A feeding and transfer device for single crystal silicon

Abstract

The present invention relates to the technical field of single-crystal silicon production, and discloses a feeding and transfer device for single-crystal silicon, including a transfer vehicle. Transfer platforms are symmetrically arranged on both sides of the transfer vehicle. The transfer platform includes: a platform plate; traveling wheels fixedly connected to the bottom of the platform plate; columns arranged on the top of the platform plate; and a top plate fixedly connected to the top of the columns. Both transfer platforms can transfer silicon rods, and two silicon rods can be transferred at one time, greatly improving the transfer efficiency of the silicon rods. At the same time, a two-way adjustment component is provided on the transfer platform. The two-way adjustment component can drive the silicon rod clamping arm and the counterweight to move up and down simultaneously. When clamping the silicon rod, while the silicon rod clamping arm drives the silicon rod to rise, the counterweight on the other side descends, so that the overall center of gravity of the transfer platform can be automatically lowered after clamping the silicon rod, achieving the purpose of balancing the center of gravity, enabling the transfer platform to move more smoothly during the transfer process, and making the transfer device have the advantages of high efficiency and high stability.

Description

Technical Field

[0001] The present invention relates to the technical field of single-crystal silicon production, and specifically to a feeding and transfer device for single-crystal silicon. Background Art

[0002] When manufacturing various semiconductor devices or photovoltaic devices, semiconductor workpieces containing brittle materials such as silicon, sapphire, or ceramics are cut into structural components of specified dimensions. Since the cutting of semiconductor workpieces is an important process that restricts subsequent finished products, the requirements for this operation are getting higher and higher. Currently, multi-wire cutting technology is widely used in the production of semiconductor workpiece cutting in the industry due to its high production efficiency, low operating cost, high operating accuracy, etc. Currently, multi-wire cutting technology is a relatively advanced semiconductor workpiece cutting technology in the world. Its principle is to cut the semiconductor workpiece to be operated by a high-speed moving diamond wire to form the target product.

[0003] When transporting the formed silicon rods, currently, transfer robots or transfer vehicles are usually used to transport the silicon rods. In the prior art, a transfer vehicle can often only transport one silicon rod, and during the transfer process, the efficiency is low. In addition, after the transfer device clamps the silicon rod, the overall center of gravity of the transfer device will rise, resulting in poor stability when the transfer device moves, and it is prone to dangerous situations such as tipping over. Summary of the Invention

[0004] Technical Problems to be Solved

[0005] In view of the deficiencies of the prior art, the present invention provides a feeding and transfer device for single-crystal silicon, which has the advantages of being able to transfer two groups of silicon rods at one time, automatically adapting to the height of the center of gravity, high efficiency, and high stability, and solves the problems that in the prior art, a transfer vehicle can often only transport one silicon rod, and during the transfer process, the efficiency is low. In addition, after the transfer device clamps the silicon rod, the overall center of gravity of the transfer device will rise, resulting in poor stability when the transfer device moves, and it is prone to dangerous situations such as tipping over.

[0006] (II) Technical Solutions

[0007] To achieve the above object, the present invention provides the following technical solution: A feeding and transfer device for single-crystal silicon, including a transfer vehicle, and transfer platforms are symmetrically arranged on both sides of the transfer vehicle. The transfer platform includes:

[0008] A table board;

[0009] Walking wheels, fixedly connected to the bottom of the table board;

[0010] Columns, arranged on the top of the table board;

[0011] Top plates, fixedly connected to the tops of the columns;

[0012] The interior of the column is provided with a two-way adjustment assembly, and the two-way adjustment assembly includes:

[0013] A driving part, installed on the top of the top plate;

[0014] A first lead screw, rotatably connected to the interior of the column, and the top end is connected to the output shaft of the driving part;

[0015] A second lead screw, rotatably connected to the interior of the column, and the top end is connected to the output shaft of the driving part;

[0016] A first lead screw nut, slidably connected to the outer side wall of the first lead screw;

[0017] A second lead screw nut, slidably connected to the outer side wall of the second lead screw;

[0018] The outer side wall of the column is provided with a silicon rod clamping arm, and the silicon rod clamping arm is connected to one side of the first lead screw nut;

[0019] The top of the platen is provided with a center of gravity adjustment assembly, and the center of gravity adjustment assembly includes:

[0020] A polished rod, fixedly connected between the platen and the top plate;

[0021] A sliding sleeve, slidably connected to the outer side wall of the polished rod;

[0022] A counterweight block, slidably connected to the outer side wall of the column, and connected to one side of the second lead screw nut;

[0023] A counterweight connecting rod, arranged on one side of the counterweight block, and the other end is connected to the sliding sleeve.

[0024] Preferably, at least two transfer tables are provided.

[0025] Preferably, the driving part includes:

[0026] A driving box body;

[0027] A driving motor, installed on the top of the driving box body;

[0028] A driving gear, rotatably connected to the interior of the driving box body, and connected to the output shaft of the driving motor;

[0029] Driven gears, symmetrically arranged on both sides of the driving gear, and meshing with the driving gear.

[0030] Preferably, a reinforcing rod is provided on the outer side wall of the polished rod, and one end of the reinforcing rod is connected to the outer side wall of the column.

[0031] Preferably, the counterweight block is a square lead block.

[0032] Preferably, the transfer vehicle and the transfer platform are snap-connected by a connecting buckle, and the connecting buckle includes:

[0033] A rotating seat, fixedly connected to one side of the transfer vehicle;

[0034] A locking motor, installed on one side of the rotating seat;

[0035] A locking rod, rotatably connected to one side of the rotating seat, and one end thereof is fixedly connected to the output shaft of the locking motor;

[0036] A lock, arranged at one end of the locking rod;

[0037] A lock seat, fixedly connected to one side of the transfer platform;

[0038] Limit rods, symmetrically arranged inside the lock seat.

[0039] Preferably, the locking motor is a servo motor.

[0040] Preferably, the lock is in a T-shaped rod structure.

[0041] (III) Beneficial effects

[0042] Compared with the prior art, the present invention provides a feeding and transfer device for single crystal silicon, having the following beneficial effects:

[0043] In the feeding and transfer device for single crystal silicon, by arranging two transfer platforms on both sides of the transfer vehicle, both of the two transfer platforms can transfer silicon rods, and two silicon rods can be transferred at one time, greatly improving the transfer efficiency of the silicon rods. At the same time, a bidirectional adjustment component is provided on the transfer platform, and the bidirectional adjustment component can drive the silicon rod clamping arm and the counterweight to move up and down simultaneously. When clamping the silicon rod, while the silicon rod clamping arm drives the silicon rod to rise, the counterweight on the other side descends, so that the overall center of gravity of the transfer platform can be automatically lowered after clamping the silicon rod, achieving the purpose of balancing the center of gravity, enabling the transfer platform to move more smoothly during the transfer process, and making the transfer device have the advantages of high efficiency and high stability. Description of the drawings

[0044] Figure 1 is a structural schematic diagram of the present invention;

[0045] Figure 2 is a structural schematic diagram of the left transfer platform in the present invention;

[0046] Figure 3 is a structural schematic diagram of the bidirectional adjustment component, the silicon rod clamping arm and the counterweight in the present invention;

[0047] Figure 4 is a structural schematic diagram of the driving part in the present invention;

[0048] Figure 5 This is a schematic structural diagram of the connecting buckle in the present invention.

[0049] In the figure:

[0050] 10. Transfer vehicle;

[0051] 20. Transfer platform; 21. Platform board; 22. Walking wheels; 23. Columns; 24. Top plate;

[0052] 30. Bidirectional adjustment assembly; 31. Driving part; 311. Driving box; 312. Driving motor; 313. Driving gear; 314. Driven gear; 32. First lead screw; 33. Second lead screw; 34. First lead screw nut; 35. Second lead screw nut;

[0053] 40. Silicon rod clamping arm;

[0054] 50. Center of gravity adjustment assembly; 51. Smooth rod; 52. Reinforcing rod; 53. Sliding sleeve; 54. Counterweight; 55. Counterweight connecting rod;

[0055] 60. Connecting buckle; 61. Rotating seat; 62. Locking motor; 63. Locking rod; 64. Locking buckle; 65. Locking seat; 66. Limiting rod. Specific embodiments

[0056] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention. Embodiment 1

[0057] A feeding and transfer device for single crystal silicon includes a transfer vehicle 10, and transfer platforms 20 are symmetrically arranged on both sides of the transfer vehicle 10. The transfer platform 20 includes:

[0058] Platform board 21;

[0059] Walking wheels 22, fixedly connected to the bottom of the platform board 21;

[0060] Columns 23, arranged on the top of the platform board 21;

[0061] Top plate 24, fixedly connected to the top end of the column 23;

[0062] A bidirectional adjustment assembly 30 is arranged inside the column 23. The bidirectional adjustment assembly 30 includes:

[0063] Driving part 31, installed on the top of the top plate 24;

[0064] The first lead screw 32 is rotatably connected to the inside of the column 23, and its top is connected to the output shaft of the driving part 31;

[0065] The second lead screw 33 is rotatably connected to the inside of the column 23, and its top is connected to the output shaft of the driving part 31;

[0066] The first lead screw nut 34 is slidably connected to the outer wall of the first lead screw 32;

[0067] The second lead screw nut 35 is slidably connected to the outer wall of the second lead screw 33;

[0068] A silicon rod clamping arm 40 is provided on the outer wall of the column 23, and the silicon rod clamping arm 40 is connected to one side of the first lead screw nut 34;

[0069] A center of gravity adjustment assembly 50 is provided on the top of the platen 21. The center of gravity adjustment assembly 50 includes:

[0070] A smooth rod 51 is fixedly connected between the platen 21 and the top plate 24;

[0071] A sliding sleeve 53 is slidably connected to the outer wall of the smooth rod 51;

[0072] A counterweight 54 is slidably connected to the outer wall of the column 23 and is connected to one side of the second lead screw nut 35;

[0073] A counterweight connecting rod 55 is provided on one side of the counterweight 54, and the other end is connected to the sliding sleeve 53.

[0074] In this embodiment, specifically, there are at least two transfer tables 20.

[0075] In this embodiment, the transfer table 20 can be provided with two or four, and two or four groups of silicon rods can be transferred simultaneously, greatly improving the transfer efficiency of the equipment.

[0076] In this embodiment, specifically, the driving part 31 includes:

[0077] A driving box body 311;

[0078] A driving motor 312 is installed on the top of the driving box body 311;

[0079] A driving gear 313 is rotatably connected to the inside of the driving box body 311 and is connected to the output shaft of the driving motor 312;

[0080] Driven gears 314 are symmetrically arranged on both sides of the driving gear 313 and mesh with the driving gear 313.

[0081] In this embodiment, the driving motor 312 directly drives the driving gear 313 to rotate, causing the driving gear 313 to drive the two driven gears 314 on both sides to rotate. The two driven gears 314 are respectively connected to the first lead screw 32 and the second lead screw 33, enabling the two driven gears 314 to drive the first lead screw 32 and the second lead screw 33 to rotate simultaneously.

[0082] In this embodiment, specifically, a reinforcing rod 52 is provided on the outer side wall of the polished rod 51, and one end of the reinforcing rod 52 is connected to the outer side wall of the column 23.

[0083] In this embodiment, the reinforcing rod 52 connects the polished rod 51 and the column 23, which can enhance the fixing strength of the polished rod 51.

[0084] In this embodiment, specifically, the counterweight 54 is a square lead block.

[0085] In this embodiment, the lead block has a large weight in a small volume. By moving the height of the counterweight 54, the purpose of adjusting the overall center of gravity is achieved.

[0086] Refer to Figures 1-5 , after the transfer vehicle 10 is connected to the transfer platform 20, the transfer vehicle 10 can directly drive the transfer platform 20 to move for transferring the silicon rod. When the transfer platform 20 moves to the loading platform, the two silicon rod clamping arms 40 clamp the silicon rod. After the clamping is completed, the driving motor 312 is started, causing the driving motor 312 to directly drive the driving gear 313 to rotate, causing the driving gear 313 to drive the two driven gears 314 on both sides to rotate. The two driven gears 314 are respectively connected to the first lead screw 32 and the second lead screw 33, enabling the two driven gears 314 to drive the first lead screw 32 and the second lead screw 33 to rotate simultaneously, causing the lead screw nut 34 on the first lead screw 32 to drive the silicon rod clamping arm 40 to rise, and the lead screw nut 35 on the second lead screw 33 to drive the counterweight 54 to descend synchronously, so that the overall center of gravity of the transfer platform 20 can automatically decrease after clamping the silicon rod, achieving the purpose of balancing the center of gravity, enabling the transfer platform 20 to move more smoothly during the transfer process, making the transfer device have the advantages of high efficiency and high stability. Subsequently, the transfer vehicle 10 can directly drive the transfer platform 20 to a designated location. Embodiment Two

[0087] On the basis of Embodiment One, a function of quick clamping is added.

[0088] The transfer vehicle 10 and the transfer platform 20 are clamped through a connection buckle 60. The connection buckle 60 includes:

[0089] A rotating seat 61, fixedly connected to one side of the transfer vehicle 10;

[0090] A locking motor 62, installed on one side of the rotating seat 61;

[0091] The lock rod 63 is rotatably connected to one side of the rotating seat 61, and one end thereof is fixedly connected to the output shaft of the lock motor 62;

[0092] The lock catch 64 is arranged at one end of the lock rod 63;

[0093] The lock seat 65 is fixedly connected to one side of the transfer table 20;

[0094] The limiting rods 66 are symmetrically arranged inside the lock seat 65.

[0095] In this embodiment, specifically, the lock motor 62 is a servo motor.

[0096] In this embodiment, the servo motor can drive the lock rod 63 to turn with high precision.

[0097] In this embodiment, specifically, the lock catch 64 has a T-shaped rod structure.

[0098] In this embodiment, in the vertical state, the T-shaped rod can be stuck between the two limiting rods 66 to achieve the purpose of locking. In the horizontal state, it can pass through the two limiting rods 66 to achieve the purpose of unlocking.

[0099] Refer to Figures 1-5 , when connecting the transfer cart 10 and the transfer table 20, the lock motor 62 drives the lock rod 63 to rotate, so that the lock rod 63 drives the lock catch 64 to turn, making the lock catch 64 in a horizontal state, so that the lock catch 64 can pass between the two limiting rods 66. After passing between the two limiting rods 66, the lock motor 62 drives the lock rod 63 to rotate in the reverse direction, making the lock catch 64 in a vertical state, so that the lock catch 64 can be stuck between the two limiting rods 66 to achieve the purpose of locking. After the connection buckle 60 is locked, the transfer cart 10 can directly drive the transfer table 20 to move.

[0100] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A feeding and transfer device for single crystal silicon, comprising a transfer vehicle (10), characterized in that: The two sides of the transfer vehicle (10) are symmetrically provided with transfer platforms (20), and the transfer platform (20) includes: A platform board (21); Traveling wheels (22), fixedly connected to the bottom of the platform board (21); Columns (23), arranged on the top of the platform board (21); A top board (24), fixedly connected to the top ends of the columns (23); A two-way adjustment assembly (30) is arranged inside the column (23), and the two-way adjustment assembly (30) includes: A driving part (31), installed on the top of the top board (24); A first lead screw (32), rotatably connected inside the column (23), and the top end is connected to the output shaft of the driving part (31); A second lead screw (33), rotatably connected inside the column (23), and the top end is connected to the output shaft of the driving part (31); A first lead screw nut (34), slidably connected to the outer side wall of the first lead screw (32); A second lead screw nut (35), slidably connected to the outer side wall of the second lead screw (33); A silicon rod clamping arm (40) is arranged on the outer side wall of the column (23), and the silicon rod clamping arm (40) is connected to one side of the first lead screw nut (34); A center of gravity adjustment assembly (50) is arranged on the top of the platform board (21), and the center of gravity adjustment assembly (50) includes: A smooth rod (51), fixedly connected between the platform board (21) and the top board (24); A sliding sleeve (53), slidably connected to the outer side wall of the smooth rod (51); A counterweight block (54), slidably connected to the outer side wall of the column (23), and connected to one side of the second lead screw nut (35); A counterweight connecting rod (55), arranged on one side of the counterweight block (54), and the other end is connected to the sliding sleeve (53); The transfer vehicle (10) is snap-connected to the transfer platform (20) through a connection buckle (60), and the connection buckle (60) includes: A rotating seat (61), fixedly connected to one side of the transfer vehicle (10); A lock buckle motor (62), installed on one side of the rotating seat (61); A lock rod (63), rotatably connected to one side of the rotating seat (61), and one end is fixedly connected to the output shaft of the lock buckle motor (62); A lock buckle (64), arranged at one end of the lock rod (63); A lock seat (65), fixedly connected to one side of the transfer platform (20); Limit rods (66), symmetrically arranged inside the lock seat (65).

2. The feeding and transfer device for single-crystalline silicon according to claim 1, wherein: At least two transfer platforms (20) are provided.

3. A feeding and transfer device for single crystal silicon according to claim 1, characterized in that: The driving part (31) includes: A driving box body (311); A driving motor (312), installed on the top of the driving box body (311); A driving gear (313), rotatably connected inside the driving box body (311), and connected to the output shaft of the driving motor (312); Driven gears (314), symmetrically arranged on both sides of the driving gear (313), and meshing with the driving gear (313).

4. A feeding and transferring device for single crystal silicon according to claim 1, characterized in that: A reinforcing rod (52) is arranged on the outer side wall of the smooth rod (51), and one end of the reinforcing rod (52) is connected to the outer side wall of the column (23).

5. The feeding and transferring device for single crystal silicon according to claim 1, characterized in that: The counterweight block (54) is a square lead block.

6. The feeding and transferring device for single-crystalline silicon according to claim 1, characterized in that: The latch motor (62) is a servo motor.

7. A feeding and transferring device for single crystal silicon according to claim 1, characterized in that: The latch (64) has a T-shaped rod structure.

Images