A four-axis linkage laser processing method

Abstract

The present invention provides a four-axis linkage laser processing method. The laser processing method is based on the joint motion of a galvanometer axis and a lead screw axis. The laser processing method includes the following steps: inputting a laser processing path to obtain a fitting path; inputting a width to be processed by the galvanometer axis, and obtaining a motion path of the lead screw axis based on the width to be processed by the galvanometer axis and the fitting path; obtaining a motion speed of the lead screw axis based on the fitting path and the motion path of the lead screw axis, and adjusting the motion state of the lead screw axis; obtaining the motion state of the lead screw axis, and predicting a processing error based on the motion state of the lead screw axis, and correcting the motion state of the lead screw axis and the motion speed of the galvanometer axis. The present invention solves the technical problem of low processing efficiency in current large-scale laser galvanometer scanning marking, realizes continuous large-scale processing without splicing, ensures that the width to be processed is always within the width processed by the galvanometer, and improves the technical effect of processing efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of laser processing, and in particular to a four-axis linkage laser processing method. Background Art

[0002] Laser marking technology is one of the largest application areas of laser processing. Laser marking is a marking method that uses high-energy-density lasers to locally irradiate a workpiece, causing the surface material to vaporize or undergo a chemical reaction that changes color, thereby leaving a permanent mark. For example, there are two types of traditional laser galvanometer scanning marking technology:

[0003] The first type: laser processing with only a galvanometer and no platform movement. This type of laser processing has a small processing range and cannot process large areas.

[0004] The second type: The platform can move on the XY axis, and the galvanometer jointly controls the laser processing, but there is no linkage between the platform and the galvanometer. In this type of laser processing, there are splicing marks at the connection points of the two ranges of the galvanometer, the precision is low, the processing efficiency is slow, and the product quality is reduced.

[0005] The existing problem is that the current large-format laser galvanometer scanning marking has low processing efficiency. Summary of the Invention

[0006] The present invention solves the technical problem of low processing efficiency in current large-format laser galvanometer scanning marking, realizes continuous large-format processing without splicing, ensures that the format to be processed is always within the format processed by the galvanometer, and improves the technical effect of processing efficiency.

[0007] To solve the above problems, the present invention provides a four-axis linkage laser processing method. The laser processing method is based on the joint movement of a galvanometer shaft and a lead screw shaft. The laser processing method includes the following steps: inputting a laser processing path to obtain a fitting path; inputting a width processed by the galvanometer shaft, and obtaining a motion path of the lead screw shaft according to the width processed by the galvanometer shaft and the fitting path; obtaining a motion speed of the lead screw shaft according to the fitting path and the motion path of the lead screw shaft, and adjusting the motion state of the lead screw shaft; obtaining the motion state of the lead screw shaft, predicting a processing error according to the motion state of the lead screw shaft, and correcting the motion state of the lead screw shaft and the motion speed of the galvanometer shaft.

[0008] In one embodiment of the present invention, a laser processing path is input to obtain a fitting path, which includes the following steps: inputting the laser processing path; obtaining a single path based on the laser processing path; reading discrete points based on the single path; extracting curvature advantage points as control points based on the discrete points, and optimizing the selection of control points through a particle swarm algorithm to perform curve fitting to obtain a fitting path.

[0009] In one embodiment of the present invention, the curve fitting is performed using Pythagorean-Hodograph curve fitting.

[0010] In one example of the present invention, the motion path of the screw shaft is obtained according to the processing width and fitting path of the galvanometer shaft, including the following steps: judging whether the processing width of the galvanometer shaft is larger than the fitting path according to the processing width and fitting path of the galvanometer shaft, and obtaining a judgment result; processing the fitting path according to the judgment result; traversing the fitting path, judging whether the galvanometer processing radius is larger than the minimum radius on the fitting path, and if the judgment result is yes, generating the necessary area for the screw shaft; and obtaining the motion path of the screw shaft according to the necessary area.

[0011] In one example of the present invention, the fitting path is processed according to the judgment result, including the following steps: if the judgment result is yes, a minimum circle covering the fitting path is generated, and the screw shaft stays at the origin; if the judgment result is no, equidistant lines are generated on both sides of the fitting path, and the equidistant lines on both sides are connected to generate a feasible space for the path.

[0012] In one embodiment of the present invention, the area that the screw shaft must pass through is generated, including the following steps: an equidistant line forms a sharp angle at a position where the galvanometer processing radius is greater than the minimum radius on the fitting path, an arc is extracted, and an inward perpendicular line is made to both ends of the arc to form a fan-shaped area, which is the area that the screw shaft must pass through.

[0013] In one example of the present invention, the motion path of the screw shaft is obtained according to the must-pass area, including the following steps: according to the must-pass area, the RRT algorithm is used to find the shortest path between the starting point and the end point, the starting point and the end point form an inward-concave semicircle clipping path, the inward-concave semicircle clipping path is optimized to form a local path for the screw shaft to move, the length of each local path is calculated, and the A* algorithm is used to find the global shortest path to obtain the motion path of the screw shaft.

[0014] In one example of the present invention, the movement speed of the screw shaft is obtained according to the fitting path and the movement path of the screw shaft, and the movement state of the screw shaft is adjusted, including the following steps: dividing the movement path of the screw shaft into equidistant lengths and arranging the corresponding serial numbers to obtain the path of the equidistant movement of the screw shaft, and identifying the length of the path required for laser processing in the path of the equidistant movement of the screw shaft; reading the movement speed of the galvanometer shaft, and calculating the movement time of the galvanometer shaft in each equidistant length according to the length of the path required for laser processing; calculating the speed of each section of the equidistant movement of the screw shaft according to the path of the equidistant movement of the screw shaft and the movement time of the galvanometer shaft; adjusting the movement speed of the screw shaft according to the speed of each section of the equidistant movement of the screw shaft.

[0015] In one embodiment of the present invention, the movement speed of the screw shaft is adjusted according to the speed of the equidistant movement of each section of the screw shaft, including the following steps: according to the speed of the equidistant movement of each section of the screw shaft, the movement speed of the galvanometer shaft is obtained by subtracting the movement vector of the screw shaft from the velocity vector of the galvanometer shaft, and the screw shaft moves at different speeds of the equidistant movement; the new movement displacement vector of the galvanometer shaft is obtained by subtracting the displacement vector of the screw shaft from the displacement vector of the galvanometer shaft, and the screw shaft moves according to the movement path and movement speed of the screw shaft.

[0016] In one example of the present invention, the motion state of the screw shaft is obtained, the processing error is predicted based on the motion state of the screw shaft, and the motion state of the screw shaft and the motion speed of the galvanometer shaft are corrected, including the following steps: reading the motion state of the screw shaft in real time through a sensor to obtain the actual motion state of the screw shaft; detecting whether the positioning of the screw shaft is oscillating based on the actual motion state, and if oscillation occurs, performing Kalman filtering on the screw shaft to predict the processing error and obtain the predicted motion state of the screw shaft; comparing the predicted motion state and the actual motion state to obtain a comparison result; correcting the motion state of the screw shaft based on the comparison result to obtain the corrected motion state of the screw shaft; and correcting the motion speed of the galvanometer shaft based on the corrected motion state.

[0017] After adopting the technical solution of the present invention, the following technical effects can be achieved: the laser processing method provided by the present invention first imports the laser processing path according to the processing requirements, and then uses the processing path to convert into a computable curve algorithm to convert the laser processing path into a curve that can be calculated by a formula, and then uses the screw shaft path planning algorithm to plan the shortest moving path of the screw shaft, and then uses the screw shaft motion speed algorithm to calculate the screw shaft speed, and then uses the galvanometer shaft and screw shaft motion coupling algorithm to calculate the motion speed and displacement of the galvanometer shaft, and the screw shaft motion correction algorithm closes the operation to adjust and correct the galvanometer shaft speed, and finally completes the processing, which can achieve large-scale, high-precision and high-efficiency laser processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic flow chart of a four-axis linkage laser processing method provided in an embodiment of the present invention.

[0019] Figure 2 Schematic diagram of the algorithm for converting a processing path into a computable curve provided by an embodiment of the present invention Figure 1 .

[0020] Figure 3 Schematic diagram of the algorithm for converting a processing path into a computable curve provided by an embodiment of the present invention Figure 2 .

[0021] Figure 4 Schematic diagram of the screw shaft path planning algorithm provided by an embodiment of the present invention.

[0022] Figure 5 This is a schematic diagram of the algorithm for the screw shaft motion speed algorithm provided by an embodiment of the present invention.

[0023] Figure 6 Schematic diagram of the motion coupling algorithm of the galvanometer axis and the lead screw axis provided in an embodiment of the present invention.

[0024] Figure 7 This is a schematic diagram of the algorithm for the screw shaft motion correction algorithm provided by an embodiment of the present invention.

[0025] Figure 8 This is an overall algorithm flow chart of the laser processing method provided by an embodiment of the present invention.

[0026] Description of reference numerals:

[0027] 1-Discrete point; 2-Control point; 3-Computable laser processing path; 4-Fitting path; 5-Minimum circle; 6-Path feasible space; 7-Area that the lead screw axis must pass through; 8-Concave semicircle clipping path; 9-Local path of lead screw axis movement; 10-Motion path of lead screw axis; 11-Galvanometer axis displacement vector; 12-Lead screw axis displacement vector; 13-New galvanometer axis motion displacement vector; 15-Galvanometer scanning range. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below.

[0029] Example 1:

[0030] See also Figures 1 to 8 The present invention provides a four-axis linkage laser processing method, the laser processing method is based on the joint movement of the galvanometer axis and the screw axis, and the laser processing method includes the following steps:

[0031] S10: Input the laser processing path to obtain the fitting path 4;

[0032] S20: Input the processing width of the galvanometer axis, and obtain the motion path of the screw shaft according to the processing width of the galvanometer axis and the fitting path 4;

[0033] S30: Obtaining the movement speed of the screw shaft according to the fitting path 4 and the movement path of the screw shaft, and adjusting the movement state of the screw shaft;

[0034] S40: Obtain the motion state of the screw shaft, predict the machining error according to the motion state of the screw shaft, and correct the motion state of the screw shaft and the motion speed of the galvanometer shaft.

[0035] Specifically, the laser processing method provided by the present invention utilizes the combined motion of a galvanometer and lead screw axes to achieve continuous, seamless large-scale processing, ensuring that the surface to be processed remains within the galvanometer processing area. This method addresses the issues of a small processing range and the presence of splicing marks during processing through a laser processing algorithm. This algorithm includes algorithms for converting the processing path into a computable curve, a lead screw axis motion path planning algorithm, a galvanometer axis motion path planning algorithm, a galvanometer and lead screw axis path coupling algorithm, a galvanometer and lead screw axis motion speed algorithm, and a simulation error and path correction algorithm.

[0036] Furthermore, the laser processing path is input to obtain the fitting path 4, which includes the following steps:

[0037] Input the laser processing path; obtain a single path according to the laser processing path;

[0038] According to a single path, read discrete point 1;

[0039] According to discrete point 1, the curvature advantage point is extracted as the control point, and the selection of control point 2 is optimized by particle swarm algorithm to perform curve fitting and obtain fitting path 4.

[0040] Specifically, the laser processing path is converted into a curve that can be calculated using a formula to facilitate subsequent adjustments to the processing path.

[0041] Furthermore, the curve fitting is performed using Pythagorean-Hodograph curve fitting.

[0042] Specifically, the PH curve, also known as the Pythagorean-hodograph curve, has unique advantages, such as precise arc length and equidistant line representation, that is, when they are polynomial or rational parametric curves, the corresponding arc length functions, equidistant lines, etc. are also polynomial or rational; for the interpolation of discrete data, the PH curve often produces a smoother trajectory than the classical polynomial curve, the obtained curve has a relatively uniform curvature distribution, and its bending energy can be accurately calculated.

[0043] Furthermore, according to the processing width of the galvanometer axis and the fitting path 4, the motion path of the screw shaft is obtained, which includes the following steps:

[0044] According to the width of the galvanometer axis processing and the fitting path 4, it is judged whether the width of the galvanometer axis processing is larger than the fitting path 4, and a judgment result is obtained;

[0045] According to the judgment result, the fitting path 4 is processed;

[0046] Traverse the fitting path and determine whether the galvanometer processing radius is greater than the minimum radius R on the fitting path 4. If the judgment result is yes, generate the area 7 that the screw shaft must pass through;

[0047] According to the necessary area 7, the movement path of the screw shaft is obtained.

[0048] Specifically, the galvanometer processing with a smaller range uses the movement of the lead screw shaft to scan the entire laser processing path, and plans the shortest path of the lead screw shaft movement, thereby accelerating the laser processing efficiency and completing large-scale processing.

[0049] Furthermore, according to the judgment result, the fitting path 4 is processed, including the following steps:

[0050] If the judgment result is yes, a minimum circle 5 is generated to cover the fitting path 4, and the screw shaft stays at the origin;

[0051] If the judgment result is no, equidistant lines are generated on both sides of the fitting path 4, and the equidistant lines on both sides are connected to generate a path feasible space 6.

[0052] Furthermore, generating the area 7 that the screw shaft must pass through includes the following steps:

[0053] The equidistant line forms a sharp angle at the point where the galvanometer processing radius is greater than the minimum radius on the fitting path 4. The arc is extracted, and an inverted line is drawn to both ends of the arc to form a fan-shaped area. The fan-shaped area is the area 7 that the screw shaft must pass through.

[0054] Furthermore, according to the necessary area 7, the motion path of the screw shaft is obtained, which includes the following steps:

[0055] According to the must-pass area 7, the RRT algorithm is used to find the shortest path between the starting point and the end point. The starting point and the end point form an inward concave semicircular clipping path 8. The inward concave semicircular clipping path 8 is optimized to form a local path 9 for the movement of the screw shaft. The length of each local path 9 is calculated, and the A* algorithm is used to find the global shortest path to obtain the movement path 10 of the screw shaft.

[0056] Specifically, the RRT algorithm is a sampling-based algorithm that expands from a starting point. It samples random points in space using a random function, then uses a node expansion strategy to find new nodes. Collision detection determines whether to add the new node to the random tree. After multiple explorations and expansions, the target point is finally added to the random tree, successfully finding a path. The A* algorithm (A-Star) is the most effective direct search method for finding the shortest path in static road networks.

[0057] Furthermore, according to the fitting path 4 and the motion path 10 of the screw shaft, the motion speed of the screw shaft is obtained, and the motion state of the screw shaft is adjusted, including the following steps:

[0058] Divide the motion path of the screw shaft into equidistant lengths and arrange the corresponding serial numbers to obtain the equidistant motion path of the screw shaft and identify the length of the path required for laser processing in the equidistant motion path of the screw shaft;

[0059] Read the movement speed of the galvanometer axis and calculate the movement time of the galvanometer axis at each equidistant length according to the length of the path required for laser processing;

[0060] According to the path of the screw shaft's equidistant motion and the time of the galvanometer shaft's motion, the speed of each section of the screw shaft's equidistant motion is calculated;

[0061] Adjust the movement speed of the screw shaft according to the speed of equidistant movement of each section of the screw shaft.

[0062] Furthermore, adjusting the movement speed of the screw shaft according to the speed of the equidistant movement of each section of the screw shaft comprises the following steps:

[0063] According to the speed of the equidistant motion of each section of the screw shaft, the motion vector of the screw shaft is subtracted from the velocity vector of the galvanometer shaft to obtain the motion speed of the galvanometer shaft. The screw shaft moves at different speeds according to the equidistant motion;

[0064] By subtracting the displacement vector 12 of the lead screw shaft from the displacement vector 11 of the galvanometer shaft, a new motion displacement vector 13 of the galvanometer shaft is obtained, and the lead screw shaft moves according to the motion path and motion speed of the lead screw shaft.

[0065] Furthermore, the motion state of the screw shaft is obtained, and according to the motion state of the screw shaft, the machining error is predicted, and the motion state of the screw shaft and the motion speed of the galvanometer shaft are corrected, including the following steps:

[0066] The motion state of the screw shaft is read in real time by the sensor to obtain the actual motion state of the screw shaft;

[0067] According to the actual motion state, detect whether the screw shaft positioning is oscillating. If oscillation occurs, perform Kalman filtering on the screw shaft to predict the processing error and obtain the predicted motion state of the screw shaft;

[0068] Comparing the predicted motion state with the actual motion state to obtain a comparison result;

[0069] According to the comparison result, the motion state of the screw shaft is corrected to obtain the corrected motion state of the screw shaft;

[0070] Correct the movement speed of the galvanometer axis according to the corrected movement state.

[0071] Specifically, in order to avoid the adverse effects of oscillation of the lead screw shaft on the galvanometer laser processing, it is necessary to detect the movement state of the lead screw shaft in real time and adjust the movement state of the lead screw shaft in real time. At the same time, the movement speed of the galvanometer shaft is also adjusted accordingly to make the laser processing more accurate.

[0072] In a specific embodiment, the present invention provides a four-axis linkage laser processing method, comprising the following steps:

[0073] Step (1) obtaining a computable curve according to the laser processing path: reading discrete points 1 on the laser processing path, extracting curvature advantage points as control points, using particle swarm optimization to select control points 2, then using a quintic Pythagorean-Hodograph curve to fit the read computable laser processing path 3, adjusting its shape parameters to reduce the error, and detecting whether the error meets the requirements. If so, a fitting path 4 to be laser processed can be generated;

[0074] Step (2) obtains the final path of the screw shaft according to the obtained laser processing fitting path 4, so that the galvanometer processing with a smaller range uses the movement of the screw shaft to scan the entire laser processing path, and plans the shortest path of the screw shaft movement, thereby accelerating the laser processing efficiency and completing large-scale processing: judging whether the galvanometer scanning range 15 is greater than the laser processing fitting path 4, if the galvanometer scanning range 15 is greater than the fitting path 4, generating a minimum circle 5 to cover the fitting path 4 to improve the processing accuracy, and the screw shaft stays at the galvanometer range point; if the galvanometer scanning range 15 is less than the laser processing fitting path 4, generating equidistant circles on both sides of the laser processing fitting path 4. Line, connect the equidistant lines on both sides to generate a feasible path space 6, and traverse the laser processing fitting path 4 at the same time to determine whether the galvanometer processing radius is greater than the minimum radius on the laser processing fitting path 4. If so, a sharp corner appears at this point on the equidistant line, and the arc here is extracted. An inverted line is made to both ends of the arc to form a fan-shaped area as the area that the screw shaft must pass through 7. Then, the RRT algorithm is used to find the shortest path between the starting point and the end point. The starting point and the end point form an inward concave semicircular clipping path 8. The path is optimized to form a local path for the movement of the screw shaft 9. The length of each local path 9 is calculated, and the A* algorithm is used to find the global shortest path, and then the motion path of the screw shaft is generated 10.

[0075] Step (3) obtaining the movement speed of the screw shaft according to the speed of the screw shaft and the galvanometer: the movement path of the screw shaft is divided into a plurality of paths of equal length, and the corresponding path numbers are arranged in order, the length of the path required for laser processing in each section of the screw shaft path is identified, the movement speed of the galvanometer shaft is read, and the galvanometer movement time of each section of the equidistant length screw shaft path is calculated. The movement speed of the screw shaft is calculated according to the equidistant movement path of the screw shaft and the movement time of the galvanometer shaft, thereby obtaining the movement speed of each section of the equidistant path of the screw shaft;

[0076] Step (4) obtains the coupled galvanometer shaft motion speed and displacement according to the screw shaft speed and the screw shaft displacement: since the galvanometer shaft speed is faster than the screw shaft speed, the galvanometer shaft speed vector is synthesized with the screw shaft speed vector to form a new galvanometer shaft motion speed; the speed vector of each section of the screw shaft equidistant motion obtained in step (3) is synthesized with the galvanometer shaft speed vector, the galvanometer shaft speed vector is subtracted from the screw shaft motion vector to obtain the galvanometer shaft motion speed, the galvanometer shaft displacement vector 11 is subtracted from the screw shaft displacement vector 12, and so on to obtain the new galvanometer shaft motion displacement vector 13;

[0077] Step (5) detects the motion state of the screw shaft and makes corrections, ultimately completing high-efficiency, large-format, high-precision laser processing: real-time detection of whether the screw shaft motion is oscillating, using Kalman filtering to estimate the motion error, and then returning the corrected screw shaft speed to step (4) for closed-loop calculation to complete the processing.

[0078] Specifically, step (1) is an algorithm for converting a machining path into a computable curve; step (2) is an algorithm for planning a screw shaft path; step (3) is an algorithm for calculating the motion speed of the screw shaft; step (4) is an algorithm for coupling the motion of the galvanometer shaft and the screw shaft; and step (5) is an algorithm for correcting the motion of the screw shaft.

[0079] To sum up, the laser processing method provided by the present invention first imports the laser processing path according to the processing requirements, and then uses the processing path to be converted into a computable curve algorithm to convert the laser processing path into a curve that can be calculated by a formula, and then uses the screw shaft path planning algorithm to plan the shortest moving path of the screw shaft, and then uses the screw shaft motion speed algorithm to calculate the screw shaft speed, and then uses the galvanometer shaft and screw shaft motion coupling algorithm to calculate the motion speed and displacement of the galvanometer shaft, and the screw shaft motion correction algorithm closes the operation to adjust and correct the galvanometer shaft speed, and finally completes the processing, which can achieve large-scale, high-precision and high-efficiency laser processing.

[0080] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be based on the scope defined by the claims.

Claims

1. A four-axis laser processing method, characterized in that: The laser processing method is based on the joint movement of the galvanometer shaft and the lead screw shaft, and the laser processing method includes the following steps: Input the laser processing path and obtain the fitting path; Inputting a width processed by the galvanometer shaft, and obtaining a motion path of the lead screw shaft according to the width processed by the galvanometer shaft and the fitting path; Obtaining a movement speed of the screw shaft according to the fitting path and the movement path of the screw shaft, and adjusting the movement speed of the screw shaft; Obtaining the motion state of the screw shaft, predicting the machining error based on the motion state of the screw shaft, and correcting the motion state of the screw shaft and the motion speed of the galvanometer shaft; The step of obtaining the motion path of the screw shaft according to the width processed by the galvanometer shaft and the fitting path comprises the following steps: According to the width processed by the galvanometer axis and the fitting path, determining whether the width processed by the galvanometer axis is larger than the fitting path, and obtaining a determination result; processing the fitting path according to the judgment result; Traversing the fitting path, determining whether the galvanometer processing radius is greater than the minimum radius on the fitting path, and if the determination result is yes, generating the area that the screw shaft must pass through; Obtaining a motion path of the screw shaft according to the necessary area; According to the judgment result, the fitting path is processed, including the following steps: If the judgment result is yes, a minimum circle covering fitting path is generated, and the screw shaft stays at the origin; If the judgment result is no, then generating equidistant lines on both sides of the fitting path, and connecting the equidistant lines on both sides to generate a path feasible space; The step of generating the area that the screw shaft must pass through comprises the following steps: The equidistant line forms a sharp angle at a position where the galvanometer processing radius is greater than the minimum radius on the fitting path, extracts an arc, and draws an inverted line to both ends of the arc to form a fan-shaped area, which is the area that the screw shaft must pass through; The step of obtaining the motion path of the screw shaft according to the necessary area includes the following steps: According to the must-pass area, the RRT algorithm is used to find the shortest path between the starting point and the end point. The starting point and the end point form an inward-concave semicircular clipping path. The inward-concave semicircular clipping path is optimized to form a local path for the movement of the screw shaft. The length of each local path is calculated, and the A* algorithm is used to find the global shortest path to obtain the motion path of the screw shaft.

2. The laser processing method according to claim 1, wherein: The step of inputting the laser processing path and obtaining the fitting path includes the following steps: Inputting the laser processing path; According to the laser processing path, a single path is obtained; Reading discrete points according to the single path; According to the discrete points, curvature advantage points are extracted as control points, and the selection of the control points is optimized by a particle swarm algorithm to perform curve fitting to obtain the fitting path.

3. The laser processing method according to claim 2, characterized in that: The curve fitting was performed using Pythagorean-Hodograph curve fitting.

4. The laser processing method according to claim 1, wherein: The step of obtaining the movement speed of the screw shaft according to the fitting path and the movement path of the screw shaft, and adjusting the movement state of the screw shaft, comprises the following steps: Divide the motion path of the screw shaft into equidistant lengths and arrange the corresponding serial numbers to obtain the equidistant motion path of the screw shaft, and identify the length of the path required for laser processing in the equidistant motion path of the screw shaft; The movement speed of the galvanometer axis is read and obtained, and the movement time of the galvanometer axis at each equidistant length is calculated according to the length of the path required for the laser processing; Calculating the speed of each section of the equidistant motion of the screw shaft according to the path of the equidistant motion of the screw shaft and the motion time of the galvanometer shaft; The movement speed of the screw shaft is adjusted according to the speed of the equidistant movement of each section of the screw shaft.

5. The laser processing method according to claim 4, characterized in that: The method of adjusting the movement speed of the screw shaft according to the speed of the equidistant movement of each section of the screw shaft comprises the following steps: According to the speed of the equidistant motion of each section of the screw shaft, the motion vector of the screw shaft is subtracted from the velocity vector of the galvanometer shaft to obtain the motion speed of the galvanometer shaft, and the screw shaft moves at different speeds of the equidistant motion; A new motion displacement vector of the galvanometer shaft is obtained by subtracting the displacement vector of the lead screw shaft from the displacement vector of the galvanometer shaft. The lead screw shaft moves according to the motion path and motion speed of the lead screw shaft.

6. The laser processing method according to claim 1, wherein: The method of obtaining the motion state of the screw shaft, predicting the machining error according to the motion state of the screw shaft, and correcting the motion state of the screw shaft and the motion speed of the galvanometer shaft comprises the following steps: The motion state of the screw shaft is read in real time by a sensor to obtain the actual motion state of the screw shaft; According to the actual motion state, detecting whether the positioning of the screw shaft is oscillating, and if oscillation occurs, performing Kalman filtering on the screw shaft to predict the machining error and obtain the predicted motion state of the screw shaft; comparing the predicted motion state with the actual motion state to obtain a comparison result; According to the comparison result, the motion state of the screw shaft is corrected to obtain the corrected motion state of the screw shaft; According to the corrected motion state, the motion speed of the galvanometer axis is corrected.

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