A device for improving TTV of glass carrier

Abstract

The present invention relates to the technical field of glass carrier production, and specifically to a device for improving the TTV of a glass carrier. The device comprises an equipment table, on which a rotatable clamping member is arranged in an array for fixing and rotating the glass carrier, and on which a nozzle for spraying etching liquid is arranged in an array, and the clamping member is arranged on a rectangular frame, and a filter member is arranged below the rectangular frame, and the filter member is rotatably connected to the equipment table for filtering the liquid after etching. The device of the present invention performs a TTV elimination operation on the glass carrier, and the glass carrier is clamped by an adjustable clamping member, and the glass carrier is rotated while the clamping member is rotated to spray the etching liquid, and the glass carrier is etched to eliminate the surface TTV phenomenon, and at the same time, the grinding wheel is adjusted to grind and polish the glass carrier. By grinding and etching the glass carrier, a glass carrier with a smooth surface is obtained, and the impurities in the etching waste liquid are filtered and collected by a conical bucket, and the etching agent can be recycled.

Description

Technical Field

[0001] The present invention relates to the technical field of glass carrier plate production, in particular to a device for improving the TTV of a glass carrier plate. Background Art

[0002] TTV (total thickness variation) is the total thickness variation of the semiconductor. TTV defects are caused by various problems that lead to cutting line jitter and may also occur during the glass substrate cutting process.

[0003] In the prior art, an invention with application number CN202210327145.7 is disclosed, and its name is: A cutting device for ultra-thin glass, which discloses the use of a wire cutting machine to perform multi-wire cutting on the glass once to obtain multiple pieces of ultra-thin glass, thereby improving the quality of the ultra-thin glass edge, reducing the amount of edge chipping, and the breakage rate.

[0004] However, in the prior art, such as the wire cutting operation mentioned in application number CN202210327145.7, multiple wires are cut simultaneously, and the wire wheel jump causes the cutting wire to shake, resulting in TTV phenomenon on the cut surface of the glass. The operation to remove the TTV phenomenon is not disclosed. In the prior art, there is a lack of effective operation to eliminate TTV, and the surface flatness of the prepared glass carrier is poor. Summary of the Invention

[0005] The object of the present invention is to provide a device for improving the TTV of a glass carrier plate to solve the problems in the prior art.

[0006] The purpose of the present invention can be achieved through the following technical solutions:

[0007] A device for improving the TTV of a glass carrier comprises an equipment platform, on which rotatable clamping members are arranged in an array for fixing and rotating the glass carrier, and on which nozzles for spraying etching liquid are arranged in an array.

[0008] The clamping member is arranged on the rectangular frame, and a filter member is arranged below the rectangular frame. The filter member is rotatably connected to the equipment table and is used for filtering the chemical solution after etching.

[0009] Furthermore, a fixed cover is provided on the equipment table, a screw is rotatably provided on one side of the fixed cover, a guide rod is fixedly provided on one side of the fixed cover, a guide sleeve is fixed on the fixed cover, a panel is provided below the guide sleeve, and a gear is rotatably provided on the fixed cover for controlling the opening and closing of the panel.

[0010] Furthermore, a waste water tank is provided on the equipment table, and a rectangular tank for installing a rectangular frame is provided on the waste water tank, a movable groove plate is fixedly provided in the rectangular tank, and a first rack is symmetrically provided in the groove plate.

[0011] An incomplete gear is rotatably arranged in the rectangular groove, a support column is fixedly arranged on the incomplete gear, a circular groove is arranged on the support column, and a second threaded hole is arranged on the support column.

[0012] The incomplete gear cooperates with the first rack.

[0013] Furthermore, the panel is fixed with symmetrically distributed straight rods, one side of the straight rods is fixed with a second rack, the straight rods are slidably connected to the guide sleeves, and the second racks cooperate with the gears.

[0014] Furthermore, a moving part is installed on the equipment table, which is connected to the guide rod and the lead screw respectively. A rotating block is fixed on the moving part, and a movable grinding wheel is fixed on one side of the rotating block for processing TTV on the surface of the glass carrier.

[0015] Furthermore, the rectangular frame is provided with an array of through holes, and bolts pass through the through holes to connect with the rectangular grooves. A first support plate and two second support plates are fixed on the rectangular frame. A mounting rod is rotatably provided on the first support plate for installing the clamping part. A guide hole is provided in the mounting rod, and two guide bars are fixed in the guide hole.

[0016] A through hole is connected to the guide hole, a fixing hole is connected to one side of the guide hole, a movable plate is slidably provided on the second support plate, the mounting rod is also provided on the movable plate, and a driving rod is fixed on the movable plate.

[0017] Furthermore, a synchronous wheel is fixed on the mounting rod, a synchronous belt is installed on the synchronous wheel, a movable push rod is fastened to the rectangular frame, straight grooves are symmetrically provided on the push rod, a telescopic rod is provided on the rectangular frame, a spring is sleeved on the telescopic rod, and a tensioning roller is rotatably provided at one end of the telescopic rod.

[0018] The driving rod is matched with the straight slot.

[0019] Furthermore, the clamping member includes a connecting rod, one end of the connecting rod is fixed with a limit block, the other end is fixed with a first conical block, the limit block is provided with symmetrically distributed guide grooves, the connecting rod is provided with a fourth threaded hole in an array, the first conical block is provided with a fifth threaded hole, and the fifth threaded hole is provided with a connecting groove.

[0020] A second conical block is provided on the first conical block, a sixth threaded hole is provided on the second conical block, and a connecting block is provided at one end of the second conical block.

[0021] Furthermore, the connecting rod cooperates with the through hole, the limit block cooperates with the guide hole, the guide groove cooperates with the guide bar, the bolt passes through the fixing hole and cooperates with the fourth threaded hole, the connecting block cooperates with the connecting groove, and the bolt passes through the sixth threaded hole and is connected to the fifth threaded hole.

[0022] Furthermore, the filter element includes a conical bucket for filtering the etching solution, the conical bucket is provided with a mounting groove, a clamping ring is provided in the mounting groove, a pad is provided on the mounting groove, and a screw is provided on the pad.

[0023] The clamping ring is clamped between the backing plate and the circular groove, and is matched with the second threaded hole through the screw passing through the installation groove to fix the conical bucket.

[0024] Beneficial effects of the present invention:

[0025] 1. The device of the present invention performs a TTV elimination operation on a glass carrier. The glass carrier is clamped by an adjustable clamping member. The clamping member is rotated to simultaneously drive the glass carrier to rotate. The etching solution is sprayed on the glass carrier to etch the glass carrier to eliminate the surface TTV phenomenon. At the same time, the grinding wheel is adjusted to grind and polish the glass carrier.

[0026] 2. The device of the present invention obtains a glass carrier with a smooth surface by grinding and etching the glass carrier. The operation is simple and the glass carrier is convenient to clamp and fix. Impurities in the etching waste liquid are filtered and collected by the conical bucket, and the etching agent can be recycled. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The present invention will be further described below with reference to the accompanying drawings.

[0028] Figure 1 It is a schematic diagram of the structure of the equipment platform of the present invention;

[0029] Figure 2 It is a schematic diagram of the structure of the equipment platform of the present invention;

[0030] Figure 3 This invention Figure 2 A in the middle is an enlarged structural diagram;

[0031] Figure 4 Schematic diagram of the panel structure of the present invention;

[0032] Figure 5 It is a schematic diagram of the structure of the moving part of the present invention;

[0033] Figure 6 It is a schematic diagram of the rectangular frame structure of the present invention;

[0034] Figure 7 It is a schematic diagram of the cross-sectional structure of a rectangular frame of the present invention;

[0035] Figure 8 This is a schematic diagram of the exploded structure of the clamping member of the present invention;

[0036] Figure 9 This invention Figure 8 The enlarged structural diagram at B in the middle;

[0037] Figure 10 It is a schematic diagram of the filter structure of the present invention. DETAILED DESCRIPTION

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0039] A device for improving the TTV of a glass carrier plate, such as Figure 1 As shown, the device includes an equipment table 1, a panel 2 is provided on the equipment table 1, a moving part 3 is installed on the equipment table 1, a rectangular frame 4 is fixed on the equipment table 1, an array of clamping parts 5 are installed on the rectangular frame 4, and a filter part 6 is provided below the rectangular frame 4, which is rotatably connected to the equipment table 1.

[0040] like Figure 2 、 Figure 3 As shown, a fixed cover 11 is fixed on the equipment table 1, a mounting shell 12 is fixed on one side of the fixed cover 11, a lead screw 121 is rotatably provided in the mounting shell 12, a guide rod 122 is fixed in the mounting shell 12, a first motor 120 is fixed on one side of the mounting shell 12, an output end of the first motor 120 is fastened to the lead screw 121, driving the lead screw 121 to rotate, and the moving part 3 is installed in the mounting shell 12.

[0041] A push rod 13 is fixed on the fixed cover 11, and one end of the push rod 13 is connected to a mounting bracket 131. An array of nozzles 132 are rotatably provided on the mounting bracket 131. The nozzles 132 spray mist etching liquid. The temperature of the etching liquid is 20-40°C, and the spraying speed of the etching liquid is 1-20um / min. The angle of the nozzle 132 is adjustable so that the spraying angle of the nozzle 132 is 90-120°, and the glass carrier fixed between the clamping parts 5 is etched.

[0042] The fixed cover 11 is fixed with symmetrically distributed columns 14, and the columns 14 are located on the side of the fixed cover 11 away from the mounting shell 12. A guide sleeve 141 is fixed on the column 14, and a fixed frame 142 is fastened to the column 14. A gear 143 is provided in the fixed frame 142. A second motor 140 is fastened to one side of the fixed frame 142, and the output end of the second motor 140 is fastened to the gear 143 to control the rotation of the gear 143.

[0043] A wastewater trough 15 is provided on the equipment table 1. A rectangular groove 151 is provided on the wastewater trough 15 for installing the rectangular frame 4. An array of first threaded holes 152 are provided in the rectangular groove 151. An array of limiting rods 16 are fixed in the rectangular groove 151. A supporting rod 161 is fixed on the limiting rod 16. A first hydraulic rod 17 is fixed in the rectangular groove 151. The output end of the first hydraulic rod 17 is connected to a groove plate 171. A symmetrically distributed first rack 172 is fixed in the groove plate 171.

[0044] An incomplete gear 18 is rotatably provided in the rectangular groove 151. The incomplete gear 18 is located between the two first racks 172 and meshes with the first rack 172. A support column 181 is fixed on the incomplete gear 18. When the incomplete gear 18 is driven by the first rack 172 to rotate, the support column 181 is rotated. A circular groove 182 is provided on the support column 181 for mounting the filter element 6. A second threaded hole 19 is provided on the support column 181.

[0045] like Figure 4 As shown, symmetrically distributed straight rods 21 are fixed on the panel 2, and a second rack 22 is fixed on one side of the straight rod 21. The straight rod 21 is slidably connected to the guide sleeve 141, and the second rack 22 is engaged with the gear 143. The gear 143 is rotated to operate the straight rod 21 to move up and down, thereby opening and closing the panel 2.

[0046] like Figure 5 As shown, one end of the movable part 3 is provided with a third threaded hole 31 and a circular hole 32, the circular hole 32 cooperates with the guide rod 122, and the third threaded hole 31 cooperates with the lead screw 121. A third motor 30 is fixedly provided on the movable part 3, and the output end of the third motor 30 is fixedly connected to a rotating block 33, and a second hydraulic rod 34 is fixedly provided on the rotating block 33. The output end of the second hydraulic rod 34 is fixedly provided with a fourth motor 36, and the output end of the fourth motor 36 is fixedly connected to a grinding wheel 35, which is used to continue grinding the surface of the glass carrier to remove the TTV phenomenon on the surface.

[0047] like Figure 6 、 Figure 7 As shown, the rectangular frame 4 is provided with an array of through holes 41, and the bolts pass through the through holes 41 and are connected to the first threaded holes 152. A first support plate 44 is fixedly provided on the rectangular frame 4, and a symmetrically distributed second support plate 42 is provided on one side of the first support plate 44. The second support plate 42 is fastened to the rectangular frame 4, and a mounting rod 43 is rotatably provided on the first support plate 44. A fifth motor 430 is fixedly provided on one side of the first support plate 44, and the output end of the fifth motor 430 is fastened to the mounting rod 43.

[0048] The support rod 161 is used to fix the first support plate 44 or the second support plate 42. A guide hole 432 is provided in the mounting rod 43. A symmetrically distributed guide bar 433 is fixed in the guide hole 432. A through hole 431 is provided on the mounting rod 43. The through hole 431 is connected to the guide hole 432. A fixing hole 434 is provided on one side of the mounting rod 43. The fixing hole 434 is connected to the guide hole 432. The clamping member 5 is arranged on the mounting rod 43.

[0049] The second support plate 42 is provided with a slide groove 421, and a movable plate 422 is slidably provided in the slide groove 421. A mounting rod 43 is also rotatably installed on the movable plate 422. A driving rod 423 is fixedly provided on the movable plate 422. A synchronous wheel 48 is fixedly provided on the mounting rod 43. A synchronous belt 49 is installed on the synchronous wheel 48 for connecting the three synchronous wheels 48 to make the three mounting rods 43 rotate synchronously, thereby driving the clamping member 5 on the mounting rod 43 to rotate.

[0050] A third hydraulic rod 450 is fastened to the rectangular frame 4, and a push rod 45 is fixed to the output end of the third hydraulic rod 450. The push rod 45 is provided with symmetrically distributed straight grooves 451, and the driving rod 423 is slidingly connected to the straight grooves 451. A telescopic rod 46 is fixed to the rectangular frame 4, and a spring 461 is fixed to the telescopic rod 46. A bottom plate 462 is fixed to one end of the telescopic rod 46, and the bottom plate 462 is fastened to one end of the spring 461. The spring 461 applies force to the bottom plate 462 toward the first support plate 44. A tensioning roller 47 is rotatably provided on the bottom plate 462, which fits into one side of the synchronous belt 49 to tension the synchronous belt 49.

[0051] like Figure 8 、 Figure 9 As shown, the clamping member 5 includes a connecting rod 51, which is slidably connected to the through hole 431. A limit block 53 is fixed at one end of the connecting rod 51, and a first conical block 55 is fixed at the other end. The limit block 53 is slidably connected to the guide hole 432. The limit block 53 is provided with symmetrically distributed guide grooves 54, and the guide grooves 54 are slidably matched with the guide bar 433. The connecting rod 51 is provided with an array-distributed fourth threaded hole 52, and a bolt passes through the fixing hole 434 and is connected and fixed to a fourth threaded hole 52.

[0052] A fifth threaded hole 56 is provided on the first conical block 55, and a connecting groove 57 is provided in the fifth threaded hole 56. A second conical block 58 is provided on the first conical block 55, and the second conical block 58 is invertedly installed on the first conical block 55. A sixth threaded hole 50 is provided on the second conical block 58, and a connecting block 59 is provided at one end of the second conical block 58. The sixth threaded hole 50 passes through the connecting block 59, and the connecting block 59 is connected to the connecting groove 57. The sixth threaded hole 50 is communicated with the fifth threaded hole 56, and a bolt passes through the sixth threaded hole 50 and is connected to the fifth threaded hole 56 to fix the first conical block 55 and the second conical block 58.

[0053] like Figure 10 As shown, the filter element 6 includes a conical bucket 61, which is an inverted filter bucket for collecting and filtering the etching liquid that has etched the glass carrier. The inverted setting is used to collect the filtered impurities. A mounting groove 62 is provided on the conical bucket 61, a retaining ring 63 is provided in the mounting groove 62, and a pad 64 is provided on the mounting groove 62.

[0054] A screw 65 is provided on the pad 64, and the pad 64 is engaged with the upper end face of the retaining ring 63, and the lower end face of the retaining ring 63 is engaged with the circular groove 182. The screw 65 passes through the mounting groove 62 and cooperates with the second threaded hole 19 to connect and fix the conical bucket 61 to the support column 181, so that the conical bucket 61 rotates with the support column 181.

[0055] In this embodiment, the working principle of a device for improving the TTV of a glass carrier is as follows:

[0056] According to the thickness of the glass carrier to be tested, the gap between the second conical block 58 and the first conical block 55 is adjusted, and locked by bolts. Then, the clamping member 5 is adjusted to slide on the mounting rod 43, and the clamping height of the clamping member 5 is adjusted so that one side of the clamped glass carrier fits against the grinding wheel 35.

[0057] When in use, move the panel 2 upward, open the feed end, use the robotic arm to adsorb the glass carrier and move it into the equipment table 1, move the glass carrier smoothly to the clamping part 5 on the first support plate 44, and then move the clamping part 5 on the second support plate 42 to make it close to the glass carrier and fix the glass carrier. The robotic arm disengages the adsorption and fixation of the glass carrier, and then closes the movable panel 2, adjusts the nozzle 132 toward the glass carrier, and sprays liquid to etch the glass carrier.

[0058] The clamping members 5 rotate synchronously, driving the clamped glass carrier to rotate, thereby achieving uniform etching and polishing operations, thereby effectively eliminating the TTV phenomenon on the surface of the glass carrier.

[0059] To eliminate the TTV operation, the second hydraulic rod 34 can be rotated while spray etching is in progress to drive the grinding wheel 35 to move. The output end of the second hydraulic rod 34 can be telescopically moved to control the movement of the grinding wheel 35 so that the grinding wheel 35 moves on the surface of the glass carrier to fully grind the surface of the glass carrier.

[0060] The etching liquid drips from the glass carrier onto the conical bucket 61. The first hydraulic rod 17 controls the groove plate 171 to move back and forth, and the incomplete gear 18 rotates back and forth, causing the conical bucket 61 to rotate back and forth, drying the etching liquid on the conical bucket 61 to prevent the liquid from remaining on the conical bucket 61.

[0061] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0062] The basic principles, main features, and advantages of the present invention are shown and described above. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and modifications fall within the scope of the invention as claimed.

Claims

1. A device for improving TTV of a glass carrier, the device comprising a device platform (1), characterized in that: The equipment table (1) is provided with a rotatable clamping member (5) in an array for fixing and rotating the glass carrier, and the clamping member (5) is provided with a nozzle (132) in an array for spraying etching liquid; The clamping member (5) is arranged on the rectangular frame (4), a filter member (6) is arranged below the rectangular frame (4), and the filter member (6) is rotatably connected to the equipment table (1) and is used to filter the chemical solution after etching; The rectangular frame (4) is provided with through holes (41) in an array, bolts pass through the through holes (41) and are connected to the rectangular grooves (151), a first support plate (44) and two second support plates (42) are fixedly provided on the rectangular frame (4), a mounting rod (43) is rotatably provided on the first support plate (44) for mounting the clamping member (5), a guide hole (432) is provided in the mounting rod (43), and two guide bars (433) are fixedly provided in the guide hole (432); The guide hole (432) is connected to a through hole (431), one side of the guide hole (432) is connected to a fixing hole (434), a movable plate (422) is slidably provided on the second support plate (42), a mounting rod (43) is also provided on the movable plate (422), and a driving rod (423) is fixedly provided on the movable plate (422); The mounting rod (43) is fixedly provided with a synchronous wheel (48), a synchronous belt (49) is installed on the synchronous wheel (48), a movable push rod (45) is fastened to the rectangular frame (4), straight grooves (451) are symmetrically provided on the push rod (45), a telescopic rod (46) is provided on the rectangular frame (4), a spring (461) is sleeved on the telescopic rod (46), and a tensioning roller (47) is rotatably provided at one end of the telescopic rod (46); The driving rod (423) cooperates with the straight groove (451); The clamping member (5) comprises a connecting rod (51), a limiting block (53) is fixedly provided at one end of the connecting rod (51), a first conical block (55) is fixedly provided at the other end, the limiting block (53) is provided with symmetrically distributed guide grooves (54), the connecting rod (51) is provided with fourth threaded holes (52) in an array, the first conical block (55) is provided with a fifth threaded hole (56), and a connecting groove (57) is provided in the fifth threaded hole (56); A second conical block (58) is provided on the first conical block (55), a sixth threaded hole (50) is provided on the second conical block (58), and a connecting block (59) is provided at one end of the second conical block (58); The connecting rod (51) cooperates with the through hole (431), the limiting block (53) cooperates with the guide hole (432), the guide groove (54) cooperates with the guide bar (433), the bolt passes through the fixing hole (434) and cooperates with the fourth threaded hole (52), the connecting block (59) cooperates with the connecting groove (57), and the bolt passes through the sixth threaded hole (50) and is connected with the fifth threaded hole (56).

2. The device for improving TTV of a glass substrate according to claim 1, characterized in that: The equipment platform (1) is provided with a fixed cover (11), a lead screw (121) is rotatably provided on one side of the fixed cover (11), a guide rod (122) is fixedly provided on one side of the fixed cover (11), a guide sleeve (141) is fixedly provided on the fixed cover (11), a panel (2) is provided below the guide sleeve (141), and a gear (143) is rotatably provided on the fixed cover (11) for controlling the opening and closing of the panel (2).

3. The device for improving TTV of a glass carrier according to claim 2, characterized in that: The equipment platform (1) is provided with a wastewater tank (15), the wastewater tank (15) is provided with a rectangular groove (151) for mounting the rectangular frame (4), a movable groove plate (171) is fixedly provided in the rectangular groove (151), and a first rack (172) is symmetrically provided in the groove plate (171); An incomplete gear (18) is rotatably arranged in the rectangular groove (151), a support column (181) is fixedly arranged on the incomplete gear (18), a circular groove (182) is arranged on the support column (181), and a second threaded hole (19) is arranged on the support column (181); The incomplete gear (18) cooperates with the first rack (172).

4. The device for improving TTV of a glass carrier according to claim 2, characterized in that: The panel (2) is fixedly provided with symmetrically distributed straight rods (21), one side of the straight rods (21) is fixedly provided with a second rack (22), the straight rods (21) are slidably connected to the guide sleeves (141), and the second rack (22) cooperates with the gear (143).

5. The device for improving TTV of a glass carrier according to claim 2, characterized in that: A moving part (3) is installed on the equipment table (1), and the moving part (3) is connected to the guide rod (122) and the lead screw (121) respectively. A rotating block (33) is fixedly provided on the moving part (3), and a movable grinding wheel (35) is fixedly provided on one side of the rotating block (33) for processing the TTV on the surface of the glass carrier.

6. The device for improving TTV of a glass carrier according to claim 3, characterized in that: The filter element (6) comprises a conical bucket (61) for filtering etching liquid, the conical bucket (61) being provided with a mounting groove (62), a clamping ring (63) being provided in the mounting groove (62), a backing plate (64) being provided on the mounting groove (62), and a screw (65) being provided on the backing plate (64); The clamping ring (63) is clamped between the backing plate (64) and the circular groove (182), and is used to fix the conical bucket (61) by means of a screw rod (65) passing through the mounting groove (62) and cooperating with the second threaded hole (19).

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