Mask assembly and mask device

Abstract

The application provides a mask assembly and a mask device. The mask assembly comprises a frame, a plurality of mask strips and a flattening device; the mask strips are arranged on the frame; the flattening device comprises a flattening component; the flattening component is movable relative to the mask strips and can flatten the wrinkles of the mask strips during the movement relative to the mask strips. In this way, after the wrinkles of the mask strips are generated, the flattening component is arranged on one side of the mask strips, and the flattening component is moved along the mask strips, so that the wrinkles on the mask strips are flattened, and the subsequent evaporation precision is improved, and the color mixing and other abnormalities are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to a mask assembly and a mask device, and belongs to the technical field of display. BACKGROUND

[0002] OLED (Organic Light-Emitting Diode) has a series of advantages such as self-luminous, wide viewing angle, light, thin, high brightness, low power consumption and fast response, therefore, OLED display panel becomes a very popular display device at home and abroad, and has broad application prospects.

[0003] In the preparation process of the OLED display panel, the light-emitting material is evaporated onto the display substrate by using a fine metal mask (FMM) assembly, and the mask assembly includes a frame and a mask sheet. In practice, the mask sheet is thin, and therefore wrinkles are prone to occur during use, thereby reducing the evaporation precision. SUMMARY

[0004] The present application provides a mask assembly and a mask device to solve the problem that wrinkles are prone to occur in the mask sheet during use, thereby reducing the evaporation precision.

[0005] In a first aspect, the present application provides a mask assembly, comprising:

[0006] a frame;

[0007] a plurality of mask sheets arranged on the frame; and

[0008] a flattening device, the flattening device comprising a flattening component, the flattening component being movable relative to the mask sheets and capable of flattening wrinkles of the mask sheets during movement relative to the mask sheets.

[0009] Based on the above mask assembly, optionally, the flattening component comprises a roller, the roller having a rolling degree of freedom along a first direction, and the mask sheets extend along the first direction.

[0010] Based on the above mask assembly, optionally, the flattening device further comprises a driving component for driving the flattening component to move, and the driving component is connected to the flattening component through a connecting component.

[0011] Based on the above mask assembly, optionally, a recess is arranged on the inner side wall of the frame, and the driving component is arranged in the recess.

[0012] Based on the above mask assembly, optionally, the connecting component comprises a hinge or a connecting rod.

[0013] Based on the above mask assembly, optionally, the flattening device further comprises a magnetic component, the magnetic component and the flattening component are respectively arranged on different sides of the thickness direction of the mask strip, and the magnetic component keeps the flattening component on the mask strip in the thickness direction by magnetic adsorption.

[0014] Preferably, the magnetic component is arranged on the upper side of the mask strip and adsorbs the flattening component on the lower side of the mask strip to the lower surface of the mask strip.

[0015] Preferably, the magnetic component comprises a magnet plate.

[0016] Based on the above mask assembly, optionally, the material of the magnetic component comprises a magnetic material, and the materials of the flattening component and the mask strip both comprise ferromagnetic materials.

[0017] Preferably, the magnetic component comprises a magnet plate, and the materials of the flattening component and the mask strip both comprise invar.

[0018] Based on the above mask assembly, optionally, in a second direction, the size of the flattening component is greater than the size of the mask strip, and both ends of the flattening component exceed the corresponding side edges of the mask strip; wherein the second direction is perpendicular to the extension direction of the mask strip and parallel to the plane where the mask strip is located.

[0019] Based on the above mask assembly, optionally, in the second direction, the difference between the size of the flattening component and the size of the mask strip is greater than or equal to 0.1 millimeter.

[0020] In a second aspect, the embodiments of the present application also provide a mask device comprising the mask assembly of any one of the above.

[0021] The mask assembly and the mask device provided by the present application comprise a frame, a plurality of mask strips and a flattening device; wherein the mask strips are arranged on the frame, the flattening device comprises a flattening component, the flattening component can move relative to the mask strips, and can flatten the wrinkles of the mask strips during the movement. By arranging the flattening device comprising the flattening component, the flattening component can be arranged on one side of the mask strip after the wrinkles of the mask strip are generated, and the flattening component can be moved along the mask strip, so as to flatten the wrinkles on the mask strip, thereby improving the subsequent evaporation precision and improving the abnormality such as color mixing. BRIEF DESCRIPTION OF DRAWINGS

[0022] The accompanying drawings, which are incorporated herein and constitute part of this specification, illustrate embodiments consistent with the application and serve to explain the principles of the application. Together with the general description of the application given above, the drawings serve to explain the principles of the application.

[0023] Figure 1 A top view of a mask assembly according to an embodiment of the present application;

[0024] Figure 2a A cross-sectional view of the mask assembly shown in Figure 1

[0025] Figure 2b A cross-sectional view of the mask assembly shown in Figure 1

[0026] Figure 3 A schematic view of a mask strip provided in a mask assembly according to an embodiment of the present application;

[0027] Figure 4 A cross-sectional view of a mask assembly according to another embodiment of the present application.

[0028] BRIEF DESCRIPTION OF DRAWINGS

[0029] 1 - frame; 2 - mask strip; 3 - flattening device; 31 - flattening member; 32 - driving member; 33 - connecting member; 4 - substrate; 5 - magnetic member. DETAILED DESCRIPTION

[0030] In order to make the objects, technical solutions, and advantages of the present application clearer, the following will be combined with the embodiments of the present application to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application. The following embodiments and features in the embodiments can be combined with each other without conflict, if necessary.

[0031] SUMMARY

[0032] ​​The precision metal mask plate is an important component when evaporating organic light emitting material, mainly composed of a frame and a mask sheet. Before evaporation, the mask sheet needs to be welded to the frame, and then the substrate is attached to the mask sheet. The mask sheet has a plurality of regularly arranged openings, so that when evaporation is performed, the light emitting material can be evaporated to the specific position of the substrate through the openings, thereby forming regularly arranged light emitting sub-pixels.

[0033] In practice, since the mask sheet is very thin, only 20-30 μm thick, during welding and attachment, the mask sheet is prone to wrinkles, which causes the substrate and the mask sheet to be unable to be closely attached, so that during the evaporation of a specific color of light emitting material, the light emitting material may reach the non-tightly attached place from the opening of the mask sheet, that is, the evaporation precision is reduced, thereby affecting the evaporation of other colors of light emitting material, such as color mixing and other problems.

[0034] In order to solve the above problems, in some schemes, after the substrate is attached to the mask sheet, a magnet plate is provided on the substrate, and the magnet plate is used to attract the mask sheet (the mask sheet is made of magnetic material), so that the substrate and the mask sheet are more closely attached. However, this can only reduce the wrinkles on the mask sheet to a certain extent, and after evaporation, color mixing and other defects may still occur.

[0035] In view of the above problems, the present application provides an improved mask plate assembly, by adding a flattening device, after the mask sheet generates wrinkles, the flattening device is used to flatten the wrinkles of the mask sheet, thereby better improving the problem of reduced evaporation precision caused by wrinkles. The following is a non-limiting description of the specific implementation scheme through several examples or embodiments.

[0036] Exemplary mask assembly

[0037] Reference Figure 1 and Figure 2a , Figure 1 is a top view structural schematic diagram of the mask plate assembly provided in an embodiment of the present application, Figure 2a is Figure 1 the A-A' cross-sectional structural schematic diagram of the mask plate assembly shown in FIG. 1 before flattening the wrinkles. As shown in Figure 1 and 2, the mask plate assembly of the present embodiment comprises a frame 1, a plurality of mask sheets 2 arranged on the frame 1, and a flattening device 3. The flattening device 3 comprises a flattening component 31, which can move relative to the mask sheet 2 and can flatten the wrinkles of the mask sheet 2 during movement relative to the mask sheet 2.

[0038] Specifically, in order to eliminate the wrinkles on the mask strip 2, in the embodiment, the mask plate assembly is provided with a flattening device 3 including a flattening component 31. After the mask strip 2 is welded and arranged on the frame 1, the flattening component 31 is placed on one side of the mask strip 2, and the flattening component 31 is moved in a specific direction, so that the wrinkles on the mask strip 2 can be pressed by the flattening component 31 during the movement process, so as to flatten the wrinkles of the mask strip 2. Based on this, the wrinkles of the mask strip 2 can be effectively reduced, and the subsequent evaporation precision is improved. The cross-sectional structure diagram after flattening the wrinkles is shown in Figure 2b .

[0039] For example Figure 1 , when the mask strip 2 is arranged on the frame 1, the flattening component 31 can be located on one side of the mask strip 2 and can move along the first direction, so as to flatten the wrinkles of the mask strip 2.

[0040] In the embodiment, the first direction corresponds to the extension direction of the mask strip 2, that is, the mask strip 2 extends along the first direction. In the embodiment, the first direction specifically refers to the x direction in Figure 1 . However, it can be understood that the first direction can also be other directions, such as the y direction in the figure or other directions intersecting with the x direction, and the specific limitation is not carried out. Moreover, the flattening component 31 can also be capable of moving along other directions in addition to the first direction.

[0041] In addition, it should be noted that, in order to facilitate the illustration of other structures, Figure 1 , only two mask strips 2 are shown, and the two mask strips 2 have a large gap therebetween. However, in fact, the number of mask strips 2 can be multiple, and as shown in Figure 3 , the multiple mask strips 2 are arranged closely, so that multiple substrates can be evaporated at the same time during evaporation. In some embodiments, both ends of each mask strip 2 can be fixed on the frame 1 by welding. The frame 1 can be made of a metal material, which mainly bears the mask strip 2. Generally, the material of the mask strip 2 can be invar, which can ensure that the structure will not be deformed obviously with temperature change during use. In addition, the thickness of the mask strip 2 is generally about 20-30 μm.

[0042] In addition, as shown in FIG. 2, in some embodiments, the flattening component 31 can include a roller, which has a rolling degree of freedom along the first direction. That is, the roller can roll in one direction or reciprocally along the first direction relative to the mask strip 2, so as to flatten the wrinkle on the rolling path. Of course, it can be understood that in other embodiments, the flattening component 31 can adopt a sliding component to flatten the wrinkle by sliding along the first direction. However, compared with sliding, rolling needs to overcome less friction, and thus it is generally more recommended to adopt a rolling structure, but this is not limited thereto.

[0043] With reference back to Figure 1 and FIG. 2, in the present embodiment, the flattening device 3 further includes a driving component 32 for driving the flattening component 31 to move. The driving component 32 is connected with the flattening component 31 through a connecting component 33, so as to realize the movement of the flattening component 31. In some embodiments, the driving component 32 can include a motor, that is, the motor can provide the power for the movement of the flattening component 31. In addition, the connecting component 33 can include a hinge or a connecting rod, and the specific design can be made according to actual needs.

[0044] Further, as Figure 1 shown in FIG. 2, in some embodiments, the frame 1 has a recess, and the driving component 32 is arranged in the recess. In this way, the fixation of the driving component 32 can be facilitated, and meanwhile, the normal use of other structures can be better avoided. However, it should be noted that in other embodiments, the driving component 32 can also adopt a design independent of the frame 1, and in use, a fixation mechanism can be additionally designed to fix the driving component 32.

[0045] Further preferably, as Figure 1 shown in FIG. 2, the inner side wall of the frame 1 is provided with a recess, so that when the driving component 32 is arranged in the recess, the flattening component 31, the driving component 32 and the connecting component 33 can all be located on the lower side of the mask strip 2, so as not to affect the structure such as the substrate 4 arranged on the upper side of the mask strip 2.

[0046] In some embodiments, the flattening device 3 can further include a magnetic force component 5, and the magnetic force component 5 and the flattening component 31 are respectively arranged on different sides of the mask strip 2 in the thickness direction. The magnetic force component 5 keeps the flattening component 31 on the mask strip 2 by magnetic adsorption.

[0047] Specifically, when the flattening component 31 is kept on the mask strip 2 by magnetic adsorption, the flattening component 31 can be provided with a contactless action force, so as to facilitate the simplification of the structure of the flattening device 3.

[0048] Further, with reference back to Figure 1As shown in FIG. 2, in the embodiment, the magnetic component 5 is arranged on the upper side of the mask strip 2, and the flattening component 31 is arranged on the lower side of the mask strip 2. The magnetic component 5 can attract the flattening component 31 on the lower side of the mask strip 2 to the lower surface of the mask strip 2. When flattening the wrinkles, the flattening component 31 can provide upward pressure to the mask strip 2.

[0049] More specifically, referring to FIG. 2, Figure 4 , Figure 4 FIG. 3 is a schematic diagram of a cross-sectional structure of a mask assembly according to another embodiment of the present application. As described above, in some embodiments, after the substrate 4 is attached to the upper side of the mask strip 2, a magnet plate can be arranged on the upper side of the substrate 4 to attract the mask strip 2 upward to flatten the wrinkles on the mask strip 2 and to make the mask strip 2 more closely attached to the substrate 4. Based on this, in the actual implementation, the flattening component 31 can be made of a magnetic material or the flattening component 31 can be made of a magnetic material as a whole. In this way, in the actual use, the flattening component 31 can be attracted to the lower side of the mask strip 2 by the magnet plate arranged on the upper side of the mask strip 2. In the actual application, after the mask strip 2 is arranged on the frame 1, the substrate 4 and the magnet plate are arranged on the upper side of the mask strip 2 in sequence. The magnet plate can attract the mask strip 2 to the substrate 4 to preliminarily flatten some wrinkles on the mask strip 2. Then, the flattening component 31 is arranged on the lower side of the mask strip 2. The flattening component 31 is attracted upward to the lower side of the mask strip 2 by the magnet plate. Then, the driving component 32 is started to drive the flattening component 31 to move relative to the mask strip 2 to flatten the wrinkles on the mask strip 2.

[0050] It can be seen that the embodiment can effectively use the existing magnet plate component as the magnetic component 5 to simplify the structure of the flattening device 3. In addition, when the magnet plate is used as the magnetic component 5, the operation newly added in the actual application is very little, and the influence on the whole process is small. In addition, because the magnetic force provided by the magnet plate is much greater than the gravity of the flattening component 31, when the flattening component 31 is attracted by the magnet plate, the flattening component 31 can provide a large pressure to the mask strip 2, which is more conducive to flattening the wrinkles.

[0051] Of course, it can be understood that in other embodiments, other magnetic components can be additionally arranged to attract the flattening component 31, which can be designed according to the actual needs and is not limited in particular.

[0052] In some examples, the material of the magnetic component 5 includes a magnetic material. Based on this, in some embodiments, the material of the flattening component 31 includes a ferromagnetic material, and the flattening component 31 is attracted to the lower side of the mask strip 2 by the magnetic component 5 arranged on the upper side of the mask strip 2.

[0053] In some embodiments, the magnetic material of the flattening component 31 can be the same as the material of the mask strip 2. Specifically, as mentioned above, the mask strip 2 is usually made of invar material, such as invar 36, which is a magnetic material, and since the invar has low expansion, when the flattening component 31 is made of invar, it can better ensure that the flattening component 31 will not be deformed due to temperature changes in the evaporation chamber. However, it should be noted that in other embodiments, the flattening component 31 and the mask strip 2 can also be made of other ferromagnetic materials, respectively, as long as they can achieve their functions, and the specific materials are not limited.

[0054] It can be understood that in addition to the way of using a magnetic component to adsorb the flattening component 31, in other embodiments, a support component can also be additionally provided according to actual needs, and the support component can replace the magnetic component to provide the pressure applied by the flattening component 31 to the mask strip 2. The specific structure of the support component can be designed according to actual conditions, which will not be described here.

[0055] In addition, continuing to refer to Figure 1 In some embodiments, in the second direction, the size of the flattening component 31 is greater than the size of the mask strip 2, and both ends of the flattening component 31 exceed the corresponding side edges of the mask strip 2; wherein the second direction is perpendicular to the moving direction of the flattening component 31 and parallel to the plane where the mask strip 2 is located, and the moving direction of the flattening component 31 can be, for example, the extension direction of the mask strip 2, for example, referring to Figure 1 The moving direction of the flattening component 31 can be the x direction in Figure 1 , and the second direction can be the y direction in the figure.

[0056] In this way, when the flattening component 31 moves along the mask strip 2, it can be ensured that each position of the mask strip 2 in the second direction is covered and flattened by the flattening component 31, and the flattening effect is guaranteed.

[0057] Further, considering the actual parameter values of the length, width and thickness of the mask strip 2, generally, in the second direction, the difference between the size of the flattening component 31 and the size of the mask strip 2 is greater than or equal to 0.1 millimeter. In this way, it can be better ensured that each position of the mask strip 2 in the second direction is covered and flattened by the flattening component 31.

[0058] Through the above mask plate assembly, after the mask strip 2 is welded to the frame 1 and the substrate 4 is attached to the mask strip 2, the flattening component 31 can be driven to move unidirectionally or reciprocally along the first direction to flatten the wrinkles on the mask strip 2. And for each mask strip 2, the above process can be repeated after each attachment action to improve the attachment flatness of the mask strip 2 and the substrate 4.

[0059] In some other embodiments, the flattening component 31 can be used to flatten the wrinkles on the mask strip 2 after the mask strip 2 is welded to the frame 1 and before the substrate 4 is attached, in which case, a support plate can be provided on the upper side or the lower side of the mask strip 2 (instead of the support force provided by the substrate 4 in the above-mentioned embodiments during the flattening process), and then the flattening component 31 is arranged on the other side of the mask strip 2 to achieve the purpose of flattening the wrinkles.

[0060] In addition, it should be noted that the mask plate assembly includes other structures necessary for realizing its functions in addition to the structures mentioned in the above-mentioned embodiments, but the present application can not be improved on these structures, and therefore they will not be described one by one.

[0061] Exemplary mask apparatus

[0062] The embodiments of the present application also provide a mask device, which comprises the mask plate assembly according to any one of the above-mentioned embodiments, and further comprises a screen stretching structure for screen stretching clamping of the mask strip, etc.

[0063] Exemplary embodiments are described herein with reference to plan views as idealized examples. In the drawings, the dimensions of regions are exaggerated for clarity. As such, variations from the shapes of the regions as illustrated in the figures can occur. It will be further understood that the exemplary embodiments are not limited in application to the exact shape of the regions as illustrated in the figures, but are extended to any shapes that can occur in the course of manufacturing. For example, an etched region illustrated as a rectangle will typically have curved features. Accordingly, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the precise shape of a region of a device and are not intended to limit the scope of the exemplary embodiments.

[0064] Unless otherwise defined, technical terms or scientific terms used in the embodiments of the present application shall have the ordinary meanings as understood by a person having ordinary skills in the art to which the present application pertains. The terms "first", "second" and similar terms are not intended to denote any order, quantity or importance, but are used to avoid confusion among the constituent elements.

[0065] Unless the context requires otherwise, throughout the specification, the term "comprise" is to be construed as an open, inclusive meaning, i.e. as "comprising, but not limited to". In the description of the specification, the terms "one embodiment", "some embodiments", "exemplary embodiments", "example", "specific example" or "some examples" are intended to mean that a particular feature, structure, material or characteristic included in at least one embodiment or example of the present disclosure. The illustrative representation of the above terms does not necessarily mean the same embodiment or example. In addition, the specific features, structures, materials or characteristics described can be included in any one or more embodiments or examples in any appropriate manner.

Claims

1. A mask assembly, characterized by, The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly.

2. The mask assembly of claim 1, wherein, The application relates to a mask assembly.

3. The mask assembly of claim 2, wherein, The application relates to a mask assembly.

4. The mask assembly of claim 2, wherein, The application relates to a mask assembly.

5. The mask assembly of claim 1, wherein, The application relates to a mask assembly.

6. The mask assembly of claim 5, wherein, The application relates to a mask assembly.

7. The mask assembly of claim 1, wherein, The application relates to a mask assembly.

8. The mask assembly of claim 7, wherein, The application relates to a mask assembly.

9. A masking device, characterized by The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. The application relates to a mask assembly. 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