Substrate processing apparatus and method

Abstract

A substrate processing apparatus and method in which a plurality of nozzles having different droplet sizes are configured as a group unit, and the nozzles belonging to the group thus configured are used to perform pixel printing. The substrate processing method includes a step of extracting nozzles having different droplet sizes, a step of configuring the extracted nozzles as a group, and a step of ejecting a substrate processing liquid onto the same position on a substrate using the nozzles included in the group to perform pixel printing on the substrate.

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate processing apparatus and method. More specifically, it relates to a substrate processing apparatus and method for manufacturing a display device. BACKGROUND

[0002] In the case where a printing process (e.g., RGB patterning) is performed on a transparent substrate in order to manufacture a display device such as an LCD panel, a PDP panel, an LED panel, or the like, a printing apparatus equipped with an inkjet head unit can be used. SUMMARY

[0003] PROBLEMS TO BE SOLVED BY THE INVENTION

[0004] If droplets are ejected onto a substrate by using a plurality of nozzles provided in an inkjet head unit, pixel printing can be performed on the substrate. In this case, a plurality of nozzles having the same drop size are configured as one group, and a plurality of nozzles belonging to any one of a plurality of groups are used to eject droplets onto the substrate, whereby pixel printing can be performed so that each pixel has a volume of a prescribed size.

[0005] However, if a group configured by nozzles of the same drop size is used as described above, an error can occur when causing a pixel to have a volume of a prescribed size, and it can be inconvenient that a scanning operation needs to be performed a plurality of times in the case where a nozzle of a small drop size is used.

[0006] The present application relates to a substrate processing apparatus and method. More specifically, it relates to a substrate processing apparatus and method for manufacturing a display device.

[0007] The problems of the present application are not limited to the above-mentioned problems, and other problems not mentioned can be understood clearly by those skilled in the art from the following description.

[0008] MEANS FOR SOLVING THE PROBLEMS

[0009] One aspect of the substrate processing method of the present application for achieving the above-mentioned technical problems includes the steps of extracting nozzles having different drop sizes, configuring the extracted nozzles as a group, and ejecting a substrate processing liquid onto the same position on a substrate by using nozzles included in the group to perform pixel printing on the substrate.

[0010] The step of extracting can extract at least one nozzle having a different drop size, respectively, in consideration of the volume of a pixel.

[0011] The extracting step can extract nozzles of different droplet sizes after selecting a number of droplet sizes, or extract nozzles of different droplet sizes based on the selected number after selecting a number of nozzles.

[0012] The extracting step can extract nozzles of different droplet sizes from one nozzle head, or extract nozzles of different droplet sizes from a plurality of nozzle heads.

[0013] In the case of extracting nozzles of different droplet sizes from one nozzle head, the one nozzle head can include a plurality of nozzles of different droplet sizes, respectively.

[0014] In the case of extracting nozzles of different droplet sizes from a plurality of nozzle heads, each nozzle head can include a plurality of nozzles of the same droplet size, and the nozzles included in different nozzle heads can have different droplet sizes.

[0015] The method can further include, before the extracting step, a step of acquiring information about a recess formed in the substrate, and a step of determining a volume of a pixel formed in the recess based on the information about the recess.

[0016] The acquiring step can acquire the information about the recess based on an image obtained by photographing the substrate.

[0017] The information about the recess can include a diameter of the recess and a depth of the recess.

[0018] The extracting step can analyze droplet sizes of nozzles included in an inkjet head, and extract nozzles of different droplet sizes based on the analysis result.

[0019] The method can further include, before the extracting step, specifically between the determining step and the extracting step, a step of determining whether a substrate treatment liquid of an amount corresponding to the volume of the pixel can be ejected.

[0020] In the case where a substrate treatment liquid of an amount corresponding to the volume of the pixel cannot be ejected, the extracting step can extract nozzles of different droplet sizes so as to exceed the volume of the pixel and have a minimum error compared to the volume of the pixel.

[0021] The acquiring step can acquire information about a recess for each unit region formed to manufacture display devices of different sizes.

[0022] Further, another aspect of the substrate processing method of the present application for achieving the above-described technical task includes: a step of acquiring information on a recess formed in a substrate; a step of determining a volume of a pixel formed in the recess based on the information on the recess; a step of extracting nozzles different in droplet size from each other, respectively, taking into account the volume of the pixel; a step of grouping the extracted nozzles; and a step of ejecting a substrate processing liquid onto the same position on the substrate using the nozzles included in the group to perform pixel printing on the substrate, the extracting step analyzing droplet sizes of nozzles included in an inkjet head and extracting nozzles different in droplet size based on the analysis result, discriminating whether or not it is possible to eject an amount of the substrate processing liquid corresponding to the volume of the pixel, and in a case where it is not possible to eject the amount of the substrate processing liquid corresponding to the volume of the pixel, extracting nozzles different in droplet size so as to exceed the volume of the pixel and to have a minimum error compared to the volume of the pixel.

[0023] Further, one aspect of the substrate processing apparatus of the present application for achieving the above-described technical task includes: a process processing unit that supports a substrate during processing of the substrate; an inkjet head unit that includes a plurality of nozzles and ejects a substrate processing liquid onto the substrate through the nozzles; a rack unit that moves the inkjet head unit over the substrate; and a control unit that controls actions of the nozzles, the control unit extracting nozzles different in droplet size and grouping the nozzles, and ejecting the substrate processing liquid onto the same position on the substrate using the nozzles included in the group to perform pixel printing on the substrate.

[0024] Details of other embodiments are included in the detailed description and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a block diagram schematically showing a configuration of a substrate processing apparatus according to one embodiment of the present application.

[0026] Figure 2 is a first example diagram for explaining nozzles constituting an inkjet head according to one embodiment of the present application.

[0027] Figure 3 is a second example diagram for explaining nozzles constituting an inkjet head according to one embodiment of the present application.

[0028] Figure 4 is a first example diagram for explaining a method of mixing nozzles according to droplet sizes to constitute a group.

[0029] Figure 5 is a second example diagram for explaining a method of mixing nozzles according to droplet sizes to constitute a group.

[0030] Figure 6is a third example diagram for explaining a method of mixing nozzles to constitute groups according to droplet sizes.

[0031] Figure 7 is a fourth example diagram for explaining a method of mixing nozzles to constitute groups according to droplet sizes.

[0032] Figure 8 is a block diagram schematically showing internal modules of a control unit constituting a substrate processing apparatus according to an embodiment of the present application.

[0033] Figure 9 is a first example diagram for explaining various functions of a control unit constituting a substrate processing apparatus according to an embodiment of the present application.

[0034] Figure 10 is a second example diagram for explaining various functions of a control unit constituting a substrate processing apparatus according to an embodiment of the present application.

[0035] Figure 11 is a first example diagram for explaining a case of matching a target volume of 100 pl.

[0036] Figure 12 is a second example diagram for explaining a case of matching a target volume of 100 pl.

[0037] Figure 13 is a first example diagram for explaining a case of matching a target volume of 190.3 pl.

[0038] Figure 14 is a second example diagram for explaining a case of matching a target volume of 190.3 pl.

[0039] BRIEF DESCRIPTION OF DRAWINGS

[0040] 100: substrate processing apparatus 110: process processing unit

[0041] 120: maintenance unit 130: rack unit

[0042] 140: inkjet head unit 150: substrate processing liquid supply unit

[0043] 160: control unit 210: inkjet head

[0044] 210a: first inkjet head 210b: second inkjet head

[0045] 210c: third inkjet head 210d: fourth inkjet head

[0046] 210k: kth inkjet head 220: first nozzle

[0047] 230: second nozzle 240: third nozzle

[0048] 250: fourth nozzle 310: first group

[0049] 320: second group 330: third group

[0050] 340: fourth group 410: recess information acquisition section

[0051] 420: pixel information determination section 430: nozzle extraction section

[0052] 440: group constitution section 510: first unit region

[0053] 520: second unit region DETAILED DESCRIPTION

[0054] The advantages, features and methods of realizing them of the present application will become apparent from the following detailed description of preferred embodiments of the present application with reference to the attached drawings. However, the present application is not limited to the embodiments disclosed below, but can be implemented in various ways different from each other, and the present embodiments are provided only for the purpose of completely disclosing the present application and completely informing those skilled in the art to which the present application pertains of the scope of the application, and the present application is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same constituent elements.

[0055] Elements or layers are described as "on" or "on" other elements or layers, not only including directly above the other elements or layers, but also including the case where other layers or other elements are present in between. In contrast, elements are described as "directly on" or "directly on" to indicate that no other elements or layers are present in between.

[0056] "Below", "beneath", "lower", "above", "upper" and the like as spatially relative terms can be used to more easily describe the relative relationship between one element or constituent element and other elements or constituent elements as shown in the drawings. The spatially relative terms should be understood to include terms other than the directions shown in the drawings, terms of use or operation. For example, in the case of turning the elements shown in the drawings upside down, the element described as "below" or "beneath" another element can be placed "above" the other element. Therefore, the exemplary term "beneath" can include all of the below and above. The elements can also be oriented along other directions, and thus the spatially relative terms can be interpreted according to the orientation direction.

[0057] It should be understood that, although the terms first, second, etc. are used herein to describe various elements, constituent elements, and / or parts, such elements, constituent elements, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, constituent element, or part from another element, constituent element, or part. Thus, a first element, constituent element, or part discussed below could be termed a second element, constituent element, or part without departing from the spirit and scope of the present application.

[0058] The terms used in the present specification are used to describe the embodiments and are not intended to limit the present application. In the present specification, unless particularly mentioned otherwise, the singular form also includes the plural form. The "comprises" and / or "comprising", used in the specification, do not exclude the existence or addition of one or more other elements, steps, steps, and / or components.

[0059] Unless otherwise defined, all terms used in the present specification, including technical and scientific terms, can be used as commonly understood by one of ordinary skill in the art to which the present application belongs. In addition, unless explicitly particularly defined, terms generally used before the prior art are not to be idealized or over-interpreted.

[0060] Embodiments of the present application will be described in detail below with reference to the accompanying drawings. When the description is made with reference to the drawings, the same reference numerals are used for the same or corresponding elements on the drawings regardless of the figure number, and repeated description thereof is omitted.

[0061] The present application relates to a control unit that configures nozzles having different drop sizes into a pack unit and performs pixel printing using nozzles belonging to the pack thus configured, and a substrate processing apparatus provided with the same. According to the present application, it is possible to make the volume of a pixel have a prescribed size by one scan operation using a pack, and thus it is possible to reduce the number of scans for printing, thereby achieving an increase in the productivity of products. The present application will be described in detail below with reference to the drawings and the like.

[0062] Figure 1 is a block diagram schematically showing the configuration of a substrate processing apparatus according to one embodiment of the present application.

[0063] A substrate processing apparatus 100 processes a substrate G (e.g., a glass substrate (Glass)) for manufacturing a display device. Such a substrate processing apparatus 100 can be implemented as an inkjet device that jets a substrate processing liquid onto the substrate G using an inkjet head unit 140, and in particular, can be implemented as a recirculating inkjet device in order to prevent a nozzle from being clogged by the substrate processing liquid. The substrate processing apparatus 100 can be provided as a QD (Quantum Dot) CF (Color Filter) inkjet device, for example.

[0064] According to Figure 1 , the substrate processing apparatus 100 can be configured to include a process processing unit 110, a maintenance unit 120, a gantry unit 130, an inkjet head unit 140, a substrate processing liquid supply unit 150, and a controller 160.

[0065] The process processing unit 110 supports the substrate G during performance of a PT operation on the substrate G. Such a process processing unit 110 can support the substrate G in a non-contact manner. The process processing unit 110 can support the substrate G by floating the substrate G in the air using air, for example. However, the present embodiment is not limited thereto. The process processing unit 110 can also support the substrate G in a contact manner. The process processing unit 110 can support the substrate G using a support member configured with a seating surface on an upper portion, for example.

[0066] On the other hand, the PT operation described above refers to a printing process on the substrate G using a substrate processing liquid, and the substrate processing liquid refers to a chemical liquid used for the printing process on the substrate G. The substrate processing liquid can be QD (Quantum Dot) ink containing ultra-fine semiconductor particles, for example.

[0067] In a case where the substrate G is supported using air, the process processing unit 110 can be configured to include a first stage (1 st Stage) 111 and an air hole 112.

[0068] The first stage 111 can be provided as a base to enable the substrate G to be seated on an upper portion thereof. The air hole 112 can be formed through an upper surface of such a first stage 111, and a plurality of air holes 112 can be formed within a PT zone on the first stage 111.

[0069] The air holes 112 can eject air in the upper direction (third direction 30) of the first stage 111. The air holes 112 can thereby cause the substrate G placed on the first stage 111 to float in the air.

[0070] On the other hand, although Figure 1 Although not shown in FIG. 1, the process processing unit 110 can further include a gripper. The gripper is used to prevent the substrate G from falling off the first stage 111 when moving in the lengthwise direction (first direction 10) of the first stage 111. The gripper can hold the substrate G to prevent it from falling off the first stage 111, and in the case where the substrate G moves, slide along a guide rail (not shown) while holding the substrate G.

[0071] The maintenance unit 120 measures the ejection position of the substrate processing liquid on the substrate G (i.e., the dot), whether or not the substrate processing liquid is ejected, and the like. The maintenance unit 120 can measure the ejection position of the substrate processing liquid, whether or not the substrate processing liquid is ejected, and the like for each of the plurality of nozzles possessed by the inkjet head unit 140, and can cause the measurement results thus obtained to be provided to the control unit 160.

[0072] The maintenance unit 120 can be configured, for example, to include a second stage (2 nd Stage) 121, a third guide rail (3 rd Guide Rail) 122, a first plate (1 st Plate) 123, a calibration board 124, and a vision module 125.

[0073] The second stage 121 can be arranged side by side with the first stage 111 as a base, like the first stage 111. The second stage 121 can be provided to be the same size as the first stage 111, but can also be provided to have a smaller or larger size than the first stage 111. The second stage 121 can include an MT zone on its upper portion.

[0074] The third guide rail 122 guides the movement path of the first plate 123. Such a third guide rail 122 can be provided in at least one line on the second stage 121 in the lengthwise direction (first direction 10) of the second stage 121. The third guide rail 122 can be implemented by, for example, a linear motor guide system (LM guide system).

[0075] On the other hand, although Figure 1 Although not shown in FIG. 1, the maintenance unit 120 can further include a fourth guide rail (4 thGuideRail). The fourth guide rail can function as a guide rail that guides the movement path of the first plate 123 as with the third guide rail 122, and is provided in at least one line on the second table 121 along the width direction (second direction 20) of the second table 121. The fourth guide rail can also be implemented by the LM guide system as with the third guide rail 122.

[0076] The first plate 123 moves on the second table 121 along the third guide rail 122 and / or the fourth guide rail. The first plate 123 can move along the third guide rail 122 side by side with the substrate G, and can also approach or move away from the substrate G along the fourth guide rail.

[0077] The calibration plate 124 is used to measure the ejection position of the substrate processing liquid on the substrate (G). Such a calibration plate 124 can include an align mark, a scale, or the like provided on the first plate 123, and can be provided along the length direction (first direction 10) of the first plate 123.

[0078] The vision module 125 acquires image information for the substrate G to measure the ejection position of the substrate processing liquid, whether the substrate processing liquid is ejected or not, and the like. The vision module 125 can include an area scan camera, a line scan camera, or the like, and can acquire image information for the substrate G in real time. On the other hand, the vision module 125 can also obtain and provide information for the calibration plate 124 in addition to information for the substrate G on which the substrate processing liquid is ejected.

[0079] The vision module 125 can be provided on the side or lower side of the gantry unit 130 to photograph the substrate G or the like. The vision module 125 can be provided, for example, in a form attached to the side of the inkjet head unit 140. However, the present embodiment is not limited thereto. The vision module 125 can also be provided on the first plate 123. On the other hand, a plurality of vision modules 125 can be provided within the substrate processing apparatus 100, and can be fixedly provided or movably provided.

[0080] The gantry unit 130 supports the inkjet head unit 140. Such a gantry unit 130 can be provided on the upper portion of the first table 111 and the second table 121 so that the inkjet head unit 140 can eject the substrate processing liquid onto the substrate G.

[0081] The gantry unit 130 can be provided on the first table 111 and the second table 121 in the width direction (second direction 20) of the first table 111 and the second table 121 as the length direction. The gantry unit 130 can be guided along the first guide rail (1 st Guide Rail; 170a) and the second guide rail (2 ndGuide Rail; 170b) are moved in the length direction (first direction 10) of the first work table 111 and the second work table 121. On the other hand, the first guide rail 170a and the second guide rail 170b can be provided outside the first work table 111 and the second work table 121 along the length direction (first direction 10) of the first work table 111 and the second work table 121.

[0082] On the other hand, although Figure 1 Although not illustrated in the drawings, the substrate processing apparatus 100 can further include a rack moving unit. The rack moving unit moves the rack unit 130 along the first guide rail 170a and the second guide rail 170b. The rack moving unit can be provided inside the rack unit 130, and can be configured to include a first moving module (not illustrated) and a second moving module (not illustrated). The first moving module and the second moving module can be provided at both ends inside the rack unit 130, and can move the rack unit 130 to slide along the first guide rail 170a and the second guide rail 170b.

[0083] The inkjet head unit 140 ejects the substrate processing liquid in the form of droplets onto the substrate G. Such an inkjet head unit 140 can be provided at the side portion or the lower portion of the rack unit 130.

[0084] At least one inkjet head unit 140 can be provided on the rack unit 130. In the case where a plurality of inkjet head units 140 are provided on the rack unit 130, the plurality of inkjet head units 140 can be arranged in a row along the length direction (second direction 20) of the rack unit 130.

[0085] The inkjet head unit 140 can be moved along the length direction (second direction 20) of the rack unit 130 to be positioned at a desired location on the substrate G. However, the present embodiment is not limited thereto. The inkjet head unit 140 can be moved along the height direction (third direction 30) of the rack unit 130, and can also be rotated in the clockwise direction or the counterclockwise direction.

[0086] On the other hand, the inkjet head unit 140 can also be provided in a manner fixed to the rack unit 130. In this case, the rack unit 130 can be provided to be movable.

[0087] On the other hand, although Figure 1The substrate processing apparatus 100 can further include an inkjet head moving unit, although not shown. The inkjet head moving unit moves the inkjet head unit 140 linearly or rotates it. In a case where the substrate processing apparatus 100 is configured to include a plurality of inkjet head units 140, the inkjet head moving unit can be provided within the substrate processing apparatus 100 in correspondence with the number of inkjet head units 140 to move the plurality of inkjet head units 140 independently. On the other hand, a single inkjet head moving unit can be provided within the substrate processing apparatus 100 to move the plurality of inkjet head units 140 collectively.

[0088] On the other hand, although Figure 1 The inkjet head unit 140 can be configured to include a nozzle plate, a plurality of nozzles, a piezoelectric element, and the like, although not shown. The nozzle plate constitutes the main body of the inkjet head unit 140. A plurality of (for example, 128, 256, and the like) nozzles can be provided as a plurality of rows and columns at a fixed interval in the lower portion of such a nozzle plate, and a piezoelectric element can be provided in the nozzle plate in a number corresponding to the number of nozzles. The inkjet head unit 140, when thus configured, can eject the substrate processing liquid onto the substrate G through the nozzles in accordance with the operation of the piezoelectric element.

[0089] On the other hand, the inkjet head unit 140 can also independently adjust the amount of ejection of the substrate processing liquid through each nozzle in accordance with the voltage applied to the piezoelectric element.

[0090] The substrate processing liquid supply unit 150 supplies ink to the inkjet head unit 140. Such a substrate processing liquid supply unit 150 can be configured to include a storage tank 150a and a pressure control module 150b.

[0091] The storage tank 150a stores the substrate processing liquid, and the pressure control module 150b adjusts the internal pressure of the storage tank 150a. The storage tank 150a can supply the appropriate amount of substrate processing liquid to the inkjet head unit 140 based on the pressure supplied by the pressure control module 150b.

[0092] The control unit 160 performs maintenance with respect to the inkjet head unit 140. Such a control unit 160 can correct the substrate processing liquid ejection position of each nozzle possessed by the inkjet head unit 140 or detect a defective nozzle (i.e., a nozzle that does not eject the substrate processing liquid) among the plurality of nozzles based on the measurement results of the maintenance unit 120, so that a cleaning operation is performed on the defective nozzle. The control unit 160 can control the operation of each structure constituting the substrate processing apparatus 100 for this purpose.

[0093] The control unit 160 can include a processing controller, a control program, an input module, an output module (or a display module), a memory module, etc., and is implemented by a computer or a server, etc. In the above, the processing controller can include a microprocessor that performs a control function for each structure constituting the substrate processing apparatus 100, and the control program can perform various processes of the substrate processing apparatus 100 according to the control of the processing controller. The memory module stores various data and programs for performing various processes of the substrate processing apparatus 100 according to processing conditions, i.e., a processing recipe (Recipe).

[0094] In the present application, as described above, a plurality of nozzles having different drop sizes can be configured as one pack, and the nozzles belonging to the pack thus configured can be used to perform pixel printing on a substrate. Such a method will be described in detail below.

[0095] The method can be performed by the control unit 160 constituting the substrate processing apparatus 100. However, the present embodiment is not limited thereto. A control device (e.g., a computer) that is independently provided from the control unit 160 can also be included in the substrate processing apparatus 100 in order to perform the above-described method. Hereinafter, the case where the above-described method is performed by the control unit 160 constituting the substrate processing apparatus 100 will be described as an example.

[0096] If a plurality of nozzles having the same drop size are configured as one pack, it is difficult to use the nozzles constituting the pack to make a pixel have a volume of a prescribed size.

[0097] For example, assuming that a volume of 100 pl is filled into one pixel having a size of 300 μm, 15 nozzles having a size of 20 μm can be configured as one pack and participate in printing the pixel.

[0098] In the above case, if each nozzle can fill a volume of 6 pl with one drop, 15 nozzles can fill a volume of 90 pl with one swath and one drop. Therefore, if a volume of 100 pl is desired to be filled, a printing operation of one swath and two or more drops or a printing operation of two or more swaths is required to fill the volume of 100 pl.

[0099] In addition, if each nozzle can fill a volume of 7 pl with one drop, 15 nozzles can fill a volume of 105 pl with one swath and one drop, and a problem of exceeding 5 pl can occur instead.

[0100] As shown in the example above, in the case of pixel printing, if you want to mix the available nozzles corresponding to the length of the pixel for printing so that the pixel has a volume of a specified size, there is an inconvenience that you need to scan repeatedly once until the required volume can be filled (2 swaths), and there is a problem that it is not easy to spray droplets onto the substrate in a way that matches the specified volume.

[0101] In order to solve these problems, the present invention is characterized by forming a group of multiple nozzles with different droplet sizes, and using the nozzles belonging to such a group to perform pixel printing, so that the pixels have a volume of a specified size.

[0102] To illustrate, as mentioned above, suppose we want to fill a 100pl volume into a pixel that is 300μm in size. In this case, we could group 15 nozzles, each 20μm in size, together to participate in printing the pixel.

[0103] In the above scenario, if 10 nozzles capable of filling a volume of 7pl and 5 nozzles capable of filling a volume of 6pl are grouped together, then 15 nozzles can accurately fill a volume of 100pl with one sweep and one drop. Therefore, when printing to achieve a pixel volume of a specified size, there is no inconvenience of repeatedly scanning, and by printing to achieve a pixel volume of a specified size in a short time, productivity can be improved.

[0104] The control unit 160 can group multiple nozzles of different droplet sizes together for printing, so that the pixels have a specified volume. The control unit 160 can each include at least one or more nozzles of two different types with different droplet sizes to form a group.

[0105] However, this embodiment is not limited thereto. The control unit 160 may also include at least one or more nozzles of three or more different droplet sizes to form a group.

[0106] like Figure 2 As shown, multiple nozzles 220 that eject droplets of the same volume (w1) onto the substrate can be provided in one inkjet head 210. Figure 2 This is a first example diagram illustrating a nozzle constituting an inkjet head according to an embodiment of the present invention.

[0107] However, this embodiment is not limited thereto. For example... Figure 3 As shown, multiple nozzles 220, 230, 240, and 250 with different volumes w1, w2, w3, and w4 can also be provided in one inkjet head 210 to spray droplets onto the substrate. Figure 3is a second example diagram for explaining a nozzle constituting an inkjet head according to one embodiment of the present application.

[0108] Here, a case where a plurality of nozzles 220, 230, 240, 250 that eject droplets of mutually different volumes wl, w2, w3, w4 to a substrate are provided in one inkjet head 210 is explained as an example.

[0109] First, referring to Figure 4 , a case where the former, that is, one group is constituted of two kinds of nozzles respectively including droplets of different sizes is explained as follows.

[0110] In the plurality of inkjet heads 210a, 210b,..., 210k,..., 210n, the kth inkjet head 210k can be provided with a plurality of first nozzles 220 that eject droplets of a volume corresponding to 4 pl to a substrate, second nozzles 230 that eject droplets of a volume corresponding to 6 pl to a substrate, third nozzles 240 that eject droplets of a volume corresponding to 7 pl to a substrate, and fourth nozzles 250 that eject droplets of a volume corresponding to 9 pl to a substrate, respectively.

[0111] In this case, the control unit 160 can constitute a first group 310 of 5 second nozzles 230 and 10 third nozzles 240, and can perform pixel printing using the second nozzles 230 and the third nozzles 240 constituting the first group 310 to cause a pixel to have a volume of 100 pl by one droplet. Figure 4 is a first example diagram for explaining a method of mixing nozzles to constitute a group according to droplet size.

[0112] Then, referring to Figure 5 , a case where the latter, that is, one group is constituted of three kinds of nozzles respectively including droplets of different sizes is explained as follows.

[0113] In the above case, the control unit 160 can constitute a second group 320 of 5 first nozzles 220 and 5 third nozzles 240 and 5 fourth nozzles, and can perform pixel printing using the first nozzles 220, the third nozzles 240, and the fourth nozzles 250 constituting the second group 320 to cause a pixel to have a volume of 100 pl by one droplet. Figure 5 is a second example diagram for explaining a method of mixing nozzles to constitute a group according to droplet size.

[0114] On the other hand, as described above, it is also possible to provide only nozzles that eject droplets of the same volume to a substrate in one inkjet head (210). This case is explained below.

[0115] First, referring to Figure 6The case of the former, that is, the case where one group is configured of two kinds of nozzles each including nozzles of different droplet sizes, will be described.

[0116] A plurality of first nozzles 220 that eject droplets of a volume equivalent to 4 pl to the substrate can be provided in the first inkjet head 210a among the plurality of inkjet heads 210a, 210b,..., 210k,..., 210n. In addition, a plurality of second nozzles 230 that eject droplets of a volume equivalent to 6 pl to the substrate can be provided in the second inkjet head 210b, and a plurality of third nozzles 240 that eject droplets of a volume equivalent to 7 pl to the substrate can be provided in the third inkjet head 210c. In addition, a plurality of fourth nozzles 250 that eject droplets of a volume equivalent to 9 pl to the substrate can be provided in the fourth inkjet head 210d.

[0117] In the above case, the control unit 160 can extract 5 second nozzles 230 from the second inkjet head 210b and 10 third nozzles 240 from the third inkjet head 210c, and configure the 5 second nozzles 230 and the 10 third nozzles 240 as a third group 330. The control unit 160 can perform pixel printing using the second nozzles 230 and the third nozzles 240 that configure the third group 330 to cause a pixel to have a volume of 100 pl by one droplet. Figure 6 is a third example diagram for explaining a method of configuring a group by mixing nozzles according to droplet sizes.

[0118] Then, with reference to Figure 7 The case of the latter, that is, the case where one group is configured of three kinds of nozzles each including nozzles of different droplet sizes, will be described.

[0119] In the above case, the control unit 160 can extract 5 first nozzles 220 from the first inkjet head 210a, 5 third nozzles 240 from the third inkjet head 210c, and 5 fourth nozzles 250 from the fourth inkjet head 210d, and configure the 5 first nozzles 220 and the 5 third nozzles 240 and the 5 fourth nozzles 250 as a fourth group 340. The control unit 160 can perform pixel printing using the first nozzles 220, the third nozzles 240, and the fourth nozzles 250 that configure the fourth group 340 to cause a pixel to have a volume of 100 pl by one droplet. Figure 7 is a fourth example diagram for explaining a method of configuring a group by mixing nozzles according to droplet sizes.

[0120] The above with reference to Figures 2 to 7 The method of configuring one group of a plurality of nozzles of different droplet sizes has been described. The control unit 160 can configure a group not only from nozzles of different droplet sizes in one inkjet head but also from nozzles of different droplet sizes in a plurality of inkjet heads.

[0121] In a case where the substrate processing apparatus 100 ejects droplets onto the substrate G to perform pixel printing on the substrate G, the control unit 160 can mix two or more kinds of nozzles having different drop sizes according to the volume of the pixel to configure one pack.

[0122] In this case, as shown in FIG. 4, the control unit 160 can include a groove information acquisition section 410, a pixel information determination section 420, a nozzle extraction section 430, and a pack configuration section 440 to configure a pack according to the volume of the pixel. Figure 8 Figure 8 FIG. 4 is a block diagram schematically showing internal modules of a control unit configuring a substrate processing apparatus according to an embodiment of the present application.

[0123] The groove information acquisition section 410 can acquire information on grooves formed on the substrate G. The grooves can be formed on the substrate G in units of pixels through a photo-lithography process. The substrate processing apparatus 100 can eject droplets onto the substrate G to perform pixel printing on the substrate G.

[0124] The groove information acquisition section 410 can be provided as an input unit to receive information on grooves formed on the substrate G input from an administrator. However, the present embodiment is not limited thereto. The groove information acquisition section 410 can also be provided as a communication unit to receive information on grooves formed on the substrate G transmitted through wired / wireless communication. On the other hand, the groove information acquisition section 410 can also be linked with the vision module 125 of the substrate processing apparatus 100 to generate information on grooves formed on the substrate G according to image information obtained by the vision module 125 capturing the substrate G.

[0125] On the other hand, the groove information acquisition section 410 can acquire a diameter (or radius) of the groove, a depth of the groove, and the like as information on the grooves formed on the substrate G.

[0126] The pixel information determination section 420 can determine information on pixels to be formed in each groove based on information on grooves formed on the substrate G acquired by the groove information acquisition section 410. That is, the pixel information determination section 420 can determine the volume of pixels to be formed in each groove.

[0127] The nozzle extraction section 430 can extract nozzles to be involved in ejecting droplets into each groove based on the volume of pixels to be formed in each groove on the substrate G determined by the pixel information determination section 420. ​

[0128] The nozzle extraction section 430 can acquire information on the droplet size of the nozzles possessed by the inkjet head, to extract the nozzles that are to participate in the ejection of droplets into each of the grooves. If the information on the droplet size of the nozzles is acquired, the nozzle extraction section 430 can extract the nozzles that are to participate in the ejection of droplets into each of the grooves, based on the information.

[0129] For example, in a case where the inkjet head has nozzles of a Small Type droplet size, nozzles of a Medium Type droplet size, nozzles of a Large Type droplet size, and the like, the nozzle extraction section 430 can acquire information on the droplet size of such nozzles, and then extract the nozzles that are to participate in the ejection of droplets into each of the grooves, based on the information.

[0130] The nozzle extraction section 430, in a case of extracting the nozzles that are to participate in the ejection of droplets into each of the grooves, can extract the nozzles that are to participate in the ejection of droplets into each of the grooves, after determining the droplet size.

[0131] For example, in a case where the volume of a pixel is 100 pl, and the inkjet head has nozzles of a 6-pl droplet size, nozzles of a 13-pl droplet size, nozzles of a 25-pl droplet size, and the like, the nozzle extraction section 430 can determine to use all types of nozzles having different droplet sizes, and then extract 4 nozzles of a 6-pl droplet size, 2 nozzles of a 13-pl droplet size, 2 nozzles of a 25-pl droplet size, and the like, as the nozzles that are to participate in the filling of the volume 100 pl of the pixel.

[0132] Alternatively, the nozzle extraction section 430 can determine to use partial types of nozzles having different droplet sizes, and then extract 8 nozzles of a 6-pl droplet size, 4 nozzles of a 13-pl droplet size, and the like, as the nozzles that are to participate in the filling of the volume 100 pl of the pixel.

[0133] On the other hand, in a case where the nozzle extraction section 430 extracts the nozzles that are to participate in the ejection of droplets into each of the grooves, the nozzle extraction section 430 can extract the nozzles that are to participate in the ejection of droplets into each of the grooves, after determining the number of nozzles.

[0134] For example, in a case where the volume of a pixel is 100 pl, and there are nozzles of a 6-pl droplet size, nozzles of a 13-pl droplet size, nozzles of a 25-pl droplet size, and the like in the inkjet head, the nozzle extraction section 430 can determine the number of nozzles that are to participate in the ejection of droplets into each of the grooves to be 8. In this case, the nozzle extraction section 430 can extract 4 nozzles of a 6-pl droplet size, 2 nozzles of a 13-pl droplet size, 2 nozzles of a 25-pl droplet size, and the like, as the participating nozzles, to fill the volume 100 pl of the pixel.

[0135] In addition, the nozzle extraction section 430 can determine the number of nozzles to be involved in the ejection of liquid drops to each of the grooves to be 12. In this case, the nozzle extraction section 430 can extract 8 nozzles of 6 pl in liquid drop size, 4 nozzles of 13 pl in liquid drop size, and the like as the involved nozzles to fill the volume 100 pl of the pixel.

[0136] On the other hand, there can be a case where the volume of the pixel cannot be accurately filled by the nozzles provided in the inkjet head. For example, in a case where the inkjet head has nozzles of 6 pl in liquid drop size, nozzles of 13 pl in liquid drop size, nozzles of 30 pl in liquid drop size, and the like, and the volume 105 pl of the pixel needs to be filled, the volume 105 pl of the pixel cannot be accurately filled by the nozzles having the above-described liquid drop sizes.

[0137] Therefore, in this case, the involved nozzles can be extracted so as to exceed the reference value (i.e., 105 pl) but have the least error from the reference value (e.g., 106 pl). For example, the nozzle extraction section 430 can extract 4 nozzles of 6 pl in liquid drop size, 4 nozzles of 13 pl in liquid drop size, and 1 nozzle of 30 pl in liquid drop size as the involved nozzles so that liquid drops of a total of 106 pl can be ejected.

[0138] Alternatively, the nozzle extraction section 430 can extract 9 nozzles of 6 pl in liquid drop size, 4 nozzles of 13 pl in liquid drop size, and the like as the involved nozzles.

[0139] If the involved nozzles are extracted by the nozzle extraction section 430, the group configuration section 440 can configure these involved nozzles into one group. The plurality of nozzles configured into one group can eject liquid drops to the same groove on the substrate G.

[0140] On the other hand, although a plurality of grooves having the same size can be formed on the substrate G, a plurality of grooves having mutually different sizes can also be formed. For example, as shown in FIG. 5, six first unit regions 510 for manufacturing 75-inch display devices can be formed on the substrate G. In this case, since a plurality of grooves having the same size are formed on the substrate G, the control unit 160 can extract a plurality of nozzles having different liquid drop sizes to configure a group according to the method described with reference to FIG. 4. Figure 9 Figure 8 On the other hand, although a plurality of grooves having the same size can be formed on the substrate G, a plurality of grooves having mutually different sizes can also be formed. For example, as shown in FIG. 5, six first unit regions 510 for manufacturing 75-inch display devices can be formed on the substrate G. In this case, since a plurality of grooves having the same size are formed on the substrate G, the control unit 160 can extract a plurality of nozzles having different liquid drop sizes to configure a group according to the method described with reference to FIG. 4.

[0141] On the other hand, as shown in FIG. 6, six first unit regions 510 for manufacturing 75-inch display devices can be formed on the substrate G. In this case, since a plurality of grooves having mutually different sizes are formed on the substrate G, the control unit 160 can extract a plurality of nozzles having different liquid drop sizes to configure a group according to the method described with reference to FIG. 4. Figure 10 ​As shown, three first unit regions 510 for manufacturing 75-inch display devices and four second unit regions 520 for manufacturing 65-inch display devices can also be formed on the substrate G. In this case, since the grooves of the first size formed in the first unit regions 510 and the grooves of the second size smaller than the first size formed in the second unit regions 520 are formed on the substrate G, respectively, the control unit 160 can constitute groups according to the following methods.

[0142] First, the control unit 160 can extract a plurality of nozzles having different droplet sizes according to the method described with reference to Figure 8 to constitute a group. Then, the control unit 160 can extract a plurality of nozzles having different droplet sizes according to the method described with reference to Figure 8 to constitute a group.

[0143] Second, the control unit 160 can extract a plurality of nozzles having different droplet sizes according to the method described with reference to Figure 8 to constitute a group, with respect to the grooves of the first size and the grooves of the second size, respectively. Figure 9 is a first exemplary diagram for explaining various functions of a control unit constituting a substrate processing apparatus according to one embodiment of the present application, Figure 10 is a second exemplary diagram for explaining various functions of a control unit constituting a substrate processing apparatus according to one embodiment of the present application.

[0144] If an example in which the assumed pixel volume is 100 pl, 190.3 pl is taken, the small (S) type of the nozzle is 6 pl, and the medium (M) type of the nozzle is 13 pl. If the nozzles are mixed to constitute a group according to the present application, the total number of droplets is reduced, thereby improving the swath, and the error rate with respect to the target volume is also reduced. This part will be exemplified below.

[0145] In the case of the existing group, the S (small) type can be constituted of 5. On the other hand, in the case of the group according to the present application, the S (small) type and the M (medium) type can be constituted of SMSMS or MSMSM. The volume of one droplet of the nozzle of each nozzle is based on S = 6 pl, M = 13 pl.

[0146] Figure 11 is a first exemplary diagram for explaining a case in which a target volume of 100 pl is matched, Figure 12 is a second exemplary diagram for explaining a case in which a target volume of 100 pl is matched.

[0147] According to Figure 11, when constituting a small head, 16 droplets can fill 96 pl, and 17 droplets can fill 102 pl. Thus, in the former case, an error of 4% occurs compared to the target volume, and in the latter case, an error of 2% occurs compared to the target volume.

[0148] On the other hand, according to Figure 12 , when constituting a small+medium head, 12 droplets can fill 100 pl. Thus, an error of 0% occurs compared to the target volume, and by constituting the group according to the present application, the effect of accurately matching the volume can be obtained.

[0149] Figure 13 is a first example diagram for explaining a case where a target volume of 190.3 pl is matched, Figure 14 is a second example diagram for explaining a case where a target volume of 190.3 pl is matched.

[0150] According to Figure 13 , when constituting a small head, 32 droplets can fill 192 pl. Thus, an error of 0.885% occurs compared to the target volume.

[0151] On the other hand, according to Figure 14 , when constituting a small+medium head, 20 droplets can fill 190 pl. Thus, an error of 0.157% occurs compared to the target volume, and by constituting the group according to the present application, the effect of not only reducing the number of droplets to reduce the number of scans, but also reducing the error compared to the target volume can be obtained.

[0152] The present application relates to an inkjet head control method, and particularly relates to a printing method in which nozzles of different droplet sizes or nozzles of different heads are constituted as a group unit.

[0153] The present application is a printing method in which, when an inkjet head is constituted by N, it is possible to perform nozzle & volume mixing by constituting groups of 2, 3 volumes different from each other by jetting signals of the same characteristics. Since, in the case of constituting a plurality of heads as a group for fine droplet control, as a printing function in which nozzles and volumes can be mixed by not being constituted by a single type of volume amount different heads, by the present structure, it is possible to reduce the number of scans (swaths) of printing, resulting in improved productivity.

[0154] As described above, although the embodiments of the present application have been described with reference to the accompanying drawings, it will be understood by those of ordinary skill in the art that the present application can be embodied in other specific ways without changing the technical idea or essential characteristics thereof. Therefore, it should be understood that the above-described embodiments are exemplary in all aspects and are not restrictive.

Claims

1. A substrate processing method, comprising: The steps for extracting droplets from nozzles of different sizes; The step of assembling the extracted nozzles into a group; as well as The step of spraying substrate processing liquid onto the same position on the substrate using nozzles included in the group to perform pixel printing on the substrate. The substrate processing method further includes: The step of determining whether the amount of substrate processing liquid that matches the volume of the pixel can be sprayed. In cases where the amount of substrate processing liquid that matches the volume of a pixel cannot be sprayed, the extraction step involves using nozzles with different droplet sizes to extract droplets that exceed the volume of the pixel while minimizing the volume error relative to the pixel.

2. The substrate processing method according to claim 1, wherein, The extraction step takes into account the volume of the pixel to extract at least one nozzle with a different droplet size.

3. The substrate processing method according to claim 1, wherein, The extraction step involves either selecting multiple droplet sizes and then extracting nozzles associated with each droplet size, or selecting a number of nozzles and then extracting nozzles with different droplet sizes based on the selected number.

4. The substrate processing method according to claim 1, wherein, The extraction step involves extracting droplets of different sizes from one nozzle or from multiple nozzles.

5. The substrate processing method according to claim 4, wherein, In the case where a nozzle extracts droplets of different sizes from a single nozzle, the single nozzle comprises multiple nozzles of different droplet sizes.

6. The substrate processing method according to claim 4, wherein, In the case of nozzles that extract droplets of different sizes from multiple nozzles, each nozzle includes multiple nozzles with the same droplet size, and the droplet sizes of the nozzles included in different nozzles are different from each other.

7. The substrate processing method according to claim 1, further comprising: A step of acquiring information about the grooves formed on the substrate; as well as The step of determining the volume of the pixel formed in the groove based on information about the groove.

8. The substrate processing method according to claim 7, wherein, The acquisition step is based on an image obtained by photographing the substrate to acquire information about the groove.

9. The substrate processing method according to claim 7, wherein, The information regarding the groove includes the diameter of the groove and the depth of the groove.

10. The substrate processing method according to claim 1, wherein, The extraction step involves analyzing the droplet size of the inkjet head nozzles and extracting nozzles with different droplet sizes based on the analysis results.

11. The substrate processing method according to claim 7, wherein, The acquisition step involves acquiring information about the groove for each unit region when unit regions for manufacturing display devices of different sizes are formed.

12. A substrate processing method, comprising: The step of obtaining information about the grooves formed on the substrate; The step of determining the volume of the pixel formed in the groove based on information about the groove; The step of extracting droplets from nozzles with different droplet sizes, taking into account the volume of the pixel; The step of assembling the extracted nozzles into a group; as well as The step of spraying substrate processing liquid onto the same position on the substrate using nozzles included in the group to perform pixel printing on the substrate. The extraction step involves analyzing the droplet size of the inkjet head nozzles and extracting nozzles with different droplet sizes based on the analysis results. Determine whether a substrate processing liquid of the volume matching the pixel can be sprayed. If a substrate processing liquid of the volume matching the pixel cannot be sprayed, the extraction step extracts droplets of different sizes from nozzles, such that the volume exceeds the pixel and the volume error relative to the pixel is minimized.

13. A substrate processing apparatus, comprising: A process unit that supports the substrate during the processing of the substrate; An inkjet head unit includes multiple nozzles, through which substrate processing liquid is sprayed onto the substrate; A frame unit that moves the inkjet head unit on the substrate; as well as The control unit controls the movement of the nozzle. The control unit extracts nozzles of different droplet sizes and assembles them into a group. The nozzles included in the group are used to spray the substrate processing liquid onto the same location on the substrate for pixel printing. The control unit determines whether it can spray a substrate processing liquid of the same volume as the pixel. If it cannot spray a substrate processing liquid of the same volume as the pixel, it extracts nozzles with different droplet sizes to make the volume exceed the pixel's volume while minimizing the volume error compared to the pixel.

14. The substrate processing apparatus according to claim 13, wherein, The control unit takes into account the volume of the pixel to extract at least one nozzle with a different droplet size.

15. The substrate processing apparatus according to claim 13, wherein, The control unit can extract nozzles associated with each droplet size after selecting multiple droplet sizes, or extract nozzles with different droplet sizes based on the selected number of nozzles after selecting a number of nozzles.

16. The substrate processing apparatus according to claim 13, wherein, The control unit analyzes the droplet size of the nozzles in the inkjet head and extracts nozzles with different droplet sizes based on the analysis results.

17. The substrate processing apparatus according to claim 13, wherein, The control unit acquires information about the grooves formed on the substrate and determines the volume of the pixels formed in the grooves based on the information about the grooves, and extracts nozzles with different droplet sizes by taking the volume of the pixels into account.

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