A three-axis parallel decoupling motion platform

Abstract

The present invention discloses a three-axis parallel decoupling motion platform, comprising a base, a connecting beam, and three guide decoupling mechanisms. Each guide decoupling mechanism comprises an upper plate, a middle plate, and a bottom plate, arranged in parallel from top to bottom. The bottom plate and the upper plate are connected by a first guide beam, and the bottom plate and the middle plate are connected by a second guide beam. The first guide beam and the second guide beam are both provided with motion constraint structures, so that the upper plate and the middle plate can only move relative to the bottom plate in a direction parallel to the bottom plate. The three guide decoupling mechanisms are mutually perpendicular, and the upper plates are fixedly connected to each other to form a bearing space. The lower portion of the connecting beam is connected to the base, and the upper portion of the connecting beam extends between the bottom plate and the middle plate of each of the three guide decoupling mechanisms. A displacement drive assembly is provided between each middle plate and the connecting beam, and the displacement drive assembly drives the middle plate to move relative to the connecting beam in a direction perpendicular to the middle plate. The motion platform can achieve three-axis parallel motion output and has excellent motion displacement decoupling capability.

Description

Technical Field

[0001] The present invention belongs to the field of precision motion technology, and in particular relates to a three-axis parallel decoupling motion platform. Background Art

[0002] Multi-axis precision motion has important applications in medical procedures, optical observation, chip manufacturing, and other fields. It is mainly achieved through two schemes: series and parallel. The series scheme uses multiple single-axis motion platforms stacked on each other, with each motion platform responsible for only one degree of freedom. Although this scheme is simple, reliable, and easy to implement, the errors generated by each single-axis motion platform are accumulated and amplified in the end effector, resulting in reduced motion execution accuracy. It also suffers from common problems such as large size and poor structural dynamic performance. The parallel scheme uses parallel drives and structures to reduce motion error accumulation and help improve the system's stiffness and motion bandwidth.

[0003] Existing motion platforms with three-axis parallel precision motion capabilities are mostly based on single-axis assembly with motion decoupling capabilities. Unavoidable assembly errors will limit the structural decoupling capabilities, resulting in motion coupling at the end-effector of the motion platform, affecting the realization of motion accuracy. Summary of the Invention

[0004] In response to the above problems, the present invention discloses a three-axis parallel decoupling motion platform to overcome the above problems or at least partially solve the above problems.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] The present invention provides a three-axis parallel decoupling motion platform, which is characterized by comprising a base, a connecting beam and three guide decoupling mechanisms;

[0007] Each of the guide decoupling mechanisms includes an upper plate, a middle plate, and a bottom plate arranged in parallel from top to bottom; the bottom plate and the upper plate are connected by at least three first guide beams, and the bottom plate and the middle plate are connected by at least three second guide beams, each of the first guide beams and each of the second guide beams is provided with a motion constraint structure, so that the upper plate and the middle plate can only move relative to the bottom plate in a direction parallel to the bottom plate;

[0008] The three guide decoupling mechanisms are arranged perpendicular to each other in pairs, and the upper plates are fixedly connected to form a bearing space; the lower part of the connecting beam is connected to the base, and the upper part of the connecting beam extends to between the bottom plate and the middle plate in the three guide decoupling mechanisms respectively, and a displacement driving component is arranged between the middle plate and the connecting beam in each guide decoupling mechanism, and the middle plate is driven by the displacement driving component to move relative to the connecting beam in a direction perpendicular to the middle plate.

[0009] Furthermore, the motion constraint structures are respectively provided at both ends of each first guide beam and at both ends of each second guide beam.

[0010] Furthermore, the motion restraining structure is at least two flexible hinges, and at least one of the flexible hinges is arranged along the first direction, and at least one of the flexible hinges is arranged along the second direction;

[0011] The first direction and the second direction are perpendicular to each other.

[0012] Furthermore, a displacement amplification component is provided between the middle plate and the connecting beam in each of the guide decoupling mechanisms, and the displacement driving component drives the middle plate to move relative to the connecting beam through the displacement amplification component, and the displacement amplification component is used to amplify the displacement of the middle plate relative to the connecting beam.

[0013] Furthermore, the displacement amplification assembly includes a first driving block, a second driving block, a first displacement block, a second displacement block, a first connecting block, a second connecting block, a third connecting block and a fourth connecting block;

[0014] The first driving block and the second driving block are arranged in parallel, the first connecting block, the first displacement block, and the second connecting block are sequentially arranged between the upper part of the first driving block and the upper part of the second driving block, the third connecting block, the second displacement block, and the fourth connecting block are sequentially arranged between the lower part of the first driving block and the lower part of the second driving block, and the upper part of the first driving block and the lower part of the first connecting block, the upper part of the first connecting block and the first displacement block, the first displacement block and the upper part of the second connecting block, the lower part of the second connecting block and the upper part of the second driving block, the lower part of the first driving block and the upper part of the third connecting block, the lower part of the third connecting block and the second displacement block, the second displacement block and the lower part of the fourth connecting block, and the upper part of the fourth connecting block and the lower part of the second driving block are all connected by connecting bridges;

[0015] The first displacement block is connected to the middle plate, the second displacement block is connected to the connecting beam, and the displacement drive assembly is arranged between the first drive block and the second drive block, and is used to drive the first drive block and the second drive block to move closer to or away from each other.

[0016] Furthermore, the connecting beam includes three "U-shaped" frames, and the three frames are arranged perpendicular to each other and fixedly connected in pairs. The base is fixedly connected to the intersection of the three frames, and the corners of each frame away from the base extend to between the bottom plate and the middle plate in each guide decoupling mechanism.

[0017] Furthermore, the base is a cube structure, so that the base has three fixed surfaces.

[0018] Furthermore, each of the fixing surfaces on the base protrudes from the bottom plate in each of the guide decoupling mechanisms.

[0019] Furthermore, the displacement driving component is a piezoelectric ceramic driver.

[0020] Furthermore, the three-axis parallel decoupling motion platform is formed by integrated processing.

[0021] Furthermore, the three-axis parallel decoupling motion platform is made of aluminum alloy or titanium alloy.

[0022] The advantages and beneficial effects of the present invention are:

[0023] In the three-axis parallel decoupling motion platform of the present invention, three mutually perpendicular guide decoupling mechanisms are set up, and a displacement drive component can be set in each guide decoupling mechanism, so that the three-axis motion parallel output of the motion platform can be realized; in addition, at least three first guide beams are set between the bottom plate and the upper plate in each guide decoupling mechanism, and at least three second guide beams are set between the bottom plate and the middle plate, and the first guide beams and the second guide beams are provided with motion constraint structures, so that the upper plate and the middle plate can only be displaced relative to the bottom plate in a direction parallel to the bottom plate, thereby making the three guide decoupling mechanisms guide each other without interfering with each other's motion displacement output, which can reduce the displacement output coupling between different axes and effectively improve the linearity and stability of the single-axis displacement output. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present invention. The same reference symbols are used throughout the drawings to represent the same components. In the drawings:

[0025] Figure 1 and Figure 2 A three-dimensional structural diagram of a three-axis parallel decoupling motion platform in one embodiment of the present invention;

[0026] Figure 3 It is a front view of a three-axis parallel decoupling motion platform according to one embodiment of the present invention;

[0027] Figure 4 A top view of a three-axis parallel decoupling motion platform according to an embodiment of the present invention;

[0028] Figure 5It is a left side view of a three-axis parallel decoupling motion platform according to one embodiment of the present invention;

[0029] Figure 6 A three-dimensional structural diagram of a guide decoupling mechanism in one embodiment of the present invention;

[0030] Figure 7 A rear view of a guide decoupling mechanism according to an embodiment of the present invention;

[0031] Figure 8 It is a front view of a displacement amplification component in one embodiment of the present invention;

[0032] Figure 9 It is a three-dimensional structural diagram of a motion constraint structure in one embodiment of the present invention.

[0033] In the figure: 1. base; 2. connecting beam; 3. upper plate; 4. middle plate; 5. bottom plate; 6. first guide beam; 7. second guide beam; 8. first driving block; 9. second driving block; 10. first displacement block; 11. second displacement block; 12. first connecting block; 13. second connecting block; 14. third connecting block; 15. fourth connecting block; 16. connecting bridge. DETAILED DESCRIPTION

[0034] To make the objectives, technical solutions, and advantages of the present invention more clear, the following will provide a clear and complete description of the technical solutions of the present invention in conjunction with specific embodiments of the present invention and corresponding drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0035] The technical solutions provided by various embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0036] In one embodiment of the present invention, a three-axis parallel decoupling motion platform is disclosed. Figures 1 to 7 As shown, the three-axis parallel decoupling motion platform includes a base 1, a connecting beam 2 and three guide decoupling mechanisms.

[0037] Specifically, the guide decoupling mechanism includes an upper plate 3, a middle plate 4 and a bottom plate 5 which are arranged in parallel from top to bottom; the bottom plate 5 and the upper plate 3 are connected by at least three first guide beams 6, and the first guide beams 6 are parallel and arranged in parallel, and the bottom plate 5 and the middle plate 4 are connected by at least three second guide beams 7, and the second guide beams 7 are parallel and arranged in parallel. In this way, the connection between the bottom plate 5 and the upper plate 3 and the connection between the bottom plate 5 and the middle plate 4 are more stable, so that the bottom plate 5 and the upper plate 3 as well as the bottom plate 5 and the middle plate 4 are always kept parallel, thereby ensuring the output of precise displacement; in this embodiment, the number of the first guide beams 6 and the second guide beams 7 are both four, and the first guide beams 6 and the second guide beams 7 are evenly arranged, so that the force between the upper plate 3 and the bottom plate 5 and between the middle plate 4 and the bottom plate 5 is more uniform. In addition, each first guide beam 6 and each second guide beam 7 is provided with a motion constraint structure, so that the upper plate 3 and the middle plate 4 can only be displaced relative to the bottom plate 5 in a direction parallel to the bottom plate 5, that is, the middle plate 4 can only move relative to the bottom plate 5 along the length direction perpendicular to the second guide beam 7, but cannot move relative to the bottom plate 5 along the length direction of the second guide beam 7; the upper plate 3 can only move relative to the bottom plate 5 along the length direction perpendicular to the first guide beam 6, but cannot move along the length direction of the first guide beam 6.

[0038] Furthermore, the three guide decoupling mechanisms are arranged perpendicular to each other, and the upper plates in each guide decoupling mechanism are fixedly connected to form a bearing space. This way, the three-axis parallel decoupling motion platform has a huge bearing space and can be further expanded to be suitable for different application scenarios; for example, a lens can be placed on the bearing space to conduct optical experiments. In addition, the lower part of the connecting beam 2 is connected to the base 1, and the upper part of the connecting beam 2 extends to between the bottom plate 5 and the middle plate 4 in the three guide decoupling mechanisms. A displacement drive assembly (not shown in the figure) is set between the middle plate 4 and the connecting beam 2 in each guide decoupling mechanism. The displacement drive assembly drives the middle plate 4 to move relative to the connecting beam 2 in a direction perpendicular to the middle plate 4. At this time, the middle plate 4 drives the bottom plate 5 to move relative to the connecting beam 2 in a direction perpendicular to the middle plate 4 through the second guide beam 7. Then, the bottom plate 5 drives the upper plate 3 to move relative to the connecting beam 2 in a direction perpendicular to the middle plate 4 through the first guide beam 6. Finally, the output of the motion displacement is achieved through the upper plate 3. The displacement drive assembly can be a piezoelectric ceramic driver. The piezoelectric ceramic driver has a compact structure, is easily installed between the middle plate and the bottom plate, and can output precise displacement. Of course, the displacement drive assembly can also be other compact drivers capable of outputting precise displacement.

[0039] Here, the working principle of the three-axis parallel decoupling motion platform is explained:

[0040] For ease of description, the three guide decoupling mechanisms in the three-axis parallel decoupling motion platform are named the first guide decoupling mechanism, the second guide decoupling mechanism, and the third guide decoupling mechanism, respectively. The first guide decoupling mechanism is arranged along the X-axis, i.e., the motion displacement output direction of the first guide decoupling mechanism is the X-axis direction; the second guide decoupling mechanism is arranged along the Y-axis, i.e., the motion displacement output direction of the second guide decoupling mechanism is the Y-axis direction; and the third guide decoupling mechanism is arranged along the Z-axis, i.e., the motion displacement output direction of the third guide decoupling mechanism is the Z-axis direction. When the displacement drive components in each decoupling mechanism are not operating, due to the action of the motion constraint structure, the upper plate of the first guide decoupling mechanism can only move relative to the connecting beam in the plane formed by the Y-axis and the Z-axis, and cannot move along the X-axis direction; the upper plate of the second guide decoupling mechanism can only move relative to the connecting beam in the plane formed by the X-axis and the Z-axis, and cannot move along the Y-axis direction; and the upper plate of the third guide decoupling mechanism can only move relative to the connecting beam in the plane formed by the X-axis and the Y-axis, and cannot move along the Z-axis direction. When the displacement drive assembly in the first guide decoupling mechanism drives the upper plate to move relative to the connecting beam along the X-axis, the motion constraint structure in the second and third guide decoupling mechanisms can guide the movement in the X-axis direction. Furthermore, the motion displacement output of the first guide decoupling mechanism along the X-axis does not affect the motion displacement input and output of the second and third guide decoupling mechanisms, thereby achieving decoupling of the motion displacement. Similarly, when two or three guide decoupling mechanisms move simultaneously, they guide each other without affecting each other, enabling independent motion displacement output.

[0041] In the three-axis parallel decoupling motion platform of this embodiment, three mutually perpendicular guide decoupling mechanisms are set up, and a displacement drive component can be set in each guide decoupling mechanism, so that the three-axis motion parallel output of the motion platform can be realized; in addition, at least three first guide beams are set between the bottom plate and the upper plate in each guide decoupling mechanism, and at least three second guide beams are set between the bottom plate and the middle plate, and the first guide beams and the second guide beams are provided with motion constraint structures, so that the upper plate and the middle plate can only be displaced relative to the bottom plate in a direction parallel to the bottom plate, thereby making the three guide decoupling mechanisms guide each other without interfering with each other's motion displacement output, which can reduce the displacement output coupling between different axes and effectively improve the linearity and stability of the single-axis displacement output.

[0042] In this embodiment, the motion constraint structures are respectively arranged at both ends of each first guide beam and both ends of each second guide beam. In this way, when the middle plate and the upper plate are displaced relative to the bottom plate, it can ensure that the first guide beams and the second guide beams are subjected to uniform force, thereby extending the service life of the first guide beams and the second guide beams.

[0043] Specifically, if Figure 9As shown, the motion-constraining structure comprises at least two flexible hinges, at least one of which is arranged along a first direction and at least one along a second direction; the first and second directions being perpendicular to each other. This allows the upper and middle plates to displace relative to the base plate only in a direction parallel to the base plate. Furthermore, this motion-constraining structure offers advantages such as a simple structure and low manufacturing cost. It can be formed directly on the first and second guide beams without occupying additional structural space. Furthermore, because the projections of the flexible hinges in the same direction are consistent, they can be formed in a single process using wire cutting. This significantly reduces the cumulative error resulting from multiple machining operations, thereby improving the decoupling capability of the three-axis parallel decoupling motion platform.

[0044] In each guide decoupling mechanism, the flexible hinges arranged in series on each first guide beam and each second guide beam, as well as the multiple first guide beams connected in parallel and the multiple second guide beams connected in parallel, together constitute a decoupling structure in the motion platform.

[0045] Furthermore, a displacement amplification assembly is installed between the middle plate and the connecting beam in each guide decoupling mechanism. The displacement drive assembly drives the middle plate relative to the connecting beam via the displacement amplification assembly, amplifying the displacement of the middle plate relative to the connecting beam. Due to the limited volume of the motion platform, the displacement drive assembly used is very small, and the displacement it can drive is also very small. The displacement amplification assembly can amplify the displacement by a certain factor, thereby increasing the working range of the entire motion platform.

[0046] Specifically, if Figure 3 、 Figure 4 、 Figure 7 and Figure 8 As shown, the displacement amplification assembly includes a first driving block 8 , a second driving block 9 , a first displacement block 10 , a second displacement block 11 , a first connecting block 12 , a second connecting block 13 , a third connecting block 14 and a fourth connecting block 15 .

[0047] The first driving block 8 and the second driving block 9 are arranged in parallel, the first connecting block 12, the first displacement block 10 and the second connecting block 13 are sequentially arranged between the upper part of the first driving block 8 and the upper part of the second driving block 9, the third connecting block 14, the second displacement block 11 and the fourth connecting block 15 are sequentially arranged between the lower part of the first driving block 8 and the lower part of the second driving block 9, and the upper part of the first driving block 8 and the lower part of the first connecting block 12, the upper part of the first connecting block 12 and the first displacement block 10, the first displacement block 10 and the upper part of the second connecting block 13, the lower part of the second connecting block 13 and the upper part of the second driving block 9, the lower part of the first driving block 8 and the upper part of the third connecting block 14, the lower part of the third connecting block 14 and the second displacement block 11, the second displacement block 11 and the lower part of the fourth connecting block 15, and the upper part of the fourth connecting block 15 and the lower part of the second driving block 9 are all connected by a connecting bridge 16.

[0048] Furthermore, the first displacement block 10 is connected to the middle plate 4, the second displacement block 11 is connected to the connecting beam 2, and the displacement drive assembly is arranged between the first drive block 8 and the second drive block 9, and is used to drive the first drive block 8 and the second drive block 9 to move closer to or farther from each other. The displacement amplification assembly is a centrally symmetrical structure, so that the displacement output direction of the displacement amplification assembly can be perpendicular to the displacement output direction of the displacement drive assembly. In addition, due to the structural characteristics of the displacement amplification assembly, the multiple of the motion displacement amplification is a fixed multiple. If a larger multiple of motion displacement amplification is required, more connecting blocks need to be arranged between the first drive block and the first displacement block, between the first displacement block and the second drive block, between the first drive block and the second displacement block, and between the second displacement block and the second drive block. Furthermore, the number of connecting blocks that is a multiple of four, such as eight connecting blocks or sixteen connecting blocks, is also within the scope of protection of the present invention.

[0049] When the displacement drive assembly drives the first drive block 8 and the second drive block 9 to approach each other, the first displacement block 10 and the second displacement block 11 move away from each other, thereby driving the middle plate 4 away from the connecting beam 2, and the approaching displacement between the first drive block 8 and the second drive block 9 is smaller than the moving away displacement between the first displacement block 10 and the second displacement block 11; when the displacement drive assembly drives the first drive block 8 and the second drive block 9 to move away from each other, the first displacement block 10 and the second displacement block 11 move toward each other, thereby driving the middle plate 4 toward the connecting beam 2, and the moving away displacement between the first drive block 8 and the second drive block 9 is smaller than the approaching displacement between the first displacement block 10 and the second displacement block 11.

[0050] In this embodiment, the connecting beam comprises three "U"-shaped frames, each of which is perpendicularly arranged and fixedly connected to the other. The base is fixedly connected to the intersection of the three frames, and the corners of each frame away from the base extend between the bottom plate and the middle plate of each guide decoupling mechanism. This connecting beam effectively improves the fixed rigidity of the amplifying structure and avoids machining interference with the motion-constraining structure.

[0051] And, as Figures 3 to 5 As shown, the base 1 is a cube structure, so that the base 1 has three fixed surfaces. In this way, the base 1 can be fixedly connected to the external structure through any surface, thereby realizing installation under the constraints of different application scenarios.

[0052] In addition, if Figures 3 to 5 As shown, each fixing surface on the base 1 protrudes from the bottom plate 5 in each guide decoupling mechanism, which can avoid installation interference.

[0053] In this embodiment, since the three-axis parallel decoupling motion platform cannot have overlapping or obstructed structural projections, it can be formed through integrated processing, for example, by combining precision milling and wire cutting. Specifically, the entire structure, excluding the hinge, can be processed through precision milling, and then all flexible hinges can be processed through wire cutting. The three-axis parallel decoupling motion platform is formed through integrated processing, eliminating the need for assembly and thus completely avoiding the potential risks to motion accuracy caused by assembly errors and assembly clearances.

[0054] Furthermore, the material of the three-axis parallel decoupling motion platform is aluminum alloy or titanium alloy; of course, the three-axis parallel decoupling motion platform can also be made of other polymer materials with a certain strength.

[0055] The above description is only a specific embodiment of the present invention. Under the above teachings of the present invention, those skilled in the art may make other improvements or modifications based on the above embodiments. Those skilled in the art should understand that the above description is only to better explain the purpose of the present invention, and the scope of protection of the present invention shall be based on the scope of protection of the claims.

Claims

1. A three-axis parallel decoupling motion platform, characterized in that: It includes a base, a connecting beam and three guide decoupling mechanisms; Each of the guide decoupling mechanisms includes an upper plate, a middle plate, and a bottom plate arranged in parallel from top to bottom; the bottom plate and the upper plate are connected by at least three first guide beams, and the bottom plate and the middle plate are connected by at least three second guide beams, each of the first guide beams and each of the second guide beams is provided with a motion constraint structure, so that the upper plate and the middle plate can only move relative to the bottom plate in a direction parallel to the bottom plate; The three guide decoupling mechanisms are arranged perpendicular to each other in pairs, and the upper plates are fixedly connected to form a bearing space; the lower part of the connecting beam is connected to the base, and the upper part of the connecting beam extends to between the bottom plate and the middle plate in the three guide decoupling mechanisms respectively, and a displacement driving component is arranged between the middle plate and the connecting beam in each guide decoupling mechanism, and the middle plate is driven by the displacement driving component to move relative to the connecting beam in a direction perpendicular to the middle plate.

2. The three-axis parallel decoupling motion platform according to claim 1, characterized in that: The motion constraint structures are respectively arranged at both ends of each first guide beam and both ends of each second guide beam.

3. The three-axis parallel decoupling motion platform according to claim 1, characterized in that: The motion restraining structure is at least two flexible hinges, at least one of the flexible hinges is arranged along a first direction, and at least one of the flexible hinges is arranged along a second direction; The first direction and the second direction are perpendicular to each other.

4. The three-axis parallel decoupling motion platform according to claim 1, characterized in that: A displacement amplification component is provided between the middle plate and the connecting beam in each of the guide decoupling mechanisms. The displacement driving component drives the middle plate to move relative to the connecting beam through the displacement amplification component. The displacement amplification component is used to amplify the displacement of the middle plate relative to the connecting beam.

5. The three-axis parallel decoupling motion platform according to claim 4, characterized in that: The displacement amplification assembly includes a first driving block, a second driving block, a first displacement block, a second displacement block, a first connecting block, a second connecting block, a third connecting block and a fourth connecting block; The first driving block and the second driving block are arranged in parallel, the first connecting block, the first displacement block, and the second connecting block are sequentially arranged between the upper part of the first driving block and the upper part of the second driving block, the third connecting block, the second displacement block, and the fourth connecting block are sequentially arranged between the lower part of the first driving block and the lower part of the second driving block, and the upper part of the first driving block and the lower part of the first connecting block, the upper part of the first connecting block and the first displacement block, the first displacement block and the upper part of the second connecting block, the lower part of the second connecting block and the upper part of the second driving block, the lower part of the first driving block and the upper part of the third connecting block, the lower part of the third connecting block and the second displacement block, the second displacement block and the lower part of the fourth connecting block, and the upper part of the fourth connecting block and the lower part of the second driving block are all connected by connecting bridges; The first displacement block is connected to the middle plate, the second displacement block is connected to the connecting beam, and the displacement drive assembly is arranged between the first drive block and the second drive block, and is used to drive the first drive block and the second drive block to move closer to or away from each other.

6. The three-axis parallel decoupling motion platform according to claim 1, characterized in that: The connecting beam includes three "U-shaped" frames, and the three frames are arranged perpendicular to each other and fixedly connected in pairs. The base is fixedly connected to the intersection of the three frames, and the corner of each frame away from the base extends to between the bottom plate and the middle plate in each guide decoupling mechanism.

7. The three-axis parallel decoupling motion platform according to claim 1, characterized in that: The base is a cube structure, so that the base has three fixed surfaces.

8. The three-axis parallel decoupling motion platform according to claim 7, characterized in that: Each of the fixing surfaces on the base protrudes from the bottom plate in each of the guide decoupling mechanisms.

9. The three-axis parallel decoupling motion platform according to any one of claims 1 to 8, characterized in that: The three-axis parallel decoupling motion platform is formed by integrated processing.

10. The three-axis parallel decoupling motion platform according to claim 9, characterized in that: The material of the three-axis parallel decoupling motion platform is aluminum alloy or titanium alloy.

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