Narrowband module, gas laser device and method for manufacturing electronic device

Abstract

The narrowband module comprises: a housing; a prism disposed in the internal space of the housing and through which light passes; a mounting portion disposed in the internal space and on which the prism is mounted; a fixing unit disposed in the internal space and fixing the prism to the mounting portion; and a light shielding member. The light shielding member is disposed in the internal space and shields scattered light generated from light in the internal space and traveling toward the fixing unit.

Description

Technical Field

[0001] The present disclosure relates to a method for manufacturing a narrowband module, a gas laser device, and an electronic device. Background Art

[0002] In recent years, in semiconductor exposure devices, as semiconductor integrated circuits become smaller and more highly integrated, there is a demand for improved resolution. Therefore, the wavelength of light emitted from an exposure light source has been shortened. For example, as a gas laser device for exposure, a KrF excimer laser device that outputs a laser with a wavelength of about 248nm and an ArF excimer laser device that outputs a laser with a wavelength of about 193nm are used.

[0003] The spectral line width of the natural oscillation light of the KrF excimer laser device and the ArF excimer laser device is relatively wide, about 350pm to 400pm. Therefore, when the projection lens is composed of a material that allows ultraviolet light such as KrF and ArF lasers to pass through, chromatic aberration sometimes occurs. As a result, the resolution may be reduced. Therefore, it is necessary to narrow the spectral line width of the laser output from the gas laser device to a level where chromatic aberration can be ignored. Therefore, in order to narrow the spectral line width, a narrowing module (Line Narrow Module: LNM) containing narrowing elements (etalon, grating, etc.) is sometimes provided in the laser resonator of the gas laser device. Hereinafter, a gas laser device with a narrowed spectral line width is referred to as a narrowed gas laser device.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 11-233858

[0007] Patent Document 2: Japanese Patent Application Laid-Open No. 2-194677

[0008] Patent Document 3: U.S. Patent No. 9130338

[0009] Patent Document 4: Japanese Patent Application Publication No. 2002-374025 Summary of the invention

[0010] A narrowband module according to one embodiment of the present invention comprises: a shell; a prism disposed in an internal space of the shell and through which light passes; a loading portion disposed in the internal space and carrying the prism; a fixing unit disposed in the internal space and fixing the prism to the loading portion; and a shading component disposed in the internal space and shading scattered light generated from light in the internal space and traveling toward the fixing unit.

[0011] A gas laser device according to one embodiment of the present invention has a narrowband module, which includes: a shell; a prism, which is arranged in the internal space of the shell and light passes through the prism; a loading portion, which is arranged in the internal space and carries the prism; a fixing unit, which is arranged in the internal space and fixes the prism to the loading portion; and a shading component, which is arranged in the internal space and blocks scattered light generated from the light in the internal space and travels toward the fixing unit.

[0012] A method for manufacturing an electronic device according to one embodiment of the present invention includes the following steps: causing laser light emitted from a gas laser device having a narrowband module to be incident on an exposure device, exposing the laser light on a photosensitive substrate in the exposure device to manufacture the electronic device, wherein the narrowband module comprises: a housing; a prism disposed in an internal space of the housing and through which light passes; a loading portion disposed in the internal space and on which the prism is loaded; a fixing unit disposed in the internal space and fixing the prism to the loading portion; and a shading component disposed in the internal space and for shading scattered light generated from the light in the internal space and traveling toward the fixing unit. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Hereinafter, several embodiments of the present disclosure will be described as simple examples with reference to the accompanying drawings.

[0014] Figure 1 It is a schematic diagram showing an example of the overall schematic configuration of an electronic device manufacturing apparatus.

[0015] Figure 2 This is a schematic diagram showing an example of the overall schematic configuration of a gas laser device.

[0016] Figure 3 yes Figure 2 A magnified view of the narrowband module is shown.

[0017] Figure 4 The bottom surface of the housing is viewed from the cover side of the housing toward the bottom surface of the housing on the opposite side of the cover side. Figure 3 A diagram of the interior space of the housing of the narrowband module is shown.

[0018] Figure 5 This is a diagram showing a state in which a prism is fixed to a main body of a mounting portion by a fixing unit, as viewed from a direction perpendicular to the side surface of the prism.

[0019] Figure 6 It is observed from the cover side toward the bottom side of the housing along the side of the prism. Figure 5 A cross-section view at line AA is shown.

[0020] Figure 7 It shows the surrounding Figure 5 FIG. 1 is a diagram of a light shielding member of Embodiment 1 of the fixing unit shown.

[0021] Figure 8 It is observed from the cover side toward the bottom side of the housing along the side of the prism. Figure 7 A diagram of a cross section at line BB is shown.

[0022] Fig. 9 It shows the surrounding Figure 5 FIG. 2 is a diagram of a light shielding member according to a modified example of the first embodiment of the fixing unit shown.

[0023] Fig.10 This is an enlarged view of a narrowband module according to a modified example of the first embodiment.

[0024] Fig.11 It shows the surrounding Figure 5 FIG. 2 is a diagram of a light shielding component of a second embodiment of a fixing unit shown.

[0025] Fig.12 It is observed from the cover side toward the bottom side of the housing along the side of the prism. Fig.11 A diagram of a cross section at line CC is shown. DETAILED DESCRIPTION

[0026] 1. Description of electronic device manufacturing equipment used in the exposure process of electronic devices

[0027] 2. Description of the gas laser device of the comparative example

[0028] 2.1 Structure

[0029] 2.2 Actions

[0030] 2.3 Topics

[0031] 3. Description of the Narrowband Module of Implementation Method 1

[0032] 3.1 Structure

[0033] 3.2 Effects

[0034] 4. Description of the Narrowband Module of Implementation Method 2

[0035] 4.1 Structure

[0036] 4.2 Effects

[0037] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.

[0038] The embodiments described below illustrate several examples of the present disclosure and do not limit the content of the present disclosure. In addition, the structures and actions described in each embodiment are not necessarily all necessary for the structures and actions of the present disclosure. In addition, the same reference numerals are marked on the same structural elements and repeated descriptions are omitted.

[0039] 1. Description of electronic device manufacturing equipment used in the exposure process of electronic devices

[0040] Figure 1 Schematic diagram showing an overall schematic configuration example of an electronic device manufacturing apparatus used in an exposure process of an electronic device. Figure 1 As shown, the manufacturing device used in the exposure process includes a gas laser device 100 and an exposure device 200. The exposure device 200 includes an illumination optical system 210 and a projection optical system 220, and the illumination optical system 210 includes a plurality of mirrors 211, 212, and 213. The illumination optical system 210 illuminates the mask pattern of the mask stage RT using the laser light incident from the gas laser device 100. The projection optical system 220 performs reduced projection of the laser light after passing through the mask so that it is imaged on a workpiece (not shown) arranged on the workpiece stage WT. The workpiece is a photosensitive substrate such as a semiconductor wafer coated with a photoresist. The exposure device 200 causes the mask stage RT and the workpiece stage WT to move in parallel synchronously, thereby exposing the workpiece to the laser light reflecting the mask pattern. By transferring the device pattern on the semiconductor wafer through the above exposure process, a semiconductor device as an electronic device can be manufactured.

[0041] 2. Description of the gas laser device of the comparative example

[0042] 2.1 Structure

[0043] A gas laser device 100 of a comparative example will be described. The comparative examples of the present disclosure are examples that the applicant recognizes as being known only to the applicant, and are not examples that the applicant acknowledges as being publicly known.

[0044] Figure 2 Schematic diagram showing an overall schematic structure example of the gas laser device 100 of this example. Figure 2 As shown, the gas laser device 100 of this example includes a housing 10, a laser oscillator LO, a wavelength measurement module 20 and a processor 70 as main structures. The gas laser device 100 of this example is, for example, an ArF excimer laser device using a mixed gas containing argon (Ar), fluorine (F2) and neon (Ne). In this case, the gas laser device 100 emits a pulse laser with a central wavelength of about 193nm. In addition, the gas laser device 100 may also be a gas laser device other than the ArF excimer laser device, for example, it may also be a KrF excimer laser device using a mixed gas containing krypton (Kr), fluorine (F2) and neon (Ne). In this case, the gas laser device 100 emits a pulse laser with a central wavelength of about 248nm. A mixed gas containing Ar, F2 and Ne as a laser medium, and a mixed gas containing Kr, F2 and Ne as a laser medium are sometimes referred to as laser gas.

[0045] The processor 70 of the present disclosure is a processing device including a storage device storing a control program and a CPU executing the control program. The processor 70 is specially configured or programmed to perform various processes included in the present disclosure. The processor 70 controls several structures of the gas laser device 100. In addition, the processor 70 controls the gas laser device 100 as a whole.

[0046] The laser oscillator LO includes a cavity device CH, a charger BC, a narrowband module 60 and an output coupling mirror OC as main structures.

[0047] The chamber device CH has a housing 30, a pair of windows 31a, 31b, a pair of electrodes 32a, 32b, an insulating portion 33, a pulse power module 35, an electrode holder portion 36, a cross flow fan 38, and a motor 38M as main structures.

[0048] The window 31a and the window 31b are provided at mutually opposing positions in the housing 30. The window 31a is located at one end side in the direction of travel of the laser in the housing 30, and the window 31b is located at the other end side in the direction of travel of the laser in the housing 30. As described later, in the gas laser device 100, light oscillates on an optical path including the housing 30 to emit laser light, so that the laser light generated in the internal space of the housing 30 is emitted to the outside of the housing 30 via the window 31a and the window 31b. Each of the windows 31a and 31b is inclined at a Brewster angle relative to the direction of travel of the laser light to suppress reflection of the P-polarized light of the laser light. The window 31a may be embedded in the hole of the housing 30, or may be held by a cylindrical holder. In the case where the window 31a is held by the holder, one end of the holder is connected to the wall surface of the housing 30, the hollow portion of the holder is connected to the hole of the housing 30, and the window 31a is arranged on the other end surface of the holder in a manner opposite to the hollow portion. The window 31b may be fitted into a hole or may be held by a cylindrical holder, similarly to the window 31a.

[0049] The housing 30 includes an internal space in which light is generated by the excitation of the above-mentioned laser gas. The laser gas is supplied to the internal space of the housing 30 from a laser gas supply source (not shown) disposed in the housing 10 via a pipe (not shown). In this example, the gas laser device 100 is an ArF excimer laser device, and therefore, for example, a mixed gas containing Ar, F2, and Ne is supplied from the laser gas supply source to the internal space of the housing 30. In addition, when the gas laser device 100 is a KrF excimer laser, for example, a mixed gas containing Kr, F2, and Ne is supplied from the laser gas supply source to the internal space of the housing 30. The above-mentioned light generated by the excitation of the laser gas travels toward the windows 31a and 31b.

[0050] The length direction of a pair of electrodes 32a, 32b is along the traveling direction of the laser, and the pair of electrodes 32a, 32b are arranged opposite to each other in the internal space of the housing 30. The space between the electrode 32a and the electrode 32b in the housing 30 is between the window 31a and the window 31b. Each electrode 32a, 32b is a discharge electrode for exciting the laser medium by glow discharge. In this example, the electrode 32a is a cathode and the electrode 32b is an anode.

[0051] An opening is formed in the housing 30, and the opening is blocked by an insulating portion 33 formed of an insulator. The electrode 32a is supported by the insulating portion 33. A feedthrough hole 34 composed of a conductive member is embedded in the insulating portion 33. The feedthrough hole 34 applies the voltage supplied from the pulse power module 35 to the electrode 32a. The electrode 32b is supported by an electrode holder portion 36 and is electrically connected to the electrode holder portion 36. The electrode holder portion 36 is electrically connected to the housing 30 via wiring not shown.

[0052] The pulse power module 35 is connected to a charger BC disposed outside the housing 30. The charger BC is a DC power supply device that charges a capacitor (not shown) provided in the pulse power module 35 at a predetermined voltage. The pulse power module 35 includes a switch controlled by the processor 70. When the switch is turned from off to on, the pulse power module 35 boosts the voltage applied from the charger BC to generate a pulse-shaped high voltage, and applies the high voltage to the pair of electrodes 32a, 32b.

[0053] A cross-flow fan 38 is disposed in the internal space of the housing 30 on the side opposite to the electrode 32b side with respect to the electrode holder portion 36. The space in the internal space of the housing 30 where the cross-flow fan 38 is disposed is connected to the space between a pair of electrodes 32a and 32b in the internal space of the housing 30. Therefore, the cross-flow fan 38 rotates, thereby circulating the laser gas enclosed in the internal space of the housing 30 in a predetermined direction. The cross-flow fan 38 is connected to a motor 38M disposed outside the housing 30. The motor 38M rotates, thereby rotating the cross-flow fan 38. The motor 38M is turned on, off, and the rotation speed is adjusted by the control of the processor 70. Therefore, the processor 70 can adjust the circulation speed of the laser gas circulating in the internal space of the housing 30 by controlling the motor 38M.

[0054] Furthermore, a heat exchanger (not shown) is disposed next to cross flow fan 38. At least a portion of the laser gas circulated by cross flow fan 38 passes through the heat exchanger, and the temperature of the laser gas is adjusted by the heat exchanger.

[0055] The optical path tube 51 is connected to the above-mentioned one end side where the window 31a is provided in the housing 30. The output coupling mirror OC is provided on the above-mentioned one end side based on the housing 30, and is arranged in the internal space of the optical path tube 51. The output coupling mirror OC is an optical element for incident laser light emitted from the window 31a, and transmits a part of the light emitted from the window 31a, and reflects the other part and returns to the internal space of the housing 30 through the window 31a. The output coupling mirror OC is composed of, for example, an element in which a dielectric multilayer film is formed on a substrate of calcium fluoride. A film that partially reflects the laser light may also be formed on the surface of the output coupling mirror OC.

[0056] The optical path tube 52 is connected to the other end side of the housing 30 where the window 31b is provided. The narrowband module 60 is connected to the optical path tube 52. Therefore, the narrowband module 60 is provided at the other end side with respect to the housing 30, and is provided at the side opposite to the output coupling mirror OC with respect to the housing 30. The narrowband module 60 includes a housing 61, a grating 62, and prisms 63, 64, 65, 66.

[0057] Figure 3 yes Figure 2 FIG. 6 is an enlarged view of the narrowband module 60. Figure 4 The bottom surface of the housing 61 viewed from the cover 61L side of the housing 61 toward the side opposite to the cover 61L. Figure 3 61M and a cover portion 61L that blocks the upper portion of the main body 61M. An opening 61H is formed on the side of the main body 61M, and the internal space of the housing 61 and the internal space of the optical path tube 52 are connected through the opening 61H.

[0058] The grating 62 and the prisms 63, 64, 65, 66 are arranged in the internal space of the housing 61. The grating 62 and the prisms 63, 64, 65, 66 are optical elements for the laser light emitted from the window 31b to be incident. The grating 62 is configured in a Littrow manner so that the incident angle and the diffraction angle of the laser light are roughly consistent. In this example, the grating 62 can be a step grating blazing for a wavelength of about 193.4nm. In addition, the grating 62 is fixed to the carrier 62D, and the carrier 62D is fixed to the housing 61. Therefore, the grating 62 is immovable relative to the housing 61.

[0059] The prisms 63, 64, 65, and 66 of this example are in the shape of a triangular prism, specifically, in the shape of a right triangular prism with a bottom surface of a right triangle. The prism 63 includes a pair of bottom surfaces 63B and 63T, and side surfaces 63H, 63X, and 63Y perpendicular to the bottom surfaces 63B and 63T. The side surface 63H is a side surface including the hypotenuse of the bottom surfaces 63B and 63T, and the side surfaces 63X and 63Y are perpendicular to each other. The prism 64 includes a pair of bottom surfaces 64B and 64T, and side surfaces 64H, 64X, and 64Y perpendicular to the bottom surfaces 64B and 64T. The side surface 64H is a side surface including the hypotenuse of the bottom surfaces 64B and 64T, and the side surfaces 64X and 64Y are perpendicular to each other. The prism 65 includes a pair of bottom surfaces 65B and 65T, and side surfaces 65H, 65X, and 65Y perpendicular to the bottom surfaces 65B and 65T. The side surface 65H is a side surface including the hypotenuse of the bottom surfaces 65B and 65T, and the side surfaces 65X and 65Y are perpendicular to each other. The prism 66 includes a pair of bottom surfaces 66B and 66T, and side surfaces 66H, 66X, and 66Y perpendicular to the bottom surfaces 66B and 66T. The side surface 66H is a side surface including the hypotenuse of the bottom surfaces 66B and 66T, and the side surfaces 66X and 66Y are perpendicular to each other. Films are formed on the side surfaces 63H, 64H, 65H, and 66H to suppress the reflection of P-polarized light of laser light traveling from the outside of the prism to these side surfaces. In addition, films are formed on the side surfaces 63X, 64X, 65X, and 66X and the side surfaces 63Y, 64Y, 65Y, and 66Y to suppress the reflection of laser light traveling from the outside of the prism to these side surfaces. These films may be films containing at least one of SiO2, MgF2, LaF3, and GdF3. In particular, it is preferable to use a fluoride-based material that is resistant to ultraviolet rays as the material of the film. In addition, it is preferable to use a material of the same type as that of the prisms 63, 64, 65, and 66 as the material of the film.

[0060] Each of the prisms 63, 64, 65, and 66 is made of, for example, calcium fluoride. The prisms 63, 64, 65, and 66 include an incident side surface for light to be incident and an exit side surface for light to be exited, and wavelength dispersion is performed on light incident from the incident side surface so that the light is emitted from the exit side surface. In this example, light propagating from the cavity device CH side is incident from the side surfaces 63H, 64H, 65H, and 66H of each of the prisms 63, 64, 65, and 66. In addition, light incident from the side surfaces 63H, 64H, 65H, and 66H is emitted from the side surfaces 63X, 64X, 65X, and 66X of each of the prisms 63, 64, 65, and 66. Therefore, for light incident from the cavity device CH side, the side surfaces 63H, 64H, 65H, and 66H become incident side surfaces, and the side surfaces 63X, 64X, 65X, and 66X become exit side surfaces. On the contrary, the light propagating from the grating 62 side enters from the side surfaces 66X, 65X, 64X, 63X of the respective prisms 66, 65, 64, 63. Moreover, the light incident from the side surfaces 66X, 65X, 64X, 63X exits from the side surfaces 66H, 65H, 64H, 63H of the respective prisms 66, 65, 64, 63. Therefore, for the light propagating from the grating 62 side, the side surfaces 66X, 65X, 64X, 63X become the incident side surfaces, and the side surfaces 66H, 65H, 64H, 63H become the exiting side surfaces.

[0061] In this example, if Figure 3 As shown, the prism 63 is fixed to the carrier 63D in a state where a bottom surface 63B faces the carrier 63D side. The prism 64 is fixed to the carrier 64D in a state where a bottom surface 64B faces the carrier 64D side. The prism 66 is fixed to the carrier 66D in a state where a bottom surface 66B faces the carrier 66D side. The carriers 63D, 64D, and 66D are fixed to the housing 61. Therefore, the prisms 63, 64, and 66 are immovable relative to the housing 61 and the grating 62. On the other hand, the prism 65 is fixed to the carrier 65D. The carrier 65D slightly rotates the prism 65 around an axis perpendicular to the dispersion plane of the light emitted from the prism 65. The details of the carrier 65D will be described later. In addition, the bottom surface 63T of the prism 63 becomes another surface on the side opposite to the bottom surface 63B placed on the carrier 63D with respect to the prism 63 as a reference. The bottom surface 64T of the prism 64 is another surface on the side opposite to the bottom surface 64B placed on the placement portion 64D with reference to the prism 64. The bottom surface 65T of the prism 65 is another surface on the side opposite to the bottom surface 65B placed on the placement portion 65D with reference to the prism 65. The bottom surface 66T of the prism 66 is another surface on the side opposite to the bottom surface 66B placed on the placement portion 66D with reference to the prism 66.

[0062] The prism 65 is slightly rotated to change its direction, thereby changing the direction of the light emitted from the prism 65 and adjusting the incident angle of the light incident on the grating 62. By adjusting the incident angle of the light incident on the grating 62, the wavelength of the light reflected at the grating 62 and incident on the cavity device CH is adjusted. Therefore, the light emitted from the window 31b of the housing 30 is reflected at the grating 62 via the prisms 63, 64, 65, and 66, thereby adjusting the wavelength of the light incident on the housing 30 to a desired wavelength. In addition, the number of prisms configured in the narrowband module 60 is 4 in this example, but it is sufficient to include a prism that rotates like at least one prism 65, and the number of prisms configured in the narrowband module 60 can be less than 3 or more than 5.

[0063] return Figure 2 Continuing to explain the gas laser device 100 of this example. The laser resonator is formed by the output coupling mirror OC and the grating 62 arranged across the housing 30, and the housing 30 is arranged on the optical path of the laser resonator. Therefore, the light from the internal space of the housing 30 reciprocates between the grating 62 and the output coupling mirror OC of the narrowband module 60 via the windows 31a, 31b and the prisms 63, 64, 65, 66. The reciprocating light is amplified each time it passes through the laser gain space between the electrode 32a and the electrode 32b. A part of the amplified light passes through the output coupling mirror OC via the window 31a and is emitted as a pulsed laser.

[0064] The wavelength measurement module 20 is arranged on the optical path of the pulse laser emitted from the output coupling mirror OC of the laser oscillator LO. The wavelength measurement module 20 includes a housing 21, a beam splitter 22, and a wavelength monitor 23. The housing 21 is connected to the optical path tube 51. An opening is formed in the housing 21, and the internal space of the housing 21 and the internal space of the optical path tube 51 are connected through the opening. The beam splitter 22 and the wavelength monitor 23 are arranged in the internal space of the housing 21. The beam splitter 22 and the wavelength monitor 23 are optical elements for the pulse laser emitted from the output coupling mirror OC to be incident.

[0065] The beam splitter 22 transmits the pulse laser emitted from the laser oscillator LO with high transmittance, and reflects a part of the pulse laser toward the light receiving surface of the wavelength monitor 23. The wavelength monitor 23 detects the wavelength of the pulse laser incident on the light receiving surface, and outputs the data of the detected wavelength to the processor 70. The wavelength monitor 23 has a spectrometer such as an etalon and an image sensor, and detects the interference fringes generated by the etalon using the image sensor or the like.

[0066] An opening is formed on the side opposite to the side connected to the optical tube 51 in the housing 21 of the wavelength measurement module 20, and an optical tube 53 is connected to surround the opening. Therefore, the internal space of the optical tube 51, the internal space of the housing 21, and the internal space of the optical tube 53 are connected to each other. The optical tube 53 is connected to the housing 10. A laser emission window OW is provided at a position surrounded by the optical tube 53 in the housing 10. Therefore, the light that has passed through the beam splitter 22 of the wavelength measurement module 20 is emitted from the laser emission window OW to the outside of the housing 10 via the optical tube 53.

[0067] The internal space of the optical tubes 51, 52, 53 and the housings 21 and 61 is filled with a purge gas. The purge gas contains an inert gas such as high-purity nitrogen with less impurities such as oxygen. The purge gas is supplied to the internal space of the optical tubes 51, 52, 53 and the housings 21 and 61 from a purge gas supply source (not shown) arranged outside the housing 10 through a pipe (not shown).

[0068] In addition, an exhaust device (not shown) for exhausting laser gas exhausted from the internal space of the housing 30 of the chamber device CH is arranged in the internal space of the housing 10. The exhaust device removes F2 gas from the gas exhausted from the internal space of the housing 30 through a halogen filter and discharges the gas into the housing 10.

[0069] Next, the fixing unit 300 for fixing the prism 65 to the mounting portion 65D will be described.

[0070] Figure 5 This is a diagram showing a state in which the prism 65 is fixed to the main body 81 of the mounting portion 65D by the fixing unit 300 , as viewed from a direction perpendicular to the side surface 65H of the prism 65 . Figure 6 The prism 65 is viewed from the cover 61L side toward the bottom side of the housing 61. Figure 5 The cross section at line AA is shown in FIG. Figure 3 and Figure 4 In order to make the illustration clear, the description of the fixing unit 300 is omitted. Figure 5 and Figure 6 As shown in FIG. 1 , the main body 81 is a plate-like member, and the shape of the main surface is a substantially rectangular shape. One main surface of the main body 81 is a fixing surface 81F to which the prism 65 is fixed.

[0071] The fixing unit 300 is arranged in the internal space of the housing 61. The fixing unit 300 includes a pair of column members 301a, 301b, a beam member 303, a plate member 305, and a pair of pressing members 307a, 307b as coil springs. In addition, the fixing unit 300 further includes a pair of fixing members 309a, 309b, which are bolts, and the pair of pressing members 307a, 307b are respectively wound around the shafts of the pair of fixing members 309a, 309b.

[0072] The column components 301a and 301b are fixed to the fixed surface 81F. In addition, the column components 301a and 301b extend to a position higher than the bottom surface 65T of the prism 65 in a direction orthogonal to the fixed surface 81F. Therefore, the column components 301a and 301b extend to the side opposite to the bottom surface 65B with the bottom surface 65T as a reference. The column components 301a and 301b are arranged to be separated from the prism 65. The column components 301a and 301b are arranged at a position offset from the path of travel of the light incident on the incident side surface of the prism 65 and the path of travel of the light emitted from the exit side surface of the prism 65, and are arranged to avoid the light so as not to hinder the travel of the light. Specifically, the column components 301a and 301b are arranged outside the area where the light travels on the incident side surface and the exit side surface of the prism 65, respectively. The column members 301 a and 301 b are cylindrical in shape, but the shape of the column members 301 a and 301 b is not particularly limited.

[0073] The beam member 303 is mounted on the column members 301a and 301b at the end portion of the column members 301a and 301b on the side opposite to the bottom surface 65B with reference to the bottom surface 65T. One end of the beam member 303 is fixed to the end portion of the column member 301a, and the other end of the beam member 303 is fixed to the end portion of the column member 301b. In the direction perpendicular to the fixing surface 81F, the column members 301a and 301b are longer than the prism 65, and therefore, the beam member 303 is located above the bottom surface 65T. The beam member 303 is substantially parallel to the fixing surface 81F. The shape of the main surface of the beam member 303 is substantially rectangular. Figure 6 In FIG. 3 , the beam member 303 is indicated by a dotted line.

[0074] The plate member 305 is disposed on the bottom surface 65T of the prism 65. The plate member 305 has a triangular prism shape. The main surface of the plate member 305 has the same shape as the bottom surface 65T, and the area of ​​the main surface of the plate member 305 is smaller than the area of ​​the bottom surface 65T.

[0075] The fixing members 309 a and 309 b penetrate the beam member 303 , and their respective ends are in contact with the plate member 305 .

[0076] The pressing members 307a and 307b are wound around the shafts of the fixing members 309a and 309b in such a manner that the central axes of the pressing members 307a and 307b are coaxial with the central axes of the fixing members 309a and 309b. In addition, the pressing members 307a and 307b can be extended and retracted in the length direction of the pressing members 307a and 307b. The pressing members 307a and 307b are arranged between the plate member 305 and the beam member 303. The pressing members 307a and 307b extend toward the plate member 305 with the ends of the pressing members 307a and 307b on the beam member 303 side as a reference, and press the plate member 305 toward the prism 65.

[0077] In a state where the fixing members 309a, 309b and the pressing members 307a, 307b are in contact with the plate member 305 placed on the bottom surface 65T of the prism 65, the bottom surface 65B of the prism 65 is in contact with the fixing surface 81F. The plate member 305 presses the prism 65 toward the fixing surface 81F of the main body 81 by the elastic force of the pressing members 307a, 307b. Therefore, the prism 65 is clamped by the plate member 305 of the fixing unit 300 and the main body 81 of the placing portion 65D while being pressed against the fixing surface 81F by the plate member 305 and the pressing members 307a, 307b. As a result, the movement of the prism 65 in the in-plane direction along the fixing surface 81F is restricted, and the prism 65 is fixed to the main body 81.

[0078] The fixing unit 300 is further configured to fix the prisms 63, 64, 66 to the mounting portions 63D, 64D, 66D, respectively. The configuration of the fixing unit 300 relative to the prisms 63, 64, 66 and the mounting portions 63D, 64D, 66D is the same as the configuration of the fixing unit 300 relative to the prism 65 and the main body 81 of the mounting portion 65D, and therefore detailed description is omitted. Figure 3 and Figure 4 In the figure, description of the fixing unit 300 for the prisms 63, 64, 66 and the mounting portions 63D, 64D, 66D is omitted.

[0079] Next, the carrier 65D is described. The carrier 65D includes a main body 81 as a table and a rotating mechanism 82. The main body 81 is fixed to the rotating mechanism 82. The rotating mechanism 82 of this example includes a fixed plate 82a and a rotating table 82b. The main body 81 is fixed to the rotating table 82b. The fixed plate 82a is fixed to the main body 61M of the housing 61. The rotating table 82b is a circular plate-shaped component that rotates around a specified axis in the in-plane direction of the main surface of the fixed plate 82a. The fixed plate 82a and the rotating table 82b are connected, for example, via a cross roller bearing. The in-plane direction of the main surface of the fixed plate 82a is parallel to the bottom surface 65B of the prism 65. Therefore, the rotation axis RA5 of the rotating table 82b is perpendicular to the dispersion plane of the light emitted from the prism 65. When the rotating table 82b rotates, the main body 81 fixed to the rotating table 82b, the prism 65 fixed to the main body 81, and the fixing unit 300 rotate together with the rotating table 82b around the rotation axis RA5 perpendicular to the dispersion plane of the light emitted from the prism 65.

[0080] like Figure 4 As shown, the fixing plate 82a protrudes from the inside of the housing 61 to the outside. A housing 87 is provided at a portion of the fixing plate 82a outside the housing 61. The inside of the housing 87 and the inside of the housing 61 are spatially connected to ensure airtightness. A stepper motor 84 is fixed to a portion of the fixing plate 82a outside the housing 61. The stepper motor 84 includes a predetermined shaft portion, and one front end of the shaft portion is located in the housing 87. The shaft portion moves along the length direction by the operation of the stepper motor 84.

[0081] The piezoelectric actuator 85 is movably disposed in the housing 87. The piezoelectric actuator 85 is in contact with one tip of the shaft portion of the stepping motor 84. Therefore, the shaft portion of the stepping motor 84 moves, and thereby the piezoelectric actuator 85 moves.

[0082] The rotating table 82b is connected to a rod 86. The rod 86 protrudes from the inside of the housing 61 to the outside, and the end of the rod 86 on the side opposite to the rotating table 82b is located in the housing 87. The piezoelectric actuator 85 is in contact with the rod 86. Therefore, the piezoelectric actuator 85 is sandwiched between the shaft of the stepping motor 84 and the rod 86. When the piezoelectric actuator 85 is operated, the distance between the front end of the shaft of the stepping motor 84 and the rod 86 changes due to the piezoelectric effect. In addition, the side of the rod 86 opposite to the side in contact with the piezoelectric actuator 85 is in contact with the plunger 89. The plunger 89 is fixed to the housing 87 and presses the rod 86. Therefore, the rod 86 is sandwiched between the piezoelectric actuator 85 and the plunger 89 and is pressed by the piezoelectric actuator 85 and the plunger 89. The inclination of the rod 86 changes according to the movement of the piezoelectric actuator 85 caused by the operation of the stepping motor 84 and the change in the distance from the front end of the shaft of the stepping motor 84 to the rod 86 caused by the operation of the piezoelectric actuator 85. The rotating table 82b rotates according to the change in the inclination of the rod 86. Therefore, in this example, the stepping motor 84 and the piezoelectric actuator 85 are driving units that rotate the rotating table 82b. The change in the inclination of the rod 86 caused by the operation of the piezoelectric actuator 85 is smaller than the change in the inclination of the rod 86 caused by the operation of the stepping motor 84. That is, the stepping motor 84 is a driving unit for coarse movement, and the piezoelectric actuator 85 is a driving unit for fine movement. Therefore, the optical path is roughly adjusted by the operation of the stepping motor 84, and the optical path is finely adjusted by the operation of the piezoelectric actuator 85.

[0083] The stepping motor 84 and the piezoelectric actuator 85 are electrically connected to the driver 72. The driver 72 is electrically connected to the processor 70, and the processor 70 is electrically connected to the exposure device 200 and the wavelength monitor 23. A signal related to the wavelength of light to be emitted by the gas laser device 100 is input from the exposure device 200 to the processor 70. In addition, a signal based on the energy intensity of the laser light received by the wavelength monitor 23 is input from the wavelength monitor 23 to the processor 70. When these signals are input, the processor 70 outputs a signal to drive the driver 72 according to these signals, and the driver 72 drives the stepping motor 84 and the piezoelectric actuator 85 when the signal from the processor 70 is input.

[0084] 2.2 Action

[0085] Next, the operation of the gas laser device 100 according to the comparative example will be described.

[0086] Before the gas laser device 100 emits laser light, purge gas is filled from a purge gas supply source (not shown) into the inner spaces of the optical path tubes 51, 52, 53 and the inner spaces of the housings 21 and 61. In addition, laser gas is supplied from a laser gas supply source (not shown) into the inner space of the housing 30. When the laser gas is supplied, the processor 70 controls the motor 38M to rotate the cross flow fan 38, and the laser gas is circulated by the rotation of the cross flow fan 38.

[0087] When the gas laser device 100 emits a laser, the processor 70 controls the charger BC and the switch in the pulse power module 35 to apply a high voltage between the electrode 32a and the electrode 32b. When a high voltage is applied between the electrodes 32a and 32b, the insulation between the electrodes 32a and 32b is destroyed and a discharge is generated. The laser medium contained in the laser gas between the electrodes 32a and 32b becomes excited by the energy of the discharge, and emits natural emission light when returning to the ground state. Part of this light is ultraviolet light, which passes through the window 31b. The transmitted light is expanded in the direction of travel of the light whenever it passes through the prisms 63, 64, 65, and 66. In addition, the light is wavelength dispersed and guided to the grating 62 whenever it passes through each prism 63, 64, 65, and 66. The light is incident on the grating 62 at a specified angle and diffracted, and the light of the specified wavelength is reflected at the grating 62 at the same reflection angle as the incident angle. The light reflected at the grating 62 propagates again from the window 31b to the internal space of the shell 30 through each prism 66, 65, 64, and 63. The light propagating to the internal space of the shell 30 is narrow-banded. Through the narrow-banded light, the laser medium in the excited state produces stimulated emission, and the light is amplified. The light passes through the window 31a and travels toward the output coupling mirror OC. Part of the light passes through the output coupling mirror OC, and the other part of the light is reflected by the output coupling mirror OC and propagates through the window 31a to the internal space of the shell 30. The light propagating to the internal space of the shell 30 passes through the window 31b and the prisms 63, 64, 65, and 66 toward the grating 62 as described above. In this way, light of a specified wavelength reciprocates between the grating 62 and the output coupling mirror OC. Whenever the light passes through the discharge space in the internal space of the shell 30, it is amplified and laser oscillation is generated. Then, part of the laser light passes through the output coupling mirror OC and is emitted from the laser emission window OW.

[0088] In addition, a portion of the laser light after passing through the output coupling mirror OC is reflected by the beam splitter 22. The reflected laser light is received by the wavelength monitor 23, and the wavelength monitor 23 outputs a signal based on the energy intensity of the received laser light to the processor 70. In addition, a signal related to the wavelength of light is input from the exposure device 200 to the processor 70. Therefore, the processor 70 controls the driver 72 according to the signal input from the wavelength monitor 23 and the signal input from the exposure device 200. Thus, the driver 72 drives the stepping motor 84 and the piezoelectric actuator 85. By driving the stepping motor 84 and the piezoelectric actuator 85, the inclination of the rod 86 changes, and the rotating table 82b rotates. The angle of rotation is, for example, in the range of ±2.5 degrees. The rotating table 82b rotates, whereby the main body 81 fixed to the rotating table 82b and the prism 65 fixed to the main body 81 rotate together with the rotating table 82b, and the orientation of the prism 65 changes.

[0089] The orientation of the prism 65 changes, thereby adjusting the wavelength of the light reflected by the grating 62 and returned to the housing 30 of the cavity device CH. That is, the processor 70 adjusts the rotation angle of the prism 65 based on the signal from the wavelength monitor 23 and the signal from the exposure device 200, and performs feedback control so that the wavelength of the light emitted from the gas laser device 100 becomes the wavelength required by the exposure device 200.

[0090] 2.3 Topics

[0091] In the gas laser device 100 of the comparative example, when light passes through the prisms 63, 64, 65, and 66, for example, scattered light may be generated due to the unexpected reflection of a part of the light in the incident side surface of the prisms 63, 64, 65, and 66. The scattered light may be reflected on the inner peripheral surface of the housing 61, for example, irradiating the fixing unit 300 that fixes the prism 65. Alternatively, the scattered light from the prisms 64 and 66 may directly irradiate the fixing unit 300 that fixes the prism 65. Here, the fixing unit 300 that fixes the prism 65 is described, but in the fixing unit 300 that fixes the prisms 63, 64, and 66, the scattered light from other prisms may also irradiate the fixing unit 300. When the scattered light irradiates the fixing unit 300, the fixing unit 300 generates heat and expands thermally. In this case, the fixing unit 300 is deformed due to the thermal expansion, and the prism 65 may be tilted due to the deformation of the fixing unit 300. In this case, the traveling direction of the light emitted from the gas laser device 100 may change over time.

[0092] Therefore, in the following embodiment, a gas laser device 100 is exemplified in which the temporal change in the traveling direction of light emitted from the gas laser device 100 can be suppressed by suppressing the irradiation of the fixed unit 300 with scattered light.

[0093] In the following embodiment, the fixing unit 300 for fixing the prism 65 is used for description. However, the fixing unit 300 for fixing the prisms 63 , 64 , and 66 can also obtain the same action and effect as the case described using the fixing unit 300 for fixing the prism 65 .

[0094] 3. Description of the Narrowband Module of Implementation Method 1

[0095] Next, the narrowband module 60 according to Embodiment 1 will be described. The same reference numerals are used for the same configurations as those described above, and the duplicate description will be omitted unless otherwise specified.

[0096] 3.1 Structure

[0097] Figure 7 It shows the surrounding Figure 5 FIG. 4 is a diagram of the light shielding member 400 of the first embodiment of the fixing unit 300 shown in FIG. Figure 7 As shown, the narrowband module 60 is different from the narrowband module 60 of the comparative example in that it further includes a light shielding member 400, which shields the scattered light traveling toward the fixed unit 300 of the fixed prism 65. The light shielding member 400 surrounds the fixed unit 300. Figure 7 In FIG. 1 , a portion of the fixing unit 300 surrounded by the light shielding member 400 is shown by a dotted line.

[0098] The light shielding member 400 is arranged in the internal space of the housing 61. The light shielding member 400 is a cylindrical member with one end blocked. Therefore, the light shielding member 400 includes an upper wall 401 fixed to the cover body 61L, and a side wall 403 extending from the peripheral edge of the upper wall 401 toward the main body 81 and integral with the upper wall 401. The light shielding member 400 is open at the bottom surface on the side opposite to the upper wall 401.

[0099] The upper wall 401 of the light shielding member 400 is fixed to the cover body 61L by the fixing member 420 as a bolt in a state of abutting against the cover body 61L of the housing 61, and the light shielding member 400 is suspended from the cover body 61L toward the main body 81. In such a light shielding member 400, the side wall 403 extends from the cover body 61L at least to the side of the fixing surface 81F that is closer to the head of the fixing member 309a, 309b. In addition, it is preferred that the side wall 403 extends to the same height position as the bottom surface 65T. Therefore, the side wall 403 of the light shielding member 400 surrounds the portion of the fixing unit 300 located on the side opposite to the bottom surface 65B with respect to the bottom surface 65T throughout the entire circumference. This portion is a portion of the fixing unit 300 including a portion of the column members 301a and 301b located on the side opposite to the bottom surface 65B with respect to the bottom surface 65T, the beam member 303, the plate member 305, the pressing members 307a and 307b, and the fixing members 309a and 309b. Therefore, another portion of the column members 301a and 301b located on the side of the bottom surface 65B than the bottom surface 65T and the side surfaces 65H, 65X, and 65Y of the prism 65 are not surrounded by the light shielding member 400 and are exposed. The side wall 403 is located between the above portion and the inner peripheral surface of the housing 61 and is located on the side of the above portion than the inner peripheral surface. In the above-mentioned light shielding member 400, the scattered light irradiates the side wall 403 of the light shielding member 400 before reaching a portion of the fixing unit 300, and therefore, the light shielding member 400 shields the scattered light before the scattered light reaches a portion of the fixing unit 300.

[0100] The light shielding member 400 is formed of a metal having high thermal conductivity, such as stainless steel, aluminum, or copper, for example. The light shielding member 400 conducts heat generated by the scattered light irradiating the light shielding member 400 to the cover portion 61L.

[0101] Figure 8 The prism 65 is viewed from the cover 61L side toward the bottom side of the housing 61. Figure 7 The cross section at line BB is shown. Figure 8 In, with Figure 6 Similarly, the beam member 303 is indicated by a dotted line. The outer shape of the side wall 403 and the upper wall 401 are, for example, trapezoidal in shape, but their shapes are not particularly limited. In addition, the outer shape of the side wall 403 and the upper wall 401 are larger than the main body 81, the prism 65, and the fixing unit 300. Thus, even if the prism 65 and the fixing unit 300 are rotated by the rotating mechanism 82 via the main body 81, the side wall 403 is prevented from contacting the prism 65, the main body 81, and the fixing unit 300.

[0102] 3.2 Effects

[0103] In the narrowband module 60 of the present embodiment, the light shielding member 400 shields the scattered light traveling toward the fixing unit 300 before the scattered light reaches a part of the fixing unit 300 .

[0104] When the light shielding member 400 shields the scattered light, the irradiation of the scattered light on the fixing unit 300 is suppressed, and the thermal expansion of the fixing unit 300 caused by the scattered light is suppressed. When the thermal expansion is suppressed, the deformation of the fixing unit 300 is suppressed, and the tilt of the prism 65 caused by the deformation is suppressed. As a result, the temporal change in the traveling direction of the light emitted from the gas laser device 100 can be suppressed.

[0105] The scattered light not only travels at the same height position as the light traveling toward the incident side surface of the prism 63, 64, 65, 66, but also travels toward a position lower than or higher than this position. In addition, when the light is emitted from the exit side surface of the prism 63, 64, 65, 66, scattered light is also generated from the exit surface. In addition, among the light traveling inside the prism 63, 64, 65, 66, a part of the light is sometimes reflected by the exit side surface toward the side surfaces 63Y, 64Y, 65Y, 66Y. When the light travels toward the side surfaces 63Y, 64Y, 65Y, 66Y and then exits from these side surfaces, scattered light is sometimes generated. The above-mentioned scattered light travels toward the fixed unit 300 from various directions. The light shielding component 400 of this embodiment surrounds the fixed unit 300, and therefore, it is possible to shield the scattered light traveling toward the fixed unit 300 from various directions. Furthermore, the light shielding member 400 of this embodiment surrounds the fixed unit 300 that is irradiated with the most scattered light among the plurality of fixed units 300 , and can suppress temporal changes in the traveling direction of light emitted from the gas laser device 100 , compared with the case where the light shielding member 400 surrounds the other fixed units 300 .

[0106] In the narrowband module 60 of the present embodiment, the light shielding member 400 surrounds a portion of the fixed unit 300 located on the side opposite to the bottom surface 65B with respect to the bottom surface 65T. The portion includes a portion of the column members 301a and 301b located on the side opposite to the bottom surface 65B with respect to the bottom surface 65T, the beam member 303, the plate member 305, the pressing members 307a and 307b, and the fixing members 309a and 309b. Thus, the light shielding member 400 shields the scattered light traveling toward the above-mentioned portion without hindering the travel of the light incident on the incident side surface of the prism 65 and the light emitted from the emission side surface of the prism 65. Therefore, the travel of the light is not hindered, the deformation of the above-mentioned portion is suppressed, and the tilt of the prism 65 caused by the deformation can be suppressed.

[0107] Furthermore, in the narrowband module 60 of the present embodiment, the light shielding member 400 is fixed to the housing 61. Thus, even if the light shielding member 400 generates heat due to the scattered light irradiating the light shielding member 400, the heat is transferred from the light shielding member 400 to the housing 61. When the heat is transferred to the housing 61, the temperature rise of the internal space of the light shielding member 400 where the fixing unit 300 is located is suppressed, and the thermal expansion of the fixing unit 300 caused by the temperature rise can be suppressed.

[0108] In the narrow-band module 60 of the present embodiment, the light shielding member 400 is made of metal, so that heat can be easily transferred from the light shielding member 400 to the housing 61 .

[0109] In the narrow-band module 60 of the present embodiment, the metal is stainless steel, aluminum, or copper, so that heat can be more easily transferred from the light shielding member 400 to the housing 61 than with metals other than the above.

[0110] In the narrowband module 60 of the present embodiment, a nickel plating layer that absorbs at least a part of light having the same wavelength as the scattered light may be disposed on the light shielding member 400 made of aluminum.

[0111] The volume of the placement portion 65D including the main body 81 of the present embodiment is larger than the total volume of the components of the fixed unit 300, and the heat capacity of the placement portion 65D is larger than the heat capacity of the fixed unit 300. Therefore, even if the placement portion 65D is irradiated with scattered light, the placement portion 65D is less likely to thermally expand and less likely to deform than the fixed unit 300. The placement portion 65D is less likely to deform, and thus, the tilt of the prism 65 due to the deformation can be suppressed.

[0112] The light shielding member 400 of the present embodiment surrounds the portion of the fixing unit 300 located on the opposite side to the bottom surface 65B with respect to the bottom surface 65T by the side wall 403 over the entire circumference, but the present invention is not necessarily limited to this. Fig. 9 It shows the surrounding Figure 5 FIG. 4 is a diagram of a light shielding member 400 of a modified example of the first embodiment of the fixing unit 300 shown in FIG. 4. Light is not incident on the prism 65 from the entire incident side surface of the prism 65, such as the side surface 65H, but is incident from a partial area of ​​the incident side surface. This area is referred to as the incident area 65e. Fig. 9The shadow is marked in the figure. In addition, the light is not emitted from the entire exit side surface of the prism 65 to the outside of the prism 65, but is emitted from a partial area of ​​the exit side surface. This area is called the exit area. In the case where the incident side surface is the side surface 65H, the exit side surface becomes the side surface 65X, and the exit area becomes a part of the side surface 65X. The incident area 65e and the exit area are arranged to face each other across the prism 65, and are located at approximately the same position in the height direction of the prism 65. The side wall 403 of the shading component 400 can also surround a portion of the fixed unit 300 that is located on the side opposite to the lower edge 65g of the incident area 65e and the lower edge of the exit area with the upper edge 65f of the incident area 65e and the upper edge of the exit area as a reference. Each upper edge is located at a position closer to the bottom surface 65B side than the bottom surface 65T of the prism 65. This portion is a portion of the fixing unit 300 including a portion of the column members 301a and 301b located on the side opposite to the lower edge with respect to each upper edge, the beam member 303, the plate member 305, the pressing members 307a and 307b, and the fixing members 309a and 309b. Fig. 9 , the portions of the prism 65 and the fixing unit 300 surrounded by the light shielding member 400 are indicated by dotted lines. Thus, compared with the case where the light shielding member 400 surrounds the portion of the fixing unit 300 located on the side opposite to the bottom surface 65B with respect to the bottom surface 65T, more scattered light is shielded by the light shielding member 400 without hindering the travel of the light incident on the incident area 65e of the prism 65 and the light emitted from the emission area of ​​the prism 65. Therefore, the thermal expansion of the fixing unit 300 caused by the scattered light can be further suppressed, and the deformation of the fixing unit 300 can be further suppressed.

[0113] The light shielding member 400 surrounds the fixed unit 300 over the entire circumference, but may also surround at least a portion of the fixed unit 300. Therefore, for example, a cutout may be provided in a portion of the light shielding member 400, so that the light shielding member 400 surrounds a portion of the fixed unit 300 in the direction around the central axis and does not surround another portion. In this case, in the cross section of the light shielding member 400, a straight line connecting the two ends of the light shielding member 400 in the direction around the central axis passes through the central axis of the fixed unit 300. Alternatively, in the cross section of the light shielding member 400, a straight line connecting the two ends of the light shielding member 400 passes through a position in the fixed unit 300 that is closer to the outside than the central axis of the fixed unit 300. In this way, the light shielding member 400 surrounds only a portion of the fixed unit 300, and can also shield scattered light.

[0114] In the narrowband module 60 of this embodiment, the light shielding member 400 surrounds the fixing unit 300 that fixes the prism 65, but the present invention is not limited to this. For example, the light shielding member 400 may also separately surround the fixing unit 300 that fixes any one of the prisms 63, 64, and 66 other than the prism 65. Alternatively, Fig.10 As shown, the shading components 400 may be configured in the same number as the fixing units 300 that fix the prisms 63, 64, 65, 66, which are arranged in the internal space of the housing 61 of the narrowband module 60, and the shading components 400 surround the fixing units 300 that fix the prisms 63, 64, 65, 66, respectively. Fig.10 In, with Figure 3 Likewise, the description of the fixing unit 300 is omitted. Fig.10 In the figure, for easy observation, only one fixing member 420 is labeled with a reference numeral, and the reference numerals of other fixing members 420 are omitted. Alternatively, one light shielding member may uniformly surround the fixing units 300 that respectively fix the prisms 63, 64, 65, and 66. Alternatively, one light shielding member may uniformly surround the fixing units 300 that respectively fix the adjacent prisms among the prisms 63, 64, 65, and 66.

[0115] 4. Description of the Narrowband Module of Implementation Method 2

[0116] Next, the narrowband module 60 according to Embodiment 2 will be described. The same reference numerals are used for the same components as those described above, and the duplicate description will be omitted unless otherwise specified.

[0117] 4.1 Structure

[0118] Fig.11 It shows the surrounding Figure 5 FIG. 4 is a diagram of a light shielding member 400 according to Embodiment 2 of the fixing unit 300 shown in FIG. Fig.11 In FIG. 4 , the portion of the fixing unit 300 surrounded by the light shielding member 400 is shown by a dotted line. Fig.11 As shown, the narrowband module 60 of this embodiment is different from the narrowband module 60 of Embodiment 1 in that the light shielding member 400 also surrounds the portion of the pillar members 301 a and 301 b that is closer to the bottom surface 65B than the bottom surface 65T.

[0119] The side wall 403 of the light shielding member 400 includes a pair of extensions 405 extending from the bottom surface 65T side toward the bottom surface 65B side. The extensions 405 are arranged over substantially the entire length of the column members 301a, 301b. In order to prevent the extensions 405 from contacting the fixed surface 81F when the main body 81 is rotated by the rotating mechanism 82, the ends of the extensions 405 are arranged to be slightly separated from the fixed surface 81F.

[0120] Fig.12 The prism 65 is viewed from the cover 61L side toward the bottom side of the housing 61. Fig.11 The cross section of the CC line is shown in FIG. Fig.12 As shown in FIG. 1 , the extension portion 405 is, for example, in a C-shape, but the shape is not particularly limited. One extension portion 405 surrounding the column member 301a surrounds the outer peripheral surface of the column member 301a except the outer peripheral surface facing the outer peripheral surface of the column member 301b through the prism 65. Therefore, the extension portion 405 is arranged on the side opposite to the part of the prism 65 located on the line connecting the column member 301a and the column member 301b with respect to the column member 301a, and surrounds the outer peripheral surface of the column member 301a on the side opposite to the prism 65 with respect to the column member 301a. In addition, when the column member 301b side is observed from the extension portion 405 side through the column member 301a and the prism 65, the column member 301a is covered and hidden by the extension portion 405. The extension portion 405 is arranged to be separated from the column member 301a so that when the column member 301a is rotated by the rotating mechanism portion 82 via the main body portion 81 as described above, the column member 301a does not contact the extension portion 405. In the cross section of the extension portion 405, a straight line connecting both ends of the light shielding member 400 passes through a position of the column member 301a that is closer to the prism 65 side than the central axis of the column member 301a. Here, the extension portion 405 on the column member 301a side is used for description, but the extension portion 405 on the column member 301b side is also the same.

[0121] 4.2 Effects

[0122] In the narrowband module 60 of the present embodiment, the extension portion 405 of the light shielding member 400 surrounds the portion of the pillar members 301a and 301b that is closer to the bottom surface 65B than the bottom surface 65T. Thus, the extension portion 405 shields the scattered light traveling toward the portion. When the extension portion 405 shields the scattered light, the thermal expansion of the pillar members 301a and 301b caused by the scattered light can be further suppressed, and the deformation of the pillar members 301a and 301b can be further suppressed.

[0123] In addition, in the cross section of the extension part 405, the straight line connecting the two ends of the extension part 405 may pass through the central axis of the column part 301a. Alternatively, the extension part 405 may surround the column part 301a over the entire circumference. Here, the column part 301a side is used for explanation, but the same applies to the column part 301b side.

[0124] The extension portion 405 may also abut against the fixing surface 81F. Thus, even if the extension portion 405 generates heat due to the scattered light irradiating the extension portion 405, the heat is transferred from the extension portion 405 to the mounting portion 65D via the fixing surface 81F. Therefore, the temperature rise of the space inside the extension portion 405 where the column members 301a and 301b are located is suppressed, and the thermal expansion of the column members 301a and 301b caused by the temperature rise can be suppressed.

[0125] The light shielding member 400 of the present embodiment does not need to be fixed to the cover portion 61L, and may be fixed to the fixing surface 81F.

[0126] The above description is not limiting but simply illustrative. Therefore, it is clear to those skilled in the art that changes can be made to the embodiments of the present disclosure without departing from the claims. In addition, it is also clear to those skilled in the art that the embodiments of the present disclosure can be used in combination.

[0127] Unless explicitly stated otherwise, the terms used in this specification and claims as a whole should be interpreted as "non-limiting" terms. For example, terms such as "including" or "comprising" should be interpreted as "not limited to the parts recorded as included". Terms such as "having" should be interpreted as "not limited to the parts recorded as having". In addition, the indefinite article "one" should be interpreted as meaning "at least one" or "one or more". In addition, terms such as "at least one of A, B and C" should be interpreted as "A", "B", "C", "A+B", "A+C", "B+C" or "A+B+C". Furthermore, it should be interpreted as also including combinations of them and parts other than "A", "B", and "C".

Claims

1. A narrowband module, comprising: case; a prism disposed in the inner space of the housing, through which light passes; a loading portion, which is disposed in the internal space and carries the prism; a fixing unit, which is disposed in the internal space and fixes the prism to the mounting portion; as well as The light shielding member is disposed in the internal space and shields scattered light generated from the light in the internal space and traveling toward the fixing unit.

2. The narrowband module according to claim 1, wherein: The light shielding member surrounds at least a portion of the fixing unit.

3. The narrowband module according to claim 1, wherein: The fixing unit comprises: a pair of column members arranged on the mounting portion so as to sandwich the prism from each other at positions offset from a path of travel of the light incident on the incident side surface of the prism and a path of travel of the light emitted from the emission side surface of the prism, and extending to a position higher than the other bottom surface of the prism on the opposite side of the bottom surface arranged on the mounting portion with respect to the prism; a beam member which is bridged on the pair of column members on a side opposite to the one bottom surface side with respect to the other bottom surface; a plate member disposed on the other bottom surface; as well as a pressing member disposed between the beam member and the plate member and pressing the plate member toward the prism, The light shielding member surrounds a portion of the fixing unit that is located on a side opposite to the one bottom surface side with respect to the other bottom surface.

4. The narrowband module according to claim 3, wherein: The light shielding member further surrounds a portion of the pillar member that is closer to the one bottom surface side than the other bottom surface.

5. The narrowband module according to claim 4, wherein: The light shielding member surrounds an outer peripheral surface of the column member on a side opposite to the prism with respect to the column member.

6. The narrowband module according to claim 1, wherein: The fixing unit comprises: a pair of column members arranged on the mounting portion so as to sandwich the prism from each other at positions offset from a path of travel of the light incident on the incident side surface of the prism and a path of travel of the light emitted from the emission side surface of the prism, and extending to a position higher than the other bottom surface of the prism on the opposite side of the bottom surface arranged on the mounting portion with respect to the prism; a beam member which is bridged on the pair of column members on a side opposite to the one bottom surface side with respect to the other bottom surface; a plate member disposed on the other bottom surface; as well as a pressing member disposed between the beam member and the plate member and pressing the plate member toward the prism, The incident side surface and the exit side surface include areas for the light to travel. The light shielding member surrounds a portion of the fixing unit that is located on a side opposite to a lower edge side of the region with respect to an upper edge of the region.

7. The narrowband module according to claim 6, wherein: The light shielding member further surrounds a portion of the pillar member that is closer to the one bottom surface side than the other bottom surface.

8. The narrowband module according to claim 7, wherein: The light shielding member surrounds an outer peripheral surface of the column member on a side opposite to the prism with respect to the column member.

9. The narrowband module according to claim 1, wherein: The light shielding member is fixed to the housing.

10. The narrowband module according to claim 9, wherein: The light shielding member is made of metal.

11. The narrowband module according to claim 10, wherein: The metal includes stainless steel, aluminum or copper.

12. The narrowband module according to claim 11, wherein: When the metal is aluminum, a portion of the light shielding member on which the scattered light is irradiated is provided with a nickel plating layer.

13. The narrowband module according to claim 1, wherein: The narrowband module further includes a rotation mechanism that rotates the mounting portion together with the prism around an axis that is perpendicular to a dispersion plane of the light emitted from the prism.

14. The narrowband module according to claim 1, wherein: The prism, the mounting portion, the fixing unit and the light shielding member are respectively provided in plurality. Each of the light shielding members individually surrounds the fixing unit.

15. A gas laser device having a narrowband module, wherein: The narrowband module has: case; a prism disposed in the inner space of the housing, through which light passes; a loading portion, which is disposed in the internal space and carries the prism; a fixing unit, which is disposed in the internal space and fixes the prism to the mounting portion; as well as The light shielding member is disposed in the internal space and shields scattered light generated from the light in the internal space and traveling toward the fixing unit.

16. A method for manufacturing an electronic device, comprising the following steps: The laser beam emitted from the gas laser device having the narrowband module is made incident on the exposure device. exposing the laser on a photosensitive substrate in the exposure device to manufacture an electronic device, The narrowband module has: case; a prism disposed in the inner space of the housing, through which light passes; a loading portion, which is disposed in the internal space and carries the prism; a fixing unit, which is disposed in the internal space and fixes the prism to the mounting portion; as well as The light shielding member is disposed in the internal space and shields scattered light generated from the light in the internal space and traveling toward the fixing unit.

Images