A plasma device

Abstract

The present invention discloses a sheet support device and a plasma device. The sheet support device includes: a base, on which a rectangular sheet is placed; a plurality of support members, which respectively pass through the base in a direction perpendicular to the placing surface and can protrude from the placing surface, and can respectively support the sheet from the four edges of the bottom of the sheet in a manner staggered from the center line of the length direction and the width direction of the panel; a positioning assembly, which is installed on the base and positions the sheet from the four edges of the sheet; at least one of the base and the plurality of support members can be driven in a direction perpendicular to the placing surface so that the support member protrudes from the placing surface or retracts relative to the placing surface. The sheet support device of the present invention can reliably support the sheet and suppress the deviation of the sheet.

Description

Technical Field

[0001] The present invention relates to the field of plasma coating technology, but is not limited to it, and in particular to a plasma device. Background Art

[0002] In plasma equipment that coats sheets such as panels, the panel (sheet) is placed on a base or conveyor table of a support device. When the panel is placed, the support pins pass through the base to lift the panel, making it easier for the robot to place the panel. When the support pins are lowered, the robot can place the panel on the base.

[0003] In addition, in order to suppress the etching deviation of the thin film deposition position on the surface of the panel or the boundary position of the panel, it is usually necessary to accurately position the panel. For example, among the known technologies, there is a technical solution of setting positioning pieces on the edges of the panel to suppress the deviation of the panel. However, due to the thin panel, uneven heating and residual stress, it is easy to produce situations such as panel warping. The warping of the panel may form, for example, a "smiley face shape", "crying face shape" and "wave shape". In the case of panel warping, it is sometimes difficult to suppress the deviation of the panel only by positioning pieces, and it may even cause the panel to be crushed when the edge clamping device is pressed down. Summary of the invention

[0004] The present invention aims to solve one of the known problems at least to some extent. To this end, the present invention proposes a sheet support device that can reliably support the sheet and suppress the deviation of the sheet. In addition, the present invention also proposes a plasma device having the sheet support device.

[0005] According to the first aspect of the present invention, the sheet support device includes: a base, on which a rectangular sheet is placed; a plurality of support members, which respectively pass through the base in a direction perpendicular to the loading surface and can protrude from the loading surface, and can respectively support the sheet from the four edges of the bottom of the sheet in a manner staggered from the center line of the length direction and the width direction of the panel; a positioning component, which is installed on the base and positions the sheet from the four edges of the sheet; at least one of the base and the plurality of support members can be driven in a direction perpendicular to the loading surface so that the support member protrudes from the loading surface or retracts relative to the loading surface.

[0006] According to the sheet material supporting device of the first aspect of the present invention, there is an advantageous effect that the sheet material can be reliably supported and deviation of the sheet material can be suppressed.

[0007] In some embodiments, the plurality of support members are respectively retractably held on the base along a direction perpendicular to the mounting surface; the plurality of support members can be driven to protrude from the mounting surface or to retract relative to the mounting surface.

[0008] In some embodiments, the plurality of support members are symmetrically distributed around a center line in the length direction and / or a center line in the width direction of the sheet.

[0009] In some embodiments, the positioning assembly includes a plurality of positioning members, and the plurality of positioning members are respectively telescopically mounted to the base along a direction perpendicular to the mounting surface.

[0010] In some embodiments, when the positioning member is retracted toward the inner side of the base relative to the mounting surface, the distal end of the positioning member does not protrude from the sheet along a direction perpendicular to the mounting surface.

[0011] In some embodiments, the positioning assembly includes a plurality of first positioning members, and the plurality of first positioning members are used to position the sheet material from the corners of the sheet material respectively.

[0012] In some embodiments, the positioning assembly further includes a plurality of second positioning members, and the second positioning members are used to position the sheet material from the position of the center line of the length direction and / or width direction of the sheet material.

[0013] A plasma apparatus according to a second aspect of the present invention comprises a vacuum chamber, wherein any one of the sheet supporting devices described above is arranged in the vacuum chamber.

[0014] According to the plasma apparatus of the second aspect of the present invention, there is an advantageous effect that the sheet can be reliably supported and deviation of the sheet can be suppressed.

[0015] In some embodiments, a pressure piece is further included which is opposite to the sheet supporting device, and the pressure piece is used to press the edges of the sheet.

[0016] In some embodiments, the edge holding member is provided with an elastic abutment portion on a side opposite to the loading surface, and the edge holding member presses the sheet material via the elastic abutment portion. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a three-dimensional schematic diagram of an embodiment of the sheet material supporting device of the present invention.

[0018] Figure 2 yes Figure 1 A top view of a support device for a sheet.

[0019] Figure 3 yes Figure 1 A side view of a support device for a sheet.

[0020] Figure 4 yes Figure 2 Cross-sectional view at AA in .

[0021] Figure 5 It is a schematic top view of another embodiment of the sheet material supporting device of the present invention.

[0022] Figure 6 It is a schematic top view of another embodiment of the sheet material supporting device of the present invention.

[0023] Figure 7 yes Figure 6 A side view of a support device for a sheet.

[0024] Figure 8 yes Figure 6 Cross-sectional view at BB in .

[0025] Fig. 9 It is a schematic diagram of one embodiment of a plasma apparatus having a sheet supporting device of the present invention.

[0026] Fig.10 yes Fig. 9 Schematic diagram of the sheet support device and the edge clamp.

[0027] Fig.11 yes Fig.10 Cross-sectional view at CC in .

[0028] Fig.12 yes Fig.11 Magnified view of point D in .

[0029] Fig.13 It is a schematic diagram of a form of sheet material.

[0030] Fig.14 It is a schematic diagram of another form of the sheet. DETAILED DESCRIPTION

[0031] Embodiments of the present embodiment are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present embodiment, and should not be construed as limiting the present embodiment.

[0032] In the description of this embodiment, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this embodiment and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on this embodiment.

[0033] In the description of this embodiment, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0034] In the description of this embodiment, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this embodiment based on the specific content of the technical solution.

[0035] Reference Figures 1 to 14 , and mainly refer to Fig.13 as well as Fig.14 Before explaining the support device 100 for the sheet (for the sake of convenience, it will sometimes be referred to as "the support device 100" below), the sheet will first be described. As the sheet, for example, a panel 300 made of glass (for the sake of later description, the panel 300 will be used as a specific embodiment of the sheet), a silicon wafer, etc., can be cited. Taking the panel 300 as a semiconductor device as an example, in the preparation of the semiconductor device, the thickness of the panel 300 may be as thin as less than 1 mm. Since the thickness of the panel 300 is very thin, warping may occur in some processes. For example, in the process of performing surface degassing on the panel 300, the panel 300 may warp due to uneven temperature and residual stress. The warped panel 300 may have a "smiley face shape" (refer to Fig.13 ), that is, the middle of the panel 300 is concave, and the edges are warped upward. In addition, the warped panel 300 may also appear as a "crying face" (refer to Fig.14 ), that is, the middle portion of the panel 300 is convex, while the surrounding edges are tilted downward.

[0036] Reference Guide Fig. 9 When a film is deposited on the surface of the panel 300 in the plasma device 200, the surface of the panel 300 is usually required to be as flat as possible to improve the uniformity of the process. To this end, in the case where the panel 300 is warped, it is usually necessary to place the panel 300 on the base 101 and use the edge clamp 103 to press the edges of the panel 300 so as to make the surface of the panel 300 flat. However, in the case where the panel 300 is warped, whether it is when supporting the panel 300 or when positioning the panel 300, it is easy to cause the panel 300 to deviate from the preset reference position.

[0037] When supporting the panel 300, since the supporting surface of the panel 300 is substantially a curved surface, when the support member 118 is lowered, the panel 300 may slide and deviate relative to the support member 118. In addition, the panel 300 may be unevenly supported and may break. For example, in the previous support device, the panel 300 is supported "centrally". However, since the panel 300 may be warped, supporting the panel 300 centrally may cause the panel 300 to slide and deviate. In addition, the panel 300 may be locally stressed at a single point and the pressure may increase sharply. In this case, the panel 300 may break.

[0038] Reference Figures 1 to 8 , and mainly refer to Figure 1 as well as Figure 2 In view of this, the support device 100 of the first embodiment not only reliably supports the panel 300, but also considers the situation of suppressing the deviation of the panel 300. Specifically, the support device 100 includes: a base 101, a plurality of support members 118, and a positioning assembly 105. The base 101 places a rectangular (it should be noted that a square is considered a type of rectangle) panel 300 on a placing surface 104 (in Figure 2 In the figure, for the convenience of illustration, the panel 300 is indicated by a dotted line). A plurality of support members 118 respectively pass through the base 101 in a direction perpendicular to the mounting surface 104 and can protrude from the mounting surface 104. The plurality of support members 118 can support the panel 300 from the four edges of the bottom of the panel 300, respectively, in a manner staggered from the center line of the length direction and the width direction of the panel 300. The positioning assembly 105 is mounted on the base 101. The positioning assembly 105 positions the panel 300 from the four edges of the panel 300. At least one of the base 101 and the plurality of support members 118 can be driven in a direction perpendicular to the mounting surface 104 so that the support member 118 protrudes from the mounting surface 104 or retracts relative to the mounting surface 104.

[0039] According to the support device 100 of the present embodiment, the panel 300 can be reliably supported and the displacement of the panel 300 can be suppressed. Specifically, whether it is a "smiley face" panel 300 or a "crying face" panel 300, the center position of the center line in the length direction and the width direction, for example, is the position with the largest warping amount. In the present embodiment, by configuring each support member 118 to be offset from the center line in the length direction and the width direction of the panel 300, respectively, the situation of "single-point support" caused by some support members 118 abutting against the panel 300 and some support members 118 not actually abutting against the panel 300 can be reduced. As a result, the support device 100 of the present embodiment can support the warped panel 300 more reliably and balanced, and reliably suppress the displacement of the panel 300 relative to the support member 118, and further, suppress the displacement of the panel 300 relative to the mounting surface 104 of the base 101.

[0040] Continue to refer to Figure 1 , Figure 2 And auxiliary reference Fig. 9 as well as Fig.10 , the support device 100 of this embodiment can be applied to a plasma device 200. As an embodiment of the plasma device 200, for example, a plasma coating device or a plasma etching device can be listed. As a plasma coating device, an inductive plasma coating device and a capacitive plasma coating device can be listed. As a plasma device 200, for example, it includes a vacuum chamber 201. When the plasma device 200 is a coating device, the vacuum chamber 201 is a coating chamber. The support device 100 is accommodated in the vacuum chamber 201. Above the support device 100 of the plasma device 200, a clamping member 103 opposite to the support device 100 is provided. The clamping member 103 is located, for example, below a plasma generator (not shown). The base 101 is arranged below the clamping member 103. In the support device 100 of this embodiment, the base 101 is driven by a first driving unit 202 driven by, for example, a motor to approach or move away from the clamping member 103. When approaching the edge clamp 103 , the base 101 and the edge clamp 103 clamp the panel 300 together to suppress warping of the panel 300 .

[0041] In addition, the plasma device 200 may further include a second driving unit 205 driven, for example, by a cylinder. When the base 101 is away from the edge clamp 103, the second driving unit 205 may drive the support member 118 to protrude from the mounting surface 104 to carry the panel 300, or drive the support member 118 to lift up the panel 300 so that the panel 300 is separated from the mounting surface 104. Thus, when the first driving unit 202 drives the base 101 away from the edge clamp 103, the second driving unit 205 may drive the support member 118 to lift up the panel 300, so that the panel 300 can be separated from the mounting surface 104. When the panel 300 is separated from the mounting surface 104, it is convenient for a robot (not shown) to reach in and grab the panel 300.

[0042] Continue to refer to Figure 1 , Figure 2 , and auxiliary reference Figure 5 as well as Figure 6The base 101 is, for example, roughly in the shape of a plate, and the mounting surface 104 is roughly in the shape of a plane. The mounting surface 104 can be formed, for example, in a rectangular shape according to the shape of the panel 300. In addition, an avoidance groove (not marked with a reference numeral) can be provided on the mounting surface 104. Thus, when the panel 300 is placed on the mounting surface 104, only the edges around are supported and the middle area may not be in contact with the mounting surface 104. Thus, it can be achieved that when the edge clamp 103 presses the edges around the panel 300, the panel 300 as a whole can be adaptively adjusted to a certain extent.

[0043] Reference Figure 3 as well as Figure 4 And auxiliary reference Fig. 9 In some embodiments, the support member 118 can be telescopically hung on the base 101 in a direction perpendicular to the mounting surface 104. Specifically, for example, a plurality of first holes 106 are provided on the base 101 and penetrate in a direction perpendicular to the mounting surface 104. The support member 118 passes through the first hole 106 and is telescopically hung on the base 101. The manner in which the support member 118 is hung on the base 101 is not particularly limited. For example, the first hole 106 is a stepped hole, and correspondingly, the support member 118 is also in the shape of a rod with steps. The support member 118 has a support portion 118a as a large diameter portion for supporting the panel 300, and a rod portion 118b connected to the support portion 118a. In the undriven state, the support portion 118a is accommodated at the large hole end of the first hole 106, and the rod portion 118b passes through the small hole end of the first hole 106 and is exposed outside the base 101. The rod 118b is provided with a first elastic member 107 such as a compression spring, for example, at a portion exposed outside the base 101. In the undriven state, the first elastic member 107 allows the support portion 118a to be accommodated in the large hole end and not protrude from the loading surface 104. When the rod 118b is driven by the second driving unit 205, the support member 118 compresses the first elastic member 107 and protrudes toward the upper side of the base 101 and is higher than the loading surface 104 of the base 101. As a result, when the panel 300 is placed on the support portion 118a of the support member 118, there is a gap between the panel 300 and the loading surface 104, so that the robot for carrying the panel 300 can easily obtain and transfer the panel 300.

[0044] The support portion 118a and the rod portion 118b of the support member 118 can be integrally formed. In addition, the support portion 118a and the rod portion 118b can also be independent components and connected by, for example, a floating joint. In addition, the rod portion 118b of the support member 118 can be made of a material with sufficient rigidity, such as stainless steel, bearing steel, etc., and the support portion 118a can be made of a material with certain buffering properties, such as rubber, etc.

[0045] Continue to refer to 2 and Figure 6 , in order to support the panel 300 more balanced (in Figure 2 as well as Figure 6 In the figure, for the convenience of illustration, the panel 300 is represented by a dotted line, and a plurality of support members 118 are symmetrically distributed around the center line of the length direction and / or the center line of the width direction of the panel 300. For example, the support members 118 may include eight, and the edge of each side of the panel 300 is supported by two support members 118, and the two support members 118 are symmetrically distributed around the center line of the panel 300. In addition, no support member 118 is provided in the central area of ​​the panel 300. In the "smiley face-shaped" panel 300, the positions of the center line of the length direction and the center line of the width direction of the panel 300 are concave compared with other positions, and are most concave in the central area of ​​the panel 300 (especially the position where the two center lines intersect). In addition, the "smiley face-shaped" panel 300 is also roughly symmetrical in the length direction and the width direction around the two center lines. Similarly, the same is true for the "crying face-shaped" panel 300, that is, the convex panel 300 is also roughly symmetrical in the length direction and the width direction around the two center lines. Therefore, by distributing the support members 118 symmetrically around the center line of the length direction and / or the center line of the width direction of the panel 300, the panel 300 in a shape of, for example, a "smiley face" or a "crying face" can be supported more balancedly and reliably.

[0046] In addition, it should be noted that although the feature of the center line in the length direction and / or the center line in the width direction of the panel 300 is described here, this feature should be understood as a correctly designed feature preset during design. For example, during design, the panel 300 is placed centrally on the mounting surface 104 of the base 101. In this case, the support members 118 are also distributed symmetrically around the center line in the length direction and / or the center line in the width direction of the mounting surface 104. In addition, due to errors in loading by the robot or errors in processing and assembly, the support members 118 do not actually support the panel 300 strictly symmetrically, but within a certain range of allowable errors in work (e.g., a range of ±3 mm), multiple support members 118 are also considered to be symmetrically distributed around the center line in the length direction and / or the center line in the width direction of the panel 300.

[0047] Reference Figure 5In addition, in order to suppress the displacement of the position of the four corners 300a of the "crying face-shaped" panel 300 (the panel 300 is indicated by dotted lines for convenience of illustration), support members 118 may be respectively provided at positions corresponding to the four corners 300a of the panel 300. When the support members 118 are driven and protrude from the mounting surface 104, the height of the support members 118 at the positions corresponding to the four corners 300a of the panel 300 may be slightly higher than the support members 118 provided at other positions according to the warping of the "crying face-shaped" panel 300. Thus, the support members 118 can reliably support the panel 300 at the four corners 300a of the panel 300, thereby suppressing the displacement of the panel 300 to a certain extent.

[0048] Reference Figure 3 As described above, the positioning assembly 105 is mounted on the base 101 and positions the panel 300 from the edges of the four sides of the panel 300. Specifically, the positioning assembly 105 includes a plurality of positioning members 102, and the plurality of positioning members 102 respectively positions the panel 300 from the edges of the four sides of the panel 300. In addition, the plurality of positioning members 102 are respectively telescopically mounted on the base 101 in a direction perpendicular to the mounting surface 104.

[0049] In known plasma equipment, a conductor or an insulator is usually used as the binding boundary of the plasma, and a sheath is inevitably generated between the generated plasma and the binding boundary. In addition, in order to improve process uniformity, the surface of the panel 300 is required to be as flat as possible. To this end, in the known technology, the panel 300 is placed on the support device 100, and the edge of the panel 300 is pressed by a pressing device (such as a pressing member 103), so that the surface of the panel 300 is flat.

[0050] In addition, the panel 300 cannot be coated because the edge is covered by the edge clamping device (similar to the edge clamping member 103). In addition, according to the characteristics of the plasma, due to the edge effect caused by the edge clamping device, there will also be an area above the edge clamping device where the process cannot reach the bottom, which will cause the process to be uneven around the edges and the middle area of ​​the panel 300 (causing a plasma sheath). The plasma mainstream area corresponds to the process guarantee area of ​​the panel 300, and the part of the panel 300 blocked by the edge clamping device and the sheath area caused by the edge clamping device are the areas where the process cannot be guaranteed (i.e., the edge exclusion area). If the width of the edge clamping device is too large, the blocked part of the panel 300 will increase, and if the height of the edge clamping device is too high, the sheath area will become larger. In addition, when the height of the edge clamping device is too high, in order to reduce the slope of the edge clamping device and suppress the increase of the sheath area, the width of the edge clamping device may increase, and the increase in the width of the edge clamping device will further lead to an increase in the edge exclusion area. Therefore, the height of the edge clamping device has a greater impact on the edge exclusion area.

[0051] In this embodiment, by allowing multiple positioning members 102 to be retractably mounted to the base 101 in a direction perpendicular to the mounting surface 104, the edge exclusion area of ​​the panel 300 can be reduced and the process guarantee area can be increased. For example, the edge clamp 103 can press the positioning member 102 down while pressing the panel 300, without providing a "convex hull"-like structure on the positioning member 102 to avoid the positioning member 102. In this case, the height of the edge clamp 103 pressing the edges of the panel 300 can be reduced. When the height of the edge clamp 103 can be reduced, the sheath area can be reduced, thereby increasing the process guarantee area.

[0052] Continue to refer to Figure 1 , Figure 3 as well as Figure 7 For example, the base 101 is provided with a second hole portion 108 for installing the positioning member 102 on the edges of the four sides of the loading surface 104. Each positioning member 102 is telescopically installed in the second hole portion 108 through the second elastic member 112. As long as the positioning member 102 can reliably position the panel 300, its structure is not particularly limited. For example, the positioning member 102 can be in various shapes such as a block shape and a cylindrical pin shape. The type of the second elastic member 112 is not particularly limited, and a compression spring and the like can be listed. Taking a spring as an example, for example, one end of the spring serving as the second elastic member 112 can be fixed to the bottom of the second hole portion 108 by welding, thread locking, etc., and the other end of the spring can be fixed to the bottom of the positioning member 102 by welding, thread locking, etc. As a result, each positioning member 102 can be telescopically installed along the second hole portion 108 through the second elastic member 112.

[0053] In order to further reduce the thickness of the edge clamp 103, the positioning member 102 can be set so that the distal end of the positioning member 102 does not protrude from the panel 300 in the direction perpendicular to the mounting surface 104 when the positioning member 102 is retracted toward the inner side of the base 101 relative to the mounting surface 104. Specifically, from the perspective of positioning the panel 300 to suppress the displacement of the panel 300, in order to be able to position the panel 300 with a greater degree of warping, in the state of protruding toward the outer side of the base 101 relative to the mounting surface 104, the distance between the distal end of the positioning member 102 and the mounting surface 104 in the direction perpendicular to the mounting surface 104 can be greater than 6 mm and less than 10 mm. However, in the state of pressing the panel 300 for coating, the distance of the positioning member 102 protruding toward the outer side of the base 101 relative to the mounting surface 104 is preferably as small as possible, which is more conducive to reducing the thickness of the edge clamp 103. To this end, the distal ends of the positioning members 102 can be made to slightly protrude from the mounting surface 104 in a direction perpendicular to the mounting surface 104 but not higher than the upper surface of the panel 300. In other words, when the positioning members 102 are compressed toward the second hole portion 108, the height of the surface of the panel 300 that contacts the edge clamp 103 is substantially the same as or slightly lower than the height. Thus, when designing the edge clamp 103, the height of the positioning members 102 can be fully considered.

[0054] Continue to refer to Figure 2 In order to more accurately and reliably position, for example, a "crying face-shaped" panel 300 and suppress the displacement of the panel 300, the positioning assembly 105 includes a plurality of positioning members 102 (sometimes also referred to as "first positioning members 102a" for easy distinction) for positioning the panel 300 from the corners 300a of the panel 300. The first positioning members 102a guide and position the length and width directions of the panel 300 near the corners 300a of the panel 300. For example, the first positioning members 102a include four, each of which positions a corner 300a of the panel 300. Each first positioning member 102a is, for example, L-shaped, and the first positioning members 102a have a first positioning arm 109a extending along the length direction of the panel 300 and a second positioning arm 109b extending along the width direction of the panel 300. In the state of protruding from the mounting surface 104, the height of the first positioning arm 109a and the second positioning arm 109b relative to the mounting surface 104 is, for example, about 8 mm. In addition, the distal ends of the first positioning arm 109a and the distal ends of the second positioning arm 109b are respectively formed with inclined guide surfaces 109c (auxiliary reference Figure 4). For the "crying face-shaped" panel 300, the four corners 300a extend downward respectively. When falling onto the mounting surface 104, the four corners 300a fall onto the mounting surface 104 first, and the four corners 300a may even serve as supporting parts while the middle of the panel 300 is arched. Therefore, in this embodiment, by providing a plurality of first positioning members 102a for positioning the panel 300 from the corners 300a of the panel 300, the "crying face-shaped" panel 300 can be positioned more accurately and reliably.

[0055] In addition, although the example in which the first positioning member 102a has the first positioning arm 109a and the second positioning arm 109b is described above, it is not limited thereto. For example, the first positioning member 102a may also be in a long strip shape, and when positioning the corner 300a of the panel 300, the corner 300a of the panel 300 may be positioned by a first positioning member 102a parallel to the length direction of the panel 300 and a first positioning member 102a parallel to the width direction of the panel 300.

[0056] Continue to refer to Figure 6 In order to more accurately and reliably position, for example, a "smiley face-shaped" panel 300 and suppress the offset of the panel 300, the positioning component 105 includes a plurality of positioning members 102 (sometimes also referred to as "second positioning members 102b" for easy distinction) for positioning the panel 300 from the position of the center line of the length direction and / or width direction of the panel 300. For example, the second positioning members 102b include four, and each second positioning member 102b positions the middle of one side of the panel 300. Each second positioning member 102b may be in the shape of a long strip and parallel to the edge of the panel 300. For example, the second positioning members 102b located on both sides of the long side of the panel 300 are parallel to the long side of the panel 300, and the second positioning members 102b located on both sides of the short side of the panel 300 are parallel to the short side of the panel 300. For the "smiley face-shaped" panel 300, the middle parts of the four sides are respectively concave downward, and when it falls on the mounting surface 104, the middle parts of the four sides fall on the mounting surface 104 first. Therefore, in this embodiment, by providing a plurality of second positioning members 102b for positioning the panel 300 from the position of the center line of the length direction and / or width direction of the panel 300, the "smiley face-shaped" panel 300 can be positioned more accurately and reliably.

[0057] The configuration of the second positioning members 102b located on both sides of the long side of the panel 300 and the second positioning members 102b located on both sides of the short side of the panel 300 are substantially the same. Therefore, the second positioning members 102b located on both sides of one side of the panel 300 are taken as an example for description.

[0058] As described above, the plurality of support members 118 are symmetrically distributed with the center line of the length direction of the panel 300 as the center. Specifically, one side of one side of the panel 300 is supported by two support members 118. In a top view, the second positioning member 102b is between the two support members 118. In addition, the length of the second positioning member 102b can be set so that when viewed from one side of the panel 300, the two ends of the second positioning member 102b overlap with the two support members 118 respectively. In other words, the length of the second positioning member 102b is greater than or equal to the distance between the two support members 118 on the same side thereof. Thus, the second positioning member 102b can suppress the panel 300 from rotating and deviating around one of the support members 118.

[0059] It should be noted that the base 101 may also include a plurality of first positioning members 102a and a plurality of second positioning members 102b, thereby being compatible with panels 300 of different warping types.

[0060] Therefore, the support device 100 of this embodiment can avoid "single-point support" caused by some support members 118 abutting the panel 300 while some support members 118 do not actually abut the panel 300 by configuring each support member 118 to be offset from the center line of the panel 300 in the length direction and the width direction, respectively. This can support the warped panel 300 in a more balanced and reliable manner, and reliably suppress the deviation of the panel 300 relative to the support member 118. Furthermore, it can suppress the deviation of the panel 300 relative to the loading surface 104 of the base 101.

[0061] Furthermore, by providing a plurality of first positioning members 102a for positioning the panel 300 from the corner 300a of the panel 300, the panel 300, for example, in a "crying face shape", can be positioned more accurately and reliably, and the deviation of the panel 300 can be suppressed. By providing a plurality of second positioning members 102b for positioning the panel 300 from the position of the center line in the length direction and / or width direction of the panel 300, the panel 300, for example, in a "smiley face shape", can be positioned more accurately and reliably, and the deviation of the panel 300 can be suppressed.

[0062] It should be noted that, although the above description describes an example in which the support member 118 is held on the base 101 and can be driven by the second drive unit 205 to extend and retract relative to the base 101, the present invention is not limited thereto. For example, the support member 118 can also be independently provided relative to the base 101, and the support member 118 can be directly connected to the second drive unit 205, so that the support member 118 and the base 101 are independently controlled. Alternatively, the support member 118 is fixed and only the base 101 is driven by the first drive unit 202.

[0063] Continue to refer to Fig. 9As described above, the supporting device 100 of each embodiment can be used in a plasma device 200. The plasma device 200 has a vacuum chamber 201. The supporting device 100 of any one of the above items and a clamping member 103 opposite to the supporting device 100 are arranged in the vacuum chamber 201. The clamping member 103 is used to press the panel 300. When approaching the base 101, the clamping member 103 presses the edges of the panel 300 and presses a plurality of positioning members 102 to retract the positioning members 102.

[0064] The following reference Figures 10 to 12 , the edge clamp 103 is described.

[0065] A through groove 116 is provided in the middle of the edge clamp 103 for avoiding the process area of ​​the panel 300. When the edge clamp 103 is close to the base 101, the edges of the groove 116 abut against the edges of the panel 300. The edge clamp 103 is also generally plate-shaped as a whole, and the groove 116 is provided in the middle of the edge clamp 103. The shape of the groove 116 is not particularly limited, and it may be rectangular, for example, according to the formation of the panel 300. In order to avoid the process area of ​​the panel 300 as much as possible, the width of the area where the edge clamp 103 abuts against the edge of the panel 300 may be, for example, about 1 mm. When the edges of the groove 116 of the edge clamp 103 abut against the edges of the panel 300, the edge clamp 103 and the base 101 clamp the edges of the panel 300 together.

[0066] In order to improve the uniformity of the process on the panel 300 and suppress the size of the plasma sheath region, the side of the edge holder 103 opposite to the panel 300 is provided with an inclined surface 117, and the inclined surface 117 is smoothly inclined from the outside of the groove 116 toward the edge of the groove 116. The inclined surface 117, for example, extends from the surface of the edge holder 103 on the side opposite to the panel 300 to the inner surface of the groove 116 of the edge holder 103. Thus, by making the inclined surface 117 smoothly inclined from the outside of the groove 116 toward the groove 116, it is possible to suppress the sudden change of the plasma density above the groove 116. In order to further suppress the sudden change of the plasma density above the groove 116, the uniformity of the entire plasma is improved.

[0067] Thus, the edge clamp 103 of this embodiment can expand the area that the plasma can cover as much as possible, and make the density of the plasma in the middle area and the surrounding edge areas of the panel 300 more uniform, thereby improving the uniformity of the plasma processing on the panel 300 with less sheath area. In addition, since the height of the edge clamp 103 is relatively low, even if the overlapping portion of the edge clamp 103 and the panel 300 is relatively narrow, the steepness of the inclined surface 117 can be suppressed, thereby further reducing the edge exclusion area.

[0068] In some embodiments, the edge pressing member 103 is provided with an elastic abutment portion 110 on the side opposite to the loading surface 104, and the edge pressing member 103 presses the panel 300 through the elastic abutment portion 110. The elastic abutment portion 110 is, for example, provided at the position of each edge of the groove portion 116 of the edge pressing member 103 (for example, a position close to the second positioning member 102b). Specifically, the edge pressing member 103 is provided with a receiving groove 111 at the position of each edge of the groove portion 116, and the elastic abutment portion 110 may include, for example, eight, and respectively accommodated in the receiving grooves 111. The structure of the elastic abutment portion 110 is not particularly limited, for example, the elastic abutment portion 110 may include a ball pin 113 and a third elastic member 114, one end of the third elastic member 114 is connected to the ball pin 113, and the other end is fixed to the receiving groove 111. The third elastic member 114 may be a known elastic member such as a coil spring and a spring. In the initial state, the ball pin 113 protrudes from the surface of the edge holding member 103 opposite to the mounting surface 104 . After abutting against the panel 300 , the ball pin 113 compresses the third elastic member 114 and retracts into the receiving groove 111 .

[0069] By providing an elastic abutment portion 110 on the edge clamp 103, it is possible to further suppress the displacement of, for example, the "smiley face-shaped" panel 300. For example, when the "smiley face-shaped" panel 300 is placed on the base 101, the middle of the panel 300 in the approximate length direction and / or width direction is positioned by the second positioning member 102b, and the four corners 300a are tilted relative to the placement surface 104 of the base 101. When the edge clamp 103 abuts against the panel 300, it may first abut against the four corners 300a of the panel 300. In this case, the panel 300 may be slightly offset relative to the second positioning member 102b that is farther away from the four corners 300a due to the uneven contact between the four corners 300a and the edge clamp 103. In this embodiment, by providing elastic abutment portions 110 at the positions of the edges of the groove portion 116 of the edge clamp 103, it is possible to achieve that when the edge clamp 103 is pressed down, the ball pin 113 of the elastic abutment portion 110 first presses the middle position of the panel 300, which has been positioned by the second positioning member 102b, in the approximate length direction and / or width direction. After the elastic abutment portion 110 reliably presses the panel 300, the edge clamp 103 continues to be pressed down as a whole, thereby flattening the panel 300 as a whole. In this way, the deviation of the "smiley face-shaped" panel 300 can be further suppressed.

[0070] Furthermore, by providing the elastic contact portion 110 on the edge holder 103 , it is possible to further suppress the deviation of the “smiley face-shaped” panel 300 , for example.

[0071] In addition, by enabling each positioning member 102 (for example, the first positioning member 102a and the second positioning member 102b) to be retractably mounted to the base 101 in a direction perpendicular to the mounting surface 104, the height of the edge clamping member 103 pressing the edges of the panel 300 can be reduced. When the height of the edge clamping member 103 can be reduced, the edge exclusion area of ​​the panel 300 can be reduced, thereby increasing the process assurance area.

[0072] Furthermore, by providing an inclined surface 117 on the side of the edge holder 103 opposite to the panel 300, the inclined surface 117 is smoothly inclined from the outside of the groove 116 toward the edge of the groove 116. This can suppress a sudden change in plasma density above the groove 116 of the edge holder 103, thereby improving the uniformity of the overall plasma.

[0073] Although examples of the present embodiment have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present embodiment, and the scope of the present embodiment is defined by the claims and their equivalents.

Claims

1. A plasma device having a vacuum chamber, It is characterized in that The vacuum chamber is provided with: A sheet material support device, the sheet material support device comprising: A base, on which a rectangular sheet is placed; A plurality of support members, each passing through the base in a direction perpendicular to the mounting surface and protruding from the mounting surface, and each supporting the sheet from the four edges of the bottom of the sheet in a manner staggered from the center line of the length direction and the width direction of the sheet; A positioning component is mounted on the base to position the sheet from the four edges of the sheet; At least one of the base and the plurality of support members can be driven in a direction perpendicular to the mounting surface so that the support member protrudes from the mounting surface or retracts relative to the mounting surface; The positioning assembly includes a plurality of positioning members, each of which is retractably mounted to the base along a direction perpendicular to the mounting surface, and when the positioning members are retracted toward the inner side of the base relative to the mounting surface, the distal ends of the positioning members do not protrude from the sheet along a direction perpendicular to the mounting surface. A pressure edge member, which is opposite to the sheet material supporting device; The base is driven by the first driving unit to approach or move away from the edge clamping member. When approaching the edge clamping member, the edge clamping member presses the edges of the sheet material, and the edge clamping member presses the positioning member downward while pressing the sheet material.

2. The plasma device according to claim 1, It is characterized in that The plurality of support members are symmetrically distributed around a center line in the length direction and / or a center line in the width direction of the sheet.

3. The plasma device according to claim 1, It is characterized in that The plurality of positioning members include a plurality of first positioning members, and the plurality of first positioning members are used to position the sheet material from the corners of the sheet material respectively.

4. The plasma device according to claim 1, It is characterized in that The plurality of positioning members further include a plurality of second positioning members, and the second positioning members are used to position the sheet material from the position of the center line of the length direction and / or width direction of the sheet material.

5. The plasma device according to claim 1, It is characterized in that The edge holding member is provided with an elastic abutment portion on a side opposite to the mounting surface, and the edge holding member presses the sheet material through the elastic abutment portion.

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