Cleaning module, storage system and cleaning method for storage device

Abstract

The present invention relates to a cleaning module, a storage system, and a cleaning method for a storage device. Disclosed is a cleaning module for cleaning a storage device. The cleaning module includes: a housing defining an interior space; a suction mechanism installed in the interior space and forming an airflow introduced into the interior space; and a discharge portion that discharges the airflow introduced into the interior space by the suction mechanism to the exterior of the housing.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to and the benefit of Korean Patent Application No. 10-2021-0189004 filed in the Korean Intellectual Property Office on December 27, 2021, and Korean Patent Application No. 10-2022-0127124 filed in the Korean Intellectual Property Office on October 5, 2022, the entire contents of which are incorporated herein by reference. Technical Field

[0003] Embodiments of the present disclosure described herein relate to a cleaning module, a storage system, and a cleaning method for a storage device. Background Art

[0004] Generally speaking, semiconductor elements are manufactured by repeatedly performing various unit processes (such as photolithography process, exposure process, etching process, diffusion process, deposition process and metal process, etc.) on a substrate (such as a wafer). Each of these unit processes is performed in a substrate processing device that can perform the corresponding process. In the substrate processing device, a conveying device (for example, an overhead transport (OHT)) or an automatic mobile robot (AMR)) is used to transport a substrate to be processed (for example, a wafer or glass, etc.) or a mask for processing a substrate. The substrate or mask is transported in a state of being contained in a receiving container, which is called a carrier, a box, a front-opening unified pod (FOUP), a wafer box (POD), etc.

[0005] The receiving containers can be stored in a warehouse as a storage device. The warehouse includes shelves for storing the containers and a transfer robot for transferring the containers between the shelves. The transfer robot transfers the receiving containers between the shelves.

[0006] Generally speaking, in order to increase the number of receiving containers per unit area, the warehouse is made very high. The shelves included in the warehouse are installed at a height of several meters to several tens of meters from the bottom of the semiconductor production line.

[0007] At the same time, dust such as particles is generated in the semiconductor production line due to various reasons. Dust accumulates on the shelves included in the warehouse. The dust accumulated on the shelves hinders the sensing operation of the sensors installed on the shelves (generally speaking, the sensors detect whether the receiving container is placed on the shelves). In addition, due to various reasons, the dust accumulated on the shelves may be introduced into the receiving container. Objects to be processed (for example, wafers) requiring high cleanliness are accommodated in the receiving container. If dust is introduced into the receiving container, the objects to be processed will be contaminated. This may cause defects in the products manufactured in the semiconductor production line.

[0008] For this reason, operators perform cleaning operations to remove dust accumulated in the warehouse. However, since the warehouse is built very high and some of the shelves included in the warehouse are located at a height of several meters to tens of meters, it is not easy to remove the dust accumulated on the shelves. In addition, when performing the cleaning operation, the warehouse operation must be stopped for safety reasons. In this case, the logistics process in the semiconductor production line is affected by the suspension of warehouse operation. Therefore, the production efficiency of the semiconductor production line is reduced. Summary of the Invention

[0009] Embodiments of the present disclosure provide a cleaning module for effectively cleaning a storage device, a storage system, and a method for cleaning a storage device.

[0010] Embodiments of the present disclosure provide a cleaning module for effectively collecting particles accumulated on a supporting shelf included in a storage device, a storage system, and a cleaning method of the storage device.

[0011] Embodiments of the present disclosure provide a cleaning module for cleaning a storage device without stopping the operation of the storage device during a process step of the storage device operation, a storage system, and a storage device cleaning method.

[0012] Embodiments of the present disclosure provide a cleaning module for quickly cleaning a storage device in a maintenance step of performing maintenance of the storage device, a storage system, and a storage device cleaning method.

[0013] The technical problems to be solved by the present disclosure are not limited to the above-mentioned problems, and those skilled in the art to which the present disclosure belongs will clearly understand any other technical problems not mentioned herein from this specification and the accompanying drawings.

[0014] According to an embodiment, a cleaning module for a cleaning storage device includes: a shell that defines an internal space; a suction mechanism that is installed in the internal space and forms an airflow introduced into the internal space; and a discharge portion that discharges the airflow introduced into the internal space by the suction mechanism to the outside of the shell.

[0015] According to an embodiment, the cleaning module may further include a capturing member that captures particles introduced into the internal space by the airflow formed by the suction mechanism.

[0016] According to an embodiment, the trap member may have an inverted funnel shape with increasing width from top to bottom.

[0017] According to an embodiment, the trap member may include: an inlet portion facing the suction mechanism; and an inclined portion extending downward from the inlet portion and having a surface inclined with respect to a vertical direction.

[0018] According to an embodiment, the cleaning module may further include a suction portion facing the support mechanism of the storage device and installed at the bottom of the housing, the suction portion having a plate shape and having a plurality of holes formed therein.

[0019] According to an embodiment, the plurality of holes formed in the suction portion may include a first hole and a second hole having a smaller diameter than the first hole.

[0020] According to an embodiment, when the area in which the first hole is formed in the suction portion is referred to as the first area, and the area in which the second hole is formed in the suction portion is referred to as the second area, the number of second holes per unit area in the second area may be greater than the number of first holes per unit area in the first area.

[0021] According to an embodiment, the second hole may be formed in a position corresponding to a shelf sensor mounted on the supporting mechanism of the storage device.

[0022] According to an embodiment, the cleaning module may further include a discharge portion installed in a position facing the particles captured by the capturing member, and the discharge portion is coupled to the housing through a hinge.

[0023] According to an embodiment, a storage system for storing objects includes: at least one receiving container containing the object; a storage device that stores the receiving container; and at least one cleaning module that collects particles accumulated on a support mechanism of the storage device. The storage device includes a plurality of receiving sections, each of which includes a support mechanism, and a conveying unit that transports the receiving container and the cleaning module between the receiving sections.

[0024] According to an embodiment, the receiving parts may be disposed along a first direction and a third direction perpendicular to the ground, and the hand of the transfer unit may be configured to transport the receiving container and the cleaning module between the receiving parts.

[0025] According to an embodiment, each of the supporting mechanisms may include a shelf supporting the receiving container or the cleaning module and a shelf sensor mounted on the shelf.

[0026] According to an embodiment, the cleaning module may include: a shell that defines an internal space; a suction mechanism that is installed in the internal space and forms an airflow introduced into the internal space; a discharge portion that discharges the airflow introduced into the internal space by the suction mechanism to the outside of the shell; and a suction portion that is installed at the bottom of the shell and may have a plate shape and may have a plurality of holes formed in the suction portion.

[0027] According to an embodiment, the plurality of holes may include a first hole and a second hole, the second hole being positioned closer to the shelf sensor than the first hole when viewed from above.

[0028] According to an embodiment, the second hole may have a smaller diameter than the first hole.

[0029] According to an embodiment, when the area in which the first hole is formed in the suction portion is referred to as the first area, and the area in which the second hole is formed in the suction portion is referred to as the second area, the number of second holes per unit area in the second area may be greater than the number of first holes per unit area in the first area.

[0030] According to an embodiment, the storage device may also include at least one discharge portion, which discharges the particles collected in the cleaning module from the cleaning module, and the discharge portion may include a discharge mechanism, which discharges the particles collected in the cleaning module to the outside by opening the discharge portion of the cleaning module, and the discharge portion is installed in a position facing the particles collected in the cleaning module.

[0031] According to an embodiment, the discharge mechanism may include: a first duct formed of a rigid material and facing the discharge portion; and a second duct formed of a flexible material and connected to the first duct.

[0032] According to an embodiment, a method for cleaning a storage device using a cleaning module, wherein the storage device contains objects, the method comprising: transporting the cleaning module to a first receiving section among a plurality of receiving sections included in the storage device, and collecting particles accumulated on a supporting mechanism of the first receiving section; and when a cleaning process is completely performed on one of the plurality of receiving sections, transporting the cleaning module to a second receiving section among the plurality of receiving sections, and collecting particles accumulated on the supporting mechanism of the second receiving section.

[0033] According to the embodiment, in the process step of the operation of the storage device, when the cleaning module collects the particles accumulated on the supporting mechanism of the first receiving part, the hand module that transports the cleaning module can perform another work, and in the maintenance step of performing maintenance of the storage device, the hand module can be on standby until the cleaning module completely collects the particles accumulated on the supporting mechanism of the first receiving part, and when the particles of the first receiving part are completely collected, the hand module can transport the cleaning module to the second receiving part to collect the particles accumulated on the supporting mechanism of the second receiving part. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The above and other objects and features of the present disclosure will become more apparent by describing in detail embodiments of the present disclosure with reference to the accompanying drawings.

[0035] Figure 1 is a cross-sectional view of the storage system taken along a plane parallel to the second direction and the third direction.

[0036] Figure 2 is a cross-sectional view of the storage system taken along a plane parallel to the first direction and the second direction.

[0037] Figure 3 is a cross-sectional view of the storage system taken along a plane parallel to the first direction and the third direction.

[0038] Figure 4 A view used to describe a cleaning module.

[0039] Figure 5 When viewed from above Figure 4 View of the suction section.

[0040] Figure 6 For display Figure 4 A view of the status of particles collected by the cleaning module.

[0041] Figure 7 To show in Figure 4 FIG4 is a view showing a state in which particles collected in a cleaning module are discharged to the outside of the cleaning module.

[0042] Figure 8 To show the Figure 4 A view of the status of the battery charge in the cleaning module.

[0043] Figure 9 A flow chart illustrating a method for cleaning a storage device in a process step.

[0044] Figure 10 A flow chart illustrating a method for cleaning a storage device during a maintenance step.

[0045] Figure 11 and Figure 12 To show when Figure 10 FIG. 1 is a view of an example of a transfer unit being ready for use while cleaning a storage device during a maintenance step. DETAILED DESCRIPTION

[0046] Other advantages and features of the present disclosure and its implementation will be illustrated by the embodiments described in detail with reference to the accompanying drawings. However, the present disclosure can be implemented in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure is thorough and complete and fully conveys the scope of the present disclosure to those skilled in the art to which the present disclosure belongs. Furthermore, the present disclosure is defined solely by the appended claims.

[0047] Although not defined, all terms (including technical or scientific terms) used herein have the same meaning as generally accepted terms in the general art in the relevant field to which the present disclosure belongs. Terms defined in general dictionaries may be interpreted as having the same meaning as terms used in the relevant field and / or terms used in the text of this application, and even if some terms are not clearly defined, these terms should not be interpreted as conceptual or overly formal.

[0048] Unless otherwise specifically stated, terms in the singular may include plural forms. In addition, in the drawings, the shapes and sizes of components may be exaggerated for clarity of illustration.

[0049] In the following, reference will be made to Figures 1 to 12 Embodiments of the present disclosure are described.

[0050] Figure 1 is a cross-sectional view of the storage system taken along a plane parallel to the second direction and the third direction, Figure 2 is a cross-sectional view of the storage system taken along a plane parallel to the first direction and the second direction, and Figure 3is a cross-sectional view of the storage system taken along a plane parallel to the first direction and the third direction.

[0051] Hereinafter, a traveling direction of the conveying unit 140 may be defined as a first direction X, a direction perpendicular to the first direction X when viewed from above may be defined as a second direction Y, and a direction perpendicular to the first direction X and the second direction Y may be defined as a third direction Z. The third direction Z may refer to a direction perpendicular to the ground.

[0052] Reference Figure 1 、 Figure 2 and Figure 3 , a storage system 1 according to an embodiment of the present disclosure may include a storage device 10 , a receiving container 20 , a cleaning module 30 , and a controller 40 .

[0053] The storage device 10 can store objects. The storage device 10 can store receiving containers 20 containing objects therein. The storage device 10 can be called a warehouse. The storage device 10 can include a frame 100, a support mechanism 110, a charging module 120, a discharge mechanism 130, and a conveying unit 140.

[0054] The frame 100 can serve as the overall skeleton of the storage device 10. The frame 100 can be a body in which the support mechanism 110, which will be described below, is installed. The frame 100 can include a bottom frame 101 and a support frame 102. The running track 141 of the conveying unit 140, which will be described below, can be fixedly mounted on the bottom frame 101. The support mechanism 110, which will be described below, can be fixedly mounted in the support frame 102. In addition, a frame sensor 103 can be mounted on the support frame 102. A frame sensor 103 can be mounted for each receiving portion ST, which will be described below. Multiple frame sensors 103 can be mounted for each receiving portion ST, which will be described below. The frame sensor 103 can be a push sensor. The frame sensor 103 can be a push sensor that transmits a signal to the controller 40, which will be described below, regarding whether the cleaning module 30 is placed in the receiving portion ST, which will be described below, based on whether the push sensor is pressed by the cleaning module 30. Alternatively, the frame sensor 103 can be a distance sensor using a laser or the like. The frame sensor 103 may measure the distance from the rear surface of the receiving container 20 or the rear surface of the cleaning module 30 and transmit the measured value to the controller 40. The controller 40 may determine whether the object placed in the receiving portion ST is the cleaning module 30 or the receiving container 20 based on the measured value transmitted by the frame sensor 103.

[0055] The support mechanism 110 may be installed in the frame 100. The support mechanism 110 may be installed in the support frame 102 of the frame 100. The support mechanism 110 may be configured to support one of the receiving container 20 and the cleaning module 30.

[0056] The support mechanism 110 may include a shelf 111 and a shelf sensor 113. The shelf 111 may be mounted on the support frame 102. A plurality of shelves 111 may be mounted on the support frame 102. The shelf 111 may be mounted along the first direction X and the third direction Z. The shelf 111 may be mounted on one side relative to the conveying unit 140 and may be mounted on the opposite side relative to the conveying unit 140. Although Figures 1 to 3 An example is shown in which 20 shelves 111 are installed in a 5×4 array on one side and on the opposite side with respect to the transfer unit 140 , but the present disclosure is not limited thereto. The number of shelves 111 included in the storage device 10 may be variously modified.

[0057] The shelf 111 may have a fork shape. The shelf 111 may have a shape with a pair of fingers. The shelf sensor 113 may be mounted on each of the pair of fingers of the shelf 111. The shelf sensor 113 may be a press-type sensor. The shelf sensor 113 may be a press-type sensor that transmits a signal regarding whether the receiving container 20 is placed in the receiving portion ST to be described below to the controller 40 to be described below based on whether the press-type sensor is pressed by the receiving container 20. Alternatively, the shelf sensor 113 may be a distance sensor using a laser or the like. The shelf sensor 113 may measure the distance from the lower surface of the receiving container 20 or the lower surface of the cleaning module 30, and may transmit the measured value to the controller 40. The controller 40 may determine whether the object placed in the receiving portion ST is the cleaning module 30 or the receiving container 20 based on the measured value transmitted by the shelf sensor 113.

[0058] The support mechanism 110, a portion of the frame 100, and the frame sensor 103 mounted on the frame 100 may be combined together to serve as one unit capable of storing the receiving container 20. Hereinafter, the one unit is defined as a receiving portion ST.

[0059] The charging module 120 can charge the battery included in the cleaning module 30 to be described below. The charging module 120 can charge the battery of the cleaning module 30 in a contactless manner. The charging module 120 can be mounted on the frame 100. The charging module 120 can be mounted on the support frame 102. The charging module 120 can be mounted on the support frame 102 so as to be adjacent to a selected one of the support mechanisms 110.

[0060] The discharge mechanism 130 can discharge dust such as particles collected by the cleaning module 30 to be described below to the outside of the cleaning module 30. The discharge mechanism 130 can be arranged on a side of the support mechanism 110 adjacent to the charging module 120. The discharge mechanism 130 may include a first pipe 131, a second pipe 132 and a discharge line 133. The first pipe 131 can be formed of a rigid material such as metal. The second pipe 132 can be formed of a material that can be stretched in the longitudinal direction (for example, a flexible synthetic resin). The second pipe 132 can be connected to the discharge line 133, which is connected to a decompression device (such as a pump) that provides decompression. The first pipe 131 can be moved along a first direction X and a third direction Z by a drive mechanism (not shown). The drive mechanism may include a motor and an arm, etc., which is extended and retracted by the motor. The drive mechanism can be installed in the support frame 102.

[0061] The support mechanism 110, a portion of the frame 100, the frame sensor 103 mounted on the frame 100, the charging module 120, and the discharge mechanism 130 may function as one unit for discharging particles collected in the cleaning module 30 to the outside of the cleaning module 30 and charging a battery included in the cleaning module 30. Hereinafter, this one unit is defined as an emptying / charging portion EM. Although Figures 1 to 3 An example in which one drain / charge section EM is provided is illustrated, but the storage device 10 may include a plurality of drain / charge sections EM.

[0062] The conveying unit 140 may convey the receiving container 20 within the storage device 10. The conveying unit 140 may convey the cleaning module 30 within the storage device 10. The conveying unit 140 may include a running rail 141, an elevating rail 142, a traveling actuator 143, and a hand module 144.

[0063] The running track 141 may extend in a first direction X. The running track 141 may be implemented by a pair of tracks. The lifting track 142 may extend in a third direction Z. The lifting track 142 may be implemented by a plurality of rails.

[0064] The travel actuator 143 may travel along the running rail 141. The travel actuator 143 may be a travel device configured to travel along the running rail 141. In addition, the lifting rail 142 may be mounted on the travel actuator 143. Accordingly, when the travel actuator 143 travels in the first direction X, the position of the lifting rail 142 may change in the first direction X.

[0065] The hand module 144 can move along the lifting rail 142. That is, the hand module 144 can be mounted on the lifting rail 142 and can be configured so that the position of the hand module 144 changes in the third direction Z. The hand module 144 can include a hand actuator 144a and a hand 144b mounted on the hand actuator 144a. The hand actuator 144a can generate a driving force to move the hand module 144 up and down along the lifting rail 142. The hand actuator 144a can include at least one arm (not shown) that moves the hand 144b in the second direction Y. The hand actuator 144a can be configured to rotate the hand 144b about a rotation axis facing the third direction Z. That is, the position of the hand 144b of the transfer unit 140 can change in a selected direction among the first direction X, the second direction Y, and the third direction Z, and the hand 144b can rotate about the rotation axis facing the third direction Z.

[0066] The receiving container 20 can accommodate an object. The receiving container 20 can accommodate a substrate (such as a wafer or glass) or a mask. The receiving container 20 can accommodate multiple substrates. The receiving container 20 can be a carrier, a box, a FOUP, or a POD. The receiving container 20 can be configured to be transported by the conveying unit 140 described below. In addition, the receiving container 20 can be configured to be transported by an overhead conveyor (OHT) or an automatic mobile robot (AMR) installed or arranged in a semiconductor production line. A plurality of receiving containers 20 can be stored in the storage device 10.

[0067] The receiving container 20 may include a container head 21 gripped by the hand 144 b and a receiving portion 22 defining a receiving space therein.

[0068] When viewed from above, the rear surface of the receiving portion 22 can have a rounded or inclined shape so as not to come into contact with the frame sensor 103 mounted on the support frame 102. The receiving portion 22 can accommodate objects to be processed in the form of disks, such as wafers. When the receiving portion 22 has a rectangular parallelepiped shape, the ratio of free space to the internal space of the receiving portion 22 can be increased. That is, when the receiving container 20 is manufactured in a rectangular parallelepiped shape, the number of objects that can be accommodated in the receiving container 20 can remain the same, but the weight of the receiving container 20 may increase compared to when the rear surface of the receiving portion 22 is formed in a rounded or inclined shape, resulting in lower efficiency. Accordingly, when viewed from above, the rear surface of the receiving portion 22 of the receiving container 20 of the present disclosure can have a rounded or inclined shape so as not to come into contact with the frame sensor 103 mounted on the support frame 102.

[0069] The controller 40 can control the storage device 10. The controller 40 can control the components of the storage system 1. The controller 40 can transmit a control signal to the conveying unit 140 to control the conveying unit 140. In addition, based on the detection signals transmitted by the frame sensor 103 and the shelf sensor 113, the controller 40 can determine the receiving portion ST in which the receiving container 20 is placed and the receiving portion ST on which the cleaning module 30 performs a cleaning process, and can also determine whether the emptying / charging portion EM discharges particles collected by the cleaning module 30 to the outside and whether the emptying / charging portion EM charges the battery of the cleaning module 30. The controller 40 may include a computer composed of a memory, a CPU, and the like.

[0070] The storage system 1 may include at least one cleaning module 30. The cleaning module 30 may have a shape identical to or similar to that of the receiving container 20. Since the cleaning module 30 has a shape identical to or similar to that of the receiving container 20, the conveyor unit 140 can transport not only the receiving container 20 but also the cleaning module 30 in the same manner. In other words, the conveyor unit 140 can transport the receiving container 20 between the receiving sections ST. Furthermore, the conveyor unit 140 can transport the cleaning module 30 between the receiving sections ST and between the receiving section ST and the draining / charging section EM.

[0071] The cleaning module 30 may include a shell 300 that defines an internal space and a head 360 grasped by the hand 144b of the conveying unit 140. When viewed from above, the shell 300 may have a rectangular shape. The shell 300 may have a rectangular parallelepiped shape. Unlike the rear surface of the accommodating portion 22, the rear surface of the shell 300 may have a flat shape so as to contact the frame sensor 103. As will be described below, the cleaning module 30 is configured to suck particles such as dust accumulated on the support mechanism 110. That is, the cleaning module 30 of the present disclosure may be configured so that as many parts of the shell 300 as possible are in close contact, so that dust accumulated on the portion where the shelf 111 and the support frame 102 are connected can be effectively collected.

[0072] Figure 4 is a view used to describe the cleaning module, and Figure 5 When viewed from above Figure 4 View of the suction section.

[0073] Reference Figure 4 and Figure 5 The cleaning module 30 may include a housing 300 , an exhaust part 310 , a discharge part 320 , a suction part 330 , a suction mechanism 340 , a collecting member 350 , a module head 360 , a battery 370 , and a communication device 380 .

[0074] The housing 300 may define an interior space in which particles (such as dust) are collected. The housing 300 may have a container shape open at the bottom. The housing 300 may have a rectangular parallelepiped shape open at the bottom. The module head 360 may be mounted on the top of the housing 300. The module head 360 may have a shape that is the same as or similar to the shape of the container head 21 described above. The module head 360 may be grasped by the hand 144b of the conveying unit 140.

[0075] The discharge portion 310 may be mounted on one side of the housing 300. The discharge portion 310 may have a plate shape having a plurality of holes formed therein. The discharge portion 310 may be a portion that discharges airflow introduced into the interior space by the suction mechanism 340, which will be described below, to the exterior of the housing 300. A plurality of discharge portions 310 may be provided. The discharge portion 310 may be mounted on one side and on opposite sides of the housing 300.

[0076] The discharge portion 320 may be mounted on one side of the housing 300. The discharge portion 320 may be a door that opens / closes an opening formed in a lateral portion of the housing 300. The discharge portion 320 may be mounted in a position facing the particles D captured by the capture member 350, which will be described below. The discharge portion 320 may have a plate shape. Furthermore, the discharge portion 320 may be mounted on one side of the housing 300 via a hinge H.

[0077] The suction portion 330 may be mounted at the bottom of the housing 300. The suction portion 330 may be mounted at the bottom of the housing 300 and may be combined with the housing 300 to form an interior space. The suction portion 330 may have a plate shape. A plurality of holes 331 and 332 may be formed in the suction portion 330. The holes formed in the suction portion 330 may include a first hole 331 and a second hole 332. The second hole 332 may have a smaller diameter than the first hole 331. When the area where the first hole 331 is formed is referred to as the first area, and the area where the second hole 332 is formed is referred to as the second area, the number of second holes 332 per unit area in the second area may be greater than the number of first holes 331 per unit area in the first area. The second hole 332 may be formed in a position corresponding to the shelf sensor 113, which is mounted on the support mechanism 110. For example, when viewed from above, the second hole 332 may be closer to the shelf sensor 113 than the first hole 331.

[0078] The suction unit 330 may include a first hole 331 and a second hole 332 so as to effectively collect dust (such as particles) near the shelf sensor 113. When the suction mechanism 340 forms an airflow, since the second hole 332 has a relatively small area, the airflow passing through the second hole 332 can flow relatively quickly. In addition, the second hole 332 is relatively densely formed. Accordingly, a large amount of fast-flowing airflow is generated near the shelf sensor 113. The dust trapped between the shelf sensor 113 and the shelf 111 may be difficult to remove easily. However, when the suction unit 330 has the second hole 332, the dust trapped between the shelf 111 and the shelf sensor 113 can be removed relatively easily.

[0079] In addition, a support leg 333 may be installed at the bottom of the suction portion 330. The support leg 333 may space a lower surface of the suction portion 330 from an upper surface of the support shelf 111.

[0080] The suction mechanism 340 may be installed in the inner space defined by the housing 300. The suction mechanism 340 may form an airflow introduced into the inner space from below the housing 300. The suction mechanism 340 may include a motor 341, a fan 342, and a filter 343. The motor 341 may rotate the fan 342.

[0081] Figure 6 For display Figure 4 A view of the status of particles collected by the cleaning module. Figure 6 FIG. 3 shows a state in which the cleaning module 30 placed in the receiving portion ST cleans dust accumulated on the support mechanism 110 of the receiving portion ST. Figure 6 When the fan 342 rotates, an airflow may be formed from below the cleaning module 30 into the interior space of the housing 300. The formed airflow may collect dust (such as particles D) accumulated on the support shelf 111. The filter 343 may interrupt the direct delivery of the particles D to the motor 341.

[0082] The capturing member 350 can capture particles D sucked by the suction mechanism 340. The capturing member 350 can have an inverted funnel shape with increasing width from top to bottom. The capturing member 350 can include an inlet portion 351, an inclined portion 352, and a capturing portion 353. The inlet portion 351 can face the suction mechanism 340. The inclined portion 352 can extend downward from the inlet portion 351. The inclined portion 352 can have an inclined surface perpendicular to the third direction Z. In addition, the capturing portion 353 can extend from the inclined portion 352 in a lateral direction. Particles D introduced into the interior space of the housing 300 through the inlet portion 351 can flow downward along the inclined surface of the inclined portion 352 and can be collected in the capturing portion 353.

[0083] The communication device 380 may be a wireless communication device including a LAN card. The communication device 380 may transmit information about the status of the cleaning module 30 to the controller 40. For example, the cleaning module 30 may include a particle measuring device (not shown) that measures the amount of particles D in the internal space of the housing 300 as needed. The particle measuring device may be a particle meter. The communication device 380 may transmit the amount of particles D in the internal space measured by the particle measuring device to the controller 40. The communication device 380 is shown as being installed inside the module head 360. However, the present invention is not limited thereto, and the communication device 380 may be attached to the housing 300.

[0084] Figure 7 To show in Figure 4 FIG4 is a view showing a state in which particles collected in a cleaning module are discharged to the outside of the cleaning module. Figure 7 A state in which the cleaning module 30 is placed in the draining / charging portion EM and the particles D collected by the cleaning module 30 are discharged to the outside of the cleaning module 30 is shown.

[0085] The first duct 131 of the discharge mechanism 130 may face the discharge portion 320. When the cleaning module 30 is placed in the emptying / charging portion EM, the driving mechanism of the discharge mechanism 130 may move the first duct 131 in the lateral direction. A contact sensor (not shown) may be installed at the entrance of the first duct 131. When the contact sensor senses contact with the discharge portion 320, the first duct 131 may move an additional set distance and the discharge portion 320 may be opened. When the discharge portion 320 is opened, the controller 40 may transmit a control signal to the discharge mechanism 130. The discharge mechanism 130 receiving the control signal may generate vacuum pressure and may suck the particles D captured by the capturing member 350. The particles D captured by the capturing member 350 may be discharged to the outside of the cleaning module 30 through the discharge mechanism 130.

[0086] Figure 8 To show the Figure 4 A view of the battery charge status of the cleaning module. Figure 8 The cleaning module 30 may include a battery 370 for operating components of the cleaning module 30 (e.g., the suction mechanism 340 and the communication device 380). The battery 370 can deliver power to the suction mechanism 340 or the communication device 380, etc. When the cleaning module 30 is placed in the emptying / charging portion EM, the charging module 120 mounted on the support frame 102 can charge the battery 370 in a contactless manner. The charging module 120 can charge the battery 370 by applying a well-known wireless charging method (such as an electromagnetic induction method, a magnetic resonance method, an electric field coupling method, or a radio wave reception method).

[0087] Hereinafter, a method of cleaning the storage device 10 using the cleaning module 30 of the present disclosure will be described.

[0088] Figure 9 A flow chart showing a method for cleaning a storage device in a process step. Figure 1 、 Figure 2 、 Figure 3 and Figure 9 , a process step may be a step of the operation of the storage device 10. In the process step, the conveying unit 140 may receive a control signal from the controller 40 to perform a specified task. The task may refer to a conveying operation to be performed by the conveying unit 140. When the cleaning module 30 according to an embodiment of the present disclosure is used, the support mechanism 110 of the storage device 10 can be cleaned without stopping the operation of the storage device 10.

[0089] Specifically, the method S10 of cleaning the storage device 10 in the process step may include the following steps.

[0090] In step S11, the transport unit 140 may grip the cleaning module 30. The hand 144b of the transport unit 140 may grip the module head 360 of the cleaning module 30. Since the shape of the module head 360 is the same as or similar to the shape of the container head 21, the hand 144b may grip both the module head 360 and the container head 21. Accordingly, a separate hand module 144 for transporting the cleaning module 30 may not be required.

[0091] In step S12, the transport unit 140 may place the cleaning module 30 on the support mechanism 110 that needs to be cleaned. The hand module 144 of the transport unit 140 may place the cleaning module 30 on the support mechanism 110 that needs to be cleaned. The support mechanism 110 that needs to be cleaned may be pre-selected by the controller 40. For example, the controller 40 may preferentially select the support mechanism 110 that was last cleaned by the cleaning module 30 or directly cleaned by the operator during maintenance as the support mechanism 110 that needs to be cleaned.

[0092] In step S13, the transfer unit 140 may perform another work while the cleaning module 30 cleans the support mechanism 110. The other work performed by the transfer unit 140 may be an operation of transporting the receiving container 20 or an operation of transporting another cleaning module 30 of the storage system 1.

[0093] In step S14 , the cleaning module 30 on which the cleaning operation has been completely performed may be transported to another supporting mechanism 110 .

[0094] As described above, according to the cleaning method of the embodiment of the present disclosure, the storage device 10 can be cleaned without stopping the operation of the storage device 10 even in the process step. In addition, since the conveying unit 140 transports the cleaning module 30, the operator does not need to move to a high position to clean the support shelf 111 located at a high position.

[0095] Figure 10 A flow chart showing a method for cleaning a storage device during a maintenance step. Figure 1 、 Figure 2 、 Figure 3 and Figure 10 The maintenance step may be a step in which the storage device 10 is not operated. In the maintenance step, maintenance of the storage device 10 may be performed.

[0096] Specifically, the method S20 of cleaning the storage device 10 in the maintenance step may include the following steps.

[0097] In step S21 , the transfer unit 140 may grip the cleaning module 30 as in step S11 .

[0098] In step S22, the transport unit 140 may position the cleaning module 30 above the support mechanism 110 that needs to be cleaned. Positioning the cleaning module 30 above the support mechanism 110 may include not only Figure 11 Positioning the cleaning module 30 on the support mechanism 110 as shown may further include grasping the cleaning module 30 by the hand 144 b such that the cleaning module 30 is spaced apart from the support mechanism 110 .

[0099] In step S23, the transport unit 140 may be in standby while the cleaning module 30 cleans the support mechanism 110. The hand 144b of the transport unit 140 may be in standby while the cleaning module 30 cleans the support mechanism 110.

[0100] In step S24 , the cleaning module 30 on which the cleaning operation has been completely performed may be transported to another supporting mechanism 110 .

[0101] When the hand module 144 of the transfer unit 140 is on standby during the maintenance step as described above, the support mechanism 110 can be cleaned more quickly than when the hand module 144 is not on standby. Furthermore, during the maintenance step, the cleaning module 30 can be transported between adjacent receiving sections ST. For example, when the first receiving section in the receiving sections ST is completely cleaned, the cleaning module 30 can be transported from the first receiving section to a second receiving section located next to the first receiving section or just above / below the first receiving section, and the support mechanism 110 can be cleaned. That is, during the maintenance step, in order to clean the support mechanism 110 more quickly, while the cleaning module 30 is cleaning the support mechanism 110, the hand module 144 can be on standby without performing another task.

[0102] That is, according to the embodiment of the present disclosure, by distinguishing the operation of the conveying unit 140 for conveying the cleaning module 30 in the process step and the maintenance step, it is possible to facilitate more efficient cleaning of the support mechanism 110 in each step. In addition, in the process step, the cleaning module 30 can be automatically conveyed by the controller 40. In addition, in the maintenance step, the cleaning module 30 can be automatically conveyed by the controller 40, or the operator can manually and directly control the conveyance of the cleaning module 30 through the controller 40.

[0103] Although the cleaning module 30 has been described as cleaning dust accumulated on the support mechanism 110 included in the warehouse, the present disclosure is not limited thereto. For example, the cleaning module 30 can remove dust accumulated on various components (e.g., an EFEM port, a side track buffer (STB), and an EQ port) capable of receiving the container 20.

[0104] Although it has been described that the cleaning module 30 is transported by the above-mentioned conveying unit 140, the present disclosure is not limited thereto. For example, the cleaning module 30 may be transported by the above-mentioned OHT or AMR.

[0105] As described above, according to the embodiments of the present disclosure, the storage device can be efficiently cleaned.

[0106] Furthermore, according to the embodiments of the present disclosure, particles accumulated on the supporting shelves included in the storage device can be efficiently collected.

[0107] Furthermore, according to the embodiments of the present disclosure, the storage device can be cleaned without stopping the operation of the storage device during a process step in which the storage device is operating.

[0108] In addition, according to the embodiments of the present disclosure, in the maintenance step of performing maintenance of the storage device, the storage device can be cleaned quickly.

[0109] Effects of the present disclosure are not limited to the above-mentioned effects, and any other effects not mentioned herein can be clearly understood by those skilled in the art to which the present disclosure pertains from the present specification and the accompanying drawings.

[0110] Although the embodiments of the present disclosure have been described above, it should be understood that the embodiments provided are intended to aid understanding of the present disclosure and are not intended to limit the scope of the present disclosure, and that various modifications and equivalent embodiments may be made without departing from the spirit and scope of the present disclosure. The drawings provided in the present disclosure are only drawings of the best embodiments of the present disclosure. The scope of the present disclosure should be determined by the technical concepts of the claims, and it should be understood that the scope of the present disclosure is not limited to the literal description of the claims, but actually extends to the scope of equivalents of technical value.

[0111] While the present disclosure has been described with reference to the embodiments thereof, it will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the disclosure as set forth in the appended claims.

Claims

1. A cleaning module for cleaning a storage device, the storage device comprising a conveying unit, the cleaning module comprising: a housing configured to define an interior space; a suction mechanism installed in the interior space and configured to form an airflow introduced into the interior space; as well as a discharge portion configured to discharge the airflow introduced into the internal space by the suction mechanism to the outside of the housing, wherein The cleaning module also includes a head gripped by the hand of the transfer unit.

2. The cleaning module according to claim 1, further comprising: A capturing member is configured to capture particles introduced into the internal space by the airflow formed by the suction mechanism.

3. The cleaning module according to claim 2, wherein: The trap member has an inverted funnel shape with increasing width from top to bottom.

4. The cleaning module according to claim 3, wherein: The capturing member comprises: an inlet portion configured to face the suction mechanism; and An inclined portion is configured to extend downward from the inlet portion, the inclined portion having a surface inclined with respect to a vertical direction.

5. The cleaning module according to claim 1, further comprising: A suction portion is arranged to face the support mechanism of the storage device and is installed at the bottom of the housing, the suction portion having a plate shape and having a plurality of holes formed therein. The cleaning module according to claim 5 , wherein: The plurality of holes formed in the suction portion include: a first hole; and A second hole having a smaller diameter than the first hole.

7. The cleaning module according to claim 6, wherein: When the area in which the first holes are formed in the suction portion is referred to as a first area, and the area in which the second holes are formed in the suction portion is referred to as a second area, the number of the second holes per unit area in the second area is greater than the number of the first holes per unit area in the first area.

8. The cleaning module according to claim 6, wherein: The second hole is formed in a position corresponding to a shelf sensor mounted on the supporting mechanism of the storage device.

9. The cleaning module according to claim 4, further comprising: A discharge portion is installed in a position facing the particles trapped by the trap member and is coupled to the housing through a hinge.

10. A storage system for storing objects, the storage system comprising: at least one receiving container, the object being received in the at least one receiving container; a storage device configured to store the receiving container; as well as at least one cleaning module according to any one of claims 1 to 9, configured to collect particles accumulated on the support means of the storage device, Wherein, the storage device includes: a plurality of receiving portions, each of the plurality of receiving portions including the support mechanism; and A transport unit is configured to transport the receiving container and the cleaning module between the receiving parts.

11. The storage system according to claim 10, wherein: The receiving portion is arranged along a first direction and a third direction perpendicular to the ground, and The hand of the conveying unit is configured to transport the receiving container and the cleaning module between the receiving parts.

12. The storage system according to claim 11, wherein Each of the support mechanisms comprises: a shelf configured to support the receiving container or the cleaning module; and A shelf sensor is installed on the shelf.

13. The storage system according to claim 12, wherein: The cleaning module comprises: a housing configured to define an interior space; a suction mechanism installed in the interior space and configured to form an airflow introduced into the interior space; a discharge portion configured to discharge the airflow introduced into the internal space by the suction mechanism to the outside of the housing; and a suction portion mounted at the bottom of the housing, and Herein, the suction portion has a plate shape and has a plurality of holes formed therein.

14. The storage system according to claim 13, wherein: The plurality of holes comprises: a first hole; and A second hole is positioned closer to the shelf sensor than the first hole when viewed from above.

15. The storage system according to claim 14, wherein: The second hole has a smaller diameter than the first hole.

16. The storage system according to claim 14, wherein: When the area in which the first holes are formed in the suction portion is referred to as a first area, and the area in which the second holes are formed in the suction portion is referred to as a second area, the number of the second holes per unit area in the second area is greater than the number of the first holes per unit area in the first area.

17. The storage system according to claim 10, wherein: The storage device further comprises at least one discharge portion configured to discharge the particles collected in the cleaning module from the cleaning module, and The discharge portion includes a discharge mechanism configured to discharge the particles collected in the cleaning module to the outside by opening the discharge portion of the cleaning module, and the discharge portion is installed in a position facing the particles collected in the cleaning module.

18. The storage system according to claim 17, wherein: The discharge mechanism includes: a first duct formed of a rigid material and configured to face the discharge portion; and A second conduit is formed of a flexible material and connected to the first conduit.

19. A method for cleaning a storage device using the cleaning module according to any one of claims 1 to 9, wherein the storage device contains an object, the method comprising: transporting the cleaning module to a first receiving portion among a plurality of receiving portions included in the storage device, and collecting particles accumulated on a support mechanism of the first receiving portion; as well as When the cleaning process is completely performed on one of the plurality of receiving parts, the cleaning module is transported to a second receiving part of the plurality of receiving parts, and particles accumulated on a support mechanism of the second receiving part are collected.

20. The method according to claim 19, wherein In the process step of the storage device operation, in the case where the cleaning module collects the particles accumulated on the support mechanism of the first receiving part, the hand module configured to transport the cleaning module performs another work, and Wherein, in the maintenance step of performing maintenance of the storage device, the hand module stands by until the cleaning module completely collects the particles accumulated on the supporting mechanism of the first receiving part, and when the particles of the first receiving part are completely collected, the hand module transports the cleaning module to the second receiving part to collect the particles accumulated on the supporting mechanism of the second receiving part.

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