A bearing seat mechanism for a crystal rotation assembly and a crystal rotation assembly thereof

Abstract

The present invention relates to a bearing seat mechanism for a crystal rotation component, comprising a mounting component, an axial force bearing unit and a magnetic fluid unit. The mounting component is fixedly mounted on a single crystal furnace. The bottom of the axial force bearing unit is fixedly connected to the mounting component, and the top of the axial force bearing unit is connected to the magnetic fluid unit, and the axial force bearing unit can bear the weight of the rotating unit. The magnetic fluid unit passes through the axial force bearing unit, and the top of the magnetic fluid unit is fixedly connected to the rotating unit, and the bottom of the magnetic fluid unit is fixedly connected to the mounting component. The weight of the rotating unit as a whole is directly borne by the axial force bearing unit, so that the axial and radial bearing forces are not affected by the shaft core of the magnetic fluid unit, and can withstand a larger axial force, so that the magnetic fluid unit only bears the force of the rotating part, thereby improving the strength and rigidity of the shaft core of the magnetic fluid unit, and at the same time improving the rotation speed of the magnetic fluid unit.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal furnace equipment, and in particular to a bearing seat mechanism for a crystal rotation component and a crystal rotation component thereof. Background Art

[0002] The single crystal furnace includes a furnace bottom plate, a main furnace chamber, a furnace cover, an isolation valve chamber, an auxiliary furnace chamber, a lifting mechanism and a crucible drive device. Among them, the lifting mechanism, as the core component in the single crystal furnace, is installed at the top of the auxiliary furnace chamber of the single crystal furnace, and includes a crystal rotation assembly, a crystal lifting assembly, a fixed pulley assembly, a distribution box assembly, a conductive slip ring assembly, and a self-weight assembly.

[0003] The crystal rotation assembly is driven by a servo motor to drive large and small pulleys to drive the magnetic fluid shaft core and then drive the lifting chamber connected to the magnetic fluid shaft core to rotate. The lifting chamber is connected to the crystal lifting assembly, so that the crystal rotation assembly drives the crystal lifting assembly to rotate.

[0004] The crystal rotation assembly of the existing lifting head is currently driven by a servo motor to drive the large and small pulleys to drive the magnetic fluid shaft core to rotate, thereby providing an overall rotational motion. The magnetic fluid and the crystal rotation assembly rotate relative to the box in which it is located through the bearing structure. The magnetic fluid itself limits the diameter of its own shaft core due to the bearing structure, that is, the diameter of the magnetic fluid shaft core is not easy to be too large, but the shaft core is too small, resulting in unstable radial load. Moreover, the magnetic fluid directly bears the overall weight of the rotating unit formed by the entire crystal lifting assembly and other rotating parts. The axial bearing force is too large, and the strength and rigidity are affected to a certain extent, resulting in an inability to rotate at a high speed. Summary of the invention

[0005] 1. Technical issues to be resolved

[0006] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a bearing seat mechanism for a crystal rotation assembly and a crystal rotation assembly thereof, which solves the problem that the diameter of the shaft core of the magnetic fluid is not easy to be too large, but the shaft core is too small, resulting in unstable radial bearing force, and the magnetic fluid directly bears the overall weight of the rotating unit formed by the entire crystal rise assembly and other rotating parts, and the axial bearing force is too large, and then the strength and rigidity are affected to a certain extent, resulting in the technical problem that it cannot rotate at a high speed.

[0007] (II) Technical solution

[0008] In order to achieve the above object, the main technical solutions adopted by the present invention include:

[0009] A bearing seat mechanism for a crystal rotation assembly, comprising a mounting assembly, an axial force bearing unit and a magnetic fluid unit;

[0010] The mounting assembly is fixedly mounted on the single crystal furnace;

[0011] The bottom of the axial force bearing unit is fixedly connected to the mounting assembly, the top of the axial force bearing unit is connected to the magnetic fluid unit, and the axial force bearing unit can bear the weight of the rotating unit;

[0012] The magnetic fluid unit passes through the axial force bearing unit, and the top end of the magnetic fluid unit is fixedly connected to the rotating unit, and the bottom end of the magnetic fluid unit is fixedly connected to the mounting assembly.

[0013] Optionally, the axial force bearing unit includes a bearing seat, a cross roller bearing, a first fixing member and a second fixing member;

[0014] The bearing seat is arranged on the mounting assembly, and the bearing seat has a first central through hole. The top end face of the first central through hole is provided with an annular step end face, and the annular step end face is used to receive the cross roller bearing. The outer ring of the cross roller bearing is fixedly connected to the bearing seat through the first fixing member, and the inner ring of the cross roller bearing is fixedly connected to the magnetic fluid unit through the second fixing member.

[0015] Optionally, the magnetic fluid unit includes a supporting portion, a connecting portion and a magnetic fluid body;

[0016] The support portion is fixedly connected to the rotating unit, the support portion has a second central through hole, the top end of the connecting portion is fixedly arranged at the bottom end of the support portion, the bottom end of the connecting portion is detachably connected to the inner ring of the cross roller bearing, and the connecting portion has a third central through hole connected to the second central through hole;

[0017] One end of the magnetic fluid body passes through the second central through hole, the third central through hole and the first central through hole in sequence from top to bottom and is fixedly connected to the bellows flange.

[0018] Optionally, a clamping portion is provided on an outer wall of the connecting portion, and a transmission unit is provided between the clamping portion and an upper end surface of an inner ring of the cross roller bearing.

[0019] Optionally, the transmission unit includes a driven pulley, a multi-V belt and a driving pulley;

[0020] The driving pulley is sleeved on the outside of the connecting portion, and the driven pulley is fixedly connected to the clamping portion. The outer side walls of the driven pulley and the driving pulley are both provided with meshing teeth. The two ends of the multi-V belt are respectively meshed with the meshing teeth of the driven pulley and the meshing teeth of the driving pulley. The driving pulley is fixedly connected to the output end of the power unit.

[0021] Optionally, the ratio of the diameter of the cross roller bearing to the diameter of the driven pulley is 1:0.95-1:0.98.

[0022] Optionally, the diameter of the third central through hole is greater than the diameter of the second central through hole, so that an annular accommodation space is provided between the bottom end of the outer circumferential wall of the magnetic fluid body and the third central through hole, and the annular accommodation space is provided with a conductive slip ring assembly;

[0023] The conductive slip ring assembly can convert a stationary transmission line into a rotating transmission line to introduce the transmission line into the crystal transfer assembly.

[0024] Optionally, a damping positioning sleeve is further included, and the damping positioning sleeve is sleeved on the top of the magnetic fluid body.

[0025] Optionally, a plurality of weight-reducing holes are provided on the bearing seat.

[0026] On the other hand, a crystal rotation assembly includes the bearing seat mechanism and a power unit for the crystal rotation assembly;

[0027] The bearing seat mechanism is connected to the bellows flange;

[0028] The power unit is connected to the magnetic fluid unit to drive the magnetic fluid unit to rotate relative to the axial bearing unit; the magnetic fluid unit is connected to the power unit through a transmission unit.

[0029] (III) Beneficial effects

[0030] The beneficial effects of the present invention are:

[0031] A bearing seat mechanism for a crystal rotation assembly of the present invention directly bears the weight of the entire rotating unit through an axial force bearing unit, thereby ensuring that the axial and radial bearing forces are not affected by the shaft core of the magnetic fluid unit, and can withstand greater axial forces so that the magnetic fluid unit only bears the force of the rotating part, thereby improving the strength and rigidity of the shaft core of the magnetic fluid unit and simultaneously increasing the rotation speed of the magnetic fluid unit.

[0032] The crystal rotation component provided by the present invention can be configured as a small-diameter magnetic fluid unit and only needs to withstand the radial force of rotation, so the diameter of the magnetic fluid unit does not need to be too large, thereby improving the stability of the overall structure during high-speed crystal rotation and improving the crystal pulling efficiency to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a three-dimensional schematic diagram of the whole pulling head of the present invention;

[0034] Figure 2 It is a three-dimensional schematic diagram of a bearing seat mechanism for a crystal rotation assembly of the present invention;

[0035] Figure 3 for Figure 2 Schematic diagram of the cross-sectional structure.

[0036] [Description of Reference Numerals]

[0037] 1: installation assembly; 2: axial force bearing unit; 21: bearing seat; 22: cross roller bearing; 23: first fixing member; 24: second fixing member; 25: first center through hole; 3: magnetic fluid unit; 31: supporting part; 32: connecting part; 33: magnetic fluid body; 34: second center through hole; 35: third center through hole; 36: clamping part; 4: transmission unit; 41: driven pulley; 42: multi-V belt; 43: driving pulley; 5: conductive slip ring assembly; 6: damping positioning sleeve; a: rotating unit; b: power unit; c: bellows flange. DETAILED DESCRIPTION

[0038] In order to better explain the present invention and facilitate understanding, the present invention is described in detail below with reference to the accompanying drawings and through specific embodiments. Figure 1 The orientation of is used as a reference. The side of the bellows flange c relative to the bearing seat is defined as "lower"; the side of the magnetic fluid unit 3 relative to the axial force bearing unit 2 is defined as "inner".

[0039] Reference Figure 1 and Figure 2 As shown, a crystal rotation assembly includes a bearing seat mechanism and a power unit b for the crystal rotation assembly.

[0040] The bearing seat mechanism is connected to the bellows flange c at its bottom.

[0041] A bearing seat mechanism for a crystal rotation assembly provided in an embodiment of the present invention includes a mounting assembly 1 , an axial force bearing unit 2 and a magnetic fluid unit 3 .

[0042] The mounting assembly 1 is fixedly mounted on the middle connecting seat of the single crystal furnace, and the bellows is arranged between the mounting assembly 1 and the connecting seat through the bellows flange.

[0043] See also Figure 2-Figure 3 As shown, the bottom of the axial force bearing unit 2 is fixedly connected to the mounting assembly 1, and of course, it can also be detachably connected to the mounting assembly 1.

[0044] It should be noted that the mounting assembly 1 is a disc-shaped structural member. The top of the axial force bearing unit 2 is connected to the magnetic fluid unit 3, and the axial force bearing unit 2 can bear the weight of the rotating unit a;

[0045] Furthermore, the magnetic fluid unit 3 is arranged in a vertical state, the magnetic fluid unit 3 passes through the axial force bearing unit 2, and the top end of the magnetic fluid unit 3 is fixedly connected to the rotating unit a, and the bottom end of the magnetic fluid unit 3 is fixedly connected to the mounting assembly 1.

[0046] In this embodiment, the rotating unit a includes a crystal lifting assembly and a distribution box assembly, etc. The crystal lifting assembly includes a lifting chamber (not shown in the figure), and the magnetic fluid unit 3 is fixedly connected to the lifting chamber.

[0047] Furthermore, the axial force bearing unit 2 includes a bearing seat 21 , a cross roller bearing 22 , a first fixing member 23 and a second fixing member 24 .

[0048] See also Figure 3 As shown, the bearing seat 21 is detachably arranged on the mounting assembly 1, and the bearing seat 21 has a first central through hole 25. The top end face of the first central through hole 25 is provided with an annular step end face, and the annular step end face is used to receive the cross roller bearing 22. The outer ring of the cross roller bearing 22 is detachably fixedly connected to the annular step end face of the bearing seat 21 through the first fixing member 23. Specifically, the cross roller bearing 22 has a fixed outer ring and an inner ring that rotates relative to the outer ring. The top of the inner ring of the cross roller bearing 22 is fixedly connected to the magnetic fluid unit 3 through the second fixing member 24, and rotates as the magnetic fluid unit 3 rotates. In addition, the first fixing member 23 and the second fixing member 24 are both fasteners such as bolts. The bearing seat 21 completely bears the axial force brought by the weight of the rotating unit a and the magnetic fluid unit 3 in the axial direction, and thus the diameter of the bearing seat 21 needs to be larger so as to be able to bear more axial force. In this embodiment, the diameter of the bearing seat 21 is smaller than the diameter of the mounting assembly 1 and larger than the diameter of the driven pulley 41. Can better bear axial force.

[0049] See also Figure 2 As shown, the power unit b is connected to the magnetic fluid unit 3 to drive the magnetic fluid unit 3 to rotate relative to the axial bearing unit. The magnetic fluid unit 3 is connected to the power unit b through the transmission unit 4.

[0050] Furthermore, the transmission unit 4 includes a driven pulley 41, a multi-V belt 42 and a driving pulley 43. The driving pulley 43 is sleeved on the outer side of the connecting portion 32, and the driven pulley 41 is fixedly connected to the pressing portion 36. The outer side walls of the driven pulley 41 and the driving pulley 43 are provided with meshing teeth, and the two ends of the multi-V belt 42 are respectively meshed with the meshing teeth of the driven pulley 41 and the meshing teeth of the driving pulley 43, and the driving pulley 43 is fixedly connected to the output end of the power unit b.

[0051] Specifically, the power unit b includes a crystal rotating motor and a reducer, and the crystal rotating motor is fixedly connected to the driving pulley 43 through the reducer. The driving pulley 43 rotates and then drives the driven pulley 41 to rotate through the meshing teeth and the multi-V belt 42. It should be noted that the diameter ratio of the driving pulley 43 to the driven pulley 41 is 1:4. The purpose is that the large diameter of the driven pulley 41 can better drive the magnetic fluid unit 3 to rotate, and the radial load force it can withstand is greater, thereby improving the stability of rotation. The small diameter of the driving pulley 43 saves space, so that the space is compact and the transmission efficiency is high.

[0052] Furthermore, the diameter ratio of the cross roller bearing 22 to the driven pulley 41 is 1:0.95-1:0.98. The rotation diameter of the driven pulley 41 is close to the diameter of the cross roller bearing 22, which improves the stability of the overall structure during high-speed crystal rotation and improves the crystal pulling efficiency to a certain extent.

[0053] Furthermore, the magnetic fluid unit 3 includes a supporting portion 31 , a connecting portion 32 and a magnetic fluid body 33 .

[0054] In this embodiment, the support portion 31 is detachably fixedly connected to the connecting plate of the rotating unit a. The support portion 31 has a second central through hole 34. The top of the magnetic fluid body 33 is fixedly installed on the second central through hole 34 through a magnetic fluid connection seat. The top of the connecting portion 32 is fixedly arranged on the bottom end of the support portion 31, and the bottom end of the connecting portion 32 is detachably connected to the inner ring of the cross roller bearing 22. The connecting portion 32 has a third central through hole 35 connected to the second central through hole 34.

[0055] Furthermore, one end of the magnetic fluid body 33 passes through the second central through hole 34, the third central through hole 35 and the first central through hole 25 from top to bottom in sequence and is fixedly connected to the bellows flange c.

[0056] Furthermore, a clamping portion 36 is provided on the outer wall of the connecting portion 32, and a driven pulley 41 of the transmission unit 4 is provided between the clamping portion 36 and the upper end surface of the inner ring of the cross roller bearing 22, and the bottom of the driven pulley 41 is in an inclined cone shape to avoid affecting the operation of the cross roller bearing 22.

[0057] Furthermore, the diameter of the third central through hole 35 is greater than the diameter of the second central through hole 34, so that an annular accommodation space is provided between the bottom end of the outer circumferential wall of the magnetic fluid body 33 and the third central through hole 35, and the annular accommodation space is provided with a conductive slip ring assembly 5. That is to say, in this embodiment, since the magnetic fluid body 33 does not bear the force in the axial direction, the diameter of the magnetic fluid body 33 is much smaller than the diameter of the magnetic fluid body in the prior art. Compared with the prior art in which the magnetic fluid is completely distributed in the bearing seat, in this embodiment, there is a gap between the bearing seat 21 and the magnetic fluid body 33 with a smaller diameter. The gap is an annular accommodation space for placing the conductive slip ring assembly 5, so that the structure is compact and easy to install and maintain later.

[0058] Furthermore, the conductive slip ring assembly 5 can convert a stationary transmission line into a rotating transmission line, so as to introduce the transmission line into the crystal transfer assembly.

[0059] Furthermore, it also includes a damping positioning sleeve 6, which is sleeved on the top of the magnetic fluid body 33. The purpose of setting the damping positioning sleeve 6 is to improve the sealing performance of the crystal transfer assembly and achieve a good sealing effect.

[0060] Furthermore, a plurality of weight-reducing holes are provided on the bearing seat 21. The weight-reducing holes can not only reduce the weight of the bearing seat 21, but also allow the signal wires of the conductive slip ring assembly 5 to pass through and be transmitted to the rotating unit a.

[0061] The present invention provides a bearing seat mechanism for a crystal rotation assembly, which directly bears the weight of the rotating unit a as a whole through the axial force bearing unit 2, so that the shaft core of the magnetic fluid unit 3 is not affected by the axial and radial bearing forces, and can withstand a larger axial force, so that the magnetic fluid unit 3 only bears the force of the rotating part, thereby improving the strength and rigidity of the shaft core of the magnetic fluid unit 3 and simultaneously improving the rotation speed of the magnetic fluid unit.

[0062] The crystal rotation component provided by the present invention can be configured as a small-diameter magnetic fluid unit and only needs to withstand the radial force of rotation, so the diameter of the magnetic fluid unit does not need to be too large, thereby improving the stability of the overall structure during high-speed crystal rotation and improving the crystal pulling efficiency to a certain extent.

[0063] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0064] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0065] In the present invention, unless otherwise clearly specified and limited, when a first feature is “on” or “below” a second feature, it may be that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is “above”, “above” or “above” a second feature, it may be that the first feature is directly above or obliquely above the second feature, or it may simply mean that the first feature is higher in level than the second feature. When a first feature is “below”, “below” or “below” a second feature, it may be that the first feature is directly below or obliquely below the second feature, or it may simply mean that the first feature is lower in level than the second feature.

[0066] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "embodiment", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, unless they are contradictory.

[0067] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may alter, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A bearing seat mechanism for a crystal rotation assembly, characterized in that: It comprises a mounting assembly (1), an axial force bearing unit (2) and a magnetic fluid unit (3); The mounting assembly (1) is fixedly mounted on the single crystal furnace; The bottom of the axial force bearing unit (2) is fixedly connected to the mounting assembly (1), the top of the axial force bearing unit (2) is connected to the magnetic fluid unit (3), and the axial force bearing unit (2) is capable of bearing the weight of the rotating unit (a); The magnetic fluid unit (3) passes through the axial force bearing unit (2), and the top end of the magnetic fluid unit (3) is fixedly connected to the rotating unit (a), and the bottom end of the magnetic fluid unit (3) is fixedly connected to the mounting assembly (1); The axial force bearing unit (2) comprises a bearing seat (21), a cross roller bearing (22), a first fixing member (23) and a second fixing member (24); The bearing seat (21) is arranged on the mounting assembly (1), and the bearing seat (21) has a first central through hole (25). The top end face of the first central through hole (25) is provided with an annular step end face, and the annular step end face is used to receive the cross roller bearing (22). The outer ring of the cross roller bearing (22) is fixedly connected to the bearing seat (21) through the first fixing member (23), and the inner ring of the cross roller bearing (22) is fixedly connected to the magnetic fluid unit (3) through the second fixing member (24).

2. The bearing seat mechanism for a crystal transfer assembly according to claim 1, characterized in that: The magnetic fluid unit (3) comprises a supporting portion (31), a connecting portion (32) and a magnetic fluid body (33); The support portion (31) is fixedly connected to the rotating unit (a), the support portion (31) has a second central through hole (34), the top end of the connecting portion (32) is fixedly arranged at the bottom end of the support portion (31), the bottom end of the connecting portion (32) is detachably connected to the inner ring of the cross roller bearing (22), and the connecting portion (32) has a third central through hole (35) connected to the second central through hole (34); One end of the magnetic fluid body (33) passes through the second central through hole (34), the third central through hole (35) and the first central through hole (25) in sequence from top to bottom and is fixedly connected to the bellows flange (c).

3. The bearing seat mechanism for a crystal transfer assembly according to claim 2, characterized in that: The outer wall of the connecting portion (32) is provided with a clamping portion (36), and a transmission unit (4) is provided between the clamping portion (36) and the upper end surface of the inner ring of the cross roller bearing (22).

4. The bearing seat mechanism for a crystal transfer assembly according to claim 3, characterized in that: The transmission unit (4) comprises a driven pulley (41), a multi-V belt (42) and a driving pulley (43); The driving pulley (43) is sleeved on the outer side of the connecting portion (32), and the driven pulley (41) is fixedly connected to the clamping portion (36). The outer side walls of the driven pulley (41) and the driving pulley (43) are both provided with meshing teeth. The two ends of the multi-V belt (42) are respectively meshed with the meshing teeth of the driven pulley (41) and the meshing teeth of the driving pulley (43). The driving pulley (43) is fixedly connected to the output end of the power unit (b).

5. The bearing seat mechanism for a crystal transfer assembly according to claim 4, characterized in that: The ratio of the diameter of the cross roller bearing (22) to the diameter of the driven pulley (41) is 1:0.95 to 1:0.

98.

6. The bearing seat mechanism for a crystal transfer assembly according to claim 5, characterized in that: The diameter of the bearing seat (21) is larger than the diameter of the driven pulley (41) and smaller than the diameter of the mounting assembly (1).

7. The bearing seat mechanism for a crystal transfer assembly according to claim 6, characterized in that: It also comprises a damping positioning sleeve (6), wherein the damping positioning sleeve (6) is sleeved on the top of the magnetic fluid body (33).

8. The bearing seat mechanism for a crystal transfer assembly according to claim 7, characterized in that: The bearing seat (21) is provided with a plurality of weight-reducing holes.

9. A crystal transfer assembly, characterized in that: A bearing seat mechanism and a power unit (b) for a crystal rotation assembly comprising any one of claims 1 to 8; The bearing seat mechanism is connected to the bellows flange (c); The power unit (b) is connected to the magnetic fluid unit (3) to drive the magnetic fluid unit (3) to rotate relative to the axial bearing unit; the magnetic fluid unit (3) is connected to the power unit (b) via a transmission unit (4).

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