Radiation focusing module and processing system with radiation focusing module

Abstract

This invention provides a radiation focusing module comprising an optical fiber, a first focusing mirror, a second focusing mirror, and a beam shrinker. The optical fiber has an optical axis. The first focusing mirror is located between the optical fiber and the second focusing mirror. The beam shrinker is located between the first focusing mirror and the second focusing mirror, and the first focusing mirror, the second focusing mirror, and the beam shrinker are arranged along the optical axis, wherein the beam shrinker has an opening.

Description

Technical Field

[0001] This disclosure relates to a radiation focusing module and a processing system having the radiation focusing module. Background Technology

[0002] Laser processing is a commonly used technology for high-precision circuit board manufacturing. However, non-coaxial laser processing equipment suffers from low processing accuracy and lens misalignment due to its large mechanical size and weight, resulting in problems such as non-coaxial optical path laser processing equipment. Therefore, the processing efficiency of current laser processing technology still needs to be improved.

[0003] In coaxial optical path laser processing equipment, the infrared light generated by the heat source after the processing element is heated by the laser is recovered to detect the temperature. However, infrared beams from different heat sources with different wavelengths are difficult to focus and couple effectively. Therefore, the temperature detection accuracy of current coaxial optical path laser processing equipment is low, making it difficult to improve processing efficiency.

[0004] Therefore, how to provide a processing equipment that can improve the above problems remains one of the goals that the industry urgently needs to study. Summary of the Invention

[0005] One embodiment of this disclosure is a radiation focusing module.

[0006] In one embodiment of this disclosure, the radiation focusing module includes an optical fiber, a first focusing mirror, a second focusing mirror, and a beam shrinker. The optical fiber has an optical axis. The first focusing mirror is located between the optical fiber and the second focusing mirror. The beam shrinker is located between the first focusing mirror and the second focusing mirror, and the first focusing mirror, the second focusing mirror, and the beam shrinker are arranged in the optical axis direction, wherein the beam shrinker has an opening.

[0007] In one embodiment of this disclosure, the opening is aligned with the optical axis direction.

[0008] In one embodiment of this disclosure, the refractive index of the beam reducer is less than the refractive index of the first focusing lens or the second focusing lens.

[0009] In one embodiment of this disclosure, the beam reducer includes a plano-concave lens and a lens array, with the lens array located between the plano-concave lens and the second focusing lens.

[0010] In one embodiment of this disclosure, the lens array includes a plurality of lenses, and the optical axis direction of the lenses forms an angle with the optical axis direction of the optical fiber.

[0011] In one embodiment of this disclosure, the beam reducer includes a plano-convex lens and a plano-concave lens, with the plano-convex lens located between the plano-concave lens and the second focusing lens.

[0012] Another technical embodiment of this disclosure is a processing system.

[0013] In one embodiment of this disclosure, the processing system includes an infrared detector, a radiation source, and a radiation focusing module. The radiation source is electrically connected to the infrared detector, and is configured to emit processing radiation light. The radiation focusing module is configured to transmit heat source radiation light. The radiation focusing module includes an optical fiber, a first focusing lens, a second focusing lens, and a beam reducer. The optical fiber has an optical axis. The first focusing lens is located between the optical fiber and the second focusing lens. The beam reducer is located between the first focusing lens and the second focusing lens, and the first focusing lens, the second focusing lens, and the beam reducer are arranged in the optical axis direction, wherein the beam reducer has an opening.

[0014] In one embodiment of this disclosure, the aperture of the opening is larger than the diameter of the processing radiation light.

[0015] In one embodiment of this disclosure, the aperture of the opening is 1.1 to 1.3 times the diameter of the processed radiation light.

[0016] In one embodiment of this disclosure, the aperture of the opening is smaller than the diameter of the radiation light from the heat source.

[0017] In one embodiment of this disclosure, the processed radiation light includes laser, X-ray, ultraviolet light, megahertz wave, and microwave.

[0018] In one embodiment of this disclosure, the heat source radiation light includes infrared light and near-infrared light.

[0019] In the above embodiments, the radiation focusing module of this disclosure reduces the diameter of the heat source radiation light to approximately the size of the processing radiation light using a beam shortener, thereby increasing the proportion of heat source radiation light entering the optical fiber and improving temperature detection accuracy. Furthermore, since the beam shortener has an opening, the processing radiation light can enter the second focusing lens without power loss. Therefore, the radiation focusing module of this disclosure can simultaneously maintain the radiation intensity of the processing radiation light and increase the proportion of heat source radiation light entering the optical fiber within the same optical path. This eliminates the need for an additional optical path to increase the detection intensity of the heat source radiation light, thus the processing module of this disclosure has advantages such as smaller size and lighter weight. In addition, the radiation focusing module of this disclosure can detect heat source radiation light of multiple wavelengths, thereby improving the system controller's control effect on the processing. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a radiation focusing module of a processing system according to an embodiment of the present disclosure;

[0021] Figure 2 This is a schematic diagram of the system controller of a processing system according to an embodiment of the present disclosure;

[0022] Figure 3 This is a schematic diagram of a radiation focusing module of a processing system according to another embodiment of the present disclosure;

[0023] Figure 4 The present disclosure provides simulated data on the infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure.

[0024] Figure 5 The present disclosure provides simulated data on the infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure.

[0025] Figure 6 This is simulated data of the infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure.

[0026] Explanation of icon numbers:

[0027] 10,10a: Machining System

[0028] 100, 100a: Radiation focusing module

[0029] 102: Processing radiation light

[0030] 104, 1042, 1044: Heat source radiation light

[0031] 110: Fiber optic

[0032] 120: First focusing lens

[0033] 130: Second focusing lens

[0034] 140, 140a: Beam retractor

[0035] 142: Plano-concave lens

[0036] 142H: Opening

[0037] 144: Lens Array

[0038] 1442, 1444: Convex lens

[0039] 144H: Opening

[0040] 144a: Plano-convex lens

[0041] 200: System Controller

[0042] 202: Radiated light

[0043] 210: Radiation source

[0044] 212: Collimator

[0045] 214: Light source coupler

[0046] 220: Infrared detector

[0047] 222: Infrared Coupler

[0048] 230: Feedback Controller

[0049] 240: Dichroic mirror

[0050] 300: Processed Components

[0051] 310: Pin

[0052] 320: solder pad

[0053] 330: Solder

[0054] 340: Circuit board

[0055] 400: Infrared detector

[0056] A1: Optical axis direction

[0057] D1, D2, D3: Diameter

[0058] S1, S2, S3, S4, S5, S6: Heat source Detailed Implementation

[0059] Several embodiments of the present invention will be disclosed below with reference to the accompanying drawings. For clarity, many practical details will be described in the following description. However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not essential. Furthermore, to simplify the drawings, some conventionally used structures and elements will be shown in a simple schematic manner. And for clarity, the thickness of layers and regions in the drawings may be exaggerated, and the same element symbols denote the same elements in the description of the drawings.

[0060] Figure 1 This is a schematic diagram of a radiation focusing module 100 of a processing system 10 according to an embodiment of the present disclosure. The processing system 10 includes a radiation focusing module 100 and a system controller 200. The radiation focusing module 100 includes an optical fiber 110, a first focusing lens 120, a second focusing lens 130, and a beam reducer 140. The optical fiber 110 has an optical axis direction A1. The first focusing lens 120 is located between the optical fiber 110 and the second focusing lens 130. The beam reducer 140 is located between the first focusing lens 120 and the second focusing lens 130. The second focusing lens 130, the beam reducer 140, and the first focusing lens 120 are arranged sequentially along the optical axis direction A1.

[0061] The beam reducer 140 includes a plano-concave lens 142 and a lens array 144, with the lens array 144 located between the plano-concave lens 142 and the second focusing lens 130. In this embodiment, the lens array 144 includes a plurality of surrounding convex lenses. Figure 1Two convex lenses 1442 and 1444 are exemplarily shown, but this disclosure is not limited thereto. The plano-concave lens 142 has an opening 142H. The lens array 144 can be a spherical matrix composed of two or more convex lenses. The lens array 144 includes the opening 144H, meaning that a plurality of convex lenses 1442 and 1444 surround the opening 144H. The optical axes of the convex lenses 1442 and 1444 form an angle with the optical axis A1 of the optical fiber 110, thereby causing the light to converge toward the plano-concave lens 142 through the lens array 144.

[0062] In this embodiment, the radiation source 210 of the system controller 200 (see...) Figure 2 Processing radiation light 102 is emitted and sequentially passes through optical fiber 110, a first focusing lens 120, an opening 142H of a plano-concave lens 142, an opening 144H of a lens array 144, and a second focusing lens 130 before illuminating the processing element 300. After passing through the first focusing lens 120, the processing radiation light 102 is focused into parallel light with a diameter D1. The apertures of openings 142H and 144H are larger than the diameter D1 of the processing radiation light 102, and the openings 142H and 144H are aligned along the optical axis direction A1. Therefore, the processing radiation light 102 can pass through openings 142H and 144H, and the power of the processing radiation light 102 is not attenuated due to passing through an additional medium. In some embodiments, the apertures of openings 142H and 144H are 1.1 to 1.3 times the diameter D1 of the processing radiation light 102.

[0063] The processing element 300 includes pins 310 and pads 320 disposed on a circuit board 340. Solder 330 is heated by processing radiation light 102 for soldering. After being heated, the processing element 300 emits heat source radiation light 104. The heat source radiation light 104 is composed of radiation light emitted by multiple heat sources and may have multiple wavelengths. The heat source radiation light 104 sequentially passes through a second focusing lens 130, a lens array 144, a plano-concave lens 142, and a first focusing lens 120 before entering the optical fiber 110. The heat source radiation light 104 is then recovered by the system controller 200 to provide data required for temperature detection and feedback control.

[0064] The heat source radiation light 104 is focused into parallel light with a diameter D2 after passing through the second focusing lens 130. The diameter D2 is larger than the diameter D1 of the processing radiation light 102, and is close to the diameter of the second focusing lens 130. A portion of the heat source radiation light 1042 can directly pass through the opening 142H of the plano-concave lens 142 and the opening 144H of the lens array 144. Specifically, as shown in the figure, the portion of the heat source radiation light 1042 that directly passes through the openings 142H and 144H overlaps with the processing radiation light 102. Another portion of the heat source radiation light 1044 has its diameter reduced after passing through the lens array 144. Specifically, this other portion of the heat source radiation light 1044 is located around the processing radiation light 102.

[0065] The refractive index of the plano-concave lens 142 and lens array 144 in the beam reducer 140 is less than that of the first focusing lens 120 or the second focusing lens 130. This prevents the heat source radiation light 1044 from focusing before entering the plano-concave lens 142. In other words, the focal point formed by the multiple convex lenses 1442 in the lens array 144 falls behind the plano-concave lens 142, thus the heat source radiation light 1044 passes through the plano-concave lens 142 before being focused. The heat source radiation light 1044 passing through the plano-concave lens 142 shares a diameter D3 with the heat source radiation light 1042, and the diameter D3 is smaller than the diameter D2. After passing through the beam reducer 140, the heat source radiation light 104 is focused by the first focusing lens 120, and the diameter of the heat source radiation light 104 is close to the aperture of the optical fiber 110, allowing it to enter the optical fiber 110. In other words, the apertures of apertures 142H and 144H are smaller than the diameter D2 of the heat source radiation light 104. The diameter D2 of the heat source radiation light 104 is reduced to a diameter D3 by the beam reducer 140, which is beneficial to increasing the proportion of heat source radiation light 104 entering the optical fiber 110.

[0066] For example, in this embodiment, the structure formed by the first focusing lens 120, the beam reducer 140, and the second focusing lens 130 has a total length of approximately 10 cm, which is beneficial for miniaturizing the radiation focusing module 100. The first focusing lens 120 and the second focusing lens 130 are made of optical glass (e.g., N-BK7 glass) with a refractive index of 1.52. The focal length of the first focusing lens 120 is 32 mm, and the focal length of the second focusing lens 130 is 100 mm. The plano-concave lens 142 and the lens array 144 are made of calcium fluoride (CaF2) with a refractive index of 1.43. The focal length of the plano-concave lens 142 is 60 mm.

[0067] The diameter D1 of the processed radiation beam 102 after passing through the first focusing lens 120 is 14 mm. The aperture 142H of the plano-concave lens 142 of the beam reducer 140 and the aperture 144H of the lens array 144 are approximately 16 mm. In this way, the processed radiation beam 102 can pass through the apertures 142H and 144H and enter the second focusing lens 130 without power loss.

[0068] The processing radiation light 102 may include laser, X-ray, ultraviolet light, megahertz wave, or microwave. The heat source radiation light 104 may include infrared and near-infrared light. The plano-concave lens 142 and lens array 144 of the beam reducer 140 may be coated with infrared coatings corresponding to the wavelength of the heat source radiation light 104 to reduce the light attenuation rate. In other embodiments, the beam reducer 140 may be a convex lens, a concave-convex lens, an axon prism, a secondary reflection prism, a metal mirror, or a combination thereof. The lens array 144 may be an optical element with an opening 144H formed by multifaceted mirrors or gratings. This is acceptable as long as the processing radiation light 102 can pass through this optical element and the diameter of the heat source radiation light 104 can be reduced.

[0069] Figure 2 This is a schematic diagram of a system controller 200 for a processing system 10 according to an embodiment of the present disclosure. The system controller 200 includes a radiation source 210, a collimator 212, a light source coupler 214, an infrared detector 220, an infrared coupler 222, a feedback controller 230, and a dichroic mirror 240. The radiation light 202 emitted by the radiation source 210, after passing through the collimator 212, is reflected by the dichroic mirror 240 toward the light source coupler 214 and forms a shape as shown in the diagram. Figure 1 The processing radiation light 102 shown is shown. Figure 1 The heat source radiation light 104 shown passes through the dichroic mirror 240 and is coupled into the infrared detector 220 via the infrared coupler 222. The feedback controller 230 is electrically connected to the infrared detector 220 and the radiation source 210. The feedback controller 230 obtains the processing temperature based on the detection result of the infrared detector 220, thereby adjusting the setting of the radiation source 210 to maintain processing efficiency.

[0070] As described above, the radiation focusing module 100 reduces the diameter of the heat source radiation light 104 to approximately the size of the processing radiation light 102 using the beam reducer 140, thereby increasing the proportion of the heat source radiation light 104 entering the optical fiber 110 and improving temperature detection accuracy. Furthermore, since the plano-concave lens 142 and lens array 144 of the beam reducer 140 have openings 142H and 144H respectively, the processing radiation light 102 can enter the second focusing lens 130 without power loss. Therefore, the radiation focusing module 100 of this disclosure can simultaneously maintain the radiation intensity of the processing radiation light 102 and increase the proportion of the heat source radiation light 104 entering the optical fiber 110 within the same optical path. In this way, there is no need to set up an additional optical path to increase the detection intensity of the heat source radiation light; therefore, the processing module of this disclosure has advantages such as smaller size and lighter weight, further improving processing accuracy.

[0071] Figure 3 This is a schematic diagram of a radiation focusing module 100a of a processing system 10a according to another embodiment of the present disclosure. The radiation focusing module 100a is substantially the same as the radiation focusing module 100, except that the beam reducer 140a of the radiation focusing module 100 includes a plano-concave lens 142 and a plano-convex lens 144a. For example, the plano-convex lens 144a has a focal length of 100 mm. The radiation focusing module 100a has the same technical effects as the radiation focusing module 100, and will not be described further here.

[0072] Figure 4 This is simulation data of the thermal source radiation light transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure. In this embodiment, using... Figure 3 The radiation focusing module 100 is used as the configuration for simulation. The simulated light source power is 1 watt, and the wavelengths are 1600 nm and 2300 nm, respectively, which are two simulated heat source infrared light. Figure 4 The position corresponding to the optical axis direction A1 is defined as the origin of the lateral position coordinate.

[0073] Table 1 shows the infrared power and transmission efficiency received by analog detector I and analog detector II when the infrared light from both simulated heat sources comes from heat source S1. Figure 4 The infrared detectors 400 in the table are used to simulate detectors of different sizes. As shown in Table 1, simulated detector I is 50.8 mm by 50.8 mm, and simulated detector II is 0.8 mm by 0.8 mm. As shown in Table 1, columns 2 to 4 list the simulation results of the existing radiation focusing module, and columns 5 to 7 list the simulation results of the existing radiation focusing module. Figure 3 The simulation results of the radiation focusing module 100a are shown.

[0074] The transmission efficiency can be derived from the receiving power of analog detector I and analog detector II. As shown in columns 3 and 6 of Table 1, the transmission efficiency of the radiation focusing module 100 of the present invention for thermal infrared light with a wavelength of 1600 nm can be increased from 26.980% to 77.132%. As shown in columns 4 and 7 of Table 1, the transmission efficiency of the radiation focusing module 100 of the present invention for thermal infrared light with a wavelength of 2300 nm can be increased from 32.158% to 67.377%.

[0075]

[0076] Table 1. Simulation data on the transmission efficiency of the radiation focusing module

[0077] Table 2 shows the infrared power and transmission efficiency received by simulated detectors I and II when the infrared light from the two simulated heat sources S1 and S2, respectively. From the data in columns 3 and 6 of Table 2, it can be seen that the transmission efficiency of the radiation focusing module 100 of the present invention for infrared light from a heat source with a wavelength of 1600 nm can be increased from 26.980% to 77.132%. From the data in columns 4 and 7 of Table 1, it can be seen that the transmission efficiency of the radiation focusing module 100 of the present invention for infrared light from a heat source with a wavelength of 2300 nm can be increased from 33.509% to 54.081%. In other words, even if heat source S2 has a lateral offset of 0.5 cm relative to the optical axis direction A1 in the figure, its corresponding transmission efficiency is still significantly higher than that of existing radiation focusing modules.

[0078]

[0079] Table 2. Simulation data on the transmission efficiency of the radiation focusing module

[0080] Figure 5 This is simulated data of the infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure. Figure 5 Radiation focusing module and Figure 4 The configuration is the same as described above, except that the positions of heat source S3 and heat source S4 in this embodiment are located at horizontal coordinates of -0.25 cm and 0.25 cm, respectively. Table 3 shows the infrared power and transmission efficiency received by simulated detector I and simulated detector II when the infrared light from the two simulated heat sources is from heat source S3 and heat source S4, respectively. From the data in columns 3 and 4 and columns 6 and 7 of Table 3, it can be seen that the radiation focusing module 100 of the present invention has a significant improvement over existing radiation focusing modules. In other words, even if both heat source S3 and heat source S4 are laterally offset relative to the optical axis direction A1, their corresponding transmission efficiency is still significantly higher than that of existing radiation focusing modules.

[0081]

[0082] Table 3. Simulation data on the transmission efficiency of the radiation focusing module

[0083] Figure 6 This is simulated data of the infrared transmission efficiency of a radiation focusing module according to an embodiment of the present disclosure. Figure 6 Radiation focusing module and Figure 4 The configuration is the same as described above, except that in this embodiment, the positions of heat source S5 and heat source S6 are located at the origin of the horizontal coordinate and 0.5 cm away, respectively. Table 4 shows the infrared power and transmission efficiency received by simulated detector I and simulated detector II when the infrared light from the two simulated heat sources comes from heat source S5 and heat source S6, respectively. From the data in columns 3 and 4 and columns 6 and 7 of Table 4, it can be seen that the radiation focusing module 100 of the present invention has a significant improvement over existing radiation focusing modules. In other words, even if heat source S5 has a lateral offset of -0.5 cm relative to the optical axis direction A1, its corresponding transmission efficiency is still significantly higher than that of existing radiation focusing modules.

[0084]

[0085] Table 4. Simulation data on the transmission efficiency of the radiation focusing module

[0086] As mentioned earlier, when an actual processed component emits heat source radiation light due to heating, this radiation light is a combination of radiation light emitted by multiple heat sources, and therefore can have multiple wavelengths. As shown in Tables 1 to 4, the received power when 1600 nm and 2300 nm heat source infrared light are detected simultaneously (columns 2 and 5) is similar to the received power when 1600 nm and 2300 nm heat source infrared light are detected separately (columns 3, 4, 6, and 7). From this result, it can be inferred that the results of detecting actual processed components can be derived from simulated data of a single wavelength of heat source infrared light.

[0087] See Figure 2 Generally, the detection performance of the infrared detector 220 is affected by the surrounding environment. When the intensity of the recovered heat source radiation light 104 is too low, the feedback controller 230 may be unable to perform effective feedback control based on the detection results of the infrared detector 220. The radiation focusing module of this disclosure can detect multiple wavelengths, thus allowing the processing temperature to be estimated using beat frequency calculation, thereby improving the control effect of the system controller 200 on the processing.

[0088] In summary, the radiation focusing module of this disclosure reduces the diameter of the heat source radiation light to approximately the same size as the processing radiation light using a beam shortener, thereby increasing the proportion of heat source radiation light entering the optical fiber and improving temperature detection accuracy. Furthermore, because the beam shortener has an opening, the processing radiation light can enter the second focusing lens without power loss. Therefore, the radiation focusing module of this disclosure can simultaneously maintain the radiation intensity of the processing radiation light and increase the proportion of heat source radiation light entering the optical fiber within the same optical path. This eliminates the need for an additional optical path to increase the detection intensity of the heat source radiation light, resulting in a processing module with advantages such as smaller size and lighter weight, further improving processing accuracy. Moreover, the radiation focusing module of this disclosure can detect heat source radiation light of multiple wavelengths, thereby improving the system controller's control effect on the processing.

Claims

1. A processing system, including: Infrared detector; A radiation source electrically connected to the infrared detector, wherein the radiation source is configured to emit processed radiation light; as well as A radiation focusing module configured to transmit radiation light from a heat source, wherein the radiation focusing module includes: Optical fiber has an optical axis. A first focusing lens and a second focusing lens, wherein the first focusing lens is located between the optical fiber and the second focusing lens; and A beam reducer is located between the first focusing lens and the second focusing lens, and the first focusing lens, the second focusing lens, and the beam reducer are arranged in the direction of the optical axis, wherein the beam reducer has an opening; The processing system also includes: Collimator, light source coupler, infrared coupler, feedback controller, and dichroic mirror; The radiation emitted by the radiation source passes through the collimator and is reflected by the dichroic mirror toward the light source coupler to form the processing radiation light; The heat source radiation light passes through the dichroic mirror and is coupled into the infrared detector via the infrared coupler; The feedback controller is electrically connected to the infrared detector and the radiation source; the feedback controller obtains the processing temperature based on the detection result of the infrared detector, thereby adjusting the setting of the radiation source to maintain processing efficiency; The radiation focusing module reduces the diameter of the heat source radiation light to a size close to that of the processing radiation light through the beam reducer, thereby increasing the proportion of the heat source radiation light entering the optical fiber.

2. The processing system according to claim 1, wherein the opening is aligned with the optical axis direction.

3. The processing system according to claim 1, wherein the refractive index of the beam reducer is less than the refractive index of the first focusing lens or the second focusing lens.

4. The processing system according to claim 1, wherein the beam reducer comprises a plano-concave lens and a lens array, and the lens array is located between the plano-concave lens and the second focusing lens.

5. The processing system according to claim 4, wherein the lens array comprises a plurality of lenses, and the optical axis direction of the plurality of lenses forms an angle with the optical axis direction of the optical fiber.

6. The processing system according to claim 1, wherein the beam reducer comprises a plano-convex lens and a plano-concave lens, and the plano-convex lens is located between the plano-concave lens and the second focusing lens.

7. The processing system according to claim 1, wherein the aperture of the opening is larger than the diameter of the processing radiation light.

8. The processing system according to claim 1, wherein the aperture of the opening is 1.1 to 1.3 times the diameter of the processing radiation light.

9. The processing system according to claim 1, wherein the aperture of the opening is smaller than the diameter of the heat source radiated light.

10. The processing system according to claim 1, wherein the processing radiation light includes laser, X-ray, ultraviolet light, megahertz wave, and microwave.

11. The processing system according to claim 1, wherein the heat source radiation light includes infrared light and near-infrared light.

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