A metal mask frame assembly and a metal mask assembly

By designing a metal mask frame assembly, adjusting the sag using pressure strips and screw connectors, and combining spring components and support roller structures, the problem of vapor deposition defects caused by metal mask sag was solved, thereby improving the production quality and component lifespan of OLED display panels.

CN116377383BActive Publication Date: 2026-02-27JIANGSU TOPTO MATERIALS CO LTD
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Patent Information

Application Number
CN202310372806.2
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-04-10
Publication Date
2026-02-27
Estimated Expiration
2043-04-10

AI Technical Summary

Technical Problem

Metal masks cause deposition defects in OLED display panel production due to sagging. Existing methods are difficult to effectively reduce sagging, which affects production quality.

Method used

Design a metal photomask frame assembly, including a main frame and a pressure strip, connected by screw connectors. The lower surface of the pressure strip protrudes downward and is adjustable to reduce sagging. Combined with spring components and a support roller structure to support the metal photomask.

Benefits of technology

It effectively reduces the sagging of metal photomasks, improves production quality, extends service life, and avoids pattern misalignment and scratches.

✦ Generated by Eureka AI based on patent content.

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Abstract

The metal mask frame assembly and the metal mask assembly disclosed by the present application relate to the field of metal mask. The metal mask frame assembly comprises a main frame and at least one pressing strip. The middle part of the main frame has an opening, and a welding area is arranged around the opening and located in the upper surface of the main frame. The pressing strip is arranged on the upper side of the main frame, located between the edge of the opening and the welding area, and extends along the direction of the edge of the opening. At least the two ends of the pressing strip are connected with the main frame through screw connectors. The metal mask assembly comprises the metal mask frame assembly and a metal mask. The metal mask covers the opening and the edge of the metal mask is connected with the welding area. The lower surface of the pressing strip presses the upper surface of the metal mask. The present application can be used to reduce the sagging amount of the metal mask, and help to improve the quality of the evaporation product and the service life of the mask assembly.
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Description

TECHNICAL FIELD

[0001] The present application relates to the field of metal mask, in particular to a metal mask frame assembly and a metal mask assembly. BACKGROUND

[0002] OLED display devices are applied more and more widely due to their advantages of self-luminous, bright color, low power consumption, wide viewing angle, etc. At present, evaporation technology is generally used in the production of OLED display panels. In the evaporation process, the metal mask can effectively control the position of the organic material deposited on the substrate, so the metal mask plays an extremely important role in the entire OLED display panel production process. Generally, the mask assembly is composed of a metal mask frame and a metal mask, and the latter is stretched and welded on the former. The metal mask mainly includes a common metal mask (CMM) and a fine metal mask (FMM), the CMM is used for evaporating common layers, and the FMM is used for evaporating light-emitting layers.

[0003] After the metal mask is stretched and welded on the metal mask frame, due to the influence of its own gravity, the metal mask will have different degrees of sagging. This sagging phenomenon will cause defects such as shadowing of the pattern evaporated on the substrate. Therefore, in order to improve the production quality, it is necessary to reduce the sagging amount of the metal mask.

[0004] In the past, in order to reduce the sagging amount of the metal mask, the thickness of the metal mask can be reduced, but the thickness reduction is limited by factors such as mechanical durability. Alternatively, a support bar can be added below the metal mask to prevent the metal mask from sagging. However, these methods have limited improvement on the sagging amount of the metal mask, and cannot continue to improve the sagging amount of the metal mask in the metal mask assembly that has been put into use. Therefore, in view of the above problems, it is urgent to seek new solutions. SUMMARY

[0005] In order to at least solve one of the problems in the prior art, the present application provides a metal mask frame assembly, which comprises a main frame and at least one pressing strip.

[0006] The middle part of the main frame has an opening, and a welding area is arranged around the opening, and the welding area is located in the upper surface of the main frame.

[0007] The pressing strip is arranged on the upper side of the main frame, located between the edge of the opening and the welding area, and extends along the direction of the edge of the opening.

[0008] At least at both ends of the pressing strip, the pressing strip is connected to the main frame body by a screw connector.

[0009] As a further design, the lower surface of the pressing strip protrudes downward, and the height of the downward protrusion is different at different positions along the length direction of the pressing strip.

[0010] As a further design, the height of the downward protrusion of the lower surface of the pressing strip gradually decreases from the middle part of the pressing strip to both ends of the pressing strip.

[0011] As a further design, in any vertical cross section along the length direction of the pressing strip, the downward protrusion of the lower surface of the pressing strip is arc-shaped or step-shaped.

[0012] As a further design, the lower surface of the pressing strip protrudes downward, and in a cross section along the width direction of the pressing strip, the downward protrusion of the lower surface of the pressing strip is arc-shaped.

[0013] As a further design, a middle part of the screw connector is sleeved with a spring member, and the spring member is supported between the main frame body and the pressing strip.

[0014] As a further design, the main frame body below the pressing strip has a groove capable of accommodating the pressing strip.

[0015] As a further design, the edge of the opening has a protruding part around the opening, and the pressing strip is arranged between the protruding part and the welding area; or,

[0016] The edge of the opening is provided with a supporting roller, the supporting roller extends in the same direction as the pressing strip, and the pressing strip is arranged between the supporting roller and the welding area; or,

[0017] The edge of the opening has a protruding part around the opening, and the supporting roller is arranged on the protruding part, the supporting roller extends in the same direction as the pressing strip, and the pressing strip is arranged between the supporting roller and the welding area.

[0018] As a further design, the pressing strip has two, the two pressing strips are parallel to each other and symmetrically arranged on both sides of the opening; or,

[0019] The pressing strip has four, and the four pressing strips are arranged in a rectangle around the opening.

[0020] and,

[0021] A metal mask frame assembly is also provided, comprising:

[0022] The metal mask frame assembly described above; and

[0023] A metal mask;

[0024] A metal mask is covered on the opening, and the edge is combined with the welding area, and the lower surface of the pressing strip is pressed on the upper surface of the metal mask.

[0025] The beneficial effects of the present application are:

[0026] 1) When the sag of the metal mask exceeds the acceptable preset value, the screw connectors at both ends of the pressing strip are tightened to drive the pressing strip to move downward, so that the metal mask is tensioned more tightly, thereby reducing the sag of the middle part of the metal mask to within the acceptable predetermined value;

[0027] 2) When the metal mask assembly is used for a period of time, if the sag of the metal mask exceeds the acceptable predetermined value, the sag of the middle part of the metal mask can also be adjusted and reduced by further tightening the screw connectors at both ends of the pressing strip, thereby prolonging the service life of the metal mask assembly.

[0028] In addition, other additional aspects and advantages of the present application will be partially given in the following description, partially will become obvious from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 A structural schematic diagram of a metal mask frame assembly;

[0030] Figure 2 An assembly schematic diagram of the main frame, the pressing strip, the screw connector and the spring member;

[0031] Figure 3 A vertical sectional schematic diagram of the pressing strip in the length direction of different embodiments;

[0032] Figure 4 A top view of the pressing strip and its A-A sectional schematic diagram;

[0033] Figure 5 A state schematic diagram (cross section) of the pressing strip of Figure 4 in the metal mask assembly pressing on the surface of the metal mask;

[0034] Figure 6 A structural schematic diagram (cross section) of supporting the metal mask by a supporting roller in the frame assembly;

[0035] Figure 7 A structural schematic diagram of a metal mask assembly;

[0036] Figure 8 Another structural schematic diagram of a metal mask assembly;

[0037] Fig. 1 is a main frame; 10 is an opening; 11 is a groove; 12 is a welding area; 13 is a protruding part; 2 is a pressing strip; 3 is a screw connecting piece; 4 is a spring piece; 5 is a supporting roller; 6 is a metal mask. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application will be described in further detail below with reference to the drawings. Obviously, the following described embodiments are only a part of the embodiments of the present application, but not all the embodiments. As a reference, the following description and drawings are brief examples for helping to understand the present application, but not for limiting the technical scope of the present application. In other words, the following described embodiments can have various modifications, which are within the technical idea of the present application, and the ordinary skilled in the art can easily understand the technical idea of the present application through the following description. The present application will be further described below with reference to the drawings and embodiments:

[0039] Referring to Figure 1 , an exploded perspective view of a metal mask frame assembly structure of the present application is shown, the metal mask frame assembly shown includes a main frame 1, a pressing strip 2, a screw connecting piece 3 and a spring piece 4, Figure 2 , an assembly relationship schematic view between the main frame 1, the pressing strip 2, the screw connecting piece 3 and the spring piece 4 is shown.

[0040] Figure 1 As shown in the figure, the middle part of the main frame 1 has an opening 10, the opening 10 corresponds to the entire evaporation area. A welding area 12 is provided around the opening 10, the welding area 12 is located in the upper surface of the main frame 1, which is used for installing the metal mask, the welding area 12 is used as the joint area of the main frame 1 and the metal mask. The main frame 1 and the metal mask can be jointed in various ways, such as welding, etc.

[0041] Figure 1 As shown in the figure, the pressing strip 2 is provided on the upper side of the main frame 1, more specifically, between the edge of the opening 10 and the welding area 12, where the welding area 12 refers to the welding area 12 on the same side as the edge of the opening 10. The pressing strip 2 extends along the direction of the edge of the opening 10 and is basically parallel to the edge of the opening 10. The two ends of the pressing strip 2 are connected to the main frame 1 through the screw connecting piece 3, and by controlling the loosening and tightening of the screw connecting piece 3, the position of the pressing strip 2 in the thickness direction of the main frame 1 can be adjusted within a limited range.

[0042] When processing the metal mask assembly, the metal mask is stretched and covered over the opening 10 in the middle of the main frame 1. The parts of the metal mask near the two ends or edges are joined to the welding area 12 on the edge of the main frame 1 (the common joining method is welding). Then, the pressure strip 2 is installed on the upper side of the main frame 1 between the edge of the opening 10 and the welding area 12 using screw connectors 3. The pressure strip 2 applies pressure to the metal mask located below it.

[0043] When the sag of the metal mask exceeds an acceptable preset value, tightening the screws 3 at both ends of the pressure bar 2 causes the pressure bar 2 to move downwards and apply pressure to the portion of the metal mask located between the edge of the opening 10 and the welding area 12. This causes the metal mask to be stretched tighter, and the middle part of the metal mask will rise due to the tension, thereby reducing the sag in the middle of the metal mask to within an acceptable predetermined value. Furthermore, this adjustment method is applicable not only during the production of the metal mask assembly, but also after the metal mask assembly has been in vapor deposition production for a period of time. If the sag of the metal mask exceeds an acceptable predetermined value, further tightening the screws 3 at both ends of the pressure bar 2 can adjust and reduce the sag in the middle of the metal mask, thereby extending the service life of the metal mask assembly.

[0044] The aforementioned pressure strip 2 can be provided in a single manner, applying pressure to the metal mask from one end or one side to further tighten it. However, considering that the pattern offset of the metal mask is also a key factor affecting the quality of the vapor-deposited product, pressing down on the metal mask from one side may exacerbate the pattern offset towards the pressure side. Therefore, a more preferred approach is to apply pressure to the metal mask simultaneously from both sides or both ends in a symmetrical manner.

[0045] For example: refer to Figure 7 and Figure 8 As shown in the figure, two pressure strips 2 are provided in the mask assembly. The two pressure strips 2 are parallel to each other and symmetrically arranged on both sides of the opening 10. For example, regarding... Figure 7 The universal metal mask 6-a shown in the figure can also have two additional pressure strips 2 (not shown in the figure) set on another set of opposite sides of the main frame 1, that is, four pressure strips 2 are set. The four pressure strips 2 are rectangular and surround the opening 10, respectively corresponding to the four sides of the universal metal mask 6-a. Thus, pressure can be applied to the universal metal mask 6-a from the four sides at the same time, thereby raising the middle of the universal metal mask 6-a and reducing the amount of sagging.

[0046] It is worth noting that, for Figure 7Compared with the two kinds of treatment modes that the four edges of the metal mask are provided with the pressing strips 2 and only two pressing strips 2 are provided at one set of opposite edges, respectively, the former is more significant in reducing the sag of the metal mask, and the deformation of the mask pattern is smaller.

[0047] Referring to Figure 2 As shown in the drawings, the spring member 4 corresponding to each pressing strip 2 has two, and the two spring members 4 are respectively sleeved on the middle portions of the screw connecting members 3 at the two ends of the pressing strip 2, and the spring member 4 is supported between the main frame 1 and the pressing strip 2. It is worth mentioning here that the pressing strip 2 can be assembled to the main frame 1 before the metal mask is assembled to the main frame 1, or the pressing strip 2 can be assembled before the metal mask. In this case, a gap can be generated between the pressing strip 2 and the main frame 1 under the action of the spring member 4, which can facilitate the passage of the metal mask. It should be noted that the spring member 4 can not be provided in the metal mask frame assembly, so that the pressing strip 2 is lifted and separated from the main frame 1 by external force to generate the above-mentioned gap for the metal mask to pass through; or the pressing strip 2 can be assembled to the main frame 1 after the screen welding.

[0048] In the metal mask assembly, the sag of the metal mask at different positions on the same metal mask is different, and the sag of different metal masks also differs. Therefore, when reducing the sag of the metal mask, different sag amounts should be considered. Therefore, the structure of the pressing strip 2 is further designed in the disclosure. Specifically, the lower surface of the pressing strip 2 protrudes downward, and the height of the downward protrusion of the lower surface of the pressing strip 2 at different positions along the length direction of the pressing strip 2 is different. Here, the height of the downward protrusion of the lower surface of the pressing strip 2 can be determined according to the sag of the metal mask at each position in the metal mask frame assembly detected in advance. The greater the sag of the metal mask at a position, the greater the height of the downward protrusion of the lower surface of the pressing strip 2 at the corresponding position on both sides. In this way, the degree of tension of the metal mask at the position with a large sag due to the pressing of the pressing strip 2 will be greater, and the lifting amount of the metal mask at this position will increase, thereby reducing the difference in sag of the metal mask at different positions.

[0049] The maximum sag of the metal mask usually occurs in the middle of the metal mask, and the sag gradually decreases from the middle of the metal mask to the edges or both ends. Based on this factor, the height of the downward protrusion of the lower surface of the pressing strip 2 in the disclosure gradually decreases from the middle of the pressing strip 2 to both ends of the pressing strip 2. For example, Figure 3 A structure of a pressing strip 2 is shown in (a), characterized in that in any vertical cross section along the length direction of the pressing strip 2, the downward protrusion of the lower surface of the pressing strip 2 is arc-shaped, and the vertex of the arc corresponds to the center position of the lower surface of the pressing strip 2. For example,Figure 3 (b) shows another structure of the pressing strip 2, which is characterized in that, in any vertical section along the length direction of the pressing strip 2, the downward protrusion of the lower surface of the pressing strip 2 is in a stepped shape, and the lowest position of the step corresponds to the central position of the lower surface of the pressing strip 2.

[0050] In view of Figure 3 The structure of the pressing strip 2 shown in (b) also takes into account another factor. Since the pressing strip 2 is connected to the main frame 1 only at the two ends by the screw connectors 3, when the pressing strip 2 is subjected to the counteracting force of the metal mask, the middle part of the pressing strip 2 will be deformed in an arch shape upward, which will in turn result in that the closer to the middle part of the pressing strip 2, the smaller the pressing degree on the metal mask, which is obviously not conducive to reducing the sag amount of the metal mask. In the present disclosure, the height of the downward protrusion of the lower surface of the pressing strip 2 gradually decreases from the middle part of the pressing strip 2 to the two ends of the pressing strip 2. Based on this design, the closer to the middle part of the pressing strip 2, the stronger the anti-deformation ability, and the downward protrusion can offset the arch deformation described above, so that more significant effects can be achieved in reducing the sag amount of the metal mask and the difference in sag amount at different positions.

[0051] Referring to Figure 4 As shown in (c), in a section along the width direction of the pressing strip 2, the lower surface of the pressing strip 2 also presents a downward protrusion, and presents an arc shape. It is not difficult to understand that when the pressing strip 2 presses the surface of the metal mask, the edges of the lower surface of the pressing strip 2 will act on the metal mask. At this time, if the screw connectors 3 at the two ends of the pressing strip 2 are further tightened or loosened, the relative sliding between the pressing strip 2 and the metal mask will occur. In this case, the edges of the lower surface of the pressing strip 2 may scratch the surface of the metal mask, causing irreversible damage. To solve this problem, the lower surface of the pressing strip 2 is also designed as an arc-shaped surface in the width direction in the present disclosure. Figure 5 As shown in (d), when the pressing strip 2 presses the metal mask 6, the arc-shaped design can reduce the phenomenon that the edges on both sides of the lower surface of the pressing strip 2 come into contact with the metal mask 6, which has a significant effect on reducing the above-mentioned edge scratching the surface of the metal mask.

[0052] The above only exemplifies the case where the screw connectors 3 are arranged at the two ends of the pressing strip 2. However, in some embodiments, according to actual needs and considering factors such as the structure of the metal mask assembly, the screw connectors 3 described above can also be arranged at the middle position of the pressing strip 2 to connect the pressing strip 2 and the main frame 1. For example, when no metal mask is arranged on the main frame 1 corresponding to a certain position of the middle part of the pressing strip 2, the screw connector 3 described above can be arranged at this position to connect the pressing strip 2 and the main frame 1. This way can also reduce the arch deformation of the pressing strip 2 caused by the counteracting force of the metal mask on the pressing strip 2.

[0053] Referring to Figure 1 and 2As shown, a groove 11 is provided on the main frame 1. The groove 11 is located below the corresponding pressure strip 2 and is capable of accommodating the pressure strip 2. It is understood that the groove 11 should correspond one-to-one with the pressure strip 2 provided on the main frame 1. When the pressure strip 2 moves downward to press down on the metal mask, the groove 11 is designed to provide sufficient downward movement space for both the pressure strip 2 and the metal mask. It is worth noting that the groove 11 should be appropriately wider than the width of the pressure strip 2 in the width direction to avoid contact or interference between the metal mask and the edge of the groove 11.

[0054] Here, a gap can also be created between the metal mask and the upper surface of the main frame 1 by lifting the metal mask, and this gap can then be used as the downward movement space for the pressure strip 2 and the metal mask. For example, as Figure 1 and Figure 2 As shown, a protrusion 13 is provided on the upper surface of the main frame 1. The protrusion 13 is located at the edge of the opening 10 and surrounds the opening 10. At this time, the pressure strip 2 should be provided between the protrusion 13 and the welding area 12 on the corresponding side. The width of the top surface of the protrusion 13 can be set according to requirements, and the smaller the width, the smaller the contact area between the metal mask and the top surface of the protrusion 13, thereby reducing the resistance to relative sliding between the metal mask and the top of the protrusion 13. Compared with the design without the protrusion 13, the effect of reducing the above-mentioned resistance to relative sliding is more significant.

[0055] In addition, a support roller 5 can be provided on the upper surface of the main frame 1 to replace the aforementioned protrusion 13 in supporting the metal mask. The support roller 5 is located at the edge of the opening 10, and extends in the same direction as the pressure strip 2 on the corresponding side, that is, it extends in the same direction as the edge of the opening 10 on that side. In this case, the pressure strip 2 should be located between the support roller 5 and the welding area 12 on the corresponding side. The advantage of this design is that the support roller 5 and the metal mask have rolling contact, which reduces the resistance compared to the relative sliding resistance between the metal mask and the top of the protrusion 13.

[0056] Reference Figure 6 As shown, the aforementioned protrusion 13 and support roller 5 can be simultaneously disposed on the upper surface of the main frame 1. Specifically, the protrusion 13 surrounds the edge of the opening 10, and the support roller 5 is disposed at the upper end of the protrusion 13, with the support roller 5 extending in the same direction as the pressure strip 2 on the corresponding side. At this time, the pressure strip 2 is disposed between the support roller 5 and the welding area 12 on the corresponding side.

[0057] Reference Figure 1 and Figure 2As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13. Figure 6 As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13.

[0058] As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13. Figure 1 As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13. Figure 7 As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13. Figure 8 As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13.

[0059] As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13.

[0060] As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13. Figure 7 As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13. Figure 8 As shown in the above-mentioned recess 11, the protruding part 13 can also be provided on the main frame 1. The recess 11 and the protruding part 13 complement each other in function, which helps to reduce the height of the protruding part 13 and the depth of the recess 11, and the strength of the single side of the main frame 1 is improved. Of course, at this time, the above-mentioned support roller 5 can also be provided on the upper end of the protruding part 13.

[0061] Finally, it needs to be emphasized again that the above embodiments are only used to illustrate the technical solutions of the embodiments of the present application but not to limit them, and although the embodiments of the present application are described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solutions of the embodiments of the present application can still be modified or replaced equivalently, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A metal photomask frame assembly, characterized in that, include The main frame (1) and at least one pressure strip (2); The main frame (1) has an opening (10) in the middle, and a welding area (12) is provided around the opening (10). The welding area (12) is located inside the upper surface of the main frame (1). The pressure strip (2) is set on the upper side of the main frame (1), located between the edge of the opening (10) and the welding area (12), and extends along the direction of the edge of the opening (10); The lower surface of the pressure strip (2) protrudes downwards, and the height of the downward protrusion varies at different positions along the length of the pressure strip (2). The height of the downward protrusion of the lower surface of the pressure strip (2) gradually decreases from the middle of the pressure strip (2) to both ends of the pressure strip (2). In any vertical section along the length of the pressure strip (2), the downward protrusion of the lower surface of the pressure strip (2) is arc-shaped or stepped. At least at both ends of the pressure strip (2), it is connected to the main frame (1) by screw connectors (3). When the sag of the metal mask exceeds the acceptable preset value, the pressure strip (2) is driven to move downward and apply pressure to the part of the metal mask located between the edge of the opening (10) and the welding area (12) by tightening the screw connectors (3) at both ends of the pressure strip (2). A support roller (5) is provided on the upper surface of the main frame (1). The support roller (5) is located at the edge of the opening (10) and on the side corresponding to the pressure strip (2). The pressure strip (2) is between the support roller (5) and the welding area (12) on the corresponding side. The support roller (5) extends in the same direction as the pressure strip (2) on the corresponding side. Multiple support rollers (5) are provided on each side of the opening (10). The support rollers (5) are arranged sequentially along the axial direction. A support roller (5) is provided at the lower position of each mask strip. The length of the support roller (5) covers the mask strip in the width direction of the mask strip.

2. The metal mask frame assembly according to claim 1, characterized in that, The lower surface of the pressure strip (2) protrudes downward, and in the cross section along the width direction of the pressure strip (2), the downward protrusion of the lower surface of the pressure strip (2) is arc-shaped.

3. The metal mask frame assembly according to claim 1, characterized in that, A spring (4) is sleeved in the middle of the screw connector (3), and the spring (4) is supported between the main frame (1) and the pressure strip (2).

4. The metal mask frame assembly according to claim 1, characterized in that, The main frame (1) located below the pressure strip (2) has a groove (11) that can accommodate the pressure strip (2).

5. The metal mask frame assembly according to claim 1, characterized in that, The edge of the opening (10) has a protrusion (13) around the opening (10), the pressure strip (2) is disposed between the protrusion (13) and the welding area (12), and the support roller (5) is disposed on the protrusion (13).

6. The metal mask frame assembly according to claim 1, characterized in that, The pressure strip (2) is two in number, and the two pressure strips (2) are parallel to each other and symmetrically arranged on both sides of the opening (10); or, The pressure strip (2) has four strips, which are rectangular and surround the opening (10).

7. A metal photomask assembly, characterized in that, include: The metal mask frame assembly as described in any one of claims 1 to 6; as well as Metal mask (6); A metal mask (6) covers the opening (10) and its edge engages with the welding area (12), and the lower surface of the pressure strip (2) applies pressure to the upper surface of the metal mask (6).

Citation Information

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