Exhaust gas treatment device

Abstract

The application provides a waste gas treatment device, which comprises a reaction container, a waste gas pipeline and a first spraying pipeline, wherein the reaction container comprises a container body and a cover body arranged on an opening of the container body; a first chamber, a second chamber and a third chamber are coaxially arranged in the container body; the bottom of the first chamber is communicated with the second chamber; the top of the second chamber is communicated with the third chamber; the bottom of the third chamber is used for being communicated with a water tank; the waste gas pipeline penetrates through the cover body and enters the first chamber; the waste gas pipeline is provided with an air inlet for introducing waste gas into the first chamber; the first spraying pipeline is communicated with the waste gas pipeline and used for introducing spraying water into the waste gas pipeline; and a heater penetrates through the cover body and enters the second chamber. The waste gas treatment device has the waste gas pipeline in the first chamber, the heater in the second chamber and the flow path of the waste gas in the three chambers, which is beneficial to improving the heat utilization rate of the heater and the waste gas treatment efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of waste gas treatment, in particular to a waste gas treatment device. BACKGROUND

[0002] In the process of semiconductor production, a large amount of toxic and harmful process waste gas is generated, and the waste gas must be collected, treated and discharged synchronously with production. The waste gas treatment equipment is an important equipment on the production line, which is used to treat the waste gas generated in each process of the production line.

[0003] The waste gas treatment equipment in the prior art is provided with a reaction cavity in the equipment, and the waste gas pipeline and the heating equipment are located in the same reaction cavity. The heating equipment provides a high-temperature environment required for the oxidation-reduction reaction of the waste gas. The waste gas flows into the reaction cavity from the waste gas pipeline. Due to the arrangement mode of the gas pipeline, the waste gas flows towards one side in the reaction cavity, which causes that the waste gas cannot fully contact with the heat in the reaction cavity, resulting in low heat utilization rate and low waste gas treatment efficiency. SUMMARY

[0004] The present application provides a waste gas treatment device to solve the problem of low heat utilization rate of the existing waste gas treatment device.

[0005] The present application provides a waste gas treatment device, comprising:

[0006] A reaction container comprising a container body and a cover body arranged on an opening of the container body, wherein a first cavity, a second cavity and a third cavity are coaxially arranged in the container body, the bottom of the first cavity is communicated with the second cavity, the top of the second cavity is communicated with the third cavity, and the bottom of the third cavity is used to communicate with a water tank;

[0007] A waste gas pipeline penetrating through the cover body into the first cavity, wherein the waste gas pipeline is provided with an air inlet for introducing waste gas into the first cavity;

[0008] A first spraying pipeline communicated with the waste gas pipeline for introducing spraying water into the waste gas pipeline;

[0009] A heater penetrating through the cover body into the second cavity.

[0010] According to the waste gas treatment device provided by the present application, the waste gas pipeline is provided with a water inlet, the water inlet is located between the cover body and the air inlet, and the water inlet is communicated with the first spraying pipeline.

[0011] According to the waste gas treatment device provided by the present application, the waste gas treatment device further comprises a cooling pipeline;

[0012] The container body is further provided with a fourth chamber coaxially arranged outside the first chamber and in communication with the first chamber; the cooling pipeline is in communication with the fourth chamber for introducing cooling water into the fourth chamber.

[0013] According to the waste gas treatment device, the top of the fourth chamber is in communication with the first chamber, and the cooling water can flow from the fourth chamber into the first chamber.

[0014] According to the waste gas treatment device, the container body further comprises an overflow baffle arranged on the inner wall of the container body between the top of the fourth chamber and the cover.

[0015] According to the waste gas treatment device, the waste gas treatment device further comprises an overflow device.

[0016] The overflow device is arranged at the bottom of the reaction container, and the overflow device is provided with an overflow chamber and a cooling chamber coaxially arranged, the overflow chamber is in communication with the first chamber, the cooling chamber is in communication with the third chamber, and the overflow chamber is in communication with the cooling chamber.

[0017] According to the waste gas treatment device, the overflow device comprises a first cylinder and a second cylinder coaxially arranged.

[0018] The end of the first cylinder is connected to the outer wall of the second cylinder through a sealing plate, and the inner wall of the first cylinder, the sealing plate and the outer wall of the second cylinder form the overflow chamber, and the inner wall of the second cylinder forms the cooling chamber.

[0019] According to the waste gas treatment device, the overflow device further comprises a second spraying pipeline in communication with the second cylinder for introducing spraying water into the cooling chamber.

[0020] According to the waste gas treatment device, the waste gas treatment device further comprises a cleaning assembly.

[0021] The cleaning assembly comprises a cleaning pipeline and a control valve, the cleaning pipeline penetrates the cover into the third chamber, the cleaning pipeline is used for introducing spraying water into the third chamber, and the control valve is used for controlling the opening and closing of the cleaning pipeline.

[0022] According to the waste gas treatment device, the heater comprises a plurality of heating elements, and the plurality of heating elements are arranged in the second chamber around the axis of the reaction container.

[0023] The waste gas treatment device provided by the application has the first chamber, the second chamber and the third chamber coaxially arranged and communicated with each other in the container body, the waste gas pipeline is located in the first chamber, the heater is located in the second chamber, the waste gas enters the first chamber along the waste gas pipeline, the waste gas is washed by the spraying water of the first spraying pipeline, then the waste gas flows into the second chamber from the bottom of the first chamber, the waste gas is fully reacted at high temperature during the process of flowing from the bottom to the top in the second chamber, then the waste gas flows into the third chamber from the top of the second chamber, and then flows into the water tank for subsequent treatment, and the flowing path of the waste gas in the three chambers is beneficial to improving the heat utilization rate of the heater and the waste gas treatment efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the application or prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0025] Figure 1 It is a structural schematic view of the waste gas treatment device provided by the application (the arrow direction is the waste gas flowing direction);

[0026] The drawings are as follows: 1: reaction container; 11: container body; 111: first chamber; 112: second chamber; 113: third chamber; 114: fourth chamber; 115: overflow baffle; 12: cover body; 2: waste gas pipeline; 21: gas inlet; 22: water inlet; 3: first spraying pipeline; 4: heater; 5: cooling pipeline; 6: overflow device; 61: overflow chamber; 62: cooling chamber; 63: first cylinder; 64: second cylinder; 65: second spraying pipeline; 7: cleaning assembly; 71: cleaning pipeline; 72: control valve. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solutions and advantages of the application more clear, the technical solutions in the application will be clearly and completely described below in combination with the drawings in the application. Obviously, the described embodiments are some embodiments of the application, not all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor are within the protection scope of the application.

[0028] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0029] The present application will be described below Figure 1 The waste gas treatment device of the embodiment of the present application is described.

[0030] As Figure 1 shown, the waste gas treatment device provided by the embodiment of the present application comprises a reaction container 1, a waste gas pipeline 2, a first spraying pipeline 3 and a heater 4. The reaction container 1 comprises a container body 11 and a cover body 12 arranged on the opening of the container body 11. The container body 11 is internally structured with a first chamber 111, a second chamber 112 and a third chamber 113 arranged coaxially. The bottom of the first chamber 111 is communicated with the second chamber 112, the top of the second chamber 112 is communicated with the third chamber 113, and the bottom of the third chamber 113 is used for being communicated with a water tank. The waste gas pipeline 2 penetrates the cover body 12 into the first chamber 111. The waste gas pipeline 2 is provided with an air inlet 21 for introducing waste gas into the first chamber 111. The first spraying pipeline 3 is communicated with the waste gas pipeline 2 for introducing spraying water into the waste gas pipeline 2. The heater 4 penetrates the cover body 12 into the second chamber 112.

[0031] Specifically, the reaction container 1 comprises the container body 11 and the cover body 12. The top end of the container body 11 has an opening, and the cover body 12 is arranged on the opening of the container body 11. The cover body 12 is detachably connected with the container body 11, which is convenient for installation and disassembly and maintenance operation. The shape of the container body 11 is set according to requirements, for example, the container body 11 is in a columnar shape.

[0032] The container body 11 is internally structured with the first chamber 111, the second chamber 112 and the third chamber 113 arranged coaxially. The first chamber 111, the second chamber 112 and the third chamber 113 are sequentially arranged from far to near from the central axis of the container body 11. The waste gas pipeline 2 penetrates the cover body 12 into the first chamber 111. The section of the waste gas pipeline 2 located outside the cover body 12 is provided with the air inlet 21 for introducing the waste gas to be treated into the first chamber 111. The heater 4 penetrates the cover body 12 into the second chamber 112. The heater 4 is used for providing heat to keep the temperature in the chamber at a target temperature required for high-temperature reaction of the waste gas. Here, the high-temperature reaction refers to the oxidation-reduction reaction of the waste gas at high temperature.

[0033] The first spraying pipeline 3 is communicated with the waste gas pipeline 2, and the setting position of the first spraying pipeline 3 is not limited specifically, for example, the first spraying pipeline 3 penetrates through the circumferential wall of the container body 11 to enter the first chamber 111 and is communicated with the waste gas pipeline 2; or the first spraying pipeline 3 is arranged above the cover body 12, the top of the waste gas pipeline 2 is provided with a water inlet, and the first spraying pipeline 3 is communicated with the waste gas pipeline 2 through the water inlet. The first spraying pipeline 3 comprises a spraying head, and spraying water is sprayed into the waste gas pipeline 2 through the spraying head, so as to preliminarily dissolve the waste gas by water and wash the waste gas. It can be understood that the cover body 12 is also provided with an auxiliary gas pipeline, the auxiliary gas pipeline is used for supplying oxygen into the chamber, so as to guarantee the oxygen amount required by the waste gas for oxidation-reduction reaction, and the auxiliary gas pipeline can be arranged outside the waste gas pipeline 2.

[0034] The first chamber 111, the second chamber 112 and the third chamber 113 are communicated with each other, the bottom of the first chamber 111 is communicated with the second chamber 112, the top of the second chamber 112 is communicated with the third chamber 113, and the bottom of the third chamber 113 is communicated with the water tank. The first chamber 111 and the second chamber 112 are defined as reaction chambers, and the third chamber 113 is defined as a discharge chamber, the waste gas is washed in the first chamber 111, the waste gas is subjected to high-temperature reaction in the second chamber 112, and the waste gas is discharged from the third chamber 113 to the water tank for subsequent treatment after the high-temperature reaction.

[0035] The treatment process of the waste gas is described in detail below. The waste gas to be treated enters the first chamber 111 along the waste gas pipeline 2, and the waste gas flows into the first chamber 111, during which the waste gas is washed by the spraying water introduced by the first spraying pipeline 3. Then the waste gas flows into the second chamber 112 from the bottom of the first chamber 111, and the heater 4 heats to keep the second chamber 112 in a high-temperature environment, so that the waste gas is subjected to sufficient high-temperature reaction in the second chamber 112. The waste gas flows from the bottom of the second chamber 112 towards the top of the second chamber 112, and the waste gas is in sufficient contact with the heat in the second chamber 112, so that the heat of the heater 4 is utilized to the maximum extent, the heat utilization rate is improved, and the treatment efficiency of the waste gas is improved. After the waste gas is subjected to sufficient high-temperature reaction in the second chamber 112, the waste gas flows into the third chamber 113 from the top of the second chamber 112, and then flows into the water tank communicated with the third chamber 113 along the third chamber 113 for subsequent treatment.

[0036] In the embodiment of the present application, the first chamber 111, the second chamber 112 and the third chamber 113 are coaxially arranged and communicate with each other in the container body 11, the exhaust gas pipeline 2 is located in the first chamber 111, the heater 4 is located in the second chamber 112, the exhaust gas enters the first chamber 111 through the exhaust gas pipeline 2, the spray water of the first spray pipeline 3 is used to wash the exhaust gas, then the exhaust gas flows from the bottom of the first chamber 111 into the second chamber 112, the exhaust gas flows from the bottom to the top in the second chamber 112 and is fully reacted at high temperature, then the exhaust gas flows from the top of the second chamber 112 into the third chamber 113, and then flows into the water tank for subsequent treatment. The flow path of the exhaust gas in the three chambers is beneficial to improve the heat utilization rate of the heater 4 and the exhaust gas treatment efficiency.

[0037] As shown in the optional embodiment, the exhaust gas pipeline 2 is provided with a water inlet 22, the water inlet 22 is located between the cover body 12 and the air inlet 21, and the water inlet 22 communicates with the first spray pipeline 3. Figure 1

[0038] Specifically, the section of the exhaust gas pipeline 2 located outside the cover body 12 is provided with the air inlet 21 and the water inlet 22, the direction of the air inlet 21 is consistent with the axis direction of the exhaust gas pipeline 2, and the direction of the water inlet 22 is perpendicular to the axis direction of the exhaust gas pipeline 2. The water inlet 22 is arranged between the cover body 12 and the air inlet 21, and the first spray pipeline 3 communicates with the water inlet 22.

[0039] The first spray pipeline 3 includes a first spray head, the first spray head is installed at the water inlet 22, and the first spray head sprays the spray water towards the exhaust gas during the downward flow of the exhaust gas along the vertical direction of the exhaust gas pipeline 2, so as to wash the exhaust gas. The number of the exhaust gas pipelines 2 is set according to actual needs, for example, the number of the exhaust gas pipelines 2 is four, six or more, and the plurality of exhaust gas pipelines 2 are uniformly distributed in the first chamber 111 around the central axis of the container body 11. The number of the first spray pipelines 3 is equal to the number of the exhaust gas pipelines 2, and the plurality of first spray pipelines 3 are connected with the plurality of exhaust gas pipelines 2 one by one. The plurality of exhaust gas pipelines 2 are used to introduce the exhaust gas into the first chamber 111, which is beneficial to guarantee the uniform flow of the exhaust gas and can flexibly adjust the air inlet position.

[0040] In the prior art, the front water washing pipeline and the exhaust gas pipeline of the exhaust gas treatment equipment are independently arranged, the exhaust gas is pretreated through the front water washing pipeline, then the exhaust gas flows into the reaction chamber through the exhaust gas pipeline to participate in the reaction, and the independent arrangement of the front water washing pipeline and the exhaust gas pipeline leads to the bulky overall structure of the equipment and the complicated pipeline layout.

[0041] ​In the embodiment of the present application, the water inlet 22 is arranged on the exhaust pipe 2, and the first spraying pipe 3 communicates with the exhaust pipe 2 through the water inlet 22. During the process that the exhaust gas flows along the exhaust pipe 2 towards the first chamber 111, the first spraying pipe 3 sprays water towards the exhaust gas, and the water washing treatment is performed on the exhaust gas. The air intake and the water washing are performed synchronously. The first spraying pipe 3 and the exhaust pipe 2 are integrated, which is beneficial to the compactness of the structure, occupies less space, and makes the pipeline layout more reasonable.

[0042] As shown in Figure 1 In the optional embodiment, the exhaust treatment device further comprises a cooling pipe 5. The fourth chamber 114 is further arranged in the container body 11. The fourth chamber 114 is arranged outside the first chamber 111 and coaxially arranged with the first chamber 111. The cooling pipe 5 communicates with the fourth chamber 114 and is used for introducing cooling water into the fourth chamber 114.

[0043] Specifically, the fourth chamber 114 is further arranged in the container body 11. The fourth chamber 114 is arranged outside the first chamber 111 and coaxially arranged with the first chamber 111. The cooling water inlet and the cooling water outlet that communicate with the fourth chamber 114 can be arranged on the circumferential wall surface of the container body 11.

[0044] The cooling pipe 5 communicates with the cooling water inlet, and the cooling water outlet can communicate with the water collecting tank through the water collecting pipe. During the operation of the exhaust treatment device, the cooling water is introduced into the fourth chamber 114 through the cooling pipe 5, so that the circumferential wall surface of the container body 11 can be cooled and cooled, and the scalding accident of the operator contacting the outer wall surface of the container body 11 is avoided, and the use safety is ensured.

[0045] In the embodiment of the present application, the fourth chamber 114 is further arranged in the container body 11. The cooling pipe 5 communicates with the fourth chamber 114. The cooling water is introduced into the fourth chamber 114 through the cooling pipe 5, so that the outer wall surface of the container body 11 can be cooled and cooled, and the scalding accident of the operator contacting the outer wall surface of the container body 11 is avoided, and the use safety is ensured.

[0046] As shown in Figure 1 In the optional embodiment, the top of the fourth chamber 114 communicates with the first chamber 111, and the cooling water can flow from the fourth chamber 114 into the first chamber 111.

[0047] Specifically, the top of the fourth chamber 114 is communicated with the first chamber 111, the cooling water inlet is arranged at the bottom of the container body 11, the cooling water is introduced into the fourth chamber 114 through the cooling pipeline 5, and the cooling water flows from the bottom of the fourth chamber 114 to the top of the fourth chamber 114, so that the outer wall surface of the container body 11 is sufficiently cooled and then the cooling water overflows from the top of the fourth chamber 114 to the first chamber 111. The first chamber 111 and the second chamber 112 are communicated, and the first chamber 111 and the second chamber 112 are collectively referred to as a reaction chamber of waste gas, and the bottom of the reaction chamber is provided with a water outlet communicated with the water tank.

[0048] The cooling water overflowing into the reaction chamber can flush the dust deposited on the bottom of the reaction chamber into the water tank through the water outlet, so that the reaction chamber is cleaned conveniently. After the spray water introduced into the waste gas pipeline 2 by the first spray pipeline 3 washes the waste gas, the spray water can also flush the dust on the bottom of the reaction chamber into the water tank through the water outlet in the process of falling, so that the reaction chamber is cleaned.

[0049] In the embodiment of the application, the top of the fourth chamber 114 is communicated with the first chamber 111, and the cooling water overflows from the top of the fourth chamber 114 into the first chamber 111, so that the dust accumulated in the reaction chamber can be flushed into the water tank through the water outlet while the outer wall surface of the container body 11 is cooled, thereby cleaning the reaction chamber and facilitating the convenience of cleaning operation.

[0050] As shown in FIG. 1, Figure 1 In an optional embodiment, the container body 11 further comprises an overflow baffle 115, which is arranged on the inner wall surface of the container body 11 in a ring shape and located between the top end of the fourth chamber 114 and the cover body 12.

[0051] Specifically, the inner wall surface of the container body 11 is provided with the overflow baffle 115, which is arranged on the inner wall surface of the container body 11 in a ring shape and located between the top surface of the fourth chamber 114 and the cover body 12, and the width and thickness of the overflow baffle 115 are set according to requirements.

[0052] The cover body 12 is provided with an auxiliary gas pipeline arranged outside the waste gas pipeline 2 for introducing oxygen into the reaction chamber. The overflow baffle 115 can prevent the cooling water introduced into the fourth chamber 114 from overflowing from the top of the fourth chamber 114 to the first chamber 111 and impacting the surface of the cover body 12, thereby affecting the amount of oxygen introduced. The cover body region at the position of the auxiliary gas pipeline is made of zirconia material to ensure that the gas can be uniformly introduced into the reaction chamber.

[0053] In this embodiment of the invention, an overflow baffle 115 is provided between the top surface of the fourth chamber 114 and the cover 12 to prevent cooling water from impacting the surface of the cover 12 and to ensure that oxygen can flow into the reaction chamber evenly and smoothly.

[0054] like Figure 1 As shown, in an optional embodiment, the exhaust gas treatment device further includes an overflow device 6; the overflow device 6 is located at the bottom of the reaction vessel 1, and the overflow device 6 is constructed with an overflow cavity 61 and a cooling cavity 62 arranged coaxially, the overflow cavity 61 is connected to the first chamber 111, the cooling cavity 62 is connected to the third chamber 113, and the overflow cavity 61 is connected to the cooling cavity 62.

[0055] Specifically, the overflow device 6 is located at the bottom of the reaction vessel 1, and is detachably connected to the reaction vessel 1. For example, the bottom of the vessel body 11 is provided with a first connecting plate, which has a first mounting hole, and the top of the overflow device 6 is provided with a second connecting plate, which has a second mounting hole. Fasteners pass through the first and second mounting holes to achieve a detachable connection between the reaction vessel 1 and the overflow device 6. The fasteners can be a combination of bolts and nuts, or they can be clamps, etc.

[0056] The overflow device 6 is constructed with a coaxial overflow chamber 61 and a cooling chamber 62. The reaction chamber of the reaction vessel 1 and the overflow device 6 are provided with a first through hole, which is used to connect the reaction chamber and the overflow chamber 61. The third chamber 113 of the reaction vessel 1 and the overflow device 6 are provided with a second through hole, which is used to connect the third chamber 113 and the cooling chamber 62. The top of the overflow chamber 61 is connected to the cooling chamber 62.

[0057] Cooling water flowing into the fourth chamber 114 overflows into the reaction chamber, flushing away dust accumulated at the bottom of the reaction chamber through the first through-hole into the overflow chamber 61. The cooling water then flows further from the overflow chamber 61 into the cooling chamber 62. The exhaust gas from the high-temperature reaction flows along the third chamber 113 from its top to its bottom, further flowing into the cooling chamber 62. The cooling water overflowing into the cooling chamber 62 cools the high-temperature exhaust gas. The cooled exhaust gas then enters a water tank for subsequent washing and other treatments.

[0058] In this embodiment of the invention, the overflow device 6 is constructed with an overflow chamber 61 and a cooling chamber 62. The overflow chamber 61 is connected to the reaction chamber through a first through hole, and the cooling chamber 62 is connected to the third chamber 113 through a second through hole. The cooling water introduced by the cooling pipe 5 and the spray water introduced by the first spray pipe 3 can wash the dust in the reaction chamber into the overflow chamber 61, thereby cleaning the reaction chamber. The cooling water and spray water can further flow from the overflow chamber 61 into the cooling chamber 62 to cool the high-temperature exhaust gas discharged from the third chamber 113.

[0059] likeFigure 1 As shown, in an optional embodiment, the overflow device 6 includes a first cylinder 63 and a second cylinder 64 coaxially arranged; the end of the first cylinder 63 is connected to the outer wall of the second cylinder 64 through a sealing plate, the inner wall of the first cylinder 63, the sealing plate and the outer wall of the second cylinder 64 enclose to form an overflow cavity 61, and the inner wall of the second cylinder 64 encloses to form a cooling cavity 62.

[0060] Specifically, the overflow device 6 is coaxially arranged with the reaction vessel 1. The overflow device 6 includes a first cylinder 63 and a second cylinder 64 coaxially arranged. The radial dimension of the first cylinder 63 matches the radial dimension of the vessel body 11, and the radial dimension of the second cylinder 64 matches the radial dimension of the third chamber 113.

[0061] The length of the second cylinder 64 is greater than the length of the first cylinder 63. The end of the first cylinder 63 facing away from the reaction vessel 1 is connected to the outer wall of the second cylinder 64 through a sealing plate. The first cylinder 63, the sealing plate, and the second cylinder 64 together form an overflow cavity 61, and the inner wall of the second cylinder 64 together form a cooling cavity 62. The top surface of the first cylinder 63 abuts against the second connecting plate, and there is a certain gap between the top surface of the second cylinder 64 and the second connecting plate, thereby connecting the first cylinder 63 and the second cylinder 64.

[0062] The circumferential wall of the first cylinder 63 is provided with an observation window for observing the amount of dust. Through this window, the amount of dust flushed from the reaction chamber into the overflow chamber 61 can be observed. An overflow pipe is provided on the sealing plate, with one end connected to the overflow chamber 61 and the other end connected to the water tank. A control valve is provided on the overflow pipe; this valve can be an electric valve, a pneumatic valve, or a manual valve. By observing the amount of dust flushed into the overflow chamber 61 through the observation window, if there is a large amount of dust, opening the control valve allows the dust to be flushed into the water tank along the overflow pipe, facilitating cleaning.

[0063] In this embodiment of the invention, the first cylinder 63, the sealing plate, and the second cylinder 64 enclose each other to form an overflow cavity 61, and the inner wall surface of the second cylinder 64 encloses each other to form a cooling cavity 62. The structure is simple, which is conducive to the convenience of cleaning, and at the same time can effectively cool down the high-temperature exhaust gas.

[0064] like Figure 1 As shown, in an optional embodiment, the overflow device 6 further includes a second spray pipe 65, which is connected to the second cylinder 64 and is used to introduce spray water into the cooling chamber 62.

[0065] Specifically, the second cylinder body 64 is provided with a liquid inlet on the wall surface thereof, and the second spray pipeline 65 is communicated with the cooling cavity 62 formed by the second cylinder body 64 through the liquid inlet. The number of the second spray pipeline 65 is set according to actual needs. For example, the number of the second spray pipeline 65 is two, and two liquid inlets are arranged on the wall surface of the second cylinder body 64 in the length direction of the second cylinder body 64, and the two liquid inlets are connected with the two second spray pipelines 65 one by one.

[0066] It can be understood that the second spray pipeline 65 includes a second spray head, and the high-temperature exhaust gas flows along the third cavity 113 towards the cooling cavity 62. During the flowing process in the cooling cavity 62, the second spray head sprays the spray water towards the cooling cavity 62, and the spray water cools the high-temperature exhaust gas. In the case that the second spray pipeline 65 is multiple, the multiple second spray heads spray the spray water into the cooling cavity 62, which is beneficial to accelerate the cooling of the high-temperature exhaust gas.

[0067] The cooling water in the cooling pipeline 5 flows into the fourth cavity 114, and the cooling water cools and lowers the temperature of the circumferential wall surface of the container body 11. The cooling water overflows to the reaction cavity, and the dust in the reaction cavity can be flushed to the overflow cavity 61 through the first through hole. Further, the cooling water can flow from the overflow cavity 61 to the cooling cavity 62 to cool and treat the high-temperature exhaust gas. The spray water flowing into the reaction cavity from the first spray pipeline 3 can also flow into the overflow cavity 61 through the first through hole, and then flow into the cooling cavity 62 from the overflow cavity 61 to cool and treat the high-temperature exhaust gas. The cooling water flowing from the cooling pipeline 5, the spray water flowing from the first spray pipeline 3, and the spray water flowing from the second spray pipeline 65 can all cool and treat the high-temperature exhaust gas to accelerate the cooling of the exhaust gas and facilitate the subsequent process.

[0068] In the embodiment of the present application, the cooling water flowing from the cooling pipeline 5, the spray water flowing from the first spray pipeline 3, and the spray water flowing from the second spray pipeline 65 can all cool and treat the high-temperature exhaust gas to accelerate the cooling of the exhaust gas and improve the efficiency of the exhaust gas treatment.

[0069] As shown in Figure 1 In an optional embodiment, the exhaust gas treatment device further comprises a cleaning assembly 7. The cleaning assembly 7 comprises a cleaning pipeline 71 and a control valve 72. The cleaning pipeline 71 penetrates the cover body 12 into the third cavity 113, and is used for flowing the spray water into the third cavity 113. The control valve 72 is used for controlling the opening and closing of the cleaning pipeline 71.

[0070] Specifically, the cleaning assembly 7 comprises a cleaning pipeline 71 and a control valve 72, the cleaning pipeline 71 comprises a cleaning pipe and a third spray head, the cleaning pipe penetrates through the cover 12 into the third chamber 113, and the third spray head is installed at the end of the cleaning pipe and can spray 360 degrees, and the third spray head is slightly lower than the top surface of the third chamber 113. The control valve 72 is arranged on the cleaning pipe to control the opening and closing of the cleaning pipeline 71. The cleaning pipe and the third spray head can be made of corrosion-resistant materials, such as iron-based alloy or nickel-based alloy.

[0071] After the exhaust gas treatment device operates for a period of time, the inner wall surface of the third chamber 113 will be adhered with dust, which will cause the exhaust gas outlet to be blocked, affecting the normal flow of the exhaust gas. A pressure detection sensor is arranged on the exhaust gas treatment device to detect the pressure of the exhaust gas at the inlet 21 and the outlet. For example, a pressure detection sensor is arranged near the inlet 21 of the exhaust pipeline 2 to detect the pressure at the inlet 21, and a pressure detection sensor is arranged at the bottom of the third chamber 113 to detect the pressure at the outlet, and based on the pressure difference between the two, it is determined whether to spray and clean the third chamber 113.

[0072] If the pressure difference between the inlet 21 and the outlet is large, the control valve 72 is opened, and the cleaning pipe sprays water towards the third chamber 113 to clean the third chamber 113, without the need to disassemble the cover 12, which is convenient for cleaning. If the pressure difference between the inlet 21 and the outlet is within a predetermined range, the third chamber 113 does not need to be cleaned, and the control valve 72 is closed.

[0073] In the embodiment of the present application, the third chamber 113 is provided with a cleaning pipeline 71, and the cleaning pipeline 71 is provided with a control valve 72, based on the pressure difference between the inlet 21 and the outlet, the opening and closing of the control valve 72 is controlled to determine whether to clean the third chamber 113, which can ensure the smooth exhaust of the exhaust gas and facilitate the cleaning of the third chamber 113.

[0074] In an optional embodiment, the heater 4 comprises a plurality of heating elements, and the plurality of heating elements are arranged in the second chamber 112 in a ring shape around the axis of the reaction container 1.

[0075] Specifically, the plurality of heating elements are arranged in the second chamber 112 in a ring shape around the central axis of the container body 11, and the heating elements are located between the adjacent two exhaust pipelines 2 in the radial direction of the container body 11. The number of heating elements is set according to actual needs, for example, the number of exhaust pipelines 2 and heating elements is six.

[0076] Six exhaust pipes 2 are evenly distributed around the central axis of the container body 11 in the first chamber 111, and six heating elements are evenly distributed around the central axis of the container body 11 in the second chamber 112. The exhaust gas flows into the first chamber 111 along the six exhaust pipes 2, further flows into the second chamber 112 from the bottom of the first chamber 111, and flows from the bottom of the second chamber 112 to the top of the second chamber 112. In the process, the heat generated by the six heating elements fully reacts, which is beneficial to improve the heat utilization rate and the exhaust gas treatment efficiency.

[0077] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, and are not limited thereto. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions described in the foregoing embodiments can still be modified, or some technical features can be replaced by equivalents. The modification or replacement does not make the essence of the corresponding technical solution deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An exhaust gas treatment device, characterized by, The application relates to a waste gas treatment device. The waste gas treatment device comprises a reaction container and a waste gas pipeline. The reaction container comprises a container body and a cover arranged at an opening of the container body. The container body is internally provided with coaxially arranged first, second and third cavities. The bottom of the first cavity is communicated with the second cavity. The top of the second cavity is communicated with the third cavity. The bottom of the third cavity is used for being communicated with a water tank. The waste gas pipeline is provided with an air inlet for introducing waste gas into the first cavity. The first spray pipeline is communicated with the waste gas pipeline and used for introducing spray water into the waste gas pipeline. The heater penetrates through the cover and enters the second cavity.

2. The exhaust treatment device of claim 1, wherein, The waste gas treatment device further comprises a cooling pipeline.

3. The exhaust treatment device of claim 1, wherein, The container body is further provided with a fourth cavity.

4. The exhaust treatment device of claim 1, wherein, The fourth cavity is arranged outside the first cavity and coaxially arranged with the first cavity. The cooling pipeline is communicated with the fourth cavity and used for introducing cooling water into the fourth cavity.

5. The exhaust treatment device of claim 4, wherein, The top of the fourth cavity is communicated with the first cavity.

6. The exhaust treatment device of claim 1, wherein, The cooling water can flow from the fourth cavity into the first cavity. The waste gas treatment device further comprises an overflow device.

7. The exhaust treatment device of any one of claims 1 to 6, wherein, The overflow device is arranged at the bottom of the reaction container. The overflow device is provided with coaxially arranged overflow and cooling cavities. The overflow cavity is communicated with the first cavity. The cooling cavity is communicated with the third cavity. The overflow cavity is communicated with the cooling cavity. The waste gas pipeline is provided with a water inlet. The water inlet is located between the cover and the air inlet. The water inlet is communicated with the first spray pipeline. The container body further comprises an overflow baffle. The overflow baffle is circumferentially arranged on the inner wall surface of the container body. The overflow baffle is located between the top end of the fourth cavity and the cover. The overflow device comprises coaxially arranged first and second cylinders. The end of the first cylinder is connected with the outer wall surface of the second cylinder through a sealing plate. The inner wall surface of the first cylinder, the sealing plate and the outer wall surface of the second cylinder form the overflow cavity. The inner wall surface of the second cylinder forms the cooling cavity. The overflow device further comprises a second spray pipeline. The second spray pipeline is communicated with the second cylinder and used for introducing spray water into the cooling cavity. The waste gas treatment device further comprises a cleaning assembly. The cleaning assembly comprises a cleaning pipeline and a control valve. The cleaning pipeline penetrates through the cover and enters the third cavity. The cleaning pipeline is used for introducing spray water into the third cavity. The control valve is used for controlling the opening and closing of the cleaning pipeline. The heater comprises a plurality of heating elements. The plurality of heating elements are circumferentially arranged in the second cavity around the axis of the reaction container.

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