A circulation improvement device for glass carrier TTV

Abstract

The present invention relates to the technical field of glass carrier production, and specifically discloses a circulation improvement device for glass carrier TTV, the circulation improvement device comprising a processing box for circulating etching glass carriers; a mounting member fixedly installed in the processing box, used to adjust the clamping range of the glass carrier; an adjusting member arranged on the mounting member, used to drive the glass carrier to rotate; a supporting member fixedly installed on the adjusting member, used to support and fix the glass carrier. The circulation improvement device of the present invention uses supporting rods of two supporting members to support multiple glass carriers, and is designed with a limited clamping roller to clamp and fix the glass carrier. The glass carrier is easy to install and disassemble, and can carry multiple glass carriers at the same time, thereby improving processing efficiency. The etching solution can be recycled, automatically filtered, and impurities are removed. The adjusting member is arranged to move, drive the supporting rod to move, and adjust the distance between the supporting rods, so as to facilitate the fixing of glass carriers of different sizes.

Description

Technical Field

[0001] The invention relates to the technical field of glass carrier plate production, in particular to a circulation improvement device for a glass carrier plate TTV. Background Art

[0002] TTV (total thickness variation) is the total thickness variation of the semiconductor. During the wire cutting process of the glass substrate, the cutting wire may shake due to equipment problems, thus causing the TTV phenomenon.

[0003] In the prior art, an invention with application number CN202210327145.7 is disclosed, and its name is: a cutting device for ultra-thin glass, which discloses the use of a wire cutting machine to perform multi-wire cutting on the glass once to obtain multiple pieces of ultra-thin glass, thereby improving the quality of the edge of the ultra-thin glass, reducing the amount of edge chipping and the breakage rate.

[0004] However, in the prior art, such as the wire cutting operation mentioned in application number CN202210327145.7, when multiple wires are cut simultaneously, the wire wheel jumping still causes the cutting wire to shake, resulting in TTV phenomenon on the cut surface of the glass. In the prior art, additional grinding is required to remove the TTV on the surface of the glass carrier, but the operation is relatively complicated, requires many operations, and the glass carrier clamping operation is complicated. Summary of the invention

[0005] The object of the present invention is to provide a circulation improvement device for a glass carrier TTV to solve the problems in the prior art.

[0006] The purpose of the present invention can be achieved through the following technical solutions:

[0007] A circulation improvement device for a glass carrier TTV comprises a processing box for circulating an etched glass carrier.

[0008] The mounting piece is fixedly mounted in the processing box and is used to adjust the clamping range of the glass carrier.

[0009] The adjusting member is arranged on the mounting member and is used for driving the glass carrier to rotate.

[0010] The supporting member is fixedly mounted on the adjusting member and is used to support and fix the glass carrier.

[0011] Furthermore, the processing box is arranged on a bracket, a water supply box is fastened on the bracket, the water supply box is connected to the processing box through a water pipe, and symmetrically distributed slots are arranged on the bracket, and array-distributed limit blocks are arranged in the slots.

[0012] Furthermore, a processing tank is provided in the processing box, and symmetrically distributed pads are fixed on the processing box. The pads are connected and cooperated with the limit blocks to stabilize the processing box. Mounting blocks are symmetrically arranged in the processing tank, and fixing grooves are opened on the mounting blocks, and through holes are provided in the fixing grooves.

[0013] Furthermore, a water outlet pipe is provided on one side of the pad, a fan-shaped groove is provided at the bottom of the processing tank, a water inlet pipe is connected below the fan-shaped groove, a fan blade is rotatably provided on the fan-shaped groove for supplying etching solution into the processing tank, and a filter plate is fixedly installed on the fan blade for filtering the supplied etching solution.

[0014] Furthermore, the mounting member includes a hollow bottom plate and a vertical plate, the vertical plates are respectively arranged at both ends of the hollow bottom plate, a through groove is provided on the vertical plate, a support block is fixedly provided on one side of the vertical plate, and a first threaded hole is provided on one side of the support block.

[0015] A straight rod is fixed on the vertical plate, a buffer spring is fastened on the straight rod, a guide rod is provided on one side of the vertical plate, a double-headed screw is rotatably provided on one side of a vertical plate, the support block cooperates with the fixing groove, and the bolt passes through the through hole and cooperates with the first threaded hole.

[0016] Furthermore, the adjusting member includes a lifting ring and two moving blocks. The lifting ring is slidably arranged on the straight rod, the lifting ring is tightly connected to the buffer spring, one side of the lifting ring is rotatably provided with two push rods, one end of the push rod is rotatably connected to the fixed rod arranged on the moving block, and one end of the fixed rod is rotatably provided with a driven rod.

[0017] The ends of the two driven rods are rotatably connected, a first gear is rotatably provided at the connection, a second gear and a third gear are rotatably provided on the driven rod, the second gear is located between the first gear and the third gear, and a locking block is fixedly provided on one side of the third gear.

[0018] Furthermore, an open groove is provided on the locking block, a locking hole is provided on one side of the locking block, a moving block cooperates with a guide rod and a double-headed screw on a vertical plate respectively, and another moving block is slidably connected with another vertical plate.

[0019] The second gear cooperates with the first gear and the third gear respectively to control the rotation of the locking block.

[0020] Furthermore, the support member includes two support rods, a third threaded hole array is provided on the support rods, a limit clamping roller is slidably installed on the support rods, the limit clamping roller includes two clamping blocks, a slope is provided on the clamping blocks, and a locking groove is provided between the two clamping blocks for clamping the glass carrier.

[0021] The clamping block is provided with a connecting hole, and a partition is installed on the supporting rod for separating the vertically installed glass carriers. The partition is provided with an arc groove and a screw is installed on the partition.

[0022] Furthermore, the end of the support member cooperates with the open groove, the bolt passes through the connecting hole and is connected and fixed with the third threaded hole, the arc groove cooperates with the support rod, and the partition is fixed by the screw rod and the hollow bottom plate.

[0023] Beneficial effects of the present invention:

[0024] 1. The circulation improvement device of the present invention uses the supporting rods of two supporting members to support multiple glass carriers, and is designed with limiting clamping rollers to clamp and fix the glass carriers. The glass carriers are easy to install and disassemble, and can carry multiple glass carriers at the same time, thereby improving processing efficiency;

[0025] 2. The circulation improvement device of the present invention can recycle the etching solution, automatically filter and remove impurities, and is provided with an adjusting member to move, drive the support rods to move, and adjust the distance between the support rods, so as to facilitate the fixing of glass carriers of different sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The present invention will be further described below in conjunction with the accompanying drawings.

[0027] Figure 1 It is a schematic diagram of the overall device structure of the present invention;

[0028] Figure 2 It is a schematic diagram of the support structure of the present invention;

[0029] Figure 3 It is a schematic diagram of the structure of the processing box of the present invention;

[0030] Figure 4 It is a schematic diagram of the cross-sectional structure of the processing box of the present invention;

[0031] Figure 5 It is a schematic diagram of the exploded structure of the internal parts of the processing box of the present invention;

[0032] Figure 6 It is a schematic diagram of the structure of the mounting member of the present invention;

[0033] Figure 7 It is a schematic diagram of the structure of the adjusting member of the present invention;

[0034] Figure 8 is a top view of the adjusting member of the present invention;

[0035] Fig. 9 It is a schematic diagram of the support structure of the present invention. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] A circulation improvement device for glass carrier TTV, such as Figure 1 As shown, the circulation improvement device includes a bracket 2, a processing box 1, a mounting part 3, an adjusting part 4, and a supporting part 5.

[0038] The processing box 1 is fastened on the bracket 2 by bolts, and the mounting member 3 is fixedly arranged in the processing box 1 and fixed by bolts. The mounting member 3 is provided with symmetrically distributed adjusting members 4, and a detachable supporting member 5 is installed on the adjusting member 4. The glass carrier plate cut with TTV phenomenon is vertically placed on the supporting member 5 for processing to eliminate TTV defects.

[0039] like Figure 2 As shown, a water supply tank 21 is fastened to the bracket 2, and a water pump is fixedly arranged in the water supply tank 21. The water pump is not shown in the figure and is used to supply etching solution to the processing box 1. Water pipes 24 are arranged at both ends of the water supply tank 21, and the water supply tank 21, the water pump and the processing box 1 are connected through the water pipes 24. Symmetrically distributed card slots 22 are arranged on the bracket 2, and array-distributed limit blocks 23 are arranged in the card slots 22.

[0040] like Figure 3 , Figure 4 As shown, a processing tank 12 is provided in the processing box 1, and a symmetrically distributed pad 11 is fixed on the processing box 1. A through hole is provided at the bottom of the pad 11, which is not shown in the figure. The through hole cooperates with the limit block 23 to install the processing box 1, and the inner wall of the processing tank 12 is provided with symmetrically distributed mounting blocks 13, and a fixing groove 14 is opened on the mounting block 13, and a through hole 15 is provided in the fixing groove 14.

[0041] A water outlet pipe 111 is provided on one side of the pad 11, a fan-shaped groove 19 is provided at the bottom of the processing tank 12, a water inlet pipe 191 is fixedly connected to the bottom of the processing box 1, the water inlet pipe 191 is communicated with the fan-shaped groove 19, a fan blade 10 is rotatably provided on the fan-shaped groove 19, and a first motor is fixedly provided in the processing tank 12. The first motor is not shown in the figure, and the output end of the first motor is fastened to the fan blade 10 to control the rotation of the fan blade 10 to push the liquid supplied in the fan-shaped groove 19 into the processing tank 12.

[0042] A filter plate 18 is installed on the fan blade 10, a baffle 16 is fastened to the bottom of the processing tank 12, a pad 17 is fixed in the processing tank 12, a threaded rod 171 is provided on the pad 17, one end of the filter plate 18 abuts against the baffle 16, and the other end passes through the threaded rod 171 and fits with the pad 17, and a nut is installed on the threaded rod 171 to fix the filter plate 18.

[0043] like Figure 5 , Figure 6 As shown, the mounting member 3 includes a hollow base plate 31, and the gaps on the hollow base plate 31 facilitate the passage of etching solution to etch the glass carrier on the mounting member 3. Vertical plates 32 are fixedly provided at both ends of the hollow base plate 31, and a through groove 33 is provided on the vertical plate 32. A support block 34 is fixedly provided on one side of the vertical plate 32. The support block 34 is connected to the fixing groove 14 to support and stabilize the mounting member 3. A first threaded hole 35 is provided on one side of the support block 34, and a bolt passes through the through hole 15 and is connected to the first threaded hole 35.

[0044] A straight rod 38 is fixed on the vertical plate 32, a buffer spring 39 is fastened on the straight rod 38, a guide rod 36 is provided on one side of the vertical plate 32, a double-headed screw 37 and a second motor 30 are provided on one side of a vertical plate 32, the second motor 30 is fixedly connected to the vertical plate 32, and the output end of the second motor 30 is fastened to one end of the double-headed screw 37.

[0045] like Figure 7 , Figure 8 As shown, the adjusting member 4 includes a lifting ring 41, which is sleeved on the straight rod 38 and slidably connected to the straight rod 38. The upper end of the lifting ring 41 is fastened to the buffer spring 39. A straight rod 410 is fixedly provided on one side of the lifting ring 41. Two push rods 411 are provided on the straight rod 410. One end of the push rod 411 is rotatably connected to the straight rod 410, and the other end is rotatably provided with a fixed rod 421. One end of the fixed rod 421 is fastened with a moving block 42, and the other end is rotatably provided with a driven rod 45.

[0046] The ends of the two driven rods 45 are rotatably connected, and a third motor 40 is fixedly provided at the connection. The output end of the third motor 40 is connected to a first gear 47. A second gear 48 and a third gear 49 are rotatably provided on the driven rod 45. The second gear 48 is located between the first gear 47 and the third gear 49, and the second gear 48 is respectively meshed with the first gear 47 and the third gear 49.

[0047] A locking block 46 is fixedly provided on one side of the third gear 49, an opening groove 462 is provided on the locking block 46, a locking hole 461 is provided on one side of the locking block 46, a second threaded hole 43 and a round hole 44 are provided on the moving block 42, one moving block 42 is slidably connected to the guide rod 36 through the round hole 44, the second threaded hole 43 cooperates with the double-headed lead screw 37, the moving block 42 moves under the drive of the double-headed lead screw 37, and drives the other moving block 42 slidably mounted on the guide rod 36 to slide.

[0048] like Fig. 9 As shown, the support member 5 includes two supporting rods 51, on which are provided third threaded holes 52 distributed in an array, on which are slidably mounted clamping blocks 53, on which are provided inclined surfaces 55, the inclined surfaces 55 of the two clamping blocks 53 are relatively mounted to form a limiting clamping roller, and a snap-fit ​​groove 56 is left between the two clamping blocks 53 forming the limiting clamping roller for fixing the glass carrier.

[0049] The glass carrier is placed between the two support rods 51 , and the edge of the glass carrier is fixedly engaged with the locking groove 56 . The support rods 51 support and lift the glass carrier so that the glass carrier is placed vertically on the support member 5 without additional clamping, and the end of the support member 5 cooperates with the open groove 462 .

[0050] A connecting hole 54 is provided on the clamping block 53, and a bolt passes through the connecting hole 54 to connect and fix with the third threaded hole 52. A partition 57 is installed on the support rod 51, and the partition 57 is installed between two adjacent glass carriers to separate the glass carriers to prevent the glass carriers from tipping over and interfering with or damaging other glass carriers. An arc groove 58 is opened on the partition 57, and the arc groove 58 cooperates with the support rod 51. A screw 59 is installed on the partition 57, and it is fastened to the hollow bottom plate 31 through the screw 59.

[0051] In this embodiment, the working principle of a circulation improvement device for a glass carrier TTV is as follows:

[0052] One end of the water supply tank 21 is connected to the water outlet pipe 111 through the water pipe 24, and is connected to the water inlet of the water pump. The water outlet of the water pump is connected to the water inlet pipe 191 through the water pipe 24, and the etching solution is supplied to the fan-shaped groove 19 at the bottom of the processing tank 12. Then the adjusting member 4 is installed on the mounting member 3, and the connection of the supporting member 5 is installed on the adjusting member 4, and the bolt is passed through the locking hole 461 to connect and fix it with the nut, and the end of the support rod 51 is locked.

[0053] Then rotate the double-headed screw 37 to make the moving block 42 move toward or in the opposite direction, drive the support rod 51 to move, adjust the spacing of the support rod 51, and install and fix the partition 57. Then, place the glass carrier vertically on the support rod 51 and snap it into the snap groove 56. After the glass carrier is firmly placed, turn on the water pump to supply the etching solution into the fan-shaped groove 19, rotate the fan blades 10 to push the solution into the processing tank 12, and etch the surface of the glass carrier.

[0054] At the same time, the third motor 40 is started, and the second gear 48 is located at the first gear 47 and the third gear 49 meshing transmission, driving the locking block 46 and the support rod 51 to rotate, driving the glass carrier to rotate, so that the surface of the glass carrier is fully in contact with the etching solution to remove the TTV marks.

[0055] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0056] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A circulation improvement device for glass carrier TTV, characterized in that: The circulation improvement device comprises a processing box (1) for circulating the etched glass carrier; A mounting member (3), the mounting member (3) being fixedly mounted in the processing box (1) and used for adjusting a clamping range of the glass carrier; An adjusting member (4), the adjusting member (4) being arranged on the mounting member (3) and being used for driving the glass carrier to rotate; A support member (5), the support member (5) being fixedly mounted on the adjusting member (4) and used for supporting and fixing the glass carrier; The mounting member (3) comprises a hollow bottom plate (31) and a vertical plate (32), wherein the vertical plates (32) are respectively arranged at two ends of the hollow bottom plate (31), a through groove (33) is provided on the vertical plate (32), a support block (34) is fixedly provided on one side of the vertical plate (32), and a first threaded hole (35) is provided on one side of the support block (34); A straight rod (38) is fixedly provided on the vertical plate (32), a buffer spring (39) is fastened on the straight rod (38), a guide rod (36) is provided on one side of the vertical plate (32), a double-headed screw (37) is rotatably provided on one side of the vertical plate (32), a support block (34) is matched with the fixing groove (14), and a bolt passes through the through hole (15) and is matched with the first threaded hole (35); The adjusting member (4) comprises a lifting ring (41) and two moving blocks (42); the lifting ring (41) is slidably arranged on the straight rod (38); the lifting ring (41) is tightly connected to the buffer spring (39); one side of the lifting ring (41) is rotatably provided with two push rods (411); one end of the push rod (411) is rotatably connected to a fixed rod (421) arranged on the moving block (42); one end of the fixed rod (421) is rotatably provided with a driven rod (45); The ends of the two driven rods (45) are rotatably connected, a first gear (47) is rotatably provided at the connection, a second gear (48) and a third gear (49) are rotatably provided on the driven rod (45), the second gear (48) is located between the first gear (47) and the third gear (49), and a locking block (46) is fixedly provided on one side of the third gear (49); The locking block (46) is provided with an open groove (462), and a locking hole (461) is provided on one side of the locking block (46). One moving block (42) cooperates with a guide rod (36) and a double-headed lead screw (37) on one vertical plate (32), and the other moving block (42) is slidably connected to the other vertical plate (32). The second gear (48) cooperates with the first gear (47) and the third gear (49) respectively, and is used to control the rotation of the locking block (46); The support member (5) comprises two supporting rods (51), the supporting rods (51) are provided with third threaded holes (52) in an array, a limiting clamping roller is slidably mounted on the supporting rods (51), the limiting clamping roller comprises two clamping blocks (53), the clamping blocks (53) are provided with inclined surfaces (55), and a clamping groove (56) is provided between the two clamping blocks (53) for clamping the glass carrier plate; The clamping block (53) is provided with a connecting hole (54), and a partition (57) is installed on the supporting rod (51) for separating the vertically installed glass carriers. The partition (57) is provided with an arc groove (58), and a screw (59) is installed on the partition (57); The end of the support member (5) cooperates with the open groove (462), a bolt passes through the connecting hole (54) and is connected and fixed with the third threaded hole (52), the arc groove (58) cooperates with the supporting rod (51), and the partition plate (57) is fixed by the screw rod (59) and the hollow bottom plate (31).

2. A circulation improvement device for glass carrier TTV according to claim 1, characterized in that: The treatment box (1) is arranged on a bracket (2), a water supply box (21) is fastened to the bracket (2), the water supply box (21) is connected to the treatment box (1) via a water pipe (24), symmetrically distributed slots (22) are provided on the bracket (2), and array-distributed limit blocks (23) are provided in the slots (22).

3. The circulation improvement device for glass carrier TTV according to claim 2, characterized in that: The processing box (1) is provided with a processing tank (12), symmetrically distributed pads (11) are fixedly provided on the processing box (1), the pads (11) are connected and cooperated with the limit blocks (23) for stabilizing the processing box (1), and mounting blocks (13) are symmetrically arranged in the processing tank (12), the mounting blocks (13) are provided with fixing grooves (14), and the fixing grooves (14) are provided with through holes (15).

4. The circulation improvement device for glass carrier TTV according to claim 3, characterized in that: A water outlet pipe (111) is provided on one side of the pad (11), a fan-shaped groove (19) is provided at the bottom of the processing tank (12), a water inlet pipe (191) is connected below the fan-shaped groove (19), a fan blade (10) is rotatably provided on the fan-shaped groove (19) for supplying etching liquid into the processing tank (12), and a filter plate (18) is fixedly mounted on the fan blade (10) for filtering the supplied etching liquid.

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