Mirror module, synchrotron radiation device and free electron laser device

Abstract

The application discloses a mirror module, a synchrotron radiation device and a free electron laser device, and relates to the technical field of synchrotron radiation and free electron laser. The mirror module comprises a mirror body, the mirror body has an upper surface and a side surface adjacent to the upper surface, the upper surface is a reflection surface of a light beam, the mirror module further comprises a first groove, a cooling module and a heating module, and the first groove is arranged on the side surface; the cooling module comprises a first cooling structure and a second cooling structure, the first cooling structure is arranged below the upper surface, the second cooling structure is arranged on one side of the first cooling structure close to the side surface, and the cooling module is used for reducing the temperature of the mirror body; and the heating module is used for heating the mirror body. The mirror module provided by the application can play a role of meeting the preset requirements of the mirror surface height error RMS value and the slope error RMS value under the condition that the center of a light spot and the physical center of a reflection surface are inconsistent.

Description

Technical Field

[0001] This application relates to the fields of synchrotron radiation and free-electron laser technology, and in particular to a mirror module, a synchrotron radiation device, and a free-electron laser device. Background Technology

[0002] In synchrotron radiation and free-electron laser devices, the beamline mirrors typically absorb the thermal load from the light source. After absorbing the thermal power from the light source, a temperature gradient is generated on the mirror, causing thermal deformation of the mirror surface, which ultimately adversely affects the transmission efficiency and quality of X-rays.

[0003] Fourth-generation light sources, whether diffraction-limiting rings or free-electron laser devices, place very high demands on the surface shape control of the mirror body. Generally, the height error RMS (Root Mean Square) value is required to be around 1 nm and the slope error RMS value is around 100 nrad. Therefore, a suitable surface shape scheme must be adopted for the mirror.

[0004] Currently, cooling solutions for beamline mirrors include not only the commonly used side-contact cooling but also side-grooving designs. These designs optimize parameters such as groove position, depth, and width to minimize surface thermal deformation under specific heat loads. The Shanghai Synchrotron Radiation Facility (SSRF) in China has proposed a side-local cooling scheme. This scheme optimizes the length and width of the contact area between the cooling copper block and the mirror side while maintaining the mirror's overall appearance, resulting in minimal surface shape error under a given load. Besides side-contact cooling, internal channel cooling is also used for short-sized optical components. Furthermore, cooling methods for beamline optical components in free-electron laser devices have been developed. For example, some technologies propose using electrically heated plates for temperature compensation.

[0005] These solutions share a common feature: they are only effective when the center of the light spot and the center of the reflector surface are approximately aligned. When the center of the light spot on the reflector surface is not aligned with the physical center of the reflector surface, these solutions are no longer applicable. Summary of the Invention

[0006] In view of this, the purpose of this application is to overcome the shortcomings of the prior art. This application provides a reflector module, a synchrotron radiation device and a free-electron laser device to solve the technical problem of the lack of a reflector module in the prior art that can cope with the inconsistency between the center of the light spot on the reflector surface and the physical center of the reflector surface.

[0007] This application provides:

[0008] A reflector module includes a mirror body having an upper surface and a side surface adjacent to the upper surface, the upper surface being a reflective surface for light beams;

[0009] The reflector module further includes a first groove formed in the mirror body, the first groove being located on the side and extending through the mirror body along its length.

[0010] The reflector module further includes a cooling module, which comprises a first cooling structure and a second cooling structure. The first cooling structure is located below the upper surface and is arranged along the length of the mirror body. The first cooling structure is connected to an external cooling system to reduce the temperature of the mirror body. The second cooling structure is located on the side of the first cooling structure near the side surface. The second cooling structure includes a first channel and a heat-conducting plate. The heat-conducting plate is used for heat conduction with the mirror body. The first channel is connected to an external cooling system to remove heat from the heat-conducting plate to reduce the temperature of the mirror body.

[0011] The reflector module also includes a heating module connected to the heat-conducting sheet, which heats the mirror body.

[0012] In addition, the mirror module according to this application may also have the following additional technical features:

[0013] In some embodiments of this application, the first cooling structure includes a plurality of second channels, which are arranged parallel to each other along the width direction of the mirror body.

[0014] In some embodiments of this application, the second cooling structure further includes a second groove formed on the mirror body. The second groove is located on the upper surface and is arranged along the length direction of the mirror body, with its opening facing upward and the groove being uniformly filled with a heat-conducting medium.

[0015] In some embodiments of this application, one end of the heat-conducting sheet is inserted into the heat-conducting medium, and the other end is connected to the first channel, wherein the heat-conducting sheet and the groove of the second groove are separated from each other.

[0016] In some embodiments of this application, the heating module includes at least two heating elements and a heating controller. The heating elements are connected to the portion of the heat-conducting element that exposes the heat-conducting medium, and the heating elements are spaced apart along the length of the mirror body.

[0017] The heating controller is used to determine the heating control command of the heating element according to the surface shape of the reflector, and the heating element heats the mirror body according to the heating control command.

[0018] In some embodiments of this application, the first groove is located on the side of the second groove away from the upper surface.

[0019] In some embodiments of this application, there are two sides, and the two sides are respectively connected to the two sides of the upper surface that are arranged along the width direction of the mirror body;

[0020] There are two first grooves, and the two first grooves are symmetrically distributed on the two sides;

[0021] The number of the second cooling structures is two, and the two second cooling structures are symmetrically distributed on both sides of the first cooling structure along the width direction of the mirror body;

[0022] The number of heating modules is two, and the two heating modules are respectively connected to the two heat-conducting sheets.

[0023] In some embodiments of this application, the length of the heat-conducting sheet is less than the length of the light spot on the mirror body.

[0024] This application also provides a synchrotron radiation device, including the mirror module as described above.

[0025] This application also provides a free-electron laser device, including the mirror module as described above.

[0026] Compared to existing technologies, the beneficial effects of this application are as follows: This application proposes a reflector module that, when the center of the light spot and the physical center of the reflective surface are not aligned, controls the surface shape of the reflector by using the first groove to suppress the deformation of the mirror body. Furthermore, a cooling module is used to reduce the temperature of the mirror body, thereby controlling the surface shape of the reflector. A heating module is then used to heat the mirror body, compensating for the surface shape of the reflector. This allows the reflector control module to handle high heat loads while simultaneously cooling the mirror body through the cooling module to control the surface shape of the reflector and compensating for the surface shape through the heating module. Ultimately, the reflector surface height error RMS value is maintained at approximately 1 nm, and the slope error RMS value is maintained at approximately 100 nrad, meeting the preset requirements. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 The working principle diagram of the mirror body is shown;

[0029] Figure 2 A schematic diagram of the structure of the reflector module of this application is shown;

[0030] Figure 3 It shows Figure 2 Schematic diagram of the cross section at point AA;

[0031] Figure 4 The diagram shows the working principle of the reflector module;

[0032] Figure 5 The diagram shows the deformation distribution curve along the normal direction of the meridian obtained by X-ray irradiation onto the reflecting surface;

[0033] Figure 6 The diagram shows the slope error distribution curve of the normal direction of the meridian obtained by X-ray irradiation onto the reflecting surface;

[0034] Figure 7 A schematic diagram of a structure in some embodiments in which the second channel is distributed in an arc shape is shown;

[0035] Figure 8 A schematic diagram of a structure in some embodiments showing that the second channel is distributed in a zigzag shape is shown.

[0036] Key component symbols: 10 - X-ray; 20 - light spot; 30 - meridian; 100 - mirror module; 110 - mirror body; 111 - upper surface; 112 - side surface; D1 - length direction; D2 - width direction; 120 - first groove; 130 - cooling module; 131 - first cooling structure; 132 - second cooling structure; 1311 - second channel; 1321 - first channel; 13211 - through hole; 1322 - heat-conducting plate; 1323 - second groove; 1324 - heat conduction medium; 140 - heating module; 141 - heating plate. Detailed Implementation

[0037] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0038] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0040] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0041] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0042] like Figures 1 to 3 As shown, an embodiment of this application provides a reflector module 100, which is used to maintain the RMS value of the reflector surface height error on the order of 1 nm and the RMS value of the slope error on the order of 100 nrad when the center of the light spot and the physical center of the reflector surface are not in sync. The reflector module 100 includes a mirror body 110, a first groove 120, a cooling module 130 and a heating module 140.

[0043] It is understandable that when the reflective surface of the mirror 110 is irradiated by light of a certain energy, the heat deposited on the reflective surface will cause the temperature of the mirror 110 to rise. Due to the unevenness of the temperature rise, the mirror surface will deform due to the heat, thereby affecting the surface shape accuracy of the reflector. It is necessary to use the first groove 120, the cooling module 130 and the heating module 140 to control the surface shape of the reflector.

[0044] The first groove 120 is formed on the mirror body 110 to suppress the thermal deformation of the mirror body 110 and thus control the surface shape of the reflector. The cooling module 130 is used to cool the mirror body 110 to control the surface shape of the reflector. The heating module 140 is used to heat the mirror body 110 to compensate for the surface shape of the reflector. Under the synergistic effect of the first groove 120, the cooling module 130 and the heating module 140, the height error RMS value and the slope error RMS value of the reflector both meet the preset requirements when the center of the light spot and the physical center of the reflector are inconsistent.

[0045] In this embodiment, the mirror body 110 has an upper surface 111 and a side surface 112 adjacent to the upper surface 111, and the upper surface 111 is a reflecting surface for the light beam.

[0046] The mirror body 110 is rectangular, with a length, width, and height of 700 mm, 60 mm, and 60 mm, respectively. The beam is an X-ray 10, which forms a spot 20 on the reflecting surface. The spot 20 is located on the meridian 30 of the reflecting surface, which is the center line of symmetry in the extension direction of the reflecting surface.

[0047] The cooling module 130 includes a first cooling structure 131 and a second cooling structure 132.

[0048] The first cooling structure 131 is located below the upper surface 111 and is arranged along the length direction D1 of the mirror body 110.

[0049] Specifically, in this embodiment, the first cooling structure 131 includes a plurality of second channels 1311, which are arranged parallel to each other along the width D2 direction of the mirror body 110 and are symmetrically distributed on the mirror body 110 along the meridian 30. The second channels 1311 are micro-channels, and their cross-sections are not limited to directions such as circular or hexagonal.

[0050] In this embodiment, the cross-section of the second channel 1311 is square, and adjacent second channels 1311 are evenly spaced. Specifically, the dimensions of each second channel 1311 are 5mm*1mm, and the spacing between each second channel 1311 is 1.5mm. In other embodiments, the cross-section of the second channel 1311 is circular, the radius of each second channel 1311 is 1.26mm, and the spacing between each second channel 1311 is 1.5mm.

[0051] It is understandable that the closer the mirror body 110 is to the light spot 20, the higher the temperature. In other embodiments, the spacing between each second channel 1311 can be gradually reduced along the direction close to the side 112, which can make the temperature more uniform across the reflective surface, thereby better controlling the surface shape of the reflector.

[0052] like Figure 7 and Figure 8 As shown, in other embodiments, the second channel 1311 is not arranged along the width direction D2 of the mirror body 110. For example, the line connecting the center lines of each second channel 1311 can be set as an arc or a broken line. The second channel 1311 is arranged on the mirror body 110, so that the second channel 1311 near the light spot 20 is more densely distributed than the second channel 1311 far away from the light part 20. This can also make the temperature more uniform on the reflecting surface, thereby better controlling the surface shape of the mirror.

[0053] In this embodiment, the first cooling structure 131 is connected to an external cooling system (not shown) to reduce the temperature of the mirror body 110. The external cooling system is used to provide circulating cooling water as a cold source. Furthermore, the circulating cooling water flows through each of the second channels 1311 to carry away heat and cool the mirror body 110.

[0054] The second cooling structure 132 is disposed on the side of the first cooling structure 131 near the side 112. In this embodiment, there are two second cooling structures 132, which are symmetrically distributed on both sides of the first cooling structure 131 along the width direction of the mirror body 110. The two second cooling structures 132 are symmetrically disposed on both sides of the upper surface 111 along the width direction, giving the mirror module 100 better control over the mirror surface shape.

[0055] The second cooling structure 132 includes a first channel 1321, a heat-conducting plate 1322, and a second groove 1323.

[0056] The second groove 1323 is formed on the mirror body 110. Specifically, the second groove 1323 is formed by indentation from the upper surface 111. The second groove 1323 is provided along the length direction D1 of the mirror body 110, with its opening facing upward and the groove being uniformly filled with a heat-conducting medium 1324.

[0057] In this embodiment, the heat conduction medium 1324 is preferably an indium gallium eutectic solution.

[0058] The depth and width of the second groove 1323 are 18mm and 6mm respectively, and the depth of the indium gallium eutectic solution in the second groove 1323 is 4mm.

[0059] One end of the heat-conducting plate 1322 is inserted into the heat-conducting medium 1324, and the other end is connected to the first channel 1321. The heat-conducting plate 1322 and the groove of the second groove 1323 are separated from each other.

[0060] Specifically, the thickness of the heat-conducting plate 1322 is 2mm, the distance between the side of the heat-conducting plate 1322 and the groove wall of the second groove 1323 is 2mm, and the distance between the bottom surface of the heat-conducting plate 1322 and the bottom of the second groove 1323 is 2mm. This separation structure prevents the vibrations generated by the heat-conducting plate 1322 and the first channel 1321 during operation from being directly transmitted to the mirror body 110 by the heat conduction medium 1324, thus ensuring the normal and stable operation of the mirror body 110.

[0061] The heat-conducting plate 1322 is used to conduct heat with the mirror body 110. The first channel 1321 is connected to an external cooling system to remove the heat on the heat-conducting plate 1322 to reduce the temperature of the mirror body 110.

[0062] Furthermore, the heat-conducting plate 1322 is inserted into the heat-conducting medium 1324 and does not contact the second groove 1323. Thus, the cold source provided by the cooling system is transferred to the mirror body 110 through the first channel 1321, the heat-conducting plate 1322 and the heat-conducting medium 1324 in sequence to cool the reflective surface on the mirror body 110, thereby achieving the purpose of controlling the surface shape of the reflective surface.

[0063] The length of the first channel 1321 is 55mm. In this embodiment, the first channel 1321 is hollow and elongated, with a through hole 13211 of 8mm diameter in the middle. The through hole 13211 is used for circulating cooling water from an external circulating cooling system. The cooling water carries away the heat of the first channel 1321 to cool the mirror body 110.

[0064] In some embodiments, the heat-conducting sheet 1322 and the first channel 1321 are integrally cast structures.

[0065] In some embodiments, the heat-conducting sheet 1322 and the first channel 1321 are welded together.

[0066] In some embodiments, both the heat-conducting sheet 1322 and the first channel 1321 are made of thermally conductive materials. Optionally, the thermally conductive material may be copper or aluminum, etc.

[0067] It is understandable that the length of the heat-conducting plate 1322 is less than the length of the second groove 1323.

[0068] Preferably, in this embodiment, the length of the heat-conducting sheet 1322 is less than the length of the light spot 20 formed by the X-ray 10 on the reflecting surface, so as to effectively reduce the temperature gradient of the light spot 20 in the direction of the meridian 30.

[0069] In some embodiments, the temperature range of the circulating cooling provided by the cooling system connected to the first cooling structure 131 and the first channel 1321 is 15°C to 25°C.

[0070] In other embodiments, the temperature range of the circulating cooling provided by the cooling system connected to the first cooling structure 131 and the first channel 1321 is 18°C ​​to 25°C.

[0071] Optionally, the temperature of the circulating cooling provided by the cooling system can be selected as 18.5℃, 18.9℃, 19℃, 19.4℃, 20.2℃, 20.6℃, 21℃, 21.8℃, 22.1℃, 22.5℃, 23℃, 23.5℃, 24℃, 24.2℃, 24.6℃, or 24.9℃. It should be understood that the above are merely illustrative examples and are not intended to limit the scope of protection of this application.

[0072] Heating module 140 is connected to heat-conducting plate 1322. There are two heating modules 140, and the two heating modules 140 are respectively connected to two heating plates 141. In this way, the reflector module 100 can better compensate for the surface shape of the reflector.

[0073] Specifically, the heating module 140 includes at least two heating elements 141 and a heating controller (not shown). The heating elements 141 are connected to the portion of the heat-conducting plate 1322 that exposes the heat transfer medium 1324, and each heating element 141 is spaced apart along the length direction D1 of the mirror body 110, which can effectively reduce the temperature gradient of the light spot 20 in the direction of the meridian 30.

[0074] It should be noted that all heating elements 141 can be located on the same side of the heat-conducting plate 1322, or each heating element 141 can be located on a different side of the heat-conducting plate 1322.

[0075] The number of heating elements 141 can be set according to actual needs and is not limited.

[0076] When there are two heating elements 141, the two heating elements 141 are respectively connected to the two sides of the heat-conducting plate 1322 along its length.

[0077] When there are multiple heating elements 141, two heating elements 141 are connected on both sides of the heat-conducting plate 1322 along its length, and the remaining heating elements 141 are evenly distributed in the middle of the two heating elements 141.

[0078] In this embodiment, there are two heating elements 141, all of which are located on the same side of the heat-conducting plate 1322. Each heating element 141 is a rectangular ceramic plate measuring 9.8mm x 8mm.

[0079] The heating controller is used to determine the heating control command of the heating element 141 according to the surface shape of the reflector. The heating element 141 changes the voltage (or current) according to the heating control command to heat the mirror body 110 in order to compensate for the surface shape of the reflector.

[0080] The first groove 120 is provided on the side 112 and extends through the mirror body 110 along the length direction D1 of the mirror body 110.

[0081] There are two sides 112, and the two sides 112 are respectively connected to the two sides of the upper surface 111 along the width direction D2 of the mirror body 110.

[0082] To better suppress thermal deformation of the mirror body 110, two first grooves 120 are symmetrically distributed on both sides 112. The first grooves 120 are used to block and optimize the internal heat flow path of the mirror body 110, so that the heat distribution of the mirror body 110 is more even.

[0083] The position and size of the first groove 120, the heat-conducting plate 1322, and the heat flux applied to the heating plate 141 were optimized using finite element software, resulting in a depth of 10.5 mm and a height of 10 mm for the first groove 120.

[0084] It should be noted that in this embodiment, the first groove 120 is located on the side of the bottom of the second groove 1323 away from the upper surface 111, and the second groove 1323 is disposed on the upper surface 111. In other embodiments, the second groove 1323 may be disposed on the side 112. For example, the second groove 1323 may be disposed on the side 112 near the upper surface 111, and the first grooves 120 may be spaced apart on the side of the bottom of the second groove 1323 away from the upper surface 111. In this way, the first cooling structure 131 is disposed close to the upper surface 111, which facilitates the cooling of the reflective surface by the first cooling structure 131.

[0085] like Figure 4 As shown, the working principle of the reflector module 100 is as follows:

[0086] When the reflective surface of the mirror 110 is irradiated by X-rays 10, the heat deposited on the reflective surface will cause the temperature of the mirror 110 to rise. Due to the unevenness of the temperature rise, the reflective surface will deform under heat, thereby affecting the accuracy of the reflective mirror surface shape.

[0087] Especially when the center of the light spot and the physical center of the reflective surface are not aligned, the deformation curve and the RMS value of the slope error in the meridional normal direction cannot meet the requirements of the ordinary cooling scheme.

[0088] The reflector module 100 of this application controls the surface shape of the reflector by using a first groove 120 to suppress thermal deformation of the mirror body 110, and further uses a cooling module 130 to reduce the temperature of the mirror body 110 to control the surface shape of the reflector, and a heating module 140 to heat the mirror body 110 to compensate for the surface shape of the reflector. This allows the reflector module 100 to handle high heat loads while simultaneously cooling the mirror body 110 through the cooling module 130 to control the surface shape of the reflector and compensating for the surface shape of the reflector through the heating module 140.

[0089] like Figure 5 and Figure 6 As shown, based on the above working principle, the mirror body 110 of the reflector module 100 of this application absorbs 16.6W of thermal power, and the height error RMS value of the reflector surface is 1.2nm, while the slope error RMS value is 38.7nrad. Both the height error and slope error RMS values ​​are significantly reduced, which is very advantageous for beam transmission in the beamline of a fourth-generation light source.

[0090] This application also provides a synchrotron radiation device, including the mirror module 100 as described above, which has all the beneficial effects of the mirror module 100 in any of the above embodiments, and will not be described in detail here.

[0091] This application also provides a free-electron laser device, including the mirror module 100 as described above, which has all the beneficial effects of the mirror module 100 in any of the above embodiments, and will not be described in detail here.

[0092] from Figure 5 and Figure 6 The results show that after using the above-mentioned mirror module 100, the surface shape of the mirror, both the height error and the slope error, are reduced by an order of magnitude. The surface shape achieves a height error RMS in the order of 1 nm and a slope error RMS in the order of 100 nrad, which can meet the stringent surface shape requirements of synchrotron radiation sources and free electron laser devices.

[0093] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0094] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A reflector module, comprising a mirror body having an upper surface and a side surface adjacent to the upper surface, the upper surface being a reflective surface for light beams, characterized in that, The reflector module further includes a first groove formed in the mirror body, the first groove being located on the side and extending through the mirror body along its length. The reflector module further includes a cooling module, which comprises a first cooling structure and a second cooling structure. The first cooling structure is located below the upper surface and is arranged along the length of the mirror body. The first cooling structure is connected to an external cooling system to reduce the temperature of the mirror body. The second cooling structure is located on the side of the first cooling structure near the side surface. The second cooling structure includes a first channel and a heat-conducting plate. The heat-conducting plate is used for heat conduction with the mirror body. The first channel is connected to an external cooling system to remove heat from the heat-conducting plate to reduce the temperature of the mirror body. The reflector module also includes a heating module connected to the heat-conducting sheet, which heats the mirror body.

2. The reflector module according to claim 1, characterized in that, The first cooling structure includes a plurality of second channels, which are arranged parallel to each other along the width direction of the mirror body.

3. The reflector module according to claim 1, characterized in that, The second cooling structure further includes a second groove formed on the mirror body. The second groove is located on the upper surface and is arranged along the length direction of the mirror body. Its opening faces upward and the groove is uniformly filled with a heat-conducting medium.

4. The reflector module according to claim 3, characterized in that, One end of the heat-conducting sheet is inserted into the heat-conducting medium, and the other end is connected to the first channel. The heat-conducting sheet and the groove of the second groove are separated from each other.

5. The reflector module according to claim 3, characterized in that, The heating module includes at least two heating elements and a heating controller. The heating elements are connected to the portion of the heat-conducting element that exposes the heat transfer medium, and the heating elements are spaced apart along the length of the mirror body. The heating controller is used to determine the heating control command of the heating element according to the surface shape of the reflector, and the heating element heats the mirror body according to the heating control command.

6. The reflector module according to claim 3, characterized in that, The first groove is located on the side of the second groove away from the upper surface.

7. The mirror module according to any one of claims 1-6, characterized in that, The number of the two sides is two, and the two sides are respectively connected to the two sides of the upper surface that are arranged along the width direction of the mirror body; There are two first grooves, and the two first grooves are symmetrically distributed on the two sides; The number of the second cooling structures is two, and the two second cooling structures are symmetrically distributed on both sides of the first cooling structure along the width direction of the mirror body; The number of heating modules is two, and the two heating modules are respectively connected to the two heat-conducting sheets.

8. The reflector module according to any one of claims 1-6, characterized in that, The length of the heat-conducting sheet is less than the length of the light spot on the mirror.

9. A synchrotron radiation device, characterized in that, Includes the mirror module as described in any one of claims 1-8.

10. A free-electron laser device, characterized in that, Includes the mirror module as described in any one of claims 1-8.

Images