A method for measuring the crimping of a quartz boat

Abstract

The application discloses a quartz boat curling measurement method, and aims to solve the problems of high work intensity and low work efficiency in the detection of quartz boat curling. The application comprises the following steps: S1, installing a roughness detector on a mechanical arm; S2, installing a quartz boat mounting seat on a workbench; S3, clamping the quartz boat to the quartz boat mounting seat, adjusting the posture of the quartz boat, and making the quartz boat be in a set initial position; S4, making the mechanical arm work, moving a measuring needle of the roughness detector to a quartz boat groove tooth surface position, and completing the measurement of all groove tooth surfaces of the quartz boat; S5, transmitting the data detected by the roughness detector on the mechanical arm to a computer end, and generating a detection report by the computer end; S6, reading the detection report by an inspector, and determining whether the quartz boat has curling; and S7, moving away the mechanical arm, and dismounting the quartz boat. The patent can realize automatic detection of quartz boat curling, saves the high-intensity work of manual work, and improves work efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to a semiconductor processing technology, more particularly, it relates to a quartz boat curling measurement method. BACKGROUND

[0002] At present, quartz boats are often used in the process of semiconductor processing to load semiconductor chips for processing. The quartz boat is provided with a plurality of grooves for loading semiconductor chips. Before loading the semiconductor chips on the quartz boat, the groove surface needs to be measured to avoid curling and affect the accuracy of loading semiconductor chips. The traditional measurement method is manual detection, manually adjusting the height gauge to the appropriate height and angle position, and the roughness detector needle on the height gauge is pressed down to measure the groove surface. Multiple positions of each groove surface are measured, and the data measured are used to determine whether the groove surface has curling phenomenon. Although this measurement method can realize the detection of quartz boat curling, manual measurement has high work intensity and low work efficiency. SUMMARY

[0003] In order to overcome the above-mentioned defects, the present application provides a quartz boat curling measurement method, which can realize automatic detection of quartz boat curling, save the high-intensity work of manual operation, and improve the work efficiency.

[0004] In order to solve the above technical problems, the present application adopts the following technical scheme: a quartz boat curling measurement method, comprising the following steps:

[0005] S1, installing a roughness detector on a mechanical arm;

[0006] S2, installing a quartz boat mounting seat on a workbench;

[0007] S3, clamping the quartz boat to the quartz boat mounting seat, adjusting the posture of the quartz boat, and making the quartz boat in the set initial position;

[0008] S4, the mechanical arm works, the mechanical arm moves the position with the set initial position of the quartz boat as the reference, moves the needle of the roughness detector to the position of the groove surface of the quartz boat, and measures the data generated by pressing the needle down on the groove surface. A plurality of point positions of each groove surface are measured; after completing the detection of one groove surface, the mechanical arm moves to the next groove surface for detection, and thus the measurement of all groove surfaces of the quartz boat is completed;

[0009] S5, the data detected by the roughness detector on the mechanical arm is transmitted to the computer end, and the computer end generates a detection report;

[0010] S6, the inspector reads the detection report to determine whether the quartz boat has curling;

[0011] S7, moving away the mechanical arm and unloading the quartz boat.

[0012] The patent application adopts a mechanical arm to automatically complete the measurement of the curling of a quartz boat, the quartz boat is loaded on a quartz boat mounting seat, after loading in place, the mechanical arm is moved, and the roughness detector on the mechanical arm is used to measure several positions of the groove tooth surface, if the difference of the measured values is greater than the set range, it indicates that the groove tooth surface has curling. The measured data is transmitted to the computer end, and a detection report is generated for easy viewing. The quartz boat curling measurement method of the patent application can realize automatic detection of quartz boat curling, save the high-intensity work of manual work, and improve the work efficiency.

[0013] As preferred, in the S4 process, after the quartz boat mounting seat is rotated and lifted into place, the mechanical arm is moved to move the measuring needle of the roughness detector to the position of the groove tooth surface of the quartz boat.

[0014] The quartz boat mounting seat can rotate and lift, adjust the posture of the quartz boat, and facilitate the movement of the mechanical arm for measuring the groove tooth surface of the quartz boat.

[0015] As preferred, in the S5 process, the computer end encodes the several data detected for each groove tooth surface.

[0016] The computer end encodes the detected data to facilitate determination of which groove tooth surface has curling.

[0017] As preferred, in the S5 process, the computer end compares the several data measured for the same groove tooth surface, and when the difference exceeds the set range, highlights in the detection report.

[0018] This setting facilitates the detection of abnormal data in the detection report.

[0019] As preferred, an extension arm is installed between the roughness detector and the mechanical arm, one end of the extension arm is provided with a flange, the other end of the extension arm is provided with a connecting plate, the roughness detector is tightly installed on the connecting plate, and the flange is tightly connected with the end of the mechanical arm.

[0020] The extension arm is provided to facilitate the connection of the roughness detector and the mechanical arm.

[0021] Preferably, the quartz boat comprises a flange, a top plate, a plurality of silicon tooth rods connected between the flange and the top plate, and a connecting rod, the silicon tooth rods are provided with a plurality of vertically spaced grooves, the connecting rod is provided with a positioning surface facing the center, and the positioning surface is vertically arranged; in the S3 process, the stylus of the roughness detector on the mechanical arm touches the positioning surface, and the data is recorded; then the mechanical arm is moved to the next position, the X-axis and Y-axis directions of the next position are the same as those of the previous position, and the Z-axis direction is moved, the stylus of the roughness detector touches the second position on the same connecting rod positioning surface, and the measured data is recorded, a plurality of data on the same positioning surface are measured, and the data are compared, if the deviation range exceeds the set range, the quartz boat is adjusted in position; after the adjustment in position is completed, the above measurement is performed again until the measured data deviation is within the set range.

[0022] Before the mechanical arm measures the groove surface of the quartz boat, it is detected whether the quartz boat is loaded in place and whether there is deviation in the vertical direction. After the adjustment in position of the quartz boat is completed, the above measurement is performed again until the measured data deviation is within the set range, thereby ensuring the accuracy of the measurement of the groove surface of the quartz boat.

[0023] Preferably, the quartz boat mounting seat is provided with a movable positioning strip, a fixed positioning strip and a pressing block, the inner edge of the movable positioning strip is matched with the outer edge of the end of the quartz boat, the outer wall of the movable positioning strip is matched with the inner part of the fixed positioning strip, and the pressing block is pressed against the quartz boat; in the S3 process, the outer edge of the lower end of the quartz boat is matched with the inner wall of the movable positioning strip, and then the pressing block is pressed against the quartz boat.

[0024] After the quartz boat is loaded onto the quartz boat mounting seat, the movable positioning strip plays a positioning role on the edge of the quartz boat, and the pressing block can press the quartz boat to achieve reliable positioning of the quartz boat. The movable positioning strip can be detached from the quartz boat mounting seat, which is convenient for replacement to adapt to quartz boats of different sizes.

[0025] As preferred, several clamping seats are evenly installed on the quartz boat mounting seat and arranged in radial movement, positioning springs are installed between the outer side of the clamping seat and the quartz boat mounting seat, a pushing part is arranged on the upper end of the clamping seat, a pressing part is arranged on the lower end of the clamping seat, a pushing surface is arranged on the inner side surface of the pushing part and arranged in an inward inclination from top to bottom, a positioning clamping groove is formed between the lower end inner edge of the pushing part and the quartz boat mounting seat, a radial pushing protrusion is arranged on the inner wall of the radial pushing ring and corresponds to the clamping seat, and the radial pushing protrusion abuts on the clamping seat; a plurality of axial pushing protrusions are arranged on the lower end surface of the axial pushing ring and correspond to the clamping seat, and the axial pushing protrusions abut on the pressing part; in the S3 process, the outer edge of the lower end of the quartz boat abuts on the pushing surface, the clamping seat is pushed radially outward, the quartz boat is supported on the quartz boat mounting seat, the edge of the quartz boat is clamped in the positioning clamping groove, then the radial pushing ring is rotated, the clamping seat is pushed to move radially to clamp the edge of the quartz boat, then the axial pushing ring is rotated, the clamping seat is pushed to move downward, and the positioning clamping groove presses the quartz boat.

[0026] The clamping seat can move radially to adapt to different sizes of quartz boats. In the process of loading the quartz boat, the outer edge of the lower end of the quartz boat abuts on the pushing surface, the clamping seat is pushed radially outward, the quartz boat is supported on the quartz boat mounting seat, the edge of the quartz boat is clamped in the positioning clamping groove, then the radial pushing ring is rotated, the clamping seat is pushed to move radially to clamp the edge of the quartz boat, then the axial pushing ring is rotated, the clamping seat is pushed to move downward, and the positioning clamping groove presses the quartz boat. The quartz boat is conveniently and reliably loaded.

[0027] As preferred, a sliding groove and a sliding seat are arranged on the quartz boat mounting seat and correspond to the clamping seat, the sliding seat is radially slidably installed in the sliding groove, the clamping seat is liftably installed on the sliding seat, and a pre-tightening spring is installed between the sliding seat and the clamping seat.

[0028] The sliding seat can move radially in the sliding groove and cannot move axially, which facilitates the axial pushing ring to drive the clamping seat to move axially and clamp the quartz boat.

[0029] As preferred, an installation ring is arranged on the lower surface of the quartz boat mounting seat, an annular groove is arranged on the installation ring, a positioning pin is connected to the axial pushing ring, the end of the positioning pin is arranged in the annular groove, and the axial pushing ring is connected to the installation ring in a sleeved manner; an arc-shaped avoiding groove is arranged on the installation ring, the radial pushing ring is sleeved with the installation ring, a positioning lever is connected to the radial pushing ring, the positioning lever penetrates through the arc-shaped avoiding groove, a locking nut is connected to the positioning lever, and the locking nut abuts on the installation ring.

[0030] The installation ring facilitates the installation of the axial pushing ring and the radial pushing ring.

[0031] Compared with the prior art, the quartz boat is supported to the quartz boat mounting seat by the following steps: (1) the outer edge of the lower end of the quartz boat is closed on the pushing surface, the clamping seat is pushed radially outward, the quartz boat is supported to the quartz boat mounting seat, the edge of the quartz boat is clamped in the positioning clamping groove, then the radial pushing ring is rotated, the clamping seat is pushed to move radially to clamp the edge of the quartz boat, then the axial pushing ring is rotated, the clamping seat is pushed to move downward, and the positioning clamping groove is pressed against the quartz boat; and (2) the quartz boat is convenient and reliable to load, and the quartz boat mounting seat is suitable for clamping quartz boats of different sizes, and has good universality. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 is a structural schematic diagram of embodiment 1 of the present application;

[0033] Figure 2 is a partial structural schematic diagram of a quartz boat mounting seat of embodiment 2 of the present application;

[0034] Figure 3 is a structural schematic diagram of a radial pushing ring of embodiment 2 of the present application;

[0035] In the figure: 1, roughness detector, 2, mechanical arm, 3, extension arm, 4, flange, 5, connecting plate, 6, workbench, 7, quartz boat mounting seat, 8, quartz boat, 9, quartz boat groove tooth surface, 10, flange, 11, ceiling, 12, silicon tooth rod, 13, connecting rod, 14, positioning surface, 15, movable positioning strip, 16, fixed positioning strip, 17, pressing block, 18, clamping seat, 19, positioning spring, 20, pushing part, 21, pressing part, 22, pushing surface, 23, positioning clamping groove, 24, radial pushing ring, 25, axial pushing ring, 26, radial pushing protrusion, 27, axial pushing protrusion, 28, sliding groove, 29, sliding seat, 30, pre-tightening spring, 31, mounting ring, 32, ring groove, 33, positioning pin, 34, arc-shaped avoiding groove, 35, positioning lever, 36, locking nut, 37, upper limiting block, 38, lower abutting block. DETAILED DESCRIPTION

[0036] The technical solutions of the present application will be further specifically described below by means of specific embodiments and in combination with the drawings:

[0037] Embodiment 1: a quartz boat edge curl measurement method (see attached Figure 1 ), comprising the following steps:

[0038] S1, install the roughness detector 1 on the mechanical arm 2; install the extension arm 3 between the roughness detector and the mechanical arm, the extension arm is provided with a flange 4 at one end and a connecting plate 5 at the other end, the roughness detector is tightly installed on the connecting plate, and the flange is tightly connected with the end of the mechanical arm;

[0039] S2, install the quartz boat mounting seat 7 on the workbench 6; the mechanical arm is installed on the workbench;

[0040] S3, clamp the quartz boat 8 to the quartz boat mounting seat, adjust the posture of the quartz boat, and make the quartz boat be in the set initial position;

[0041] S4, the mechanical arm works, the mechanical arm moves the position with the set quartz boat initial position as the reference, moves the measuring needle of the roughness detector to the position of the quartz boat groove tooth surface 9, and measures the data generated by pressing the measuring needle to the groove tooth surface. A plurality of points are measured for each groove tooth surface. After the detection of one groove tooth surface is completed, the mechanical arm moves to the next groove tooth surface for detection, and thus the measurement of all groove tooth surfaces of the quartz boat is completed;

[0042] S5, the data detected by the roughness detector on the mechanical arm is transmitted to the computer end, and the computer end generates a detection report;

[0043] S6, the inspector reads the detection report and determines whether the quartz boat has a curled edge;

[0044] S7, remove the mechanical arm and unload the quartz boat.

[0045] In the process of S4, after the quartz boat mounting seat is rotated and lifted into position, the mechanical arm moves again to move the measuring needle of the roughness detector to the position of the quartz boat groove tooth surface. In S5, the computer end encodes a plurality of data detected for each groove tooth surface. In S5, the computer end compares a plurality of data measured for the same groove tooth surface, and when the difference exceeds the set range, highlights in the detection report, such as bold text and colored text.

[0046] The quartz boat comprises a flange 10, a top plate 11, a plurality of silicon tooth rods 12 connected between the flange and the top plate, and a connecting rod 13. A plurality of groove teeth are arranged on the silicon tooth rod in an up-down interval. The connecting rod is provided with a positioning surface 14 facing the center. The positioning surface is a plane, and the positioning surface is vertically arranged. In the process of S3, the measuring needle of the roughness detector on the mechanical arm touches the positioning surface and records the data. Then the mechanical arm is moved to the next position, the X-axis and Y-axis directions of the position are the same as those of the previous position, and the Z-axis direction is moved. The measuring needle of the roughness detector touches the second position on the same connecting rod positioning surface and records the measured data. In this way, a plurality of data on the same positioning surface are measured, and the data are compared. If the deviation range exceeds the set range, the posture of the quartz boat is adjusted. After the adjustment is completed, the above measurement is performed again until the deviation of the measured data is within the set range.

[0047] The movable positioning strip 15, the fixed positioning strip 16 and the pressing block 17 are installed on the quartz boat mounting seat. The movable positioning strip is detachably installed on the quartz boat mounting seat. The inner edge of the movable positioning strip is matched with the outer edge of the end of the quartz boat. The outer wall of the movable positioning strip is matched with the inner part of the fixed positioning strip. The pressing block is pressed on the quartz boat. In the S3 process, the outer edge of the flange at the lower end of the quartz boat is matched with the inner wall of the movable positioning strip. Then the pressing block is pressed on the flange of the quartz boat.

[0048] The patent application adopts a mechanical arm to automatically complete the measurement of the rolled edge of the quartz boat. The quartz boat is loaded on the quartz boat mounting seat. After being loaded in place, the mechanical arm is moved. The roughness detector on the mechanical arm measures several positions of the tooth surface. If the difference between the measured values is greater than the set range, it indicates that the tooth surface has a rolled edge. The measured data is transmitted to the computer end and a detection report is generated for easy viewing. The quartz boat rolled edge measurement method of the patent application can realize automatic detection of the quartz boat rolled edge, save the high-intensity work of manual labor and improve the work efficiency.

[0049] Embodiment 2: A quartz boat rolled edge measurement method (see attached Figure 2 , attached Figure 3 ), the steps are similar to those of embodiment 1. The main difference is that in this embodiment, three clamping seats 18 are uniformly installed on the quartz boat mounting seat and are arranged to move radially. Positioning springs 19 are installed between the outer side of the clamping seat and the quartz boat mounting seat. A pushing part 20 is provided on the upper end of the clamping seat. A pressing part 21 is provided on the lower end of the clamping seat. A pushing surface 22 is provided on the inner side of the pushing part from top to bottom and is inclined inward. A positioning clamping groove 23 is formed between the inner edge of the lower end of the pushing part and the quartz boat mounting seat. A radial pushing ring 24 and an axial pushing ring 25 are installed on the quartz boat mounting seat. Radial pushing protrusions 26 are provided on the inner wall of the radial pushing ring and correspond to the clamping seat. The inner wall of the radial pushing protrusion is inclined along the circumference. The radial pushing protrusion abuts against the clamping seat. A plurality of axial pushing protrusions 27 are provided on the lower end surface of the axial pushing ring and correspond to the clamping seat. The lower surface of the axial pushing protrusion is inclined along the circumference. The axial pushing protrusion abuts against the pressing part. A sliding groove 28 and a sliding seat 29 are provided on the quartz boat mounting seat and correspond to the clamping seat. The sliding seat is radially slidably installed in the sliding groove. The clamping seat is liftably installed on the sliding seat. A pre-tightening spring 30 is installed between the sliding seat and the clamping seat. An installation ring 31 is provided on the lower surface of the quartz boat mounting seat. An annular groove 32 is provided on the installation ring. A positioning pin 33 is connected to the axial pushing ring. The end of the positioning pin is placed in the annular groove. The axial pushing ring is connected to the installation ring in a sleeved manner. An arc-shaped avoiding groove 34 is provided on the installation ring. The radial pushing ring is sleeved with the installation ring. A positioning lever 35 is connected to the radial pushing ring. The positioning lever passes through the arc-shaped avoiding groove. A locking nut 36 is connected to the positioning lever. The locking nut abuts against the installation ring.

[0050] The upper end of the sliding seat is connected with the upper limiting block 37, and the lower part of the sliding seat is connected with the lower abutting block 38. The upper limiting block is attached to the upper surface of the quartz boat clamping seat, the upper end of the lower abutting block is attached to the lower surface of the quartz boat clamping seat, and the inner wall of the radial pushing ring is attached to the lower abutting block. A stepped surface is arranged on the clamping seat and abuts against the upper limiting block.

[0051] In the S3 process, the lower end of the quartz boat is attached to the pushing surface, the clamping seat is pushed radially outward, the quartz boat is supported on the quartz boat mounting seat, the edge of the quartz boat is clamped in the positioning clamping groove, then the radial pushing ring is rotated, the clamping seat is pushed to move radially to clamp the edge of the quartz boat, then the axial pushing ring is rotated, the clamping seat is pushed to move downward to press the quartz boat in the positioning clamping groove. The other steps are the same as those in Example 1.

[0052] The clamping seat can move radially to adapt to quartz boats of different sizes, and has good versatility.

[0053] The above-described embodiments are only preferred solutions of the present application and do not limit the present application in any form. Other variants and modifications can be made without exceeding the technical solutions recited in the claims.

Claims

1. A method for measuring the crease of a quartz boat, characterized in that, Includes the following steps: S1, Install the roughness tester onto the robotic arm; S2, Install the quartz boat mounting base on the workbench; S3, clamp the quartz boat onto the quartz boat mounting base, adjust the attitude of the quartz boat, and place the quartz boat in the set initial position; S4, the robotic arm works. The robotic arm moves to the initial position of the quartz boat as a reference position, so that the probe of the roughness tester moves to the groove surface of the quartz boat. The probe presses down on the groove surface to measure and generate data. Several points are measured on each groove surface. After the inspection of one groove surface is completed, the robotic arm moves to the next groove surface for inspection. In this way, the measurement of all groove surfaces of the quartz boat is completed. S5, the data detected by the roughness detector on the robotic arm is transmitted to the computer, and the computer generates a test report; S6, Inspectors read the test report and determine whether the quartz boat has curled edges; S7, remove the robotic arm and unload the quartz boat; Several radially movable clamps are evenly distributed on the quartz boat mounting base. A positioning spring is installed between the outer side of the clamp and the quartz boat mounting base. A pushing part is provided at the upper end of the clamp. A pushing surface is provided on the inner side of the pushing part, which is inclined from top to bottom and inward. A positioning groove is formed between the lower inner edge of the pushing part and the quartz boat mounting base. During S3, the lower outer edge of the quartz boat abuts against the pushing surface, pushing the clamp radially outward. The quartz boat is supported on the quartz boat mounting base, and the edge of the quartz boat is stuck in the positioning groove.

2. The method for measuring the rolled edge of a quartz boat according to claim 1, characterized in that, During the S4 process, after the quartz boat mounting base rotates and rises to its position, the robotic arm moves again to move the probe of the surface roughness tester to the groove surface of the quartz boat.

3. The method for measuring the rolled edge of a quartz boat according to claim 1, characterized in that, In S5, the computer encodes several data points detected on each groove surface.

4. The method for measuring the rolled edge of a quartz boat according to claim 1, characterized in that, In S5, the computer compares several data points measured on the same groove surface, and when the difference exceeds the set range, it is highlighted in the test report.

5. The method for measuring the rolled edge of a quartz boat according to claim 1, characterized in that, An extension arm is installed between the roughness tester and the robotic arm. One end of the extension arm is equipped with a flange, and the other end of the extension arm is equipped with a connecting plate. The roughness tester is fastened to the connecting plate, and the flange is fastened to the end of the robotic arm.

6. The method for measuring the rolled edge of a quartz boat according to claim 1, characterized in that, The quartz boat includes a flange, a top plate, several toothed silicon rods and connecting rods connected between the flange and the top plate. The toothed silicon rods have several vertically spaced grooves, and the connecting rods have a positioning surface facing the center, arranged vertically. During process S3, the probe of the surface roughness tester on the robotic arm touches the positioning surface and records data. Then, the robotic arm moves to the next position, where the X and Y axes are the same as the previous position, but the Z axis shifts. The probe of the surface roughness tester touches a second position on the same connecting rod positioning surface and records the measured data. This process is repeated, measuring multiple data points on the same positioning surface and comparing the data. If the deviation exceeds the set range, the quartz boat is adjusted. After adjustment, the above measurements are repeated until the measured data deviation is within the set range.

7. A method for measuring the rolled edge of a quartz boat according to any one of claims 1 to 6, characterized in that, The quartz boat mounting base is equipped with a movable positioning strip, a fixed positioning strip, and a pressure block. The inner edge of the movable positioning strip is adapted to the outer edge of the end of the quartz boat, and the outer wall of the movable positioning strip is adapted to and fitted to the inside of the fixed positioning strip. The pressure block is pressed tightly onto the quartz boat. During S3, the lower outer edge of the quartz boat is fitted to the inner wall of the movable positioning strip, and then the pressure block is pressed tightly onto the quartz boat.

8. A method for measuring the crease of a quartz boat according to any one of claims 1 to 6, characterized in that, The lower end of the clamp is provided with a pressing part. A radial pushing ring and an axial pushing ring are installed on the quartz boat mounting base. The inner wall of the radial pushing ring is provided with radial pushing protrusions corresponding to the clamp, and the radial pushing protrusions abut against the clamp. The lower end face of the axial pushing ring is provided with several axial pushing protrusions corresponding to the clamp, and the axial pushing protrusions abut against the pressing part. During S3, after the edge of the quartz boat is stuck in the positioning groove, the radial pushing ring is rotated to push the clamp to move radially so that the clamp clamps the edge of the quartz boat. Then, the axial pushing ring is rotated to push the clamp to move downward so that the positioning groove presses the quartz boat.

9. The method for measuring the rolled edge of a quartz boat according to claim 8, characterized in that, The quartz boat mounting base and the clamp are respectively provided with a sliding groove and a sliding seat. The sliding seat can be radially slidably installed in the sliding groove, and the clamp can be lifted and lowered on the sliding seat. A preload spring is installed between the sliding seat and the clamp.

10. The method for measuring the rolled edge of a quartz boat according to claim 8, characterized in that, The quartz boat mounting base has a mounting ring on its lower surface. The mounting ring has a groove. A positioning pin is connected to the axial push ring, and the end of the positioning pin is placed in the groove. The axial push ring and the mounting ring are fitted together. The mounting ring has an arc-shaped clearance groove. The radial push ring and the mounting ring are fitted together. A positioning lever is connected to the radial push ring. The positioning lever passes through the arc-shaped clearance groove. A locking nut is connected to the positioning lever and abuts against the mounting ring.

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