A micromachined gyroscope and an electronic product

Abstract

The present invention provides a micromechanical gyroscope and an electronic product. The micromechanical gyroscope includes a first mass block, a second mass block, a driving member, a first connecting beam, and a second connecting beam. There are multiple first mass blocks and multiple second mass blocks. The first mass blocks are arranged oppositely along a first direction, and the second mass blocks are located between the first mass blocks and are arranged oppositely along a second direction perpendicular to the first direction. There are multiple driving members, and along the second direction, the driving members are located on opposite sides of the first mass blocks and the second mass blocks. Both the first connecting beam and the second connecting beam are flexible beams. Among them, both ends of the first mass block along the second direction are respectively connected through the first connecting beam and the driving members located on both sides of the first mass block, and the second mass block is connected to the adjacent driving member through the second connecting beam. The micromechanical gyroscope and the electronic product provided by the present invention reduce the degree of mutual interference of the mass blocks in different modes, which is beneficial to improving the detection accuracy.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a micro-electromechanical gyroscope and an electronic product.

Background Art

[0002] A micro-electromechanical gyroscope is a kind of micro angular velocity sensor fabricated by applying micro-machining technology and microelectronic process. The driving mode of the micro-electromechanical gyroscope swings around an axis perpendicular to the mass block. When an angular velocity is applied, due to the Coriolis effect, the gyroscope transfers energy to the detection mode, causing the vibrating disk to swing out of the plane relative to the driving. The magnitude of the angular velocity can be obtained by detecting the displacement of the out-of-plane swing.

[0003] In the existing micro-electromechanical gyroscopes, the detection mode and the driving mode share a mass block, and the coupling detection errors of the two modes are superimposed.

[0004] Therefore, it is necessary to provide a new micro-electromechanical gyroscope to solve the above problems.

Summary of the Invention

[0005] The purpose of the present invention is to provide a micro-electromechanical gyroscope and an electronic product, which can reduce the mutual interference degree of different mass blocks in different modes and is beneficial to improving the detection accuracy.

[0006] The technical solution of the present invention is as follows:

[0007] In a first aspect of the present invention, a micro-electromechanical gyroscope is provided, including:

[0008] A first mass block and a second mass block, both provided with a plurality of them. The first mass blocks are arranged oppositely along a first direction, and the second mass blocks are located between the first mass blocks and are arranged oppositely along a second direction perpendicular to the first direction;

[0009] Driving members, provided with a plurality of them. Along the second direction, the driving members are located on opposite sides of the first mass block and the second mass block;

[0010] A first connecting beam and a second connecting beam, both being flexible beams;

[0011] Wherein, both ends of the first mass block along the second direction are respectively connected to the driving members located on both sides of the first mass block through the first connecting beam, and the second mass block and the adjacent driving member are connected through the second connecting beam.

[0012] In a possible design, the first mass blocks are symmetrically distributed along the first direction, the second mass blocks are symmetrically distributed along the second direction, and the driving members are symmetrically distributed along the second direction.

[0013] In a possible design, the micromechanical gyroscope further includes a connection frame, the second mass block is located in the connection frame, and the first mass block and the driving member are both located outside the connection frame;

[0014] The two ends of the first mass block along the second direction are respectively connected to the side of the connecting frame facing the first mass block through the first connecting beam, the second mass block and the connecting frame are connected to the opposite sides along the second direction through the second connecting beam, and the side wall of the connecting frame along the second direction is connected to the driving member.

[0015] In a possible design, the micromechanical gyroscope further includes a third connecting beam having a bending section, and the side wall of the connecting frame along the second direction is connected to the driving member through the third connecting beam.

[0016] In a possible design, the micromechanical gyroscope further includes a substrate, the substrate having a square area, a first anchor point and a second anchor point, the first mass block, the second mass block and the driving member are all located in the square area, the first anchor point is provided at each corner position of the square area, and along the second direction, the second anchor point is located between the second mass blocks;

[0017] The micromechanical gyroscope also includes a first coupling beam, a second coupling beam and a third coupling beam, the first coupling beam and the second coupling beam are flexible beams, two ends of the first mass block along the second direction are respectively connected to the first anchor points on both sides through the first coupling beam, the second mass block is connected to the second anchor point through the second coupling beam, and two ends of the driving member along the first direction are respectively connected to the first anchor points on both sides through the third coupling beam.

[0018] In a possible design, the micromechanical gyroscope further includes a fourth coupling beam, which is a flexible beam, and along the second direction, the opposite second coupling beams are connected via the fourth coupling beam.

[0019] In a possible design, the micromechanical gyroscope further includes a coupling component, which is a flexible component, and the second mass blocks are connected along the second direction via the coupling component.

[0020] In one possible design, the micromechanical gyroscope further includes an in-plane driving transducer, an out-of-plane detection transducer and an in-plane detection transducer, a clearance space is formed on the side of the driving member away from the second mass block, the in-plane driving transducer is arranged in the clearance space, the out-of-plane detection transducer and the in-plane detection transducer are arranged above the second mass block with a gap between them, and the out-of-plane detection transducer is arranged above the first mass block.

[0021] In a possible design, along the first direction, the out-of-plane detection transducers arranged above the first mass block are symmetrically distributed, and along the second direction, the out-of-plane detection transducers arranged above the second mass block are symmetrically distributed. A plurality of the in-plane detection transducers are uniformly distributed along the circumferential direction of the microelectromechanical gyroscope.

[0022] A second aspect of the present invention further provides an electronic product, which includes:

[0023] A main body;

[0024] The above-mentioned microelectromechanical gyroscope, which is installed on the main body.

[0025] The beneficial effects of the present invention are as follows:

[0026] In the microelectromechanical gyroscope and the electronic product provided by the present invention, the first mass blocks are oppositely arranged along the first direction, the second mass block is located between the first mass blocks, the second mass blocks are oppositely arranged along the second direction, the driving members are located on the opposite sides of the first mass block and the second mass block along the second direction, and the first mass block and the second mass block are respectively connected to the driving members through flexible beams. When the microelectromechanical gyroscope detects the angular velocity, the coupling between the first mass block and the second mass block in the driving mode and the detection mode can be reduced, the displacement of the non-moving mass block can be reduced, and the mutual interference degree between the first mass block and the second mass block in different modes can be reduced, which is beneficial to improving the detection accuracy.

Description of the Drawings

[0027] Figure 1 Is the front view of the microelectromechanical gyroscope provided by the present invention in a specific embodiment;

[0028] Figure 2 Is Figure 1 The enlarged view at I in

[0029] Figure 3 Is Figure 1 The enlarged view at II in

[0030] Figure 4 Is Figure 1 The enlarged view at III in

[0031] Figure 5 Is Figure 1 The schematic diagram after adding the out-of-plane driving transducers, out-of-plane detection transducers and in-plane detection transducers;

[0032] Figure 6 Is Figure 5 The side view of

[0033] Figure 7Schematic structural diagram of the micromachined gyroscope provided by the present invention in the driving mode;

[0034] Figure 8 Schematic structural diagram of the micromachined gyroscope provided by the present invention in the first detection mode;

[0035] Figure 9 Schematic structural diagram of the micromachined gyroscope provided by the present invention in the second detection mode;

[0036] Figure 10 Schematic structural diagram of the micromachined gyroscope provided by the present invention in the third detection mode.

[0037] Reference numerals:

[0038] 1 - First mass block;

[0039] 2 - Second mass block;

[0040] 3 - Driving member;

[0041] 4 - First connecting beam;

[0042] 5 - Second connecting beam;

[0043] 6 - Connecting frame;

[0044] 7 - Third connecting beam;

[0045] 8 - Substrate; 81 - Square area; 82 - First anchor point; 83 - Second anchor point;

[0046] 9 - First coupling beam;

[0047] 10 - Second coupling beam;

[0048] 11 - Third coupling beam;

[0049] 12 - Fourth coupling beam;

[0050] 13 - Coupling component; 131 - Main body part; 132 - Fifth coupling beam;

[0051] 14 - In - plane driving transducer;

[0052] 15 - Out - of - plane detection transducer;

[0053] 16 - In - plane detection transducer.

Detailed implementation manners

[0054] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0055] The present invention provides a micromachined gyroscope, as Figures 1-4As shown, this kind of micro - mechanical gyroscope includes a first mass block 1, a second mass block 2, a driving member 3, a first connecting beam 4 and a second connecting beam 5. There are multiple first mass blocks 1 and multiple second mass blocks 2. The first mass blocks 1 are arranged oppositely along the first direction Y. The second mass blocks 2 are located between the first mass blocks 1 and are arranged oppositely along the second direction X perpendicular to the first direction Y. There are multiple driving members 3, and along the second direction X, the driving members 3 are located on the opposite sides of the first mass blocks 1 and the second mass blocks 2. Both the first connecting beam 4 and the second connecting beam 5 are flexible beams. Among them, both ends of the first mass block 1 along the second direction X are respectively connected by the first connecting beam 4 and the driving members 3 located on both sides of the first mass block 1, and the second mass block 2 and the adjacent driving member 3 are connected by the second connecting beam 5.

[0056] The micro - mechanical gyroscope has four working modes, namely the driving mode, the first detection mode, the second detection mode and the third detection mode. For example Figure 1 As shown, there are two first mass blocks 1, two second mass blocks 2 and two driving members 3. Along the first direction Y, the two second mass blocks 2 are located between the two first mass blocks 1. Along the second direction X, the two second mass blocks 2 are arranged oppositely. The two first mass blocks 1 and the two second mass blocks 2 are located between the two driving members 3. Define the first direction Y as the direction where the Y - axis is located, the second direction X as the direction where the X - axis is located, the direction perpendicular to both the X - axis and the Y - axis as the Z - axis, and the plane where the X - axis and the Y - axis are located as the reference plane. The following is an example:

[0057] When detecting the angular velocity, the micro - mechanical gyroscope will first be in the driving mode. In the driving mode, the two driving members 3 move along Figure 7 the two directions shown by the black arrows in Figure 7 and drive the two first mass blocks 1 and the two second mass blocks 2 to move along

[0058] the directions shown by the white arrows in Figure 8 When the micro - mechanical gyroscope is subjected to an angular velocity about the Y - axis, it will be converted from the driving mode to the first detection mode. At this time, the first mass block 1 will be subjected to the Coriolis force in the Z - axis direction (

[0059] shown by the white arrow in Figure 9As shown by the white arrow in [figure reference], the second mass block 2 will generate an out-of-plane vibration displacement along the Z-axis (i.e., the vibration displacement outside the reference plane). By detecting the out-of-plane vibration displacement of the second mass block 2 along the Z-axis, the angular velocity of the micromechanical gyroscope about the X-axis can be obtained.

[0060] When the micromechanical gyroscope is subjected to an angular velocity about the Z-axis, it will cause the micromechanical gyroscope to switch from the driving mode to the third detection mode. At this time, the second mass block 2 will be subjected to the Coriolis force in the X-axis direction ( Figure 10 As shown by the white arrow in [figure reference]), so the second mass block 2 will generate an in-plane vibration displacement along the X-axis (i.e., the vibration displacement within the reference plane). By detecting the in-plane vibration displacement of the second mass block 2 along the X-axis, the angular velocity of the micromechanical gyroscope about the Z-axis can be obtained.

[0061] In the micromechanical gyroscope provided in this embodiment, the first mass blocks 1 are arranged oppositely along the first direction Y, the second mass block 2 is located between the first mass blocks 1, the second mass blocks 2 are arranged oppositely along the second direction X, the driving members 3 are located on the opposite sides of the first mass blocks 1 and the second mass blocks 2 along the second direction X, and the first mass blocks 1 and the second mass blocks 2 are respectively connected to the driving members 3 through flexible beams, so that when the micromechanical gyroscope detects the angular velocity, the coupling between the first mass blocks 1 and the second mass blocks 2 in the driving mode and the detection mode can be reduced, the displacement of the non-moving mass blocks can be reduced, and the mutual interference degree between the first mass blocks 1 and the second mass blocks 2 in different modes can be reduced, which is beneficial to improving the detection accuracy.

[0062] Moreover, the proportion of the common mass of driving and detection is high, which effectively improves the conversion of the Coriolis force and the sensitivity of the micromechanical gyroscope; this kind of micromechanical gyroscope has a simple structure and is convenient for small-size integration under limited process conditions, reducing costs.

[0063] Among them, the driving mode of this kind of micromechanical gyroscope is differential driving, which can effectively improve the driving stability and anti-impact characteristics of the micromechanical gyroscope.

[0064] Moreover, the three detection modes of the micromechanical gyroscope can all achieve anti-phase vibration, which can effectively immunize the influence of acceleration shock and orthogonal error.

[0065] Specifically, the first mass blocks 1 are symmetrically distributed along the first direction Y, the second mass blocks 2 are symmetrically distributed along the second direction X, and the driving members 3 are symmetrically distributed along the second direction X. With such a setting, it is convenient to realize the differential detection of the micromechanical gyroscope.

[0066] In a specific embodiment, such as Figures 5-6As shown, the micromechanical gyroscope also includes an in-plane driving transducer 14 (also called an in-plane driving electrode), an out-of-plane detection transducer 15 (also called an out-of-plane detection electrode) and an in-plane detection transducer 16 (also called an in-plane detection electrode). A clearance space is formed on the side of the driving member 3 away from the second mass block 2. The in-plane driving transducer 14 is arranged in the clearance space. The out-of-plane detection transducer 15 and the in-plane detection transducer 16 are arranged above the second mass block 2 with a gap between them, and the out-of-plane detection transducer 15 is arranged above the first mass block 1.

[0067] When the micromechanical gyroscope is in the first detection mode, the first mass block 1 will generate vibration displacement along the Z axis due to the Coriolis force. At this time, the out-of-plane detection transducer 15 arranged above the first mass block 1 detects the vibration displacement of the first mass block 1 along the Z axis, and then obtains the angular velocity of the micromechanical gyroscope around the Y axis.

[0068] When the micromechanical gyroscope is in the second detection mode, the second mass block 2 will generate vibration displacement along the Z axis due to the Coriolis force. At this time, the out-of-plane detection transducer 15 arranged above the second mass block 2 detects the vibration displacement of the second mass block 2 along the Z axis, and then obtains the angular velocity of the micromechanical gyroscope around the X axis.

[0069] When the micromechanical gyroscope is in the third detection mode, the second mass block 2 will generate vibration displacement along the X-axis due to the Coriolis force. At this time, the in-plane detection transducer 16 arranged above the second mass block 2 detects the vibration displacement of the second mass block 2 along the X-axis, and then obtains the angular velocity of the micromechanical gyroscope around the Z-axis.

[0070] Specifically, along the first direction Y, the out-of-plane detection transducers 15 arranged above the first mass block 1 are symmetrically distributed, along the second direction X, the out-of-plane detection transducers 15 arranged above the second mass block 2 are symmetrically distributed, and multiple in-plane detection transducers 16 are evenly distributed along the circumference of the micromechanical gyroscope.

[0071] For example Figure 5 As shown, an out-of-plane detection transducer 15 is arranged above each first mass block 1, and along the first direction Y, the two out-of-plane detection transducers 15 respectively arranged above the two first mass blocks 1 are symmetrically distributed; an out-of-plane detection transducer 15 is arranged above each second mass block 2, and along the second direction X, the two out-of-plane detection transducers 15 respectively arranged above the two second mass blocks 2 are symmetrically distributed; four in-plane detection transducers 16 are provided, and the four in-plane detection transducers 16 are evenly distributed along the circumference of the micromechanical gyroscope.

[0072] Such an arrangement facilitates differential detection of the micromechanical gyroscope.

[0073] In a specific embodiment, Figures 1-3As shown, the micromechanical gyroscope further includes a connecting frame 6. The second mass block 2 is located inside the connecting frame 6, while the first mass block 1 and the driving member 3 are both located outside the connecting frame 6. The two ends of the first mass block 1 along the second direction X are respectively connected to one side of the connecting frame 6 facing the first mass block 1 through the first connecting beams 4. The second mass block 2 and the opposite sides of the connecting frame 6 along the second direction X are connected through the second connecting beams 5. The side wall of the connecting frame 6 along the second direction X is connected to the driving member 3.

[0074] For example Figure 7 As shown, when the micromechanical gyroscope is in the driving mode, the two driving members 3 move in the two directions shown by the black arrows in the figure respectively, driving the connecting frame 6 to move, and the connecting frame 6 then drives the first mass block 1 and the second mass block 2 to move in the directions shown by the white arrows in the figure.

[0075] Specifically, the micromechanical gyroscope further includes a third connecting beam 7. The third connecting beam 7 has a bent section, and the side wall of the connecting frame 6 along the second direction X is connected to the driving member 3 through the third connecting beam 7. The third connecting beam 7 is used to provide an in-plane swing degree of freedom.

[0076] In a specific embodiment, as Figures 1-4 shown, the micromechanical gyroscope further includes a substrate 8. The substrate 8 has a square area 81, a first anchor point 82, and a second anchor point 83. The first mass block 1, the second mass block 2, and the driving member 3 are all located inside the square area 81. A first anchor point 82 is provided at each corner position of the square area 81. Along the second direction X, the second anchor point 83 is located between the second mass blocks 2. The micromechanical gyroscope further includes a first coupling beam 9, a second coupling beam 10, and a third coupling beam 11. The first coupling beam 9 and the second coupling beam 10 are flexible beams. The two ends of the first mass block 1 along the second direction X are respectively connected to the first anchor points 82 on both sides through the first coupling beam 9. The second mass block 2 is connected to the second anchor point 83 through the second coupling beam 10. The two ends of the driving member 3 along the first direction Y are respectively connected to the first anchor points 82 on both sides through the third coupling beam 11.

[0077] When the micromechanical gyroscope is in the first detection mode, the first mass block 1 is subjected to the Coriolis force. Since the first mass block 1 is connected to the first anchor point 82, the first mass block 1 will produce an out-of-plane flip along the Z axis.

[0078] When the micromechanical gyroscope is in the second detection mode, the second mass block 2 is subjected to the Coriolis force. Since the second mass block 2 is connected to the second anchor point 83, the second mass block 2 will produce an out-of-plane flip along the Z axis.

[0079] Among them, the first coupling beam 9 and the second coupling beam 10 are used to provide an in-plane swing degree of freedom and an out-of-plane flip degree of freedom, and the third coupling beam 11 is used to provide an in-plane swing degree of freedom.

[0080] Specifically, the micromechanical gyroscope further includes a fourth coupling beam 12. The fourth coupling beam 12 is a flexible beam. Along the second direction X, the opposite second coupling beams 10 are connected by the fourth coupling beam 12.

[0081] In addition, the micromechanical gyroscope further includes a coupling component 13. The coupling component 13 is a flexible component. Along the second direction X, the second mass blocks 2 are connected by the coupling component 13. With such a setting, the parasitic modes in detection can be effectively suppressed, which is beneficial to improving the detection accuracy of the micromechanical gyroscope.

[0082] The coupling component 13 includes a main body portion 131 and a fifth coupling beam 132. The two ends of the main body portion 131 along the second direction X are respectively connected to the second mass blocks 2 on both sides by the fifth coupling beam 132.

[0083] An embodiment of the present invention further provides an electronic product. This electronic product includes a body and the micromechanical gyroscope in any one of the above embodiments. The micromechanical gyroscope is installed on the body.

[0084] During the operation of the electronic product, the micromechanical gyroscope can calculate the angular velocity of the electronic product for the convenience of controlling the electronic product. This micromechanical gyroscope reduces the mutual interference degree between the first mass block 1 and the second mass block 2 in different modes, improves the detection accuracy, and thus improves the use performance of the electronic product.

[0085] The above are only the implementation manners of the present invention. It should be noted here that for those of ordinary skill in the art, without departing from the inventive concept of the present invention, improvements can still be made, but these all belong to the protection scope of the present invention.

Claims

1. A micromechanical gyroscope, characterized in that, The micromechanical gyroscope includes: A plurality of first mass blocks (1) and second mass blocks (2). The first mass blocks (1) are oppositely arranged along a first direction (Y). The second mass blocks (2) are located between the first mass blocks (1) and are oppositely arranged along a second direction (X) perpendicular to the first direction (Y). A plurality of driving members (3). Along the second direction (X), the driving members (3) are located on opposite sides of the first mass blocks (1) and the second mass blocks (2). A first connecting beam (4) and a second connecting beam (5), both of which are flexible beams. Wherein, two ends of the first mass block (1) along the second direction (X) are respectively connected through the first connecting beam (4) and the driving members (3) located on both sides of the first mass block (1). The second mass block (2) and the adjacent driving member (3) are connected through the second connecting beam (5). The micromechanical gyroscope further includes a substrate (8). The substrate (8) has a square region (81), a first anchor point (82), and a second anchor point (83). The first mass block (1), the second mass block (2), and the driving members (3) are all located within the square region (81). The first anchor point (82) is provided at each corner position of the square region (81). Along the second direction (X), the second anchor point (83) is located between the second mass blocks (2). The micromechanical gyroscope further includes a first coupling beam (9), a second coupling beam (10), and a third coupling beam (11). The first coupling beam (9) and the second coupling beam (10) are flexible beams. Two ends of the first mass block (1) along the second direction (X) are respectively connected to the first anchor points (82) on both sides through the first coupling beam (9). The second mass block (2) is connected to the second anchor point (83) through the second coupling beam (10). Two ends of the driving member (3) along the first direction (Y) are respectively connected to the first anchor points (82) on both sides through the third coupling beam (11).

2. The micromachined gyroscope according to claim 1, wherein: The first mass blocks (1) are symmetrically distributed along the first direction (Y). The second mass blocks (2) are symmetrically distributed along the second direction (X). The driving members (3) are symmetrically distributed along the second direction (X).

3. The micromachined gyroscope according to claim 1, wherein: The micromechanical gyroscope further includes a connection frame (6). The second mass block (2) is located within the connection frame (6). The first mass block (1) and the driving members (3) are both located outside the connection frame (6). Two ends of the first mass block (1) along the second direction (X) are respectively connected to the side of the connection frame (6) facing the first mass block (1) through the first connecting beam (4). The second mass block (2) and the connection frame (6) are connected through the second connecting beam (5) on opposite sides along the second direction (X). The side wall of the connection frame (6) along the second direction (X) is connected to the driving member (3).

4. The micromachined gyroscope according to claim 3, characterized in that: The micromechanical gyroscope further comprises a third connecting beam (7), the third connecting beam (7) having a bent section, and the side wall of the connecting frame (6) along the second direction (X) is connected to the driving member (3) via the third connecting beam (7).

5. The micromachined gyroscope according to claim 1, wherein: The micromechanical gyroscope further comprises a fourth coupling beam (12), wherein the fourth coupling beam (12) is a flexible beam, and along the second direction (X), the second coupling beams (10) opposite to each other are connected via the fourth coupling beam (12).

6. The micromachined gyroscope according to any one of claims 1-5, characterized in that: The micromechanical gyroscope further comprises a coupling component (13), wherein the coupling component (13) is a flexible component, and along the second direction (X), the second mass blocks (2) are connected via the coupling component (13).

7. The micromechanical gyroscope according to any one of claims 1-5, characterized in that: The micromechanical gyroscope further comprises an in-plane driving transducer (14), an out-of-plane detection transducer (15) and an in-plane detection transducer (16); a clearance space is formed on a side of the driving member (3) away from the second mass block (2); the in-plane driving transducer (14) is arranged in the clearance space; the out-of-plane detection transducer (15) and the in-plane detection transducer (16) are arranged above the second mass block (2) at a distance from each other; and the out-of-plane detection transducer (15) is arranged above the first mass block (1).

8. The micromachined gyroscope according to claim 7, wherein: Along the first direction (Y), the out-of-plane detection transducers (15) arranged above the first mass block (1) are symmetrically distributed, along the second direction (X), the out-of-plane detection transducers (15) arranged above the second mass block (2) are symmetrically distributed, and the plurality of in-plane detection transducers (16) are evenly distributed along the circumference of the micromechanical gyroscope.

9. An electronic product, characterized in that, The electronic products include: ontology; The micromechanical gyroscope according to any one of claims 1 to 8, wherein the micromechanical gyroscope is mounted on the body.

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