Mask plate assembly and evaporation equipment

Abstract

The embodiment of the present application provides a mask plate assembly and an evaporation device. The mask plate assembly includes: a frame; a mask strip, which is arranged on the frame and located on the side of the frame facing the substrate to be evaporated, the mask strip having a first opening, the orthographic projection of the first opening on the substrate to be evaporated coincides with the area to be evaporated of the substrate to be evaporated; a mask tray, which is arranged on the frame and located on the side of the mask strip facing the evaporation source, the mask tray shields at least part of the mask strip, the mask tray having a second opening, the orthographic projection of the second opening on the substrate to be evaporated covers the orthographic projection of the first opening on the substrate to be evaporated; wherein: the surface roughness of at least the side of the mask tray facing the evaporation source is greater than the surface roughness of the mask strip. The embodiment of the present application can reduce the risk of the film layer deposited on the mask plate assembly peeling off from the mask plate assembly, and improve the service life of the mask plate assembly.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular, to a mask plate assembly and an evaporation device. Background Art

[0002] Organic Light-Emitting Diode (OLED) has the advantages of being light, thin, high brightness, low power consumption, fast response, high clarity, good flexibility, and high luminous efficiency, and can meet consumers' demand for display technology.

[0003] In the OLED manufacturing process, the mask used for evaporation is a very important component, and the service life of the mask directly affects the production cost. Summary of the invention

[0004] The present application provides a mask plate assembly and an evaporation device.

[0005] In a first aspect, an embodiment of the present application provides a mask plate assembly, including:

[0006] frame;

[0007] The mask strip is arranged on the frame and is located on a side of the frame facing the substrate to be evaporated, the mask strip has a first opening, and the orthographic projection of the first opening on the substrate to be evaporated coincides with the area to be evaporated of the substrate to be evaporated;

[0008] A mask tray is arranged on the frame and is located on the side of the mask strip facing the evaporation source. The mask tray covers at least a portion of the mask strip. The mask tray has a second opening. The orthographic projection of the second opening on the substrate to be evaporated covers the orthographic projection of the first opening on the substrate to be evaporated.

[0009] Wherein: the surface roughness of at least one side of the mask tray facing the evaporation source is greater than the surface roughness of the mask strip.

[0010] Optionally, there is a preset distance between an outer contour of the second opening projected on the substrate to be evaporated and an outer contour of the first opening projected on the substrate to be evaporated along a direction parallel to the substrate to be evaporated, and the preset distance is less than or equal to 1 mm.

[0011] Optionally, there is a gap between the mask tray and the mask strip, and along a direction perpendicular to the substrate to be evaporated, the size of the gap is greater than or equal to 0 mm and less than or equal to 0.5 mm.

[0012] Optionally, the mask strip comprises a first connecting portion and a mask portion connected to each other, the first connecting portion is connected to the frame, the mask portion defines a first opening, and the first connecting portion is located on a side of the mask portion away from the first opening;

[0013] The mask tray comprises a second connecting portion and a shielding portion connected to each other, the second connecting portion is connected to the frame, the shielding portion defines a second opening, and the second connecting portion is located on a side of the shielding portion away from the second opening;

[0014] The shielding portion shields at least a portion of the mask portion, and a gap is provided between the shielding portion and the mask portion.

[0015] Optionally, a surface of the first connecting portion facing the frame is flush with a surface of the mask portion facing the frame;

[0016] The shielding portion and the second connecting portion both have a first side facing the mask strip. Along a direction perpendicular to the substrate to be evaporated, the surface of the first side of the shielding portion protrudes toward the side close to the mask strip relative to the surface of the first side of the second connecting portion.

[0017] Optionally, the shielding portion and the second connecting portion both have a second side facing the evaporation source, and the surface roughness of the second side of the shielding portion and the surface roughness of the second side of the second connecting portion are both greater than the surface roughness of the mask strip;

[0018] There is a first preset angle between the surface of the second side of the shielding part and the preset plane, and there is a second preset angle between the surface of the second side of the second connecting part and the preset plane. The first preset angle and the second preset angle are both greater than or equal to 0° and less than or equal to 90°, and the second preset angle is less than or equal to the first preset angle; wherein the preset plane is parallel to the substrate to be evaporated.

[0019] Optionally, the surface of the second side of the second connecting portion is parallel to the substrate to be evaporated, and a portion of the surface of the second side of the shielding portion close to the second opening is arranged at an acute angle to the preset plane; and / or,

[0020] The surface roughness of the second side of the second connecting portion is the same as the surface roughness of the second side of the shielding portion.

[0021] Optionally, the mask plate assembly includes a plurality of mask strips and a plurality of mask trays, the first openings of at least two of the plurality of mask strips have different shapes and / or sizes, and the second openings of at least two of the plurality of mask trays have different shapes and / or sizes;

[0022] The second opening of each mask tray is arranged corresponding to the first opening of at least one mask strip;

[0023] The frame is selectively connected to one of the plurality of mask trays and at least one mask strip corresponding to the mask tray.

[0024] Optionally, the framework includes:

[0025] The first frame body has a first side and a second side opposite to each other, the mask strip is mounted on the first side of the first frame body, the mask tray is mounted on the second side of the first frame body, the first frame body defines a third opening, and an orthographic projection of the second opening on the substrate to be evaporated is located within an orthographic projection of the third opening on the substrate to be evaporated;

[0026] A third connecting portion, one end of which is connected to the second side of the first frame body and is located at an end away from the third opening;

[0027] The second frame body is connected to the other end of the third connection portion and extends relative to the third connection portion in a direction away from the third opening.

[0028] In a second aspect, an embodiment of the present application provides an evaporation device, comprising:

[0029] Evaporation source;

[0030] The above-mentioned mask plate assembly;

[0031] The evaporation source is arranged on a side of the mask tray of the mask plate assembly away from the mask strip;

[0032] The orthographic projection of the spray range of the evaporation source on the substrate to be evaporated overlaps with the orthographic projection of the first opening of the mask strip on the substrate to be evaporated.

[0033] The beneficial technical effects brought about by the technical solution provided by the embodiment of the present application include:

[0034] In the embodiment of the present application, the mask strip and the mask tray are both arranged on the frame, and the frame supports the mask strip and the mask tray. The mask strip is located on the side of the frame facing the substrate to be evaporated, and the mask strip has a first opening, and the orthographic projection of the first opening on the substrate to be evaporated coincides with the area to be evaporated of the substrate to be evaporated, and the mask tray is located on the side of the mask strip facing the evaporation source, and the mask tray has a second opening, and the orthographic projection of the second opening on the substrate to be evaporated covers the orthographic projection of the first opening on the substrate to be evaporated, and in the process of forming a film on the substrate to be evaporated using the mask plate assembly, the evaporation source sprays the evaporation material, and the evaporation material passes through the second opening and the first opening in sequence, and then is sprayed to the area to be evaporated of the substrate to be evaporated, forming the required pattern on the substrate to be evaporated, and the shape and size of the first opening define the shape and size of the pattern formed on the substrate to be evaporated.

[0035] In an embodiment of the present application, the mask tray blocks at least a portion of the mask strip, and the evaporation material sprayed by the evaporation source (the evaporation material that has not passed through the first opening) will be deposited on the mask tray. The mask tray plays a role in shielding the evaporation material to prevent it from being sprayed onto the mask strip. Due to the shielding effect of the mask tray, the contact area between the mask strip and the evaporation material is reduced, thereby reducing the area of ​​the evaporation material deposited on the mask strip, and can even prevent the evaporation material from being deposited on the mask strip; and, the surface roughness of at least the side of the mask tray facing the evaporation source is greater than the surface roughness of the mask strip, so that the adsorption capacity of the mask tray for the evaporation material is greater than the adsorption capacity of the mask strip. By setting the mask tray, the adsorption capacity of the mask plate assembly for the evaporation material can be improved, thereby reducing the risk of the film layer deposited on the mask plate assembly during the film forming process from peeling off the mask plate assembly, extending the service life of the mask plate assembly, and improving the service life of the mask plate assembly.

[0036] Additional aspects and advantages of the present application will be partially given in the following description, which will become apparent from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0038] Figure 1 A cross-sectional view of an evaporation device provided in an embodiment of the present application;

[0039] Figure 2 A top view of a mask plate assembly provided in an embodiment of the present application (wherein the mask strip is not shown);

[0040] Figure 3 for Figure 2 AA cross-sectional view of the mask plate assembly (wherein the mask strip is shown);

[0041] Figure 4 for Figure 3 A partial enlarged view of

[0042] Figure 5 A structural schematic diagram of a mask tray of a mask plate assembly provided in an embodiment of the present application;

[0043] Figure 6 A schematic structural diagram of another mask tray of a mask plate assembly provided in an embodiment of the present application.

[0044] Reference numerals:

[0045] 1000-evaporation equipment; 100-mask plate assembly; 10-frame; 11-first frame body; 111-second mounting hole; 12-third opening; 13-third connecting part; 14-second frame body; 20-mask strip; 21-first opening; 22-first connecting part; 23-mask part; 30-mask tray; 31-second opening; 32-second connecting part; 321-first side of second connecting part; 322-second side of second connecting part; 323-first mounting hole; 33-shielding part; 331-first side of shielding part; 332-second side of shielding part; 41-gap; 200-substrate to be evaporated; 300-evaporation source. DETAILED DESCRIPTION

[0046] The embodiments of the present application are described below in conjunction with the drawings in the present application. It should be understood that the implementation methods described below in conjunction with the drawings are exemplary descriptions for explaining the technical solutions of the embodiments of the present application and do not constitute a limitation on the technical solutions of the embodiments of the present application.

[0047] It will be understood by those skilled in the art that, unless specifically stated, the singular forms "one", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the implementation of other features, information, data, steps, operations, elements, components and / or combinations thereof supported by the present technical field. It should be understood that when we refer to an element as being "connected" or "coupled" to another element, the element may be directly connected or coupled to the other element, or may refer to the connection relationship between the element and the other element established through an intermediate element. In addition, the "connection" or "coupling" used herein may include wireless connection or wireless coupling. The term "and / or" used herein refers to at least one of the items defined by the term, for example, "A and / or B" may be implemented as "A", or as "B", or as "A and B".

[0048] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below with reference to the accompanying drawings.

[0049] The following is an explanation of the relevant technologies:

[0050] The film forming processes of display devices (such as light-emitting elements EL) mainly include evaporation, sputtering, CVD, etc. In order to obtain the required pattern, a mask is usually used for masking. The function of the mask is to form the required pattern. The mask includes a frame and a mask sheet, and the mask sheet is installed on the frame through a stretching process. However, in the film forming process of the display device, as the number of film forming sheets increases, the film layer deposited on the mask plate gradually becomes thicker and the weight gradually increases. The risk of the film layer deposited on the mask plate peeling off from the mask plate continues to increase. If the film layer deposited on the mask plate peels off from the mask plate during the film forming process, it will hinder the film forming process and affect the film forming effect.

[0051] At present, the thickness of the mask strip used in large-size display devices, such as WOLED (White Organic Light-Emitting Diode), is usually less than 200um. In order to ensure the aperture ratio of small-size display devices, the thickness of the mask strip needs to be less than 30um. Since there is a certain proportional relationship between the thickness of the mask strip and the surface roughness of the mask strip film surface, that is, if the mask strip is thicker, the surface roughness of the mask strip film surface can be made higher, and if the mask strip is thinner, the surface roughness of the mask strip film surface can only be made lower. In other words, the thickness of the mask strip can determine the surface roughness of the mask strip film surface to a certain extent, and the roughness determines the service life of the mask. The higher the roughness, the lower the risk of the deposited film layer on the mask plate peeling off the mask plate, and the lower the roughness, the higher the risk of the deposited film layer on the mask plate peeling off the mask plate. When a large-area smooth mask strip is used for filming, the risk of peeling of the deposited film layer on the mask plate during the film forming process is relatively high.

[0052] In addition, display devices (e.g., organic light-emitting diode displays) use masks of different types (e.g., different opening sizes and / or shapes) during the film formation process. When the product requires patterns of different sizes and / or shapes, mask strips with openings of different sizes and / or shapes are required. To ensure production efficiency, manufacturers have an increasing demand for the production of masks of various sizes and / or shapes.

[0053] The mask plate assembly and evaporation equipment provided in the present application are intended to solve at least one of the above technical problems in the prior art.

[0054] The technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems are described in detail below with specific embodiments. It should be noted that the following implementation modes can refer to, draw on or combine with each other, and the same terms, similar features and similar implementation steps in different implementation modes will not be described repeatedly.

[0055] The present application embodiment provides a mask plate assembly, and the structural schematic diagram of the mask plate assembly 100 is as follows Figures 1 to 3 As shown, it includes: a frame 10, a mask strip 20 and a mask tray 30, the mask strip 20 is arranged on the frame 10 and is located on the side of the frame 10 facing the substrate 200 to be evaporated, the mask strip 20 has a first opening 21, and the orthographic projection of the first opening 21 on the substrate 200 to be evaporated coincides with the area to be evaporated of the substrate 200 to be evaporated; the mask tray 30 is arranged on the frame 10 and is located on the side of the mask strip 20 facing the evaporation source 300, the mask tray 30 blocks at least part of the mask strip 20, the mask tray 30 has a second opening 31, and the orthographic projection of the second opening 31 on the substrate 200 to be evaporated covers the orthographic projection of the first opening 21 on the substrate 200 to be evaporated; wherein: the surface roughness of at least the side of the mask tray 30 facing the evaporation source 300 is greater than the surface roughness of the mask strip 20.

[0056] In the embodiment of the present application, the mask strip 20 and the mask tray 30 are both disposed on the frame 10 , and the frame 10 supports both the mask strip 20 and the mask tray 30 . The mask strip 20 is located on the side of the frame 10 facing the substrate 200 to be evaporated, and the mask strip 20 has a first opening 21. The orthographic projection of the first opening 21 on the substrate 200 to be evaporated coincides with the area to be evaporated of the substrate 200 to be evaporated. The mask tray 30 is located on the side of the mask strip 20 facing the evaporation source 300, and the mask tray 30 has a second opening 31. The orthographic projection of the second opening 31 on the substrate 200 to be evaporated covers the orthographic projection of the first opening 21 on the substrate 200 to be evaporated. In the process of forming a film on the substrate 200 to be evaporated using the mask plate assembly 100, the evaporation source 300 sprays the evaporation material, and the evaporation material passes through the second opening 31 and the first opening 21 in sequence, and then is sprayed to the area to be evaporated of the substrate 200 to be evaporated, so as to form a desired pattern on the substrate 200 to be evaporated. The shape and size of the first opening 21 define the shape and size of the pattern formed on the substrate 200 to be evaporated.

[0057] In the embodiment of the present application, the mask tray 30 blocks at least a portion of the mask strip 20, and the evaporation material sprayed by the evaporation source 300 (the evaporation material that has not passed through the first opening 21) will be deposited on the mask tray 30. The mask tray 30 plays a role in shielding the evaporation material to prevent it from being sprayed onto the mask strip 20. Due to the shielding effect of the mask tray 30, the contact area between the mask strip 20 and the evaporation material is reduced, thereby reducing the area of ​​the evaporation material deposited on the mask strip 20, and can even prevent the evaporation material from being deposited on the mask strip 20; and, the surface roughness of at least the side of the mask tray 30 facing the evaporation source 300 is greater than the surface roughness of the mask strip 20, so that the adsorption capacity of the mask tray 30 for the evaporation material is greater than the adsorption capacity of the mask strip 20. By providing the mask tray 30, the adsorption capacity of the mask plate assembly for the evaporation material can be improved, thereby reducing the risk of the film layer deposited on the mask plate assembly during the film forming process peeling off from the mask plate assembly, extending the service life of the mask plate assembly, and improving the service life of the mask plate assembly.

[0058] In the embodiment of the present application, the direct film-forming area of ​​the mask strip 20 can be reduced by designing the mask tray 30, and the film-forming surface of the mask tray (i.e., the surface of the mask tray 30 facing the evaporation source 300) is surface-treated so that the film-forming surface of the mask tray 30 has a high roughness. The surface treatment process includes: grinding, sandblasting, shot blasting, cladding, coating, etc., the purpose of which is to improve the adhesion ability of the film layer. Since the surface of the mask tray 30 is treated, the adsorption ability of the mask tray 30 is enhanced compared with the mask strip 20. In this way, most of the evaporation materials that would have been deposited on the mask strip in the evaporation materials that did not pass through the first opening 21 are adsorbed by the mask tray 30, thereby reducing the risk of the film layer deposited on the mask plate assembly during the film formation process peeling off from the mask plate assembly, thereby improving the service life of the mask plate assembly.

[0059] In the embodiment of the present application, by providing the mask tray 30 and designing the surface roughness of the mask tray 30, the contact area between the mask strip 20 and the evaporation material is reduced, and the surface roughness requirement of the mask strip 20 is relatively low, which can reduce the influence of the thickness of the mask strip on the surface roughness of the film-forming surface of the mask strip to a certain extent. In addition, since the thermal expansion coefficients of the mask strip and the evaporation material are different, if the mask strip contacts the evaporation material over a large area, the high temperature can easily cause the mask strip to curl during the film forming process. The embodiment of the present application reduces the contact area between the mask strip 20 and the evaporation material, which can avoid the problem of curling of the mask strip 20 due to different thermal expansion coefficients.

[0060] Optionally, in the embodiment of the present application, the mask strip 20 can be fixedly connected to the frame 10 by a stretching welding process. The mask tray 30 can be detachably fixed to the frame 10 by a connecting component, and the connecting component includes but is not limited to bolts, buckles and other components.

[0061] Optionally, the substrate 200 to be evaporated is a glass substrate.

[0062] Alternatively, if Figure 1 , Figure 3 and Figure 4 As shown, in the embodiment of the present application, there is a preset distance a along a direction parallel to the substrate 200 to be evaporated between the outer contour of the second opening 31 projected on the substrate 200 to be evaporated and the outer contour of the first opening 21 projected on the substrate 200 to be evaporated, and the preset distance a is less than or equal to 1 mm.

[0063] If the preset distance a is greater than 1 mm, the area of ​​the mask strip 20 that is not blocked by the mask tray 30 is relatively large, which is not conducive to reducing the area of ​​the evaporated material deposited on the mask strip 20. The degree of improvement in the adsorption capacity of the mask plate assembly by setting the mask tray 30 is limited, and the degree of reducing the risk of the film layer deposited on the mask plate assembly peeling off the mask plate assembly will be reduced.

[0064] In the embodiment of the present application, the preset distance a is less than or equal to 1 mm, so that the area of ​​the mask strip 20 not blocked by the mask tray 30 is smaller, and the area of ​​the mask strip 20 that can contact the vapor deposition material is smaller. The mask tray 30 can effectively block the mask strip 20, thereby reducing the area of ​​the vapor deposition material deposited on the mask strip 20. The area of ​​the mask tray 30 is larger, and the mask tray 30 has a greater adsorption capacity for the vapor deposition material, thereby effectively reducing the risk of the film layer deposited on the mask plate assembly peeling off from the mask plate assembly during the film formation process.

[0065] It should be noted that, in the embodiment of the present application, the orthographic projection of the second opening 31 on the substrate to be evaporated 200 covers the orthographic projection of the first opening 21 on the substrate to be evaporated 200, including the orthographic projection of the second opening 31 on the substrate to be evaporated 200 coincides with the orthographic projection of the first opening 21 on the substrate to be evaporated 200 (that is, along the direction parallel to the substrate to be evaporated 200, the size of the second opening 31 is the same as the size of the first opening 21, at this time, the preset distance a is equal to 0mm), and the orthographic projection of the second opening 31 on the substrate to be evaporated 200 surrounds the orthographic projection of the first opening 21 on the substrate to be evaporated 200 (that is, along the direction parallel to the substrate to be evaporated 200, the size of the second opening 31 is larger than the size of the first opening 21. At this time, the preset distance a is greater than 0mm).

[0066] In the embodiment of the present application, the size of the preset distance a is determined by the processing accuracy of the mask strip 20 and the processing and assembly accuracy of the mask tray 30 .

[0067] Alternatively, if Figure 4As shown, in the embodiment of the present application, there is a gap 41 between the mask tray 30 and the mask strip 20, and along a direction perpendicular to the substrate 200 to be evaporated, a size b of the gap 41 is greater than or equal to 0 mm and less than or equal to 0.5 mm.

[0068] If the size b of the gap 41 is greater than 0.5 mm, the size of the gap 41 is larger along the direction perpendicular to the substrate 200 to be evaporated. In this way, during the film forming process, the evaporation material can easily enter the gap 41 and contact the mask strip 20, resulting in an increase in the contact area between the evaporation material and the mask strip 20. The film layer deposited on the mask strip 20 still has a greater risk of peeling off.

[0069] In the embodiment of the present application, the size b of the gap 41 is greater than or equal to 0 mm and less than or equal to 0.5 mm. Along the direction perpendicular to the substrate 200 to be evaporated, the size of the gap 41 is small, and the evaporated material is not easy to enter the gap 41 between the mask tray 30 and the mask strip 20, which can reduce the contact area between the mask strip 20 and the evaporated material, so that most of the evaporated material that does not pass through the first opening 21 is deposited on the mask tray 30, reducing the risk of peeling.

[0070] Alternatively, if Figure 3 As shown, in the embodiment of the present application, the mask strip 20 includes a first connecting portion 22 and a mask portion 23 connected to each other, the first connecting portion 22 is connected to the frame 10, the mask portion 23 defines a first opening 21, and the first connecting portion 22 is located on a side of the mask portion 23 away from the first opening 21.

[0071] In the embodiment of the present application, the mask portion 23 is connected to the first connection portion 22, and the first connection portion 22 is connected to the frame 10, so as to achieve the purpose of installing the mask strip 20 to the frame 10. The mask portion 23 defines a first opening 21, and the shape and size of the first opening 21 define the shape and size of the pattern formed on the substrate 200 to be evaporated.

[0072] Optionally, in the embodiment of the present application, the first connection portion 22 is welded to the frame 10. Optionally, the first connection portion 22 can be welded to the frame 10 by a stretching welding process.

[0073] Alternatively, if Figure 3 As shown, in the embodiment of the present application, the mask tray 30 includes a second connecting portion 32 and a shielding portion 33 connected to each other, the second connecting portion 32 is connected to the frame 10, the shielding portion 33 defines a second opening 31, and the second connecting portion 32 is located on a side of the shielding portion 33 away from the second opening 31.

[0074] In the embodiment of the present application, the shielding portion 33 is connected to the second connecting portion 32, and the second connecting portion 32 is connected to the frame 10, so as to achieve the purpose of installing the mask tray 30 to the frame 10. The shielding portion 33 is used to shield the mask strip 20. The shielding portion 33 defines a second opening 31, and the second opening 31 avoids the evaporation material, so that the evaporation material passes through the second opening 31 and then evaporates onto the substrate to be evaporated 200 through the first opening 21 to form a desired pattern.

[0075] Alternatively, if Figure 1 and Figure 3 As shown, in the embodiment of the present application, the second connection part 32 is detachably connected to the frame 10. Optionally, the second connection part 32 can be detachably connected to the frame 10 by bolts, buckles, etc.

[0076] Alternatively, if Figure 3 and Figure 4 As shown, in the embodiment of the present application, the shielding portion 33 shields at least a portion of the mask portion 23 , and a gap 41 is provided between the shielding portion 33 and the mask portion 23 .

[0077] In the embodiment of the present application, the shielding portion 33 shields at least a portion of the mask portion 23, which can reduce the contact area between the mask portion 23 and the vapor deposition material; there is a gap 41 between the shielding portion 33 and the mask portion 23, and along the direction perpendicular to the substrate 200 to be vapor deposited, the size of the gap 41 satisfies the relationship between the above-mentioned size b, that is, greater than or equal to 0 mm and less than or equal to 0.5 mm.

[0078] Alternatively, if Figure 3 As shown, in the embodiment of the present application, the surface of the first connecting portion 22 facing the frame 10 is flush with the surface of the mask portion 23 facing the frame 10; the shielding portion 33 and the second connecting portion 32 both have a first side facing the mask strip 20, and along a direction perpendicular to the substrate 200 to be evaporated, the surface of the first side 331 of the shielding portion protrudes toward the side close to the mask strip 20 relative to the surface of the first side 321 of the second connecting portion.

[0079] In the embodiment of the present application, the surface of the first connecting portion 22 facing the frame 10 is flush with the surface of the mask portion 23 facing the frame 10, that is, the surface of the mask strip 20 facing the frame 10 is a plane, and along a direction perpendicular to the substrate 200 to be evaporated, the surface of the first side 331 of the shielding portion protrudes toward the side close to the mask strip 20 relative to the surface of the first side 321 of the second connecting portion, so that there is a gap 41 between the shielding portion 33 and the mask portion 23.

[0080] Alternatively, if Figure 1 and Figure 3As shown, in the embodiment of the present application, the shielding portion 33 and the second connecting portion 32 both have a second side facing the evaporation source 300 , and the surface roughness of the second side 332 of the shielding portion and the surface roughness of the second side 322 of the second connecting portion are both greater than the surface roughness of the mask strip 20 .

[0081] In the embodiment of the present application, the second side 332 of the shielding portion and the second side 322 of the second connecting portion are both facing the evaporation source 300. When the evaporation source 300 sprays the evaporation material, since the surface roughness of the second side 332 of the shielding portion and the surface roughness of the second side 322 of the second connecting portion are greater than the surface roughness of the mask strip 20, the adsorption capacity of the second side 332 of the shielding portion and the second side 322 of the second connecting portion for the evaporation material is greater than the adsorption capacity of the mask strip 20. The second side 332 of the shielding portion and the second side 322 of the second connecting portion can adsorb more evaporation material and provide more effective adsorption relative to the mask strip 20, thereby preventing the film layer from peeling off.

[0082] Alternatively, if Figure 3 and Figure 4 As shown, in the embodiment of the present application, there is a first preset angle c between the surface of the second side 332 of the shielding portion and the preset plane L, there is a second preset angle between the surface of the second side 322 of the second connecting portion and the preset plane L, the first preset angle c and the second preset angle are both greater than or equal to 0° and less than or equal to 90°, and the second preset angle is less than or equal to the first preset angle c; wherein the preset plane L is parallel to the substrate 200 to be evaporated.

[0083] In actual production, the evaporation source 300 may be arranged along Figure 1 Any position in the left or right direction (for example, Figure 1 A plurality of evaporation sources 300 are arranged below the middle mask plate assembly 100. Figure 1 In order to allow the evaporation material sprayed by the evaporation source 300 to pass through the first opening 21 smoothly, in the embodiment of the present application, the first preset angle c and the second preset angle are both set to be greater than or equal to 0° and less than or equal to 90°, and the second preset angle is less than or equal to the first preset angle c. Through this arrangement, it is convenient for the evaporation material sprayed by the evaporation source 300 to pass through the first opening 21 to form a required pattern on the substrate 200 to be evaporated. The surface of the second side 322 of the second connecting part and the surface of the second side 332 of the shielding part can cooperate to guide the evaporation material.

[0084] Alternatively, if Figure 3 and Figure 4 As shown, in the embodiment of the present application, the surface of the second side 322 of the second connecting portion is parallel to the substrate 200 to be evaporated, and the surface of the second side 332 of the shielding portion close to the second opening 31 is arranged at an acute angle to the preset plane L.

[0085] In the embodiment of the present application, the surface of the second side 322 of the second connecting portion and the partial surface of the second side 332 of the shielding portion close to the second connecting portion are both parallel to the substrate 200 to be evaporated, the partial surface of the second side 332 of the shielding portion close to the second opening 31 is set at an acute angle to the preset plane L, and the partial surface of the second side 332 of the shielding portion close to the second opening 31 is inclined. The inclined surface will not block the evaporated material sprayed from the periphery, but will also play a certain guiding role, thereby facilitating the evaporated material to pass through the first opening 21.

[0086] Optionally, in the embodiment of the present application, the surface roughness of the second side 322 of the second connection portion is the same as the surface roughness of the second side 332 of the shielding portion. This arrangement can simplify the process and facilitate operation.

[0087] Of course, in some optional embodiments of the present application, the surface roughness of the second side 322 of the second connecting portion can be different from the surface roughness of the second side 332 of the shielding portion according to actual needs, as long as the surface roughness of the second side 332 of the shielding portion and the surface roughness of the second side 322 of the second connecting portion are both greater than the surface roughness of the mask strip 20.

[0088] Alternatively, if Figure 5 and Figure 6 As shown, the mask plate assembly 100 of the embodiment of the present application includes a plurality of mask strips 20 and a plurality of mask trays 30, wherein the first openings 21 of at least two of the plurality of mask strips 20 have different shapes and / or sizes, and the second openings 31 of at least two of the plurality of mask trays 30 have different shapes and / or sizes.

[0089] Optionally, in the embodiment of the present application, the shapes and / or sizes of the first openings 21 of the plurality of mask strips 20 are different. The shapes and / or sizes of the second openings 31 of the plurality of mask trays 30 are different.

[0090] Optionally, in an embodiment of the present application, the second opening 31 of each mask tray 30 is arranged corresponding to the first opening 21 of at least one mask strip 20; the frame 10 is selectively connected to a mask tray 30 among the multiple mask trays 30 and at least one mask strip 20 corresponding to the mask tray 30.

[0091] Optionally, in the embodiment of the present application, the second openings 31 of the plurality of mask trays 30 are arranged in a one-to-one correspondence with the first openings 21 of the plurality of mask strips 20 .

[0092] In the embodiment of the present application, the frame 10 is selectively connected to a mask tray 30 among a plurality of mask trays 30 and at least one mask strip 20 corresponding to the mask tray 30, that is, the frame 10 can be connected to different mask trays 30 and the corresponding mask strips 20, can be adapted to products of different sizes, and can produce patterns of different shapes and sizes, thereby improving adaptability, reducing the material used, lowering the requirements for processing accuracy, and reducing costs.

[0093] Optionally, in the embodiment of the present application, the specific shape and size of the second openings 31 of the plurality of mask trays 30 may be determined by the shape and size of the product and may be changed according to the shape and size of the product. Compared with the technology of directly modifying the frame, the mask tray 30 in the form of MMG (Multi Model Group) provided in the embodiment of the present application uses less material, has lower processing precision requirements, and can reduce costs.

[0094] Alternatively, if Figure 3 As shown, in the embodiment of the present application, the frame 10 includes: a first frame body 11, a third connecting portion 13 and a second frame body 14, the first frame body 11 has a first side and a second side opposite to each other, the mask strip 20 is installed on the first side of the first frame body 11, the mask tray 30 is installed on the second side of the first frame body 11, the first frame body 11 defines a third opening 12, and the orthographic projection of the second opening 31 on the substrate to be evaporated 200 is located within the orthographic projection of the third opening 12 on the substrate to be evaporated 200; one end of the third connecting portion 13 is connected to the second side of the first frame body 11 and is located at an end away from the third opening 12; the second frame body 14 is connected to the other end of the third connecting portion 13, and extends in a direction away from the third opening 12 relative to the third connecting portion 13.

[0095] In the embodiment of the present application, the mask strip 20 and the mask tray 30 are both mounted on the first frame body 11, and the first frame body 11 supports both the mask strip 20 and the mask tray 30. The first frame body 11 defines a third opening 12, and the orthographic projection of the second opening 31 on the substrate to be evaporated 200 is located within the orthographic projection of the third opening 12 on the substrate to be evaporated 200. The third opening 12 avoids the evaporation material, so that the evaporation material can form a desired pattern on the substrate to be evaporated 200 after passing through the first opening 21.

[0096] In the embodiment of the present application, the first frame body 11, the third connecting portion 13 and the second frame body 14 are sequentially connected to form a "Z"-shaped structure.

[0097] Alternatively, if Figure 1 and Figure 3As shown, in the embodiment of the present application, the orthographic projection of the mask portion 23 on the substrate to be evaporated 200 is located within the orthographic projection of the third opening 12 on the substrate to be evaporated 200; the orthographic projection of the blocking portion 33 on the substrate to be evaporated 200 is located within the orthographic projection of the third opening 12 on the substrate to be evaporated 200.

[0098] Alternatively, if Figure 2 , Figure 3 , Figure 5 and Figure 6 As shown, in the embodiment of the present application, the second connection part 32 is detachably connected to the first frame body 11. Optionally, the second connection part 32 is provided with a first mounting hole 323, and the first frame body 11 is provided with a second mounting hole 111. The first mounting hole 323 and the second mounting hole 111 overlap in their orthographic projections on the substrate to be evaporated 200, and the second connection part 32 can be detachably connected to the first frame body 11 by bolts in cooperation with the first mounting hole 323 and the second mounting hole 111.

[0099] Alternatively, if Figure 3 As shown, in the embodiment of the present application, the second frame body 14 has a first side and a second side relative to each other, the first side of the second frame body 14 faces the substrate 200 to be evaporated, and the second side of the second frame body 14 is away from the substrate 200 to be evaporated and faces the side where the evaporation source 300 is located.

[0100] The embodiment of the present application provides a mask plate assembly, which can reduce the risk of a film layer peeling off from the mask plate assembly during the film forming process by providing a mask tray, thereby increasing the service life.

[0101] The mask plate assembly of the embodiment of the present application can be applied to the OLED film forming process, and can be further applied to large-size (such as 55 inches) transparent OLED productization projects, and can be further applied to the EL mask process of the OLED light-emitting element.

[0102] Based on the same inventive concept, an evaporation device provided in an embodiment of the present application has a structural framework schematic diagram of the evaporation device 1000 as shown in FIG. Figure 1 As shown, it includes: an evaporation source 300 and the above-mentioned mask plate assembly 100; the evaporation source 300 is arranged on the side of the mask tray 30 of the mask plate assembly 100 away from the mask strip 20; the orthographic projection of the spray range of the evaporation source 300 on the substrate to be evaporated 200 overlaps with the orthographic projection of the first opening 21 of the mask strip 20 on the substrate to be evaporated 200.

[0103] In the embodiment of the present application, during the process of forming a film on the substrate 200 to be evaporated using the evaporation device 1000, the evaporation source 300 sprays the evaporation material, and the evaporation material passes through the second opening 31 of the mask tray 30 of the mask plate assembly 100 and the first opening 21 of the mask bar 20 in sequence, and then sprays to the evaporation area of ​​the substrate 200 to be evaporated, forming a required pattern on the substrate 200 to be evaporated, and the shape and size of the first opening 21 define the shape and size of the pattern formed on the substrate 200 to be evaporated. The mask tray 30 plays a role in shielding the evaporation material from being sprayed onto the mask bar 20, so that the contact area between the mask bar 20 and the evaporation material is reduced, and the surface roughness of at least the side of the mask tray 30 facing the evaporation source 300 is greater than the surface roughness of the mask bar 20, so that the adsorption capacity of the mask tray 30 for the evaporation material is greater than the adsorption capacity of the mask bar 20, thereby reducing the risk of the film layer deposited on the mask plate assembly 100 from peeling off from the mask plate assembly 100 during the film formation process.

[0104] In some optional embodiments of the present application, the evaporation device 1000 may include a plurality of evaporation sources 300, and the plurality of evaporation sources 300 are arranged along Figure 1 The left-right direction is sequentially arranged at intervals below the mask plate assembly 100 .

[0105] Optionally, the evaporation source 300 may be a crucible or the like.

[0106] Optionally, the evaporation material can be a sputtering film quality, an evaporation film quality, etc.

[0107] It should be noted that, since the evaporation device 1000 in the embodiment of the present application includes the mask plate assembly 100 in the embodiment of the present application, the evaporation device 1000 in the embodiment of the present application also has the above-mentioned beneficial effects of the mask plate assembly 100 in the embodiment of the present application, which will not be repeated here.

[0108] By applying the embodiments of the present application, at least the following beneficial effects can be achieved:

[0109] In the embodiment of the present application, the mask strip and the mask tray are both arranged on the frame, and the frame supports the mask strip and the mask tray. The mask strip is located on the side of the frame facing the substrate to be evaporated, and the mask strip has a first opening, and the orthographic projection of the first opening on the substrate to be evaporated coincides with the area to be evaporated of the substrate to be evaporated, and the mask tray is located on the side of the mask strip facing the evaporation source, and the mask tray has a second opening, and the orthographic projection of the second opening on the substrate to be evaporated covers the orthographic projection of the first opening on the substrate to be evaporated, and in the process of forming a film on the substrate to be evaporated using the mask plate assembly, the evaporation source sprays the evaporation material, and the evaporation material passes through the second opening and the first opening in sequence, and then is sprayed to the area to be evaporated of the substrate to be evaporated, forming the required pattern on the substrate to be evaporated, and the shape and size of the first opening define the shape and size of the pattern formed on the substrate to be evaporated.

[0110] In an embodiment of the present application, the mask tray blocks at least a portion of the mask strip, and the evaporation material sprayed by the evaporation source (the evaporation material that has not passed through the first opening) will be deposited on the mask tray. The mask tray plays a role in shielding the evaporation material to prevent it from being sprayed onto the mask strip. Due to the shielding effect of the mask tray, the contact area between the mask strip and the evaporation material is reduced, thereby reducing the area of ​​the evaporation material deposited on the mask strip, and can even prevent the evaporation material from being deposited on the mask strip; and, the surface roughness of at least the side of the mask tray facing the evaporation source is greater than the surface roughness of the mask strip, so that the adsorption capacity of the mask tray for the evaporation material is greater than the adsorption capacity of the mask strip. By setting the mask tray, the adsorption capacity of the mask plate assembly for the evaporation material can be improved, thereby reducing the risk of the film layer deposited on the mask plate assembly during the film forming process from peeling off the mask plate assembly, extending the service life of the mask plate assembly, and improving the service life of the mask plate assembly.

[0111] Those skilled in the art will appreciate that the various operations, methods, steps, measures, and schemes in the processes discussed in this application may be alternated, altered, combined, or deleted. Further, other steps, measures, and schemes in the various operations, methods, and processes discussed in this application may also be alternated, altered, rearranged, decomposed, combined, or deleted. Further, the steps, measures, and schemes in the prior art that are similar to those disclosed in this application may also be alternated, altered, rearranged, decomposed, combined, or deleted.

[0112] In the description of the present application, the directions or positional relationships indicated by words such as "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the exemplary directions or positional relationships shown in the accompanying drawings. They are for the convenience of describing or simplifying the description of the embodiments of the present application, and do not indicate or imply that the referred device or component must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present application.

[0113] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0114] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0115] In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0116] The above is only a partial implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, without departing from the technical concept of the scheme of the present application, other similar implementation methods based on the technical ideas of the present application are also within the protection scope of the embodiments of the present application.

Claims

1. A mask plate assembly, characterized in that: include: frame; A mask strip is arranged on the frame and is located on a side of the frame facing the substrate to be evaporated, the mask strip has a first opening, and the orthographic projection of the first opening on the substrate to be evaporated coincides with the area to be evaporated of the substrate to be evaporated; A mask tray is arranged on the frame and is located on a side of the mask strip facing the evaporation source, the mask tray shields at least a portion of the mask strip, and the mask tray has a second opening, and the orthographic projection of the second opening on the substrate to be evaporated covers the orthographic projection of the first opening on the substrate to be evaporated; Wherein: the surface roughness of at least one side of the mask tray facing the evaporation source is greater than the surface roughness of the mask strip; The mask strip comprises a first connecting portion and a mask portion connected to each other, the first connecting portion is connected to the frame, the mask portion defines the first opening, and the first connecting portion is located on a side of the mask portion away from the first opening; The mask tray comprises a second connecting portion and a shielding portion connected to each other, the second connecting portion is connected to the frame, the shielding portion defines the second opening, and the second connecting portion is located on a side of the shielding portion away from the second opening; The shielding portion shields at least a portion of the mask portion, and a gap is provided between the shielding portion and the mask portion.

2. The mask assembly according to claim 1, characterized in that: There is a preset distance along a direction parallel to the substrate to be evaporated between the outer contour of the orthographic projection of the second opening on the substrate to be evaporated and the outer contour of the orthographic projection of the first opening on the substrate to be evaporated, and the preset distance is less than or equal to 1 mm.

3. The mask assembly according to claim 1, characterized in that: There is a gap between the mask tray and the mask strip, and along a direction perpendicular to the substrate to be evaporated, a size of the gap is greater than or equal to 0 mm and less than or equal to 0.5 mm.

4. The mask assembly according to claim 1, characterized in that: The surface of the first connecting portion facing the frame is flush with the surface of the mask portion facing the frame; The shielding portion and the second connecting portion both have a first side facing the mask strip, and along a direction perpendicular to the substrate to be evaporated, a surface of the first side of the shielding portion protrudes toward a side close to the mask strip relative to a surface of the first side of the second connecting portion.

5. The mask assembly according to claim 1, characterized in that: The shielding portion and the second connecting portion both have a second side facing the evaporation source, and the surface roughness of the second side of the shielding portion and the surface roughness of the second side of the second connecting portion are both greater than the surface roughness of the mask strip; A first preset angle is formed between the surface of the second side of the shielding portion and the preset plane, a second preset angle is formed between the surface of the second side of the second connecting portion and the preset plane, the first preset angle and the second preset angle are both greater than or equal to 0° and less than or equal to 90°, and the second preset angle is less than or equal to the first preset angle; wherein the preset plane is parallel to the substrate to be evaporated.

6. The mask assembly according to claim 5, characterized in that: The surface of the second side of the second connecting portion is parallel to the substrate to be evaporated, and a portion of the surface of the second side of the shielding portion close to the second opening is arranged at an acute angle to a preset plane; and / or, The surface roughness of the second side of the second connecting portion is the same as the surface roughness of the second side of the shielding portion.

7. The mask plate assembly according to any one of claims 1 to 3, characterized in that: The mask plate assembly comprises a plurality of mask strips and a plurality of mask trays, wherein the first openings of at least two of the plurality of mask strips have different shapes and / or sizes, and the second openings of at least two of the plurality of mask trays have different shapes and / or sizes; The second opening of each mask tray is arranged corresponding to the first opening of at least one mask strip; The frame is selectively connected to one of the plurality of mask trays and at least one mask strip corresponding to the mask tray.

8. The mask plate assembly according to any one of claims 1 to 3, characterized in that: The framework includes: A first frame body has a first side and a second side opposite to each other, the mask strip is mounted on the first side of the first frame body, the mask tray is mounted on the second side of the first frame body, the first frame body defines a third opening, and an orthographic projection of the second opening on the substrate to be evaporated is located within an orthographic projection of the third opening on the substrate to be evaporated; a third connecting portion, one end of which is connected to the second side of the first frame body and is located at an end away from the third opening; The second frame body is connected to the other end of the third connection portion and extends relative to the third connection portion in a direction away from the third opening.

9. A vapor deposition device, characterized in that: include: Evaporation source; The mask plate assembly according to any one of claims 1 to 8; The evaporation source is arranged on a side of the mask tray of the mask plate assembly away from the mask strip; The orthographic projection of the spray range of the evaporation source on the substrate to be evaporated overlaps with the orthographic projection of the first opening of the mask strip on the substrate to be evaporated.

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