Method, device, storage medium and program product for converting two-dimensional STR device into three-dimensional GDML based on plane projection

Abstract

The method, device, storage medium and program product for converting two-dimensional STR device into three-dimensional GDML based on plane projection belong to the field of simulation technology and solve the technical problem that there is no conversion of two-dimensional STR device description file into three-dimensional GDML geometry description file at present. The method of the present invention comprises: a method for converting two-dimensional STR device description file into three-dimensional GDML geometry description file; a method for carrying out GDML geometry description in the form of surface mesh, which can ensure that a region in the converted three-dimensional GDML geometry description file is an independent closed geometry structure, avoiding the data redundancy and low calculation efficiency of the conversion result by supporting the primitive method of GMDL; a method for determining the normal direction of the projection plane and the stretching plane, which ensures the closure of the geometry, so that it can support scientific calculation in subsequent analysis; and also provides a material correspondence. The present invention is suitable for analysis of particle transport, ionization, radiation and the like in space environment.

Description

Technical Field

[0001] The present application relates to the field of simulation technology, and in particular to semiconductor process and device simulation. Background Art

[0002] Currently, when simulating semiconductor processes and devices, the mainstream software on the market is Silvaco TCAD software, which is used as two-dimensional device modeling and simulation analysis software. It describes semiconductor devices in the form of two-dimensional grids, and uses grid points, edges formed by points, triangles formed by edges, etc. as data carriers to carry the calculated doping concentration, electrical properties, optical properties and other information on grid points, edges and triangles.

[0003] In complex space environments such as outer space, the performance of devices is also affected by the collision, reaction, absorption, etc. caused by long-term particle transport in the space environment, which will have a significant impact on the performance and life of the device. Therefore, it is very necessary to simulate and analyze the long-term particle transport to the device in the space environment. The mainstream simulation software for particle transport calculations on the market is Geant4.

[0004] Silvaco TCAD uses str two-dimensional files as the carrier of two-dimensional device information, and analyzes device properties through two-dimensional devices. Silvaco TCAD itself also supports three-dimensional device simulation, and its format is also str. In Geant4, the software uses gdml three-dimensional geometry description files as the model information carrier. Therefore, there is an urgent need for a method to convert two-dimensional str devices into three-dimensional gdml geometry files to support Silvaco TCAD semiconductor devices using Geant4 for particle transport simulation in a space environment. Therefore, the traditional method cannot convert Silvaco TCAD's two-dimensional str device description files into three-dimensional GDML geometry description files, and then conduct space environment particle transport, ionization, radiation and other analyses. Summary of the invention

[0005] The purpose of the present invention is to solve the problem that there is no technology to convert two-dimensional STR device description files into three-dimensional GDML geometry description files, and provide a method, device, storage medium and program product for converting two-dimensional STR devices into three-dimensional GDML based on plane projection.

[0006] The present invention is implemented by the following technical solutions. On the one hand, the present invention provides a method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection, the method comprising:

[0007] Step 1: Get the str file information of the device;

[0008] Step 2: Convert the str file to a gdml file according to the str file information, including:

[0009] Step 2.1, obtain the str point set, wherein the str point set includes the sequence number of the point, the X coordinate of the point, the Y coordinate of the point and the Z coordinate of the point;

[0010] Step 2.2, obtain the region outline composed of the external edges of the region in str;

[0011] Step 2.3, obtain the thickness T of the device, and project str from the original XOY plane at Z=0 to planes parallel to the XOY plane at Z=-T / 2 and Z=T / 2 respectively;

[0012] Step 2.4, create an extruded plane perpendicular to the XOY plane to form a closed geometric body;

[0013] Step 2.5, repeating steps 2.2 to 2.4, constructing different closed geometric bodies in other regions, and finally obtaining the entire three-dimensional device geometry composed of closed geometric bodies in different regions;

[0014] Step 3: According to the material description in the str file, establish a corresponding relationship between it and the commonly used geometric materials in GDML;

[0015] Step 4: Obtain the outer bounding box of the entire geometric body in space based on the point and unit information of the geometric area, and expand it to the axial outer bounding box area, reflect the area range in each part of the GDML file, and set the analysis area.

[0016] Furthermore, step 1 specifically includes:

[0017] A two-dimensional str format device description file is obtained, wherein the two-dimensional str format device description file includes physical coordinate information and region information of the entire device; the region information is a region having the same material and physical properties, and is obtained by performing region description through the physical coordinate information of the entire device.

[0018] Furthermore, the region information includes: region material, region point, region edge and region triangle information.

[0019] Furthermore, step 2.2 specifically includes:

[0020] Set all internal edges as set A, and set all edges that constitute the triangle as set B. According to the meaning of set A and set B and the theory of sets, the outer contour set C of the str region = set B - set A, thereby obtaining the regional contour composed of the external edges of the region in str.

[0021] Furthermore, step 2.3 specifically includes:

[0022] Step 2.3.1: For the point set part, generate the corresponding point set according to the two projection planes, and write the position information of the point set into the define part in GDML;

[0023] Step 2.3.2: For the region, project the str plane onto two projection planes to obtain projection planes with Z=-T / 2 and Z=T / 2. The topological order of triangles in the projection plane is consistent with that of the str plane.

[0024] Furthermore, in step 2.3.2, the topological order of triangles in the projection plane is consistent with the str plane, specifically including:

[0025] The order of triangle topology is adjusted so that the normal of the triangle unit points to the outside of the geometric body, that is, the normal of the triangle unit in the Z=T / 2 plane points to the Z+ direction, and the normal of the triangle unit in the Z=-T / 2 plane points to the Z- direction.

[0026] Furthermore, step 2.4 specifically includes:

[0027] Take the smallest unit line segment MN on the outer contour of the projection plane area Z=T / 2, and the MN sequence meets the requirements of the side quadrilateral normal. Assuming that the corresponding smallest unit line segment on the corresponding area of ​​the projection plane Z=-T / 2 is M'N', then construct the stretching plane quadrilateral unit corresponding to the MN end of the area according to the node order of MNN'M', stretch the line segment in the Z-axis direction along the closed contour area, and finally combine it with the projection plane to obtain a closed geometric body.

[0028] In a second aspect, the present invention also provides a computer device, comprising a memory and a processor, wherein the memory stores a computer program, and when the processor runs the computer program stored in the memory, the steps of the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection as described above are executed.

[0029] In a third aspect, the present invention further provides a computer-readable storage medium storing a plurality of computer instructions, wherein the plurality of computer instructions are used to enable a computer to execute a method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection as described above.

[0030] In a fourth aspect, the present invention further provides a computer program product, which, when executed by a processor, implements the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection as described above.

[0031] Beneficial effects of the present invention:

[0032] The invention provides a method for converting a two-dimensional str device description file into a three-dimensional gdml geometry description file through Silvaco TCAD, providing support for particle transport simulation of str format devices in a space environment.

[0033] 1. The method of converting a two-dimensional STR device description file into a three-dimensional GDML geometry description file of the present invention can provide a feasible method for converting a two-dimensional STR device into a three-dimensional GDML geometry description file;

[0034] Second, the method of the present invention adopts the method of using the surface grid to describe the gdml geometry, which can ensure that a region in the converted three-dimensional gdml geometry description file is an independent closed geometric structure, avoiding the data redundancy and low calculation efficiency of the conversion result by supporting the primitive method of GMDL;

[0035] 3. The method of determining the normal direction of the projection plane and the stretching plane in the method of the present invention ensures the closedness of the geometric body, so that it can support scientific calculations in subsequent analysis;

[0036] Fourth, the method of the present invention also provides a material correspondence.

[0037] The invention is suitable for analysis of particle transport, ionization, radiation, etc. in space environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solution of the present application, the drawings required for use in the embodiments are briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0039] Figure 1 It is a device description file in str format;

[0040] Figure 2 Visualization of str files in Silvaco TCAD;

[0041] Figure 3 It is composed of GDML files;

[0042] Figure 4 This is the GDML grid visualization effect after the conversion is completed by the method of the present invention. DETAILED DESCRIPTION

[0043] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0044] Embodiment 1: A method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection, the method comprising:

[0045] Step 1: Get the str file information of the device;

[0046] Step 2: Convert the str file to a gdml file according to the str file information, including:

[0047] Step 2.1, obtain the str point set, wherein the str point set includes the sequence number of the point, the X coordinate of the point, the Y coordinate of the point and the Z coordinate of the point;

[0048] Step 2.2, obtain the region outline composed of the external edges of the region in str;

[0049] Step 2.3, obtain the thickness T of the device, and project str from the original XOY plane at Z=0 to planes parallel to the XOY plane at Z=-T / 2 and Z=T / 2 respectively;

[0050] Step 2.4, create an extruded plane perpendicular to the XOY plane to form a closed geometric body;

[0051] Step 2.5, repeating steps 2.2 to 2.4, constructing different closed geometric bodies in other regions, and finally obtaining the entire three-dimensional device geometry composed of closed geometric bodies in different regions;

[0052] Step 3: According to the material description in the str file, establish a corresponding relationship between it and the commonly used geometric materials in GDML;

[0053] Step 4: Obtain the outer bounding box of the entire geometric body in space based on the point and unit information of the geometric area, and expand it to the axial outer bounding box area, reflect the area range in each part of the GDML file, and set the analysis area.

[0054] In this implementation, a method for converting a two-dimensional STR device description file into a three-dimensional GDML geometry description file is provided, and the method can provide a feasible method for converting a two-dimensional STR device into a three-dimensional GDML geometry description file;

[0055] The method of using surface mesh to describe GDML geometry can ensure that a region in the converted 3D GDML geometry description file is an independent closed geometry structure, avoiding the data redundancy and low computational efficiency of the conversion result by supporting primitives in GMDL.

[0056] A method for determining the normal direction of the projection plane and the extrusion plane, which ensures the closedness of the geometry and enables it to support scientific computing in subsequent analysis;

[0057] The correspondence of materials and the setting of analysis area are also provided.

[0058] Implementation method 2: This implementation method further limits the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection described in implementation method 1. In this implementation method, step 1 is further limited, specifically including:

[0059] Step 1 specifically includes:

[0060] A two-dimensional str format device description file is obtained, wherein the two-dimensional str format device description file includes physical coordinate information and region information of the entire device; the region information is a region having the same material and physical properties, and is obtained by performing region description through the physical coordinate information of the entire device.

[0061] In this embodiment, the data included in the acquired two-dimensional str format device description file can obtain the two-dimensional device grid physical coordinates, physical coordinate indexes and grid topology composed of physical coordinate indexes, thereby providing basic data for the device three-dimensional space projection midpoint position projection and topological relationship projection.

[0062] Implementation method 3: This implementation method further limits the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection described in implementation method 2. In this implementation method, the region information is further limited, specifically including:

[0063] The region information includes: region material, region point, region edge and region triangle information.

[0064] In this embodiment, the regional material, regional point, regional edge and regional triangle information can obtain the mesh topology of the triangle in the regional two-dimensional plane, and then provide a data basis for the triangular mesh topology when projecting the device in three-dimensional space.

[0065] Implementation method 4: This implementation method further limits the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection described in implementation method 1. In this implementation method, step 2.2 is further limited, specifically including:

[0066] Step 2.2 specifically includes:

[0067] Set all internal edges as set A, and set all edges that constitute the triangle as set B. According to the meaning of set A and set B and the theory of sets, the outer contour set C of the str region = set B - set A, thereby obtaining the regional contour composed of the external edges of the region in str.

[0068] This embodiment provides a method for obtaining the region contour composed of the external edges of the region in str. The method quickly and accurately calculates the region outer contour information, and then provides a data basis for the outer contour projection and thickness direction quadrilateral creation when projecting the device in three-dimensional space.

[0069] Implementation mode 5: This implementation mode further limits the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection described in Implementation mode 1. In this implementation mode, step 2.3 is further limited, specifically including:

[0070] Step 2.3 specifically includes:

[0071] Step 2.3.1: For the point set part, generate the corresponding point set according to the two projection planes, and write the position information of the point set into the define part in GDML;

[0072] Step 2.3.2: For the region, project the str plane onto two projection planes to obtain projection planes with Z=-T / 2 and Z=T / 2. The topological order of triangles in the projection plane is consistent with that of the str plane.

[0073] In this embodiment, the point set, area, and edge are projected according to the projection method to create quadrilateral units in the thickness direction. This projection method can preliminarily expand the two-dimensional plane area topology to the Z=-T / 2 and Z=T / 2 planes, providing intermediate support data for subsequent three-dimensional construction of the area.

[0074] Implementation method 6: This implementation method further limits the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection described in implementation method 5. In this implementation method, the topological order of triangles in the projection plane in step 2.3.2 is adjusted, and further limits are made, specifically including:

[0075] The order of triangle topology is adjusted so that the normal of the triangle unit points to the outside of the geometric body, that is, the normal of the triangle unit in the Z=T / 2 plane points to the Z+ direction, and the normal of the triangle unit in the Z=-T / 2 plane points to the Z- direction.

[0076] In this embodiment, the method for making the topological order of triangles in the projection plane consistent with the str plane is the right-hand rule, so as to ensure that the normal of the plane where the triangle unit is located is facing the outside of the three-dimensional regional geometry, so that the Z=T / 2 and Z=-T / 2 planes of the projected regional geometry are spatially closed, which ensures the appearance of the geometry and the effectiveness of the scientific calculation of the geometry.

[0077] Implementation method seven, this implementation method is a further limitation of the method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection described in implementation method one. In this implementation method, step 2.4 is further limited, specifically including:

[0078] Take the smallest unit line segment MN on the outer contour of the projection plane area Z=T / 2, and the MN sequence meets the requirements of the side quadrilateral normal. Assuming that the corresponding smallest unit line segment on the corresponding area of ​​the projection plane Z=-T / 2 is M'N', then construct the stretching plane quadrilateral unit corresponding to the MN end of the area according to the node order of MNN'M', stretch the line segment in the Z-axis direction along the closed contour area, and finally combine it with the projection plane to obtain a closed geometric body.

[0079] In this embodiment, the outer contour edge of the region is calculated according to step 2.2. The outer contour edge is a common edge of the stretching plane and the projection plane. According to the right-hand rule, if the edge is to make the normal of the stretching plane unit point to the outside of the geometric body, the node organization order of the edge should be opposite to the node organization order of the projection plane. Therefore, the method of this embodiment can ensure that the plane normal of the quadrilateral unit of the stretching plane is facing the outside of the three-dimensional regional geometric body, so that the stretching plane part is spatially closed, that is, the appearance of the geometric body is guaranteed, and the effectiveness of the scientific calculation of the geometric body is guaranteed.

[0080] Embodiment 8: This embodiment is an embodiment of a method for converting a two-dimensional STR device into a three-dimensional GDML based on plane projection as described above, and specifically includes:

[0081] 4.1str file description

[0082] Silvaco TCAD's two-dimensional str format device description file is a plain text file, which contains the physical coordinate information of the entire device in sequence, based on the solution information on points, edges, triangles, and bodies, and the regional description: regional material, regional edges, and regional triangle information.

[0083] str format device description file such as Figure 1 As shown:

[0084] like Figure 1As shown in the figure, the line starting with c describes the physical coordinate point of the device. Take the line c-1e-0500 as an example. c is the abbreviation of coordinate, which means that this line describes the physical coordinate point of the device. The three numbers -1e-0500 that follow are the x, y, and z coordinates of the physical coordinate point.

[0085] The lines starting with s are used to describe the solutions on points, the lines starting with se are used to describe the solutions on edges, the lines starting with sf are used to describe the solutions on triangles, and the lines starting with sv are used to describe the solutions on volumes. Since the content of this part of the decomposition is not related to the conversion process, it will be omitted here.

[0086] The line beginning with r is used to indicate the beginning of a region. For example, the line containing r 0Gas, r is the abbreviation of region, indicating that this line describes a region of the device. The number 0 that follows is the material number used in this region, Gas is the material name, and Gas is a gas, which is usually considered to be air.

[0087] The line starting with n is used to express the concentration information of various types of materials at the point. Since only geometric information is converted, this part of the decomposition information can be ignored.

[0088] The line starting with "e" is used to express the internal edge information of the region. Take line "e 560" as an example. "e" is the abbreviation of "edge", which means that this line is the internal edge information. The number 560 following it represents the serial number of the two physical coordinate points that constitute this edge.

[0089] The line starting with f3 is used to describe the triangle unit information in the area. f3 is the abbreviation of FETRIANGLE (3-node triangle), which represents the triangle unit information in the area. Take line f31560 as an example. The number 1560 following it is the physical coordinate point number of the three vertices of the triangle.

[0090] like Figure 2 As shown in the figure, source represents source, gate represents gate, drain represents drain. Substrate represents substrate. The legend in the lower right corner represents materials, which are:

[0091] Silicon-silicon, SiO2-silicon dioxide, Polysilicon-polycrystalline silicon, Aluminum-aluminum, Electrodes-electrodes.

[0092] The horizontal axis represents the coordinate scale of the device in the x-dimension, and the vertical axis represents the coordinate scale of the device in the y-dimension. The English "Data from mos1ex02_0.str" above means that the data is read from the mos1ex02_0.str file.

[0093] Visualize the two-dimensional str device in Silvaco TCAD. From the legend, we can see that different regions are drawn with different colors according to different materials. The horizontal and vertical coordinates can be used to see the two-dimensional spatial span of the physical coordinates of different regions in the two-dimensional plane. This information is consistent with the coordinate positions of the region points and points in the str file. (Find the physical coordinate point c of the region through the serial number n of the point in the region r)

[0094] 4.2gdml file description

[0095] GDML is a geometry markup description language designed based on XML. It is used to describe geometric structures and features through XML-formatted description files. It supports the characterization description of simple geometric structures and the TessSolid format description of complex geometric structures. The TessSolid format uses closed geometric regions formed by triangles and quadrilaterals to describe geometric figures.

[0096] like Figure 3 As shown, the GDML file consists of five parts: define, materials, solids, structure, and setup.

[0097] The define part is used to define variables, positions, rotations, and scaling information, which will be used in the geometry part below.

[0098] The materials part is the material information definition. This part of the definition information will be assigned to the geometry part and used as the material of the geometry.

[0099] Solids are entity definitions, which define the shape of the geometry.

[0100] The Structure part defines the geometric structure information, associating the geometric entities with information such as materials and positions to form the final geometry to be analyzed.

[0101] The Setup part mainly defines the analysis domain. The scope of the analysis domain should include all geometric bodies (at least there should be no geometric body completely outside the analysis domain, otherwise the GDML file is an invalid file and cannot be recognized by Geant4).

[0102] 4.3str file to gdml file

[0103] The str format file and the gdml format file are introduced above. To convert the str format file into a gdml file, at least the following problems must be solved: obtain the point set in the str, obtain the area and edge in the str, project the point set, area, and edge according to the projection method, create quadrilateral units in the thickness direction, match materials, and set up the analysis.

[0104] 4.3.1str point set

[0105] In the str file, the point set information can be parsed according to the keyword c, including: the point number, the point's X coordinate, the point's Y coordinate, and the point's Z coordinate.

[0106] 4.3.2str Region and Edge

[0107] To construct a GDML grid by region, you need to obtain the region outline composed of the external edges of the region in str, while all internal edges and all triangles are known in the str file.

[0108] Set all internal edges as set A, and set all edges that make up the triangle as set B. According to the meaning of set A and set B and the theory of sets, the outer contour set C of the str region = set B - set A. In this way, the regional contour composed of the external edges of the region in str is obtained, which is recorded as the outer contour edge of the region.

[0109] 4.3.3 Projection plane

[0110] To convert a two-dimensional str file into a three-dimensional gdml file, it is necessary to set the thickness T of the device and project str from the original XOY plane at Z=0 to planes parallel to the XOY plane at Z=-T / 2 and Z=T / 2 respectively.

[0111] Specifically include:

[0112] For the point set part, the corresponding point set should be generated according to the two projection planes, and the point set position information will be written into the define part in GDML.

[0113] For the region, first project the str plane onto two projection planes to obtain the projection planes of Z=-T / 2 and Z=T / 2, where the triangle topology order is consistent with the str plane. At this time, the triangle topology order needs to be adjusted so that the normal of the triangle unit points to the outside of the geometric body, that is, the normal of the triangle unit in the Z=T / 2 plane points to the Z+ direction, and the normal of the triangle unit in the Z=-T / 2 plane points to the Z- direction.

[0114] 4.3.4 Stretching plane

[0115] At this time, you need to create a stretching plane perpendicular to the XOY plane to form a closed geometry.

[0116] According to 4.3.2, the outer contour edge of the region is calculated. This outer contour edge is the common edge of the stretching plane and the projection plane. According to the right-hand rule, if the edge is to make the normal of the stretching plane unit point to the outside of the geometric body, the node organization order of the edge should be opposite to the node organization order of the projection plane.

[0117] Therefore, take the smallest unit line segment MN on the outer contour of the Z=T / 2 projection plane area, and the MN sequence meets the requirements of the side quadrilateral normal. Assuming that the corresponding smallest unit line segment on the corresponding area of ​​the Z=-T / 2 projection plane is M'N', the stretched plane quadrilateral unit corresponding to the MN end of the area can be constructed according to the node sequence of MNN'M'. The line segment is stretched in the Z-axis direction along the closed contour area, and finally combined with the projection plane to obtain a closed geometric body, that is, the final regional mesh.

[0118] Carry out process 4.3.2-4.3.4 to complete the construction of one area, and repeat process 4.3.2-4.3.4 to construct different closed geometric bodies in other areas. Finally, the entire three-dimensional device geometry composed of closed geometric bodies in different areas will be obtained.

[0119] 4.3.5 Materials

[0120] After completing the construction of the geometry part, you also need to assign materials to the geometry. According to the commonly used material descriptions in the str file, establish a corresponding relationship between it and the commonly used geometric materials in GDML to complete the assignment of the material part.

[0121] The commonly used materials described in str include: Gas, Oxide, Nitride, Silicon, Polysilicon, Oxyntitride, PhotoResist, Metal, Insulator, Silicide, TiNitride, TiSilicide. After conversion into gdml files, the following comparison relationship is used for material mapping.

[0122] Gas corresponds to air, which is the air commonly used in GDML

[0123] Oxide corresponds to silicon dioxide SiO2

[0124] Nitride corresponding to silicon nitride N4Si3

[0125] Silicon vs. Si

[0126] PolySilicon polycrystalline silicon corresponding to Si

[0127] Oxynitride corresponds to nitrogen oxides NO2

[0128] PhotoResist corresponding to photoresist SiH4

[0129] Metal corresponds to Al

[0130] Insulator corresponding to SiO2

[0131] Silicide corresponds to SiO2

[0132] TiNitride corresponds to titanium oxide TiO2

[0133] TiSilicide corresponds to silicon titanium compound TiSi2

[0134] 4.3.6 Analysis Domain

[0135] The outer bounding box of the entire geometric body in space is obtained based on the point and unit information of the geometric area, and it is appropriately expanded to the axial outer bounding box area. The range of this area is reflected in each part of the GDML file, and the analysis area is set.

[0136] like Figure 4 As shown in the figure, it is a visualization effect of only displaying grid lines of the three-dimensional GMDL device converted from the two-dimensional str device file. Different areas in the figure are drawn with different colors according to the materials. Each material area is a separate closed geometric body, which can effectively provide a reliable three-dimensional device geometric model for the subsequent scientific analysis of particle transport, ionization, radiation, etc. given to the GDML file.

[0137] The present invention has similar methods of using other types of geometric basic units supported by other GDML formats to form a three-dimensional GDML geometry description file, all of which fall within the protection scope of this patent.

Claims

1. A method for converting a two-dimensional str device into a three-dimensional gdml based on plane projection, characterized in that: The method comprises: Step 1: Get the str file information of the device; Step 2: Convert the str file to a gdml file according to the str file information, including: Step 2.1, obtain the str point set, wherein the str point set includes the sequence number of the point, the X coordinate of the point, the Y coordinate of the point and the Z coordinate of the point; Step 2.2, obtain the region outline composed of the external edges of the region in str; Step 2.3, obtain the thickness T of the device, and project str from the original XOY plane at Z=0 to planes parallel to the XOY plane at Z=-T / 2 and Z=T / 2 respectively; Step 2.4, create an extruded plane perpendicular to the XOY plane to form a closed geometric body; Step 2.5, repeating steps 2.2 to 2.4, constructing different closed geometric bodies in other regions, and finally obtaining the entire three-dimensional device geometry composed of closed geometric bodies in different regions; Step 3: According to the material description in the str file, establish a corresponding relationship between it and the commonly used geometric materials in GDML; Step 4: Obtain the outer bounding box of the entire geometric body in space according to the point and unit information of the geometric area, and expand it into an axial outer bounding box area, reflect the area range in each part of the GDML file, and set the analysis area; Step 1 specifically includes: Obtain a two-dimensional str format device description file, wherein the two-dimensional str format device description file includes physical coordinate information of the entire device and region information; the region information is a region having the same material and physical properties, and is obtained by performing region description on the physical coordinate information of the entire device; The region information includes: region material, region point, region edge and region triangle information.

2. A method for converting a two-dimensional str device into a three-dimensional gdml based on plane projection according to claim 1, characterized in that: Step 2.2 specifically includes: Set all internal edges as set A, and set all edges that constitute the triangle as set B. According to the meaning of set A and set B and the theory of sets, the outer contour set C of the str region = set B - set A, thereby obtaining the regional contour composed of the external edges of the region in str.

3. The method for converting a two-dimensional str device into a three-dimensional gdml based on plane projection according to claim 1, characterized in that: Step 2.3 specifically includes: Step 2.3.1: For the point set part, generate the corresponding point set according to the two projection planes, and write the position information of the point set into the define part in GDML; Step 2.3.2: For the region, project the str plane onto two projection planes to obtain projection planes with Z=-T / 2 and Z=T / 2. The topological order of triangles in the projection plane is consistent with that of the str plane.

4. The method for converting a two-dimensional str device into a three-dimensional gdml based on plane projection according to claim 3, characterized in that: In step 2.3.2, the topological order of triangles in the projection plane is consistent with that in the str plane, specifically including: The order of triangle topology is adjusted so that the normal of the triangle unit points to the outside of the geometric body, that is, the normal of the triangle unit in the Z=T / 2 plane points to the Z+ direction, and the normal of the triangle unit in the Z=-T / 2 plane points to the Z- direction.

5. The method for converting a two-dimensional str device into a three-dimensional gdml based on plane projection according to claim 1, characterized in that: Step 2.4 specifically includes: Take the smallest unit line segment MN on the outer contour of the projection plane area Z=T / 2, and the MN sequence meets the requirements of the side quadrilateral normal. Assuming that the corresponding smallest unit line segment on the corresponding area of ​​the projection plane Z=-T / 2 is M'N', then construct the stretching plane quadrilateral unit corresponding to the MN end of the area according to the node order of MNN'M', stretch the line segment in the Z-axis direction along the closed contour area, and finally combine it with the projection plane to obtain a closed geometric body.

6. A computer device comprising a memory and a processor, wherein a computer program is stored in the memory, wherein: When the processor runs the computer program stored in the memory, the steps of the method according to any one of claims 1 to 5 are performed.

7. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a plurality of computer instructions, and the plurality of computer instructions are used to enable a computer to execute the method according to any one of claims 1 to 5.

8. A computer program product, characterized in that When the computer program is executed by a processor, the method according to any one of claims 1 to 5 is implemented.

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