Piezoelectric ceramic driving array and surface shape adjusting method

Abstract

The present disclosure provides a piezoelectric ceramic driving array and a surface shape adjustment method. The piezoelectric ceramic driving array comprises a bottom electrode layer, a piezoelectric ceramic array and an insulating layer which are sequentially stacked, the bottom electrode layer comprises arrayed bottom electrodes; the piezoelectric ceramic array comprises at least one layer of piezoelectric ceramic array units, and the plurality of layers of piezoelectric ceramic array units are stacked, each layer of piezoelectric ceramic array units comprises a positive electrode layer and a negative electrode layer which are stacked; the positive electrode layer comprises a first piezoelectric ceramic sheet and a positive electrode array formed on the surface of the first piezoelectric ceramic sheet, and the negative electrode layer comprises a second piezoelectric ceramic sheet and a negative electrode array formed on the surface of the second piezoelectric ceramic sheet; each positive electrode on the same positive electrode layer is independent of each other, and the positive electrodes at the same position on different positive electrode layers are connected to the bottom electrode at the corresponding position after being adjacent; each negative electrode on the same negative electrode layer is connected to at least one adjacent negative electrode, and the negative electrodes at the same position on the edges of different negative electrode layers are connected to an external circuit after being adjacent.

Description

Technical Field

[0001] This disclosure relates to the field of processing technology, and in particular to a piezoelectric ceramic driving array and a method for adjusting its surface shape. Background Technology

[0002] Traditional stacked piezoelectric ceramics consist of numerous ceramic sheets with internal electrodes positioned between adjacent sheets. These internal electrodes supply driving current to the ceramic sheets. Power supply electrodes are located on both sides of the ceramic sheets and supply power to the internal electrodes. Because the power supply electrodes are positioned on both sides of the ceramic sheets, and the lateral dimensions of the internal electrodes are the same as the lateral dimensions of the ceramic sheets, the entire lateral surface of the ceramic sheets can participate in actuation, providing a large force without localized electric field deformation.

[0003] Currently, to meet millimeter-scale deformation actuation requirements, the lateral dimensions of traditional stacked piezoelectric ceramics need to be processed to the millimeter level. Because the ceramic sheet is stacked with the internal electrode layer, the process is complex, making it impossible to guarantee the processing quality and yield of individual millimeter-scale piezoelectric ceramics. Furthermore, arranging small-sized piezoelectric ceramics into a large-area deformation output array requires numerous piezoelectric ceramic units, resulting in a huge processing volume, and it is also difficult to arrange the wires that introduce current to all the piezoelectric ceramic units. Therefore, traditional stacked piezoelectric ceramics can only be used for small-area deformation applications and cannot be applied to providing different deformations at different locations within a larger area. Summary of the Invention

[0004] To address the aforementioned technical problems, this disclosure provides a piezoelectric ceramic driving array and surface shape adjustment method, which at least partially solves the technical problem that traditional stacked piezoelectric ceramics in existing alignment technologies can only be used for small-area deformation and cannot be applied to different locations in a larger area to provide different deformations.

[0005] Based on this, the first aspect of this disclosure provides a piezoelectric ceramic driving array, comprising: a base plate electrode layer, a piezoelectric ceramic array, and an insulating layer stacked sequentially, wherein: the base plate electrode layer includes base plate electrodes arranged in an array; the piezoelectric ceramic array includes at least one layer of piezoelectric ceramic array units, and multiple layers of piezoelectric ceramic array units are stacked, each layer of piezoelectric ceramic array units including a stacked positive electrode layer and a negative electrode layer; each positive electrode layer includes a first piezoelectric ceramic sheet and a positive electrode array formed on the surface of the first piezoelectric ceramic sheet, and each negative electrode layer includes a second piezoelectric ceramic sheet and a negative electrode array formed on the surface of the second piezoelectric ceramic sheet; each positive electrode on the same positive electrode layer is independent of each other, and positive electrodes at the same position on different positive electrode layers are connected to the corresponding base plate electrode after being adjacent to each other; each negative electrode on the same negative electrode layer is connected to at least one adjacent negative electrode, and negative electrodes at the same position on the edges of different negative electrode layers are connected to an external circuit after being adjacent to each other.

[0006] According to embodiments of this disclosure, the positive and negative electrode layers of each piezoelectric ceramic array unit are arranged in the same direction. The arrangement direction of the positive and negative electrode layers of each piezoelectric ceramic array unit includes: the electrode layer near the bottom plate electrode is the positive electrode layer, and the electrode layer near the insulating layer is the negative electrode layer; or, the electrode layer near the bottom plate electrode is the negative electrode layer, and the electrode layer near the insulating layer is the positive electrode layer.

[0007] According to embodiments of this disclosure, each positive electrode layer has a first positive electrode and a second positive electrode. The first positive electrode is located at the edge of the first piezoelectric ceramic sheet and is connected to the first positive electrode of other positive electrode layers at the same position through a first conductive post disposed at the edge of the first piezoelectric ceramic sheet. The bottom end of the first conductive post is connected to the bottom plate electrode at the corresponding position. The second positive electrode is located in the non-edge area of ​​the first piezoelectric ceramic sheet and is connected to the second positive electrode of other positive electrode layers at the same position through a second conductive post passing through a through hole in the first and second piezoelectric ceramic sheets. The bottom end of the second conductive post is connected to the bottom plate electrode at the corresponding position.

[0008] According to embodiments of this disclosure, each negative electrode layer has a first negative electrode and a second negative electrode. The first negative electrode is located at the edge of the second piezoelectric ceramic sheet and is connected to the first negative electrode of other negative electrode layers at the same position through a third conductive post disposed at the edge of the second piezoelectric ceramic sheet. The second negative electrode is located in the non-edge region of the second piezoelectric ceramic sheet and is connected to the second negative electrodes adjacent to it on all four sides.

[0009] According to embodiments of this disclosure, each positive electrode in the positive electrode array has the same position and size as each negative electrode in the negative electrode array.

[0010] According to embodiments of this disclosure, the orientation of the positive electrode in the positive electrode array is the same as the orientation of the negative electrode in the negative electrode array.

[0011] According to embodiments of this disclosure, the array arrangement of each positive electrode in the positive electrode array or each negative electrode in the negative electrode array is a triangular array arrangement, a rectangular array arrangement, a regular polygonal array arrangement, or a circular array arrangement.

[0012] According to embodiments of this disclosure, the cross-sectional shape of the positive or negative electrode is triangular, rectangular, regular polygonal, or circular.

[0013] According to embodiments of this disclosure, each base plate electrode is independently connected to an external circuit for supplying power to the positive electrode.

[0014] The second aspect of this disclosure provides a surface shape adjustment method based on the aforementioned piezoelectric ceramic driving array, comprising: attaching the workpiece to be adjusted to the surface of an insulating layer; acquiring the deformation at each position on the surface of the workpiece to be adjusted, converting the deformation at each position into a potential difference to be applied to the corresponding electrode; and controlling an external circuit to apply a potential difference of a corresponding magnitude to the positive and negative electrodes at the corresponding positions through the base plate electrode, so as to adjust the shape of the surface of the workpiece to be adjusted.

[0015] The piezoelectric ceramic driving array and surface shape adjustment method provided in the embodiments of this disclosure have at least the following beneficial effects:

[0016] This piezoelectric ceramic drive array directly processes small-sized electrode units on a large-area piezoelectric ceramic sheet. Compared to processing small-sized piezoelectric ceramic sheets and electrodes into piezoelectric ceramic units and then splicing them together, it eliminates the need to arrange small-sized piezoelectric ceramics into a large-area deformation output array, greatly reducing the amount of processing, improving processing quality and yield, and thus being suitable for providing different deformations at different locations within a larger area.

[0017] Furthermore, since the feasibility of splicing the electrodes after processing them separately with the piezoelectric ceramic sheet needs to be considered, the electrodes cannot be processed too small. However, by directly processing small-sized electrode units on a large-area piezoelectric ceramic sheet without a splicing process, the size of the electrode units can be flexibly controlled, and even smaller electrode units can be processed, thereby achieving smaller deformation control.

[0018] Furthermore, by creating openings in the piezoelectric ceramic sheet, the positive electrodes at specific locations can be independently controlled, reducing the complexity of connecting multiple independent circuits for the positive electrodes. Moreover, the electrodes at corresponding locations in each layer are first connected adjacent to each other via conductive posts, and then centrally connected to external circuit points, eliminating messy electrode lines within the piezoelectric ceramic array, further reducing connection complexity and improving connection efficiency. Attached Figure Description

[0019] The above and other objects, features and advantages of this disclosure will become clearer from the following description of embodiments with reference to the accompanying drawings, in which:

[0020] Figure 1 An exploded view of the structure of the piezoelectric ceramic drive array provided in an embodiment of this disclosure is shown schematically.

[0021] Figure 2 A schematic diagram of the positive electrode layer structure provided in an embodiment of this disclosure is shown.

[0022] Figure 3 An axonometric view of a piezoelectric ceramic array provided in an embodiment of the present disclosure is shown schematically.

[0023] Figure 4 The diagram schematically illustrates the connection between the second conductor post and the base plate electrode provided in an embodiment of this disclosure.

[0024] Figure 5 A bottom view of a piezoelectric ceramic array provided in an embodiment of this disclosure is shown schematically.

[0025] Figure 6 A cross-sectional view of a piezoelectric ceramic array provided in an embodiment of this disclosure is shown schematically.

[0026] Figure 7 The diagram illustrates the negative electrode layer structure provided in an embodiment of this disclosure.

[0027] Figure 8 A flowchart illustrating the surface adjustment method provided in an embodiment of this disclosure is shown schematically.

[0028] [Attached image labels]

[0029] 1-Base plate electrode layer, 11-Base plate electrode, 2-Piezoelectric ceramic array, 21-Piezoelectric ceramic array unit, 22-Positive electrode layer, 221-First piezoelectric ceramic sheet, 222-Positive electrode, 2221-First positive electrode, 2222-Second positive electrode, 223-First through hole, 23-Negative electrode layer, 231-Second piezoelectric ceramic sheet, 232-Negative electrode, 2321-First negative electrode, 2322-Second negative electrode, 233-Second through hole, 3-Insulating layer, 4-First conductor post, 5-Second conductor post, 6-Third conductor post. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this disclosure clearer, the following detailed description is provided in conjunction with specific embodiments and accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without inventive effort are within the scope of protection of this disclosure.

[0031] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0032] In this disclosure, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0033] In the description of this disclosure, it should be understood that the terms "longitudinal", "length", "circumferential", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the subsystem or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.

[0034] Throughout the accompanying drawings, identical elements are represented by the same or similar reference numerals. Conventional structures or constructions have been omitted where they may cause confusion in understanding this disclosure. Furthermore, the shapes, dimensions, and positional relationships of the components in the drawings do not reflect actual size, scale, or actual positional relationships. Additionally, any reference numerals placed between parentheses in the claims should not be construed as limiting the claims.

[0035] Similarly, to simplify this disclosure and aid in understanding one or more of the various aspects of the disclosure, in the above description of exemplary embodiments of the present disclosure, various features of the present disclosure are sometimes grouped together in a single embodiment, figure, or description thereof. The use of terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refers to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present disclosure. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this disclosure, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0037] Figure 1 An exploded view of the structure of the piezoelectric ceramic drive array provided in an embodiment of this disclosure is shown schematically.

[0038] like Figure 1 As shown, the piezoelectric ceramic driving array may include, for example, a base plate electrode layer 1, a piezoelectric ceramic array 2, and an insulating layer 3 stacked sequentially.

[0039] The base plate electrode layer 1 includes an array of base plate electrodes 11, each of which is connected to an external circuit to supply power to the piezoelectric ceramic array 2.

[0040] The piezoelectric ceramic array 2 includes at least one layer of piezoelectric ceramic array unit 21. When there are two or more layers of piezoelectric ceramic array unit 21, the multilayer piezoelectric ceramic array unit 21 is stacked.

[0041] Each piezoelectric ceramic array unit 21 includes a stacked positive electrode layer 22 and a negative electrode layer 23. Each positive electrode layer 22 includes a first piezoelectric ceramic sheet 221 and a positive electrode array formed on the surface of the first piezoelectric ceramic sheet 221. Each negative electrode layer 23 includes a second piezoelectric ceramic sheet 231 and a negative electrode array formed on the surface of the second piezoelectric ceramic sheet 231. The positive electrodes 222 on the same positive electrode layer 22 are independent of each other. Positive electrodes 222 at the same position on different positive electrode layers 22 are connected to the corresponding base plate electrode 11 after being adjacent to each other. Each negative electrode 232 on the same negative electrode layer 23 is connected to at least one adjacent negative electrode 232. Negative electrodes 232 at the same position on the edges of different negative electrode layers 23 are connected to an external circuit after being adjacent to each other.

[0042] The insulating layer 3 is located on top of the piezoelectric ceramic drive array. During use, different deformations at different locations are output through this insulating layer, and it is insulated from the outside.

[0043] It should be understood that the areas of the first piezoelectric ceramic sheet 221 and the second piezoelectric ceramic sheet 231 can generally be the same, and the size of the area can be determined according to the actual application requirements. For example, if the piezoelectric ceramic driving array is applied to a small-area deformation scenario, a small-area piezoelectric ceramic sheet can be selected, and then an electrode array can be fabricated on the small-area piezoelectric ceramic sheet. If the piezoelectric ceramic driving array is applied to a large-area deformation scenario, a large-area piezoelectric ceramic sheet can be selected, and then an electrode array can be fabricated on the large-area piezoelectric ceramic sheet. In other words, the piezoelectric ceramic driving array provided in the embodiments of this disclosure satisfies both small-area and large-area deformation scenarios.

[0044] It should be understood that since the piezoelectric ceramic driving array is fabricated directly on a single sheet of piezoelectric ceramic, without considering the process of individually processing and splicing electrodes, the size of the electrodes in the array can be flexibly controlled. For large-size deformation control, large-size electrodes are fabricated; for small-size deformation control, small-size electrodes are fabricated. In other words, the piezoelectric ceramic driving array provided in this embodiment satisfies both large-size and small-size deformation control.

[0045] Furthermore, the positive electrode layer 22 and negative electrode layer 23 of each piezoelectric ceramic array unit 21 are arranged in the same direction. The arrangement direction of the positive electrode layer 22 and negative electrode layer 23 of each piezoelectric ceramic array unit 21 can be: the electrode layer near the bottom plate electrode 11 is the positive electrode layer 22, and the electrode layer near the insulating layer 3 is the negative electrode layer 23, or the electrode layer near the bottom plate electrode 11 is the negative electrode layer 23, and the electrode layer near the insulating layer 3 is the positive electrode layer 22. With this arrangement, there is a potential difference between the positive electrode layer 22 and the negative electrode layer 23 between adjacent piezoelectric ceramic array units 21, forming an electric field. The piezoelectric ceramic sheet between the two electrode layers deforms under the action of the electric field and outputs the deformation amount at different points. Figure 1 In the piezoelectric ceramic driving array shown, the positive electrode layer 22 is disposed above the negative electrode layer 23. In other embodiments, the negative electrode layer 23 can also be disposed above the positive electrode layer 22. That is, the upper and lower relative positions of the positive electrode layer 22 and the negative electrode layer 23 in each piezoelectric ceramic array unit 21 change, which does not affect the performance of the piezoelectric ceramic driving array.

[0046] Furthermore, the orientation of the positive electrode 222 in the positive electrode array is the same as the orientation of the negative electrode 232 in the negative electrode array. For example... Figure 1 As shown, the orientation of the positive electrode 222 and the negative electrode 232 can both point towards the insulating layer 3. It should be understood that the orientation of the positive electrode 222 and the negative electrode 232 can also both point towards the base plate electrode 11.

[0047] Furthermore, each positive electrode 222 in the positive electrode array has the same position and size as each negative electrode 232 in the negative electrode array, which facilitates processing.

[0048] Based on the above embodiments, the following is combined with Figures 2-7 right Figure 1 The piezoelectric ceramic array shown will be further described in detail.

[0049] Figure 2 A schematic diagram of the positive electrode layer structure provided in an embodiment of this disclosure is shown. Figure 3 An axonometric view of a piezoelectric ceramic array provided in an embodiment of the present disclosure is shown schematically. Figure 4The diagram schematically illustrates the connection between the second conductor post and the base plate electrode provided in an embodiment of this disclosure. Figure 5 A bottom view of a piezoelectric ceramic array provided in an embodiment of this disclosure is shown schematically. Figure 6 A cross-sectional view of a piezoelectric ceramic array provided in an embodiment of this disclosure is shown schematically. Figure 7 The diagram illustrates the negative electrode layer structure provided in an embodiment of this disclosure.

[0050] like Figure 2 and Figure 3 As shown, the positive electrodes 222 on each positive electrode layer 22 are divided into a first positive electrode 2221 and a second positive electrode 2222. The first positive electrode 2221 is located at the edge of the first piezoelectric ceramic sheet 221 and is connected to the first positive electrodes 2221 of other positive electrode layers 22 through a first conductive post 4 disposed at the edge of the first piezoelectric ceramic sheet 221. The bottom end of the first conductive post 4 is connected to the bottom plate electrode 11 at the corresponding position.

[0051] like Figures 2-7 As shown, the second positive electrode 2222 is located in the non-edge region of the first piezoelectric ceramic sheet 221. It is connected to the second positive electrode 2222 of the other positive electrode layers 22 through the second lead post 5 passing through the first through hole 223 on the first piezoelectric ceramic sheet 221 and the second through hole 233 on the second piezoelectric ceramic sheet 231. The bottom end of the second lead post 5 is connected to the bottom plate electrode 11 at the corresponding position.

[0052] like Figure 3 , Figures 5-7 As shown, each negative electrode layer 23 has two negative electrodes 232: a first negative electrode 2321 and a second negative electrode 2322. The first negative electrode 2321 is located at the edge of the second piezoelectric ceramic sheet 231 and is connected to the first negative electrodes 2321 of other negative electrode layers 23 at the same position via a third conductive post 6 located at the edge of the second piezoelectric ceramic sheet 231. It should be noted that the number and position of the first negative electrodes 2321 can be selected according to actual needs. If the number is too small, fewer current paths will be formed, and the piezoelectric ceramic will lose its deformation driving function after all current paths are damaged. If the number is too large, more current paths will be formed, and the number of piezoelectric ceramic array unit 21 layers and the interlayer third conductive posts 6 required for processing will increase, thus increasing the processing workload.

[0053] like Figure 7As shown, the second negative electrode 2322 is located in the non-edge region of the second piezoelectric ceramic sheet 231, and the second negative electrode 2322 is connected to all adjacent second negative electrodes 2322. It should be noted that there is a connection between two adjacent second negative electrodes 2322, which normally allows the circuit to conduct. However, due to the small size of the electrode unit itself, in order to avoid the circuit between negative electrode units being unable to conduct due to the damage of a single connection, the second negative electrode 2322 is connected to all adjacent second negative electrodes 2322.

[0054] Based on the above embodiments, the array arrangement of each positive electrode 222 in the positive electrode array or each negative electrode 232 in the negative electrode array can be a triangular array, a rectangular array, a regular polygonal array, or a ring array, etc. Generally, in order to facilitate processing and layout and to ensure that the outwardly output deformation field can adapt to various different scenarios, the array arrangement of each negative electrode 232 in the positive electrode 222 or negative electrode array is preferably rectangular. For example, the positive electrode array includes M×N positive electrodes 222, and the negative electrode array includes M×N negative electrodes 232.

[0055] Based on the above embodiments, the cross-sectional shape of the positive electrode 222 or the negative electrode 232 is triangular, rectangular, regular polygonal, or circular, etc. Generally, for ease of processing, the cross-section of the positive electrode 222 or the negative electrode 232 is chosen to be circular. The material of the positive electrode 222 or the negative electrode 232 is a conductive material.

[0056] Based on the above embodiments, each base plate electrode 11 is independently connected to an external circuit to supply power to the positive electrode 222.

[0057] It should be noted that the number of layers of the piezoelectric ceramic array unit 21 provided in this embodiment can be determined according to the required deformation. For example, if the maximum deformation of one layer of piezoelectric ceramic array unit 21 is 0.1 times its thickness h, and the maximum outward deformation of the required piezoelectric ceramic drive array is 0.3h, then three layers of piezoelectric ceramic array unit 21 are required.

[0058] The working principle of the aforementioned piezoelectric ceramic driven array is as follows: Different or the same potential is applied to each base plate electrode 11 via an external circuit. The base plate electrode 11 transmits the potential to the positive electrode 222 in the positive electrode layer 22 of each piezoelectric ceramic array unit 21 through the first conductor post 4 or the second conductor post 5. The negative electrodes 232 and the third conductor post 6 are interconnected and connected to the external circuit, occupying the same potential. When a potential difference exists between the positive and negative electrodes at the same position, the first piezoelectric ceramic sheet 221 and the second piezoelectric ceramic sheet 231 deform under the action of the electric field. Within each piezoelectric ceramic array unit 21, a potential difference exists between the positive electrode 222 and the negative electrode 232 between adjacent piezoelectric ceramic array units 21, forming an electric field. The first piezoelectric ceramic sheet 221 and the second piezoelectric ceramic sheet 231 corresponding to the positive electrode 222 and the negative electrode 232, respectively, deform under the action of the electric field. The deformation of the multiple piezoelectric ceramic array units 21 is superimposed, outputting the deformation amount at different points outwards.

[0059] In summary, the piezoelectric ceramic driving array provided in this disclosure, by directly fabricating small-sized electrode units on a large-area piezoelectric ceramic sheet, is not only suitable for providing different deformations at different locations within a large area, but also enables deformation control at smaller dimensions. Furthermore, the concentrated external circuit points of the piezoelectric ceramic driving array reduce connection complexity and improve connection efficiency.

[0060] Based on the same inventive concept, this disclosure also provides a surface shape adjustment method, which is implemented based on the electro-ceramic driving array described above.

[0061] Figure 8 A flowchart illustrating the surface adjustment method provided in an embodiment of this disclosure is shown schematically.

[0062] like Figure 8 As shown, the surface shape adjustment method may include, for example, operations S801 to S803.

[0063] In operation S801, the workpiece to be adjusted is attached to the surface of the insulating layer.

[0064] In operation S802, the deformation at each position on the surface of the workpiece to be adjusted is obtained, and the deformation at each position is converted into the potential difference that needs to be applied to the corresponding electrode.

[0065] When operating S803, the external control circuit applies a potential difference of a corresponding magnitude to the positive and negative electrodes at the corresponding positions through the base plate electrodes in order to adjust the shape of the workpiece surface to be adjusted.

[0066] It should be noted that the specific implementation details and technical effects of the surface shape adjustment method provided in the embodiments of this disclosure correspond to the specific implementation details and technical effects of the electro-ceramic driving array provided in the embodiments of this disclosure, and will not be repeated here.

[0067] The specific embodiments described above further illustrate the purpose, technical solutions, and beneficial effects of this disclosure. It should be understood that the above descriptions are merely specific embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the protection scope of this disclosure.

Claims

1. A piezoelectric ceramic driving array, characterized in that, include: The bottom electrode layer, piezoelectric ceramic array, and insulating layer are stacked sequentially, wherein: The base plate electrode layer includes an array of base plate electrodes; The piezoelectric ceramic array includes at least one layer of piezoelectric ceramic array unit, and multiple layers of piezoelectric ceramic array units are stacked. Each layer of piezoelectric ceramic array unit includes a stacked positive electrode layer and a negative electrode layer. Each positive electrode layer includes a first piezoelectric ceramic sheet and a positive electrode array formed on the surface of the first piezoelectric ceramic sheet, and each negative electrode layer includes a second piezoelectric ceramic sheet and a negative electrode array formed on the surface of the second piezoelectric ceramic sheet. Each positive electrode on the same positive electrode layer is independent of the others. Positive electrodes at the same position on different positive electrode layers are connected to the corresponding base plate electrode after being adjacent to each other. Each negative electrode on the same negative electrode layer is connected to at least one adjacent negative electrode, and negative electrodes at the same position on the edge of different negative electrode layers are connected to an external circuit after being adjacent to each other. In each positive electrode layer, the positive electrode is divided into a first positive electrode and a second positive electrode; The first positive electrode is located at the edge of the first piezoelectric ceramic sheet and is connected to the first positive electrode of other positive electrode layers at the same position by a first conductive post disposed at the edge of the first piezoelectric ceramic sheet. The bottom end of the first conductive post is connected to the bottom plate electrode at the corresponding position. The second positive electrode is located in the non-edge region of the first piezoelectric ceramic sheet. It is connected to the second positive electrode at the same position as the other positive electrode layers by a second conductive post passing through the through holes on the first and second piezoelectric ceramic sheets. The bottom end of the second conductive post is connected to the bottom plate electrode at the corresponding position.

2. The piezoelectric ceramic driving array according to claim 1, characterized in that, The positive and negative electrode layers of each piezoelectric ceramic array unit are arranged in the same direction. The arrangement directions of the positive and negative electrode layers of each piezoelectric ceramic array unit include: The electrode layer closest to the base plate electrode is the positive electrode layer, and the electrode layer closest to the insulating layer is the negative electrode layer; Alternatively, the electrode layer closest to the base plate electrode can be the negative electrode layer, and the electrode layer closest to the insulating layer can be the positive electrode layer.

3. The piezoelectric ceramic driving array according to claim 1, characterized in that, Each negative electrode layer has a first negative electrode and a second negative electrode. The first negative electrode is located at the edge of the second piezoelectric ceramic sheet and is connected to the first negative electrode of other negative electrode layers through a third conductive post disposed at the edge of the second piezoelectric ceramic sheet. The second negative electrode is located in the non-edge region of the second piezoelectric ceramic sheet, and the second negative electrode is connected to the surrounding second negative electrodes.

4. The piezoelectric ceramic driving array according to any one of claims 1-3, characterized in that, Each positive electrode in the positive electrode array has the same position and size as each negative electrode in the negative electrode array.

5. The piezoelectric ceramic driving array according to any one of claims 1-3, characterized in that, The orientation of the positive electrodes in the positive electrode array is the same as the orientation of the negative electrodes in the negative electrode array.

6. The piezoelectric ceramic driving array according to any one of claims 1-3, characterized in that, The array arrangement of each positive electrode in the positive electrode array or each negative electrode in the negative electrode array can be a triangular array, a rectangular array, a regular polygonal array, or a circular array.

7. The piezoelectric ceramic driving array according to any one of claims 1-3, characterized in that, The cross-sectional shape of the positive electrode or the negative electrode is triangular, rectangular, regular polygonal, or circular.

8. The piezoelectric ceramic driving array according to claim 1, characterized in that, Each of the base plate electrodes is independently connected to an external circuit for supplying power to the positive electrode.

9. A surface shape adjustment method, said surface shape adjustment method being implemented based on the piezoelectric ceramic driving array according to any one of claims 1-8, characterized in that, include: The workpiece to be adjusted is attached to the surface of the insulating layer; Obtain the deformation at each position on the surface of the workpiece to be adjusted, and convert the deformation at each position into the potential difference that needs to be applied to the corresponding electrode. The external control circuit applies a potential difference of a corresponding magnitude to the positive and negative electrodes at corresponding positions through the base plate electrodes in order to adjust the shape of the surface of the workpiece to be adjusted.

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