, or a decrease in the electrostatic capacitance between the second movable electrode and the second fixed electrode in the third region, displacement of the first and second movable electrode portions in a fourth direction can be detected.

[0115] Alternatively, in this embodiment, the first region and the second region may be regions arranged along the first direction within the configuration area of ​​the first movable electrode portion and the first fixed electrode portion, and the third region and the fourth region may be regions arranged along the first direction within the configuration area of ​​the second movable electrode portion and the second fixed electrode portion.

[0116] Thus, when, for example, the first movable electrode and the second movable electrode move in other axial directions, the electrostatic capacitance in the first region decreases, while the electrostatic capacitance in the second region increases. Therefore, the change in electrostatic capacitance is offset, thereby suppressing the deterioration of sensitivity on other axes. Furthermore, the electrostatic capacitance in the third region decreases, while the electrostatic capacitance in the fourth region increases. Therefore, the change in electrostatic capacitance is offset, thereby suppressing the deterioration of sensitivity on other axes.

[0117] Alternatively, in this embodiment, the first region and the second region may be regions arranged along the second direction within the configuration area of ​​the first movable electrode portion and the first fixed electrode portion, and the third region and the fourth region may be regions arranged along the second direction within the configuration area of ​​the second movable electrode portion and the second fixed electrode portion.

[0118] With such a configuration, for example, within the detection section of each component, changes in electrostatic capacitance can be offset, thereby suppressing the deterioration of sensitivity on other axes.

[0119] Alternatively, in this embodiment, the first movable electrode portion may include a first base movable electrode, a first movable electrode extending from the first base movable electrode in a first direction, and a second movable electrode extending from the first base movable electrode in the opposite direction to the first direction; the first fixed electrode portion may include a first fixed electrode opposite to the first movable electrode and a second fixed electrode opposite to the second movable electrode. Alternatively, the second movable electrode portion may include a second base movable electrode, a third movable electrode extending from the second base movable electrode in the first direction, and a fourth movable electrode extending from the second base movable electrode in the opposite direction to the first direction; the second fixed electrode portion may include a third fixed electrode opposite to the third movable electrode and a fourth fixed electrode opposite to the fourth movable electrode.

[0120] In this way, when physical quantities in other axial directions change, for example, if the opposing area of ​​one of the opposing areas of the first movable electrode and the first fixed electrode and the second movable electrode and the second fixed electrode decreases while the opposing area of ​​the other increases, and if the opposing area of ​​one of the opposing areas of the third movable electrode and the third fixed electrode and the fourth movable electrode and the fourth fixed electrode decreases while the opposing area of ​​the other increases, then the deterioration of sensitivity on other axes can be suppressed.

[0121] Alternatively, in this embodiment, when viewed from above, the first movable electrode portion, the second fixed portion and the second support beam, the first fixed portion and the first support beam, and the second movable electrode portion can be arranged in the first direction in the order of the first movable electrode portion, the second fixed portion and the second support beam, the first fixed portion and the first support beam, and the second movable electrode portion.

[0122] In this way, the space between the first fixed part and the first support beam and the first movable electrode part can be used to configure the second fixed part and the second support beam, and the space between the second fixed part and the second support beam and the second movable electrode part can be used to configure the first fixed part and the first support beam, thereby enabling the miniaturization of physical quantity sensors, etc.

[0123] Furthermore, this embodiment relates to an inertial measurement device including a control unit that performs control based on detection signals output from a physical quantity sensor.

[0124] Furthermore, while this embodiment has been described in detail above, those skilled in the art will readily understand that various modifications can be implemented without substantially departing from the novel aspects and effects of this disclosure. Therefore, all such modifications are included within the scope of this disclosure. For example, in the specification or drawings, a term described at least once simultaneously with a different term that is more general or synonymous can be replaced with that different term at any point in the specification or drawings. Additionally, all combinations of this embodiment and its modifications are included within the scope of this disclosure. Furthermore, the configuration, operation, etc., of the physical quantity sensor and the inertial measurement device are not limited to those described in this embodiment, and various modifications can be implemented.

Claims

1. A physical quantity sensor, characterized in that, include: The substrate includes a first surface and a second surface that are orthogonal to the Z-axis and are in an inside-out relationship with each other; A first element portion is disposed on the first surface of the substrate; as well as The second element portion is disposed on the first surface of the substrate and is point-symmetrical to the first element portion. The first element portion includes: A first fixing part is fixed to the substrate; A first support beam, one end of which is connected to the first fixing part, extends along the Y-axis direction; and The first movable body, relative to the first support beam, has a movable portion only on the negative side of the X-axis, and is configured to swing relative to the base plate about the first support beam as a rotation axis. The X-axis, Y-axis, and Z-axis are three mutually orthogonal axes. The second element includes: The second fixing part is fixed to the substrate; A second support beam, one end of which is connected to the second fixing part, extends in the Y-axis direction; and The second movable body, relative to the second support beam, has a movable portion only on the positive side of the X-axis, and is configured to swing relative to the base plate about the second support beam as a rotation axis. The first movable body includes: The first connecting part is connected to the other end of the first support beam; and The first movable electrode is positioned further along the negative side of the X-axis than the first support beam. The second movable body includes: The second connecting part is connected to the other end of the second support beam; and The second movable electrode is positioned further to the positive side of the X-axis than the second support beam. The first connecting part includes: The first part is positioned further to the negative side of the X-axis than the first support beam and extends along the Y-axis direction. The two ends of the first part are connected to the other end of the first support beam. The second part is positioned further along the negative side of the X-axis than the first part, connected to the end of the first part on the positive side of the Y-axis, and extends along the negative side of the X-axis; and The third part is positioned further to the negative side of the X-axis than the first part, extending from the negative side of the Y-axis end of the second part along the negative side of the Y-axis direction. The second connecting part includes: The fourth part is positioned closer to the positive side of the X-axis than the second support beam, and extends along the Y-axis direction. The two ends of the fourth part are connected to the other end of the second support beam. The fifth part is positioned further along the positive side of the X-axis than the fourth part, connected to the negative end of the fourth part on the Y-axis, and extends along the positive side of the X-axis; and The sixth part is positioned further along the positive side of the X-axis than the fourth part, extending from the end of the fifth part along the positive side of the Y-axis. The first component includes a first detection unit. The second component includes a second detection unit. The first detection unit includes: The first fixed electrode portion includes a fixing portion fixed to the substrate, extending from the fixing portion along the Y-axis direction; and The first movable electrode section. The first movable electrode section includes: A first base movable electrode is positioned further along the negative side of the X-axis than the third portion, extending from the negative side end of the second portion along the negative direction of the Y-axis; and A first comb-tooth movable electrode assembly extends from the first base movable electrode along the X-axis direction. The first movable electrode fingers of the first comb tooth movable electrode group and the first fixed electrode fingers of the first comb tooth fixed electrode group extending from the first fixed electrode portion along the X-axis direction are arranged in an alternating manner opposite each other. The second detection unit includes: The second fixed electrode portion includes a fixing portion fixed to the substrate, extending from the fixing portion along the Y-axis direction; and The second movable electrode section, The second movable electrode section includes: The second base movable electrode is positioned further along the positive side of the X-axis than the sixth portion, extending from the end of the fifth portion along the positive side of the Y-axis; and The second comb-tooth movable electrode group extends from the second base movable electrode along the X-axis direction. The second movable electrode fingers of the second comb tooth movable electrode group and the second fixed electrode fingers of the second comb tooth fixed electrode group extending from the second fixed electrode portion along the X-axis direction are arranged in an alternating opposing manner. When viewed from the positive side of the Z-axis, the first movable electrode, the second fixed part and the second support beam, the first fixed part and the first support beam, and the second movable electrode are arranged along the X-axis in the following order: first movable electrode, second fixed part and the second support beam, first fixed part and the first support beam, and second movable electrode.

2. The physical quantity sensor according to claim 1, characterized in that, The first movable electrode finger is positioned opposite the first fixed electrode finger in the Y-axis direction. The second movable electrode finger is opposite to the second fixed electrode finger in the Y-axis direction.

3. The physical quantity sensor according to claim 1 or 2, characterized in that, The first fixed electrode portion is disposed on both sides of the first movable electrode portion. Each of the first movable electrode fingers includes: The first movable electrode comb tooth extends along the X-axis direction from the end of the first comb tooth movable electrode assembly on the negative side of the X-axis; and The second movable electrode comb tooth extends along the X-axis direction from the end of the first movable electrode comb tooth assembly on the positive side of the X-axis. The first fixed electrode includes: The first fixed electrode comb teeth extend from one of the first fixed electrode portions along the positive side of the X-axis; and The second fixed electrode comb teeth extend from the other side of the first fixed electrode portion along the negative side of the X-axis. The first movable electrode comb teeth are opposite to the first fixed electrode comb teeth in the Y-axis direction. The second movable electrode comb teeth are opposite to the second fixed electrode comb teeth in the Y-axis direction.

4. The physical quantity sensor according to claim 3, characterized in that, The second fixed electrode portion is disposed on both sides of the second movable electrode portion. Each of the second movable electrode fingers includes: The third movable electrode comb tooth extends along the X-axis direction from the end of the second movable electrode comb tooth assembly on the negative side of the X-axis; and The fourth movable electrode tooth extends along the X-axis direction from the end of the second movable electrode group on the positive side of the X-axis. The second fixed electrode includes: The third fixed electrode comb teeth extend from one of the second fixed electrode portions along the positive side of the X-axis; and The fourth fixed electrode comb tooth extends from the other side of the second fixed electrode section along the negative side of the X-axis. The third movable electrode comb teeth are positioned opposite the third fixed electrode comb teeth in the Y-axis direction. The fourth movable electrode comb tooth and the fourth fixed electrode comb tooth are positioned opposite each other in the Y-axis direction.

5. The physical quantity sensor according to claim 1 or 2, characterized in that, The first fixed electrode portion includes a first base fixed electrode, first fixed electrode teeth extending from the first base fixed electrode in the X-axis direction, and second fixed electrode teeth extending in the opposite direction from the first base fixed electrode in the X-axis direction. The first movable electrode portion includes a first movable electrode comb tooth opposite to the first fixed electrode comb tooth, and a second movable electrode comb tooth opposite to the second fixed electrode comb tooth.

6. The physical quantity sensor according to claim 5, characterized in that, The second fixed electrode portion includes a second base fixed electrode, a third fixed electrode comb tooth extending from the second base fixed electrode in the X-axis direction, and a fourth fixed electrode comb tooth extending in the opposite direction from the second base fixed electrode in the X-axis direction. The second movable electrode portion includes a third movable electrode comb tooth opposite to the third fixed electrode comb tooth, and a fourth movable electrode comb tooth opposite to the fourth fixed electrode comb tooth.

7. The physical quantity sensor according to claim 1 or 2, characterized in that, When the first movable electrode and the second movable electrode are displaced towards the positive side of the Z-axis, the electrostatic capacitance between the first movable electrode and the first fixed electrode decreases. When the first movable electrode and the second movable electrode are displaced toward the negative side of the Z-axis, the electrostatic capacitance between the second movable electrode and the second fixed electrode decreases.

8. The physical quantity sensor according to claim 1 or 2, characterized in that, When the first movable electrode and the second movable electrode are displaced toward the positive side of the Z-axis, the electrostatic capacitance between the first movable electrode and the first fixed electrode disposed in the first region of the arrangement area of ​​the first movable electrode and the first fixed electrode decreases, and the electrostatic capacitance between the second movable electrode and the second fixed electrode disposed in the fourth region of the arrangement area of ​​the second movable electrode and the second fixed electrode decreases. When the first movable electrode and the second movable electrode are displaced toward the negative side of the Z-axis, the electrostatic capacitance between the first movable electrode and the first fixed electrode disposed in the second region of the configuration area of ​​the first movable electrode and the first fixed electrode is reduced, and the electrostatic capacitance between the second movable electrode and the second fixed electrode disposed in the third region of the configuration area of ​​the second movable electrode and the second fixed electrode is reduced.

9. The physical quantity sensor according to claim 8, characterized in that, The first region and the second region are regions arranged along the X-axis direction in the configuration regions of the first movable electrode portion and the first fixed electrode portion. The third region and the fourth region are regions arranged along the X-axis direction in the configuration regions of the second movable electrode and the second fixed electrode.

10. The physical quantity sensor according to claim 8, characterized in that, The first region and the second region are regions arranged along the Y-axis direction in the configuration regions of the first movable electrode portion and the first fixed electrode portion. The third region and the fourth region are regions arranged along the Y-axis direction in the configuration regions of the second movable electrode and the second fixed electrode.

11. An inertial measurement device, characterized in that, include: The physical quantity sensor according to any one of claims 1 to 10; as well as The control unit performs control based on the detection signal output from the physical quantity sensor.

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