A dust removal pipe, a dust removal device and an excimer laser

Abstract

The present application discloses a dust removal pipe (100), comprising: an oscillation circuit generator (1), a DC circuit generator (2), a support member (3), and a working chamber (4), wherein the working chamber (4) includes an outer wall (41) and an inner wall (42); the outer wall (41) is connected to the oscillation circuit generator (1), the inner wall (42) is arranged inside the outer wall (41) through the support member (3), and the inner wall (42) is connected to the DC circuit generator (2). By providing the working chamber (4) formed by the outer wall (41) and the inner wall (42), the inner wall (42) is connected to the DC circuit generator (2) to obtain a DC high voltage, and the outer wall (41) is connected to the oscillation circuit generator (1) to obtain a sinusoidal voltage or a pulse high voltage, so that a periodically oscillating electric field is formed between the inner wall (42) and the outer wall (41), the inner wall (42) vibrates periodically, and the dust on the surface of the inner wall (42) will be separated from the inner wall (42) under the action of vibration, achieving the purpose of cleaning the accumulated dust.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and particularly relates to a dust removal tube, a dust removal device, an excimer laser, and another dust removal tube. Background Art

[0002] In the field of high-end lithography, due to its characteristics of high repetition frequency, narrow line width, and large energy, the excimer laser is currently the main equipment used in the semiconductor lithography field.

[0003] In the discharge cavity of the excimer laser, many problems will occur in the optical output structure. For example, due to the high-repetition-frequency high-voltage discharge and high-temperature environment, a large amount of discharge dust exists in the cavity. When these dusts reach the optical output window, they will contaminate the lens, causing adverse effects such as thermal stress concentration and degradation of optical performance. In response to this, the prior art generally uses an electrostatic dust removal device to purify the gas in the excimer laser cavity, and then conveys clean gas to the inner side of the lens for flushing protection. Since the electrostatic dust removal device works in a sealed environment, a large amount of dust will accumulate in the dust removal tube of the electrostatic dust removal device, resulting in a decrease in the dust collection capacity of the electrostatic dust removal device, a reduction in the dust removal efficiency of the electrostatic dust removal device, and affecting the normal operation of the excimer laser.

[0004] Therefore, how to improve the dust removal efficiency of the electrostatic dust removal device has become an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0005] Embodiments of the present application provide a dust removal tube to solve the problem of how to improve the dust removal efficiency of the dust removal device in the prior art. Embodiments of the present application also provide a dust removal tube, a dust removal device, and an excimer laser.

[0006] Embodiments of the present application provide a dust removal tube (100), including: an oscillation circuit generator (1), a DC circuit generator (2), a support member (3), and a working cavity (4) for electrostatic dust removal. The working cavity (4) includes an outer wall (41) and an inner wall (42);

[0007] The outer wall (41) is connected to the output end of the oscillation circuit generator (1) for receiving the AC voltage or periodic pulse voltage emitted by the oscillation circuit generator (1);

[0008] The inner wall (42) is disposed inside the outer wall (41) at a preset distance through the support member (3). The inner wall (42) is connected to the output end of the DC circuit generator (2) for receiving the DC high voltage emitted by the DC circuit generator (2).

[0009] Optionally, it further includes: a plurality of drainage through-holes (5), which are arranged at the bottom of the inner wall (42) and used to drain the dust collected by the inner wall (42) to the dust removal space (43) between the outer wall (41) and the inner wall (42).

[0010] Optionally, it further includes: a dust collection component (6), which is arranged in a part of the dust removal space (43) between the outer wall (41) and the inner wall (42) relative to the drainage through-holes (5) and is used to receive the dust drained by the drainage through-holes (5).

[0011] Optionally, the dust collection component (6) includes a plurality of layers of dust collection nets arranged in a multi-layer manner, and in the extending direction from the inner wall (42) to the outer wall (41), the network openings of the dust collection nets arranged in sequence gradually decrease.

[0012] Optionally, it further includes: a drainage mechanism (8), which is arranged at the input end and / or output end of the working chamber (4) and is used to drain the working carrier gas introduced into the working chamber (4), and the working carrier gas is used to carry the dust.

[0013] Optionally, the drainage mechanism (8) is arranged at the input end and / or output end of the working chamber (4) and is used to drain the working carrier gas introduced into the working chamber (4), including: the drainage mechanism (8) is arranged at the input end and / or output end of the dust removal space (43) formed between the inner wall (42) and the outer wall (41) and is used to drain the working carrier gas introduced into the dust removal space (43).

[0014] Optionally, the outer wall (41) is provided with a first port (44) connected to the oscillation circuit generator (1).

[0015] Optionally, the inner wall (42) is provided with a second port (45) connected to the DC circuit generator (2).

[0016] Optionally, the oscillation circuit generator (1) further includes a first grounding end (11), the DC circuit generator (2) further includes a second grounding end (21), and the first grounding end (11) and the second grounding end (21) are grounded after intersecting; or, the first grounding end (11) and the second grounding end (21) are grounded separately.

[0017] Optionally, the outer wall (41) includes a first grounding port (46), the inner wall (42) includes a second grounding port (47), the first grounding port (46) is used for grounding the outer wall (41), and the second grounding port (47) is used for grounding the inner wall (42).

[0018] Optionally, it further includes a discharge electrode (7); the discharge electrode (7) is arranged along the extension direction of the inner wall (42) at the axis position of the inner wall (42), and the discharge electrode (7) is used to generate a high-voltage.

[0019] Optionally, the support members (3) are arranged at circumferential intervals around the inner wall (42) or the outer wall (41), and the support members (3) include insulating members.

[0020] An embodiment of the present application further provides a dust removal device, including: a plurality of dust removal tubes (100) and a housing (9) for housing the dust removal tubes (100); the dust removal tubes (100) include a working chamber (4) formed by an outer wall (41) and an inner wall (42), and a discharge electrode (7); the housing (9) includes oppositely arranged support connection ends (91); the support connection ends (91) include a first conductive part (92) and a second conductive part (93), the first conductive part (92) is used to receive an alternating voltage or a periodic pulse voltage emitted by an oscillation circuit generator, and the second conductive part (93) is used to receive a DC high voltage emitted by a DC circuit generator;

[0021] Both ends of each dust removal tube (100) are located at the support connection end (91), the outer wall (41) of each dust removal tube (100) is connected to the first conductive part (92), and the inner wall (42) is connected to the second conductive part (93); the discharge electrode (7) is arranged along the extension direction of the inner wall (42) at the axis position of the inner wall (42), and the end of the discharge electrode (7) penetrates through a first through hole (94) of the first conductive part (92) and a second through hole (95) of the second conductive part (93).

[0022] Optionally, the first conductive part (92) and the second conductive part (93) are sequentially arranged along the extension direction of the inner wall (42) at the support connection end (91);

[0023] The inner wall (42) passes through the first through hole (94) and is connected to the second conductive part (93) along the extension direction of the inner wall (42); the outer wall (41) is connected to the position of the first conductive part (92) that forms the first through hole (94).

[0024] Optionally, the support connection end (91) further includes an insulating glue (97), and the first conductive part (92) and the second conductive part (93) are arranged at the support connection end (91) through the insulating glue (97).

[0025] Optionally, the housing (9) further includes a housing cavity (96), and the outer peripheral surface of the support connection end (91) is arranged to fit the inner surface of the housing cavity (96).

[0026] An embodiment of the present application further provides an excimer laser, including a main body and the dust removal device (200) provided on the main body as described above.

[0027] An embodiment of the present application further provides a dust removal tube, including: a support member (3) and a working chamber (4) for electrostatic dust removal. The working chamber (4) includes a discharge electrode (7), an outer wall (41), and an inner wall (42);

[0028] The outer wall (41) is provided with a first grounding port (46);

[0029] The inner wall (42) is arranged inside the outer wall (41) at a preset distance through the support member (3), and the inner wall (42) is provided with a second grounding port (47);

[0030] The discharge electrode (7) is arranged along the extension direction of the inner wall (42) at the axis position of the inner wall (42), and the discharge electrode (7) is used to generate a high-voltage.

[0031] Optionally, the outer wall (41) is provided with a first port (44) connected to the oscillation circuit generator (1); the inner wall (42) is provided with a second port (45) connected to the DC circuit generator (2).

[0032] Compared with the prior art, the present application has the following advantages:

[0033] An embodiment of the present application provides a dust removal pipe (100), which includes: an oscillation circuit generator (1), a DC circuit generator (2), a support member (3), and a working chamber (4) for electrostatic dust removal. The working chamber (4) includes an outer wall (41) and an inner wall (42); the outer wall (41) is connected to the output end of the oscillation circuit generator (1) and is used to receive the AC voltage or periodic pulse voltage emitted by the oscillation circuit generator (1); the inner wall (42) is arranged inside the outer wall (41) at a preset distance through the support member (3), and the inner wall (42) is connected to the output end of the DC circuit generator (2) and is used to receive the DC high voltage emitted by the DC circuit generator (2). By providing the working chamber (4) composed of the outer wall (41) and the inner wall (42), and connecting the inner wall (42) to the output end of the DC circuit generator (2) to obtain DC high voltage, and connecting the outer wall (41) to the output end of the oscillation circuit generator (1) to obtain sinusoidal voltage or pulse high voltage, a periodically oscillating electric field is formed between the inner wall (42) and the outer wall (41). Under the action of the periodic electric field, the inner wall (42) will undergo periodic vibration, and the dust accumulated on the surface of the inner wall (42) will also be separated from the inner wall (42) under the action of vibration, ultimately achieving the purpose of cleaning the accumulated dust. After the dust accumulated on the surface of the inner wall (42) is cleaned, the surface of the inner wall (42) can continue to collect dust, thereby improving the dust removal efficiency of the dust removal pipe (100), and further improving the dust removal efficiency of the dust removal device. Description of the Drawings

[0034] Figure 1 It is a perspective view of a dust removal pipe provided by the first embodiment of the present application.

[0035] Figure 2 It is another perspective view of a dust removal pipe provided by the first embodiment of the present application.

[0036] Figure 3 It is a schematic structural diagram of a dust removal pipe provided by the first embodiment of the present application.

[0037] Figure 4 It is another schematic structural diagram of a dust removal pipe provided by the first embodiment of the present application.

[0038] Figure 5 For Figure 4 The partial enlarged schematic diagram at position A in

[0039] Figure 6 It is a perspective view of a dust removal pipe provided by the second embodiment of the present application.

[0040] Figure 7 It is another perspective view of a dust removal pipe provided by the second embodiment of the present application.

[0041] Figure 8 It is a schematic cross-sectional view of the dust removal device provided by the third embodiment of the present application.

[0042] Figure 9 is Figure 8 The partial enlarged view of the position A in

[0043] Reference numerals: dust removal pipe 100, oscillation circuit generator 1, first grounding end 11, DC circuit generator 2, second grounding end 21, support member 3, working cavity 4, outer wall 41, inner wall 42, dust removal space 43, first port 44, second port 45, first grounding port 46, second grounding port 47, through hole 5, dust collection component 6, discharge electrode 7, drainage mechanism 8, accommodating body 9, support connection end 91, first conductive part 92, second conductive part 93, first through hole 94, second through hole 95, accommodating cavity 96, insulating glue 97, dust removal device 200. Detailed implementation manners

[0044] Many specific details are set forth in the following description in order to provide a thorough understanding of the embodiments of the present application. However, the embodiments of the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the connotation of the embodiments of the present application. Therefore, the embodiments of the present application are not limited by the specific implementations disclosed below.

[0045] Combined with Figures 1 to 5 as shown in Figure 1 It is a three-dimensional view of a dust removal pipe provided by the first embodiment of the present application. Figure 2 It is another three-dimensional view of a dust removal pipe provided by the first embodiment of the present application. Figure 3 It is a schematic structural view of a dust removal pipe provided by the first embodiment of the present application. Figure 4 It is another schematic structural view of a dust removal pipe provided by the first embodiment of the present application. Figure 5 is Figure 4 The partial enlarged schematic view of the position A in

[0046] The first embodiment of the present application provides a dust removal pipe 100, including: an oscillation circuit generator 1, a DC circuit generator 2, a support member 3, and a working cavity 4 for electrostatic dust removal, and the working cavity 4 includes an outer wall 41 and an inner wall 42.

[0047] Among them, both the outer wall 41 and the inner wall 42 are hollow columnar structures. The inner wall 42 is arranged inside the outer wall 41 at a preset distance through the support member 3, so that in this assembled state, the cross-section of the outer wall 41 and the inner wall 42 in the direction of the vertical axis is annular. In the first embodiment, the main dust removal area of the working chamber 4 is the cavity formed by the inner wall 42, which can be used to remove dust. Specifically, when the gas containing dust is introduced into the cavity of the inner wall 42, the dust can be adsorbed on the inner surface of the inner wall 42 by means of electrostatic dust removal, thereby purifying the gas to achieve the purpose of dust removal of the gas.

[0048] Of course, in one example, a plurality of through holes (not shown) with relatively large openings can be evenly distributed on the inner wall 42. These through holes are used to drain the gas containing dust in the cavity of the inner wall 42 to the space between the outer wall 41 and the inner wall 42. While the dust is adsorbed on the inner surface of the inner wall 42 by means of electrostatic dust removal, the dust can also be adsorbed on the inner surface of the outer wall 41 or the outer surface of the inner wall 42, thereby purifying the gas to achieve the purpose of dust removal of the gas. The space between the outer wall 41 and the inner wall 42 can be referred to as the dust removal space 43.

[0049] In addition, the dust removal pipe 100 of the first embodiment of the present application can be installed in the dust removal device 200 ( Figure 8 as shown), that is, the dust removal pipe 100 is a part of the structure of the dust removal device 200. The working chamber 4 of the dust removal pipe 100 can be used to remove the dust of the dust removal device 200. Specifically, the dust of the dust removal device 200 can be introduced into the working chamber 4. When the gas containing dust is introduced into the cavity of the inner wall 42 of the working chamber 4, the dust can be adsorbed on the inner surface of the inner wall 42 of the working chamber 4 by means of electrostatic dust removal, thereby purifying the gas to achieve the purpose of dust removal of the gas.

[0050] The above-mentioned electrostatic dust removal method is mainly realized in the following way. Specifically, a discharge electrode 7 is arranged along the extending direction of the inner wall 42 and at the axis position of the inner wall 42, and the discharge electrode 7 is connected to a high-voltage generator (not shown). The outer wall 41 includes a first grounding port 46, and the inner wall 42 includes a second grounding port 47. The first grounding port 46 is used for grounding the outer wall 41, and the second grounding port 47 is used for grounding the inner wall 42. When electrostatic dust removal is required, the outer wall 41 is grounded through the first grounding port 46, the inner wall 42 is grounded through the second grounding port 47, the discharge electrode 7 is connected to the high-voltage generator, and a high-voltage current is introduced, so that a corona is generated around the high-voltage filament at the axis position of the discharge electrode 7, so that the dust in the gas introduced (the direction indicated by the white arrow) into the cavity of the inner wall 42 is charged. Under the action of the high-voltage electric field, the charged dust will drift to the inner surface of the inner wall 42 and be adsorbed on the inner surface of the inner wall 42 to achieve the purpose of dust removal.

[0051] In the first embodiment, the above-mentioned electrostatic dust removal method mainly adsorbs the dust in the gas on the inner surface of the inner wall 42. However, after the inner wall 42 has collected dust for a long time, there will be a large amount of dust on the inner surface of the inner wall 42, which will affect the dust removal efficiency of the working chamber 4. In response to this, the first embodiment of the present application needs to remove the dust adsorbed on the inner surface of the inner wall 42. Specifically, the first embodiment of the present application is provided with an oscillation circuit generator 1 and a DC circuit generator 2. Among them, the oscillation circuit generator 1 is used to provide an AC voltage, and the AC voltage includes a sine AC voltage, a cosine AC voltage, or the oscillation circuit generator 1 is used to provide a periodic pulse high voltage, etc. The DC circuit generator 2 is used to provide a DC high voltage. Since the oscillation circuit generator 1 and the DC circuit generator 2 are commonly used devices in the art, the respective structures and working principles of the oscillation circuit generator 1 and the DC circuit generator 2 will not be described in detail here. In the first embodiment, the outer wall 41 is connected to the output terminal of the oscillation circuit generator 1 for receiving the AC voltage or periodic pulse voltage emitted by the oscillation circuit generator 1. The inner wall 42 is connected to the output terminal of the DC circuit generator 2 for receiving the DC high voltage emitted by the DC circuit generator 2.

[0052] Furthermore, in the first embodiment, in order to connect the outer wall 41 to the output terminal of the oscillation circuit generator 1, a first port 44 connected to the oscillation circuit generator 1 is provided on the outer wall 41, and the outer wall 41 can be connected to the output terminal of the oscillation circuit generator 1 through the first port 44. In order to connect the inner wall 42 to the output terminal of the DC circuit generator 2, a second port 45 connected to the DC circuit generator 2 is provided on the inner wall 42, and the inner wall 42 can be connected to the output terminal of the DC circuit generator 2 through the second port 45. Among them, the position where the first port 44 is provided can be any position on the outer wall 41. In this embodiment, the position of the first port 44 is preferably set at the port position of the outer wall 41, specifically, it can be the port positions at the left and right ends of the outer wall 41 (only one end is shown). The position where the second port 45 is provided can be any position on the inner wall 42. In this embodiment, the position of the second port 45 is preferably set at the port position of the inner wall 42, specifically, it can be the port positions at the left and right ends of the inner wall 42 (only one end is shown).

[0053] In the first embodiment, the oscillation circuit generator 1 further includes a first grounding end 11, and the DC circuit generator 2 further includes a second grounding end 21. The first grounding end 11 of the oscillation circuit generator 1 and the second grounding end 21 of the DC circuit generator 2 intersect and then are grounded; or, the first grounding end 11 of the oscillation circuit generator 1 and the second grounding end 21 of the DC circuit generator 2 are respectively grounded.

[0054] When it is necessary to remove the dust adsorbed on the inner surface of the inner wall 42, the inner wall 42 is connected to the DC high voltage generated by the DC circuit generator 2, and at the same time, a sine AC voltage, a cosine AC voltage or a periodic pulse high voltage is applied to the outer wall 41, so that a strongly periodic oscillating electric field is formed between the inner wall 42 and the outer wall 41. Under the action of the periodic electric field, the inner wall 42 undergoes periodic vibration, and the dust collected by the inner wall 42 is shaken off, so as to achieve the purpose of removing the accumulated dust on the inner wall 42. Among them, in the first embodiment, the voltage ranges of the sine AC voltage and the DC voltage working separately can be between 100V and 10000V, and the frequency of the voltage applied to the outer wall 41 can be between 1Hz and 10kHz.

[0055] After the dust adsorbed on the inner surface of the inner wall 42 is shaken off, it is necessary to drain the shaken-off dust outside the inner wall 42. For this reason, the first embodiment of the present application further includes a plurality of drainage through holes 5. The drainage through holes 5 are arranged at the bottom of the inner wall 42 and are used to drain the dust collected by the inner wall 42 to the dust removal space 43 between the outer wall 41 and the inner wall 42. Among them, the drainage through holes 5 are arranged at the bottom of the inner wall 42 mainly because the dust is first collected on the inner surface of the inner wall 42, and then shaken off to the bottom of the inner wall 42 under the action of the gravity of the dust itself. Thus, the shaken-off dust can be drained to the dust removal space 43 between the outer wall 41 and the inner wall 42 through the plurality of drainage through holes 5, so as to achieve the purpose of removing the dust in the inner cavity of the inner wall 42. In other examples, the plurality of drainage through holes 5 can be arranged in a scattered manner along the extension direction of the dust removal pipe 100; of course, the plurality of drainage through holes 5 can also be set in a connected state, that is, the plurality of drainage through holes 5 form a through hole, which can increase the size of the drainage port and facilitate more dust to flow out from the through hole.

[0056] After the dust on the inner surface of the inner wall 42 is drained to the dust removal space 43, in order to achieve the centralized collection of the dust, the first embodiment of the present application further provides a dust collection component 6. The dust collection component 6 is arranged in a part of the dust removal space 43 between the outer wall 41 and the inner wall 42 opposite to the drainage through holes 5 and is used to receive the dust drained by the drainage through holes 5. Among them, the dust collection component 6 is arranged opposite to the drainage through holes 5, and can directly receive the dust drained by the drainage through holes 5. Further, in the first embodiment, the dust collection component 6 can be fixedly installed on the inner surface of the outer wall 41, or the dust collection component 6 can be fixedly installed on the outer surface of the inner wall 42. The dust collection component 6 includes a plurality of layers of dust collection nets arranged, and in the extending direction from the inner wall 42 to the outer wall 41, the network openings of the sequentially arranged dust collection nets gradually decrease.

[0057] In the first embodiment of the present application, in order to remove the dust contained in the dust removal space 43, a drainage mechanism 8 (not shown) is further provided. The drainage mechanism 8 is provided at the input end and / or the output end of the working chamber 4, and is used for draining the working carrier gas introduced into the working chamber 4. The working carrier gas is used for carrying the dust, that is, the dust will be carried by the working carrier gas and move with the working carrier gas. Specifically, the drainage mechanism 8 is provided at the input end and / or the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, and is used for draining the working carrier gas introduced into the dust removal space 43. For example, when the drainage mechanism 8 is provided at the input end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, the drainage mechanism 8 is set to blow air (such as the working principle of a fan), and the dust in the dust removal space 43 is drained to the output end of the dust removal space 43 and discharged (the direction indicated by the black arrow) by blowing the working carrier gas. Again, for example, when the drainage mechanism 8 is provided at the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, the drainage mechanism 8 is set to suck air (such as the working principle of a vacuum cleaner), and the dust in the dust removal space 43 is drained to the output end of the dust removal space 43 and discharged by sucking the working carrier gas. Another example is to provide a drainage mechanism 8 with a blowing mode at the input end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, and provide a drainage mechanism 8 with a suction mode at the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41. With the cooperation of the two drainage mechanisms 8, the dust in the dust removal space 43 is drained to the output end of the dust removal space 43 and discharged. Among them, the working carrier gas includes gases such as Ar gas, Ne gas or He gas.

[0058] It should be noted that the above-mentioned drainage mechanism 8 can be provided at the input end and / or the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41 after a dust collection component 6 is provided in the dust removal space 43. Or when there is no dust collection component 6 in the dust removal space 43, the drainage mechanism 8 can be provided at the input end and / or the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41. That is, when the dust is drained through the through hole 5 to the dust removal space 43 formed between the inner wall 42 and the outer wall 41, the dust is directly drained out of the dust removal space 43 through the drainage mechanism 8.

[0059] It should also be noted that the above-mentioned drainage mechanism 8 can be separately installed at the input end and / or the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41 after the dust removal pipe 100 is detached from the dust removal device 200, so as to drain the dust remaining in the dust removal space 43 to the outside of the dust removal space 43 through the drainage mechanism 8, thereby achieving the cleaning of the dust remaining in the dust removal space 43.

[0060] Of course, the above-mentioned diversion mechanism 8 can also be arranged in the dust removal device 200. The diversion mechanism 8 and the dust removal space 43 can form a separate closed-loop structure, that is, a channel for the flow of working carrier gas is separately arranged between the input end and the output end of the dust removal space 43, that is, a channel for the flow of working carrier gas is arranged at the input end and / or the output end of the dust removal space 43. This channel can extend outside the dust removal device 200, and a filter groove for accommodating dust is arranged in the part of the channel outside the dust removal device 200. The filter groove for accommodating dust is a detachable structure, that is, when the dust in the filter groove for accommodating dust is full, the detachable filter groove can be removed to clean the dust. Since the filter groove is arranged outside the dust removal device 200, the dust in the dust removal pipe 100 inside the dust removal device 200 can be diverted to the outside for removal. Of course, the filter groove for accommodating dust can also be arranged inside the dust removal device 200.

[0061] In the first embodiment, considering that both the outer wall 41 and the inner wall 42 are hollow columnar structures, in order to stably install the inner wall 42 arranged on the inner side of the outer wall 41, the support member 3 of the dust removal space 43 arranged between the outer wall 41 and the inner wall 42 is arranged in the circumferential direction around the outer wall 41 or the inner wall 42, and is arranged at intervals in the circumferential direction. Specifically, with the center of the inner wall 42 or the outer wall 41 as the vertex and an included angle of 60 degrees between adjacent support members 3, it is arranged in the circumferential direction around the outer wall 41 or the inner wall 42. Of course, the included angle between adjacent ones can also be set to 90 degrees or other angles, as long as the inner wall 42 can be stably arranged on the inner side of the outer wall 41, and the angle between adjacent support members 3 can also be other.

[0062] In addition, in the first embodiment, the material of the support member 3 includes an insulating member to prevent electrical connection between the inner wall 42 and the outer wall 41. In addition, the inner wall 42 is arranged on the inner side of the outer wall 41 at a preset distance through the support member 3, and this preset distance can be between 1 mm and 30 mm. Of course, the setting of the preset distance can be determined according to the voltages required for the inner wall 42 and the outer wall 41 respectively. Generally, the larger the preset distance, the higher the corresponding voltage value. It can be understood that the higher the voltage, the greater the electric field strength and the greater the electric field force.

[0063] The first embodiment of the present application provides a dust removal tube 100, which includes: an oscillation circuit generator 1, a DC circuit generator 2, a support 3, and a working chamber 4 for electrostatic dust removal. The working chamber 4 includes an outer wall 41 and an inner wall 42; the outer wall 41 is connected to the output end of the oscillation circuit generator 1 for receiving the AC voltage or periodic pulse voltage emitted by the oscillation circuit generator 1; the inner wall 42 is arranged inside the outer wall 41 at a preset distance through the support 3, and the inner wall 42 is connected to the output end of the DC circuit generator 2 for receiving the DC high voltage emitted by the DC circuit generator 2. In the first embodiment of the present application, by providing the working chamber 4 formed by the outer wall 41 and the inner wall 42, and making the inner wall 42 connected to the output end of the DC circuit generator 2 to obtain a DC high voltage, and the outer wall 41 connected to the output end of the oscillation circuit generator 1 to obtain a sine voltage or pulse high voltage, a periodically oscillating electric field is formed between the inner wall 42 and the outer wall 41. Under the action of the periodic electric field, the inner wall 42 will undergo periodic vibration, and the dust accumulated on the surface of the inner wall 42 will also be separated from the inner wall 42 under the action of the vibration, ultimately achieving the purpose of cleaning the accumulated dust. After the dust accumulated on the surface of the inner wall 42 is cleaned, the inner wall 42 surface can continue to collect dust, thereby improving the dust removal efficiency of the dust removal tube 100.

[0064] Combined with Figure 6 、 Figure 7 as shown, Figure 6 is a perspective view of a dust removal tube provided by the second embodiment of the present application. Figure 7 is another perspective view of a dust removal tube provided by the second embodiment of the present application.

[0065] The second embodiment of the present application provides a dust removal tube 100, which can be used in a dust removal device 200 and includes: a high voltage generator, a support 3, and a working chamber 4 for electrostatic dust removal. The working chamber 4 includes a discharge electrode 7, an outer wall 41, and an inner wall 42.

[0066] Among them, both the outer wall 41 and the inner wall 42 are hollow columnar structures. The inner wall 42 is arranged inside the outer wall 41 at a preset distance through the support member 3, such that in this assembled state, the cross-section of the outer wall 41 and the inner wall 42 in the direction of their vertical axes is annular. The discharge electrode 7 is arranged along the extension direction of the inner wall 42 at the axis position of the inner wall 42, and the discharge electrode 7 is connected to a high-voltage generator (not shown). The outer wall 41 is provided with a first grounding port 46, and the inner wall 42 is provided with a second grounding port 47. The outer wall 41 is grounded through the first grounding port 46, and the inner wall 42 is grounded through the second grounding port 47. When electrostatic dust removal is required, the outer wall 41 and the inner wall 42 are respectively grounded, the discharge electrode 7 is connected to the high-voltage generator, and a high-voltage current is introduced to form a high-voltage, such that corona is generated around the high-voltage filaments at the axis position of the discharge electrode 7, thereby causing the dust in the gas introduced into the working chamber 4 to carry charges. Under the action of the high-voltage electric field, the charged dust will drift to the inner surface of the working chamber 4 and adsorb on the inner surface of the working chamber 4 to achieve the purpose of dust removal.

[0067] In the second embodiment, the inner wall 42 is the main dust removal area of the working chamber 4, and the cavity formed by the inner wall 42 can be used to remove dust. Specifically, when the gas containing dust is introduced into the cavity of the inner wall 42, the dust can be adsorbed on the inner surface of the inner wall 42 by means of electrostatic dust removal, thereby purifying the gas to achieve the purpose of dust removal of the gas.

[0068] Of course, in one example, a plurality of through holes (not shown) with larger openings can also be evenly distributed on the inner wall 42. These through holes are used to drain the gas containing dust in the inner cavity of the inner wall 42 to the space between the outer wall 41 and the inner wall 42. While the dust is adsorbed on the inner surface of the inner wall 42 by means of electrostatic dust removal, the dust can also be adsorbed on the inner surface of the outer wall 41 or the outer surface of the inner wall 42, thereby purifying the gas to achieve the purpose of dust removal of the gas. The space between the outer wall 41 and the inner wall 42 can be referred to as the dust removal space 43.

[0069] In addition, the dust removal pipe 100 of the second embodiment of the present application can be installed in the dust removal device 200, that is, the dust removal pipe 100 is a part of the structure of the dust removal device 200, and the working chamber 4 of the dust removal pipe 100 can be used to remove the dust of the dust removal device 200. Specifically, the dust of the dust removal device 200 can be introduced into the working chamber 4. When the gas containing dust is introduced into the cavity of the inner wall 42 of the working chamber 4, the dust can be adsorbed on the inner surface of the inner wall 42 of the working chamber 4 by means of electrostatic dust removal, thereby purifying the gas to achieve the purpose of dust removal of the gas.

[0070] In the second embodiment, a first port 44 connected to the oscillation circuit generator 1 is provided on the outer wall 41. Through this first port 44, the connection between the outer wall 41 and the output end of the oscillation circuit generator 1 can be realized. A second port 45 connected to the DC circuit generator 2 is provided on the inner wall 42. Through this second port 45, the connection between the inner wall 42 and the output end of the DC circuit generator 2 can be realized. Among them, the position where the first port 44 is provided can be any position on the outer wall 41. In this embodiment, the position of the first port 44 is preferably set at the port position of the outer wall 41, specifically, it can be the port positions at the left and right ends of the outer wall 41 (only one end is shown). The position where the second port 45 is provided can be any position on the inner wall 42. In this embodiment, the position of the second port 45 is preferably set at the port position of the inner wall 42, specifically, it can be the port positions at the left and right ends of the inner wall 42 (only one end is shown).

[0071] When it is necessary to remove the dust adsorbed on the inner surface of the inner wall 42, the inner wall 42 is connected to the DC high voltage generated by the DC circuit generator 2, and at the same time, a sine AC voltage, a cosine AC voltage or a periodic pulse high voltage is applied to the outer wall 41, so that a strongly oscillating electric field is formed between the inner wall 42 and the outer wall 41. Under the action of the periodic electric field, the inner wall 42 undergoes periodic vibration, and the dust collected by the inner wall 42 is shaken off, so as to achieve the purpose of removing the accumulated dust on the inner wall 42. Among them, in the second embodiment, the working ranges of the sine AC voltage and the DC voltage can be between 100V and 10000V, and the frequency of the voltage applied to the outer wall 41 can be between 1Hz and 10kHz.

[0072] After the dust adsorbed on the inner surface of the inner wall 42 is shaken off, it is necessary to drain the shaken-off dust to the outside of the inner wall 42. For this reason, the second embodiment of the present application further includes a plurality of drainage through holes 5. The drainage through holes 5 are provided at the bottom position of the inner wall 42 and are used to drain the dust collected by the inner wall 42 to the dust removal space 43 between the outer wall 41 and the inner wall 42. The reason for setting the drainage through holes 5 at the bottom position of the inner wall 42 is mainly considered that the dust is first collected on the inner surface of the inner wall 42, and then shaken off to the bottom position of the inner wall 42 under the action of the gravity of the dust itself. Thus, the shaken-off dust can be drained to the dust removal space 43 between the outer wall 41 and the inner wall 42 through the plurality of drainage through holes 5, so as to achieve the purpose of removing the dust in the inner cavity of the inner wall 42.

[0073] After the dust on the inner surface of the inner wall 42 is drained to the dust removal space 43, in order to achieve centralized collection of the dust, the second embodiment of the present application further provides a dust collection component 6. The dust collection component 6 is disposed in the dust removal space 43 between the outer wall 41 and the inner wall 42 relative to the drainage through hole 5, and is used to receive the dust drained by the drainage through hole 5. Among them, the dust collection component 6 is disposed relative to the drainage through hole 5, and can directly receive the dust drained by the drainage through hole 5. Further, in the second embodiment, the dust collection component 6 can be fixedly installed on the inner surface of the outer wall 41, or the dust collection component 6 can be fixedly installed on the outer surface of the inner wall 42. The dust collection component 6 includes a multi-layered dust collection net, and in the extending direction from the inner wall 42 to the outer wall 41, the network openings of the sequentially arranged dust collection nets gradually decrease.

[0074] In the second embodiment of the present application, in order to remove the dust contained in the dust removal space 43, a drainage mechanism 8 is further provided. The drainage mechanism 8 is disposed at the input end and / or the output end of the working chamber 4, and is used to drain the working carrier gas introduced into the working chamber 4. The working carrier gas is used to carry the dust, that is, the dust will be carried by the working carrier gas and move with the working carrier gas. Specifically, the drainage mechanism 8 is disposed at the input end and / or the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, and is used to drain the working carrier gas introduced into the dust removal space 43. For example, when the drainage mechanism 8 is disposed at the input end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, the drainage mechanism 8 is arranged in a blowing manner (such as the working principle of a fan), and the dust in the dust removal space 43 is drained to the output end of the dust removal space 43 and discharged by blowing the working carrier gas. Again, for example, when the drainage mechanism 8 is disposed at the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, the drainage mechanism 8 is arranged in a suction manner (such as the working principle of a vacuum cleaner), and the dust in the dust removal space 43 is drained to the output end of the dust removal space 43 and discharged by sucking the working carrier gas. For another example, a drainage mechanism 8 with a blowing manner is disposed at the input end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41, and a drainage mechanism 8 with a suction manner is disposed at the output end of the dust removal space 43 formed between the inner wall 42 and the outer wall 41. With the cooperation of the two drainage mechanisms 8, the dust in the dust removal space 43 is drained to the output end of the dust removal space 43 and discharged. Among them, the working carrier gas includes gases such as Ar gas, Ne gas or He gas.

[0075] In the second embodiment, considering that both the outer wall 41 and the inner wall 42 are hollow columnar structures, in order to stably install the inner wall 42 arranged on the inner side of the outer wall 41, the support members 3 in the dust removal space 43 arranged between the outer wall 41 and the inner wall 42 are arranged in the circumferential direction around the outer wall 41 or the inner wall 42, and are arranged at intervals in the circumferential direction. Specifically, with the center of the inner wall 42 or the outer wall 41 as the vertex, the included angle between adjacent support members 3 is 60 degrees and they are arranged in the circumferential direction around the outer wall 41 or the inner wall 42. Of course, the included angle between adjacent ones can also be set to 90 degrees or other angles, as long as the inner wall 42 can be stably arranged on the inner side of the outer wall 41, the angle between adjacent support members 3 can also be other values. Additionally, in the second embodiment, the material of the support member 3 includes an insulating member to prevent electrical connection between the inner wall 42 and the outer wall 41. Furthermore, the inner wall 42 is arranged on the inner side of the outer wall 41 at a preset distance through the support member 3, and this preset distance can be between 1 mm and 30 mm. Of course, the setting of the preset distance can be determined according to the voltages required for the inner wall 42 and the outer wall 41 respectively. Generally, the larger the preset distance, the higher the corresponding voltage value. It can be understood that the higher the voltage, the greater the electric field strength and the greater the electric field force.

[0076] The second embodiment of the present application provides a dust removal tube 100, including: a support member 3 and a working cavity 4 for electrostatic dust removal. The working cavity 4 includes a discharge electrode 7, an outer wall 41, and an inner wall 42; the outer wall 41 is provided with a grounding port; the inner wall 42 is arranged on the inner side of the outer wall 41 at a preset distance through the support member 3, and the inner wall 42 is provided with a grounding port; the discharge electrode 7 is arranged along the extension direction of the inner wall 42 at the axis position of the inner wall 42, and the discharge electrode 7 is connected to a high-voltage generator for receiving the high-voltage current sent by the high-voltage generator to form a high-voltage. In the second embodiment of the present application, by arranging the working cavity 4 composed of the outer wall 41 and the inner wall 42, and grounding the outer wall 41 and the inner wall 42 respectively, connecting the discharge electrode 7 to the high-voltage generator and introducing the high-voltage current, a corona is generated around the high-voltage filaments at the axis position of the discharge electrode 7, so that the dust in the gas introduced into the inner cavity of the inner wall 42 is charged. Under the action of the high-voltage electric field, the charged dust will drift to the inner surface of the inner wall 42 and adsorb on the inner surface of the inner wall 42 to achieve the purpose of dust removal.

[0077] The third embodiment of the present application provides a dust removal device 200, in combination with Figure 8 and Figure 9 shown, Figure 8 is a cross-sectional view of the dust removal device provided by the third embodiment of the present application. Figure 9 is Figure 8Partial enlarged view of area A in the figure. In the third embodiment of the present application, the dust removal device 200 includes: a plurality of dust removal tubes 100 and a housing 9 for housing the dust removal tubes 100. Among them, the plurality of dust removal tubes 100 are circumferentially distributed around the central axis of the housing 9, and each dust removal tube 100 has the same specification and structure. There are also other distribution methods for the plurality of dust removal tubes 100, which are not limited in this embodiment. The dust removal tube 100 includes a working chamber 4 formed by an outer wall 41 and an inner wall 42, and a discharge electrode 7. For the specific structure of the dust removal tube 100, reference can be made to the content of the first embodiment above, which will not be repeated here.

[0078] In the third embodiment of the present application, in order to match the structure of the dust removal tube 100, the overall structure of the housing 9 is in the shape of a hollow cylinder. The housing 9 includes a housing cavity 96, a support connection end 91 and a sealing cover 98 that are oppositely arranged. Among them, the dust removal tube 100 and the support connection end 91 are located inside the housing cavity 96, and both ends of the dust removal tube 100 are located on the support connection end 91. Based on the cylindrical structure of the housing 9, the corresponding support connection end 91 has a disc structure, and this disc structure is a hollow disc. This hollow is defined as the hollow space of the support connection end 91. A plurality of round holes corresponding to the distribution pattern of the dust removal tubes 100 are provided on the support connection end 91, and these round holes enable the plurality of dust removal tubes 100 to be correspondingly installed on the support connection end 91. On the circumferential end face of the support connection end 91, an opening that can match the circumferential end faces of the first conductive part 92 and the second conductive part 93 is provided. In addition, the outer peripheral surface of the support connection end 91 is attached to the inner surface of the housing cavity 96. The sealing cover 98 is arranged on one side of the support connection end 91 opposite to the dust removal tube 100 for sealing the housing cavity 96.

[0079] Further, the support connection end 91 includes a first conductive part 92 and a second conductive part 93. The first conductive part 92 is used to receive an alternating voltage or a periodic pulse voltage, and the second conductive part 93 is used to receive a DC high voltage. Specifically, the first conductive part 92 is used to receive the alternating voltage or the periodic pulse voltage emitted by the oscillation circuit generator 1, and the second conductive part 93 is used to receive the DC high voltage emitted by the DC circuit generator 2. In the third embodiment of the present application, the first conductive part 92 and the second conductive part 93 are located in the hollow space of the support connection end 91. When observed in the extending direction of the dust removal tube 100, the first conductive part 92 and the second conductive part 93 are respectively circular. The first conductive part 92 and the second conductive part 93 are respectively provided with a plurality of through holes corresponding to the distribution pattern of the dust removal tube 100. These through holes enable the inner wall 42 and the outer wall 41 of the dust removal tube 100 to be correspondingly installed on the first conductive part 92 and the second conductive part 93. Among them, each through hole on the first conductive part 92 is called a first through hole 94, and each through hole on the second conductive part 93 is called a second through hole 95. In addition, the outer peripheral surfaces of the first conductive part 92 and the second conductive part 93 are in the same plane as the circumferential end surface of the support connection end 91 through the opening of the support connection end 91. Of course, in other examples, the outer peripheral surfaces of the first conductive part 92 and the second conductive part 93 can also be set higher or lower than the circumferential end surface of the support connection end 91, as long as the first conductive part 92 can be connected to the oscillation circuit generator 1 to receive the alternating voltage or the periodic pulse voltage emitted by the oscillation circuit generator 1, and the second conductive part 93 can be connected to the DC circuit generator 2 to receive the DC high voltage emitted by the DC circuit generator 2.

[0080] In the third embodiment of the present application, in order to prevent the first conductive part 92 and the second conductive part 93 from being connected in the hollow space of the support connection end 91, the support connection end 91 further includes an insulating glue 97. The insulating glue 97 is an insulating potting glue. After the first conductive part 92 and the second conductive part 93 are installed in the designated positions, the first conductive part 92 and the second conductive part 93 are installed in the support connection end 91 through this insulating potting glue.

[0081] In the third embodiment of the present application, the outer wall 41 is connected to the first conductive part 92, and the inner wall 42 is connected to the second conductive part 93. In one example, the first conductive part 92 and the second conductive part 93 are sequentially arranged on the support connection end 91 along the extending direction of the inner wall 42 (as shown by the arrow). The inner wall 42 passes through the first through hole 94 along the extending direction of the inner wall 42 and is connected to the second conductive part 93, and the outer wall 41 is connected to the position of the first conductive part 92 that constitutes the first through hole 94.

[0082] Specifically, take Figure 9For example, it includes two dust removal pipes 100, which are called the first dust removal pipe 100 and the second dust removal pipe 100. The first dust removal pipe 100 includes a first outer wall 41 and a first inner wall 42, and the second dust removal pipe 100 includes a second outer wall 41 and a second inner wall 42. There are two first through holes 94 in the first conductive part 92, and there are also two second through holes 95 in the second conductive part 93. Combining Figure 9 As shown, they are respectively called the upper first through hole 94 and the lower first through hole 94, and the upper second through hole 95 and the lower second through hole 95. The first outer wall 41 of the first dust removal pipe 100 is connected to the first conductive part 92 forming the upper first through hole 94, and the first inner wall 42 of the first dust removal pipe 100 passes through the upper first through hole 94 and is connected to the second conductive part 93 forming the upper second through hole 95. The second outer wall 41 of the second dust removal pipe 100 is connected to the first conductive part 92 forming the lower first through hole 94, and the second inner wall 42 of the second dust removal pipe 100 passes through the lower first through hole 94 and is connected to the second conductive part 93 forming the lower second through hole 95.

[0083] In the third embodiment of the present application, the discharge electrode 7 is arranged at the axis position of the inner wall 42 along the extending direction of the inner wall 42, and the end of the discharge electrode 7 penetrates through the first through hole 94 of the first conductive part 92 and the second through hole 95 of the second conductive part 93. Specifically, taking Figure 9 For example, in the extending direction of the inner wall 42, the discharge electrode 7 of the first dust removal pipe 100 penetrates through the first through hole 94 of the first conductive part 92 along the extending direction of the first inner wall 42, and then continues to penetrate through the second through hole 95 of the second conductive part 93. The discharge electrode 7 of the second dust removal pipe 100 penetrates through the first through hole 94 of the first conductive part 92 along the extending direction of the second inner wall 42, and then continues to penetrate through the second through hole 95 of the second conductive part 93. The discharge electrode 7 is used to receive the high-voltage current emitted by the high-voltage generator.

[0084] It should be noted that the setting of the above first through hole 94 is not only for the inner wall 42 to pass through, and when the inner wall 42 passes through the first through hole 94, the inner wall does not contact the first conductive part 92 forming the first through hole 94. For the setting of the above second through hole 95, when the discharge electrode 7 passes through the second through hole 95, the discharge electrode 7 does not contact the second conductive part 93 forming the second through hole 95.

[0085] The third embodiment of the present application provides a dust removal device 200, including: a plurality of dust removal tubes 100 and a housing 9 for accommodating the dust removal tubes 100; the dust removal tube 100 includes a working chamber 4 formed by an outer wall 41 and an inner wall 42, and a discharge electrode 7; the housing 9 includes oppositely arranged support connection ends 91, both ends of the dust removal tube 100 are located at the support connection ends 91, the support connection ends 91 include a first conductive part 92 and a second conductive part 93, the first conductive part 92 is used to receive an alternating voltage or a periodic pulse voltage, and the second conductive part 93 is used to receive a DC high voltage; the outer wall 41 is connected to the first conductive part 92, and the inner wall 42 is connected to the second conductive part 93; the discharge electrode 7 is arranged along the extension direction of the inner wall 42 at the axis position of the inner wall 42, and the end of the discharge electrode 7 penetrates through a first through hole 94 of the first conductive part 92 and a second through hole 95 of the second conductive part 93. In the third embodiment of the present application, by providing the working chamber 4 formed by the outer wall 41 and the inner wall 42, and connecting the inner wall 42 to the second conductive part 93 to obtain a DC high voltage, and connecting the outer wall 41 to the first conductive part 92 to obtain a sinusoidal voltage or a pulse high voltage, a periodically oscillating electric field is formed between the inner wall 42 and the outer wall 41. Under the action of the periodic electric field, the inner wall 42 will undergo periodic vibration, and the dust accumulated on the surface of the inner wall 42 will also be separated from the inner wall 42 under the action of the vibration, ultimately achieving the purpose of cleaning the accumulated dust. After the dust accumulated on the surface of the inner wall 42 is cleaned, the inner wall 42 surface can continue to collect dust, thereby improving the dust removal efficiency of the dust removal device 200.

[0086] The fourth embodiment of the present application provides an excimer laser, including a main body (not shown) and a dust removal device 200 provided on the main body. The dust removal device 200 includes a dust removal tube 100 and a housing 9 for accommodating the dust removal tube 100. The dust removal tube 100 includes: an oscillation circuit generator 1, a DC circuit generator 2, a support 3, a working chamber 4 for electrostatic dust removal, and a discharge electrode 7. The working chamber 4 includes an outer wall 41 and an inner wall 42; the housing 9 includes oppositely arranged support connection ends 91, both ends of the dust removal tube 100 are located at the support connection ends 91, the support connection ends 91 include a first conductive part 92 and a second conductive part 93, the first conductive part 92 is used to receive the alternating voltage or periodic pulse voltage emitted by the oscillation circuit generator 1, and the second conductive part 93 is used to receive the DC high voltage emitted by the DC circuit generator 2; the outer wall 41 is connected to the first conductive part 92, and the inner wall 42 is connected to the second conductive part 93; the discharge electrode 7 is arranged along the extension direction of the inner wall 42 at the axis position of the inner wall 42, and the end of the discharge electrode 7 penetrates through a first through hole 94 of the first conductive part 92 and a second through hole 95 of the second conductive part 93.

[0087] Although the present application is disclosed above with preferred embodiments, it is not intended to limit the present application. Any person skilled in the art can make possible changes and modifications without departing from the spirit and scope of the present application. Therefore, the protection scope of the present application shall be subject to the scope defined by the claims of the present application.

Claims

1. A dust removal pipe, characterized in that, Comprising: An oscillation circuit generator (1), a DC circuit generator (2), a support (3), and a working chamber (4) for electrostatic dust removal, wherein the working chamber (4) includes an outer wall (41) and an inner wall (42); The outer wall (41) is connected to the output end of the oscillation circuit generator (1) for receiving the AC voltage or periodic pulse voltage emitted by the oscillation circuit generator (1); The inner wall (42) is arranged inside the outer wall (41) at a preset distance through the support (3), and the inner wall (42) is connected to the output end of the DC circuit generator (2) for receiving the DC high voltage emitted by the DC circuit generator (2); A periodically oscillating electric field is formed between the inner wall (42) and the outer wall (41), and under the action of the periodically oscillating electric field, the dust accumulated on the surface of the inner wall (42) is separated from the inner wall (42).

2. The dust removal pipe according to claim 1, characterized in that, Further comprising: A plurality of drainage through-holes (5) arranged at the bottom of the inner wall (42) for draining the dust collected by the inner wall (42) to the dust removal space (43) between the outer wall (41) and the inner wall (42).

3. The dust removal pipe according to claim 2, characterized in that, Further comprising: A dust collection component (6) arranged in a partial dust removal space (43) between the outer wall (41) and the inner wall (42) opposite to the drainage through-holes (5) for receiving the dust drained by the drainage through-holes (5).

4. The dust removal pipe according to claim 1, characterized in that, The oscillation circuit generator (1) further includes a first grounding end (11), the DC circuit generator (2) further includes a second grounding end (21), and the first grounding end (11) and the second grounding end (21) are grounded after intersecting; or, the first grounding end (11) and the second grounding end (21) are grounded separately.

5. The dust removal pipe according to claim 1, characterized in that, The outer wall (41) includes a first grounding port (46), the inner wall (42) includes a second grounding port (47), the first grounding port (46) is used for grounding the outer wall (41), and the second grounding port (47) is used for grounding the inner wall (42).

6. The dust removal pipe according to claim 1, characterized in that, Further comprising a discharge electrode (7); the discharge electrode (7) is arranged along the extension direction of the inner wall (42) at the axis position of the inner wall (42), and the discharge electrode (7) is used for generating a high voltage.

7. A dust removal device, characterized in that, Comprising: A plurality of dust removal tubes (100) and a housing (9) for housing the dust removal tubes (100); the dust removal tubes (100) include a working chamber (4) composed of an outer wall (41) and an inner wall (42), and a discharge electrode (7); the housing (9) includes oppositely arranged support connection ends (91); the support connection ends (91) include a first conductive part (92) and a second conductive part (93), the first conductive part (92) is used for receiving the AC voltage or periodic pulse voltage emitted by the oscillation circuit generator, and the second conductive part (93) is used for receiving the DC high voltage emitted by the DC circuit generator; Both ends of each dust removal pipe (100) are located at the support connection end (91). The outer wall (41) of each dust removal pipe (100) is connected to the first conductive part (92), and the inner wall (42) is connected to the second conductive part (93). The discharge electrode (7) is arranged along the extension direction of the inner wall (42) at the axis position of the inner wall (42), and the end of the discharge electrode (7) penetrates through the first through hole (94) of the first conductive part (92) and the second through hole (95) of the second conductive part (93). A periodically oscillating electric field is formed between the inner wall (42) and the outer wall (41). Under the action of the periodically oscillating electric field, the dust accumulated on the surface of the inner wall (42) is separated from the inner wall (42).

8. The dust removal device according to claim 7, characterized in that, The first conductive part (92) and the second conductive part (93) are sequentially arranged at the support connection end (91) along the extension direction of the inner wall (42). The inner wall (42) passes through the first through hole (94) along the extension direction of the inner wall (42) and is connected to the second conductive part (93). The outer wall (41) is connected to the position of the first conductive part (92) that forms the first through hole (94).

9. The dust removal device according to claim 7, characterized in that, The support connection end (91) further includes an insulating glue (97). The first conductive part (92) and the second conductive part (93) are arranged at the support connection end (91) through the insulating glue (97).

10. An excimer laser, characterized in that, It includes a body and any one of the dust removal devices (200) described in claims 7-9 above provided on the body.

11. A dust removal pipe, characterized in that, It includes: A support (3) and a working chamber (4) for electrostatic dust removal. The working chamber (4) includes a discharge electrode (7), an outer wall (41), and an inner wall (42). The outer wall (41) is provided with a first grounding port (46). The inner wall (42) is arranged inside the outer wall (41) at a preset distance through the support (3). The inner wall (42) is provided with a second grounding port (47). The discharge electrode (7) is arranged along the extension direction of the inner wall (42) at the axis position of the inner wall (42). The discharge electrode (7) is used to generate a high-voltage.

12. The dust removal pipe according to claim 11, characterized in that, The outer wall (41) is provided with a first port (44) connected to the oscillation circuit generator (1). The inner wall (42) is provided with a second port (45) connected to the DC circuit generator (2).

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