Substrate transfer robot

Abstract

Provided is a substrate transfer robot capable of reducing contact with a substrate and capable of supporting a substrate in a highly rigid state. The substrate transfer robot includes a longitudinal robot support portion (20a) and a plurality of lateral robot support portions (31a, 32a) including a plurality of first lateral robot support portions (31a) each having a plurality of first contact points (40A) arranged in a direction in which the first lateral robot support portion extends and capable of contacting a substrate, the highest height position of the first contact points being a first height, and a plurality of second lateral robot support portions (32a) each having a plurality of second contact points (40B) arranged in a direction in which the second lateral robot support portion extends and capable of contacting a substrate, the highest height position of the second contact points being a second height lower than the first height.

Description

Technical Field

[0001] This invention relates to a robot for transferring substrates, and more specifically, to a robot suitable for transferring large and thin substrates. Background Technology

[0002] In recent years, semiconductor manufacturing equipment has been producing substrates that are increasingly larger and thinner. Patent document 1 proposes a robotic arm for transferring such large and thin substrates.

[0003] The robotic arm described in Patent Document 1 includes a longitudinal robotic arm support portion and a plurality of transverse robotic arm support portions extending laterally from the longitudinal robotic arm support portion, configured to minimize the bending of the substrate supported by the robotic arm.

[0004] However, in order to reduce the bending of the supported substrate and maintain its horizontal state, it is necessary to provide a large number of support pins of the same height on both the longitudinal robot support and the transverse robot support.

[0005] Therefore, when a large number of support pins are used to support the substrate, the risk of electrostatic discharge (ESD) is high, which is disadvantageous in terms of substrate processing. In addition, since a large number of support pins are used to support the relatively rigid substrate in a horizontal state, the substrate may generate unwanted vibrations when external forces are applied, which is also disadvantageous in terms of substrate processing.

[0006] Patent Document 1: Japanese Patent No. 4681029 Summary of the Invention

[0007] The present invention was developed based on the above situation, and the problem it aims to solve is to provide a substrate transfer robot that can reduce the number of contacts with the substrate and support the substrate in a highly rigid state.

[0008] To solve the above-mentioned technical problems, the following technical means were adopted.

[0009] That is, the substrate transfer robot provided by the present invention is a substrate transfer robot for supporting and transferring a substrate, characterized in that: it includes a plurality of transverse robot support portions extending from a longitudinally extending robot support portion to a direction intersecting the direction of extension of the longitudinal robot support portion, the plurality of transverse robot support portions including a plurality of first transverse robot support portions and a plurality of second transverse robot support portions, each of the first transverse robot support portions having one or more first contact points capable of contacting the substrate, the highest height position of the first contact point being a first height, and each of the second transverse robot support portions having one or more second contact points capable of contacting the substrate, the highest height position of the second contact point being a second height lower than the first height.

[0010] In a preferred embodiment, the first contact is formed by the top of an upwardly protruding pin, and the second contact is formed by the top of an upwardly protruding pin.

[0011] In a preferred embodiment, the first contact is formed at the top of the bulge portion of the first transverse robot arm support, and the second contact is formed at the top of the bulge portion of the second transverse robot arm support.

[0012] In a preferred embodiment, the first transverse robot support portion and the second transverse robot support portion are alternately arranged in the longitudinal direction.

[0013] In a preferred embodiment, the height of the plurality of first contacts provided in each of the first transverse robot arm supports is fixed, and the height of a portion of the plurality of second contacts provided in each of the second transverse robot arm supports is lower than the second height.

[0014] In a preferred embodiment, the longitudinal manipulator support has a plurality of third contacts that can contact the substrate, the highest position of which is the same as or higher than the second height.

[0015] In a preferred embodiment, the longitudinal manipulator support portion is included.

[0016] In a preferred embodiment, it includes a pair of longitudinal robot arm supports arranged in the left-right direction.

[0017] In a preferred embodiment, the plurality of lateral manipulator supports extend outward from each of the longitudinal manipulator supports in the left-right direction.

[0018] In a preferred embodiment, the plurality of lateral robot arm supports are connected to the plurality of lateral robot arm supports that extend inward from the longitudinal robot arm supports in the left-right direction.

[0019] In a preferred embodiment, the plurality of lateral manipulator supports extend from each of the longitudinal manipulator supports in both left and right directions.

[0020] According to the substrate transfer robot with the above structure, the contact height between the contact point and the substrate having multiple first and second lateral robot supports is not fixed, and the highest point of the second contact of the second lateral robot support is lower than the height of the first contact of the first lateral robot support. Therefore, the substrate can be supported by the robot in a manner that intentionally creates a curved portion, thereby increasing the rigidity of the substrate in the supported state, stabilizing the supported state, and reducing the generation of unwanted vibrations. Moreover, since the number of contact points with the substrate can be reduced, there is no problem of high electrostatic discharge (ESD) risk. Attached Figure Description

[0021] Figure 1 This is an overall perspective view of the substrate transfer robot according to the first embodiment of the present invention.

[0022] Figure 2 It is along Figure 1 A cross-sectional view of line II-II.

[0023] Figure 3 It is along Figure 1 A cross-sectional view of line III-III.

[0024] Figure 4 It means Figure 1 A perspective view of an example of the use of a robot for substrate transfer.

[0025] Figure 5 This is an overall perspective view of the substrate transfer robot according to the second embodiment of the present invention.

[0026] Figure 6 yes Figure 5 A 3D diagram of the VI-VI line.

[0027] Figure 7 It is along Figure 5 A cross-sectional view of line VII-VII.

[0028] Figure 8 It is along Figure 5 A cross-sectional view of line VIII-VIII.

[0029] Figure 9 This is an overall perspective view of the substrate transfer robot according to the third embodiment of the present invention.

[0030] Figure 10 yes Figure 9 XX-line view.

[0031] Figure 11 It is along Figure 9 A cross-sectional view of the XI-XI line.

[0032] Figure 12 It is along Figure 9 A cross-sectional view of line XII-XII.

[0033] Figure 13 This is an overall perspective view of the substrate transfer robot according to the fourth embodiment of the present invention.

[0034] Figure 14 It is along Figure 13 A cross-sectional view of the XIV-XIV line.

[0035] Figure 15 It is along Figure 14 A cross-sectional view of the XV-XV line.

[0036] Figure 16 yes Figure 13 A perspective view of a modified example of the substrate transfer robot shown.

[0037] Figure 17 yes Figure 13 A perspective view of another modified example of the substrate transfer robot shown.

[0038] Figure 18 This is an overall perspective view of the substrate transfer robot according to the fifth embodiment of the present invention.

[0039] Figure 19 It is along Figure 18 A cross-sectional view of the XIX-XIX line.

[0040] Figure 20 It is along Figure 18 A cross-sectional view of the XX-XX line.

[0041] Figure 21 yes Figure 18 A perspective view of a modified example of the substrate transfer robot shown.

[0042] Figure 22 yes Figure 18 A perspective view of another modified example of the substrate transfer robot shown. Detailed Implementation

[0043] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0044] Figures 1 to 4 This refers to a substrate transfer robot 1A according to a first embodiment of the present invention.

[0045] This substrate transfer robot 1A is used to place substrates, such as large glass substrates (e.g., 1800mm × 1500mm), into and out of a substrate storage box or a processing chamber. The substrate transfer robot 1A is also supported by a suitable moving mechanism, enabling it to move in a predetermined direction. For example, this substrate transfer robot 1A can be used as a multi-joint robot RB (…). Figure 4 The end effector is capable of moving in the XYZ directions and rotating about the Z-axis.

[0046] The substrate transfer robot 1A includes a base 10, a longitudinal robot support 20a, and a plurality of transverse robot supports 31a and 32a connected to each longitudinal robot support 20a.

[0047] The base 10 is a horizontal plate-shaped component with a certain lateral width, on which a multi-jointed robot RB is mounted. Figure 4 The longitudinal manipulator support 20a extends horizontally in a straight line from the base 10 in the longitudinal direction. In this embodiment, three longitudinal manipulator support 20a extend parallel to each other at certain intervals. In this embodiment, the longitudinal manipulator support 20a is a flat rod-shaped component with a certain width and thickness. Each longitudinal manipulator support 20a is connected to a plurality of first transverse manipulator support 31a and second transverse manipulator support 32a alternately located in the direction in which the longitudinal manipulator support 20a extends. Each first transverse manipulator support 31a and second transverse manipulator support 32a has a certain length in a horizontal direction orthogonal to the longitudinal manipulator support 20a, and is connected to the longitudinal manipulator support 20a at its center in this length direction. In this embodiment, the first transverse manipulator support 31a and second transverse manipulator support 32a are plate-shaped components with a certain width and thickness. The first transverse robot support portion 31a and the second transverse robot support portion 32a are also equally spaced along the length direction of the longitudinal robot support portion 20a. The base component 10, the longitudinal robot support portion 20a, the first transverse robot support portion 31a and the second transverse robot support portion 32a are formed of a metal such as hard resin, ceramic or aluminum.

[0048] The first transverse robot support 31a is located at a position that is a predetermined height h higher than the second transverse robot support 32a. Figure 2 In this embodiment, the upper surfaces of the first transverse robot support 31a and the longitudinal robot support 20a overlap and connect, and the lower surfaces of the second transverse robot support 32a and the longitudinal robot support 20a overlap and connect, thereby forming a height difference between the first transverse robot support 31a and the second transverse robot support 32a in the vertical direction.

[0049] In the first transverse robot support portion 31a and the second transverse robot support portion 32a, contact points are respectively provided for contacting the substrate SB to be placed on the substrate transfer robot 1A, namely a plurality of pins 41a, 41b, 41c, 42, and 43. These pins 41a, 41b, 41c, 42, and 43 can be formed of, for example, resin or rubber, but are preferably formed of a material with suitable elasticity. In the first transverse robot support portion 31a, three pins 41a, 41b, and 41c are provided at the two ends and the center in the length direction. The central pin 41b overlaps with the longitudinal robot component 20a. These three pins 41a, 41b, and 41c have the same height dimension, and their tops function as the first contact point 40A as referred to in this invention. In the second transverse robot support portion 32a, two pins 42 and 43 are provided at the two ends in the length direction. The two pins 42 and 43 have the same height dimension, and are also the same as the height dimensions of the pins 41a, 41b, and 41c provided on the first transverse robot support 31a. The tops of these two pins 42 and 43 function as the second contact 40B as referred to in this invention. As described above, since the first transverse robot support 31a is located higher than the second transverse robot support 32a, the height position of the first contact 40A is located at a position that is a predetermined height h higher than the height position of the second contact 40B.

[0050] In this embodiment, a pin 44 is also provided on the longitudinal robot support 20a. The top of the pin 44 functions as a third contact point. In this embodiment, the pin 44 is provided on the longitudinal robot support member 20a, which divides the longitudinal robot support member 20a into three equal parts between the pins 41b provided at the center of each of the first transverse robot support members 31a. The pin 44 itself has the same height dimension as the pins 41a, 41b, 41c provided in each of the first transverse robot support members 31a and the pins 42, 43 provided in the second transverse robot support member 32a, but the top of the pin 44 is lower than the top position (first contact point 40A) of the pins 41a, 41b, 41c provided in the first transverse robot support member 31a by an amount equivalent to the thickness of the first transverse robot support member 31a, and is higher than the top position (second contact point 40B) of the pins 42, 43 provided in the second transverse robot support member 32a.

[0051] The function of the substrate transfer robot 1A in this embodiment will now be explained.

[0052] Figure 4This diagram illustrates a schematic structure when the substrate SB is transferred to the substrate receiving section 500 of the processing apparatus CH using the aforementioned substrate transfer robot 1A. The substrate receiving section 500 includes left and right support members 510 and two intermediate support members 520 located between them. The left and right support members 510 include a longitudinal support portion 511 and a plurality of transverse support portions 512 extending inwardly from the longitudinal support portion 511 at equal intervals, and have a comb-like shape. The two intermediate support members 520 include a longitudinal support portion 521 and a plurality of transverse support portions 522 extending to the left and right sides of the longitudinal support portion 521. The gaps s1, s2, and s3 between the left and right support members 510 and the intermediate support members 520, and between the two intermediate support members 520, are configured to allow the substrate transfer robot 1A to pass through in the vertical direction. Furthermore, a plurality of pins 525 protrude from the upper surfaces of the left and right support members 510 and the two intermediate support members 520, capable of contacting and supporting the substrate SB. The substrate SB, which is placed on the substrate transfer robot 1A and moves in and out above the substrate receiving section 500, is transferred onto the substrate receiving section 500 while the substrate transfer robot 1A passes through the aforementioned gaps s1, s2, and s3 and moves to a position below the substrate receiving section 500. The substrate SB transferred onto the substrate receiving section 500 is appropriately provided by the following process.

[0053] In this embodiment, with the substrate SB mounted on the substrate transfer robot 1A, the front ends of a plurality of pins 41a, 41b, 41c, 42, 43, and 44 provided on the first lateral robot support 31a, the second lateral robot support 32a, and the longitudinal robot support 20a contact the substrate SB. The front ends of the pins 41a, 41b, 41c, 42, 43, and 44, i.e., the contact points with the substrate SB, include a first contact point 40A located at a higher position and a second contact point 40B located at a lower position. Therefore, the substrate SB can be supported by contacting the tops of the plurality of pins 41a, 41b, 41c, 42, 43, and 44 in a state that is intentionally bent. Furthermore, since the first lateral manipulator support portion 31a having a first contact point 40A and the second lateral manipulator support portion 32a having second contact points 40B lower than it at both ends are alternately arranged in the direction extending from the longitudinal manipulator support portion 20a, for the substrate SB in the supported state, as Figure 2 and Figure 3As shown, both in the side view and in the cross-section, the substrate SB exhibits a bent deformation near the front end of each of the second transverse robot support portions 32a at a lower position. Therefore, this bending deformation allows for the application of a predetermined rigidity to the substrate SB, stabilizing its placement on the substrate transfer robot 1A and reducing unnecessary vibrations of the substrate SB during the movement of the substrate transfer robot 1A. Furthermore, since the substrate SB is supported by a smaller number of pins 41a, 41b, 41c, 42, 43, and 44 at its front end, there is no high risk of electrostatic discharge (ESD).

[0054] Figures 5 to 8 This illustrates a substrate transfer robot 1B according to a second embodiment of the present invention. In these figures, [the robot is shown in the diagram]. Figures 1 to 4 The same or equivalent components of the substrate transfer robot 1A shown in the first embodiment are labeled with the same or similar reference numerals.

[0055] The substrate transfer robot 1B includes a base 10, a longitudinal robot support 20b, and a plurality of transverse robot supports 31b and 32b connected to each longitudinal robot support 20b.

[0056] The base 10 is a horizontally plate-shaped component with a certain lateral width, mounted on the movement mechanism of a multi-joint robot RB, etc. A longitudinal manipulator support 20b extends horizontally and linearly from the base 10 in the longitudinal direction. In this embodiment, two longitudinal manipulator supports 20b extend parallel to each other at a certain interval. In this embodiment, the longitudinal manipulator support 20b is a rod-shaped component with a certain width and thickness. Each longitudinal manipulator support 20b is connected to a plurality of first lateral manipulator supports 31b and second lateral manipulator supports 32b alternately located in the direction of extension of the longitudinal manipulator support 20b. Each first lateral manipulator support 31b and second lateral manipulator support 32b has a certain length in a horizontal direction orthogonal to each longitudinal manipulator support 20b, and is connected in a manner extending outward in the left-right direction from each longitudinal manipulator support 20b. In this embodiment, the first lateral manipulator support 31b and second lateral manipulator support 32b are plate-shaped components with a certain width and thickness. The first transverse robot support portion 31b and the second transverse robot support portion 32b are also equally spaced along the length direction of the longitudinal robot support portion 20b. The base component 20, the longitudinal robot support portion 20b, the first transverse robot support portion 31b and the second transverse robot support portion 32b are formed of a metal such as hard resin, ceramic or aluminum.

[0057] The first transverse robot support 31b is located at a position that is a predetermined height h higher than the second transverse robot support 32b. Figure 6 In this embodiment, the lower surface of the first transverse robot support 31b is cut into an L-shape, and this cut portion is connected to the longitudinal robot support 20b in such a way that it contacts the upper surface 201b and the side surface of the longitudinal robot support 20b. Therefore, the upper surface 311b of the first transverse robot support 31b is higher than the upper surface 201b of the longitudinal robot support 20b. Figure 6 , Figure 8 On the other hand, the second transverse robot support 32b is connected to the longitudinal robot support 20b such that its upper surface 321b is aligned with the upper surface 201b of the longitudinal robot support 20b. As a result, the upper surface 311b of the first transverse robot support 31b is higher than the upper surface 321b of the second transverse robot support 32b.

[0058] In the first transverse robot support portion 31b and the second transverse robot support portion 32b, contact points are respectively provided for contacting the substrate SB to be placed on the substrate transfer robot 1B, namely a plurality of pins 41a, 41b, 41c, 42, and 43. Similar to the first embodiment, these pins 41a, 41b, 41c, 42, and 43 can be formed of, for example, resin or rubber, and preferably of a material with appropriate elasticity. In the first transverse robot support portion 31b, three pins 41a, 41b, and 41c are provided at the base end, front end, and center portion in the longitudinal direction. The position of the pin 41a at the base end overlaps with the longitudinal robot support portion 20b. These three pins 41a, 41b, and 41c have the same height dimension, and their tops function as the first contact point 40A as referred to in this invention. In the second transverse robot support portion 32b, two pins 42 and 43 are provided at the front end and center portion in the longitudinal direction. Additionally, a pin 44 is provided on the longitudinal robot support 20b adjacent to the base end of the second transverse robot support 32b. The pin 44 on the longitudinal robot support 20b has the same height dimension as the pin 43 at the front end of the second transverse robot support 32b. Furthermore, the pins 43 and 44 use the same components as the three pins 41a, 41b, and 41c provided on the first transverse robot support 31b, and their top height positions are also the same. However, as described above, since the second transverse robot support 32b is lower than the predetermined height h of the first transverse robot support 31b, the top height position of the pins 43 and 44 is lower than the tops (first contact 40A) of the pins 41a, 41b, and 41c provided on the first transverse robot support 31b. The tops of these two pins 43 and 44 function as the second contact 40B as referred to in this invention. Furthermore, in this embodiment, the height of the pin 42 located at the center of the second transverse manipulator support 32b is lower than the top height of the two pins 43 and 44 constituting the second contact 40B.

[0059] The function of the substrate transfer robot 1B in this embodiment will now be explained.

[0060] In this embodiment, when the substrate SB is placed on the substrate transfer robot 1B, the front ends of a plurality of pins 41a, 41b, 41c, 42, 43, and 44 provided on the first transverse robot support 31b, the second transverse robot support 32b, and the longitudinal robot support 20b contact the substrate SB. Since the front ends of the pins 41a, 41b, 41c, 42, 43, and 44, i.e., the contact points with the substrate SB, include a first contact point 40A located at a higher position and a second contact point 40B located at a lower position, the substrate SB can be supported by contacting the tops of the plurality of pins 41a, 41b, 41c, 42, 43, and 44 in a deliberately bent state. Furthermore, a first transverse robot support portion 31b having a first contact point 40A and a second transverse robot support portion 32b having a lower second contact point 40B are alternately arranged in the direction in which the longitudinal robot support portion 20b extends. Therefore, when viewed from the side of the substrate transfer robot 1B, as shown... Figure 6 As shown, the substrate SB, under support, becomes bent and deformed into a wave-like state. Furthermore, there is a gap between the two longitudinal robot arm support portions 20b, and among the three pins 42, 43, and 44 arranged along the second transverse robot arm support portion 32b, the central pin 42 has a lower top height compared to the pins 44 on the longitudinal robot arm support portion 20b and the pin 43 at the front end of the second transverse robot arm support portion 32b. Therefore, in the cross-section along the second transverse robot arm support portion 32b, as shown... Figure 7 As shown, pins 42, 43, and 44 are bent into a wave-like shape. Therefore, by applying a specified rigidity to the substrate SB through this bending deformation, its mounting state on the substrate transfer robot 1B is stabilized, reducing unwanted vibrations of the substrate SB during the movement of the substrate transfer robot 1B. Furthermore, since the substrate SB is supported by the front ends of a smaller number of pins 41a, 41b, 41c, 42, 43, and 44, problems such as an increased risk of electrostatic discharge (ESD) are avoided.

[0061] Figures 9 to 12 This illustrates a substrate transfer robot 1C according to a third embodiment of the present invention. In these figures, [the robot is shown in the image]. Figures 1 to 4 The same or equivalent components of the substrate transfer robot 1A shown in the first embodiment are labeled with the same or similar reference numerals.

[0062] The substrate transfer robot 1C includes a base 10, a longitudinal robot support 20c, and a plurality of transverse robot supports 31c, 32c connected to each longitudinal robot support 20c.

[0063] The base 10 is a horizontally plate-shaped component with a certain lateral width, mounted on a moving mechanism such as a multi-joint robot. A longitudinal manipulator support 20c extends horizontally and linearly from the base 10. In this embodiment, two longitudinal manipulator supports 20c extend parallel to each other at a certain interval. In this embodiment, the longitudinal manipulator support 20c is a rod-shaped component with a certain width and thickness. Each longitudinal manipulator support 20c is connected to a plurality of first lateral manipulator supports 31c and second lateral manipulator supports 32c alternately located in the direction of extension of the longitudinal manipulator support 20c. Each first lateral manipulator support 31c and second lateral manipulator support 32c has a certain length in a horizontal direction orthogonal to each longitudinal manipulator support 20c, and is connected in a manner extending inward from each longitudinal manipulator support 20c in a left-right direction. In this embodiment, the first lateral manipulator support 31c and second lateral manipulator support 32c are plate-shaped components with a certain width and thickness. The first transverse robot support portion 31c and the second transverse robot support portion 32c are also equally spaced along the length direction of the longitudinal robot support portion 20c. The base component 10, the longitudinal robot support portion 20c, the first transverse robot support portion 31c and the second transverse robot support portion 32c are formed of a metal such as hard resin, ceramic or aluminum.

[0064] The first transverse robot support 31c is located at a position that is a predetermined height h higher than the second transverse robot support 32c. Figure 10 In this embodiment, the lower surface of the base end of the first transverse robot support 31c is cut into an L-shape, and this cut portion is connected to the longitudinal robot support 20c in such a way that it contacts the upper surface 201c and the side surface of the longitudinal robot support 20c. Therefore, the upper surface 311c of the first transverse robot support 31c is higher than the upper surface 201c of the longitudinal robot support 20c. On the other hand, the second transverse robot support 32c is connected to the longitudinal robot support 20c in such a way that its upper surface 321c is aligned with the upper surface 201c of the longitudinal robot support 20c. Thus, the upper surface 311c of the first transverse robot support 31c is higher than the upper surface 321c of the second transverse robot support 32c.

[0065] In the first transverse robot support portion 31c and the second transverse robot support portion 32c, protruding points are respectively provided for contacting the substrate SB to be placed on the substrate transfer robot 1C, namely a plurality of pins 41a, 41b, 41c, 42, 43, and 44. These pins 41a, 41b, 41c, 42, 43, and 44 can be formed of, for example, resin or rubber, preferably of a material with suitable elasticity. In the first transverse robot support portion 31c, three pins 41a, 41b, and 41c are provided at three locations in the longitudinal direction: the base end, the front end, and the center. The position of the pin 41a at the base end overlaps with the longitudinal robot component 20c. These three pins 41a, 41b, and 41c have the same height dimension, and their tops function as the first contact point 40A as referred to in this invention. In the second transverse robot support portion 32c, two pins 42 and 43 are provided at the front end and the center in the longitudinal direction. Additionally, a pin 44 is provided on the longitudinal robot support 20c adjacent to the base end of the second transverse robot support 32c. The pin 44 on the longitudinal robot support 20c has the same height dimension as the pin 43 at the front end of the second transverse robot support 32c. Furthermore, these pins 43 and 44 use the same components and have the same height dimension as the three pins 41a, 41b, and 41c provided on the first transverse robot support 31c. However, as described above, since the second transverse robot support 32c is lower than the predetermined height h of the first transverse robot support 31c, the tops of the pins 43 and 44 are lower than the tops (first contact 40A) of the pins 41a, 41b, and 41c provided on the first transverse robot support 31c. The tops of these two pins 43 and 44 function as the second contact 40B as referred to in this invention. Furthermore, in this embodiment, the height of the pin 42 located at the center of the second transverse manipulator support 32c is lower than the top height of the two pins 43 and 44 constituting the second contact 40B.

[0066] The function of the substrate transfer robot 1C in this embodiment will now be explained.

[0067] In this embodiment, when the substrate SB is placed on the substrate transfer robot 1C, the front ends of a plurality of pins 41a, 41b, 41c, 42, 43, and 44 provided on each of the transverse robot support portions 31c, 32c and the longitudinal robot support portion 20c contact the substrate. Since the front ends of the pins 41a, 41b, 41c, 42, 43, and 44, i.e., the contact points with the substrate SB, include a first contact point 40A located at a higher position and a second contact point 40B located at a lower position, the substrate SB can be supported by contacting the tops of the plurality of pins 41a, 41b, 41c, 42, 43, and 44 in a deliberately bent state. Furthermore, a first transverse robotic arm support 31c having a first contact 40A and a second transverse robotic arm support 32c having a second contact 40B lower than the first contact 40A are alternately arranged in the direction in which the longitudinal robotic arm support 20c extends. Therefore, when viewed from the side of the substrate transfer robotic arm 1C, as shown... Figure 10 As shown, the substrate SB, under support, becomes bent and deformed into a wave-like state. Furthermore, a gap is formed between the front ends of the two longitudinal robot support portions 20c and the connected transverse robot support portions 31c and 32c. Among the three pins 42, 43, and 44 arranged along the second transverse robot support portion 32c, the central pin 42 has a lower top height compared to the pins 44 on the longitudinal robot support portion 20c and the pins 43 at the front end of the second transverse robot support portion 32c. Therefore, in the cross-section along the second transverse robot support portion 32c, as shown... Figure 11 The image shows a bent, wave-like shape. Therefore, by applying a specified rigidity to the substrate SB through this bending deformation, its mounting state on the substrate transfer robot 1C is stabilized, reducing unwanted vibrations of the substrate SB during the movement of the robot 1C. Furthermore, since the substrate SB is supported by the front ends of a smaller number of pins 41a, 41b, 41c, 42, 43, and 44, problems such as an increased risk of electrostatic discharge (ESD) are avoided.

[0068] Figures 13 to 15 This figure illustrates a substrate transfer robot 1D according to a fourth embodiment of the present invention. In these figures, [the robot is shown in the figure]. Figures 1 to 4 The same or equivalent components of the substrate transfer robot 1A shown in the first embodiment are labeled with the same or similar reference numerals.

[0069] The substrate transfer robot 1D includes a base 10, a longitudinal robot support 20d, and a plurality of first transverse robot supports 31d and second transverse robot supports 32d connected to each longitudinal robot support 20d.

[0070] The base 10 is a horizontal plate-shaped component with a certain lateral width, mounted on the movement mechanism of a multi-joint robot RB, etc. A longitudinal manipulator support 20d extends horizontally and linearly from the base 10 in the longitudinal direction. In this embodiment, three longitudinal manipulator supports 20d extend parallel to each other at certain intervals. In this embodiment, the longitudinal manipulator support 20d is a flat rod-shaped component with a certain width and thickness. Each longitudinal manipulator support 20d is connected to a plurality of first lateral manipulator supports 31d and second lateral manipulator supports 32d alternately located in the direction of extension of the longitudinal manipulator support 20d. Each first lateral manipulator support 31d and second lateral manipulator support 32d has a certain length in a horizontal direction orthogonal to the longitudinal manipulator support 20d, and is connected to the longitudinal manipulator support 20d by extending to the left and right sides of the longitudinal manipulator support 20d. In this embodiment, the first transverse robot support portion 31d and the second transverse robot support portion 32d are plate-shaped components with a certain width and thickness, and their upper surfaces are on the same plane as the upper surface of the longitudinal robot support portion 20d. The first transverse robot support portion 31d and the second transverse robot support portion 32d are also equally spaced along the length direction of the longitudinal robot support portion 20d. These base components 10, the longitudinal robot support portion 20d, the first transverse robot support portion 31d, and the second transverse robot support portion 32d are formed of a metal such as hard resin, ceramic, or aluminum. Furthermore, the longitudinal robot support portion 20d and the transverse robot support portions 31d and 32d can be formed as a single unit.

[0071] The first transverse robot support portion 31d and the second transverse robot support portion 32d are respectively provided with contact points, namely a plurality of pins 41a, 41b, 42, and 43, for contacting the substrate SB to be placed on the substrate transfer robot 1D. These pins 41a, 41b, 42, and 43 can be formed of, for example, resin or rubber, and preferably of a material with suitable elasticity. On the first transverse robot support portion 31d extending laterally from the same position along the length direction of the longitudinal robot support portion 20d, one pin 41a and two pins 41b are provided at the front end of each portion. These two pins 41a and 41b have the same height dimension, and their tops function as the first contact point 40A as referred to in this invention. On the second transverse robot support portion 32d, which alternates with the first transverse robot support portion 31d extending laterally from the same position along the length direction of the longitudinal robot support portion 20d, one pin 42 and two pins 43 are provided at the front end of each portion. Pins 42 and 43 have the same height dimension, but are lower than the height dimensions of pins 41a and 41b provided in the first transverse robot arm support 31d. The tops of these two pins 42 and 43 function as the second contact 40B as referred to in this invention. Therefore, the height position of the first contact 40A is located at a position that is a predetermined height h higher than the height position of the second contact 40B.

[0072] In this embodiment, a pin 44, made of resin or rubber, similar to the pins 41a, 41b, 42, and 43, protrudes from the upper surface of the longitudinal robot support portion 20d. The top of this pin 44 serves as a third contact point, and they are evenly spaced along the length of the longitudinal robot support portion 20d. In this embodiment, the pin 44 protrudes from a position that divides the corresponding position of the first transverse robot support portion 31d into three equal parts. In this embodiment, the height of the pin 44 is fixed and is higher than the pins 41a and 41b that are provided on the first transverse robot support portion 31d and form the first contact point 40A.

[0073] The function of the substrate transfer robot 1D in this embodiment will now be explained.

[0074] With the substrate SB placed on the substrate transfer robot 1D of this embodiment, the front ends of a plurality of pins 41a, 41b, 42, 43, and 44 provided on the first lateral robot support 31d, the second lateral robot support 32d, and the longitudinal robot support 20d contact the substrate SB. The front ends of the pins 41a, 41b, 42, 43, and 44, that is, the contact points with the substrate SB, include a first contact point 40A located at a higher position and a second contact point 40B located at a lower position. Therefore, the substrate SB can be supported by contacting the tops of the plurality of pins 41a, 41b, 42, 43, and 44 in a state that is intentionally bent. Furthermore, since the first lateral robot support portion 31d having a first contact 40A and the second lateral robot support portion 32d having second contacts 40B at both ends lower than the first contact 40A are alternately arranged in the direction of extension of the longitudinal robot support portion 20d, and the height dimension of the pin 44 (third contact) provided in the longitudinal robot support portion 20d is higher than that of the pins 41a, 41b forming the first contact 40A and the pins 42, 43 forming the second contact, therefore, for the substrate SB in the supported state, as Figure 14 and Figure 15 As shown, whether viewed from the side or in the cross section, the substrate SB is bent and deformed with its front end near the lower part of the second transverse robot support 32d positioned. Therefore, this bending deformation applies a predetermined rigidity to the substrate SB, stabilizing its placement on the substrate transfer robot 1D and reducing unwanted vibrations on the substrate SB during the movement of the substrate transfer robot 1D. Furthermore, since the substrate SB is supported by a smaller number of pins 41a, 41b, 42, 43, and 44 at its front ends, there is no risk of electrostatic discharge (ESD).

[0075] Figure 16 This is a modified example 1Da of the substrate transfer robot 1D according to the fourth embodiment described above. In the substrate transfer robot 1D of the fourth embodiment, the height of the pin 44 provided in the longitudinal robot support 20d is fixed. However, in this modified example of the substrate transfer robot 1Da, the height of the pin 44 is made different in the length direction of the longitudinal robot support 20d. For example, the height of the pin 44' provided between the pins 44 can be set to be lower than the height of the pin 44, wherein the pin 44 is located at a position corresponding to each of the first transverse robot support 31d and the second transverse robot support 32d. In addition, the substrate transfer robot 1Da is bent and deformed in a way that the front end of the second transverse robot support 32d is lower in both the side view section and the cross section, and can perform the same function as the substrate transfer robot 1D described above.

[0076] Figure 17This describes another variation 1Db of the substrate transfer robot 1D according to the fourth embodiment described above. In the substrate transfer robot 1D of the fourth embodiment, all pins 42 and 43 provided in the second transverse robot support 32d have the same height dimension. However, in this variation of the substrate transfer robot 1Db, in the transverse robot support 32d of the left and right sides of the three longitudinal robot support 20d's transverse robot support 20d's, the pins 42a and 43a provided in the transverse robot support 32ds on the left and right sides are taller, making them the same as, for example, the pins 41a and 41b provided in the first transverse robot support 31d. In addition, the substrate transfer robot 1Db is bent and deformed in such a way that the front end of the second transverse robot support 32d where the pins 42 and 43 are provided is located at a low position, both in the side view and in the cross section, and can perform the same function as the substrate transfer robot 1D described above.

[0077] Figures 18 to 20 This illustrates a substrate transfer robot 1E according to a fifth embodiment of the present invention. In these figures, for... Figures 1 to 4 The same or equivalent components of the substrate transfer robot 1A shown in the first embodiment are labeled with the same or similar reference numerals.

[0078] The substrate transfer robot 1E includes a base 10, a longitudinal robot support 20e, and a plurality of first transverse robot supports 31e and second transverse robot supports 32e connected to each longitudinal robot support 20e. The substrate transfer robot 1E of this embodiment has a similar overall structure to the substrate transfer robot 1D of the fourth embodiment described above, but the specific structures for forming the first contact 40A and the second contact 40B are different.

[0079] In this embodiment, the first lateral robot support portion 31e and the second lateral robot support portion 32e have a rod-like shape extending from the side of the longitudinal robot support portion 20e in a left-right direction. Like the longitudinal robot support portion 30e, the first lateral robot support portion 31e and the second lateral robot support portion 32e are formed of a metal such as hard resin, ceramic, or aluminum.

[0080] At the front ends of the first lateral robot support portion 31e and the second lateral robot support portion 32e, respectively, large-diameter portions 41a', 41b', 42', and 43' are formed as contact points for contacting the substrate SB to be placed on the substrate transfer robot 1E. In this embodiment, the large-diameter portions 41a', 41b', 42', and 43' are spherical. The large-diameter portions 41a', 41b', 42', and 43' can be integrally molded from the material forming the first lateral robot support portion 31e and the second lateral robot support portion 32e, but they can also be formed from elastic materials such as resin or rubber. The diameters of the large-diameter portions 41a' and 41b' formed in the first lateral robot support portion 31e are larger than the diameters of the large-diameter portions 42' and 43' formed in the second lateral robot support portion 32e. Therefore, the tops of the aforementioned large-diameter portions 41a' and 41b' function as the first contact 40A as referred to in this invention, and the tops of the aforementioned large-diameter portions 42 and 43 function as the second contact 40B as referred to in this invention. The height of the first contact 40A is located at a position that is higher than the height of the second contact 40B by a predetermined height h. Furthermore, in this embodiment, large-diameter portions 41a', 41b', 42', and 43' are provided to form the first contact 40A and the second contact 40B; however, any bulging portion with an upper protrusion is acceptable, and the specific shape is not limited.

[0081] Similar to the substrate transfer robot 1D in the fourth embodiment, a pin 44 protrudes from the upper surface of the longitudinal robot support 20e, with its top serving as a third contact point. In this embodiment, the height of the pin 44 is fixed, but its top position is higher than the first contact point 40A provided on the first transverse robot support 31e.

[0082] The function of the substrate transfer robot 1E in this embodiment will now be explained.

[0083] In this embodiment, with the substrate SB mounted on the substrate transfer robot 1E, the tops of the large-diameter portions 41a', 41b', 42', and 43' provided on the first transverse robot support 31e and the second transverse robot support 32e, and the top of the pin 44 provided on the longitudinal robot support 20e, contact the substrate SB. Since the contact points with the substrate SB include a first contact point 40A located at a higher position and a second contact point 40B located lower than it, the substrate SB can be supported by contacting the large-diameter portions 41a', 41b', 42', 43', and the top of the pin 44 in a bent state. Furthermore, a first transverse robot support portion 31e having a first contact point 40A and a second transverse robot support portion 32e having second contacts 40B at both ends lower than the first contact point 40A are alternately arranged in the direction of extension of the longitudinal robot support portion 20e. The height dimension of the pin 44 (third contact point) of the longitudinal robot support portion 20e is higher than the top of the large-diameter portions 41a' and 41b' forming the first contact point 40A and the large-diameter portions 42' and 43' forming the second contact point 40B. Therefore, as... Figure 19 and Figure 20 As shown, the substrate SB in its supported state is bent and deformed with its front end near the second transverse robot support 32e positioned low, both in the side view and in the cross-section. Therefore, this bending deformation applies a predetermined rigidity to the substrate SB, stabilizing its placement on the substrate transfer robot 1E and reducing unwanted vibrations of the substrate SB during the movement of the robot 1E. Furthermore, since the substrate SB is supported by a relatively small number of large-diameter portions 41a', 41b', 42', 43' and the top of the pin 44, there is no risk of high electrostatic discharge (ESD).

[0084] Figure 21 This illustrates a variation 1Ea of the substrate transfer robot 1E according to the fifth embodiment described above. In the fifth embodiment of the substrate transfer robot 1E, the height of the pins 44 provided on the longitudinal robot support 20e is fixed. However, in this variation 1Ea, the height of the pins 44 varies along the length of the longitudinal robot support 20e. For example, the height of the pins 44' provided between the pins 44 can be set lower than the height of the pins 44, wherein the pins 44 are located at positions corresponding to each of the first transverse robot supports 31e and the second transverse robot support 32e. Furthermore, this substrate transfer robot 1Ea is bent and deformed with the area near the front end of the second transverse robot support 32e at a lower position, regardless of whether viewed from the side or in cross-section, thus achieving the same function as the substrate transfer robot 1E described above.

[0085] Figure 22This describes another variation 1Eb of the substrate transfer robot 1E according to the fifth embodiment described above. In the substrate transfer robot 1E of the fifth embodiment, all the large-diameter portions 42' and 43' provided in the second transverse robot support portion 32e have the same diameter. However, in this variation of the substrate transfer robot 1Eb, in the transverse robot support portions 32e of the longitudinal robot support portions 20e' provided on the left and right sides of the three longitudinal robot support portions 20e, the pins 42a' and 43a' provided on the outer side in the left and right direction have a larger diameter, making them the same as the diameter of the large-diameter portions 41a' and 41b' provided in, for example, the first transverse robot support portion 31e. In addition, this substrate transfer robot 1Eb is bent and deformed in such a way that the front end of the second transverse robot support portion 32e where the large-diameter portions 42' and 43' are provided is located at a low position, regardless of whether it is viewed from the side or in the cross section, so that it can perform the same function as the substrate transfer robot 1E described above.

[0086] Of course, the scope of the present invention is not limited to the embodiments described above, and all design changes within the scope of each claim are included within the scope of the present invention.

[0087] In the above embodiments, examples of lateral robot support portions include first lateral robot support portions 31a, 31b, 31c, 31d, and 31e having a first contact 40A, and second lateral robot support portions 32a, 32b, 32c, 32d, and 32e having a second contact 40B. However, other lateral robot support portions with one or more other contacts may also be provided. Furthermore, in this case, when multiple other contacts are provided on the other lateral robot support portions, the heights of the other contacts may be the same or different.

[0088] Furthermore, the heights of the first contact points 40A, second contact points 40B, and other contact points provided on each of the longitudinal robot support portions 20a, 20b, 20c, 20d, 20e and each of the transverse robot support portions 31a, 31b, 31c, 31d, 31e, 32a, 32b, 32c, 32d, 32e, can be freely set according to the bending condition of the substrate SB, which is intentionally supported by the substrate transfer robots 1A, 1B, 1C, 1D, 1E and contacts these contact points. For example, in the embodiments described above, the second contact point 40B provided on the second transverse robot support portions 32a, 32b, 32c, 32d, 32e is placed at its lowest point; however, the third contact point provided on the longitudinal robot support portions 20a, 20b, 20c, 20d, 20e can also be placed at its lowest point. In addition, in the above embodiments, an example is given in which the first contact points 40A of each of the first transverse manipulator support parts 31a, 31b, 31c, 31d, and 31e are at the same height, but the height of the contact points can also be different.

[0089] In summary, the structure that can intentionally cause the substrate SB supported by the substrate transfer robots 1A, 1B, 1C, 1D, and 1E to bend by setting the first contact 40A and the second contact 40B is included within the scope of the present invention.

Claims

1. A robotic arm for supporting and transferring substrates, characterized in that: It includes a longitudinal robot arm support extending in the longitudinal direction, and a plurality of transverse robot arm supports extending from the longitudinal robot arm support in a cross direction that intersects the direction in which the longitudinal robot arm support extends. The plurality of transverse robot support parts include a plurality of first transverse robot support parts and a plurality of second transverse robot support parts. Each of the first transverse robotic arm support portions has a plurality of first contact points capable of contacting the substrate, the highest position of which is a first height. Each of the second lateral robotic arm support portions has a plurality of second contact points capable of contacting the substrate, wherein the highest position of the second contact point is a second height lower than the first height. One of the plurality of first transverse robot arm supports and one of the plurality of second transverse robot arm supports are adjacent to each other in the longitudinal direction at intervals. The surface defined by connecting the height positions of two or more first contacts of the adjacent first transverse robot arm support and two or more second contacts of the adjacent second transverse robot arm support has multiple height positions in both the longitudinal direction and the cross direction.

2. The robotic arm for substrate transfer as described in claim 1, characterized in that: The first transverse robot support and the second transverse robot support are alternately arranged in the longitudinal direction.

3. The robotic arm for substrate transfer as described in claim 1, characterized in that: It includes multiple longitudinal robot arm support sections.

4. The robotic arm for substrate transfer as described in claim 1, characterized in that: The first contact point is formed by the top of an upwardly protruding pin, or by the top of a bulge formed on the first transverse manipulator support. The second contact is formed by the top of an upwardly protruding pin, or by the top of a bulge formed in the second transverse manipulator support.

5. The robotic arm for substrate transfer as described in claim 1, characterized in that: The plurality of lateral manipulator supports extend from each of the longitudinal manipulator supports in the left and right directions, or extend outward from each of the longitudinal manipulator supports in the left and right directions, or extend inward from each of the longitudinal manipulator supports in the left and right directions.

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