A scanning electron microscope sample stage with precise clamping structure

Abstract

The present invention discloses a scanning electron microscope sample stage with a precise clamping structure, comprising a base, wherein the top of the base is provided with three groups of limit grooves, and the inner walls of the limit grooves are rotatably connected to a steering plate. The present invention operates by energizing a servo motor, and its output end can drive the rotation of a cross-rotating rod and a steering rod, and then drive the rotation adjustment of the steering plate, the connecting plate, and the base, thereby achieving the direction rotation of the sample stage. The movable adjustment of the positioning clamp on the sample stage and the limit clamping of the clamping block can increase the applicability of the device clamping work. After the stepping motor is energized, it can drive the rotation of the limit gear, and then drive the rotation of the steering wheel and the sample stage. In conjunction with the swing of the sample stage structure driven by the rotation of the steering rod, a multi-angle and multi-directional adjustment function is provided for the placed sample to meet the multi-angle detection requirements, thereby increasing the applicability of the device when performing detection work and improving the efficiency of sample detection work.

Description

Technical Field

[0001] The present invention relates to the technical field of scanning electron microscope equipment, and in particular to a scanning electron microscope sample stage with a precise clamping structure. Background Art

[0002] The scanning electron microscope is a microscopic morphology observation method between the transmission electron microscope and the optical microscope. It can directly use the material properties of the sample surface material for microscopic imaging. It consists of an electron optical system, a signal collection and display system, a vacuum system, and a power supply system. It is used in biology, medicine, materials, chemistry and other fields. When some existing scanning electron microscopes are used, they are mostly used in conjunction with their own workbenches, but some existing scanning electron microscope sample stages still have certain shortcomings when used.

[0003] Patent document: CN217112142U, discloses a scanning electron microscope sample stage, comprising "a base (2) and a sample stage body (3) detachably fixedly connected to the base, the sample stage body (3) having a sample attaching portion (4) for attaching a sample (S) and a connecting portion (5) for connecting the sample stage body (3) to the base (2), wherein the sample attaching portion (4) is composed of at least two plates (6) extending upward perpendicularly to the upper end surface of the connecting portion and intersecting each other to provide at least eight vertical planar sample attaching areas (60), and the at least two plates are integrally formed with the connecting portion. This scanning electron microscope sample stage can attach samples sideways and vertically, resulting in more observation volume, a larger attaching area, a more stable effect, a faster speed, and can save a lot of time and improve the observation effect."

[0004] However, when the above-mentioned device is in use, it installs and connects the sample by vertical adhesion, thereby expanding the observation capacity of the device. However, its top structure improves the observation effect through a specific adhesion method when testing the sample. As a result, when the device performs testing on different samples, its sample placement structure is single. For the testing requirements at different angles, its sample placement structure lacks flexible adjustability, which in turn affects the device's detection efficiency of the sample.

[0005] The information disclosed in this background technology section is only intended to deepen the understanding of the overall background technology of the present invention, and should not be regarded as an admission or any form of suggestion that the information constitutes the prior art known to those skilled in the art. Summary of the Invention

[0006] The object of the present invention is to provide a scanning electron microscope sample stage with a precise clamping structure to solve the problems raised in the above background technology.

[0007] To achieve the above object, the present invention provides the following technical solution: a scanning electron microscope sample stage with a precise clamping structure, comprising a base, the top of which is provided with three sets of limiting grooves, the inner walls of which are rotatably connected to a steering plate;

[0008] A servo motor is fixedly installed on the front of the base, and a cross-rotating rod is fixedly installed on the output end of the servo motor. A steering rod is installed through the inside of the base, and the cross-rotating rod is clamped to the inside of the steering rod. The steering plate is sleeved and fixed to the outer surface of the steering rod. The tail end of the steering rod is rotatably connected to a connecting seat, and the front of the connecting seat is threadedly connected to the back of the base. A connecting plate is overlapped on the top of the outer surface of the steering plate. The interiors of the steering plate and the connecting plate are both threadedly connected with a fixed screw rod, and the tail end of the fixed screw rod is threadedly connected to a limiting nut. A base is fixedly installed on the top of the plate, a fixed seat is threadedly connected to the inner wall of the base, a sample stage is movably installed on the top of the fixed seat, the front end and the tail end of the top of the sample stage are fixedly installed with fixed plates, the separated surfaces of the two groups of fixed plates are fixedly installed with power supply seats, the facing surfaces of the two groups of power supply seats are electrically installed with electric telescopic rods, the front end of the electric telescopic rods is fixedly installed with positioning clamps, and the bottoms of the two groups of positioning clamps are fixedly installed with limiting sliders, two groups of limiting grooves are provided on the top of the sample stage, and the limiting sliders are slidably connected to the inside of the limiting grooves.

[0009] Preferably, a bottom plate is fixedly mounted on the bottom of the base, and fixing bolts are threadedly penetrated on both sides of the top of the bottom plate.

[0010] Preferably, the inner bottom wall of the base is rotatably connected to a steering wheel, a limiting rack is fixedly installed on the outer surface of the steering wheel, a limiting block is fixedly installed on the middle part of the top of the steering wheel, a reinforcement seat is fixedly installed on the inner wall of the fixed seat, and the top of the reinforcement seat is fixedly connected to the bottom of the sample table, a limiting slot is provided in the middle part of the bottom of the reinforcement seat, and the limiting block is clamped in the inside of the limiting slot, a connecting slider is installed on the top of the outer surface of the reinforcement seat, and the connecting slider is rotationally connected to the inner wall of the fixed seat.

[0011] Preferably, a plurality of through grooves are provided on both sides of the top of the sample stage, and a clamping block is slidably connected to the inside of the through groove. A limiting rod is fixedly installed on one side of the clamping block, and the tail end of the limiting rod is sleeved with a limiting tube, and the tail end of the limiting tube is fixedly connected to the inner wall of the sample stage. A limiting handle is fixedly installed on both sides of the sample stage, a limiting spring is fixedly installed on the inner wall of the limiting tube, and the front end of the limiting spring is fixedly connected to the tail end of the limiting rod, and a limiting cover is fixedly installed on the outer surface of the sample stage.

[0012] Preferably, curved plates are fixedly mounted on both sides of the connecting plate, and the bottom of the deflection plate is connected to the inner bottom wall of the curved plate.

[0013] Preferably, a driving seat is fixedly installed on both sides of the bottom of the base, and the driving seat is located on the outside of the connecting plate. A stepper motor is fixedly installed on the inner wall of the driving seat, and a driving rod is fixedly installed on the output end of the stepper motor. A limiting gear is fixedly installed on the top of the driving rod, and the outer surface of the limiting gear is engaged with the limiting rack.

[0014] Preferably, a plurality of support blocks are fixedly mounted on the inner wall of the base, a positioning ring is fixedly mounted on the front end of the support block, and the positioning ring is sleeved on the outer surface of the steering rod.

[0015] Preferably, the method of using the device is as follows:

[0016] S1. When the device is in use, the base is provided with a steering plate, and the intervals between the three sets of steering plates can be used for plugging and installing with the two sets of connecting plates at the bottom of the base. After docking, the connecting plate and the steering plate can be connected and fixed by setting the fixed screw rod and the limit nut through a threaded connection. After the servo motor on the base is powered on, its output end can drive the rotation of the cross-turn rod, and then drive the rotation of the steering rod. The steering rod is installed through the socket of the steering plate. After the servo motor is working, its output end can drive the rotation of the steering plate and the connecting plate and the base. The interior of the base can be installed and connected to the fixed base through a threaded connection. The fixed base can be used for sample placement and detection through the sample stage. The electric telescopic rod on the sample stage can be driven to extend and retract through the power seat, thereby driving the sliding of the positioning clamp, which can be used for squeezing and clamping the sample on the sample stage.

[0017] S2. The bottom of the base can be set by a stepper motor. After the stepper motor is powered on, its output end can drive the limit rotation of the driving rod, and then drive the rotation of the limit gear. The limit gear and the limit rack are engaged with each other. The rotation of the limit gear can drive the steering wheel to rotate inside the base, and the setting of the connecting slider increases the rotation of the reinforcement seat in the fixed seat. The rotation of the stepper motor can drive the rotation of the reinforcement seat and the sample stage.

[0018] S3. When the object to be tested is placed on the top of the sample table, the electric telescopic rod is used to push the positioning clamp to clamp and fix it. The top of the sample table can be provided with a through groove so that the clamping block can slide within the through groove. The setting of the limit rod and the limit tube and the sliding property of the limit rod within the limit tube assist the sliding of the clamping block. When the sample table places the object, the placement of the object can force the sliding of the clamping block.

[0019] S4. When the device is finished in use, the connecting plate and the steering plate can be disassembled by rotating the fixed screw and the limit nut, and then the connecting plate and the base can be disassembled based on the steering plate. The interior of the base is installed through a threaded connection, and the fixed seat can be disassembled by rotating the limit handle, and then the sample stage can be disassembled.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention works through the energization of the servo motor, and its output end can drive the rotation of the cross-rotating rod and the steering rod, and then drive the rotation adjustment of the steering plate, the connecting plate and the base, so as to achieve the directional rotation of the sample stage. The movable adjustment of the positioning clamp on the sample stage and the limit clamping of the clamping block can increase the applicability of the clamping work of the device. After the stepping motor is energized, it can drive the rotation of the limit gear, and then drive the rotation of the steering wheel and the sample stage. In conjunction with the swing of the sample stage structure driven by the rotation of the steering rod, multi-angle and multi-directional adjustment functions are provided for the placed samples to meet the multi-angle detection needs, thereby increasing the applicability of the device when performing detection work and improving the efficiency of sample detection work.

[0022] The arrangement of the present invention increases the convenience of the installation connection between the connecting plate and the steering plate, and adds convenience to the disassembly and installation of the base. At the same time, the base is installed and connected to the fixing base by a threaded connection, so the base can be disassembled by rotating the fixing base, which increases the convenience of the disassembly and installation of the sample stage. Therefore, when the device is in use, its structure has high flexibility, which adds convenience to the maintenance, disassembly and replacement of the device structure and improves the practicality of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the base structure of the present invention;

[0025] Figure 3 This is a schematic diagram of the base structure of the present invention;

[0026] Figure 4 It is a schematic cross-sectional view of the reinforcement seat structure of the present invention;

[0027] Figure 5 Schematic cross-sectional view of the sample stage structure of the present invention;

[0028] Figure 6 It is a schematic cross-sectional view of the bottom plate structure of the present invention;

[0029] Figure 7 It is a schematic cross-sectional view of the drive seat structure of the present invention;

[0030] Figure 8 For the present invention Figure 5 A magnified schematic diagram of the structure in the middle.

[0031] Figure: 1. Base; 2. Limiting slot; 3. Steering plate; 4. Servo motor; 5. Cross-rotating rod; 6. Steering rod; 7. Connecting seat; 8. Connecting plate; 9. Fixing screw; 10. Limiting nut; 11. Base; 12. Fixing seat; 13. Sample table; 14. Fixing plate; 15. Power socket; 16. Electric telescopic rod; 17. Positioning clamp; 18. Limiting slider; 19. Limiting slot; 20. Bottom plate; 21. Fixing bolt 22. Steering wheel; 23. Limit rack; 24. Limit block; 25. Reinforcement seat; 26. Limit slot; 27. Connecting slider; 28. Through slot; 29. ​​Clamping block; 30. Limit rod; 31. Limit tube; 32. Limit handle; 33. Limit spring; 34. Limit cover; 35. Arc plate; 36. Drive seat; 37. Stepper motor; 38. Drive rod; 39. Limit gear; 40. Support block; 41. Positioning ring. DETAILED DESCRIPTION

[0032] See also Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 and Figure 6A scanning electron microscope sample stage with a precise clamping structure includes a base 1, three sets of limit slots 2 are opened on the top of the base 1, the inner wall of the limit slot 2 is rotatably connected to a steering plate 3, a servo motor 4 is fixedly installed on the front of the base 1, and a cross-rotating rod 5 is fixedly installed on the output end of the servo motor 4. A steering rod 6 is installed through the inside of the base 1, and the cross-rotating rod 5 is clamped to the inside of the steering rod 6. The steering plate 3 is sleeved and fixed on the outer surface of the steering rod 6. The tail end of the steering rod 6 is rotatably connected to a connecting seat 7, and the connecting seat 7 The front surface is threadedly connected to the back of the base 1, and the top of the outer surface of the steering plate 3 is overlapped with a connecting plate 8. The interior of the steering plate 3 and the connecting plate 8 are threadedly connected with a fixed screw 9, and the tail end of the fixed screw 9 is threadedly connected to a limited nut 10. The top of the connecting plate 8 is fixedly installed with a base 11, and the inner wall of the base 11 is threadedly connected with a fixed seat 12. The top of the fixed seat 12 is movably installed with a sample stage 13. The front and rear ends of the top of the sample stage 13 are fixedly installed with a fixed plate 14, and the separated surfaces of the two sets of fixed plates 14 are The power base 15 is fixedly installed, and the facing surfaces of the two sets of power bases 15 are electrically installed with electric telescopic rods 16. The front end of the electric telescopic rod 16 is fixedly installed with a positioning clamp 17. The bottom of the two sets of positioning clamps 17 is fixedly installed with a limited slider 18. The top of the sample table 13 is provided with two sets of limiting grooves 19, and the limiting slider 18 is slidably connected to the inside of the limiting groove 19. The two sides of the connecting plate 8 are fixedly installed with an arc plate 35, and the bottom of the steering plate 3 is connected to the inner bottom wall of the arc plate 35. The two bottoms of the base 11 are fixed with the arc plate 35. A driving seat 36 is fixedly installed on each side, and the driving seat 36 is located on the outside of the connecting plate 8. A stepping motor 37 is fixedly installed on the inner wall of the driving seat 36. A driving rod 38 is fixedly installed on the output end of the stepping motor 37. A limit gear 39 is fixedly installed on the top of the driving rod 38, and the outer surface of the limit gear 39 is engaged with the limit rack 23. A plurality of support blocks 40 are fixedly installed on the inner wall of the base 1. A positioning ring 41 is fixedly installed on the front end of the support block 40, and the positioning ring 41 is sleeved on the outer surface of the steering rod 6;

[0033] Through the setting of the steering plate 3, the intervals between the three groups of steering plates 3 can be used to be plugged and installed with the two groups of connecting plates 8 at the bottom of the base 11, and after docking, the connecting plate 8 and the steering plate 3 can be connected and fixed by setting the fixed screw rod 9 and the limit nut 10 through a threaded connection. After the servo motor 4 on the base 1 is energized, its output end can drive the rotation of the cross-rotating rod 5, and then drive the rotation of the steering rod 6, which is installed on the steering rod 6 through the sleeve of the steering plate 3. After the servo motor 4 works, its output end can drive the rotation of the steering plate 3 and the connecting plate 8 and the base 11. The interior of the base 11 can be installed and connected to the fixed base 12 through a threaded connection. The setting of the platform 13 can be used for sample placement and detection work. The electric telescopic rod 16 on the sample platform 13 can be driven to extend and retract through the power socket 15, thereby driving the sliding of the positioning clamp 17, which can be used for squeezing and clamping the sample on the sample platform 13. After the object is placed on the sample platform 13, the servo motor 4 can be powered on, and its output end can drive the rotation of the cross-rotating rod 5, and then drive the angle rotation of the base 11 and the sample platform 13. Through the setting of the support block 40 and the positioning ring 41, the positioning ring 41 can be sleeved on the steering rod 6, and then play a positioning role in the rotation of the steering rod 6 in the base 1, thereby increasing its rotation stability and reducing the shaking effect of the steering rod 6 during rotation.

[0034] See also Figure 1 、 Figure 3 and Figure 7 , a bottom plate 20 is fixedly installed at the bottom of the base 1, and fixing bolts 21 are threaded through both sides of the top of the bottom plate 20. A steering wheel 22 is rotatably connected to the inner bottom wall of the base 11, and a limiting rack 23 is fixedly installed on the outer surface of the steering wheel 22. A limiting block 24 is fixedly installed in the middle of the top of the steering wheel 22. A reinforcement seat 25 is fixedly installed on the inner wall of the fixed seat 12, and the top of the reinforcement seat 25 is fixedly connected to the bottom of the sample stage 13. A limiting slot 26 is provided in the middle of the bottom of the reinforcement seat 25, and the limiting block 24 is clamped in the inside of the limiting slot 26. A connecting slider 27 is installed on the top of the outer surface of the reinforcement seat 25, and the connecting slider 27 is turned to be connected to the inner wall of the fixed seat 12;

[0035] Through the setting of the stepper motor 37, after the stepper motor 37 is powered on, its output end can drive the limit rotation of the driving rod 38, and then drive the rotation of the limit gear 39. The limit gear 39 and the limit rack 23 are engaged with each other. The rotation of the limit gear 39 can drive the steering wheel 22 to rotate inside the base 11, and the setting of the connecting slider 27 increases the rotation of the reinforcement seat 25 in the fixed seat 12. The rotation of the stepper motor 37 can drive the rotation of the reinforcement seat 25 and the sample stage 13. When in use, the device can be installed and fixed to the relevant equipment through the setting of the base plate 20 and the fixing bolts 21 for use in placing items.

[0036] See also Figure 1 、 Figure 5 and Figure 8 , a plurality of through grooves 28 are provided on both sides of the top of the sample stage 13, and a clamping block 29 is slidably connected to the inside of the through groove 28. A limit rod 30 is fixedly installed on one side of the clamping block 29, and the tail end of the limit rod 30 is sleeved with a limit tube 31, and the tail end of the limit tube 31 is fixedly connected to the inner wall of the sample stage 13. A limit handle 32 is fixedly installed on both sides of the sample stage 13, and a limit spring 33 is fixedly installed on the inner wall of the limit tube 31, and the front end of the limit spring 33 is fixedly connected to the tail end of the limit rod 30. A limit cover 34 is fixedly installed on the outer surface of the sample stage 13;

[0037] The electric telescopic rod 16 pushes the positioning clamp 17 to clamp and fix it, and the top of the sample table 13 can be provided with the through groove 28, so that the clamping block 29 can slide within the through groove 28. The setting of the limit rod 30 and the limit tube 31 and the sliding of the limit rod 30 in the limit tube 31 assist the sliding of the clamping block 29. When the sample table 13 places an object, the placement of the object can force the clamping block 29 to slide. The interior of the limit tube 31 can be provided with a limit spring 33. The resilience of the limit spring 33 can increase the limiting activity of the limit rod 30, and then increase the resilience of the clamping block 29. When the object is placed, the clamping block 29 can be squeezed and pushed by the bottom of the object, and the inspection object is clamped on the basis of the resilience of the limit spring 33, and then on the basis of the clamping of the object by the positioning clamp 17, the stability of the object placement for inspection is increased to clamp the four sides of the bottom of the object.

[0038] Working principle: when the device is in use, the base 1 is provided with the steering plate 3, and the intervals between the three groups of steering plates 3 can be used to be plugged and installed with the two groups of connecting plates 8 at the bottom of the base 11. After docking, the connecting plate 8 and the steering plate 3 can be connected and fixed by setting the fixed screw rod 9 and the limit nut 10 through a threaded connection. After the servo motor 4 on the base 1 is powered on, its output end can drive the rotation of the cross-rotating rod 5, and then drive the rotation of the steering rod 6. The steering rod 6 is installed through the socket of the steering plate 3. After the servo motor 4 is working, its output end can drive the rotation of the steering plate 3 and the connecting plate 8 and the base 11. The interior of the base 11 can be installed and connected to the fixing base 12 by means of a threaded connection. The setting of the sample stage 13 on the fixing base 12 can be used for sample placement and detection work. The electric telescopic rod 16 can be driven to extend and retract by the power supply seat 15 on the sample stage 13, thereby driving the sliding of the positioning clamp 17, which can be used for squeezing and clamping the sample on the sample stage 13. The bottom of the base 11 can be set by a stepper motor 37. After the stepper motor 37 is energized, its output end can drive the limit rotation of the driving rod 38, and then drive the rotation of the limit gear 39. The limit gear 39 and the limit rack 23 are connected. The relationship between the meshing connection and the limit gear 39 is that the rotation of the steering wheel 22 can drive the rotation of the inner part of the base 11, and the setting of the connecting slider 27 increases the rotation of the reinforcement seat 25 in the fixed seat 12. The rotation of the stepping motor 37 can drive the rotation of the reinforcement seat 25 and the sample stage 13. When the top of the sample stage 13 is placed on the object to be tested, the electric telescopic rod 16 pushes the positioning clamp 17 to clamp and fix it. The top of the sample stage 13 can be set by the through groove 28, so that the clamping block 29 can be limited and slid in the through groove 28. The limit rod 30 and the limit The setting of the positioning tube 31 and the sliding property of the limiting rod 30 in the limiting tube 31 assist the sliding of the clamping block 29. When the sample table 13 places an object, the placement of the object can force the sliding of the clamping block 29. When the device is finished in use, the connecting plate 8 and the steering plate 3 can be disassembled by rotating the fixed screw 9 and the limiting nut 10, and then the connecting plate 8 and the base 11 are disassembled on the basis of the steering plate 3. The interior of the base 11 is installed by a threaded connection, and the fixing seat 12 can be disassembled by rotating the limiting handle 32, and then the sample table 13 can be disassembled.

[0039] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A scanning electron microscope sample stage with a precise clamping structure, comprising a base (1), characterized in that: Three groups of limiting grooves (2) are provided on the top of the base (1), and the inner walls of the limiting grooves (2) are rotatably connected to a steering plate (3); A servo motor (4) is fixedly mounted on the front of the base (1), and a cross-rotating rod (5) is fixedly mounted on the output end of the servo motor (4). A steering rod (6) is installed through the interior of the base (1), and the cross-rotating rod (5) is clamped to the interior of the steering rod (6). The steering plate (3) is sleeved and fixed on the outer surface of the steering rod (6). The tail end of the steering rod (6) is rotatably connected to a connecting seat (7), and the front of the connecting seat (7) is threadedly connected to the back of the base (1). The top of the outer surface of the steering plate (3) is overlapped with a connecting plate (8). The interiors of the steering plate (3) and the connecting plate (8) are both threadedly connected to a fixed screw rod (9). The tail end of the fixed screw rod (9) is threadedly connected to a limiting nut (10). The top of the connecting plate (8) is fixed. A base (11) is fixedly installed, the inner wall of the base (11) is threadedly connected to a fixed seat (12), the top of the fixed seat (12) is movably installed with a sample table (13), the front end and the tail end of the top of the sample table (13) are fixedly installed with a fixed plate (14), the separated surfaces of the two groups of the fixed plates (14) are fixedly installed with a power seat (15), the facing surfaces of the two groups of the power seat (15) are electrically installed with an electric telescopic rod (16), the front end of the electric telescopic rod (16) is fixedly installed with a positioning clamp (17), the bottom of the two groups of the positioning clamps (17) are fixedly installed with a limiting slider (18), the top of the sample table (13) is provided with two groups of limiting grooves (19), and the limiting slider (18) is slidably connected to the inside of the limiting groove (19); A plurality of through grooves (28) are provided on both sides of the top of the sample table (13), and a clamping block (29) is slidably connected inside the through groove (28). A limiting rod (30) is fixedly installed on one side of the clamping block (29), and the tail end of the limiting rod (30) is sleeved with a limiting tube (31), and the tail end of the limiting tube (31) is fixedly connected to the inner wall of the sample table (13). A limiting handle (32) is fixedly installed on both sides of the sample table (13), and a limiting spring (33) is fixedly installed on the inner wall of the limiting tube (31), and the front end of the limiting spring (33) is fixedly connected to the tail end of the limiting rod (30). A limiting cover (34) is fixedly installed on the outer surface of the sample table (13).

2. The scanning electron microscope sample stage with a precise clamping structure according to claim 1, characterized in that: A bottom plate (20) is fixedly mounted on the bottom of the base (1), and fixing bolts (21) are threadedly connected through both sides of the top of the bottom plate (20).

3. The scanning electron microscope sample stage with a precise clamping structure according to claim 1, characterized in that: The inner bottom wall of the base (11) is rotatably connected to a steering wheel (22), the outer surface of the steering wheel (22) is fixedly installed with a limiting rack (23), the middle part of the top of the steering wheel (22) is fixedly installed with a limiting block (24), the inner wall of the fixed seat (12) is fixedly installed with a reinforcement seat (25), and the top of the reinforcement seat (25) is fixedly connected to the bottom of the sample table (13), the middle part of the bottom of the reinforcement seat (25) is provided with a limiting slot (26), and the limiting block (24) is engaged with the inside of the limiting slot (26), the top of the outer surface of the reinforcement seat (25) is installed with a connecting slider (27), and the connecting slider (27) is rotatably connected to the inner wall of the fixed seat (12).

4. The scanning electron microscope sample stage with a precise clamping structure according to claim 1, characterized in that: Arc-shaped plates (35) are fixedly mounted on both sides of the connecting plate (8), and the bottom of the steering plate (3) is connected to the inner bottom wall of the arc-shaped plate (35).

5. The scanning electron microscope sample stage with a precise clamping structure according to claim 1, characterized in that: A driving seat (36) is fixedly mounted on both sides of the bottom of the base (11), and the driving seat (36) is located on the outside of the connecting plate (8). A stepping motor (37) is fixedly mounted on the inner wall of the driving seat (36), and a driving rod (38) is fixedly mounted on the output end of the stepping motor (37). A limiting gear (39) is fixedly mounted on the top of the driving rod (38), and the outer surface of the limiting gear (39) is meshed with the limiting rack (23).

6. The scanning electron microscope sample stage with a precise clamping structure according to claim 1, characterized in that: A plurality of support blocks (40) are fixedly mounted on the inner wall of the base (1), a positioning ring (41) is fixedly mounted on the front end of the support block (40), and the positioning ring (41) is sleeved on the outer surface of the steering rod (6).

7. The method for using the scanning electron microscope sample stage with a precise clamping structure according to claim 1 is as follows: S1. When the device is in use, the base (1) is provided with a steering plate (3). The intervals between the three sets of steering plates (3) can be used to be plugged and installed with the two sets of connecting plates (8) at the bottom of the base (11). After docking, the connecting plates (8) and the steering plates (3) can be connected by threaded connection through the setting of the fixed screw rod (9) and the limit nut (10). After the servo motor 4 on the base (1) is powered on, its output end can drive the rotation of the cross rod (5), and then drive the rotation of the steering rod (6). The steering rod (6) is connected by the steering plate (3). After the servo motor (4) is working, its output end can drive the steering plate (3) and the connecting plate (8) and the base (11) to rotate, and the interior of the base (11) can be installed and connected to the fixed seat (12) by means of a threaded connection. The fixed seat (12) can be used for sample placement and detection through the setting of the sample table (13). The sample table (13) can be driven by the power seat (15) to drive the electric telescopic rod (16) to extend and retract, thereby driving the sliding of the positioning clamp (17), so that it can be used for the extrusion and clamping of the sample on the sample table (13); S2. The bottom of the base (11) can be set by a stepper motor (37). After the stepper motor (37) is powered on, its output end can drive the limit rotation of the driving rod (38), and then drive the rotation of the limit gear (39). The limit gear (39) and the limit rack (23) are connected through a meshing connection. The rotation of the limit gear (39) can drive the steering wheel (22) to rotate inside the base (11), and the setting of the connecting slider (27) increases the rotatability of the reinforcement seat (25) in the fixed seat (12). The rotation of the stepper motor (37) can drive the rotation of the reinforcement seat (25) and the sample stage (13); S3. When the top of the sample table (13) is used to place the object to be tested, the electric telescopic rod (16) is used to push the positioning clamp (17) to clamp and fix it. The top of the sample table (13) can be provided with a through groove (28) so that the clamping block (29) can slide within the through groove (28). The setting of the limiting rod (30) and the limiting tube (31) and the sliding property of the limiting rod (30) within the limiting tube (31) assist the sliding of the clamping block (29). When the sample table (13) is used to place the object, the placement of the object can force the sliding of the clamping block (29); S4. When the device is finished in use, the connecting plate (8) and the steering plate (3) can be disassembled by rotating the fixed screw (9) and the limit nut (10), and then the connecting plate (8) and the base (11) can be disassembled on the basis of the steering plate (3). The interior of the base (11) is installed by a threaded connection. The fixed seat (12) can be disassembled by rotating the limit handle (32), and then the sample stage (13) can be disassembled.

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