Thermoelectric conversion module and method for manufacturing a thermoelectric conversion module

Abstract

A thermoelectric conversion module of the present application includes an insulating sheet substrate having a front surface and a back surface, a plurality of thermoelectric conversion elements, and a wiring layer. The plurality of thermoelectric conversion elements are arranged in a long strip shape extending in a first direction on the front surface of the sheet substrate and are arranged in a second direction intersecting the first direction. The wiring layer has a plurality of wirings electrically connecting adjacent thermoelectric conversion elements in series with each other at both end portions of the long strip shape. The plurality of thermoelectric conversion elements are all p-type thermoelectric conversion elements or n-type thermoelectric conversion elements. The thermal resistance value of the wirings is equal to or greater than the thermal resistance value of the thermoelectric conversion elements.

Description

Technical Field

[0001] This invention relates to a thermoelectric conversion module and a method for manufacturing a thermoelectric conversion module. Background Technology

[0002] Thermoelectric conversion modules with multiple thermoelectric conversion elements are known (e.g., Patent Document 1, Patent Document 2, and Non-Patent Document 1). A thermoelectric conversion element is a component that converts heat into electricity by utilizing the temperature difference between its two ends.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: International Publication No. 2012 / 121133;

[0006] Patent document 2: Japanese Patent Application Publication No. 2015-144212.

[0007] Non-patent literature

[0008] Non-patent document 1: National Institute of Advanced Industrial Science and Technology (AIST), “Development of conductive polymer films with high thermoelectric conversion performance,” AIST press release, [online], August 31, 2012, [retrieved August 17, 2020], Internet <https: / / www.aist.go.jp / aist_j / press_release / pr2012 / pr20120831 / pr20120831.html>. Summary of the Invention

[0009] The problem the invention aims to solve

[0010] In a thermoelectric conversion module with multiple thermoelectric conversion elements, it is required to electrically connect these elements via wiring. When multiple thermoelectric conversion elements are connected using wiring, heat from the high-temperature side of the thermoelectric conversion element is sometimes transferred to the low-temperature side via the wiring. When heat is transferred from the high-temperature side to the low-temperature side of the thermoelectric conversion element, the temperature difference between the two ends of the thermoelectric conversion element decreases, resulting in a reduction in the power generation capacity of the thermoelectric conversion element.

[0011] Therefore, the purpose of this invention is to solve the above problems and provide a thermoelectric conversion module that suppresses the reduction of power generation and a method for manufacturing the thermoelectric conversion module.

[0012] Solution for solving the problem

[0013] The purpose of this invention is to advantageously solve the above-mentioned problems. This invention provides a thermoelectric conversion module comprising: an insulating sheet substrate having a front and a back side; a plurality of thermoelectric conversion elements arranged in an elongated shape extending in a first direction and arranged along a second direction intersecting the first direction on the front side of the sheet substrate; and a wiring layer having a plurality of wirings electrically connecting adjacent thermoelectric conversion elements in series at both ends of the elongated shape, wherein all of the plurality of thermoelectric conversion elements are p-type or n-type thermoelectric conversion elements, and the thermal resistance of the wirings is greater than or equal to the thermal resistance of the thermoelectric conversion elements. With this structure, the decrease in temperature difference between the two ends of the thermoelectric conversion elements can be suppressed. By suppressing the decrease in temperature difference between the two ends of the thermoelectric conversion elements, the reduction in the power generation of the thermoelectric conversion elements can be suppressed. Therefore, a thermoelectric conversion module that suppresses the reduction in power generation can be provided.

[0014] Here, in the thermoelectric conversion module of the present invention, preferably, all of the plurality of thermoelectric conversion elements are p-type thermoelectric conversion elements. Sometimes, depending on the thermoelectric conversion material forming the thermoelectric conversion elements, the durability of p-type thermoelectric conversion elements is higher than that of n-type thermoelectric conversion elements. By having all of the plurality of thermoelectric conversion elements be p-type thermoelectric conversion elements, the thermoelectric conversion module can become a thermoelectric conversion module with excellent durability.

[0015] Furthermore, in the thermoelectric conversion module of the present invention, preferably, the resistance value of the wiring is less than or equal to the resistance value of the thermoelectric conversion element. With this structure, it is possible to suppress the situation where the current flowing through the thermoelectric conversion module is limited by the resistance value of the wiring.

[0016] Furthermore, in the thermoelectric conversion module of the present invention, preferably, all of the plurality of thermoelectric conversion elements are formed to contain carbon nanotubes. This structure further improves the mechanical strength of the thermoelectric conversion module and makes it lighter.

[0017] Furthermore, in the thermoelectric conversion module of the present invention, preferably, the plurality of thermoelectric conversion elements are formed not only on the front side of the sheet substrate but also on the back side. By forming thermoelectric conversion elements on both the front and back sides of the sheet substrate as described above, the density of thermoelectric conversion elements in the thermoelectric conversion module can be increased. By increasing the density of thermoelectric conversion elements in the thermoelectric conversion module, the thermoelectric conversion module can be miniaturized.

[0018] Furthermore, in the thermoelectric conversion module of the present invention, preferably, when viewed from above, a portion of each of the thermoelectric conversion elements formed on the front side overlaps with a portion of each of the thermoelectric conversion elements formed on the back side. With this structure, the thermoelectric conversion module can be miniaturized.

[0019] Furthermore, in the thermoelectric conversion module of the present invention, preferably, all of the plurality of thermoelectric conversion elements are rectangular in shape with approximately the same dimensions. This structure allows for miniaturization of the thermoelectric conversion module.

[0020] Furthermore, in the thermoelectric conversion module of the present invention, preferably, the plurality of thermoelectric conversion elements are configured such that the length of each of the plurality of thermoelectric conversion elements along the first direction, the width of each of the plurality of thermoelectric conversion elements along the second direction, and the thickness of each of the plurality of thermoelectric conversion elements are adjusted such that the resistance values ​​of each of the plurality of thermoelectric conversion elements are approximately the same. By making the resistance values ​​of the plurality of thermoelectric conversion elements the same, the power loss of the thermoelectric conversion module can be reduced.

[0021] Furthermore, in the thermoelectric conversion module of the present invention, preferably, the thickness of each of the plurality of thermoelectric conversion elements is approximately the same, the length of each of the plurality of thermoelectric conversion elements is different, and the width of each of the plurality of thermoelectric conversion elements is different.

[0022] Furthermore, in the thermoelectric conversion module of the present invention, preferably, the sheet substrate is trapezoidal in shape, and the sheet substrate includes a first edge corresponding to one of the two legs of the trapezoid and a second edge corresponding to the other leg of the trapezoid. The interval between the first edge and the second edge in the first direction widens along the second direction, and the plurality of thermoelectric conversion elements extend from the first edge to the second edge along the first direction. By using a trapezoidal shape for the sheet substrate, the flexibility in configuring the thermoelectric conversion module can be increased.

[0023] The object of the present invention is to advantageously solve the above-mentioned problems. In the manufacturing method of the thermoelectric conversion module of the present invention, the thermoelectric conversion module comprises: an insulating sheet substrate having a substrate including a front side and a back side, and an insulating layer formed on the front side of the substrate; a plurality of thermoelectric conversion elements arranged in an elongated shape extending in a first direction on the front side of the insulating layer, and arranged along a second direction intersecting the first direction; and a wiring layer having a plurality of wirings electrically connecting adjacent thermoelectric conversion elements in series at both ends of the elongated shape on the back side of the insulating layer. The manufacturing method of the thermoelectric conversion module includes... The method includes: a wiring layer forming process, in which the wiring layer is formed on the front side of the substrate; an insulating layer forming process, in which an insulating layer is formed on the substrate and the wiring layer such that only the two ends of each wiring constituting the wiring layer are exposed; an element forming process, in which a thermoelectric conversion element layer is formed on the insulating layer; a thermoelectric conversion element forming process, in which the thermoelectric conversion element layer is cut along a first direction to form a plurality of thermoelectric conversion elements arranged along a second direction; and a connection process, in which the two ends of the exposed wiring and the two ends of the plurality of thermoelectric conversion elements are connected in series. According to this manufacturing method, a thermoelectric conversion module that suppresses the reduction of power generation can be provided.

[0024] Furthermore, in the manufacturing method of the thermoelectric conversion module of the present invention, preferably, the thermoelectric conversion element layer is a layer formed comprising carbon nanotubes. With such a structure, it is possible to manufacture a thermoelectric conversion module with further improved mechanical strength and a lighter weight.

[0025] Furthermore, in the manufacturing method of the thermoelectric conversion module of the present invention, preferably, the thermoelectric conversion element forming step is performed using a UV laser, a nanosecond laser, or a femtosecond laser. By using a UV laser, a nanosecond laser, or a femtosecond laser, the heat generated by the laser can be reduced. By reducing the heat generated by the laser, the widening of the gap between the thermoelectric conversion elements in the second direction can be suppressed, and the density of the thermoelectric conversion elements in the thermoelectric conversion module can be increased.

[0026] Invention Effects

[0027] According to the present invention, a thermoelectric conversion module for suppressing power generation reduction and a method for manufacturing the thermoelectric conversion module can be provided. Attached Figure Description

[0028] Figure 1 This is an external view of the thermoelectric conversion module according to the first embodiment of the present invention.

[0029] Figure 2 It is along Figure 1 A cross-sectional view of the thermoelectric conversion module of line L1-L1 shown.

[0030] Figure 3 It is shown Figure 1 The diagram shows the wiring layer.

[0031] Figure 4 It is shown Figure 1 The diagram shows the current path in the thermoelectric conversion module.

[0032] Figure 5 This diagram illustrates the setting of thermal resistance values ​​for thermoelectric conversion elements and wiring.

[0033] Figure 6 It is shown Figure 1 The flowchart illustrates the manufacturing method of the thermoelectric conversion module.

[0034] Figure 7 This is a diagram showing the structure after the metal foil configuration process has been performed.

[0035] Figure 8 This is a diagram showing the structure after the insulation layer formation process has been performed.

[0036] Figure 9 This is a diagram showing the structure after carbon nanotube sheets are configured.

[0037] Figure 10 This is a diagram showing the structure after cutting carbon nanotube sheets.

[0038] Figure 11 It is shown Figure 3 The diagram shows a first variation of the wiring.

[0039] Figure 12 It is shown Figure 3 The diagram shows a second variation of the wiring.

[0040] Figure 13 This is an external view of the thermoelectric conversion module according to the second embodiment of the present invention.

[0041] Figure 14 It is along Figure 13 The cross-sectional view of the thermoelectric conversion module of the L2-L2 line shown.

[0042] Figure 15 It is along Figure 13 A cross-sectional view of the thermoelectric conversion module of line L3-L3 shown.

[0043] Figure 16 It is shown Figure 14 The diagram shows the wiring layer.

[0044] Figure 17 It is shown Figure 13 The diagram shows the current path in the thermoelectric conversion module.

[0045] Figure 18 It is shown Figure 13 The flowchart illustrates the manufacturing method of the thermoelectric conversion module.

[0046] Figure 19 This is a diagram showing the structure after the metal foil configuration process has been performed.

[0047] Figure 20 This diagram shows the structure after the process of forming an opening in the substrate has been performed.

[0048] Figure 21 This is a diagram showing the structure after the insulation layer formation process has been performed.

[0049] Figure 22 This is a diagram showing the structure after the process of forming an opening in the insulating layer has been performed.

[0050] Figure 23 This is a diagram showing the structure after carbon nanotube sheets are configured.

[0051] Figure 24 This is an external view of the thermoelectric conversion module according to the third embodiment of the present invention. Detailed Implementation

[0052] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, common constituent elements are labeled with the same reference numerals.

[0053] (First Implementation)

[0054] Figure 1 This is an external view of the thermoelectric conversion module 1 according to the first embodiment of the present invention. Figure 2 It is along Figure 1 A cross-sectional view of the thermoelectric conversion module 1 of line L1-L1 shown. Figure 3 It is shown Figure 1 The diagram shows the wiring layer 30. Figure 3 The structure shown corresponds to the implementation as described below. Figure 6 The structure after the formation process S11 of the wiring layer 30 as shown. Figure 4 It is shown Figure 1 The diagram shows the current path in the thermoelectric conversion module.

[0055] like Figure 1 As shown, the thermoelectric conversion module 1 can be disposed on the heat source 2. The thermoelectric conversion module 1 includes a first edge portion 1H and a second edge portion 1L on the sheet substrate 10 described later. The first edge portion 1H and the second edge portion 1L face each other. When the thermoelectric conversion module 1 is disposed on the heat source 2, the first edge portion 1H can be located near the heat source 2. When the thermoelectric conversion module 1 is disposed on the heat source 2, the second edge portion 1L can be located away from the heat source 2.

[0056] Since the first edge 1H is located closer to the heat source 2 than the second edge 1L, the temperature near the first edge 1H can be higher than the temperature near the second edge 1L. In other words, the temperature near the second edge 1L can be lower than the temperature near the first edge 1H.

[0057] exist Figure 1 In this embodiment, the first direction A1 is the direction in which the first edge portion 1H and the second edge portion 1L face each other. In this embodiment, the first direction A1 is set as the direction from the second edge portion 1L of the thermoelectric conversion module 1 toward the first edge portion 1H.

[0058] exist Figure 1 In this embodiment, the second direction A2 is orthogonal to the first direction A1. However, as long as the second direction A2 intersects the first direction A1, it does not necessarily have to be orthogonal to the first direction A1. In this embodiment, the second direction A2 is assumed to be from... Figure 1 The left side of the paper faces the right side of the paper.

[0059] exist Figure 1 In this context, the third direction A3 is a direction orthogonal to the plane including the first direction A1 and the second direction A2. In this embodiment, the third direction A3 is defined as originating from... Figure 1 The inside of the paper faces the direction closest to the front of the paper.

[0060] Unless otherwise stated, "up" refers to the side of the third party facing A3. Furthermore, unless otherwise stated, "down" refers to the side of the third party facing the opposite direction to A3.

[0061] like Figure 1 As shown, the thermoelectric conversion module 1, viewed from a third party to A3, has a rectangular or quadrilateral shape. Figure 1 As shown, the thermoelectric conversion module 1 includes a sheet substrate 10, thermoelectric conversion elements 21, 22, 23, 24, first bonding members 71, 72, 73, 74, and second bonding members 81, 82, 83, 84. Figure 3 As shown, the thermoelectric conversion module 1 has a wiring layer 30. The wiring layer 30 is located in the sheet substrate 10. The wiring layer 30 may be located on the back side 12B of the insulating layer 12, which will be described later. The wiring layer 30 has first electrodes 41, 42, 43, 44, second electrodes 51, 52, 53, 54, and wirings 61, 62, 63.

[0062] Hereinafter, without specifically distinguishing each of thermoelectric conversion elements 21 to 24, they will also be uniformly referred to as "thermoelectric conversion element 20". Figure 1A thermoelectric conversion module 1 with four thermoelectric conversion elements 20 is shown. However, the number of thermoelectric conversion elements 20 in the thermoelectric conversion module 1 can be arbitrary.

[0063] Hereinafter, without specifically distinguishing each of the first electrodes 41 to 44, they will all be uniformly referred to as "first electrode 40". Furthermore, without specifically distinguishing each of the second electrodes 51 to 54, they will all be uniformly referred to as "second electrode 50". Furthermore, without specifically distinguishing each of the wirings 61 to 63, they will all be uniformly referred to as "wiring 60". Figure 3 A wiring layer 30 is shown, having four first electrodes 40, four second electrodes 50, and three wirings 60. However, the number of first electrodes 40, the number of second electrodes 50, and the number of wirings 60 in the wiring layer 30 may correspond to the number of thermoelectric conversion elements 20 in the thermoelectric conversion module 1.

[0064] Hereinafter, without specifically distinguishing each of the first connecting members 71 to 74, they will also be uniformly referred to as "first connecting member 70". In addition, without specifically distinguishing each of the second connecting members 81 to 84, they will also be uniformly referred to as "second connecting member 80". Figure 1 A thermoelectric conversion module 1 having four first connecting members 70 and four second connecting members 80 is shown. However, the number of first connecting members 70 and second connecting members 80 of the thermoelectric conversion module 1 may correspond to the number of thermoelectric conversion elements 20 of the thermoelectric conversion module 1.

[0065] Hereinafter, the serial numbers assigned to the multiple thermoelectric conversion elements 20 of the thermoelectric conversion module 1 along the second direction A2 are also recorded as "Serial Number A". n (n is an integer). Let the sequence number A be... n The minimum value (n=1) is 1. Let the sequence number A be... n Thermoelectric conversion elements 21, 22, 23, and 24 are successively increased along the second direction A2. Their respective serial numbers are A. n Numbers 1, 2, 3, and 4.

[0066] Hereinafter, the serial numbers assigned to the plurality of first electrodes 40 of the wiring layer 30 along the second direction A2 are also recorded as "Serial Number B". n (n is an integer). Let the sequence number B n The minimum value (n=1) is 1. Let the sequence number B be... n The sequence number B is increased sequentially along the second direction A2 for the first electrodes 41, 42, 43, and 44. n Numbers 1, 2, 3, and 4.

[0067] Hereinafter, the serial numbers assigned to the plurality of second electrodes 50 of the wiring layer 30 along the second direction A2 are also recorded as "Serial Number C". n (n is an integer). Let the sequence number C n The minimum value (n=1) is 1. Let the sequence number C n The sequence numbering C is increased sequentially along the second direction A2 for the second electrodes 51, 52, 53, and 54. n Numbers 1, 2, 3, and 4.

[0068] Hereinafter, the serial numbers assigned to the multiple wirings 60 of the wiring layer 30 along the second direction A2 are also recorded as "Serial Number D". n (n is an integer). Let the sequence number D be... n The minimum value (n=1) is 1. Let the sequence number D be... n Increase sequentially along the second direction A2. Assign sequence number D to wirings 61, 62, and 63 along the second direction A2. n Numbers 1, 2, and 3.

[0069] Hereinafter, the serial numbers assigned to the plurality of first connecting members 70 of the thermoelectric conversion module 1 along the second direction A2 are also recorded as "Serial Number E". n (n is an integer). Let the sequence number E n The minimum value (n=1) is 1. Let the sequence number E n The numbering increases sequentially along the second direction A2. The first connecting members 71, 72, 73, and 74 are each numbered E. n Numbers 1, 2, 3, and 4.

[0070] Hereinafter, the serial numbers assigned to the plurality of second connecting members 80 of the thermoelectric conversion module 1 along the second direction A2 are also recorded as "Serial Number F". n (n is an integer). Let the sequence number F n The minimum value (n=1) is 1. Let the index F be... n The numbering increases sequentially along the second direction A2. The serial numbers F for the second connecting members 81, 82, 83, and 84 are respectively... n Numbers 1, 2, 3, and 4.

[0071] like Figure 1 The sheet substrate 10 shown is insulating. The sheet substrate 10 may be flexible. There are no particular limitations on the material used to form the sheet substrate 10; any insulating material can be used. The shape of the sheet substrate 10, viewed from a third direction A3, is a rectangle or other quadrilateral shape. The sheet substrate 10 may be parallel to a surface including the first direction A1 and the second direction A2.

[0072] The sheet substrate 10 includes the first edge portion 1H and the second edge portion 1L described above. For example... Figure 2 As shown, the sheet substrate 10 includes a front side 10A and a back side 10B. The front side 10A and the back side 10B face each other. The front side 10A is the side of the sheet substrate 10 facing the third direction A3. The back side 10B is the side of the sheet substrate 10 facing the third direction A3 in the opposite direction.

[0073] like Figure 2 As shown, the sheet substrate 10 has a substrate 11 and an insulating layer 12.

[0074] The substrate 11 is insulating. The substrate 11 may be flexible. There are no particular limitations on the material used to form the substrate 11; any material such as polyimide or epoxy glass can be used. Figure 1 As shown, the substrate 11 viewed from a third-party direction A3 has a rectangular or quadrilateral shape. The substrate 11 may be parallel to a surface containing the first direction A1 and the second direction A2.

[0075] like Figure 2 As shown, substrate 11 includes a front side 11A and a back side 11B. The front side 11A and the back side 11B face each other. The front side 11A is the side of substrate 11 facing the third direction A3. The back side 11B is the side of substrate 11 facing the third direction A3 in the opposite direction. The back side 11B may correspond to the back side 10B of sheet substrate 10.

[0076] The insulating layer 12 is insulating. The insulating layer 12 can be flexible. There are no particular limitations on the material used to form the insulating layer 12; any insulating material can be used. The insulating layer 12 can be located on the front side 11A of the substrate 11. Figure 1 As shown, the insulating layer 12, viewed from a third direction (A3), has a rectangular or quadrilateral shape. The insulating layer 12 may be parallel to the surface containing the first direction A1 and the second direction A2.

[0077] like Figure 2 As shown, the insulating layer 12 includes a front side 12A and a back side 12B. The front side 12A and the back side 12B face each other. The front side 12A is the side of the insulating layer 12 facing the third direction A3. The front side 12A may correspond to the front side 10A of the sheet substrate 10. The back side 12B is the side of the insulating layer 12 facing the opposite direction A3.

[0078] All thermoelectric conversion elements 21 to 24 are either p-type or n-type thermoelectric conversion elements. Here, depending on the thermoelectric conversion material forming the thermoelectric conversion element 20, sometimes the durability of one type (p-type) or the other (n-type) thermoelectric conversion element is higher than that of the other. Since all of the multiple thermoelectric conversion elements 20 in the thermoelectric conversion module 1 are either p-type or n-type thermoelectric conversion elements, the thermoelectric conversion module 1 can be a thermoelectric conversion module with excellent durability.

[0079] The thermoelectric conversion material used to form the thermoelectric conversion element 20 is not particularly limited, and bismuth-tellurium compounds, antimony compounds, silicon compounds, metal oxide compounds, Heussler alloy compounds, conductive polymer compounds, conductive fibers, and composite materials thereof can be used. Among these, conductive fibers are preferred, and fibrous carbon nanostructures such as carbon nanotubes (hereinafter also referred to as "CNTs") are more preferred. This is because using CNTs can further improve the mechanical strength of the thermoelectric conversion module 1 of the present invention and enable lightweighting. Furthermore, as for CNTs, there is no particular limitation; single-walled CNTs and / or multi-walled CNTs can be used, but single-walled CNTs are preferred. This is because single-walled CNTs tend to have advantages in thermoelectric properties (Seebeck coefficient). Furthermore, as single-walled carbon nanotubes, CNTs can be manufactured using the following method (super-growth method; refer to International Publication No. 2006 / 011655): A raw material compound and a carrier gas are supplied to a substrate having a catalyst layer for CNT manufacturing on the front side. During the synthesis of CNTs via chemical vapor deposition (CVD), a method is used to significantly enhance the catalytic activity of the catalyst layer by introducing a trace amount of oxidant (catalyst activating substance) into the system (hereinafter, CNTs manufactured according to this method are sometimes referred to as "SGCNTs"). Moreover, SGCNTs are characterized by numerous folds. Here, it can be considered that although CNTs have high thermal conductivity due to electron transfer, the reduction in thermal conductivity due to phonon vibrations is also significant. However, since SGCNTs have more folds than CNTs manufactured by other conventional methods, they become structures where phonon vibrations are less amplified, thus suppressing the reduction in thermal conductivity caused by phonon vibrations. Therefore, SGCNTs can be considered a more advantageous material as a thermoelectric conversion material compared to other conventional CNTs.

[0080] All thermoelectric conversion elements 21 to 24 can be formed to include CNTs. With such a structure, the mechanical strength of the thermoelectric conversion module 1 can be further improved, and the thermoelectric conversion module 1 can be made lighter.

[0081] For example, when the thermoelectric conversion material used to form the thermoelectric conversion element 20 is an organic material such as CNT, all thermoelectric conversion elements 21 to 24 can be p-type thermoelectric conversion elements. When the thermoelectric conversion material is organic, the thermoelectric conversion element 20 may oxidize due to oxygen and moisture in the atmosphere, which becomes a major cause of performance degradation. In this case, compared to p-type thermoelectric conversion elements, n-type thermoelectric conversion elements are more susceptible to oxidation caused by oxygen and moisture in the atmosphere; therefore, p-type thermoelectric conversion elements have higher durability than n-type thermoelectric conversion elements. For example, when the thermoelectric conversion material is organic, since all the multiple thermoelectric conversion elements 20 in the thermoelectric conversion module 1 are p-type thermoelectric conversion elements, the thermoelectric conversion module 1 can become a thermoelectric conversion module with excellent durability.

[0082] like Figure 1 As shown, the thermoelectric conversion element 20 extends along the first direction A1. Viewed from a third direction A3, the thermoelectric conversion element 20 is a long strip shape, such as a rectangle. The long side of the thermoelectric conversion element 20 is along the first direction A1. The long side of the thermoelectric conversion element 20 may be parallel to the first direction A1. The thermoelectric conversion elements 21 to 24 may have the same shape. Figure 2 As shown, the cross-sectional shape of the thermoelectric conversion element 20 can be a thin film.

[0083] like Figure 1 As shown, thermoelectric conversion elements 21-24 are arranged along the second direction A2 on the front side 10A of the sheet substrate 10, for example, the front side 12A of the insulating layer 12. For example, thermoelectric conversion elements 21-24 are arranged along the second direction A2 on the front side 12A of the insulating layer 12. The thermoelectric conversion elements 21-24 can be arranged with gaps along the second direction A2. The width of these gaps can be arbitrary, as long as insulation between adjacent thermoelectric conversion elements 20 in the second direction A2 can be ensured.

[0084] Each of the thermoelectric conversion elements 21 to 24 can be a rectangular shape of approximately the same size. Since each of the thermoelectric conversion elements 21 to 24 is a rectangular shape of approximately the same size, the thermoelectric conversion elements 21 to 24 can be efficiently arranged on the front side 10A of the sheet substrate 10. With this structure, the thermoelectric conversion module can be miniaturized.

[0085] The thermoelectric conversion element 20 includes a first end 20H and a second end 20L in the first direction A1. The first end 20H is located on the side of the first edge 1H of the thermoelectric conversion module 1. The second end 20L is located on the side of the second edge 1L of the thermoelectric conversion module 1. Furthermore, the first end 20H of the thermoelectric conversion elements 21, 22, 23, and 24 are also referred to as "first end 21H", "first end 22H", "first end 23H", and "first end 24H", respectively. Similarly, the second end 20L of the thermoelectric conversion elements 21, 22, 23, and 24 are also referred to as "second end 21L", "second end 22L", "second end 23L", and "second end 24L", respectively. Additionally, in... Figure 1 In the structure shown, the first ends 21H to 24H are positioned differently in the first direction A1. However, the first ends 21H to 24H can also be positioned identically in the first direction A1. Furthermore, in... Figure 1 In the structure shown, the second ends 21L to 24L are positioned differently in the first direction A1. However, the second ends 21L to 24L can also be positioned in the same position in the first direction A1.

[0086] The thermoelectric conversion element 20 generates electricity by utilizing the temperature difference between its first end 20H and its second end 20L. Specifically, since the first end 20H is located closer to the first edge 1H than the second end 20L, the temperature of the first end 20H of the thermoelectric conversion element 20 can be higher than the temperature of the second end 20L. Because the temperature of the first end 20H is higher than that of the second end 20L, a temperature difference is generated between the first end 20H and the second end 20L. This temperature difference creates a temperature gradient in the thermoelectric conversion element 20. By utilizing the Seebeck effect caused by this temperature gradient to generate an electromotive force, the thermoelectric conversion element 20 can generate electricity.

[0087] When the thermoelectric conversion element 20 generates electricity, it can produce a current flowing through the thermoelectric conversion element 20. For example, as Figure 4 As shown, currents I21, I22, I23, and I24 can be generated respectively flowing through thermoelectric conversion elements 21, 22, 23, and 24 in the first direction A1.

[0088] The thermoelectric conversion elements 21 to 24 can be configured such that the resistance values ​​of each of the thermoelectric conversion elements 21 to 24 are approximately the same, while adjusting the length of each of the thermoelectric conversion elements 21 to 24 along the first direction A1, the width of each of the thermoelectric conversion elements 21 to 24 along the second direction A2, and the thickness of each of the thermoelectric conversion elements 21 to 24 in the third direction A3. Here, when the resistance values ​​of the thermoelectric conversion elements 21 to 24 are different, when the thermoelectric conversion elements 21 to 24 are connected in series, the current that the thermoelectric conversion module 1 can generate is determined by the thermoelectric conversion element 20 with the smaller resistance value. By making the resistance values ​​of each of the thermoelectric conversion elements 21 to 24 approximately the same, the situation where the current that can be generated in the thermoelectric conversion module 1 is determined by the thermoelectric conversion element 20 with the smaller resistance value can be suppressed. With this structure, the power loss of the thermoelectric conversion module 1 can be reduced.

[0089] The first electrode 40, the second electrode 50, and the wiring 60 can be formed using the same conductive material or different conductive materials. There are no particular limitations on the conductive materials used to form the first electrode 40, the second electrode 50, and the wiring 60; any metal such as copper or aluminum can be used. Hereinafter, it will be assumed that the first electrode 40, the second electrode 50, and the wiring 60 are formed using the same conductive material.

[0090] The first electrode 40 can be located on the front side 11A of the substrate 11. The first electrodes 41 to 44 can be arranged with gaps along the second direction A2. The width of the gap can be arbitrary, as long as insulation between two adjacent first electrodes 40 in the second direction A2 can be ensured.

[0091] like Figure 1 As shown, at least a portion of the first electrode 40 may be exposed from the sheet substrate 10, for example, the insulating layer 12. At least a portion of the first electrode 40 exposed from the sheet substrate 10, for example, the insulating layer 12, may be electrically connected to the first end 20H of the thermoelectric conversion element 20 via the first bonding member 70.

[0092] In this embodiment, serial number B is exposed from the insulating layer 12. n At least a portion of the first electrode 40 can be connected to the serial number B n Same serial number E n The first connecting member 70 is electrically connected to the serial number B. n Same serial number A nThe first end 20H of the thermoelectric conversion element 20. For example, at least a portion of the first electrode 41 exposed from the insulating layer 12 is electrically connected to the first end 21H of the first thermoelectric conversion element 21 via the first bonding member 71. Furthermore, at least a portion of the second electrode 42 exposed from the insulating layer 12 is electrically connected to the first end 22H of the second thermoelectric conversion element 22 via the first bonding member 72. Furthermore, at least a portion of the third electrode 43 exposed from the insulating layer 12 is electrically connected to the first end 23H of the third thermoelectric conversion element 23 via the first bonding member 73. Furthermore, at least a portion of the fourth electrode 44 exposed from the insulating layer 12 is electrically connected to the first end 24H of the fourth thermoelectric conversion element 24 via the first bonding member 74.

[0093] Serial Number B n The position of the first electrode 40 in the second direction A2 can be the same as that of the serial number B. n Same serial number A n The thermoelectric conversion element 20 is located in the same position in the second direction A2. (Serial number B) n The first electrode 40 can be located at a position relative to the serial number B. n Same serial number A n The first end 20H of the thermoelectric conversion element 20 is closer to the first edge 1H of the thermoelectric conversion module 1. (Serial number B) n The first electrode 40 can be located at the same position as serial number B. n Same serial number A n The thermoelectric conversion element 20 is located between its first end 20H and the first edge 1H of the thermoelectric conversion module 1. For example, the first electrode 41 is located between the first end 21H and the first edge 1H of the first thermoelectric conversion element 21. For example, the first electrode 42 is located between the first end 22H and the first edge 1H of the second thermoelectric conversion element 22. For example, the first electrode 43 is located between the first end 23H and the first edge 1H of the third thermoelectric conversion element 23. For example, the first electrode 44 is located between the first end 24H and the first edge 1H of the fourth thermoelectric conversion element 24.

[0094] The resistance value of the first electrode 40 can be lower than or equal to the resistance value of the wiring 60. The first electrode 40 can be configured such that its resistance value is lower than or equal to the resistance value of the wiring 60. As an example, when the thickness of the third direction A3 of the first electrode 40 is the same as the thickness of the third direction A3 of the wiring 60, the width of the first electrode 40 along the second direction A2 can be greater than that of the wiring 60 as described later. Figure 5 The width W shown 60 Wider. With this structure, the resistance value of the first electrode 40 can be lower than that of the wiring 60.

[0095] The lead wire used to extract the power generated by the thermoelectric conversion module 1 can be electrically connected to any one of the plurality of first electrodes 40. As an example, the lead wire can be electrically connected to the first electrode 44.

[0096] like Figure 3 As shown, the second electrode 50 can be located on the front side 11A of the substrate 11. The second electrodes 51 to 54 can be arranged with a gap along the second direction A2. The width of the gap can be arbitrary, as long as insulation between two adjacent second electrodes 50 in the second direction A2 can be ensured.

[0097] like Figure 1 As shown, at least a portion of the second electrode 50 may be exposed from the sheet substrate 10, for example, the insulating layer 12. At least a portion of the second electrode 50 exposed from the sheet substrate 10, for example, the insulating layer 12, may be electrically connected to the second end 20L of the thermoelectric conversion element 20 via the second bonding member 80.

[0098] In this embodiment, the serial number C exposed from the insulating layer 12 n At least a portion of the second electrode 50 can be connected to the serial number C. n Same serial number F n The second connecting member 80 is electrically connected to the serial number C n Same serial number A n The second end 20L of the thermoelectric conversion element 20. For example, at least a portion of the first second electrode 51 exposed from the insulating layer 12 is electrically connected to the second end 21L of the first thermoelectric conversion element 21 via the first second bonding member 81. Furthermore, at least a portion of the second electrode 52 exposed from the insulating layer 12 is electrically connected to the second end 22L of the second thermoelectric conversion element 22 via the second second bonding member 82. Furthermore, at least a portion of the third second electrode 53 exposed from the insulating layer 12 is electrically connected to the second end 23L of the third thermoelectric conversion element 23 via the third second bonding member 83. Furthermore, at least a portion of the fourth second electrode 54 exposed from the insulating layer 12 is electrically connected to the second end 24L of the fourth thermoelectric conversion element 24 via the fourth second bonding member 84.

[0099] Serial Number C n The position of the second electrode 50 in the second direction A2 can be the same as that of the serial number C. n Same serial number A n The thermoelectric conversion element 20 is located in the same position in the second direction A2. (Serial number C) n The second electrode 50 can be located at a position relative to the serial number C. n Same serial number A n The second end 20L of the thermoelectric conversion element 20 is closer to the second edge 1L of the thermoelectric conversion module 1. (Serial number C) nThe second electrode 50 can be located at the same position as the serial number C. n Same serial number A n The second electrode 51 is located between the second end 20L of the thermoelectric conversion element 20 and the second edge 1L of the thermoelectric conversion module 1. For example, the first second electrode 51 is located between the second end 21L and the second edge 1L of the first thermoelectric conversion element 21. The second second electrode 52 is located between the second end 22L and the second edge 1L of the second thermoelectric conversion element 22. Furthermore, the third second electrode 53 is located between the second end 23L and the second edge 1L of the third thermoelectric conversion element 23. Furthermore, the fourth second electrode 54 is located between the second end 24L and the second edge 1L of the fourth thermoelectric conversion element 24.

[0100] The resistance value of the second electrode 50 can be less than or equal to the resistance value of the wiring 60. The second electrode 50 can be configured such that its resistance value is less than or equal to that of the wiring 60. As an example, when the thickness of the third direction A3 of the second electrode 50 is the same as the thickness of the third direction A3 of the wiring 60, the width of the second electrode 50 along the second direction A2 can be, for example, as described later. Figure 5 The width W shown 60 Wider. With this structure, the resistance value of the second electrode 50 can be lower than that of the wiring 60.

[0101] The lead wire used to extract the power generated by the thermoelectric conversion module 1 can be electrically connected to any one of the plurality of second electrodes 50. As an example, the lead wire can be electrically connected to the second electrode 51.

[0102] like Figure 2 As shown, wiring 60 can be located in the sheet substrate 10. (As illustrated...) Figure 3 As shown, wiring 60 can be located on the front side 11A of substrate 11 together with the first electrode 40 and the second electrode 50. Wiring 60 can be located on the back side 12B of insulating layer 12. Wiring 60 can be located on the back side 12B of insulating layer 12 together with the first electrode 40 and the second electrode 50.

[0103] Wiring 60 connects adjacent thermoelectric conversion elements 20 in the second direction A2 in series at both ends of the thermoelectric conversion element 20, namely the first end 20H and the second end 20L. In this embodiment, among two adjacent thermoelectric conversion elements 20 in the second direction A2, wiring 60 connects a first electrode 40 electrically connected to the first end 20H of one thermoelectric conversion element 20 and a second electrode 50 electrically connected to the second end 20L of the other thermoelectric conversion element 20.

[0104] like Figure 3As shown, multiple wirings 60 can electrically connect multiple first electrodes 40 and multiple second electrodes 50, thereby in accordance with the serial number A assigned to the thermoelectric conversion element 20. n The multiple thermoelectric conversion elements 20 are connected in series in sequence. As an example, number D... n Wiring 60 can be connected with serial number D n Same serial number E n The first electrode 40 and the serial number D n The larger of the serial number F n+1 The second electrode 50 is electrically connected. (Serial number D) n One end of wiring 60 can be connected to serial number D. n Same serial number E n The first electrode is 40. Serial number D n The other end of wiring 60 can be connected to the part numbered D. n The larger of the serial number F n+1 The second electrode is 50. (Serial number D) n The wiring 60 can be in a straight line from the serial number D. n Same serial number E n The first electrode 40 extends to a point greater than the number D. n The larger of the serial number F n+1 The second electrode 50.

[0105] For example, one end of wiring 61 (number 1) is electrically connected to first electrode 41 (number 1). The other end of wiring 61 (number 1) is electrically connected to second electrode 52 (number 2), which is one number higher than wiring 1. One end of wiring 62 (number 2) is electrically connected to first electrode 42 (number 2). The other end of wiring 62 (number 2) is electrically connected to second electrode 53 (number 3), which is one number higher than wiring 2. One end of wiring 63 (number 3) is electrically connected to first electrode 43 (number 3). The other end of wiring 63 (number 3) is electrically connected to second electrode 54 (number 4), which is one number higher than wiring 3.

[0106] With this structure, according to the serial number A assigned to the thermoelectric conversion element 20 n Multiple thermoelectric conversion elements 20 are connected in series in a specific order. When multiple thermoelectric conversion elements 20 are connected in series, as... Figure 4 As shown, when multiple thermoelectric conversion elements 20 generate electricity, a current path can be generated in the thermoelectric conversion module 1. Figure 4 In the diagram, currents I61, I62, and I63 are the currents flowing through wirings 61, 62, 63, and 64.

[0107] The first bonding member 70 is conductive. The first bonding member 70 can be formed using any component such as silver paste or solder. (Serial number E) n The first connecting member 70 can be connected with serial number E n Same serial number A nThe first end 20H of the thermoelectric conversion element 20 and the serial number E n Same serial number B n The first electrode 40 is electrically connected. (Serial number E) n The first connecting member 70 can be connected along the first direction A1 from the serial number E n Same serial number A n The first end 20H of the thermoelectric conversion element 20 extends to the point where it meets the serial number E. n Same serial number B n The first electrode 40.

[0108] For example, first bonding member 71 electrically connects the first end 21H of thermoelectric conversion element 21 and the first electrode 41. First bonding member 71 extends from the first end 21H of thermoelectric conversion element 21 to the first electrode 41 along the first direction A1. Furthermore, first bonding member 72 electrically connects the first end 22H of thermoelectric conversion element 22 and the first electrode 42. First bonding member 72 extends from the first end 22H of thermoelectric conversion element 22 to the first electrode 42 along the first direction A1. Furthermore, first bonding member 73 electrically connects the first end 23H of thermoelectric conversion element 23 and the first electrode 43. First bonding member 73 extends from the first end 23H of thermoelectric conversion element 23 to the first electrode 43 along the first direction A1. Furthermore, first bonding member 74 electrically connects the first end 24H of thermoelectric conversion element 24 and the first electrode 44. The first bonding member 74 extends along the first direction A1 from the first end 24H of the thermoelectric conversion element 24 to the first electrode 44.

[0109] The resistance value of the first bonding member 70 can be lower than or equal to the resistance value of the wiring 60. The first bonding member 70 can be configured such that its resistance value is lower than or equal to the resistance value of the wiring 60. By appropriately selecting the material of the first bonding member 70, its resistance value can be lower than or equal to the resistance value of the wiring 60. As an example, if the material of the wiring 60 is copper, the material of the first bonding member 70 can be silver paste.

[0110] The second bonding member 80 is conductive. The second bonding member 80 can be formed using any component such as silver paste or solder. (Serial number F) n The second connecting member 80 can be connected with the serial number F n Same serial number A n The second end 20L of the thermoelectric conversion element 20 and the serial number F n Same serial number C n The second electrode 50 is electrically connected. (Serial number F) nThe second joining member 80 can be connected along the first direction A1 from the serial number F n Same serial number A n The second end 20L of the thermoelectric conversion element 20 extends to the point where it meets the serial number F. n Same serial number C n The second electrode 50.

[0111] For example, second connecting member 81 (number 1) electrically connects the second end 21L of thermoelectric conversion element 21 (number 1) to the second electrode 51 (number 1). Second connecting member 81 extends from the second end 21L of thermoelectric conversion element 21 to the second electrode 51 along a first direction A1. Furthermore, second connecting member 82 (number 2) electrically connects the second end 22L of thermoelectric conversion element 22 (number 2) to the second electrode 52 (number 2). Second connecting member 82 extends from the second end 22L of thermoelectric conversion element 22 (number 2) to the second electrode 52 (number 2) along a first direction A1. Furthermore, second connecting member 83 (number 3) electrically connects the second end 23L of thermoelectric conversion element 23 (number 3) to the second electrode 53 (number 3). Second connecting member 83 extends from the second end 23L of thermoelectric conversion element 23 (number 3) to the second electrode 53 (number 3) along a first direction A1. Furthermore, second connecting member 84 (number 4) electrically connects the second end 24L of thermoelectric conversion element 24 (number 4) to the second electrode 54 (number 4). The second connecting member 84 extends along the first direction A1 from the second end 24L of the thermoelectric conversion element 24 to the second electrode 54.

[0112] The resistance value of the second bonding member 80 can be lower than or equal to the resistance value of the wiring 60. The second bonding member 80 can be configured such that its resistance is lower than or equal to the resistance value of the wiring 60. By appropriately selecting the material of the second bonding member 80, its resistance can be lower than or equal to the resistance value of the wiring 60. As an example, if the material of the wiring 60 is copper, the material of the second bonding member 80 can be silver paste.

[0113] Here, in this embodiment, the thermal resistance value of the wiring 60 is greater than or equal to the thermal resistance value of the thermoelectric conversion element 20. (Refer to...) Figure 5As explained below, wiring 60 can be configured such that its thermal resistance is greater than or equal to that of thermoelectric conversion element 20. By ensuring that the thermal resistance of wiring 60 is greater than or equal to that of thermoelectric conversion element 20, heat transfer from the first end 20H of thermoelectric conversion element 20 to the second end 20L of another thermoelectric conversion element 20 via wiring 60 can be suppressed. For example, heat transfer from the first end 21H of thermoelectric conversion element 21 to the second end 22L of thermoelectric conversion element 22 via wiring 61 can be suppressed. By suppressing heat transfer from the first end 20H of thermoelectric conversion element 20 to the second end 20L of another thermoelectric conversion element 20, the decrease in temperature difference between the first end 20H and the second end 20L of the thermoelectric conversion element 20 can be suppressed. By suppressing the decrease in temperature difference between the first end 20H and the second end 20L, the reduction in the power generation of the thermoelectric conversion element can be suppressed.

[0114] Figure 5 This diagram illustrates the setting of the thermal resistance values ​​of the thermoelectric conversion element 20 and the wiring 60. Hereinafter, the length, width, and thickness of the thermoelectric conversion element 20 will also be referred to as "length L". 20 "Width W" 20 "and thickness T" 20 Length L 20 Is it like this? Figure 1 The thermoelectric conversion element 20 shown is sized along the first direction A1. Width W 20 Is it like this? Figure 1 The width of the thermoelectric conversion element 20 shown along the second direction A2. Thickness T 20 Is it like this? Figure 2 The thickness of the thermoelectric conversion element 20 in the third direction A3 is shown. Furthermore, the length, width, and thickness of the wiring 60 are also described as "length L". 60 "Width W" 60 "and thickness T" 60 Length L 60 Is it like this? Figure 3 The serial number D shown n Wiring 60 from serial number D n Same serial number B n The first electrode 40 extends to a point greater than the number D. n The larger of the two is the number C. n+1 The length of the second electrode 50. Thickness T 60 Is it like this? Figure 2 The thickness of the third-direction A3 of the wiring 60 shown. Width W 60 The width of the wiring is 60 in a direction orthogonal to both the following direction and the third direction A3, which is as follows: Figure 3 The serial number D shown n Wiring 60 from serial number D n Same serial number Bn The first electrode 40 extends to a point greater than the number D. n The larger of the two is the number C. n+1 The direction of the second electrode 50.

[0115] The length L of the wiring 60 can be set such that the thermal resistance of the wiring 60 is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. 60 Width W 60 and thickness T 60 In this case, the length L of the wiring 60 can be set in a manner that satisfies the following formula (1). 60 Width W 60 and thickness T 60 .

[0116] (1 / κ 20 )×{L 20 / (T 20 ×W 20 )}≤(1 / κ 60 )×{L 60 / (T 60 ×W 60 Formula 1

[0117] In equation (1), the thermal conductivity κ 20 This refers to the thermal conductivity of the thermoelectric conversion element 20. Thermal conductivity κ 60 The thermal conductivity is 60 for the wiring.

[0118] Furthermore, the thermal resistance of the wiring 60 can be greater than or equal to the thermal resistance of the thermoelectric conversion element 20, and the resistance of the wiring 60 can be less than or equal to the resistance of the thermoelectric conversion element 20. In other words, the wiring 60 can be configured such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 20, and its resistance is less than or equal to the resistance of the thermoelectric conversion element 20. In this case, the length L of the wiring 60 can be set in such a way that it satisfies both equation (1) and equation (2). 60 Width W 60 and thickness T 60 By making the resistance of wiring 60 below the resistance of thermoelectric conversion element 20, it is possible to suppress... Figure 4 The current flowing through thermoelectric conversion module 1 is limited by the resistance value of wiring 60, as shown.

[0119] (1 / δ 20 )×{L 20 / (T 20 ×W 20 )}≥(1 / δ 60 )×{L 60 / (T 60 ×W 60 Equation 2

[0120] In equation (2), the conductivity δ 20 This is the conductivity of the thermoelectric conversion element 20. Conductivity δ 60 It is the conductivity of the wiring 60.

[0121] Here, from equations (1) and (2) above, it can be seen that the higher the thermal resistance of wiring 60, the higher the resistance of wiring 60 can be. That is to say, the higher the thermal resistance of wirings 61 to 63, the higher the resistance of wirings 61 to 63, and thus the overall resistance of thermoelectric conversion module 1 can be increased. The total resistance of wirings 61 to 63 can be set to about 10% of the overall resistance of thermoelectric conversion module 1. With this structure, even if the resistance of wirings 61 to 63 is increased by increasing the thermal resistance, the total resistance of wirings 61 to 63 can still account for the design error of the overall resistance of thermoelectric conversion module 1.

[0122] Examples of settings that satisfy equations (1) and (2) above can be summarized in Figure 5 The table shown. In Figure 5 The table shown indicates the thermal conductivity κ of the thermoelectric conversion element 20. 20 The conductivity δ of the thermoelectric conversion element 20 is 15 [W / mK]. 20 It is 900 [S / cm]. Furthermore, the length L of the thermoelectric conversion element 20... 20 Width W 20 and height T 20 The thicknesses are 15 mm, 1.5 mm, and 50 μm, respectively. The thermal resistance of this thermoelectric conversion element 20 is 13.3 K / W. Furthermore, the resistance of the thermoelectric conversion element 20 is 2.222 Ω.

[0123] In Example 1, the material of wiring 60 is copper. When the material of wiring 60 is copper, the thermal conductivity κ of wiring 60 is... 60 The conductivity δ of the wiring is 400 [W / mK], and the wiring length is 60. 60 6×10 7 [S / cm]. In Example 1, the wiring length L is 60. 60 Width W 60 and thickness T 60 The thicknesses are set to 16 mm, 0.15 mm, and 15 μm, respectively. The thermal resistance of the wiring 60 in this structure is 17.8 K / W. This thermal resistance of 17.8 K / W is greater than the thermal resistance of 13.3 K / W for the thermoelectric conversion element 20. Furthermore, the resistance of the wiring 60 is 0.001 Ω. This resistance is less than the resistance of 2.222 Ω for the thermoelectric conversion element 20.

[0124] In Example 2, similarly to Example 1, the material of wiring 60 is copper. In Example 2, the length L of wiring 60 is... 60 Width W 60 and thickness T 60 The thicknesses are set to 16 mm, 0.15 mm, and 20 μm, respectively. The thermal resistance of the wiring 60 in this structure is 13.3 K / W. This thermal resistance is equal to the thermal resistance of the thermoelectric conversion element 20. Furthermore, the resistance of the wiring 60 is 0.001 Ω. This resistance is less than the resistance of the thermoelectric conversion element 20, which is 2.222 Ω.

[0125] In this way, in the thermoelectric conversion module 1, the thermal resistance value of the wiring 60 is greater than or equal to the thermal resistance value of the thermoelectric conversion element 20. With this structure, as described above, it is possible to suppress the decrease in temperature difference between the first end 20H and the second end 20L in the thermoelectric conversion element 20. By suppressing the decrease in temperature difference between the first end 20H and the second end 20L, it is possible to suppress the reduction in power generation of the thermoelectric conversion element 20. Therefore, according to this embodiment, a thermoelectric conversion module 1 that suppresses the reduction in power generation can be provided.

[0126] (Manufacturing method of thermoelectric conversion module)

[0127] Figure 6 It is shown Figure 1 A flowchart illustrating the manufacturing method of the thermoelectric conversion module 1 is shown. Figure 6 As shown, the manufacturing method of the thermoelectric conversion module 1 in this embodiment includes the configuration step S10, the forming steps S11, S12, S13, S14, and the connection step S15, which will be described later. However, the manufacturing method of the thermoelectric conversion module 1 in this embodiment is not limited to the manufacturing method described below.

[0128] <Configuration Process S10>

[0129] like Figure 7 As shown, the configuration step S10 is the process of configuring the metal foil 130 on the substrate 11. The metal foil 130 can be configured on the front side 11A of the substrate 11. The metal foil 130 can be bonded to the front side 11A of the substrate 11 using any thermally conductive adhesive. The metal foil 130 can become the wiring layer 30 after the formation step S11, which will be described later. The metal foil 130 can be any metal foil such as copper or aluminum.

[0130] <Forming Process S11>

[0131] Forming process S11 (wiring layer formation process) involves patterning the metal foil 130 to achieve... Figure 3The process of forming a wiring layer 30 on the front side 11A of the substrate 11 as shown. For patterning the metal foil 130, known photolithography or the like can be used.

[0132] <Forming process S12>

[0133] Forming process S12 (insulating layer formation process) is as follows Figure 8 The process of forming an insulating layer 12 on the substrate 11 and the wiring layer 30 as shown. In the forming process S12, an insulating layer 12 can be formed on the substrate 11 and the wiring layer 30 as shown. Figure 3 An insulating layer 12 is formed by coating an insulating material onto the substrate 11 and wiring layer 30. For example... Figure 8 As shown, in the formation process S12, an insulating layer 12 is formed on the substrate 11 and the wiring layer 30 with the first electrode 40 and the second electrode 50 exposed. The first electrode 40 and the second electrode 50 can also be considered as the two ends of the wiring 60. That is, the formation process S12 can also be described as a process in which the insulating layer 12 is formed on the substrate 11 and the wiring layer 30 with only the two ends of the wiring 60 exposed from the insulating layer 12. The sheet substrate 10 is formed by forming the insulating layer 12 on the front side 11A of the substrate 11. That is, the sheet substrate 10 has a substrate 11 and an insulating layer 12 formed on the front side 11A of the substrate 11.

[0134] <Forming process S13>

[0135] Forming step S13 (element formation step) is the process of forming a thermoelectric conversion element layer on the insulating layer 12. The thermoelectric conversion element layer is a layer formed by including CNTs. After passing through forming steps S16 and the like described later, the thermoelectric conversion element layer can become a thermoelectric conversion element 20. As described above, when CNTs are used in the thermoelectric conversion material used to form the thermoelectric conversion element 20, the mechanical strength of the thermoelectric conversion module 1 can be further improved, and it can be made lighter. By forming the thermoelectric conversion element layer to include CNTs, it is possible to manufacture a thermoelectric conversion module 1 with further improved mechanical strength and lighter weight.

[0136] In this embodiment, the thermoelectric conversion element layer is configured as follows: Figure 9 The CNT sheet 120 (carbon nanotube sheet) is shown. The CNT sheet 120 is formed to contain CNTs. In this embodiment, the formation step S13 is the step of placing the CNT sheet 120 on the insulating layer 12. For example, the CNT sheet 120 can be placed on the front side 12A of the insulating layer 12, i.e., the front side 10A of the sheet substrate 10. The CNT sheet 120 can be bonded to the front side 12A of the insulating layer 12 using any adhesive sheet such as epoxy resin.

[0137] After undergoing the forming process S14 described later, the CNT sheet 120 can become the thermoelectric conversion element 20. When the thermoelectric conversion element 20 is formed as a p-type thermoelectric conversion element, a p-type CNT sheet 120 can be used. When the thermoelectric conversion element 20 is formed as an n-type thermoelectric conversion element, an n-type CNT sheet 120 can be used. The thickness of the third-direction A3 of the CNT sheet 120 can be approximately 50 μm. With the CNT sheet 120 having a thickness of approximately 50 μm, the electrical characteristics of the thermoelectric conversion element 20 can be utilized. For example, the electrical characteristics of the thermoelectric conversion element 20 can, to some extent, ensure the power generation of the thermoelectric conversion element 20.

[0138] Furthermore, in the forming process S13, instead of the CNT sheet 120, a CNT coating film formed by coating using a CNT dispersion can be disposed on the insulating layer 12. However, in the CNT coating film, since CNTs agglomerate during the drying process of the CNT dispersion, problems such as reduced conductivity or reduced self-support of the CNT coating film may occur. Moreover, in order to form a CNT coating film with a thickness of 50 μm by coating, a binder needs to be added to the CNT dispersion. However, when a binder is added to the CNT dispersion, the conductivity of the CNT coating film may decrease. By using the CNT sheet 120 in the forming process S13, these problems can be solved.

[0139] The CNT sheet 120 is not particularly limited, and the CNT sheet described in Japanese Patent Application No. 2018-065290 can be used. The CNT sheet 120 may comprise a bundle formed by multiple single-walled CNTs intertwined. The thickness of the bundle may be 1 μm or less. By having the bundle thickness of 1 μm or less, burrs on the cut surface of the thermoelectric conversion element 20 generated by the laser in the forming process S14 described later can be reduced. By reducing the burrs on the thermoelectric conversion element 20, short circuits caused by burrs on the thermoelectric conversion element 20 can be suppressed.

[0140] In the forming process S13, depending on the state of the CNT sheet 120, in order to reduce the damage caused by the laser in the forming process S14 described later, a sheet material as a cover can be arranged on the CNT sheet 120, or a resin material can be coated on the CNT sheet 120.

[0141] <Forming process S14>

[0142] Forming process S14 (thermoelectric conversion element formation process) is a process of forming a plurality of thermoelectric conversion elements 20 arranged in the second direction A2 by cutting the thermoelectric conversion element layer, i.e., the CNT sheet 120, along the first direction A1. By cutting the CNT sheet 120 along the first direction A1, a plurality of thermoelectric conversion elements 20 are formed as shown in the figure. Figure 10 The gap s1 shown can be used to divide two adjacent thermoelectric conversion elements 20 in the second direction A2.

[0143] The forming process S14 can be performed using a laser. In the forming process S14, the CNT sheet 120 can be cut along the first direction A1 using a laser. The laser can irradiate the CNT sheet 120 from the third direction A3. By cutting the CNT sheet 120 along the first direction A1 using a laser, a CNT sheet 120 can be formed as shown in the image. Figure 10 The gap s1 shown.

[0144] In the forming process S14, a UV (Ultra Violet) laser, a nanosecond laser, or a femtosecond laser can be used to cut the CNT sheet 120 along the first direction A1. However, the laser used in the forming process S14 is not limited to these lasers. Any laser capable of cutting only the CNT sheet 120 can be used in the forming process S14. For example, when using a UV laser with an output power of 5 [W], the UV laser can scan the area corresponding to the gap s1 of the CNT sheet 120 along the first direction A1 about ten to several dozen times.

[0145] Here, the in-plane thermal conductivity of the CNT sheet 120 is approximately 100 times that of the thickness direction of the CNT sheet 120. For example, the thermal conductivity of the second direction A2 of the CNT sheet 120 is approximately 100 times that of the third direction A3 of the CNT sheet 120. Therefore, if a heating laser such as a YAG (Yttrium Aluminum Garnet) laser is used in the forming process S14, the gap s1 widens in the second direction A2 when the CNT sheet 120 is cut along the first direction A1 by the heating laser. If the thickness of the third direction A3 of the CNT sheet 120 is approximately 50 μm, and a heating laser is used in the forming process S14, the gap s1 widens by approximately 5 mm in the second direction A2.

[0146] In contrast, if a UV laser, nanosecond laser, or femtosecond laser is used in the forming process S14, the heat generated by the laser can be reduced. By reducing the heat generated by the laser in the forming process S14, the widening of the gap s1 in the second direction A2 can be suppressed. By suppressing the widening of the gap s1 in the second direction A2, the density of the thermoelectric conversion elements 20 in the thermoelectric conversion module 1 can be increased. By increasing the density of the thermoelectric conversion elements 20 in the thermoelectric conversion module 1, the thermoelectric conversion module 1 can be miniaturized.

[0147] Furthermore, the spot diameter of the UV laser can be smaller than that of other lasers. For example, the spot diameter of the UV laser can be around 8 μm. Because the spot diameter of the UV laser is small, the focus of the UV laser can be concentrated on the CNT sheet 120. When a UV laser is used in the forming process S14, the heat generated by the UV laser is reduced by focusing the UV laser on the CNT sheet 120, thereby improving the patterning accuracy of the CNT sheet 120. For example, the width of the gap s1 along the second direction A2 can be around 0.05 mm to 0.1 mm. By improving the patterning accuracy of the CNT sheet 120, the density of the thermoelectric conversion elements 20 in the thermoelectric conversion module 1 can be further increased, and the thermoelectric conversion module 1 can be further miniaturized.

[0148] By using a laser in the forming process S14, the patterning of the CNT sheet 120 by the laser can be carried out under computer control. With this structure, the forming process S14 can be simplified.

[0149] <Connection process S15>

[0150] The connection process S15 is a process of electrically connecting the first electrode 40 and the second electrode 50 exposed from the insulating layer 12 to the two ends, namely the first end 20H and the second end 20L, of the multiple thermoelectric conversion elements 20 in a manner that all of the multiple thermoelectric conversion elements 20 are connected in series. Here, the first electrode 40 and the second electrode 50 can also be referred to as the two ends of the wiring 60. In other words, the connection process S15 can also be described as a process of electrically connecting the two ends of the wiring 60 exposed from the insulating layer 12 to the two ends of the multiple thermoelectric conversion elements 20 in a manner that all of the multiple thermoelectric conversion elements 20 are connected in series.

[0151] In this embodiment, the joining process S15 involves transferring the silver paste from... Figure 1 The process of coating the first end 20H of the thermoelectric conversion element 20 to the first electrode 40, and coating the second end 20L of the thermoelectric conversion element 20 to the second electrode 50 with silver paste.

[0152] In the connection process S15, by coating the first end 20H of the thermoelectric conversion element 20 to the first electrode 40 with silver paste, the first end 20H of the thermoelectric conversion element 20 and the first electrode 40 can be electrically connected. After drying, the silver paste can become the first connecting member 70.

[0153] In the connection process S15, by coating the second end 20L with silver paste and then applying it to the second electrode 50, the second end 20L of the thermoelectric conversion element 20 and the second electrode 50 can be electrically connected. The silver paste, after drying, can become the second connection member 80.

[0154] In this embodiment, the manufacturing method of the thermoelectric conversion module 1 allows for the cutting of the CNT sheet 120 along the first direction A1 using a UV laser, nanosecond laser, or femtosecond laser in the forming step S14. With this structure, as described above, it is possible to suppress... Figure 10 The gap s1 shown widens in the second direction A2. By suppressing the widening of the gap s1 in the second direction A2, the density of the thermoelectric conversion element 20 in the thermoelectric conversion module 1 can be increased, and the thermoelectric conversion module 1 can be miniaturized.

[0155] (A variation of wiring)

[0156] The structure in which the thermal resistance of wiring 60 is greater than or equal to the thermal resistance of thermoelectric conversion element 20 is not limited to the reference. Figure 5 The above structure.

[0157] For example, it can be achieved by adopting, such as Figure 11 The wiring 160A shown is configured such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. Wiring 160A includes multiple vias 160a. Because wiring 160A includes vias 160a, its thermal resistance can be higher than if it did not include vias 160a. The number of vias 160a included in wiring 160A can be appropriately set such that the thermal resistance of wiring 160A is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. Furthermore, the number of vias 160a included in wiring 160A can be appropriately set such that the thermal resistance of wiring 160A is greater than or equal to the thermal resistance of the thermoelectric conversion element 20, and the resistance of wiring 160A is less than or equal to the resistance of the thermoelectric conversion element 20.

[0158] For example, it can be achieved by adopting, such as Figure 12 The wiring 160B shown is configured such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. Wiring 160B extends in a serrated shape. By extending wiring 160B in a serrated shape, its length can be longer than when it does not extend in a serrated shape. Therefore, by extending wiring 160B in a serrated shape, its thermal resistance can be higher than when it does not extend in a serrated shape. The length of the serrated extension of wiring 160B can be appropriately set such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 20. The length of the serrated extension of wiring 160B can be appropriately set such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 20, and its resistance is less than or equal to the resistance of the thermoelectric conversion element 20.

[0159] (Second Implementation)

[0160] Figure 13This is an external view of the thermoelectric conversion module 201 according to the second embodiment of the present invention. Figure 14 It is along Figure 13 A cross-sectional view of the thermoelectric conversion module 201 of the L2-L2 line shown. Figure 15 It is along Figure 13 A cross-sectional view of the thermoelectric conversion module 201 of the L3-L3 line shown. Figure 16 It is shown Figure 14 The diagram shows the wiring layer 230. Figure 16 The structure shown corresponds to the implementation as described below. Figure 18 The structure of the wiring layer 230 after the forming process is shown. Figure 17 It is shown Figure 13 The diagram shows the current path in the thermoelectric conversion module.

[0161] Similar to the first embodiment, the thermoelectric conversion module 201 can be disposed on the heat source 2. In the thermoelectric conversion module 201, the sheet substrate 210 (described later) includes a first edge portion 201H and a second edge portion 201L. The first edge portion 201H and the second edge portion 201L face each other. Figure 1 Similar to the first edge portion 1H shown, when the thermoelectric conversion module 201 is disposed in the heat source 2, the first edge portion 201H can be located near the heat source 2. Figure 1 Similarly, when the thermoelectric conversion module 201 is disposed on the heat source 2, the second edge portion 201L shown can be located away from the heat source 2.

[0162] With Figure 1 Similarly, as shown in the diagram, the temperature near the first edge 201H can be higher than the temperature near the second edge 201L. In other words, the temperature near the second edge 201L can be lower than the temperature near the first edge 201H.

[0163] In the second embodiment, the first direction A1, the second direction A2, and the third direction A3 can also be used in the same way as in the first embodiment. In the second embodiment, the first direction A1 is the direction in which the first edge 201H and the second edge 201L face each other. The first direction A1 is set to be the direction from the second edge 201L toward the first edge 201H. Furthermore, in this embodiment, the third direction A3 is set to be from... Figure 13 The inside of the paper faces the direction closest to the front of the paper.

[0164] like Figure 13 As shown, the thermoelectric conversion module 201, viewed from a third party to A3, has a rectangular or quadrilateral shape. Figure 13 and Figure 14As shown, the thermoelectric conversion module 201 includes a sheet substrate 210, thermoelectric conversion elements 221, 222, 223, 224, 225, 226, 227, 228, a wiring layer 230, first bonding members 271, 272, 273, 274, 275, 276, 277, 278, and second bonding members 281, 282, 283, 284, 285, 286, 287, 288. Figure 14 As shown, wiring 230 is located in the sheet substrate 210. Wiring layer 230 may be located on the back side 212B of insulating layer 212, which will be described later. Figure 16 As shown, the wiring layer 230 has first electrodes 241, 242, 243, 244, 245, 246, 247, 248, second electrodes 251, 252, 253, 254, 255, 256, 257, 258, and wiring 261, 262, 263, 264, 265, 266, 267.

[0165] Hereinafter, without specifically distinguishing each of thermoelectric conversion elements 221 to 228, they will also be uniformly referred to as "thermoelectric conversion element 220". Figure 13 A thermoelectric conversion module 201 with eight thermoelectric conversion elements 220 is shown. However, the number of thermoelectric conversion elements 220 in the thermoelectric conversion module 201 can be arbitrary.

[0166] Hereinafter, without specifically distinguishing each of the first electrodes 241 to 248, they will also be uniformly referred to as "first electrode 240". Furthermore, without specifically distinguishing each of the second electrodes 251 to 258, they will also be uniformly referred to as "second electrode 250". Furthermore, without specifically distinguishing each of the wirings 261 to 267, they will also be uniformly referred to as "wiring 260". Figure 16 A wiring layer 230 is shown, having eight first electrodes 240, eight second electrodes 250, and seven wirings 260. However, the number of first electrodes 240, the number of second electrodes 250, and the number of wirings 260 in the wiring layer 230 may correspond to the number of thermoelectric conversion elements 220 in the thermoelectric conversion module 201.

[0167] Hereinafter, without specifically distinguishing each of the first joining members 271 to 278, they will also be uniformly referred to as "first joining member 270". In addition, without specifically distinguishing each of the second joining members 281 to 288, they will also be uniformly referred to as "second joining member 280". Figure 13A thermoelectric conversion module 201 with eight first bonding members 270 and eight second bonding members 280 is shown. However, the number of first bonding members 270 and second bonding members 280 in the thermoelectric conversion module 201 may correspond to the number of thermoelectric conversion elements 220 in the thermoelectric conversion module 201.

[0168] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of thermoelectric conversion elements 220 of the thermoelectric conversion module 201 along the second direction A2 are also recorded as "Serial Number A". n (n is an integer). Let the sequence number A be... n The minimum value (n=1) is 1. Let it be the sequence number A. n Thermoelectric conversion elements 221, 222, 223, 224, 225, 226, 227, and 228 are successively numbered A. n The numbers are 1, 2, 3, 4, 5, 6, 7, and 8.

[0169] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of first electrodes 240 of the wiring layer 230 along the second direction A2 are also recorded as "Serial Number B". n (n is an integer). Let the sequence number B n The minimum value (n=1) is 1. Let the sequence number B be... n The sequence number B is increased sequentially along the second direction A2 for the first electrodes 241, 242, 243, 244, 245, 246, 247, and 248. n The numbers are 1, 2, 3, 4, 5, 6, 7, and 8.

[0170] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of second electrodes 250 of the wiring layer 230 along the second direction A2 are also recorded as "Serial Number C". n (n is an integer). Let the sequence number C n The minimum value (n=1) is 1. Let the sequence number C n The numbers are increased sequentially along the second direction A2. The serial numbers C assigned to the second electrodes 251, 252, 253, 254, 255, 256, 257, and 258 along the second direction A2 are... n The numbers are 1, 2, 3, 4, 5, 6, 7, and 8.

[0171] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of wirings 260 of the wiring layer 230 along the second direction A2 are also recorded as "Serial Number D". n (n is an integer). Let the sequence number D be... n The minimum value (n=1) is 1. (Serial number D)n Increase sequentially along the second direction A2. Assign sequence number D to wirings 261, 262, 263, 264, 265, 266, and 267 along the second direction A2. n The numbers are 1, 2, 3, 4, 5, 6, and 7.

[0172] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of first connecting members 270 of the thermoelectric conversion module 201 along the second direction A2 are also recorded as "Serial Number E". n (n is an integer). Let the sequence number E n The minimum value (n=1) is 1. Let the sequence number E n The numbering increases sequentially along the second direction A2. The first connecting members 271, 272, 273, 274, 275, 276, 277, and 278 are each numbered E. n The numbers are 1, 2, 3, 4, 5, 6, 7, and 8.

[0173] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of second connecting members 280 of the thermoelectric conversion module 201 along the second direction A2 are also recorded as "Serial Number F". n (n is an integer). Let the sequence number F n The minimum value (n=1) is 1. Let the index F be... n The numbering increases sequentially along the second direction A2. The second connecting members 281, 282, 283, 284, 285, 286, 287, and 288 are each numbered F. n The numbers are 1, 2, 3, 4, 5, 6, 7, and 8.

[0174] The sheet substrate 210 is insulating. The sheet substrate 210 can be flexible. There are no particular limitations on the material used to form the sheet substrate 210; any insulating material can be used. The sheet substrate 210, viewed from a third direction A3, has a rectangular or quadrilateral shape. The sheet substrate 210 includes a first edge portion 201H and a second edge portion 201L. The sheet substrate 210 can be parallel to a surface including the first direction A1 and the second direction A2.

[0175] like Figure 14 As shown, the sheet substrate 210 includes a front side 210A and a back side 210B. The front side 210A and the back side 210B face each other. The front side 210A is the side of the sheet substrate 210 facing the third direction A3. The back side 210B is the side of the sheet substrate 210 facing the opposite direction to the third direction A3.

[0176] like Figure 14 As shown, the sheet substrate 210 has a substrate 211 and an insulating layer 212.

[0177] Substrate 211 is insulating. Substrate 211 may be flexible. The material of substrate 211 may be compatible with, for example... Figure 2 The substrate 11 shown is made of the same material. The shape of substrate 211, viewed from a third direction A3, is a rectangle or other quadrilateral shape. Substrate 211 can be parallel to the first direction A1 and the second direction A2.

[0178] The substrate 211 includes a front side 211A and a back side 211B. The front side 211A and the back side 211B face each other. The front side 211A is the side of the substrate 211 facing the third direction A3. The back side 211B is the side of the substrate 211 facing the third direction A3 in the opposite direction. The back side 211B may correspond to the back side 210B of the sheet substrate 210.

[0179] like Figure 14 As shown, the substrate 211 includes openings 211a, 211b, 211c, and 211d. Figure 13 As shown, the positions of openings 211a to 211d viewed from a third party towards A3 correspond to the positions of the first electrodes 242, 244, 246, and 248. Figure 15 As shown, the substrate 211 includes openings 211e, 211f, 211g, and 211h. Figure 13 As shown, the positions of openings 211e to 211h viewed from a third party towards A3 correspond to the positions of the second electrodes 252, 254, 256, and 258. The openings 211a to 211h viewed from a third party towards A3 are circular in shape. However, the shapes of openings 211a to 211h can be arbitrary.

[0180] Insulating layer 212 has insulating properties. Insulating layer 212 can be flexible. The material of insulating layer 212 can be compatible with, for example... Figure 2 The insulating layer 12 shown is made of the same material. The insulating layer 212, viewed from a third direction A3, is a rectangular or quadrilateral shape. The insulating layer 212 may be parallel to the surface containing the first direction A1 and the second direction A2.

[0181] The insulating layer 212 includes a front side 212A and a back side 212B. The front side 212A and the back side 212B face each other. The front side 212A is the side of the insulating layer 212 facing the third direction A3. The front side 212A may correspond to the front side 210A of the sheet substrate 210. The back side 212B is the side of the insulating layer 212 facing the third direction A3 in the opposite direction.

[0182] like Figure 14 As shown, the insulating layer 212 includes openings 212a, 212b, 212c, and 212d. Figure 13As shown, the positions of openings 212a to 212d viewed from a third party towards A3 correspond to the positions of the first electrodes 241, 243, 245, and 247. Figure 15 As shown, the insulating layer 212 includes openings 212e, 212f, 212g, and 212h. (As...) Figure 13 As shown, the positions of openings 212e to 212h viewed from a third party towards A3 correspond to the positions of the second electrodes 251, 253, 255, and 257. The openings 212a to 212h viewed from a third party towards A3 are circular in shape. However, the shapes of openings 212a to 212h can be arbitrary.

[0183] All thermoelectric conversion elements 221 to 228 are either p-type or n-type thermoelectric conversion elements. There are no particular limitations on the thermoelectric conversion material used to form thermoelectric conversion element 220; the thermoelectric conversion material described in the first embodiment can be used. As described in the first embodiment, for example, if the thermoelectric conversion material used to form thermoelectric conversion element 220 is an organic material such as CNT, all thermoelectric conversion elements 221 to 228 can be p-type thermoelectric conversion elements. As described in the first embodiment, all thermoelectric conversion elements 221 to 228 can also be formed to contain CNTs.

[0184] like Figure 13 As shown, the thermoelectric conversion element 220 extends along the first direction A1. Viewed from a third direction A3, the thermoelectric conversion element 220 is a long strip shape, such as a rectangle. The long side of the thermoelectric conversion element 220 is along the first direction A1. The long side of the thermoelectric conversion element 220 may be parallel to the first direction A1. The thermoelectric conversion elements 221 to 228 may have the same shape. Figure 14 and Figure 15 As shown, the cross-sectional shape of the thermoelectric conversion element 220 can be a thin film.

[0185] Multiple thermoelectric conversion elements 220 are formed not only on the front side 210A of the sheet substrate 210, but also on the back side 210B of the sheet substrate 210. In this embodiment, serial number A n An odd number of thermoelectric conversion elements 220 are formed on the front side 210A. For example, thermoelectric conversion elements 221, 223, 225, and 227 are formed on the front side 210A. Furthermore, in this embodiment, the number A... n An even number of thermoelectric conversion elements 220 are formed on the back surface 210B. For example, thermoelectric conversion elements 222, 224, 226, and 228 are formed on the back surface 210B. (Serial number A) n An odd number of thermoelectric conversion elements 220 can be disposed on the front side 212A of the insulating layer 212, numbered A. nAn even number of thermoelectric conversion elements 220 can be disposed on the back side 211B of the substrate 211.

[0186] In this way, by forming thermoelectric conversion elements 220 on both the front side 210A and the back side 210B of the sheet substrate 210, the density of thermoelectric conversion elements 220 in the thermoelectric conversion module 201 can be increased. By increasing the density of thermoelectric conversion elements 220 in the thermoelectric conversion module 201, the thermoelectric conversion module 201 can be miniaturized.

[0187] Thermoelectric conversion elements 221-228 are arranged along the second direction A2. In this embodiment, thermoelectric conversion elements 221, 223, 225, and 227 can be arranged with a gap along the second direction A2 on the front side 210A of the sheet substrate 210. The width of this gap can be arbitrary, as long as insulation between two adjacent thermoelectric conversion elements 220 in the second direction A2 can be ensured. Furthermore, thermoelectric conversion elements 222, 224, 226, and 228 can be arranged with a gap along the second direction A2 on the back side 210B of the sheet substrate 210. The width of this gap can be arbitrary, as long as insulation between two adjacent thermoelectric conversion elements 220 in the second direction A2 can be ensured.

[0188] like Figure 13 As shown, when the sheet substrate 210 is viewed from above, i.e., from a third party to A3, at least a portion of each thermoelectric conversion element 220 formed on the front side 210A overlaps with at least a portion of each thermoelectric conversion element 220 formed on the back side 210B. By ensuring that at least a portion of each thermoelectric conversion element 220 on the front side 210A overlaps with at least a portion of each thermoelectric conversion element 220 on the back side 210B when viewed from a third party to A3, the thermoelectric conversion module 201 can be miniaturized. However, when viewed from a third party to A3, at least a portion of each thermoelectric conversion element 220 formed on the front side 210A may not overlap with at least a portion of each thermoelectric conversion element 220 formed on the back side 210B.

[0189] With Figure 1Similar to the thermoelectric conversion element 20 shown, the thermoelectric conversion element 220 includes a first end 220H and a second end 220L in the first direction A1. The first end 220H is located on the side of the first edge 201H of the thermoelectric conversion module 201. The second end 220L is located on the side of the second edge 201L of the thermoelectric conversion module 201. In addition, the first end 220H of thermoelectric conversion elements 221 to 228 are also referred to as "first end 221H", "first end 222H", "first end 223H", "first end 224H", "first end 225H", "first end 226H", "first end 227H" and "first end 228H", respectively. Furthermore, the second end 220L of the thermoelectric conversion elements 221-228 is also described as "second end 221L", "second end 222L", "second end 223L", "second end 224L", "second end 225L", "second end 226L", "second end 227L" and "second end 228L", respectively. Additionally, in Figure 13 In the structure shown, the first ends 221H to 228H are positioned differently in the first direction A1. However, the first ends 221H to 228H can also be positioned identically in the first direction A1. Furthermore, in... Figure 1 In the structure shown, the second ends 221L to 228L are positioned differently in the first direction A1. However, the second ends 221L to 228L can also be positioned in the same position in the first direction A1.

[0190] When viewed from a third party towards A3, according to the structure of the wiring layer 230, the positions of the first ends 222H, 224H, 226H, and 228H in the first direction A1 can be different from or the same as the positions of the first ends 221H, 223H, 225H, and 227H in the first direction A1.

[0191] With Figure 1 Similar to the thermoelectric conversion element 20 shown, the thermoelectric conversion element 220 can generate electricity by creating a temperature difference between the first end 220H and the second end 220L. When the thermoelectric conversion element 220 generates electricity, it can generate a current flowing through the thermoelectric conversion element 220. For example, as... Figure 17 As shown, currents I221, I222, I223, I224, I225, I226, I227, and I228 can be generated respectively flowing through thermoelectric conversion elements 221, 222, 223, 224, 225, 226, 227, and 228 in the first direction A1.

[0192] As described in the first embodiment, the shape of each of the thermoelectric conversion elements 221 to 228 can be a rectangular shape of approximately the same size. As described in the first embodiment, the thermoelectric conversion elements 221 to 228 can be configured such that the resistance values ​​of each of the thermoelectric conversion elements 221 to 228 are approximately the same, and the length of each of the thermoelectric conversion elements 221 to 228 along the first direction A1, the width of each of the thermoelectric conversion elements 221 to 228 along the second direction A2, and the thickness of each of the thermoelectric conversion elements 221 to 228 in the third direction A3 are adjusted.

[0193] The first electrode 240, the second electrode 250, and the wiring 260 can be formed from the same conductive material or from different conductive materials. There are no particular limitations on the conductive materials used to form the first electrode 240, the second electrode 250, and the wiring 260; any metal such as copper or aluminum can be used. Hereinafter, it will be assumed that the first electrode 240, the second electrode 250, and the wiring 260 are formed from the same conductive material.

[0194] The first electrode 240 can be located on the front side 211A of the substrate 211. For example... Figure 13 As shown, the first electrodes 241-248 can be arranged with gaps along the second direction A2. The width of the gap can be arbitrary, as long as insulation can be ensured between two adjacent first electrodes 240 in the second direction A2.

[0195] At least a portion of the first electrode 240 may be exposed from the sheet substrate 210, i.e., substrate 211 or insulating layer 212. At least a portion of the first electrode 240 exposed from substrate 211 or insulating layer 212 may be electrically connected to the first end 220H of thermoelectric conversion element 220 by the first bonding member 270.

[0196] In this embodiment, such as Figure 14 As shown, serial number B n At least a portion of the odd-numbered first electrodes 240 may be exposed from the openings in the insulating layer 212. For example, number B... n At least a portion of the odd-numbered first electrode 241 may be exposed from the opening 212a of the insulating layer 212. Furthermore, serial number B... n At least a portion of the odd-numbered first electrodes 243 may be exposed from the opening 212b of the insulating layer 212. (Sequence number B) n At least a portion of the odd-numbered first electrodes 245 may be exposed from the opening 212c of the insulating layer 212. (Sequence number B) n At least a portion of the first electrode 247, which is an odd number, may be exposed from the opening 212d of the insulating layer 212.

[0197] like Figure 14As shown, serial number B is exposed from the opening of the insulating layer 212. n At least a portion of the first electrode 240, which is odd in number, can be connected with the sequence number B. n Same serial number E n The first connecting member 270 is electrically connected to the serial number B. n Same serial number A n The first end 220H of the thermoelectric conversion element 220. For example, serial number B n At least a portion of each of the odd-numbered first electrodes 241, 243, 245, and 247 can be exposed from openings 212a to 212d in the insulating layer 212. At least a portion of the first electrode 241 exposed from opening 212a is electrically connected to the first end 221H of the first thermoelectric conversion element 221 via the first bonding member 271. At least a portion of the first electrode 243 exposed from opening 212b is electrically connected to the first end 223H of the third thermoelectric conversion element 223 via the first bonding member 273. At least a portion of the first electrode 245 exposed from opening 212c is electrically connected to the first end 225H of the fifth thermoelectric conversion element 225 via the first bonding member 275. At least a portion of the first electrode 247 exposed from opening 212d is electrically connected to the first end 227H of the seventh thermoelectric conversion element 227 via the first bonding member 277.

[0198] In this embodiment, such as Figure 14 As shown, serial number B n At least a portion of the even-numbered first electrode 240 may be exposed from the opening in the substrate 211. For example, number B n At least a portion of the even-numbered first electrode 242 can be exposed from the opening 211a of the substrate 211. Furthermore, serial number B... n At least a portion of the even-numbered first electrode 244 can be exposed from the opening 211b of the substrate 211. Furthermore, serial number B... n At least a portion of the even-numbered first electrode 246 can be exposed from the opening 211c of the substrate 211. Furthermore, serial number B... n At least a portion of the even-numbered first electrodes 248 may be exposed from the opening 211d of the substrate 211.

[0199] like Figure 14 As shown, serial number B is exposed through the opening of substrate 211. n At least a portion of the even-numbered first electrode 240 can be connected with the serial number B. n Same serial number E n The first connecting member 270 is electrically connected to the serial number B. n Same serial number A nThe first end 220H of the thermoelectric conversion element 220. For example, serial number B n At least a portion of each of the even-numbered first electrodes 242, 244, 246, and 248 can be exposed from openings 211a to 211d of the substrate 211. At least a portion of the second first electrode 242 exposed from opening 211a is electrically connected to the first end 222H of the second thermoelectric conversion element 222 via the second first bonding member 272. At least a portion of the fourth first electrode 244 exposed from opening 211b is electrically connected to the first end 224H of the fourth thermoelectric conversion element 224 via the fourth first bonding member 274. At least a portion of the sixth first electrode 246 exposed from opening 211c is electrically connected to the first end 226H of the sixth thermoelectric conversion element 226 via the sixth first bonding member 276. At least a portion of the eighth first electrode 248 exposed from opening 211d is electrically connected to the first end 222H of the eighth thermoelectric conversion element 228 via the eighth first bonding member 278.

[0200] like Figure 13 As shown, serial number B n The position of the first electrode 240 in the second direction A2 can be the same as that of the serial number B. n Same serial number A n The thermoelectric conversion element 220 is located in the same position in the second direction A2. (Serial number B) n The first electrode 240 can be located at a position relative to the number B. n Same serial number A n The first end 220H of the thermoelectric conversion element 220 is closer to the first edge 201H of the thermoelectric conversion module 201. (Sequence number B) n The first electrode 240 can be located at the same position as serial number B. n Same serial number A n The thermoelectric conversion element 220 is located between its first end portion 220H and its first edge portion 201H. For example, first electrodes 241, 243, 245, and 247 are located between each of the first ends 221H, 223H, 225H, and 227H and the first edge portion 201H, respectively. Furthermore, first electrodes 242, 244, 246, and 248 are located between each of the first ends 222H, 224H, 226H, and 228H and the first edge portion 201H, respectively.

[0201] The resistance value of the first electrode 240 can be less than or equal to the resistance value of the wiring 260. As described in the first embodiment, the first electrode 240 can be configured such that the resistance value of the first electrode 240 is less than or equal to the resistance value of the wiring 260.

[0202] As described in the first embodiment, the lead-out wiring for drawing out the power generated by the thermoelectric conversion module 201 can be electrically connected to any one of the plurality of second electrodes 240. In this embodiment, the lead-out wiring can be electrically connected to the first electrode 248.

[0203] The second electrode 250 can be located on the front side 211A of the substrate 211. For example... Figure 13 As shown, the second electrodes 251-258 can be arranged with gaps along the second direction A2. The width of the gap can be arbitrary, as long as insulation can be ensured between two adjacent second electrodes 250 in the second direction A2.

[0204] At least a portion of the second electrode 250 may be exposed from the sheet substrate 210, i.e., substrate 211 or insulating layer 212. At least a portion of the second electrode 250 exposed from substrate 211 or insulating layer 212 may be electrically connected to the second end 220L of thermoelectric conversion element 220 by the second bonding member 280.

[0205] In this embodiment, such as Figure 15 As shown, serial number C n At least a portion of the odd-numbered second electrodes 250 may be exposed from the openings in the insulating layer 212. For example, number C n At least a portion of the odd-numbered second electrodes 251 can be exposed from the opening 212e of the insulating layer 212. Furthermore, serial number C... n At least a portion of the odd-numbered second electrodes 253 may be exposed from the opening 212f of the insulating layer 212. Furthermore, serial number C... n At least a portion of the odd-numbered second electrodes 255 can be exposed from the opening 212g of the insulating layer 212. Furthermore, serial number C... n At least a portion of the odd-numbered second electrodes 257 may be exposed from the opening 212h of the insulating layer 212.

[0206] like Figure 15 As shown, serial number C is exposed from the opening of the insulating layer 212. n At least a portion of the odd-numbered second electrode 250 can be connected with the serial number C. n Same serial number F n The second connecting member 280 is electrically connected to the serial number C n Same serial number A n The second end 220L of the thermoelectric conversion element 220. For example, serial number C nAt least a portion of each of the odd-numbered second electrodes 251, 253, 255, and 257 is exposed from openings 212e to 212h in the insulating layer 212. At least a portion of the first second electrode 251 exposed from opening 212e is electrically connected to the second end 221L of the first thermoelectric conversion element 221 via the first second bonding member 281. At least a portion of the third second electrode 253 exposed from opening 212f is electrically connected to the second end 223L of the third thermoelectric conversion element 223 via the third second bonding member 283. At least a portion of the fifth second electrode 255 exposed from opening 212g is electrically connected to the second end 225L of the fifth thermoelectric conversion element 225 via the fifth second bonding member 285. At least a portion of the seventh second electrode 257 exposed from opening 212h is electrically connected to the second end 227L of the seventh thermoelectric conversion element 227 via the seventh second bonding member 287.

[0207] In this embodiment, such as Figure 15 As shown, serial number C n At least a portion of the even-numbered second electrodes 250 may be exposed from the substrate 211. For example, number C n At least a portion of the even-numbered second electrodes 252 may be exposed from the opening 211e of the substrate 211. (Serial number C) n At least a portion of the even-numbered second electrodes 254 may be exposed from the opening 211f of the substrate 211. (Serial number C) n At least a portion of the even-numbered second electrodes 256 can be exposed from the opening 211g of the substrate 211. (Serial number C) n At least a portion of the even-numbered second electrodes 258 may be exposed from the opening 211h of the substrate 211.

[0208] like Figure 15 As shown, serial number C is exposed from the opening of substrate 211. n At least a portion of the even-numbered second electrode 250 can be connected with the serial number C. n Same serial number F n The second connecting member 280 is electrically connected to the serial number C n Same serial number A n The second end 220L of the thermoelectric conversion element 220. For example, serial number C nAt least a portion of each of the even-numbered second electrodes 252, 254, 256, and 258 is exposed from openings 211e to 211h of the substrate 211. At least a portion of the second electrode 252 exposed from opening 211e is electrically connected to the second end 222L of the thermoelectric conversion element 222 via the second bonding member 282. At least a portion of the second electrode 254 exposed from opening 211f is electrically connected to the second end 224L of the thermoelectric conversion element 224 via the second bonding member 284. At least a portion of the second electrode 256 exposed from opening 211g is electrically connected to the second end 226L of the thermoelectric conversion element 226 via the second bonding member 286. At least a portion of the second electrode 258 exposed from opening 211h is electrically connected to the second end 228L of the thermoelectric conversion element 228 via the second bonding member 288.

[0209] like Figure 13 As shown, serial number C n The position of the second electrode 250 in the second direction A2 can be the same as that of the serial number C. n Same serial number A n The thermoelectric conversion element 220 is located in the same position in the second direction A2. (Serial number C) n The second electrode 250 can be located at a position relative to the serial number C. n Same serial number A n The second end 220L of the thermoelectric conversion element 220 is closer to the second edge 201L side of the thermoelectric conversion module 201. (Serial number C) n The second electrode 250 can be located at the same position as serial number C. n Same serial number A n The thermoelectric conversion element 220 is located between its second end portion 220L and its second edge portion 201L. For example, second electrodes 251, 253, 255, and 257 are located between each of the second ends 221L, 223L, 225L, and 227L and the second edge portion 201L, respectively. Furthermore, second electrodes 252, 254, 256, and 258 are located between each of the second ends 222L, 224L, 226L, and 228L and the second edge portion 201L, respectively.

[0210] The resistance value of the second electrode 250 can be less than or equal to the resistance value of the wiring 260. As described in the first embodiment, the second electrode 250 can be configured such that the resistance value of the second electrode 250 is less than or equal to the resistance value of the wiring 260.

[0211] As described in the first embodiment, the lead-out wiring for drawing out the power generated by the thermoelectric conversion module 201 can be electrically connected to any one of the plurality of second electrodes 250. In this embodiment, the lead-out wiring can be electrically connected to the second electrode 251.

[0212] like Figure 16 As shown, wiring 260 can be located in substrate 210. Figure 16 As shown, wiring 260 can be located on the front side 211A of substrate 211 together with the first electrode 240 and the second electrode 250. Wiring 260 can be located on the back side 212B of insulating layer 212. Wiring 260 can be located on the back side 212B of insulating layer 212 together with the first electrode 240 and the second electrode 250.

[0213] Wiring 260 electrically connects adjacent thermoelectric conversion elements 220 in the second direction A2, namely the first end 220H and the second end 220L, at both ends of the thermoelectric conversion element 220. In this embodiment, among two adjacent thermoelectric conversion elements 220 in the second direction A2, wiring 260 electrically connects a first electrode 240 electrically connected to the first end 220H of one thermoelectric conversion element 220 and a second electrode 250 electrically connected to the second end 220L of the other thermoelectric conversion element 220.

[0214] like Figure 16 As shown, multiple wirings 260 can electrically connect multiple first electrodes 240 and multiple second electrodes 250, according to the serial number A assigned to the thermoelectric conversion element 220. n The multiple thermoelectric conversion elements 220 are connected in series in sequence. As an example, number D... n Wiring 260 can be connected with serial number D n Same serial number E n The first electrode 240 and the serial number D n The larger of the serial number F n+1 The second electrode 250 is electrically connected. (Serial number D) n One end of wiring 260 can be connected to serial number D. n Same serial number E n The first electrode is 240. (Serial number D) n The other end of the 260-wire can be connected to the part numbered D. n The larger of the serial number F n+1 The second electrode is 250. (Serial number D) n The wiring 260 can be in a straight line from the sequence number D n Same serial number E n The first electrode 240 extends to a point greater than the number D. n The larger of the serial number F n+1 The second electrode is 250.

[0215] For example, one end of wiring 261 (number 1) is electrically connected to first electrode 241 (number 1). The other end of wiring 261 is electrically connected to second electrode 252 (number 2), which is one number higher than wiring 1. One end of wiring 262 (number 2) is electrically connected to first electrode 242 (number 2). The other end of wiring 262 (number 2) is electrically connected to second electrode 253 (number 3), which is one number higher than wiring 253. One end of wiring 263 (number 3) is electrically connected to first electrode 243 (number 3). The other end of wiring 263 (number 3) is electrically connected to second electrode 254 (number 4), which is one number higher than wiring 3. One end of wiring 264 (number 4) is electrically connected to first electrode 244 (number 4). Wiring 4... The other end of wire 264 is electrically connected to the second electrode 255, which is one number higher than wire 4. One end of wire 265 is electrically connected to the first electrode 245, which is one number higher than wire 4. The other end of wire 265 is electrically connected to the second electrode 256, which is one number higher than wire 5. One end of wire 266 is electrically connected to the first electrode 246, which is one number higher than wire 6. The other end of wire 266 is electrically connected to the second electrode 257, which is one number higher than wire 6. One end of wire 267 is electrically connected to the first electrode 247, which is one number higher than wire 7. The other end of wire 267 is electrically connected to the second electrode 258, which is one number higher than wire 7.

[0216] With this structure, it is possible to follow the sequence number A assigned to the thermoelectric conversion element 220. n Multiple thermoelectric conversion elements 220 are connected in series in sequence. When multiple thermoelectric conversion elements 220 are electrically connected in series, such as Figure 17 As shown, when multiple thermoelectric conversion elements 220 generate electricity, a current path can be generated in the thermoelectric conversion module 201. Figure 17 In the diagram, currents I261, I262, I263, I264, I265, I266, and I267 are the currents flowing through wirings 261, 262, 263, 264, 265, 266, and 267, respectively.

[0217] The thermal resistance of the wiring 260 can be greater than or equal to the thermal resistance of the thermoelectric conversion element 220. As described in the first embodiment, the wiring 260 can be configured such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 220. Furthermore, the thermal resistance of the wiring 260 can be greater than or equal to the thermal resistance of the thermoelectric conversion element 220, and the resistance of the wiring 260 can be less than or equal to the resistance of the thermoelectric conversion element 220. As described in the first embodiment, the wiring 260 can be configured such that its thermal resistance is greater than or equal to the thermal resistance of the thermoelectric conversion element 220, and the resistance of the wiring 260 is less than or equal to the resistance of the thermoelectric conversion element 220. Additionally, it is possible to use... Figure 11 The wiring shown is 160A or as follows Figure 12 The wiring shown is 160B instead of wiring 260.

[0218] The first bonding member 270 is conductive. The first bonding member 270 can be formed using any component such as silver paste or solder.

[0219] Similar to the first embodiment, serial number E n The first connecting member 270 can be connected with serial number E n Same serial number A n The first end 220H of the thermoelectric conversion element 220 and the serial number E n Same serial number B n The first electrode 240 is electrically connected.

[0220] In the second embodiment, such as Figure 14 As shown, serial number E n At least a portion of the odd-numbered first coupling members 270 may be located within the openings of the insulating layer 212. (Serial number E) n The first connecting member 270, which is odd-numbered, can be connected to the serial number E through the opening of the insulating layer 212. n Same serial number A n The first end 220H of the thermoelectric conversion element 220 and the serial number E n Same serial number B n The first electrode 240 is electrically connected.

[0221] For example, at least a portion of the first bonding member 271 is located within the opening 212a of the insulating layer 212. The first bonding member 271 electrically connects the first end portion 221H of the thermoelectric conversion element 221 and the first electrode 241 via the opening 212a of the insulating layer 212. Furthermore, at least a portion of the first bonding member 273 is located within the opening 212b of the insulating layer 212. The first bonding member 273 electrically connects the first end portion 223H of the thermoelectric conversion element 223 and the first electrode 243 via the opening 212b of the insulating layer 212. Furthermore, at least a portion of the first bonding member 275 is located within the opening 212c of the insulating layer 212. The first bonding member 275 electrically connects the first end portion 225H of the thermoelectric conversion element 225 and the first electrode 245 via the opening 212c of the insulating layer 212. Furthermore, at least a portion of the first bonding member 277 is located within the opening 212d of the insulating layer 212. The first bonding member 277 can electrically connect the first end 227H of the thermoelectric conversion element 227 and the first electrode 247 via the opening 212d of the insulating layer 212.

[0222] like Figure 14 As shown, serial number E n At least a portion of the even-numbered first coupling members 270 may be located within the opening of the substrate 211. (Serial number E)n The even-numbered first connecting member 270 can connect with the serial number E through the opening of the substrate 211. n Same serial number A n The first end 220H of the thermoelectric conversion element 220 and the serial number E n Same serial number B n The first electrode 240 is electrically connected.

[0223] For example, at least a portion of the second first bonding member 272 is located in the opening 211a of the substrate 211. The second first bonding member 272 electrically connects the first end portion 222H of the second thermoelectric conversion element 222 and the second first electrode 242 via the opening 211a of the substrate 211. Furthermore, at least a portion of the fourth first bonding member 274 is located in the opening 211b of the substrate 211. The fourth first bonding member 274 electrically connects the first end portion 224H of the fourth thermoelectric conversion element 224 and the fourth first electrode 244 via the opening 211b of the substrate 211. Furthermore, at least a portion of the sixth first bonding member 276 is located in the opening 211c of the substrate 211. The sixth first bonding member 276 electrically connects the first end portion 226H of the sixth thermoelectric conversion element 226 and the sixth first electrode 246 via the opening 211c of the substrate 211. Furthermore, at least a portion of the first bonding member 278 is located within the opening 211d of the substrate 211. The first bonding member 278 electrically connects the first end 228H of the thermoelectric conversion element 228 and the first electrode 248 via the opening 211d of the substrate 211.

[0224] As described in the first embodiment, the first bonding member 270 may be configured such that the resistance value of the first bonding member 270 is less than or equal to the resistance value of the wiring 260.

[0225] The second bonding member 280 is conductive. The second bonding member 280 can be formed using any component such as silver paste or solder.

[0226] Similar to the first embodiment, serial number F n The second joining member 280 will be with serial number F n Same serial number A n The second end 220L of the thermoelectric conversion element 220 and the serial number F n Same serial number C n The second electrode 250 is electrically connected.

[0227] In the second embodiment, such as Figure 15 As shown, serial number F n At least a portion of the odd-numbered second coupling members 280 may be located within the openings of the insulating layer 212. (Serial number F) nThe second coupling member 280, which is odd in number, can be connected to the serial number F through the opening of the insulating layer 212. n Same serial number A n The second end 220L of the thermoelectric conversion element 220 and the serial number F n Same serial number C n The second electrode 250 is electrically connected.

[0228] For example, at least a portion of the first second bonding member 281 is located within the opening 212e of the insulating layer 212. The first second bonding member 281 electrically connects the second end 221L of the first thermoelectric conversion element 221 and the first second electrode 251 via the opening 212e of the insulating layer 212. Furthermore, at least a portion of the third second bonding member 283 is located within the opening 212f of the insulating layer 212. The third second bonding member 283 electrically connects the second end 223L of the third thermoelectric conversion element 223 and the third second electrode 253 via the opening 212f of the insulating layer 212. Furthermore, at least a portion of the fifth second bonding member 285 is located within the opening 212g of the insulating layer 212. The fifth second bonding member 285 electrically connects the second end 225L of the fifth thermoelectric conversion element 225 and the fifth second electrode 255 via the opening 212g of the insulating layer 212. Furthermore, at least a portion of the second bonding member 287 is located within the opening 212h of the insulating layer 212. The second bonding member 287 electrically connects the second end 227L of the thermoelectric conversion element 227 and the second electrode 257 via the opening 212h of the insulating layer 212.

[0229] In the second embodiment, such as Figure 15 As shown, serial number F n At least a portion of the even-numbered second coupling members 280 may be located within the opening of the substrate 211. (Serial number F) n The even-numbered second coupling member 280 can connect with the serial number F through the opening of the substrate 211. n Same serial number A n The second end 220L of the thermoelectric conversion element 220 and the serial number F n Same serial number C n The second electrode 250 is electrically connected.

[0230] For example, at least a portion of the second bonding member 282 is located in the opening 211e of the substrate 211. The second bonding member 282 electrically connects the second end portion 222L of the thermoelectric conversion element 222 and the second electrode 252 via the opening 211e of the substrate 211. Furthermore, at least a portion of the second bonding member 284 is located in the opening 211f of the substrate 211. The second bonding member 284 electrically connects the second end portion 224L of the thermoelectric conversion element 224 and the second electrode 254 via the opening 211f of the substrate 211. Furthermore, at least a portion of the second bonding member 286 is located in the opening 211g of the substrate 211. The second bonding member 286 electrically connects the second end portion 226L of the thermoelectric conversion element 226 and the second electrode 256 via the opening 211g of the substrate 211. Furthermore, at least a portion of the second bonding member 288 is located within the opening 211h of the substrate 211. The second bonding member 288 electrically connects the second end 228L of the thermoelectric conversion element 228 and the second electrode 258 via the opening 211h of the substrate 211.

[0231] As described in the first embodiment, the second bonding member 280 may be configured such that the resistance value of the second bonding member 280 is less than or equal to the resistance value of the wiring 260.

[0232] The other structures and effects of the thermoelectric conversion module 201 in the second embodiment are the same as those of the thermoelectric conversion module 1 in the first embodiment.

[0233] (Manufacturing method of thermoelectric conversion module)

[0234] Figure 18 It is shown Figure 13 A flowchart illustrating the manufacturing method of the thermoelectric conversion module 201. Figure 18 As shown, the manufacturing method of the thermoelectric conversion module 201 of this embodiment includes the arrangement step S20, the forming steps S21, S22, S23, S24, S25, S26, and the connection step S27, which will be described later. However, the manufacturing method of the thermoelectric conversion module 201 of this embodiment is not limited to the manufacturing method described below. Furthermore, Figures 19 to 23 Equivalent to Figure 14 The sectional view shown.

[0235] <Configuration Process S20>

[0236] like Figure 19As shown, the configuration step S20 is the step of configuring a metal foil 330 on the substrate 211. The metal foil 330 can be configured on the front side 211A of the substrate 211. Similar to the configuration step S10 described in the first embodiment, the metal foil 330 can be bonded to the front side 211A of the substrate 211 using any thermally conductive adhesive. The metal foil 330 can be bonded to the front side 211A of the substrate 211 using an adhesive such as... Figure 7 The metal foil 330 shown is the same as the metal foil 130. The metal foil 330 can be formed into a wiring layer 230 through the forming process S21, which will be described later.

[0237] <Forming process S21>

[0238] Forming process S21 (wiring layer formation process) involves patterning the metal foil 330 to form a wiring layer. Figure 16 The process of forming a wiring layer 230 on the front side 211A of the substrate 211 shown. For patterning the metal foil 330, known photolithography or the like can be used.

[0239] <Forming process S22>

[0240] Forming process S22 is as follows Figure 20 The substrate 211 is formed with openings 211a, 211b, 211c, and 211d as shown, and forms as shown. Figure 15 The process for the openings 211e, 211f, 211g, and 211h of the substrate 211 shown. The openings 211a to 211h can be formed using any laser.

[0241] <Forming process S23>

[0242] Forming process S23 (insulating layer formation process) is as follows Figure 21 The process of forming an insulating layer 212 on the substrate 211 and the wiring layer 230 is shown. In the formation process S23, the insulating layer 212 can be formed by coating an insulating material on the substrate 211 and the wiring layer 230. The sheet substrate 210 is formed by forming the insulating layer 212 on the front side 211A of the substrate 211. That is, the sheet substrate 210 has a substrate 211 and an insulating layer 212 formed on the front side 211A of the substrate 211.

[0243] <Forming process S24>

[0244] Forming process S24 is as follows Figure 22 The openings 211a, 212b, 212c, and 212d of the insulating layer 212 are formed as shown, and are formed as shown. Figure 15 The process of forming openings 212e, 212f, 212g, and 212h in the insulating layer 212 shown. Openings 211a to 212h can be formed using any laser.

[0245] <Forming process S25>

[0246] Forming process S25 (element formation process) is a process in which a thermoelectric conversion element layer is formed on the insulating layer 212 and under the substrate 211. As described above, the thermoelectric conversion element layer is a layer formed including CNTs. In this embodiment, the thermoelectric conversion element layer is configured as follows: Figure 23 The CNT sheets 320 and 321 are shown. The CNT sheets 320 and 321 are formed to contain CNTs. In this embodiment, formation step S25 is the process of placing the CNT sheet 320 on the insulating layer 212 and placing the CNT sheet 321 on the substrate 211. For example, the CNT sheet 320 is disposed on the front side 212A of the insulating layer 212, i.e., the front side 210A of the sheet substrate 210. For example, the CNT sheet 321 is disposed on the back side 211B of the substrate 211, i.e., the back side 210B of the sheet substrate 210.

[0247] After undergoing the forming process S26 and the like described later, CNT sheet 320 can become thermoelectric conversion elements 221, 223, 225, and 227. Furthermore, after undergoing the forming process S26 and the like described later, CNT sheet 321 can become thermoelectric conversion elements 222, 224, 226, and 228. When thermoelectric conversion element 220 is formed as a p-type thermoelectric conversion element, p-type CNT sheets 320 and 321 can be used. When thermoelectric conversion element 220 is formed as an n-type thermoelectric conversion element, n-type CNT sheets 320 and 321 can be used.

[0248] In the forming process S25, each CNT sheet 320, 321 can be bonded to the front side 210A and back side 210B of the sheet substrate 210 using any adhesive sheet such as epoxy resin.

[0249] CNT sheets 320 and 321 may be the same CNT sheets as CNT sheet 120 described in the first embodiment.

[0250] The other structures of forming process S25 are the same as those of forming process S13 described in the first embodiment.

[0251] <Forming process S26>

[0252] Forming step S26 (thermoelectric conversion element formation step) is a step in which the thermoelectric conversion element layers, namely CNT sheets 320 and 321, are cut along the first direction A1 to form a plurality of thermoelectric conversion elements 220 arranged in the second direction A2. Forming step S26 can be performed using a laser. In forming step S26, similar to forming step S14 described in the first embodiment, the CNT sheets 320 and 321 can be cut along the first direction A1 using a laser. In forming step S26, also similar to forming step S14 described in the first embodiment, the CNT sheets 320 and 321 can be cut along the first direction A1 using a UV laser, a nanosecond laser, or a femtosecond laser.

[0253] The other structures of forming process S26 are the same as those of forming process S14 described in the first embodiment.

[0254] <Connection process S27>

[0255] The connection process S27 is a process of electrically connecting the first electrode 240 and the second electrode 250 exposed from the substrate 211 or the insulating layer 212 to the two ends, namely the first end 220H and the second end 220L, of the multiple thermoelectric conversion elements 220 in a manner that all of the multiple thermoelectric conversion elements 220 are connected in series. Here, the first electrode 240 and the second electrode 250 can also be referred to as the two ends of the wiring 260. In other words, the connection process S27 can also be described as a process of electrically connecting the two ends of the wiring 260 exposed from the substrate 211 or the insulating layer 212 to the first end 220H and the second end 220L of the multiple thermoelectric conversion elements 220 in a manner that all of the multiple thermoelectric conversion elements 220 are connected in series.

[0256] In this embodiment, the connection step S27 involves transferring the silver paste from... Figure 13 The first end 220H of the thermoelectric conversion element 220 shown is coated to the first electrode 240 exposed from the substrate 211 or the insulating layer 212, and silver paste is applied from... Figure 13 The process of coating the second end 220L of the thermoelectric conversion element 220 shown to the second electrode 250 exposed from the substrate 211 or the insulating layer 212.

[0257] In the bonding process S27, the silver paste is applied along the first direction A1 from... Figure 14 The openings 212a to 212d of the insulating layer 212 shown are coated up to serial number A. n The first end 220H of the odd-numbered thermoelectric conversion elements 220. A portion of these silver pastes respectively fills the openings 212a to 212d and is electrically connected to serial number B. n Each of the first electrodes is an odd number, 240. These silver pastes, after drying, can become serial number E. nThe first connecting member is 270, which is an odd number.

[0258] In the bonding process S27, the silver paste is applied along the first direction A1 from... Figure 14 The openings 211a to 211d of the substrate 211 shown are coated to the number A. n The first end 220H of the even-numbered thermoelectric conversion elements 220. A portion of these silver pastes respectively fills the openings 211a to 211d and is electrically connected to serial number B. n Each of the even-numbered first electrodes is 240. These silver pastes, after drying, can become serial number E. n The first connecting member 270 is an even number.

[0259] In the bonding process S27, the silver paste is applied along the first direction A1 from... Figure 15 The openings 212e to 212h of the insulating layer 212 shown are coated up to serial number A. n The second end 220L of the odd-numbered thermoelectric conversion elements 220. A portion of these silver pastes respectively fills the openings 212e to 212h and is electrically connected to serial number C. n Each of the second electrodes is an odd number, 250. These silver pastes, after drying, can become serial number F. n The second connecting member 280 is an odd number.

[0260] In the bonding process S27, the silver paste is applied along the first direction A1 from... Figure 15 The openings 211e to 211h of the substrate 211 shown are coated to serial number A. n The second end 220L of the even-numbered thermoelectric conversion elements 220. A portion of these silver pastes respectively fills the openings 211e to 211h and is electrically connected to serial number C. n The even-numbered second electrodes are 250. These silver pastes, after drying, can become serial number F. n The second connecting member 280 is an even number.

[0261] The manufacturing method of the thermoelectric conversion module 201 of the second embodiment has the same other structure and effects as the manufacturing method of the thermoelectric conversion module 1 of the first embodiment.

[0262] (Third Implementation)

[0263] Figure 24This is an external view of the thermoelectric conversion module 401 according to the third embodiment of the present invention. Similar to Embodiment 1, the thermoelectric conversion module 401 can be disposed on the heat source 2. In the thermoelectric conversion module 401, the sheet substrate 410 described later includes a first edge portion 401H and a second edge portion 401L. The first edge portion 401H and the second edge portion 401L face each other. When the thermoelectric conversion module 401 is disposed on the heat source 2, the first edge portion 401H can be located near the heat source 2. When the thermoelectric conversion module 401 is disposed on the heat source 2, the second edge portion 401L can be located away from the heat source 2.

[0264] With Figure 1 Similarly, as shown in the diagram, the temperature near the first edge 401H can be higher than the temperature near the second edge 401L. In other words, the temperature near the second edge 401L can be lower than the temperature near the first edge 401H.

[0265] In the third embodiment, the first direction A1, the second direction A2, and the third direction A3 can be used in the same way as in the first embodiment. In the third embodiment, the first direction A1 is the direction in which the first edge 401H and the second edge 401L face each other. In this embodiment, the first direction A1 is defined as the direction from the second edge 401L toward the first edge 401H and orthogonal to the second edge 401L. Furthermore, in this embodiment, the second direction A2 is defined as the direction from... Figure 24 The direction from the left side of the paper to the right side of the paper. Furthermore, in this embodiment, A3 is defined as being from the third direction. Figure 24 The inside of the paper faces the direction closest to the front of the paper.

[0266] The thermoelectric conversion module 401, viewed from a third-party perspective (A3), has a trapezoidal shape. In the thermoelectric conversion module 401, the sheet substrate 410 (described later) includes edges 401A and 401B. Edges 401A and 401B are parallel. Edges 401A and 401B correspond to the two base edges of the trapezoid. A first edge 401H corresponds to one of the two legs of the trapezoid. A second edge 401L corresponds to the other leg of the trapezoid. The distance between the first edge 401H and the second edge 401L in the first direction A1 widens along the second direction A2.

[0267] The thermoelectric conversion module 401 includes a sheet substrate 410, thermoelectric conversion elements 421, 422, 423, 424, 425, and 426, and a wiring layer 430. The wiring layer 430 is located within the sheet substrate 410. The wiring layer 430 can be located within the sheet substrate 410 and... Figure 2The back side of the insulating layer is the same as the insulating layer 12 shown. The wiring layer 430 has wiring 461, wiring 462, wiring 463, wiring 464, and wiring 465. The wiring layer 430 may also have the same as... Figure 1 The first electrode 40 shown is the same as the first electrode, and is the same as that shown. Figure 1 The second electrode is the same as the second electrode 50 shown. The thermoelectric conversion module 401 can have a second electrode similar to that shown. Figure 1 The first joining member 70 shown is the same joining member as the joining member shown, and is similar to the joining member shown. Figure 1 The second joining member 80 shown is the same joining member.

[0268] Hereinafter, without specifically distinguishing each of thermoelectric conversion elements 421 to 426, they will also be uniformly referred to as "thermoelectric conversion element 420". Figure 24 A thermoelectric conversion module 401 with six thermoelectric conversion elements 420 is shown. However, the number of thermoelectric conversion elements 420 in the thermoelectric conversion module 401 can be any number.

[0269] Hereinafter, without specifically distinguishing each of wiring 461 to 465, they will also be uniformly referred to as "wiring 460". Figure 24 A wiring layer 430 with five wirings 460 is shown. However, the number of wirings 460 in the wiring layer 430 may correspond to the number of thermoelectric conversion elements 420 in the thermoelectric conversion module 401.

[0270] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of thermoelectric conversion elements 420 of the thermoelectric conversion module 401 along the second direction A2 are also recorded as "Serial Number A". n (n is an integer). The thermoelectric conversion elements 421, 422, 423, 424, 425, and 426 are numbered 1, 2, 3, 4, 5, and 6, respectively.

[0271] Hereinafter, similar to the first embodiment, the serial numbers assigned to the plurality of wirings 460 of the wiring layer 430 along the second direction A2 are also recorded as "Serial Number D". n (n is an integer). The sequence number D assigned to wiring pairs 461, 462, 463, 464, and 465 along the second direction A2. n The numbers are 1, 2, 3, 4, and 5.

[0272] The sheet substrate 410 is insulating. The sheet substrate 410 may be flexible. The sheet substrate 410, viewed from a third-party perspective (A3), has a trapezoidal shape. The sheet substrate 410 includes the first edge 401H, the second edge 401L, the edge 401A, and the edge 401B described above.

[0273] The sheet substrate 410 includes a front side 410A and a back side 410B. The front side 410A and the back side 410B face each other. The front side 410A is the side of the sheet substrate 410 facing the third direction A3. The back side 410B is the side of the sheet substrate 410 facing the third direction A3 in the opposite direction.

[0274] Sheet substrate 410 and such Figure 2 The sheet substrate 10 shown has the same substrate as the substrate 11 and the same insulating layer as the insulating layer 12.

[0275] All thermoelectric conversion elements 421 to 426 are either p-type or n-type thermoelectric conversion elements. There are no particular limitations on the thermoelectric conversion material used to form the thermoelectric conversion element 420; the thermoelectric conversion material described in the first embodiment can be used. As described in the first embodiment, for example, if the thermoelectric conversion material used to form the thermoelectric conversion element 420 is an organic material such as CNTs, all thermoelectric conversion elements 421 to 426 can be p-type thermoelectric conversion elements. As described in the first embodiment, all thermoelectric conversion elements 421 to 426 are formed to contain CNTs.

[0276] The thermoelectric conversion element 420 extends along the first direction A1. Viewed from the third direction A3, the thermoelectric conversion element 420 is a long strip, such as a rectangle. The long side of the thermoelectric conversion element 420 is along the first direction A1. The long side of the thermoelectric conversion element 420 may be parallel to the first direction A1. The cross-sectional shape of the thermoelectric conversion element 420 may be thin-film. The thickness of the thermoelectric conversion elements 421 to 426 in the third direction A3 may be approximately the same or different. Hereinafter, it is assumed that the thickness of the thermoelectric conversion elements 421 to 426 in the third direction A3 is approximately the same.

[0277] The thermoelectric conversion element 420 includes a first end 420H and a second end 420L in the first direction A1. The first end 420H is located on the side of the first edge 401H of the thermoelectric conversion module 401. The second end 420L is located on the side of the second edge 401L of the thermoelectric conversion module 401. Furthermore, the first end 420H of the thermoelectric conversion elements 421, 422, 423, 424, 425, and 426 are also referred to as "first end 421H", "first end 422H", "first end 423H", "first end 424H", "first end 425H", and "first end 426H", respectively. Similarly, the second end 420L of the thermoelectric conversion elements 421, 422, 423, 424, 425, and 426 are also referred to as "second end 421L", "second end 422L", "second end 423L", "second end 424L", "second end 425L", and "second end 426L", respectively.

[0278] Similar to the first embodiment, thermoelectric conversion elements 421-426 are arranged along the second direction A2 on the front side 410A of the sheet substrate 410. Also similar to the first embodiment, thermoelectric conversion elements 421-426 can be arranged along the second direction A2 on the front side of the insulating layer of the sheet substrate 410. The thermoelectric conversion elements 421-426 are arranged with gaps along the second direction A2. The width of these gaps can be arbitrary, as long as insulation between adjacent thermoelectric conversion elements 420 in the second direction A2 can be ensured. Also similar to the first embodiment, thermoelectric conversion elements 421-426 are arranged according to the serial number A assigned to the thermoelectric conversion elements 420. n The sequence is connected to the ground via wiring 461 to 465 in series.

[0279] In thermoelectric conversion elements 421 to 426, the lengths along the first direction A1 are different. For example, thermoelectric conversion elements 421 to 426 extend from the first edge portion 401H to the second edge portion 401L along the first direction A1, respectively. Because thermoelectric conversion elements 421 to 426 extend from the first edge portion 401H to the second edge portion 401L, they are arranged according to the sequence number A. n The order of the thermoelectric conversion elements 421 to 426 is such that the length of the thermoelectric conversion elements 421 to 426 in the first direction A1 increases. In this way, the thermoelectric conversion elements 421 to 426 extend from the first edge portion 401H to the second edge portion 401L respectively, and the lengths of the thermoelectric conversion elements 421 to 426 in the first direction A1 are different.

[0280] By extending thermoelectric conversion elements 421-426 from the first edge portion 401H to the second edge portion 401L along the first direction A1, the temperature difference between the two ends of each thermoelectric conversion element 421-426 can be increased. This increased temperature difference between the two ends of each thermoelectric conversion element 421-426 improves the power generation of each thermoelectric conversion element 421-426. Furthermore, the width between each of the first ends 421H-426H and the first edge portion 401H can be the same. Similarly, the width between each of the second ends 421L-426L and the second edge portion 401L can be the same. The widths between the first ends 421H-426H and the first edge portion 401H, and between the second ends 421L-426L and the second edge portion 401L, can be appropriately set according to manufacturing processes, etc.

[0281] Here, when the lengths of thermoelectric conversion elements 421 to 426 along the first direction A1 are different, and when the widths of thermoelectric conversion elements 421 to 426 along the second direction A2 are approximately the same, the resistance values ​​of thermoelectric conversion elements 421 to 426 are different. When the resistance values ​​of thermoelectric conversion elements 421 to 426 are different, and when the thermoelectric conversion elements 421 to 426 are connected in series, the current that the thermoelectric conversion module 401 can generate is determined by the thermoelectric conversion element 420 with the smaller resistance value.

[0282] Therefore, thermoelectric conversion elements 421-426 are configured such that their respective resistance values ​​are approximately the same, while their widths along the second direction A2 are different. As an example, in this embodiment, according to number A... n The order of thermoelectric conversion elements 421 to 426 is such that the length of thermoelectric conversion elements 421 to 426 along the first direction A1 increases. In this case, thermoelectric conversion elements 421 to 426 are configured such that, according to the order of thermoelectric conversion elements 421 to 426, the width of each thermoelectric conversion element 421 to 426 along the second direction increases. The width of each thermoelectric conversion element 421 to 426 along the second direction A2 can increase proportionally to the length of each thermoelectric conversion element 421 to 426 along the first direction A1. For example, if the length of thermoelectric conversion element 426 along the first direction A1 is 1.5 times the length of thermoelectric conversion element 421 along the first direction A1, the width of thermoelectric conversion element 426 along the second direction A2 is 1.5 times the width of thermoelectric conversion element 421 along the second direction A2. With this structure, the resistance values ​​of each thermoelectric conversion element 421 to 426 can become approximately the same.

[0283] Furthermore, when the thickness of the third direction A3 of each of the thermoelectric conversion elements 421 to 426 is different, the thermoelectric conversion elements 421 to 426 can be configured such that the resistance values ​​of each of the thermoelectric conversion elements 421 to 426 are approximately the same, while the cross-sectional areas of each of the thermoelectric conversion elements 421 to 426 that are orthogonal to the first direction A1 are different.

[0284] Wiring 460 and such Figure 1 The wiring 60 shown can also be located within the substrate 410. Wiring 460 and... Figure 1 The wiring 60 shown can also be located on the back side of the insulating layer of the sheet substrate 410. Wiring 460 can be located on the back side of the insulating layer of the sheet substrate 410 together with the first and second electrodes of the wiring layer 430. Wiring 460 and... Figure 1Similarly, as shown in wiring 60, adjacent thermoelectric conversion elements 420 in the second direction A2 are electrically connected in series at both ends of the thermoelectric conversion element 420, namely the first end 420H and the second end 420L. Wiring 460 is similar to... Figure 1 Similarly, in the wiring 60 shown, in two adjacent thermoelectric conversion elements 420 in the second direction A2, a first electrode electrically connected to the first end 420H of one thermoelectric conversion element 420 and a second electrode electrically connected to the second end 420L of the other thermoelectric conversion element 420 are electrically connected.

[0285] The thermal resistance of wiring 460 is greater than or equal to the thermal resistance of thermoelectric conversion element 420. As described in the first embodiment, wiring 460 can be configured such that its thermal resistance is greater than or equal to the thermal resistance of thermoelectric conversion element 420. Furthermore, the thermal resistance of wiring 460 can be greater than or equal to the thermal resistance of thermoelectric conversion element 420, and the resistance of wiring 460 can be less than or equal to the resistance of thermoelectric conversion element 420. As described in the first embodiment, wiring 460 can be configured such that its thermal resistance is greater than or equal to the thermal resistance of thermoelectric conversion element 420, and the resistance of wiring 460 is less than or equal to the resistance of thermoelectric conversion element 420.

[0286] Alternatively, one can adopt, such as Figure 11 The wiring shown is 160A or as follows Figure 12 The wiring shown is 160B instead of wiring 460.

[0287] The thermoelectric conversion module 401 of the third embodiment can also be configured similarly to the second embodiment, with a plurality of thermoelectric conversion elements formed on the back surface 410B of the sheet substrate 410. The plurality of thermoelectric conversion elements formed on the back surface 410B can be configured similarly to the plurality of thermoelectric conversion elements 420. As an example, similar to the thermoelectric conversion element 420, the plurality of thermoelectric conversion elements formed on the back surface 410B can each extend from a first edge 401H to a second edge 401L. In this case, similar to the thermoelectric conversion element 420, the plurality of thermoelectric conversion elements on the back surface 410B can be configured such that the resistance values ​​of the plurality of thermoelectric conversion elements are approximately the same, while the widths of each of the plurality of thermoelectric conversion elements along the second direction A2 are different. Furthermore, if the thicknesses of the plurality of thermoelectric conversion elements formed on the back surface 410B in the third direction A3 are different, the plurality of thermoelectric conversion elements can each be configured such that the resistance values ​​of the plurality of thermoelectric conversion elements are approximately the same, while the cross-sectional areas of each of the plurality of thermoelectric conversion elements orthogonal to the first direction A1 are different.

[0288] In the thermoelectric conversion module 401 of the third embodiment, the sheet substrate 410 is trapezoidal in shape. By making the sheet substrate 410 trapezoidal, the flexibility of the location where the thermoelectric conversion module 401 is arranged can be increased.

[0289] The thermoelectric conversion module 401 of the third embodiment has the same other structure and effects as the thermoelectric conversion module 1 of the first embodiment. The thermoelectric conversion module 401 can also be manufactured by the manufacturing method described in the first embodiment.

[0290] The foregoing description merely illustrates one embodiment of the present invention, and various modifications can, of course, be made within the scope of the patent claims.

[0291] Industrial availability

[0292] According to the present invention, a thermoelectric conversion module that suppresses the reduction of power generation can be provided.

[0293] Explanation of reference numerals in the attached figures

[0294] 1, 201, 401: Thermoelectric conversion module

[0295] 1H, 201H, 401H: First edge

[0296] 1L, 201L, 401L: Second edge

[0297] 2: Heat source

[0298] 10, 210, 410: Sheet substrate

[0299] 10A, 210A, 410A: Front

[0300] 10B, 210B, 410B: Back side

[0301] 11, 211: Substrate

[0302] 11A, 211A: Front

[0303] 11B, 211B: Back side

[0304] 12, 212: Insulation layer

[0305] 12A, 212A: Front

[0306] 12B, 212B: Back side

[0307] 60~63, 160A, 160B, 260~267, 460~465: Wiring

[0308] 20~24, 220~228, 420~426: Thermoelectric conversion element

[0309] 20H~24H, 220H~228H, 420H~426H: First end

[0310] 20L~24L, 220L~228L, 420L~426L: Second end

[0311] 30, 230, 430: Wiring layers

[0312] 40-44, 240-248: First electrode

[0313] 50-54, 250-258: Second electrode

[0314] 70~74, 270~278: First connecting member

[0315] 80~84, 280~288: Second connecting member

[0316] 120, 320, 321: CNT sheets (carbon nanotube sheets)

[0317] 130, 330: Metal foil

[0318] 160a: Hole

[0319] 211a~211h: Opening

[0320] 212a~212h: Opening

[0321] 401A: Side

[0322] 401B: Side

Claims

1. A thermoelectric conversion module, comprising: An insulating sheet substrate having a front and a back side; A plurality of thermoelectric conversion elements are arranged in the form of elongated strips extending in a first direction and arranged along a second direction intersecting the first direction on the front side of the sheet substrate; and The wiring layer has multiple wirings that electrically connect adjacent thermoelectric conversion elements in series at both ends of a long strip. The wiring layer is located in the sheet substrate. All of the aforementioned thermoelectric conversion elements are either p-type or n-type thermoelectric conversion elements. The thermal resistance value of the wiring is greater than or equal to the thermal resistance value of the thermoelectric conversion element. The resistance value of the wiring is below the resistance value of the thermoelectric conversion element. The length L of the wiring 60 Width W 60 and thickness T 60 While satisfying the following equation (1), the following equation (2) must also be satisfied: in, L 20 W is the length of the thermoelectric conversion element. 20 T is the width of the thermoelectric conversion element. 20 It is the thickness of the thermoelectric conversion element. In equation (1), the thermal conductivity κ 20 The thermal conductivity κ is the thermal conductivity of the thermoelectric conversion element. 60 It is the thermal conductivity of the wiring. In equation (2), the conductivity δ 20 The conductivity δ of the thermoelectric conversion element is... 60 It is the conductivity of the wiring.

2. The thermoelectric conversion module according to claim 1, wherein, All of the aforementioned thermoelectric conversion elements are p-type thermoelectric conversion elements.

3. The thermoelectric conversion module according to claim 1 or 2, wherein, All of the multiple thermoelectric conversion elements are formed by including carbon nanotubes.

4. The thermoelectric conversion module according to claim 1 or 2, wherein, The plurality of thermoelectric conversion elements are formed not only on the front side of the sheet substrate, but also on the back side.

5. The thermoelectric conversion module according to claim 4, wherein, When viewed from above, a portion of each of the thermoelectric conversion elements formed on the front side overlaps with a portion of each of the thermoelectric conversion elements formed on the back side.

6. The thermoelectric conversion module according to claim 1 or 2, wherein, All of the plurality of thermoelectric conversion elements are rectangular in shape and are approximately the same size.

7. The thermoelectric conversion module according to claim 1 or 2, wherein, The plurality of thermoelectric conversion elements are configured such that the resistance values ​​of the plurality of thermoelectric conversion elements are approximately the same, and the length of the plurality of thermoelectric conversion elements along the first direction, the width of the plurality of thermoelectric conversion elements along the second direction, and the thickness of the plurality of thermoelectric conversion elements are adjusted respectively.

8. The thermoelectric conversion module according to claim 7, wherein, The thickness of each of the plurality of thermoelectric conversion elements is approximately the same, the length of each of the plurality of thermoelectric conversion elements is different, and the width of each of the plurality of thermoelectric conversion elements is different.

9. The thermoelectric conversion module according to claim 8, wherein, The sheet substrate is trapezoidal in shape. The sheet substrate includes a first edge portion corresponding to one of the two legs of the trapezoid and a second edge portion corresponding to the other leg of the trapezoid. The spacing between the first edge and the second edge in the first direction widens along the second direction. The plurality of thermoelectric conversion elements extend from the first edge to the second edge along the first direction.

10. A method for manufacturing a thermoelectric conversion module, the thermoelectric conversion module comprising: An insulating sheet substrate having a substrate including a front side and a back side, and an insulating layer formed on the front side of the substrate; Multiple thermoelectric conversion elements are configured as elongated strips extending in a first direction on the front side of the insulating layer and arranged along a second direction intersecting the first direction; as well as A wiring layer having a plurality of wires electrically connecting adjacent thermoelectric conversion elements in series at both ends on the back side of the insulating layer in a strip shape. The wiring layer is located within the sheet substrate. The thermal resistance of the wiring is above the thermal resistance of the thermoelectric conversion element, and the resistance of the wiring is below the resistance of the thermoelectric conversion element. The length L of the wiring 60 Width W 60 and thickness T 60 While satisfying the following equation (1), the following equation (2) must also be satisfied: in, L 20 W is the length of the thermoelectric conversion element. 20 T is the width of the thermoelectric conversion element. 20 It is the thickness of the thermoelectric conversion element. In equation (1), the thermal conductivity κ 20 The thermal conductivity κ is the thermal conductivity of the thermoelectric conversion element. 60 It is the thermal conductivity of the wiring. In equation (2), the conductivity δ 20 The conductivity δ of the thermoelectric conversion element is... 60 It is the conductivity of the wiring. The manufacturing method of the thermoelectric conversion module includes: The wiring layer forming process forms the wiring layer on the front side of the substrate; The insulating layer forming process involves forming an insulating layer on the substrate and the wiring layer such that only the two ends of each wiring constituting the wiring layer are exposed. In the component forming process, a thermoelectric conversion element layer is formed on the insulating layer; The thermoelectric conversion element forming process involves cutting the thermoelectric conversion element layer along a first direction to form a plurality of thermoelectric conversion elements arranged along a second direction; and The connection process involves connecting the two ends of the exposed wiring to the two ends of the multiple thermoelectric conversion elements in a manner in which all of them are electrically connected in series.

11. The method for manufacturing the thermoelectric conversion module according to claim 10, wherein, The thermoelectric conversion element layer is a layer containing carbon nanotubes.

12. The method for manufacturing the thermoelectric conversion module according to claim 10 or 11, wherein, The thermoelectric conversion element forming process is carried out using a UV laser, nanosecond laser, or femtosecond laser.

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