Clamp for high-vacuum equipment and clamp design method for high-vacuum equipment

Abstract

This invention provides a fixture for high vacuum equipment and its design method. The fixture includes: a fixing part; a clamping part connected to the fixing part and capable of translation or rotation relative to the fixing part; a driving part, with its two ends connected to the fixing part and the clamping part respectively; and a temperature control part for regulating the temperature of the driving part. When the temperature of the driving part changes from an initial temperature to a target temperature, the length of the driving part changes from an initial linear length to a target linear length, driving the clamping part to translate relative to the fixing part from an initial linear position to the target linear position; or when the temperature of the driving part changes from an initial temperature to the target temperature, the length of the driving part changes from an initial arc length to a target arc length, driving the clamping part to rotate relative to the fixing part from an initial angular position to a target angular position. This fixture can ensure precise motion control while avoiding negative impacts on the airtightness of the high vacuum equipment.

Description

Technical Field

[0001] This invention relates to the field of high vacuum equipment technology, and in particular to a fixture for high vacuum equipment and a design method for such a fixture. Background Technology

[0002] High vacuum equipment typically includes transfer devices or processing auxiliary devices. Transfer devices are used to move samples from one processing unit to another, or to perform positional movements and positioning within a single unit; processing auxiliary devices are used to perform specific operations on samples, such as rotation and flipping, to meet manufacturing process requirements. Therefore, it is necessary to couple external operating devices with internal transfer or operating devices; mechanical coupling or magnetic coupling are commonly used in related technologies.

[0003] However, mechanical coupling usually requires drilling holes in the equipment to connect the internal and external devices, which can easily lead to air leakage and affect the vacuum level of high vacuum equipment. While magnetic coupling does not require drilling holes in the equipment, it is a non-contact coupling method, which can easily cause delays and result in poor control precision of motion. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art or related art.

[0005] Therefore, a first aspect of the embodiments of this application provides a clamp for a high vacuum device.

[0006] A second aspect of this application provides a method for designing fixtures for high vacuum equipment.

[0007] In view of this, a high vacuum equipment clamp according to the first aspect of the embodiments of this application includes:

[0008] Fixing part;

[0009] The clamping part is connected to the fixing part and can translate or rotate relative to the fixing part;

[0010] The driving unit has two ends connected to the fixing unit and the clamping unit, respectively;

[0011] The temperature control unit is used to regulate the temperature of the drive unit;

[0012] In this case, when the temperature of the driving unit changes from the initial temperature to the target temperature, the length of the driving unit changes from the initial linear length to the target linear length, and drives the clamping unit to translate relative to the fixed unit from the initial linear position to the target linear position; or

[0013] When the temperature of the drive unit changes from the initial temperature to the target temperature, the length of the drive unit changes from the initial arc length to the target arc length, and drives the clamping part to rotate relative to the fixed part from the initial angle position to the target angle position.

[0014] In one possible implementation, where the clamping part can translate relative to the fixing part, the fixing part includes a fixing plate;

[0015] The drive unit has a linear strip structure, with the first end of the drive unit connected to the fixed plate and the second end of the drive unit connected to the clamping unit.

[0016] When the temperature of the drive unit changes from the initial temperature to the target temperature, the straight length between the first end and the second end changes from the initial straight length to the target straight length, and the clamping part is driven to translate relative to the fixed part from the initial straight position to the target straight position.

[0017] In one feasible implementation, when the clamping part is rotatable relative to the fixing part, the fixing part includes a fixing frame and a bushing, and the clamping part includes a rotating shaft and a carrier plate.

[0018] The bushing is located on the inner side wall of the fixed frame;

[0019] The carrier plate is set inside the fixed frame, the rotating shaft is connected to the carrier plate, and the rotating shaft is rotatably inserted through the bushing;

[0020] The drive unit has a spiral strip structure, and the third end of the drive unit is connected to the bushing, while the fourth end of the drive unit is connected to the end of the carrier plate away from the rotating shaft.

[0021] When the temperature of the drive unit changes from the initial temperature to the target temperature, the arc length between the third end and the fourth end changes from the initial arc length to the target arc length, and drives the carrier plate to rotate from the initial angle position to the target angle position.

[0022] In one feasible implementation, the drive unit is made of a nickel alloy.

[0023] In one feasible implementation, the drive unit is made of a thermal bimetallic material.

[0024] In one feasible implementation, the temperature control unit is also used to regulate the temperature of the clamping unit.

[0025] In one feasible implementation, the fixture for high vacuum equipment further includes:

[0026] The locking part is used to prevent the clamping part from translating or rotating relative to the fixed part when the clamping part is located in a target linear position or a target angular position.

[0027] A method for designing a fixture for high vacuum equipment according to a second aspect of the embodiments of this application is provided, for designing a drive unit for a fixture for high vacuum equipment as described in any of the first aspects above, comprising:

[0028] Determine the motion relationship between the clamping part and the fixing part, wherein the motion relationship includes relative translation and relative rotation;

[0029] Determine the initial and target positions of the clamping part relative to the fixing part;

[0030] The initial temperature of the drive unit when the clamping part is in the initial position;

[0031] Given that the clamping part is in the target position, the target temperature corresponding to the driving part;

[0032] The material and dimensions of the drive unit are determined based on the initial position, target position, initial temperature, and target temperature.

[0033] In one feasible implementation, when the motion relationship is relative translation, the initial position is the initial linear position, and the target position is the target linear position;

[0034] When the motion relationship is relative translation, the driving part is a linear strip structure.

[0035] In one feasible implementation, when the motion relationship is relative rotation, the initial position is the initial angular position, and the target position is the target angular position;

[0036] When the motion relationship is relative rotation, the drive unit is a spiral strip structure.

[0037] Compared with the prior art, the present invention has at least the following beneficial effects: The high vacuum equipment clamp provided by the present invention includes a fixing part, a clamping part, a driving part, and a temperature control part. The clamping part is connected to the fixing part and can translate or rotate relative to the fixing part. The clamping part is used to clamp the workpiece, and when the clamping part translates or rotates relative to the fixing part, it drives the workpiece to move synchronously, so that the workpiece can be positioned according to the process requirements. Both ends of the driving part are connected to the fixing part and the clamping part respectively, and the temperature control part is used to adjust the temperature of the driving part. Furthermore, when the temperature of the driving part changes from an initial temperature to a target temperature, the length of the driving part can change from an initial linear length to a target linear length, and drive the clamping part to translate relative to the fixing part from the initial linear position to the target linear position, thereby realizing the translation of the clamping part relative to the fixing part; or, when the temperature of the driving part changes from an initial temperature to a target temperature, the length of the driving part can change from an initial arc length to a target arc length, and drive the clamping part to rotate relative to the fixing part from an initial angular position to the target angular position, thereby realizing the rotation of the clamping part relative to the fixing part. Because the drive unit in the high-vacuum equipment clamp provided in this application can change its length with temperature variations, and drive the clamping unit to translate or rotate relative to the fixed unit based on this length change, precise motion control of the clamping unit can be achieved by adjusting the temperature of the drive unit according to the relationship between the length of the drive unit and temperature. Furthermore, when this clamp is placed inside the vacuum chamber of the high-vacuum equipment, motion control can be completed without drilling holes in the high-vacuum equipment or applying non-contact forces to the clamp. This ensures precise motion control without negatively impacting the airtightness of the high-vacuum equipment, thus contributing to its reliability. Attached Figure Description

[0038] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of exemplary embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0039] Figure 1 A schematic application scenario diagram of a high vacuum equipment clamp provided in this application;

[0040] Figure 2 A schematic application scenario diagram of a high vacuum equipment clamp provided in this application;

[0041] Figure 3 A schematic application scenario diagram of a high vacuum equipment clamp provided in this application;

[0042] Figure 4 for Figure 3 A schematic cross-sectional view of a high-vacuum equipment clamp along the AA direction is shown.

[0043] Figure 5 A schematic application scenario diagram of a high vacuum equipment clamp provided in this application;

[0044] Figure 6 A schematic application scenario diagram of a high vacuum equipment clamp provided in this application;

[0045] Figure 7 A schematic flowchart illustrating a high-vacuum equipment fixture design method according to one embodiment of this application.

[0046] in, Figures 1 to 6 The correspondence between the reference numerals and component names in the attached drawings is as follows:

[0047] 100 Fixtures for high vacuum equipment; 200 Fixing part; 210 Fixing plate; 220 Baffle; 230 Fixing frame; 240 Bushing; 300 Clamping part; 310 Carrier plate; 320 Rotating shaft; 400 Drive part; 500 Workpiece. Detailed Implementation

[0048] Exemplary embodiments of the present application will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the scope of the present application to those skilled in the art.

[0049] like Figures 1 to 6 As shown, a high vacuum equipment clamp 100 according to the first aspect of the embodiments of this application includes:

[0050] Fixing part 200;

[0051] The clamping part 300 is connected to the fixing part 200 and can translate or rotate relative to the fixing part 200;

[0052] The driving part 400 has two ends connected to the fixing part 200 and the clamping part 300, respectively.

[0053] The temperature control unit is used to regulate the temperature of the drive unit 400;

[0054] When the temperature of the drive unit 400 changes from the initial temperature to the target temperature, the length of the drive unit 400 changes from the initial linear length to the target linear length, and drives the clamping unit 300 to translate relative to the fixing unit 200 from the initial linear position to the target linear position; or

[0055] When the temperature of the drive unit 400 changes from the initial temperature to the target temperature, the length of the drive unit 400 changes from the initial arc length to the target arc length, and drives the clamping unit 300 to rotate relative to the fixing unit 200 from the initial angle position to the target angle position.

[0056] The high-vacuum equipment clamp 100 provided by the present invention includes a fixing part 200, a clamping part 300, a driving part 400, and a temperature control part. The clamping part 300 is connected to the fixing part 200 and can translate or rotate relative to the fixing part 200. The clamping part 300 is used to clamp the workpiece 500, and when the clamping part 300 translates or rotates relative to the fixing part 200, it drives the workpiece 500 to move synchronously, so that the workpiece 500 can be positioned according to the process requirements.

[0057] Furthermore, when the temperature of the drive unit 400 changes from the initial temperature to the target temperature, the length of the drive unit 400 can change from the initial linear length to the target linear length, and drive the clamping unit 300 to translate relative to the fixed unit 200 from the initial linear position to the target linear position, thereby realizing the translation of the clamping unit 300 relative to the fixed unit 200; or, when the temperature of the drive unit 400 changes from the initial temperature to the target temperature, the length of the drive unit 400 can change from the initial arc length to the target arc length, and drive the clamping unit 300 to rotate relative to the fixed unit 200 from the initial angular position to the target angular position, thereby realizing the rotation of the clamping unit 300 relative to the fixed unit 200.

[0058] Since the drive part 400 in the high vacuum equipment clamp 100 provided in this application can change its length with the change of temperature, and drive the clamping part 300 to translate or rotate relative to the fixed part 200 based on the change of length, the clamping part 300 can be precisely controlled by adjusting the temperature of the drive part 400 according to the relationship between the length of the drive part 400 and the change of temperature.

[0059] Furthermore, with the high-vacuum equipment fixture 100 positioned within the vacuum chamber of the high-vacuum equipment, motion control can be achieved without drilling holes in the high-vacuum equipment or applying non-contact forces to the fixture. This ensures precise motion control without negatively impacting the airtightness of the high-vacuum equipment, thus contributing to its reliability. Simultaneously, the high-vacuum equipment fixture 100 possesses strong structural independence, allowing for convenient and quick maintenance and adjustments without affecting the normal operation of the main high-vacuum equipment system, significantly improving industrialization efficiency.

[0060] In some examples, such as Figure 1 and Figure 2As shown, when the clamping part 300 can translate relative to the fixing part 200, the fixing part 200 includes a fixing plate 210;

[0061] The drive unit 400 has a linear strip structure, and the first end of the drive unit 400 is connected to the fixing plate 210, and the second end of the drive unit 400 is connected to the clamping unit 300.

[0062] When the temperature of the driving unit 400 changes from an initial temperature to a target temperature, the straight-line length between the first end and the second end changes from the initial straight-line length to the target straight-line length, driving the clamping unit 300 to translate relative to the fixing unit 200 from the initial straight-line position to the target straight-line position. When the clamping unit 300 can translate relative to the fixing unit 200, the fixing unit 200 includes a fixing plate 210, the driving unit 400 is a straight strip structure, and its first end is connected to the fixing plate 210, and its second end is connected to the clamping unit 300. Figure 1 As shown, when the temperature of the drive unit 400 is the initial temperature T0, the straight-line length between the first end and the second end of the drive unit 400 is the initial straight-line length L0, and the clamping part 300 is located at the initial straight-line position relative to the fixing part 200. By adjusting the temperature of the drive unit 400 using the temperature control unit, the temperature of the drive unit 400 changes from the initial temperature T0 to the target temperature T. m At the same time, such as Figure 2 As shown, the straight length between the first and second ends of the drive unit 400 changes with temperature, transforming from an initial straight length L0 to a target straight length L m Therefore, when the length changes, the drive unit 400 will drive the clamping unit 300 to translate relative to the fixed unit 200, from the initial linear position to the target linear position. Furthermore, by adjusting the temperature of the drive unit 400, precise motion control of the clamping unit 300 when translating relative to the fixed unit 200 is achieved.

[0063] In some feasible examples, the drive unit 400 is arranged in the direction of translation of the clamping unit 300 relative to the fixing unit 200, and is located between the clamping unit 300 and the drive unit 400 on relatively close sides.

[0064] In some feasible examples, the fixing part 200 also includes a baffle 220; when the clamping part 300 is in the target straight position, the baffle 220 covers at least a portion of the clamping part 300.

[0065] It should be noted that high vacuum equipment is typically used for coating the surface of workpiece 500. In the coating process, the surface area to be processed on workpiece 500 at different process positions, as well as the coating material and method used, will vary. When the clamping part 300 is located at the target straight position, a baffle 220 is provided to cover at least a portion of the clamping part 300. The specific portion covering the clamping part 300 can be determined based on the process content corresponding to the initial straight position and the target straight position, so that the portion of the workpiece 500 processed at the initial straight position is covered by the baffle 220, while the portion of the workpiece 500 to be processed at the target straight position is exposed for further processing. It is understood that the workpiece 500 is located on the side of the clamping part 300 closest to the baffle 220.

[0066] In some feasible examples, the number of drive units 400 is multiple.

[0067] In some examples, such as Figures 3 to 6 As shown, when the clamping part 300 can rotate relative to the fixing part 200, the fixing part 200 includes a fixing frame 230 and a bushing 240, and the clamping part 300 includes a rotating shaft 320 and a carrier plate 310.

[0068] The bushing 240 is disposed on the inner side wall of the fixing frame 230;

[0069] The carrier plate 310 is disposed within the fixed frame 230, the rotating shaft 320 is connected to the carrier plate 310, and the rotating shaft 320 is rotatably inserted through the bushing 240.

[0070] The drive unit 400 has a spiral strip structure, and the third end of the drive unit 400 is connected to the bushing 240, and the fourth end of the drive unit 400 is connected to the end of the carrier plate 310 away from the rotating shaft 320.

[0071] When the temperature of the drive unit 400 changes from the initial temperature to the target temperature, the arc length between the third end and the fourth end changes from the initial arc length to the target arc length, and drives the carrier plate 310 to rotate from the initial angle position to the target angle position.

[0072] When the clamping part 300 is rotatable relative to the fixing part 200, the fixing part 200 includes a fixing frame 230 and a bushing 240, and the clamping part 300 includes a rotating shaft 320 and a carrier plate 310. The bushing 240 is disposed on the inner sidewall of the fixing frame 230, the carrier plate 310 is disposed within the fixing frame 230, and the rotating shaft 320 is connected to the carrier plate 310 and rotatably passes through the bushing 240. Figure 3 and Figure 4As shown, the drive unit 400 has a spiral strip structure. The third end of the drive unit 400 is connected to the bushing 240, and the fourth end of the drive unit 400 is connected to the end of the carrier plate 310 away from the rotating shaft 320. Figure 5 As shown, when the temperature of the drive unit 400 is the initial temperature T0, the arc length between the third end and the fourth end of the drive unit 400 is the initial arc length L. ’ 0. The clamping part 300 is positioned at the initial angle relative to the fixing part 200. By adjusting the temperature of the driving part 400 using the temperature control unit, the temperature of the driving part 400 changes from the initial temperature T0 to the target temperature T. m At the same time, such as Figure 6 As shown, the arc length between the third and fourth ends of the drive unit 400 changes with temperature, from the initial arc length L ’ 0 is converted into the target arc length L ’ m Therefore, when the length changes, the drive unit 400 will drive the clamping unit 300 to rotate relative to the fixed unit 200, translating from the initial angular position to the target angular position. Furthermore, by adjusting the temperature of the drive unit 400, precise motion control of the clamping unit 300 when rotating relative to the fixed unit 200 is achieved.

[0073] It is understandable that the correspondence between the arc length change of the drive part 400 and the angular position change of the clamping part 300 can be determined by analyzing the original length of the drive part 400, the structural dimensions of the clamping part 300, and the specific connection positions of the drive part 400 with the fixing part 200 and the clamping part 300 respectively.

[0074] In some feasible examples, there are two bushings 240, which are respectively disposed on two opposite side walls inside the fixed frame 230. The two ends of the rotating shaft 320 are respectively inserted through the two bushings 240, thereby improving the connection reliability between the clamping part 300 and the fixed frame 230, as well as the stability of the clamping part 300 when rotating relative to the fixed part 200.

[0075] In some feasible examples, the spiral-shaped drive section 400 has at least two turns. It should be noted that when the number of turns in the drive section 400 is small, changes in its arc length may cause changes in the radius of curvature, subtly altering the relationship between the changes in the arc length of the drive section 400 and the changes in the angular position of the clamping section 300. This affects the accuracy of controlling the rotation of the clamping section 300 relative to the fixed section 200. By setting the number of turns in the drive section 400 to at least two, the change in the radius of curvature caused by thermal deformation of the drive section 400 is reduced, thus enhancing the accuracy of motion control.

[0076] In some examples, the drive unit 400 is made of a nickel alloy.

[0077] Nickel alloys have a relatively stable coefficient of thermal expansion and good machinability. When the drive unit 400 drives the clamping unit 300 to translate, the drive unit 400 can be made of nickel alloy to ensure precise control of the translation of the clamping unit 300 by the drive unit 400.

[0078] In some feasible examples, the drive unit 400 is made of nickel-iron alloy.

[0079] In some feasible examples, the drive unit 400 is made of a nickel-based shape memory alloy.

[0080] In some examples, the drive unit 400 is made of a thermal bimetallic material.

[0081] When the ambient temperature changes, the bimetallic material will bend or rotate. When the clamping part 300 is rotated by the drive part 400, the drive part 400 can be made of bimetallic material. By taking advantage of the characteristic that the bimetallic material can produce arc-shaped changes when the temperature changes, the drive part 400 can accurately control the translation of the clamping part 300.

[0082] It should be noted that most materials exhibit thermal expansion when heated. For linear material specimens, thermal expansion typically manifests as a change in length in the radial or axial direction; for coiled material specimens, it typically manifests as a change in length in the arc direction. It is understandable that different materials have different thermal expansion characteristics, resulting in varying degrees of length change within the same temperature range. Understanding the thermal expansion characteristics of different materials allows for the determination of the material for the drive unit 400 by combining the temperature range during drive operation with the material's coefficient of thermal expansion.

[0083] In some examples, the temperature control unit is also used to regulate the temperature of the clamping unit 300.

[0084] During the coating process of workpiece 500 in high vacuum equipment, some processes usually have temperature requirements for workpiece 500. By setting up a temperature control unit, the temperature of clamping part 300 can also be adjusted. This allows for further temperature control of the workpiece 500 clamped on the clamping part 300, avoiding the need for additional heating devices for workpiece 500 in high vacuum equipment. This helps to improve the compactness of the high vacuum equipment structure and helps control the overall cost of the high vacuum equipment.

[0085] It should be noted that when the temperature control unit is also used to adjust the temperature of the clamping unit 300, the initial temperature of the driving unit 400 can be the first process temperature when the clamping unit 300 is in the initial linear position or the initial angular position, and the target temperature of the driving unit 400 can be the second process temperature when the clamping unit 300 is in the target linear position or the target angular position. Therefore, it is not necessary to implement temperature zoning control for the clamping unit 300 and the driving unit 400, which reduces the performance requirements of the temperature control unit and reduces the difficulty of operating the temperature control unit.

[0086] In some examples, the high vacuum equipment clamp 100 also includes:

[0087] The locking part is used to prevent the clamping part 300 from translating or rotating relative to the fixing part 200 when the clamping part 300 is located in a target linear position or a target angular position.

[0088] When the clamping part 300 is located at the target straight line position or the target angle position, in order to avoid the change of the straight length or relative length of the driving part 400 due to the temperature fluctuation of the driving part 400, the high vacuum equipment clamp 100 also includes a locking part. The locking part can fix the current posture of the clamping part 300 when the clamping part 300 is located at the target straight line position or the target angle position, and prevent the clamping part 300 from further translating or rotating relative to the fixed part 200, thereby further improving the accuracy and stability of the motion control of the clamping part 300.

[0089] In some feasible examples, the locking part may include a slot provided on the fixing part 200 and a buckle provided on the clamping part 300. When the clamping part 300 is located at a target linear position or a target angular position, the buckle can be engaged in the slot to prevent the clamping part 300 from translating or rotating relative to the fixing part 200.

[0090] like Figure 7 As shown, a high-vacuum equipment fixture design method according to a second aspect of the present application is provided, for designing a drive unit of a high-vacuum equipment fixture as proposed in any of the first aspects above, comprising:

[0091] Step S701: Determine the motion relationship between the clamping part and the fixing part, wherein the motion relationship includes relative translation and relative rotation;

[0092] Specifically, the clamping part of the fixture for high vacuum equipment is mainly used to clamp the workpiece and position it or drive it to move according to process requirements, while the driving part is mainly used to drive the movement of the clamping part. Therefore, by determining the motion relationship between the clamping part and the fixing part, which includes relative translation and relative rotation, the driving requirements of the clamping part can be determined based on this motion relationship, thereby determining the structural form of the driving part. The structural form can include a linear strip structure and a spiral strip structure.

[0093] Step S702: Determine the initial position and target position of the clamping part relative to the fixing part;

[0094] Specifically, by determining the initial and target positions of the clamping part relative to the fixed part, the range of motion of the clamping part relative to the fixed part can be determined. When both ends of the driving part are connected to the fixed part and the clamping part respectively, the initial and target lengths of the driving part can be further analyzed and determined by combining the structural dimensions of the clamping and fixed parts, as well as the connection positions of the driving part to the fixed and clamping parts respectively; that is, the range of length variation of the driving part can be determined. The initial length can be an initial straight line length or an initial arc length; the target length can be a target straight line length or a target arc length.

[0095] Step S703: Determine the initial temperature of the drive unit when the clamping part is in the initial position;

[0096] Step S704: Determine the target temperature of the drive unit when the clamping part is in the target position;

[0097] Specifically, the driving part of the clamp for the high vacuum equipment is mainly driven by the length change caused by temperature change. Therefore, it is necessary to determine the initial temperature corresponding to the initial length of the driving part and the target temperature corresponding to the target length of the driving part, and then determine the temperature change range when the temperature of the driving part is driven.

[0098] Therefore, by determining the initial temperature of the drive unit when the clamping part is in the initial position, and by determining the initial temperature of the drive unit when the clamping part is in the target position, the temperature change range of the drive unit during drive can be obtained. The initial position can be an initial linear position or an initial angular position; the target position can be a target linear position or a target angular position.

[0099] Step S705: Determine the material and dimensions of the drive unit based on the initial position, target position, initial temperature, and target temperature.

[0100] Specifically, given the initial position, target position, initial temperature, and target temperature, and based on the explanation of the above steps, the length and temperature variation ranges of the drive unit during operation can be obtained by analyzing the aforementioned four parameters. By analyzing the relationship between the length and temperature variations of the drive unit, the thermal expansion coefficient of the drive unit can be determined. Then, the material of the drive unit can be selected based on the thermal expansion coefficient. Furthermore, based on the length variation range of the drive unit, combined with the structural dimensions of the clamping and fixing parts, and the connection positions of the drive unit with the fixing and clamping parts respectively, the dimensions of the drive unit can be determined, thereby completing the design of the drive unit.

[0101] In some feasible examples, the initial temperature of the drive unit can be determined based on the first process temperature corresponding to the clamping part being in the initial position; the initial temperature of the drive unit is the first process temperature. Alternatively, the target temperature of the drive unit can be determined based on the second process temperature corresponding to the clamping part being in the target position; the target temperature of the drive unit is the second target temperature.

[0102] This combines the temperature variation range of the drive unit during drive with the process temperature requirements, making it easier to adjust the temperature of the clamping unit and the drive unit using the same temperature control unit. This ensures that the temperature variation range of the workpiece on the clamping unit and the drive unit is the same and that the changes are synchronized, avoiding the problem of inaccurate temperature control caused by temperature difference between the workpiece and the drive unit, and preventing a decrease in the accuracy of motion control.

[0103] By employing the above technical solutions, a second aspect of this application provides a method for designing a clamp for high-vacuum equipment, used to design a drive unit for the clamp as proposed in any of the first aspects above. The drive unit designed by this method can change its length with temperature variations, and based on this length change, drive the clamping unit to translate or rotate relative to the fixed part. Therefore, by adjusting the temperature of the drive unit according to the relationship between the length of the drive unit and temperature, precise motion control of the clamping unit can be achieved. Furthermore, when the clamp is placed inside the vacuum chamber of the high-vacuum equipment, motion control can be completed without drilling holes in the high-vacuum equipment or applying non-contact forces to the clamp. This ensures the accuracy of motion control without negatively impacting the airtightness of the high-vacuum equipment, thus contributing to the reliability of the high-vacuum equipment.

[0104] In some examples, when the motion relationship is relative translation, the initial position is the initial linear position, and the target position is the target linear position;

[0105] When the motion relationship is relative translation, the driving part is a linear strip structure.

[0106] Specifically, when the motion relationship is relative translation, the initial position is the initial linear position, and the target position is the target linear position. Furthermore, by designing the drive unit as a linear strip structure in this case, the drive unit can effectively drive the clamping unit while reducing the structural complexity of the drive unit, which helps to reduce the manufacturing cost of the drive unit.

[0107] In some examples, when the motion relationship is relative rotation, the initial position is the initial angular position, and the target position is the target angular position;

[0108] When the motion relationship is relative rotation, the drive unit is a spiral strip structure.

[0109] Specifically, when the motion relationship is relative rotation, the initial position is the initial angular position, and the target position is the target angular position. Furthermore, by designing the drive unit to have a spiral strip structure in this case, the rotation control of the clamping unit can be achieved by utilizing the change in the arc length of the drive unit.

[0110] In this invention, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance; the term "multiple" refers to two or more unless otherwise explicitly defined. The terms "install," "connect," "link," and "fix" should be interpreted broadly. For example, "connect" can be a fixed connection, a detachable connection, or an integral connection; "link" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0111] In the description of this invention, it should be understood that the terms "upper," "lower," "left," "right," "front," "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or unit referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0112] In the description of this specification, the terms "one embodiment," "some embodiments," "specific embodiment," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0113] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A clamp for high vacuum equipment, characterized in that, include: Fixing part; The clamping part is connected to the fixing part and can translate or rotate relative to the fixing part; A driving unit, the two ends of which are respectively connected to the fixing unit and the clamping unit; The temperature control unit is used to regulate the temperature of the drive unit; Wherein, when the temperature of the driving part changes from an initial temperature to a target temperature, the length of the driving part changes from an initial linear length to a target linear length, and drives the clamping part to translate relative to the fixing part from an initial linear position to a target linear position; or When the temperature of the driving part changes from the initial temperature to the target temperature, the length of the driving part changes from the initial arc length to the target arc length, and drives the clamping part to rotate relative to the fixing part from the initial angle position to the target angle position; The high vacuum equipment is used to coat the surface of the workpiece. In the coating process, the surface area to be processed on the workpiece at different process positions, as well as the coating material and coating method used, will be different. When the clamping part is located at the target straight position, a baffle is set to cover at least part of the clamping part. The specific part covering the clamping part can be set according to the process content corresponding to the initial straight position and the target straight position, so that the part of the workpiece on the clamping part that has been processed at the initial straight position is covered by the baffle, and the part of the workpiece that has been processed at the target straight position is exposed for processing.

2. The fixture for high vacuum equipment according to claim 1, characterized in that, When the clamping part can translate relative to the fixing part, the fixing part includes a fixing plate; The driving part is a linear strip structure, and the first end of the driving part is connected to the fixing plate, and the second end of the driving part is connected to the clamping part; When the temperature of the driving part changes from the initial temperature to the target temperature, the straight line length between the first end and the second end changes from the initial straight line length to the target straight line length, and the clamping part is driven to translate relative to the fixing part from the initial straight line position to the target straight line position.

3. The fixture for high vacuum equipment according to claim 1, characterized in that, When the clamping part can rotate relative to the fixing part, the fixing part includes a fixing frame and a bushing, and the clamping part includes a rotating shaft and a carrier plate; The bushing is disposed on the inner side wall of the fixed frame; The carrier plate is disposed within the fixed frame, the rotating shaft is connected to the carrier plate, and the rotating shaft is rotatably inserted through the bushing; The drive unit has a spiral strip structure, and the third end of the drive unit is connected to the bushing, and the fourth end of the drive unit is connected to the end of the carrier plate away from the rotating shaft. When the temperature of the drive unit changes from the initial temperature to the target temperature, the arc length between the third end and the fourth end changes from the initial arc length to the target arc length, and drives the carrier plate to rotate from the initial angle position to the target angle position.

4. The fixture for high vacuum equipment according to claim 2, characterized in that, The drive unit is made of nickel alloy.

5. The fixture for high vacuum equipment according to claim 3, characterized in that, The drive unit is made of a thermo-bimetallic material.

6. The fixture for high vacuum equipment according to any one of claims 1 to 4, characterized in that, The temperature control unit is also used to adjust the temperature of the clamping unit.

7. The fixture for high vacuum equipment according to any one of claims 1 to 4, characterized in that, Also includes: The locking part is used to prevent the clamping part from translating or rotating relative to the fixing part when the clamping part is located in the target linear position or the target angular position.

8. A method for designing a fixture for high vacuum equipment, used to design a drive unit for a fixture for high vacuum equipment as described in any one of claims 1 to 7, characterized in that, include: Determine the motion relationship between the clamping part and the fixing part, wherein the motion relationship includes relative translation and relative rotation; Determine the initial position and target position of the clamping part relative to the fixing part; The initial temperature corresponding to the driving unit when the clamping part is determined to be in the initial position; When the clamping part is determined to be in the target position, the target temperature corresponding to the driving part; The material and dimensions of the drive unit are determined based on the initial position, the target position, the initial temperature, and the target temperature.

9. The fixture design method for high vacuum equipment according to claim 8, characterized in that, When the motion relationship is relative translation, the initial position is the initial linear position, and the target position is the target linear position; When the motion relationship is relative translation, the driving part is a linear strip structure.

10. The fixture design method for high vacuum equipment according to claim 8, characterized in that, When the motion relationship is relative rotation, the initial position is the initial angular position, and the target position is the target angular position; When the kinematic relationship is relative rotation, the drive unit is a spiral strip structure.

Images