A semiconductor underactuated L-shaped motion vacuum valve

Abstract

The present invention belongs to the fields of semiconductor manufacturing technology and vacuum valves, and particularly relates to a semiconductor under-driven L-shaped moving vacuum valve. A semiconductor under-driven L-shaped moving vacuum valve includes a valve plate, a valve plate seat, a vacuum screw, a thrust bearing, a bellows integrated shaft, a cylinder seat, a cylinder, a limit seat, a fulcrum bearing, a connecting rod seat, a fulcrum connecting rod, a connecting shaft, a retaining ring, a bushing, a short connecting rod, a torsion spring, a cylinder connecting seat, a support plate, a sealing plate, and a housing; the upper end of the cylinder is fixedly connected to the cylinder seat by screws, and the lower end of the cylinder is connected to the cylinder connecting seat; the cylinder connecting seat is connected to the connecting rod seat by screws. The present invention realizes the vertical movement of the valve plate, reduces the manufacturing cost, and then realizes the horizontal movement of the valve plate through a parallelogram mechanism combined with a slider pressing mechanism, ensuring that when the sealing surface of the valve plate and the door frame is fully fitted, it avoids pollution and loss caused by slight friction, and ensures that the valve plate and the O-ring are evenly pressed, ensuring the service life of the valve.

Description

Technical Field

[0001] The present invention belongs to the fields of semiconductor manufacturing technology and vacuum valves, and particularly relates to a semiconductor under-driven L-shaped motion vacuum valve. Background Art

[0002] In semiconductor manufacturing processes, wafers are often transferred to various vacuum process chambers for processing. Valves play a crucial role in isolating and connecting these vacuum process chambers due to their ability to quickly open and close, high repetitive operation life, and high airtightness.

[0003] For existing vacuum valves applied in semiconductor process chambers, in order to reduce the particles generated by the friction between the valve plate and the door frame sealing surface during valve opening and closing, the movement trajectory during the valve opening and closing process is designed as an L-shaped or pseudo-L-shaped movement trajectory. The L-shaped movement trajectory is generally decomposed into two actions: vertical and horizontal, which are respectively achieved by driving two cylinders successively. However, limited by the layout dimensions of each chamber, it is necessary to customize the valve structure, especially its gas path, and has high manufacturing precision requirements for each component, increasing the manufacturing cost. Moreover, due to defects in pneumatic control accuracy, it is difficult to ensure the repetitive movement accuracy and service life. The pseudo-L-shaped movement trajectory is generally decomposed into two actions: vertical and swinging. The vertical movement is achieved by driving a cylinder, and the swinging movement can be achieved through special-shaped guiding structures, connecting rod structures, etc. However, during the process of the valve plate fitting with the door frame sealing surface, slight friction will occur, causing pollution and loss, and the O-ring and the valve plate are unevenly pressed, affecting the service life of the valve. Summary of the Invention

[0004] The present invention provides a semiconductor under-driven L-shaped motion vacuum valve.

[0005] The technical solution adopted by the present invention is as follows:

[0006] A semiconductor under-driven L-shaped motion vacuum valve includes a valve plate, a valve plate seat, a vacuum screw, a thrust bearing, a bellows integrated shaft, a cylinder seat, a cylinder, a limit seat, a fulcrum bearing, a connecting rod seat, a fulcrum connecting rod, a connecting shaft, a retaining ring, a bushing, a short connecting rod, a torsion spring, a cylinder connecting seat, a support plate, a sealing plate, and a housing;

[0007] The upper end of the cylinder is fixedly connected to the cylinder seat by screws, and the lower end of the cylinder is connected to the cylinder connecting seat; the cylinder connecting seat is connected to the connecting rod seat by screws;

[0008] The cylinder seat is fixed on the valve body substrate by screws; the upper end of the support plate is connected to the cylinder seat by screws, and the lower end of the support plate is connected to the sealing plate by screws; the housing is connected to the cylinder seat and the sealing plate by screws; a limit seat is fixedly connected inside the valve body substrate;

[0009] The valve plate and the valve plate seat are connected together through a vacuum screw and a thrust bearing;

[0010] The tip of the bellows integrated shaft penetrates through the limit seat and the valve body substrate and is connected to the thrust bearing by a vacuum screw;

[0011] The bellows integrated shaft is connected to the connecting rod seat through a fulcrum connecting rod and a short connecting rod;

[0012] The upper connecting shaft of the bellows integrated shaft is pivotally connected to the fulcrum connecting rod through a fulcrum bearing and a retaining ring.

[0013] The lower connecting shaft of the bellows integrated shaft is pivotally connected to the short connecting rod through a fulcrum bearing and a retaining ring;

[0014] The connecting rod seat is pivotally connected to the fulcrum connecting rod through a bushing, a torsion spring and a retaining ring;

[0015] The connecting rod seat is pivotally connected to the short connecting rod through a bushing, a torsion spring and a retaining ring.

[0016] The beneficial effects of the present invention are as follows:

[0017] 1. Based on the parallelogram mechanism combined with the slider pressing mechanism, the present invention proposes a motion mechanism of an underactuated L-shaped valve plate.

[0018] 2. A semiconductor underactuated L-shaped motion vacuum valve proposed by the present invention has a simple structure and low manufacturing and maintenance costs.

[0019] 3. A semiconductor underactuated L-shaped motion vacuum valve proposed by the present invention has no friction when the valve plate fits with the sealing surface of the door frame, is not easy to generate dust and fine particles, improves the protection of clean materials such as wafers, and ensures the yield.

[0020] 4. A semiconductor underactuated L-shaped motion vacuum valve proposed by the present invention, when the valve plate is closed, the valve plate and the O-ring are uniformly pressed, ensuring the service life of the valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic structural diagram of the present invention;

[0022] Figure 2 is a side view of the present invention;

[0023] Figure 3 is a side sectional view of the present invention;

[0024] Figure 4 is a top sectional view of the bellows integrated shaft of the present invention;

[0025] Figure 5 is a schematic diagram of an embodiment of the present invention patent. DETAILED DESCRIPTION OF THE INVENTION

[0026] The present invention will be further described in detail below with reference to the Figures 1-5 specification drawings and reference numerals.

[0027] A semiconductor underactuated L-shaped motion vacuum valve, comprising a valve plate 100 (an O-ring is provided on the valve plate), a valve plate seat 101, a vacuum screw 102, a thrust bearing 103, a bellows integrated shaft 104, a cylinder seat 106, a cylinder 107, a limit seat 108, a fulcrum bearing 109, a connecting rod seat 110, a fulcrum connecting rod 111, a connecting shaft 112, a retaining ring 113, a bushing 114, a short connecting rod 115, a torsion spring 116, a cylinder connecting seat 117, a support plate 118, a sealing plate 119, and a housing 120;

[0028] The upper end of the cylinder 107 is fixedly connected to the cylinder seat 106 by screws, and the lower end of the cylinder 107 is connected to the cylinder connecting seat 117; the cylinder connecting seat 117 is connected to the connecting rod seat 110 by screws;

[0029] The cylinder seat 106 is fixed on the valve body substrate 105 by screws; the upper end of the support plate 118 is connected to the cylinder seat 106 by screws, and the lower end of the support plate 118 is connected to the sealing plate 119 by screws; the housing 120 is connected to the cylinder seat 106 and the sealing plate 119 by screws; a limit seat 108 is fixedly connected inside the valve body substrate 105;

[0030] The valve plate 100 and the valve plate seat 101 are connected together by a vacuum screw 102 and a thrust bearing 103;

[0031] The front end of the bellows integrated shaft 104 passes through the limit seat 108 and the valve body substrate 105 and is connected to the thrust bearing 103 by a vacuum screw 102;

[0032] The bellows integrated shaft 104 is connected to the connecting rod seat 110 by a fulcrum connecting rod 111 and a short connecting rod 115;

[0033] The upper connecting shaft 112 of the bellows integrated shaft 104 is pivotally connected to the fulcrum connecting rod 111 through a fulcrum bearing 109 and a retaining ring 113.

[0034] The lower connecting shaft 112 of the bellows integrated shaft 104 is pivotally connected to the short connecting rod 115 through a fulcrum bearing 109 and a retaining ring 113;

[0035] The connecting rod seat 110 is pivotally connected to the fulcrum connecting rod 111 through a bushing 114, a torsion spring 116 and a retaining ring 113;

[0036] The connecting rod seat 110 is pivotally connected to the short connecting rod 115 through a bushing 114, a torsion spring 116 and a retaining ring 113.

[0037] The working process is as Figure 5As shown, in the initial state, the valve plate is open, the cylinder is in the maximum extended position, and the bellows is in the minimum compressed state; when the cylinder starts to contract, the connecting rod seat is driven to move vertically upward through the cylinder connecting seat. During this period, due to the self-weight of the valve plate and the action of the torsion spring, the angular relationship between the short connecting rod and the fulcrum connecting rod and the connecting rod seat remains unchanged until the fulcrum connecting rod contacts the fulcrum bearing; when the cylinder continues to contract, since the fulcrum bearing plays a role in supporting and limiting the slider, the angles of the short connecting rod and the fulcrum connecting rod with the connecting rod seat change, and the bellows integral shaft drives the valve plate to move horizontally, realizing an L-shaped movement until the valve plate closes.

Claims

1. A semiconductor underactuated L-shaped motion vacuum valve, characterized in that, It includes a valve plate, a valve plate seat, a vacuum screw, a thrust bearing, a bellows integrated shaft, a cylinder seat, a cylinder, a limit seat, a fulcrum bearing, a connecting rod seat, a fulcrum connecting rod, a connecting shaft, a retaining ring, a bushing, a short connecting rod, a torsion spring, a cylinder connecting seat, a support plate, a sealing plate, and a housing; The upper end of the cylinder is fixedly connected to the cylinder seat by screws, and the lower end of the cylinder is connected to the cylinder connecting seat; the cylinder connecting seat is connected to the connecting rod seat by screws; The cylinder seat is fixed on the valve body substrate by screws; the upper end of the support plate is connected to the cylinder seat by screws, and the lower end of the support plate is connected to the sealing plate by screws; the housing is connected to the cylinder seat and the sealing plate by screws; a limit seat is fixedly connected inside the valve body substrate; The valve plate and the valve plate seat are connected together by a vacuum screw and a thrust bearing; The front end of the bellows integrated shaft passes through the limit seat and the valve body substrate and is connected to the thrust bearing by a vacuum screw; The bellows integrated shaft is connected to the connecting rod seat by a fulcrum connecting rod and a short connecting rod; The connecting shaft of the bellows integrated shaft located above is pivotally connected to the fulcrum connecting rod through a fulcrum bearing and a retaining ring; The connecting shaft of the bellows integrated shaft located below is pivotally connected to the short connecting rod through a fulcrum bearing and a retaining ring; The connecting rod seat is pivotally connected to the fulcrum connecting rod through a bushing, a torsion spring and a retaining ring; The connecting rod seat is pivotally connected to the short connecting rod through a bushing, a torsion spring and a retaining ring.

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