Inkjet printing apparatus capable of measuring droplets

Abstract

An embodiment of the present application provides an inkjet printing apparatus capable of measuring liquid drops, which can check the ejection state of the liquid drops and judge the abnormality of a head unit in advance. The inkjet printing apparatus capable of measuring liquid drops according to the present application includes a process table providing a process space of a process substrate, a head unit ejecting liquid drops to the process substrate, a first clamp clamping the side of the process substrate, a second clamp clamping a measurement substrate to which the liquid drops for checking the head unit are ejected, and a liquid drop checking section checking the ejection state of the liquid drops ejected to the measurement substrate.

Description

TECHNICAL FIELD

[0001] The present invention relates to an inkjet printing apparatus capable of measuring a liquid droplet. BACKGROUND

[0002] A display manufacturing process includes a plurality of processing procedures for forming elements for light emission on a substrate (transparent glass). For example, the processing procedures can include coating, exposure, evaporation, cleaning, etching, and the like. Each processing procedure can be sequentially performed by a manufacturing apparatus configured in a display manufacturing factory. In addition, as a processing procedure, an inkjet printing technique of ejecting a liquid droplet (ink) toward a substrate to form a film or a pattern is introduced.

[0003] On the other hand, the inkjet printing process is performed by ejecting a liquid droplet (ink) toward a substrate, and when a liquid droplet or a foreign substance remains in a nozzle of a head unit that ejects the liquid droplet, an error can occur in the ejection position of the liquid droplet. SUMMARY

[0004] Therefore, an embodiment of the present invention provides an inkjet printing apparatus capable of measuring a liquid droplet that can check an ejection state of the liquid droplet and judge an abnormality of a head unit in advance.

[0005] The problems to be solved by the present invention are not limited to the above-mentioned, and other problems to be solved not mentioned can be clearly understood by those skilled in the art from the following description.

[0006] The inkjet printing apparatus capable of measuring a liquid droplet according to the present invention includes a process table providing a processing space of a process substrate, a guide member configured at both sides of the process table, a head unit ejecting a liquid droplet toward the process substrate, a first jig configured to move along the guide member and grip a side portion of the process substrate, a second jig configured to move along the guide member and grip a measurement substrate to which the liquid droplet for checking the head unit is ejected, and a liquid droplet checking unit checking an ejection state of the liquid droplet ejected to the measurement substrate.

[0007] According to an embodiment of the present invention, the process substrate and the measurement substrate can be configured to move along a first direction by the first jig and the second jig in a state of floating by air pressure applied through an air discharge port provided in the process table, and the head unit can be configured to move along a second direction perpendicular to the first direction along a gantry provided above the process table and eject the liquid droplet to the process substrate and the measurement substrate.

[0008] According to an embodiment of the present invention, the liquid droplet checking unit can include an image checking unit that photographs the liquid droplet on the measurement substrate and checks an ejection position of the liquid droplet or a shape of the liquid droplet from the photographed image.

[0009] According to an embodiment of the present invention, the liquid droplet inspection unit can include an ultrasonic inspection unit that applies an ultrasonic transmission signal to a liquid droplet on the measurement substrate and receives an ultrasonic reflection signal reflected from the liquid droplet, and inspects the ejection position of the liquid droplet or the shape of the liquid droplet by the ultrasonic reflection signal.

[0010] According to an embodiment of the present invention, the liquid droplet inspection unit can compare the position of the liquid droplet ejected onto the measurement substrate with a reference position to output information about a nozzle in which ejection failure occurs in the head unit.

[0011] According to an embodiment of the present invention, the liquid droplet inspection unit can output a signal notifying that an abnormality occurs in the head unit when the ejection state of the liquid droplet on the measurement substrate is not normal.

[0012] An inkjet printing apparatus capable of measuring a liquid droplet according to an embodiment of the present invention includes a process table providing a process space of a process substrate; guide members disposed at both sides of the process table; a head unit ejecting a liquid droplet toward the process substrate; a first clamp configured to move along the guide members and clamp a side portion of the process substrate; a second clamp configured to move along the guide members and clamp a measurement substrate on which a liquid droplet for inspecting the head unit is ejected; a liquid droplet inspection unit inspecting an ejection state of the liquid droplet ejected onto the measurement substrate; and a cleaning unit removing a liquid droplet remaining on the measurement substrate.

[0013] According to an embodiment of the present invention, the cleaning unit can be disposed adjacent to the process table, and the guide members can extend toward the cleaning unit.

[0014] According to an embodiment of the present invention, if the liquid droplet is ejected onto the measurement substrate, the second clamp can transfer the measurement substrate to the liquid droplet inspection unit, and if the inspection of the liquid droplet on the measurement substrate is completed, the second clamp can transfer the measurement substrate to the cleaning unit.

[0015] According to an embodiment of the present invention, the cleaning unit can include a cleaning liquid ejection unit that sprays a cleaning liquid to the measurement substrate to remove the liquid droplet on the measurement substrate.

[0016] According to an embodiment of the present invention, the cleaning unit can include a cleaning wiper that removes the liquid droplet on the measurement substrate by physical contact.

[0017] An inkjet printing apparatus capable of measuring a droplet according to an embodiment of the present application can include a loading unit to load and unload a process substrate, a process unit to perform a process on the process substrate, a maintenance unit to perform maintenance of a tool for the process, a gantry to be disposed above the process unit and the maintenance unit, and a head unit to be movable along the gantry and to eject a liquid for processing the process substrate. The process unit can include a process table to provide a process space for the process substrate, guide members disposed at both sides of the process table, a first clamp to be movable along the guide members and to clamp a side of the process substrate, a second clamp to be movable along the guide members and to clamp a measurement substrate on which a droplet for checking the head unit is ejected, a droplet checking unit to check an ejection state of the droplet ejected to the measurement substrate, and a cleaning unit to remove the droplet remaining on the measurement substrate.

[0018] According to an embodiment of the present application, the process table can be floated by air pressure applied from below, the first clamp and the second clamp can be configured to move in a first direction along the process table, and the head unit can be configured to move along with the gantry in a second direction perpendicular to the first direction and to eject the droplet to the process substrate and the measurement substrate.

[0019] According to an embodiment of the present application, the droplet checking unit can include an image checking unit to photograph the droplet on the measurement substrate and to check an ejection position of the droplet or a shape of the droplet from the photographed image.

[0020] According to an embodiment of the present application, the droplet checking unit can compare a position of the droplet ejected to the measurement substrate with a reference position to output information about a nozzle in which ejection failure occurs in the head unit.

[0021] According to an embodiment of the present application, the droplet checking unit can compare a shape of the droplet with a reference shape to output information about a nozzle in which ejection failure occurs in the head unit.

[0022] According to an embodiment of the present application, when an ejection state of the droplet on the measurement substrate is normal, the first clamp can be configured to transfer the process substrate to below the head unit, and the head unit can be configured to eject the droplet to the process substrate. When the ejection state of the droplet on the measurement substrate is not normal, the head unit can be configured to move to the maintenance unit.

[0023] According to an embodiment of the present application, the maintenance unit can include a nozzle inspection unit that inspects each nozzle of the head unit, and a nozzle cleaning unit that removes foreign matter remaining in the nozzle.

[0024] According to the present application, a droplet is ejected to a measurement substrate held by the second jig, and the droplet inspection unit is used to inspect the droplet ejected to the measurement substrate, so that an abnormality of the head unit can be judged in advance and measures can be taken.

[0025] Effects of the present application are not limited to the above-mentioned, and other effects not mentioned can be clearly understood by those skilled in the art from the following description. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 A schematic configuration of an inkjet printing apparatus according to an embodiment of the present application is shown.

[0027] Figure 2 is a workflow diagram of an inkjet printing apparatus according to an embodiment of the present application.

[0028] Figure 3 is a flowchart showing an inspection process of a head unit according to an embodiment of the present application.

[0029] Figure 4 and Figure 5 A schematic configuration of a droplet inspection unit according to an embodiment of the present application is shown.

[0030] Figure 6a and Figure 6b Examples of a case where a droplet is ejected to a normal position and a case where an abnormality of an ejection position occurs are shown.

[0031] Figure 7a and Figure 7b Examples of a case where a droplet having a normal shape is ejected and a case where an abnormal droplet is ejected are shown.

[0032] Figure 8 A schematic configuration of an inkjet printing apparatus according to an embodiment of the present application provided with a cleaning unit is shown.

[0033] Figures 9 to 11 A cleaning method of a measurement substrate using a cleaning unit according to an embodiment of the present application is shown.

[0034] Figure 12 and Figure 13 A schematic configuration of an inkjet printing processing system according to an embodiment of the present application is shown.

[0035] (Explanation of Reference Numerals)

[0036] 10: Inkjet printing apparatus

[0037] 11: loading section

[0038] 12: process section

[0039] 13: maintenance section

[0040] 100: process table

[0041] 200: head unit

[0042] 250: gantry

[0043] 300: head unit

[0044] 305: guide member

[0045] 310: first clamp

[0046] 320: second clamp

[0047] 400: droplet inspection section

[0048] 410: image inspection unit

[0049] 420: ultrasonic inspection unit

[0050] 500: cleaning unit

[0051] 510: cleaning liquid ejection section

[0052] 520: cleaning wiper

[0053] 700: maintenance table

[0054] 800: nozzle inspection unit

[0055] 900: nozzle cleaning unit

[0056] IG: measurement substrate

[0057] PG: process substrate DETAILED DESCRIPTION

[0058] Embodiments of the present application will be described in detail below with reference to the accompanying drawings, so as to be easily carried out by a person having ordinary knowledge in the technical field to which the present application pertains. The present application can be realized in various different ways, but is not limited to the embodiments described herein.

[0059] Portions that are not related to the description have been omitted for the sake of clarity in describing the present application, and the same reference numerals are used throughout the entire description for the same or similar constituent elements.

[0060] In addition, in each of the embodiments, the same reference numerals are used for the constituent elements having the same structure, and only representative embodiments are described, and only structures different from the representative embodiments are described in the remaining other embodiments.

[0061] Throughout the specification, when it is expressed that a certain part is "connected with" or "combined with" another part, it not only includes the case of "directly connected with" or "directly combined with" but also includes the case of "indirectly connected with" or "indirectly combined with" through another part. In addition, when it is expressed that a certain part "includes" a certain constituent element, it means that it also includes other constituent elements unless it is specifically stated to the contrary.

[0062] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0063] Hereinafter, an inkjet printing apparatus capable of measuring a droplet according to the present application and an inkjet printing process system will be described. When it is a general inkjet printing system according to the present application, when an inkjet abnormality is detected or a droplet is periodically ejected, the head unit is transferred to another space (maintenance area), the head unit ejects a droplet onto a test film, and thus, inspection is performed.

[0064] However, when inspection is thus performed in another space separated from a process treatment space, there is a problem in that it is difficult to perform accurate inspection due to a difference in process conditions such as temperature, humidity, air flow, etc. In particular, recently, an inkjet printing process requires precision in a micrometer unit, and even a slight difference in a process environment can affect overall process precision. Accordingly, an embodiment according to the present application provides a method capable of inspecting a droplet ejection state of a head unit in the same environment as a process treatment space.

[0065] Figure 1 An outline structure of an inkjet printing apparatus 10 according to an embodiment of the present application is shown. The inkjet printing apparatus 10 capable of inspecting a droplet according to the present application includes a process table 100 providing a treatment space of a process substrate PG, guide members 305 disposed at both sides of the process table 100, a head unit 200 ejecting a droplet toward the process substrate PG, a first clamp 310 configured to be movable along the guide members 305 and to clamp a side portion of the process substrate PG, a second clamp 320 configured to be movable along the guide members 305 and to clamp a measurement substrate IG on which a droplet for inspecting the head unit 200 is ejected, and a droplet inspection portion 400 inspecting an ejection state of the droplet ejected to the measurement substrate IG. In addition, a controller (not shown) for controlling the head unit 200 according to an ejection state of the droplet on the measurement substrate IG can be provided to the inkjet printing apparatus 10.

[0066] According to the present application, the process substrate PG and the measurement substrate IG are configured to float by air pressure applied through air discharge ports provided in the process table 100, and the head unit 200 moves along a second direction (Y direction) perpendicular to the first direction (X direction) along with the gantry 250 provided above the process table 100, and sprays droplets to the process substrate PG and the measurement substrate IG by moving the first clamp 310 and the second clamp 320 along the first direction (X direction).

[0067] The process table 100 is provided as a certain area, and provides a space for processing the process substrate PG. The first clamp 310 and the second clamp 320 are configured to move along guide members 305 provided on both side surfaces of the process table 100. In Figure 1 、 Figure 8 、 Figure 12 、 Figure 13 It is shown that the first clamp 310 and the second clamp 320 move along the same guide member 305, but independent guide members (first guide member, second guide member) can be provided for movement of the first clamp 310 and the second clamp 320.

[0068] On the other hand, it can be that air is discharged through a plurality of air discharge ports formed in the process table 100, and the process substrate PG and the measurement substrate IG are conveyed in a state of floating by air pressure by the first clamp 310 and the second clamp 320. The first clamp 310 and the second clamp 320 can move the process substrate PG and the measurement substrate IG in a state of being adsorbed along the first direction (X direction) by a vacuum adsorption method.

[0069] The head unit 200, which is a device for supplying a chemical liquid to a substrate, can include a storage portion that stores the chemical liquid and a plurality of nozzles that spray the chemical liquid. The head unit 200 can move along with the gantry 250 in a second direction (Y direction) perpendicular to the first direction (X direction).

[0070] The droplet inspection portion 400 is configured to inspect a spray state of droplets sprayed onto the measurement substrate IG. The droplet inspection portion 400 can be provided in the gantry 450 provided above the process table 100, and can inspect the spray state (spray position) of the droplets by photographing the measurement substrate IG from above.

[0071] On the other hand, according to an embodiment, the droplet inspection portion 400 can be configured of an ultrasonic sensor that applies an ultrasonic signal to confirm the shape of each droplet by the ultrasonic signal. The droplet inspection portion 400 can provide information about the droplets on the measurement substrate IG to the controller.

[0072] The controller can control the overall operation of the inkjet printing apparatus 10, and particularly control the operation of the head unit 200, based on the measured state of the droplets on the measurement substrate IG. For example, if it is determined that the droplets on the measurement substrate IG are not normal, the controller can output a prompt to interrupt the operation of the head unit 200 to perform maintenance. If it is determined that the droplets on the measurement substrate IG are normal, the controller can control to put in the process substrate PG and cause the head unit 200 to eject the process liquid for the process treatment to the process substrate PG.

[0073] Figure 2 is a flowchart of a method of operating the inkjet printing apparatus 10 according to an embodiment of the present application. The method of operating the inkjet printing apparatus 10 according to the present application includes a step of performing an inspection of the head unit 200 (S210), a step of determining whether the head unit 200 has an abnormality (S220), a step of performing a process of inkjet printing when the head unit 200 has no abnormality (S230), and a step of performing maintenance of the head unit 200 when the head unit 200 has an abnormality (S235). If the maintenance of the head unit 200 is completed, the step of performing a process treatment can be performed. Alternatively, if the maintenance of the head unit 200 is completed, the step of performing an inspection of the head unit can be performed again (S210).

[0074] Figure 3 is a flowchart illustrating a process of inspecting the head unit 200 according to an embodiment of the present application. The step of performing an inspection of the head unit 200 (S210) includes a step of moving the measurement substrate IG to below the head unit 200 (S310), a step of ejecting droplets to the measurement substrate IG (S320), and a step of inspecting the droplets on the measurement substrate IG (S330).

[0075] Figure 4 and Figure 5 illustrates a schematic configuration of the droplet inspection unit 400 according to an embodiment of the present application.

[0076] According to an embodiment of the present application, the droplet inspection unit 400 includes an image inspection unit 410 that photographs the droplets on the measurement substrate IG and inspects the ejection position of the droplets or the shape of the droplets from the photographed image. As shown in Figure 4 As shown, the image inspection unit 410 can be provided on a gantry 450 located above the process table 100, and the ejection position of the droplets D or the shape of the droplets D can be inspected based on the image of the droplets D photographed by the image inspection unit 410. Here, the image inspection unit 410 can compare the position of the droplets D ejected on the measurement substrate IG with a reference position to output information about the nozzle in which the ejection failure occurs in the head unit 200. Alternatively, the image inspection unit 410 can compare the shape of the droplets D with a reference shape to output information about the nozzle in which the ejection failure occurs in the head unit 200.

[0077] According to an embodiment of the present application, the droplet inspection section 400 includes an ultrasonic inspection unit 420 that applies an ultrasonic transmission signal toward the droplets D on the measurement substrate IG, receives an ultrasonic reflection signal reflected from the droplets D, and inspects the shape of the droplets D by the ultrasonic reflection signal. As shown in FIG. 4, for example, a gantry 450 located above the process table 100 is provided with the ultrasonic inspection unit 420 including an ultrasonic transmitter 422 and an ultrasonic receiver 424, and the ejection position of the droplets D or the shape of the droplets D is inspected by analysis of the ultrasonic signals reflected from the droplets D and the measurement substrate IG. Here, the ultrasonic inspection unit 420 can compare the position of the droplets D ejected onto the measurement substrate IG with a reference position and output information about the nozzle in the head unit 200 in which ejection failure has occurred. In addition, the ultrasonic inspection unit 420 can compare the shape of the droplets D with a reference shape and output information about the nozzle in the head unit 200 in which ejection failure has occurred. Figure 5

[0078] For example, when all the droplets D are ejected to the reference position as shown in FIG. 4, the droplet inspection section 400 can determine that the head unit 200 is normal. In contrast, when the position of the droplets D ejected deviates from the reference position P as shown in FIG. 5, it can be determined that the head unit 200 is abnormal. In particular, when the ejection position of a specific nozzle N2 among the nozzles N1, N2, N3, N4 of the head unit 200 deviates from the reference position P as shown in FIG. 6, it can be determined that the nozzle N2 is abnormal. Figure 6a Figure 6b Figure 6b

[0079] According to an embodiment of the present application, when the droplet ejection state on the measurement substrate IG is not normal, the droplet inspection section 400 can output a signal notifying that the head unit 200 is abnormal. For example, the droplet inspection section 400 can deliver an abnormality message (e.g., head failure content, nozzle failure information) notifying that the head unit 200 is abnormal to the management device PC of the inkjet printing apparatus 10, and can perform measures such as replacement or inspection of the head unit 200 through the abnormality message.

[0080] In addition, inspection of the shape of the droplets can be performed. For example, when all the droplets D are in conformity with the reference shape as shown in FIG. 4, the droplet inspection section 400 can determine that the head unit 200 is normal. In contrast, when the shape of the droplets D is not in conformity with the reference shape as shown in FIG. 7, it can be determined that the head unit 200 is abnormal. In particular, when the shape of a specific nozzle N2 among the nozzles N1, N2, N3, N4 of the head unit 200 deviates from the reference shape as shown in FIG. 8, it can be determined that the nozzle N2 is abnormal. Figure 7a Figure 7b Figure 7b ​​​​​​When the shape of the droplet D ejected by the specific nozzle N2 among the nozzles N1, N2, N3, N4 of the head unit 200 does not match the reference shape as illustrated, it can be determined that the nozzle N2 is abnormal. If the inspection of the droplet D is completed, the measurement substrate IG can be replaced. On the other hand, the measurement substrate IG can also be composed of glass of the same material as the process substrate PG, but any form of substance such as a film that can inspect the droplet can be used.

[0081] Figure 8 An outline structure of an inkjet printing apparatus provided with a cleaning unit according to an embodiment of the present application is illustrated. The inkjet printing apparatus 10 according to the present application can further include a cleaning unit 500 that removes the droplet remaining on the measurement substrate IG after the droplet is ejected to the measurement substrate IG and inspection is performed.

[0082] The inkjet printing apparatus 10 according to an embodiment of the present application can include a process stage 100 that provides a process space of a process substrate PG, a head unit 200 that ejects a droplet D to the process substrate PG, a first clamp 310 that clamps a side portion of the process substrate PG, a second clamp 320 that clamps a measurement substrate IG to which the droplet D for inspecting the head unit 200 is ejected, a guide member 305 that is disposed at both sides of the process stage 100 and provides a moving path of the first clamp 310 and the second clamp 320, a droplet inspection unit 400 that inspects an ejection state of the droplet D ejected to the measurement substrate IG, and a cleaning unit 500 that removes the droplet D on the measurement substrate IG.

[0083] If the inspection of the droplet D is completed, the measurement substrate IG can be replaced, but the measurement substrate IG can also be cleaned to remove the droplet D and then reused. According to the present application, the measurement substrate IG can be reused by removing the droplet D ejected to the measurement substrate IG using the cleaning unit 500. On the other hand, in order to effectively remove the droplet D ejected to the measurement substrate IG, a hydrophobic coating process can be performed on the surface of the measurement substrate IG.

[0084] According to the present application, it can be that, as illustrated, Figure 8 The cleaning unit 500 is disposed adjacent to the process stage 100, and the guide member 305 extends toward the cleaning unit 500.

[0085] The second clamp 320 that clamps the measurement substrate IG moves to the head unit 200 in a state of clamping the measurement substrate IG so that the droplet is ejected to the measurement substrate IG. Thereafter, the second clamp 320 can transfer the measurement substrate IG to the droplet inspection unit 400 if the droplet D is ejected, and transfer the measurement substrate IG to the cleaning unit 500 if the inspection of the droplet on the measurement substrate IG is completed.

[0086] If the measurement substrate IG is transferred to the cleaning unit 500, the droplets D and foreign substances remaining on the measurement substrate IG can be removed by the cleaning unit 500. The cleaning of the measurement substrate IG can be performed independently of the processing of the process substrate PG, or during a period in which no process is performed. If the cleaning of the measurement substrate IG is completed, the measurement substrate IG can be left in the cleaning unit 500 to wait or moved to a separate waiting position.

[0087] According to an embodiment of the present application, the cleaning unit 500 can include a cleaning liquid spraying part 510 that sprays the cleaning liquid C to the measurement substrate IG to remove the droplets D on the measurement substrate IG. As shown in FIG. 5, the cleaning liquid spraying part 510 can remove the remaining droplets D by spraying the cleaning liquid C onto the measurement substrate IG. Here, the cleaning liquid spraying part 510 can spray the cleaning liquid C while moving in the horizontal direction (Y direction) to clean the measurement substrate IG. On the other hand, in order to dry the remaining cleaning liquid C, a drying device in the form of a blower that sprays high-temperature or room-temperature air can be provided in the cleaning unit 500. Figure 9

[0088] According to an embodiment of the present application, the cleaning unit 500 can include a cleaning wiper 520 that removes the droplets D on the measurement substrate IG by physical contact. As shown in FIG. 6, the cleaning wiper 520 can remove the remaining droplets D while moving on the measurement substrate IG in the horizontal direction (Y direction). The cleaning wiper 520 can be composed of a blotter of cloth material for wiping the droplets D or a brush. Figure 10

[0089] On the other hand, the cleaning liquid spraying part 510 and the cleaning wiper 520 can be provided together to remove the droplets D remaining on the measurement substrate IG. As shown in FIG. 7, the cleaning liquid spraying part 510 and the cleaning wiper 520 can move together in the horizontal direction (Y direction), and here, the cleaning liquid spraying part 510 can spray the cleaning liquid C while the cleaning wiper 520 wipes the remaining cleaning liquid C and the residues of the droplets D. Figure 11

[0090] Figure 12 and Figure 13 ​​​An outline structure of an inkjet printing apparatus 10 according to an embodiment of the present application is shown. According to the present application, the inkjet printing apparatus 10 can include a maintenance section 13 for performing maintenance of a device (e.g., a head unit 200) required for a process treatment, in addition to the process treatment. For example, if a result of checking by ejecting droplets D to a measurement substrate IG before the process treatment indicates that the head unit 200 has an abnormality, the head unit 200 can be moved to the maintenance section 13 to perform maintenance without being detached. When a nozzle of the head unit 200 has a clogging, the clogging can be eliminated by cleaning the nozzle, and then the head unit 200 can be moved to the process treatment section 12 to perform the process treatment. Figure 12 A case where the head unit 200 is located at the process treatment section 12 is shown. Figure 13 A case where the head unit 200 is located at the maintenance section 13 for maintenance is shown.

[0091] An inkjet printing apparatus 10 according to an embodiment of the present application includes: a loading section 11 for loading and unloading a process substrate PG; a process treatment section 12 for performing a process treatment on the process substrate PG; a maintenance section 13 disposed adjacent to the process treatment section 12; a gantry 250 disposed above the process treatment section 12 and the maintenance section 13; and a head unit 200 configured to be movable along the gantry 250 and to eject a liquid for processing the process substrate PG. According to the present application, the process treatment section 12 includes: a process table 100 providing a processing space for the process substrate PG; a first clamp 310 configured to be movable along the process table 100 and to clamp a side portion of the process substrate PG; a second clamp 320 configured to be movable along the process table 100 and to clamp a measurement substrate IG on which droplets for checking the head unit 200 are ejected; a guide member 305 disposed at both sides of the process table 100 and providing a movement path for the first clamp 310 and the second clamp 320; a droplet checking section 400 for checking an ejection state of the droplets ejected to the measurement substrate IG; and a cleaning unit 500 for removing the droplets D remaining on the measurement substrate IG.

[0092] The first clamp 310 is configured to transfer the process substrate PG to below the head unit 200 when an ejection state of the droplets on the measurement substrate IG is normal, and the head unit 200 is configured to eject the droplets to the process substrate PG, and the head unit 200 is configured to be moved to the maintenance section 13 when the ejection state of the droplets on the measurement substrate IG is not normal.

[0093] ​​According to the present application, the maintenance part 13 can include a nozzle inspection unit 800 inspecting each nozzle of the head unit 200, and a nozzle cleaning unit 900 removing foreign substances remaining in the nozzle. The nozzle inspection unit 800 can include one or more than two cameras, and can inspect whether foreign substances exist in each nozzle of the head unit 200. The nozzle cleaning unit 900 can include a blotter or a brush for cleaning the nozzle of the head unit 200, and can remove foreign substances existing in the inside or the periphery of the nozzle using the blotter or the brush. In addition, the head unit 200 can spray high-pressure liquid to the container of the maintenance table 700 to remove foreign substances in the inside at one time.

[0094] If the maintenance of the head unit 200 is completed, the head unit 200 can move to the process treatment part 12 along the gantry 250 to spray liquid to the process substrate PG. On the other hand, even in the case where the maintenance of the head unit 200 is completed, the liquid can be sprayed to the measurement substrate IG to perform re-inspection.

[0095] The present embodiment and the accompanying drawings attached to the present specification only clearly show a part of the technical idea included in the present application, and it is obvious that a person skilled in the art can easily analogize various modifications and embodiments within the scope of the technical idea included in the specification and the accompanying drawings of the present application, and all of them are included in the scope of the present application.

[0096] Therefore, the concept of the present application should not be limited to the explained embodiments to determine, not only the attached claims, all the concepts equivalent or having equivalent modifications to the claims are within the scope of the present application concept.

Claims

1. An inkjet printing apparatus capable of measuring a droplet, comprising: a loading section that loads and unloads a process substrate; a process section that performs a process on the process substrate; a maintenance section that is disposed adjacent to the process section and performs maintenance of an implement for the process; a gantry that is disposed above the process section and the maintenance section; and a head unit that is configured to be movable with the gantry between the process section and the maintenance section and to eject a liquid for processing the process substrate, wherein the process section includes: a process table that provides a processing space for the process substrate; guide members that are disposed on both sides of the process table; a first clamp that is configured to be movable along the guide members and to clamp a side of the process substrate; a second clamp that is configured to be movable along the guide members and to clamp a measurement substrate on which a droplet for checking the head unit is ejected; a droplet checking section that checks an ejection state of the droplet ejected to the measurement substrate; and a cleaning unit that removes the droplet remaining on the measurement substrate, wherein the maintenance section is disposed in parallel with the process section, wherein, before the process, a result of checking the measurement substrate to which the droplet is ejected, when the ejection state of the droplet on the measurement substrate is normal, the first clamp is set to convey the process substrate under the head unit, and the head unit ejects the droplet to the process substrate, when the ejection state of the droplet on the measurement substrate is not normal, the head unit is set to move to the maintenance section, wherein the maintenance section includes: a nozzle checking unit that checks each nozzle of the head unit; and a nozzle cleaning unit that removes foreign matter remaining on the nozzle.

2. The inkjet printing apparatus capable of measuring a droplet according to claim 1, wherein the process table is floated by air pressure applied from below, the first clamp and the second clamp are configured to be movable in a first direction along the process table, and the head unit is configured to be movable with the gantry in a second direction perpendicular to the first direction and to eject the droplet to the process substrate and the measurement substrate.

3. The inkjet printing apparatus capable of measuring a droplet according to claim 1, wherein the droplet checking section includes: an image checking unit that photographs the droplet on the measurement substrate and checks an ejection position of the droplet or a shape of the droplet from the photographed image.

4. The inkjet printing apparatus capable of measuring a droplet according to claim 1, wherein the droplet checking section compares a position of the droplet ejected to the measurement substrate with a reference position and outputs information about a nozzle in which ejection failure occurs in the head unit.

5. The inkjet printing apparatus capable of measuring a droplet according to claim 1, wherein the droplet checking section compares a shape of the droplet with a reference shape and outputs information about a nozzle in which ejection failure occurs in the head unit. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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