An optical system for detecting vertical laser beam collimation

Abstract

This application discloses an optical system for detecting vertical laser beam collimation, belonging to the field of optical system technology. An imaging component, a lens, a semi-reflective beam splitter, and a second reflective component are arranged sequentially along the length of a mounting stage. A mounting slot for mounting the incident light component is provided on the mounting stage. The mounting slot, the semi-reflective beam splitter, and the first reflective component are arranged sequentially along the height of the mounting stage. The optical system for detecting vertical laser beam collimation disclosed in this invention has a simple structure and does not require adjustment each time it is used, eliminating the thermal drift error introduced by the electronic level in traditional methods. This eliminates the need for periodic calibration of thermal drift, enabling the system to achieve automated detection of the vertical beam deflection angle over long periods. Furthermore, it can calculate the beam spacing S based on the beam spot position acquired by the imaging component and then further calculate the inclination of the incident light.

Description

Technical Field

[0001] This invention relates to the field of optical system technology, and more specifically, to an optical system for detecting vertical laser beam collimation. Background Technology

[0002] In the field of precision measurement and metrology, as the requirements for the vertical displacement control accuracy of components continue to increase, the corresponding requirements for measurement accuracy are also gradually increasing. Simultaneously, in the field of ultra-precision component machining, it is necessary to measure the perpendicularity, flatness, and parallelism of component surfaces. Whether it is the precise measurement of the vertical displacement of components or the measurement of their surface geometric accuracy, sufficiently precise measuring instruments are required. For high-precision geometric measurements, laser interferometers, as sub-micron precision testing instruments, are now widely used.

[0003] As a vertical reference in laser interferometers, a vertical laser beam can be used to measure the vertical displacement of an object. However, if the laser used is not perfectly aligned with the true vertical direction, the vertical deviation angle θ of the laser beam will affect the measurement accuracy. Currently, various types of vertical beam generating devices are available on the market; however, these are general-purpose commercial devices and often cannot meet the specific requirements of high-precision scientific research or applications. For example, in the energy balance project for kilogram quantization traceability, a vertical laser beam was used for the precise measurement of the vertical displacement of a permanent magnet. Since the energy balance system operates in a non-magnetic environment, and most existing commercial vertical beam generating devices have some degree of ferromagnetism (containing components made of ferromagnetic materials), they are not suitable for the energy balance system.

[0004] The UK's National Physical Laboratory (NPL) developed a method based on a pinhole and an electronic level. The laser beam being measured first passes through a pinhole and then undergoes a specular reflection on the surface of a plane mirror. The plane mirror is fixed to a level, allowing the mirror's attitude to be measured in real time. During the measurement, the angle of the mirror is adjusted until the specularly reflected laser beam returns to the center of the pinhole; at this point, the mirror is perpendicular to the laser beam, and the tilt angle of the measured laser beam can be calculated using the electronic level reading. This method is simple and accurate; however, due to the thermal drift of the electronic level, its accuracy may gradually decrease without regular calibration. The need for regular calibration further reduces the automation level of this method. Summary of the Invention

[0005] This invention discloses an optical system for detecting vertical laser beam collimation, in order to improve the above-mentioned problems.

[0006] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows:

[0007] To achieve the above objectives, the present invention discloses an optical system for detecting vertical laser beam collimation, comprising:

[0008] Mounting platform, wherein the mounting platform is provided with mounting slots for mounting incident light components;

[0009] A semi-reflective beam splitter is mounted on the mounting platform and is inclined to the mounting groove. The semi-reflective beam splitter is used to split the incident light beam into two beams with equal intensity and perpendicular direction.

[0010] A lens, which is mounted on the mounting platform;

[0011] A first reflective component is mounted on the mounting platform and is located on the path of one of the beam splitters. The first reflective component is used to direct the beam splitter toward the semi-reflective and semi-transparent beam splitter in a direction opposite to the incident direction of the incident light component.

[0012] A second reflective assembly is mounted on the mounting platform and is located on the path of another beam of the split beam. The second reflective assembly is used to direct the split beam toward the lens in a direction opposite to the direction of the split beam.

[0013] An imaging component is located on the side of the lens that is away from the semi-reflective beam splitter.

[0014] Optionally, the lens is slidably connected to the mounting platform, and the sliding direction of the lens is parallel to the connection line between the semi-reflective beam splitter and the first reflective component.

[0015] Optionally: The first reflective component includes a first corner bevel prism and a planar reflective structure. The planar reflective structure is arranged perpendicularly to the mounting groove. A portion of the light-reflecting area of ​​the first corner bevel prism is arranged towards the semi-reflective beam splitter, and another portion is arranged towards the planar reflective structure.

[0016] Optionally: The planar reflective structure includes a box, a cover and a liquid, the cover is attached to the box and forms a receiving cavity, the liquid is located in the receiving cavity, and the cover has an opening at a position corresponding to the second reflective surface.

[0017] Optionally, the second reflective component includes a second cornerstone prism, the light-reflecting area of ​​which is oriented toward the lens.

[0018] Optionally, the angle between the semi-reflective and semi-transparent beam splitter and the mounting groove is 45 degrees.

[0019] Optionally: A rotating block is provided on the mounting platform, the rotating block is rotatably engaged with the mounting groove, and the incident light component is snapped onto the rotating block.

[0020] Optionally: the imaging assembly includes a control structure and a camera, the control structure is mounted on the mounting platform, the camera is mounted on the control structure, the camera is located on the side of the lens away from the semi-reflective beam splitter, and the control structure is used to control the position of the camera.

[0021] Optionally: The control structure includes a mounting connecting plate, a Z-axis control plate, a Y-axis control plate, and an X-axis displacement stage. The mounting connecting plate is mounted on the top of the mounting stage. The Z-axis control plate is slidably connected to the mounting connecting plate. The Y-axis control plate is slidably connected to the Z-axis control plate. The X-axis displacement stage is connected to the Y-axis control plate. The camera is mounted on the X-axis displacement stage.

[0022] Optionally: the first reflective component is slidably connected to the mounting platform, and the first reflective component is slidable relative to the mounting platform along the length direction of the mounting platform; the second reflective component is also slidably connected to the mounting platform, and the second reflective component is slidable relative to the mounting platform along the height direction of the mounting platform.

[0023] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0024] The optical system disclosed in this embodiment for detecting vertical laser beam collimation has a simple structure and does not require adjustment every time it is used. It eliminates the thermal drift error introduced by the electronic level in traditional methods, thereby eliminating the need for periodic calibration of thermal drift. This allows the system to achieve automated detection of beam vertical deflection over a long period of time. Furthermore, it can calculate the beam spacing S based on the beam spot position collected by the imaging component and then further calculate the tilt angle between the incident light and the mounting groove (i.e., the tilt angle of the incident light itself). Attached Figure Description

[0025] Figure 1 A schematic diagram of an optical system for detecting vertical laser beam collimation, as disclosed in an embodiment of the present invention, is shown.

[0026] Figure 2 A schematic diagram of the mounting platform disclosed in an embodiment of the present invention is shown;

[0027] Figure 3 A schematic diagram of the imaging component disclosed in an embodiment of the present invention is shown;

[0028] Figure 4 A schematic diagram of the first reflective component disclosed in an embodiment of the present invention is shown;

[0029] Figure 5A schematic diagram of the reflection path of an untilted light beam as disclosed in an embodiment of the present invention is shown.

[0030] Figure 6 A schematic diagram of the reflection path of an inclined light beam as disclosed in an embodiment of the present invention is shown.

[0031] Figure 7 A schematic diagram of the light position after translation, as disclosed in an embodiment of the present invention, is shown.

[0032] In the picture:

[0033] 100-Mounting platform, 110-Base plate, 120-Top plate, 130-Mounting groove, 140-Slide groove, 150-Notch, 200-Semi-reflective beam splitter, 300-Lens, 400-First reflective assembly, 410-First corner cube prism, 420-Planar reflective structure, 421-Box, 422-Cover, 423-Opening, 500-Second reflective assembly, 510-Second corner cube prism, 600-Imaging assembly, 610-Control structure, 611-Mounting connection plate, 612-Z-axis control plate, 613-Y-axis control plate, 614-X-displacement stage, 620-Camera. Detailed Implementation

[0034] The present invention will now be described in further detail with reference to specific embodiments and accompanying drawings.

[0035] Example:

[0036] See Figure 1 This invention discloses an optical system for detecting the collimation of a vertical laser beam, comprising a mounting stage 100, a semi-reflective beam splitter 200, a lens 300, a first reflective component 400, a second reflective component 500, and an imaging component 600. The imaging component 600, lens 300, semi-reflective beam splitter 200, and second reflective component 500 are arranged sequentially along the length of the mounting stage 100. The mounting stage 100 is provided with a mounting groove 130 for mounting the incident light component, and the mounting groove 130, semi-reflective beam splitter 200, and first reflective component 400 are arranged sequentially along the height of the mounting stage 100.

[0037] In use, the incident light assembly is directly installed into the mounting slot 130. When the incident light travels along the mounting slot 130 towards the semi-reflective beam splitter 200, the beam is split into two beams of equal intensity and perpendicular direction. One beam, after being refracted by the semi-reflective beam splitter 200, is directed towards the first reflector 400, and then reflected back to the semi-reflective beam splitter 200 by the first reflector 400, and reflected by the semi-reflective beam splitter 200 to the lens 300. The other beam... The beam is formed by the reflection of the incident beam from the mounting slot 130 towards the semi-reflective beam splitter 200. This split beam will be directed towards the second reflector 500, and then reflected by the second reflector 500 and directly directed towards the lens 300. The two split beams are projected onto the imaging component 600 under the focusing effect of the lens 300 and form a spot respectively. By adjusting the position of the imaging component 600 so that the incident beam is just parallel to the mounting slot 130, the spots of the two split beams on the imaging component 600 coincide with each other.

[0038] Subsequently, if the spots formed by the two beams of light from the subsequent incident light components on the imaging component 600 do not overlap, it indicates that the incident light rays are tilted, and the tilt angle can be calculated using relevant formulas. The specific formulas are as follows:

[0039] Assuming the distance between the two light spots is S and the angle of inclination of the incident light is θ, then S and θ should satisfy the following relationship: S = f·tan2θ.

[0040] Where f is the focal length of lens 300.

[0041] After calculating the spot spacing S using the spot position acquired by the imaging component 600, the vertical deflection angle θ of the measured vertical laser beam can be calculated in reverse from S:

[0042] The optical system disclosed in this embodiment for detecting vertical laser beam collimation has a simple structure and does not require adjustment every time it is used. It eliminates the thermal drift error introduced by the electronic level in the traditional method, thereby eliminating the need for periodic calibration of thermal drift. This allows the system to achieve automated detection of the vertical deflection angle of the beam over a long period of time. Furthermore, it can calculate the beam spacing S based on the beam position collected by the imaging component 600 and then further calculate the tilt angle between the incident light and the mounting groove 130 (i.e., the tilt angle of the incident light itself).

[0043] See Figure 1 and Figure 2The mounting platform 100 consists of two layers: a base plate 110 and a top plate 120. A mounting groove 130 and a sliding groove 140 are provided on the base plate 110. The mounting groove 130 extends through the base plate 110 along its thickness direction, ensuring that the incident light component, once installed within it, will not be blocked even if there is a directional deviation in the incident light. The sliding groove 140 is provided along the length of the base plate 110, and is spaced apart from the mounting groove 130 along the length of the base plate 110, meaning the mounting groove 130 is located on the extension line of the sliding groove 140. The sliding groove 140 is used to mount the lens 300, facilitating more stable sliding of the lens 300 and preventing the lens 300 from tilting or deviating during movement.

[0044] A rotating block can also be installed on the base plate 110, located within the mounting groove 130, and rotatably engaged with the base plate 110. The rotating block has a slot for fixing the incident light assembly. The rotating block allows the incident light assembly to rotate, enabling more accurate data to be obtained using the least squares fitting method when calculating the spot distance.

[0045] A support column is also provided on the side of the base plate 110 away from the top plate 120. The support column can be connected to the base plate 110 by means of threads. The support column can make the base plate 110 float to a certain height so that the incident light component can be installed from below the base plate 110 into the mounting groove 130.

[0046] The top plate 120 can be installed above the bottom plate 110 via support columns, and the support columns can be threaded to both the bottom plate 110 and the top plate 120. Notches 150 are provided at positions corresponding to the mounting grooves 130 on the top plate 120 and the bottom plate 110 to allow light to pass through.

[0047] A semi-reflective beam splitter 200 is used to split an incident light beam into two beams of equal intensity and perpendicular direction. The semi-reflective beam splitter 200 is mounted on a base plate 110 and is located above a mounting groove 130. The semi-reflective beam splitter 200 is inclined to the mounting groove 130, with the beam splitter 200 tilted along the length of the base plate 110 and the angle between the beam splitter 200 and the mounting groove 130 being 45 degrees. This ensures that the two beams split by the semi-reflective beam splitter 200 can travel along the length and height of the base plate 110, respectively.

[0048] The lens 300 is installed in the slide groove 140. The lens 300 is configured as a convex lens 300 with a light-gathering effect so that the light is focused when it passes through the lens 300, so as to facilitate subsequent observation. The lens 300 can slide along the slide groove 140 relative to the base plate 110.

[0049] See Figure 1 and Figure 3 The imaging assembly 600 includes a control structure 610 and a camera 620. The control structure 610 is mounted on the top plate 120, and the camera 620 is mounted on the control structure 610. The camera 620 is located on the side of the lens 300 opposite to the semi-reflective beam splitter 200. The control structure 610 is used to control the position of the camera 620 so that the camera 620 can be moved to a position equal to one focal length of the lens 300, and all beams refracted by the lens 300 can fall onto the camera 620.

[0050] The control structure 610 includes a mounting plate 611, a Z-axis control plate 612, a Y-axis control plate 613, and an X-axis displacement stage 614. The mounting plate 611 is mounted on the top of the mounting platform 100. The Z-axis control plate 612 is slidably connected to the mounting plate 611, the Y-axis control plate 613 is slidably connected to the Z-axis control plate 612, the X-axis displacement stage 614 is connected to the Y-axis control plate 613, and the camera 620 is mounted on the X-axis displacement stage 614.

[0051] Among them, see Figure 1 Take the horizontal direction in the diagram as the X direction, the vertical direction as the Y direction, and the direction perpendicular to the paper as the Z direction.

[0052] The camera 620 can be adjusted by using the Z-axis control plate 612 and the Y-axis control plate 613 to align it with the lens 300. The distance between the camera 620 and the lens 300 can be adjusted by using the X-axis displacement stage, so that the camera 620 can still maintain a position of one focal length away from the lens 300 after the lens 300 is replaced or its position is changed.

[0053] Since high precision is required when adjusting the distance between the camera 620 and the lens 300, the X-stage 614 can use a lead screw drive to adjust the position of the camera 620, which is more convenient and accurate.

[0054] See Figure 1 and Figure 4The first reflective assembly 400 includes a first corner bevel prism 410 and a planar reflective structure 420. The first reflective assembly 400 directs the beam splitter towards the semi-reflective beam splitter 200 in a direction opposite to the incident direction of the incident light assembly. The planar reflective structure 420 is mounted on the top plate 120 and is perpendicular to the mounting groove 130, i.e., parallel to the bottom plate 110. The first corner bevel prism 410 is also mounted on the top plate 120 and is positioned above the planar reflective structure 420. The first corner bevel prism 410 includes a light-reflecting area, a portion of which faces the semi-reflective beam splitter 200, and another portion of which faces the planar reflective structure 420. When the split beam is directed from the semi-reflective beam splitter 200 to the first corner prism 410, the split beam will be directed towards the planar reflective structure 420 in a direction parallel to and opposite to the previous light. After being reflected by the planar reflective structure 420, the split beam will be reflected again by the first corner prism and then directed back towards the semi-reflective beam splitter 200.

[0055] See Figure 4 The planar reflective structure 420 includes a housing 421, a cover 422, and a liquid. The cover 422 is fitted onto the housing 421 and forms a receiving cavity, within which the liquid is located. The cover 422 has an opening 423 at a position corresponding to the second reflective surface 412. Of course, using liquid reflection is only one implementation method in this embodiment; in other implementations, reflective objects such as mirrors can also be used for the planar reflective structure.

[0056] The second reflective assembly 500 includes a second cornerstone prism 510, which directs the beam splitter toward the lens 300 in a direction opposite to the beam splitter's direction. The second cornerstone prism 510 is mounted on the base plate 110 and is located on the connecting line between the lens 300 and the semi-reflective beam splitter 200, on the side of the semi-reflective beam splitter 200 facing away from the lens 300. The second cornerstone prism 510 also has a light-reflecting area facing the semi-reflective beam splitter 200. When the beam splitter is directed from the semi-reflective beam splitter 200 toward the second cornerstone prism 510, the beam splitter, after reflection by the second cornerstone prism 510, will be directed toward the lens 300 in a direction parallel to and opposite to the preceding light beam.

[0057] In this embodiment, to make the beam reflected from the fourth reflecting surface 512 to the lens 300 brighter, the fourth reflecting surface 512 can be positioned higher than the semi-reflective beam splitter 200. This way, the light reflected from the fourth reflecting surface 512 can directly reach the lens 300 without being filtered by the semi-reflective beam splitter 200, resulting in brighter light upon reaching the lens 300. Of course, positioning the fourth reflecting surface 512 higher than the semi-reflective beam splitter 200 is only one implementation method in this embodiment. In other implementations, positioning the fourth reflecting surface 512 lower than the semi-reflective beam splitter 200 is also possible. In this case, although the reflected beam will be partially weakened by the semi-reflective beam splitter 200, its intensity will still be sufficient to display a speckle on the camera 620.

[0058] In one embodiment of this invention, the first reflective component 400 is slidably connected to the mounting platform 100, and the second reflective component 500 is also slidably connected to the mounting platform 100. The first reflective component 400 can slide relative to the mounting platform 100 along the length direction of the mounting platform 100, and the second reflective component 500 can slide relative to the mounting platform 100 along the height direction of the mounting platform 100. By adjusting the positions of the first reflective component 400 and the second reflective component 500, it is ensured that regardless of the tilt angle of the laser beam emitted by the incident light component, the split beam can be reflected onto the lens 300 by the first reflective component 400 and the second reflective component 500.

[0059] See Figures 5 to 7 The working principle of the optical system for detecting vertical laser beam collimation disclosed in this embodiment is as follows:

[0060] The approximately vertical laser beam L1 being measured is split into two beams, l1 and l2, with equal intensity but perpendicular directions, after passing through a semi-reflective and semi-transparent beam splitter 200.

[0061] On one hand, the split beam l1 is formed by the first corner prism 410 and directed towards the planar reflective structure 420. After being reflected by the planar reflective structure 420, l11 forms l12 and is directed back towards the first corner prism 410. After being reflected again by the first corner prism 410, l12 forms l13 and is directed towards the semi-reflective beam splitter 200. After being reflected by the semi-reflective beam splitter 200, l13 forms l14 facing the lens 300. After being refracted by the lens 300, l14 forms l15 and is directed towards the camera 620.

[0062] On the other hand, after the split beam l2 is reflected by the second corner bevel prism 510, it forms l21 and is directed toward the lens 300. After the lens 300 refracts l21, it forms l22 and is directed toward the camera 620.

[0063] When the laser being measured is directed at the semi-reflective beam splitter 200 at an angle that is completely level with the mounting slot 130, l15 and l22 converge at a single point on the camera 620.

[0064] See Figure 6 When the laser being measured is tilted, the approximately vertical laser beam L1` is split into two beams l1` and l2` with equal intensity but perpendicular directions after passing through the semi-reflective and semi-transparent beam splitter 200.

[0065] On one hand, the split beam l1' is reflected by the first corner prism 410 to form l11' and is directed toward the planar reflective structure 420. After being reflected by the planar reflective structure 420, l11' forms l12' and is directed toward the first corner prism 410 again. After being reflected again by the first corner prism 410, l12' forms l13' and is directed toward the semi-reflective beam splitter 200. After being reflected by the semi-reflective beam splitter 200, l13' forms l14' toward the lens 300. After being refracted by the lens 300, l14' forms l15' and is directed toward the camera 620.

[0066] On the other hand, the split beam l2' is reflected by the second corner prism 510 to form l21' and is directed toward the lens 300. After being refracted by the lens 300, l21' is refracted to form l22' and is directed toward the camera 620.

[0067] As shown in the figure, l17' and l23' will intersect prematurely, leaving two spots on camera 620. The distance S between these two spots can be calculated by computer.

[0068] For easier observation and understanding, please refer to Figure 7 In this figure, the two beams reflected towards the lens 300 are converged to start from a point, which can more clearly show the relationship between the distance S between the two spots and the tilt angle θ of the measured laser.

[0069] According to geometric optics analysis, when the direction of the measured laser coincides with the vertical direction, the angle between the two beams is zero. Therefore, after passing through lens 300, they will completely converge at a point on the camera's 620 sensor at one focal length. When the measured vertical laser deviates from the vertical direction by an angle θ, both beams will deviate from the optical axis of lens 300 by an angle θ, and the angle between them will be 2θ. Figure 7 As shown, when both beams deviate from the optical axis θ of lens 300, the two beams will produce two spots on the photosensitive surface of camera 620 after passing through lens 300. The distance between the two spots is S, and the distance S satisfies the following condition: After calculating the spot spacing S using the spot positions acquired by imaging component 600, the vertical deviation angle θ of the measured vertical laser beam can be calculated in reverse based on S. This allows us to calculate the tilt angle of the laser being measured.

[0070] This invention utilizes geometric optics to accurately analyze the angle of the vertical laser beam relative to the vertical direction, which can be applied to the calibration of the surface perpendicularity, parallelism, and flatness of processed parts, as well as the precise measurement of the vertical displacement and gravitational acceleration g of objects.

[0071] Before measuring the vertical deflection angle of the laser beam under test, firstly, the laser beam is mounted on the rotating block to allow it to enter the measurement system. Secondly, the system is left to stand still for approximately 2 minutes to ensure that the planar reflective structure 420 returns to a horizontal position without external impact. At this point, two light spots will appear on the photosensitive surface of the observation camera 620. After this, the automated long-term measurement mode is activated. A spot center extraction algorithm is used to cyclically acquire the center positions of the two light spots at fixed intervals T, and the distance S is calculated based on the coordinates of the two spot center positions. Simultaneously, S is substituted into the aforementioned formula to calculate the vertical deflection angle θ of the laser beam under test, and the long-term variation of θ is recorded in the host computer.

[0072] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An optical system for detecting collimation of a vertical laser beam, characterized by, The utility model relates to a light beam splitting device, which comprises: a mounting table provided with a mounting groove for mounting an incident light assembly; a half-reflecting half-transmitting beam splitter mounted on the mounting table and obliquely arranged with the mounting groove, the half-reflecting half-transmitting beam splitter being used to split an incident light beam into two beams of equal intensity and perpendicular directions; a lens mounted on the mounting table; a first reflecting assembly mounted on the mounting table and located in the path of one of the two split beams, the first reflecting assembly comprising a first corner cube and a planar reflecting structure, the planar reflecting structure being arranged perpendicularly to the mounting groove, a part of the light reflection area of the first corner cube being arranged towards the half-reflecting half-transmitting beam splitter and another part being arranged towards the planar reflecting structure, the first reflecting assembly being used to make the split beam be reflected towards the half-reflecting half-transmitting beam splitter in a direction opposite to the direction of the light beam of the incident light assembly; a second reflecting assembly mounted on the mounting table and located in the path of the other split beam, the second reflecting assembly comprising a second corner cube, the light reflection area of the second corner cube being arranged towards the lens, the second reflecting assembly being used to make the split beam be reflected towards the lens in a direction opposite to the direction of the split beam; an imaging assembly located on the side of the lens away from the half-reflecting half-transmitting beam splitter, one of the two split beams being reflected by the half-reflecting half-transmitting beam splitter and then being reflected by the first reflecting assembly back to the half-reflecting half-transmitting beam splitter and being reflected by the half-reflecting half-transmitting beam splitter to the lens, the other split beam being formed by the reflection of the mounting groove towards the half-reflecting half-transmitting beam splitter and being reflected towards the second reflecting assembly and then being directly reflected towards the lens, the two split beams being projected onto the imaging assembly and forming two spots respectively under the converging action of the lens.

2. The optical system for detecting vertical laser beam collimation according to claim 1, wherein, The lens is in sliding connection with the mounting table, and the sliding direction of the lens is parallel to the connecting line of the half-reflecting half-transmitting beam splitter and the first reflecting assembly.

3. The optical system for detecting vertical laser beam collimation of claim 1, wherein, The planar reflecting structure comprises a box body, a cover body and a liquid, the cover body is connected to the box body and forms a containing cavity, the liquid is located in the containing cavity, and the cover body is provided with an opening at a position corresponding to the second reflecting surface.

4. The optical system for detecting vertical laser beam collimation of claim 1, wherein, The included angle between the half-reflecting half-transmitting beam splitter and the mounting groove is 45 degrees.

5. The optical system for detecting vertical laser beam collimation of claim 1, wherein, The mounting table is provided with a rotating block, the rotating block is in rotating cooperation with the mounting groove, and the incident light assembly is clamped to the rotating block.

6. The optical system for detecting vertical laser beam collimation of claim 1, wherein, The imaging assembly comprises a control structure and a camera, the control structure is mounted on the mounting table, the camera is mounted on the control structure, the camera is located on the side of the lens away from the half-reflecting half-transmitting beam splitter, and the control structure is used to control the position of the camera.

7. The optical system for detecting vertical laser beam collimation according to claim 6, wherein, The control structure comprises a mounting connecting plate, a Z-axis control plate, a Y-axis control plate and an X displacement table, the mounting connecting plate is mounted on the top of the mounting table, the Z-axis control plate is in sliding connection with the mounting connecting plate, the Y-axis control plate is in sliding connection with the Z-axis control plate, the X displacement table is connected with the Y-axis control plate, and the camera is mounted on the X displacement table.

8. The optical system for detecting vertical laser beam collimation according to claim 1, characterized in that, The first light reflection component is in sliding connection with the mounting table, the first light reflection component can slide on the mounting table along the length direction of the mounting table, and the second light reflection component is also in sliding connection with the mounting table, and the second light reflection component can slide relative to the mounting table along the height direction of the mounting table.

Images