A UV to short-wave infrared Fizeau interferometer laser wavelength meter

Abstract

The present invention belongs to the field of optical metrology and testing technology and discloses an ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter, comprising: an optical fiber base, a collimating mirror, a plane mirror group I, a plane mirror group II, a band selection aperture, an ultraviolet-visible interferometer cavity, a short-wave infrared interferometer cavity, an ultraviolet-visible cylindrical mirror, a short-wave infrared cylindrical mirror, a baffle I, a baffle II, an ultraviolet-visible array CCD, a short-wave infrared array CCD, and a computer. The present invention solves the problem that laser wavelengths in the 192nm to 2100nm band cannot be measured on a single wavelength meter, improves the measurement speed of laser wavelengths in different bands, reduces costs, and has broad application prospects.

Description

Technical Field

[0001] The invention belongs to the technical field of optical metrology and testing, and mainly relates to a Fizeau interferometer laser wavelength meter, in particular to an ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter. Background Art

[0002] High-precision laser wavelength meters are widely used in aerodynamic testing, quantum communications, and molecular spectroscopy. Fizeau interferometer-type laser wavelength meters, which do not have a moving mechanism, have the advantages of fast measurement speed, high measurement accuracy, and high stability, and are therefore widely used in the above fields.

[0003] The Fizeau interferometer wavelength meter is mainly composed of an incident optical fiber, a collimating mirror, a plane mirror, a Fizeau interferometer module, a cylindrical mirror and a linear array CCD.

[0004] The core module of the Fizeau laser wavelength meter is the Fizeau interferometer, which generates Fizeau interference fringes. Processing these fringes reveals the laser wavelength to be measured. The Fizeau interferometer consists of an air wedge cavity. The inner wall of the air wedge cavity must be coated with a spectroscopic film with a transmittance-reflection ratio of 3:7 within the wavelength range, while the outer wall must be coated with a transmissive film. Limited by the spectroscopic film materials that meet this requirement, no single material currently exists that can achieve broadband spectrometry in the 192-2100nm band. To measure laser wavelengths within this range, three or more wavelength meters are required, each responsible for measuring wavelengths in different bands. When measuring different laser wavelengths, the limited wavelength measurement range of one wavelength meter often requires switching between wavelength meters of different bands, making the measurement process complex, time-consuming, and labor-intensive. Furthermore, the need for three or more wavelength meters increases the measurement cost.

[0005] In order to cover the laser wavelength measurement range of 200nm to 2100nm, the wavelength meter developed and produced by HighFinesse of Germany requires three wavelength meters. The corresponding wavelength measurement range of each wavelength meter is 200nmn to 800nm, 330nm to 1100nm and 1000 to 2100nm.

[0006] Bristo's wavelength meter uses two wavelength meters to measure laser wavelengths in the 375nm to 1700nm band. The corresponding wavelength measurement range of each wavelength meter is 375nmn to 1100nm and 520nm to 1700nm.

[0007] The wavelength measurement range of a wavelength meter from Moglabs is 350nm to 1120nm.

[0008] The patent, "A Multi-Wavelength Meter Based on an Optical Interferometer (Patent No. CN201910010675.7)," discloses a multi-wavelength meter based on an optical interferometer. The multi-wavelength meter includes a light collector, a light diffusion element, a transparent parallel plate, a linear array light detector, a light shielding box, a circuit board, a keypad, and a display. The wavelength measurement range of the wavelength meter is 300nm to 1100nm.

[0009] The patent "Fiber-Optic Multi-Wedge Fisher Wavemeter (Patent No. CN201210193437.2)" discloses a fiber-optic multi-wedge Fisher wavemeter consisting of a standard laser source, a fused silica fiber, a fiber coupler, a beam expander and collimator, a Fisher interferometer array, a CCD array, and a signal processor. The invention utilizes multiple Fisher wedges of varying thicknesses to achieve both coarse and fine wavelength measurements, thereby improving the wavelength meter's resolution. The wavelength range of this wavelength meter is 400 to 1100 nm.

[0010] None of the above patents and other articles report on a wavelength meter that can measure laser wavelengths in the 192nm to 2100nm band. There is a lack of an ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter that can measure laser wavelengths in the 192nm to 2100nm band. Summary of the Invention

[0011] (1) Purpose of the invention

[0012] The purpose of the present invention is to solve the problem that a single wavelength meter cannot measure the laser wavelength in the 192nm to 2100nm band, and to propose an ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter, so that a single wavelength meter can complete the measurement of the laser wavelength in the 192nm to 2100nm band.

[0013] (2) Technical solution

[0014] In order to solve the above technical problems, the present invention provides an ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter, comprising: an optical fiber base, a collimating mirror, a plane mirror group I, a plane mirror group II, a band selection aperture, an ultraviolet-visible interference cavity, a short-wave infrared interference cavity, an ultraviolet-visible cylindrical mirror, a short-wave infrared cylindrical mirror, a baffle I, a baffle II, an ultraviolet-visible surface array CCD, a short-wave infrared surface array CCD and a computer.

[0015] The laser to be measured is shaped into a parallel beam by a collimator. Plane mirror groups I and II, respectively, split the parallel beam into parallel beam I and parallel beam II. Parallel beam I is used for shortwave infrared (SWIR) laser wavelength measurement, while parallel beam II is used for UV / VIS laser wavelength measurement. After passing through the Fizeau interferometer module, the parallel beam forms broadband interference fringes. These broadband interference fringes are laterally compressed by a cylindrical mirror, resulting in narrowband interference fringes. These narrowband interference fringes are detected by a CCD and processed by comprehensive computer processing software to determine the measured laser wavelength. The UV / VIS Fizeau interferometer module is zone-coated, divided into three wavelength bands. Viewed along the optical axis, the three rectangular zones (from left to right) are coated with a 3:7 transmittance / reflection ratio (192nm-250nm), a 450nm-1100nm, and a 250nm-450nm antireflection coating (192nm-2100nm). These three zones measure laser wavelengths in their respective wavelength bands, and a band selector aperture is used to switch between these three zones. The SWIR Fizeau interferometer module measures laser wavelengths in the SWIR band. Baffles I and II play a switching and protective role. When the incident laser is in the ultraviolet and visible bands, baffle I moves out of the light path and baffle II moves into the light path; when the incident laser is in the short-wave infrared band, baffle II moves out of the light path and baffle I moves into the light path.

[0016] (3) Beneficial effects

[0017] The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter provided by the above technical solution solves the problem that the laser wavelength in the 192nm to 2100nm band cannot be measured on a single wavelength meter, thereby improving the measurement speed of laser wavelengths in different bands and reducing costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the composition of the ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter.

[0019] Figure 2 This is a stereoscopic image of the UV-visible Fizeau interferometer module, with Figures A and B representing two different viewing angles.

[0020] Figure 3 The front view A and the right view B of the UV-visible Fizeau interferometer module.

[0021] Figure 4 This is a schematic diagram of the area division of the UV-Vis Fizeau interferometer module.

[0022] Figure 5 This is a stereoscopic image of the short-wave infrared Fizeau interferometer module, with Figures A and B representing two different viewing angles.

[0023] Figure 6 The front view A and the right view B of the shortwave infrared Fizeau interferometer module. DETAILED DESCRIPTION

[0024] In order to make the purpose, content and advantages of the present invention more clear, the specific implementation methods of the present invention are further described in detail below with reference to the accompanying drawings and examples.

[0025] like Figure 1 As shown, the ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter of this embodiment includes an optical fiber base 1, a collimating lens 2, a plane mirror group I 3, a plane mirror group II 4, a band selection aperture 5, an ultraviolet-visible interference cavity 6, a short-wave infrared interference cavity 7, an ultraviolet-visible cylindrical mirror 8, a short-wave infrared cylindrical mirror 9, a baffle I 10, a baffle II 11, an ultraviolet-visible surface array CCD 12, a short-wave infrared surface array CCD 13 and a computer 14.

[0026] In the Fizeau interferometer laser wavelength meter, an optical fiber is connected to an optical fiber base 1, and an optical fiber output port corresponding to the optical fiber base 1 is located at the focal plane of a collimator 2. The laser to be measured is transmitted to the output port of the incident optical fiber through the incident optical fiber. After passing through the output port of the incident optical fiber, the laser to be measured is transmitted at a divergence angle α. The size of the divergence angle α is related to the numerical aperture NA of the incident optical fiber and the refractive index n of the medium. The divergent laser to be measured is shaped into a parallel beam by the collimator 2; the lower half of the parallel beam is bent 180° by the plane mirror group I3 to become a parallel beam I, and the parallel beam I is incident on the band selection aperture 5, which divides the parallel beam into three parts. Only one part can pass through at a time. The parallel beam passing through the band selection aperture 5 is incident on the UV-visible Fizeau interferometer module 6. The UV-visible Fizeau interferometer module 6 is divided into three areas according to the laser wavelength measurement band. Each area corresponds to the three parts corresponding to the band selection aperture transmission area. The laser wavelength measurement bands corresponding to each area are 192nm~250nm, 250nm~450nm, and 450nm~1 100nm, after passing through the rectangular light-transmitting area of ​​the UV-visible Fizeau interference module 6, broadband interference fringes with bright and dark interference fringes extending along the longitudinal direction are formed, and the width of the broadband interference fringes is less than or equal to the width of the corresponding light-transmitting area of ​​the UV-visible Fizeau interference module 6. After the broadband interference fringes are compressed in the transverse direction by the UV-visible cylindrical mirror 8, they reach the photosensitive surface of the UV-visible array CCD12 to form narrow-band interference fringes, and the transverse width of the narrow-band interference fringes is less than or equal to the transverse width of the photosensitive surface of the UV-visible array CCD12. The output signal of the UV-visible array CCD12 is transmitted to the computer 14, and the comprehensive processing software installed in the computer 14 processes the output signal to obtain the laser wavelength to be measured.

[0027] The upper half of the parallel light beam is bent 180° after passing through the plane mirror group II4 to become a parallel light beam II. The parallel light beam II is incident on the short-wave infrared Fizeau interferometer module 7. After passing through the short-wave infrared Fizeau interferometer module 7, broadband interference fringes with bright and dark interference fringes extending longitudinally are formed. The width of the broadband interference fringes is less than or equal to the width of the rectangular light-transmitting area corresponding to the short-wave infrared Fizeau interferometer module 7. After the broadband interference fringes are compressed laterally by the short-wave infrared cylindrical mirror 9, they reach the photosensitive surface of the short-wave infrared array CCD13 to form narrow-band interference fringes. The lateral width of the narrow-band interference fringes is less than or equal to the lateral width of the photosensitive surface of the short-wave infrared array CCD13. The output signal of the short-wave infrared array CCD is transmitted to the computer 14. The processing software installed in the computer processes the output signal to obtain the laser wavelength to be measured.

[0028] Baffle I10 and baffle II11 are located in front of the ultraviolet visible array CCD12 and the shortwave infrared array CCD13 respectively, and play a protective role. When the incident laser is in the ultraviolet visible band, baffle I10 moves out of the optical path and baffle II11 moves into the optical path; when the incident laser is in the shortwave infrared band, baffle II11 moves out of the optical path and baffle I10 moves into the optical path.

[0029] The optical fiber base 1 plays a role in positioning and fixing the optical fiber. The optical fiber base 1 is divided into types such as FC / PC, FC / APC, SMA905, SC, etc. according to the interface. According to the measurement requirements, a optical fiber base with one of the interfaces is selected.

[0030] The collimator 2 is made of glass-ceramic with a silver reflectivity coating on its surface, and has an aperture of 45 mm (width) x 40 mm (height) and a focal length of 250 mm.

[0031] Plane mirror assembly I 3 consists of two mirrors, 3-1 and 3-2, positioned at a 90° angle. Its function is to deflect the lower half of the parallel light beam by 180° before it is incident on the wavelength-selective aperture. The heights of mirrors 3-1 and 3-2 are equal to the height of collimator 2. The widths of mirrors 3-1 and 3-2 are 35 mm.

[0032] Plane mirror assembly II 4 consists of two plane mirrors, 4-1 and 4-2, with an angle of 90°. Its function is to deflect the upper half of the parallel light beam by 180° before it is incident on the short-wave infrared Fizeau interferometer module. The width and height of plane mirrors 4-1 and 4-2 are the same as those of plane mirror 3-1.

[0033] The light aperture of the band-selective aperture 5 is rectangular. The height of the rectangle is greater than or equal to the height of the plane mirror, and the width of the rectangle is one-third of the width of the parallel light beam I after being deflected by the plane mirror assembly I 3. The cross-section of the parallel light beam I is 18 mm (width) × 40 mm (height), and the aperture is 6 mm (width) × 40 mm (height). The band-selective aperture 5 is located on a transverse slide rail and connected to a three-speed handwheel. By changing the gear position of the handwheel, the light aperture of the band-selective aperture 5 is moved laterally, dividing the parallel light beam I into three equal rectangular regions along the horizontal direction. The parallel light beam in one of the three rectangular regions of the parallel light beam I is allowed to pass through. The dimensions of each of the three rectangular regions are 6 mm (width) × 40 mm (height).

[0034] like Figure 2 As shown, the UV-Vis Fizeau interferometer module 6 is composed of a circular planar substrate 6-1, a rectangular plate 6-2, a circular wedge-shaped substrate 6-3, and a protective glass 6-4. All of the above components are made of fused quartz glass, and the rectangular plate 6-2 is bonded to the circular planar substrate 6-1 using optical adhesive. The circular planar substrate 6-1 is a horizontally placed cylindrical glass body with dimensions of Ø44mm × 6mm; the rectangular plate 6-2 is a rectangular glass body with dimensions of 6mm (length) × 18mm (width) × 40mm (height); the circular wedge-shaped substrate 6-3 is a wedge-shaped cylindrical glass body with a bottom diameter of 44mm; and the protective glass 6-4 is a hollow annular cylindrical glass body with an inner ring slightly larger than the axial projection of the circular planar substrate 6-1 and an outer ring larger than the inner ring. The outer ring has a diameter of 54mm and the length of the annular cylinder is 40mm. Viewed along the optical axis, the front surface of the rectangular flat plate 6-2 is bonded to the rear surface of the circular planar substrate 6-1 via optical adhesive, and the side walls of the circular planar substrate 6-1 and the side walls of the circular wedge-shaped substrate 6-3 are bonded to the hollow cylindrical side walls of the protective glass 6-4 in turn via optical adhesive. During bonding, the front surface of the circular planar substrate 6-1 is aligned with the front surface of the protective glass 6-4, and the rear surface of the circular wedge-shaped substrate 6-3 is aligned with the rear surface of the protective glass 6-4. The front surface of the circular planar substrate 6-1 and the rear surface of the circular wedge-shaped substrate 6-3 are coated with an anti-reflection film in the wavelength range of 192nm to 1100nm.

[0035] like Figure 3 As shown, the front view of circular wedge-shaped substrate 6-3 is trapezoidal, with a wedge angle θ of 3 mard. Viewed along the optical axis, the projected circle of circular flat substrate 6-1 circumscribes the projected rectangle of rectangular flat plate 6-2. The projected circle of substrate 6-3 along the optical axis is equal in size to the projected circle of circular flat substrate 6-1 along the optical axis. The width of the projected rectangle of rectangular flat plate 6-3 along the optical axis is equal to the width of parallel beam I, and the height of projected rectangle 6-3 is equal to the height of parallel beam I.

[0036] like Figure 4As shown, the rectangular flat plate 6-2 is divided into three rectangular areas, the height of the three rectangular areas is equal to the height of the projected rectangle, the width of each area in the three rectangular areas is 1 / 3 of the width of the projected rectangle, and the three areas are distinguished by engraved lines, which are 0.5 mm wide on the rear surface of the rectangular flat plate; the three areas of the rectangular flat plate 6-2 are projected onto the circular wedge-shaped substrate along the optical axis, and the projections of the three areas on the front surface of the circular wedge-shaped substrate 6-4 are distinguished by engraved lines, which are 0.5 mm wide.

[0037] Look again Figure 2 、 Figure 4 , viewed along the optical axis, the three rectangular areas on the rear surface of the rectangular flat plate 6-2 and the three rectangular areas on the front surface of the circular wedge-shaped substrate 6-3 are coated, from left to right, with spectroscopic coatings with a transmittance-reflection ratio of 3:7 for the three wavelength bands of 192nm to 250nm, 450nm to 1100nm, and 250nm to 450nm. The specifications of the spectroscopic coatings for the three wavelength bands are as follows:

[0038] λ′=192nm~250nm, T:R=3:7, T+R>96%;

[0039] λ′=450nm~1100nm, T:R=3:7, T+R>99%;

[0040] λ′=250nm~450nm, T:R=3:7, T+R>98%;

[0041] λ′ represents the wavelength range, T represents the average transmittance, and R represents the average reflectance.

[0042] like Figure 5 、 Figure 6 As shown, the substrate structure of the shortwave infrared Fizeau interferometer module 7 is similar to that of the ultraviolet-visible Fizeau interferometer module 6, with the following key differences: 1. The rectangular plate has no area divisions, while the lines on the front surface of the circular wedge-shaped substrate are projections of the rectangular plate along the optical axis; 2. The coating layers are antireflection coatings and spectroscopic coatings for the shortwave infrared band of 1000nm to 2100nm; and 3. The wedge angle of the circular wedge-shaped substrate 7-3 is 500mrad. The technical specifications of the spectroscopic coating in this band are as follows:

[0043] λ′=1000nm~2100nm, T:R=3:7, T+R>96%;

[0044] λ′ represents the wavelength range, T represents the average transmittance, and R represents the average reflectance.

[0045] Look again Figure 1The UV-visible cylindrical mirror 8 is made of fused quartz with a UV-visible antireflection coating on its surface. Its height is equal to that of the plane mirror, and its width is greater than or equal to the width of the parallel light beam 1. Its function is to shape the parallel light beam 1 into a linear convergent light beam 1.

[0046] The short-wave infrared cylindrical mirror 9 is made of fused quartz with a short-wave infrared anti-reflection coating on its surface. Its height is equal to that of the plane mirror and its width is greater than or equal to the width of the parallel beam II. Its function is to shape the parallel beam II into a linear convergent beam 2.

[0047] The function of the baffle 110 is to block or not block the convergent light beam 1.

[0048] The function of the baffle II 11 is to block or not block the convergent light beam 2 .

[0049] The UV-visible array CCD 12 receives the converged light beam 1 and transmits the signal to a computer. The UV-visible array CCD 12 has a pixel count of 2048 x 506, a pixel size of 12 μm x 12 μm, and a response wavelength range of 190 nm to 1100 nm. The photosensitive surface of the UV-visible array CCD 12 is aligned with the focal line of the UV-visible cylindrical mirror 8, and its length is parallel to the focal line.

[0050] The shortwave infrared array CCD 13 receives the converged light beam 2 and transmits the signal to a computer. The shortwave infrared array CCD 13 has 1024 x 256 pixels, a pixel size of 30 μm x 30 μm, and a response band of 1000 nm to 2100 nm. The photosensitive surface of the shortwave infrared array 13 is located in the plane of the focal line of the shortwave infrared cylindrical mirror 8, with the length of the photosensitive surface of the shortwave infrared array 13 parallel to the focal line.

[0051] The computer 14 is installed with comprehensive processing software, which processes the signal transmitted by the CCD to obtain the wavelength of the laser to be measured.

[0052] The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter must first be calibrated before operation. During calibration, a laser with a known wavelength is used to calibrate the wedge angle of the Fizeau interferometer module, as shown in Formula 1.

[0053]

[0054] Where: θ is the wedge angle of the Fizeau interferometer module, in mrad;

[0055] λ0 is the known wavelength of the calibration laser, in μm;

[0056] Δx──interference fringe spacing, unit is mm.

[0057] During calibration, the wavelength λ0 of the calibration laser is known, and the interference fringe spacing can be calculated using comprehensive computer processing software. This allows for the wedge angle calibration of the interferometer module. Using the above method, the wedge angle θ of the UV-Vis Fizeau interferometer module and the shortwave infrared Fizeau interferometer module are calibrated using a UV-Vis laser and a shortwave infrared laser of known wavelength, respectively. This calibrates the UV-to-shortwave infrared laser wavelength meter.

[0058] When the ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter is working, it is as shown in Formula 2.

[0059]

[0060] Where: λ is the wavelength of the laser to be measured, in μm;

[0061] θ is the wedge angle of the Fizeau interferometer module, in mrad;

[0062] Δx──interference fringe spacing, unit is mm.

[0063] During operation, the wedge angle θ of the Fizeau interferometer module is known, and the interference fringe spacing can be calculated using comprehensive processing software in the computer. The wavelength of the laser to be measured is calculated using Formula 2.

[0064] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A UV to short-wave infrared Fizeau interferometer laser wavelength meter, characterized in that: include: Optical fiber base, collimating mirror, plane mirror group I, plane mirror group II, band selection aperture, ultraviolet-visible interferometer cavity, short-wave infrared interferometer cavity, ultraviolet-visible cylindrical mirror, short-wave infrared cylindrical mirror, baffle I, baffle II, ultraviolet-visible surface array CCD, short-wave infrared surface array CCD and computer; The optical fiber base is connected to the incident optical fiber. The optical fiber output port corresponding to the optical fiber base is located at the focal plane of the collimator. The laser to be measured is transmitted to the output port of the incident optical fiber through the incident optical fiber. After the laser to be measured passes through the output port of the incident optical fiber, the laser to be measured is transmitted at a divergence angle α. The divergent laser to be measured is shaped into a parallel beam by the collimator. The lower half of the parallel light beam is deflected 180° by plane mirror group I to become parallel light beam I. Parallel light beam I is incident on the band selection aperture, which divides the parallel light beam into three parts. Only one part is transmitted each time. The parallel light beam that passes through the band selection aperture is incident on the UV-Vis Fizeau interferometer module. The UV-Vis Fizeau interferometer module is divided into three areas according to the laser wavelength measurement band. Each area corresponds to the three parts corresponding to the band selection aperture transmission area. The laser wavelength measurement bands corresponding to each area are 192nm~250nm, 250nm~450nm, and 450nm~1100nm respectively. After passing through the rectangular light-transmitting area of ​​the UV-visible Fizeau interferometer module, broadband interference fringes with bright and dark interference fringes extending in the longitudinal direction are formed, and the width of the broadband interference fringes is less than or equal to the width of the corresponding light-transmitting area of ​​the UV-visible Fizeau interferometer module. After being compressed in the transverse direction by the UV-visible cylindrical mirror, the broadband interference fringes reach the photosensitive surface of the UV-visible array CCD to form narrow-band interference fringes, and the transverse width of the narrow-band interference fringes is less than or equal to the transverse width of the photosensitive surface of the UV-visible array CCD. The output signal of the UV-visible array CCD is transmitted to a computer, and the comprehensive processing software installed in the computer processes the output signal to obtain the laser wavelength to be measured; The upper half of the parallel light beam is deflected 180° by plane mirror group II to become parallel light beam II. The parallel light beam II is incident on the short-wave infrared Fizeau interferometer module. After passing through the short-wave infrared Fizeau interferometer module, broadband interference fringes with bright and dark interference fringes extending longitudinally are formed. The width of the broadband interference fringes is less than or equal to the width of the corresponding rectangular light-transmitting area of ​​the short-wave infrared Fizeau interferometer module. After being compressed in the transverse direction by the short-wave infrared cylindrical mirror, the broadband interference fringes reach the short-wave infrared array CCD photosensitive surface to form narrow-band interference fringes. The transverse width of the narrow-band interference fringes is less than or equal to the transverse width of the short-wave infrared array CCD photosensitive surface. The output signal of the short-wave infrared array CCD is transmitted to a computer. The processing software installed in the computer processes the output signal to obtain the laser wavelength to be measured. The baffle I and baffle II are respectively located in front of the ultraviolet visible array CCD and the shortwave infrared array CCD. When the incident laser is in the ultraviolet visible band, baffle I moves out of the light path and baffle II moves into the light path; when the incident laser is in the shortwave infrared band, baffle II moves out of the light path and baffle I moves into the light path.

2. The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 1, characterized in that: The collimating mirror is made of microcrystalline glass with a silver reflectivity film on its surface; the plane mirror group I is composed of two plane mirrors with an included angle of 90°; the plane mirror group II is composed of two plane mirrors with an included angle of 90°; the light aperture of the band selection aperture is rectangular, and the width of the rectangle is one-third of the width of the parallel light beam I after being deflected by the plane mirror group I; the band selection aperture is located on a horizontal slide rail and is connected to a three-speed rotating handwheel. By changing the gear position of the rotating handwheel, the light aperture of the band selection aperture is moved horizontally, dividing the parallel light beam I into three rectangular areas along the horizontal direction, and allowing the parallel light beam in one of the three rectangular areas in the parallel light beam I to pass through.

3. The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 2, characterized in that: The ultraviolet-visible Fizeau interferometer module includes a circular plane substrate, a rectangular plate, a circular wedge-shaped substrate, and a protective glass; the materials of the above components are all fused quartz glass, and the rectangular plate is bonded to the circular plane substrate by optical glue; the circular plane substrate is a horizontally placed cylindrical glass body, and the rectangular plate is a rectangular glass body; the circular wedge-shaped substrate is a wedge-shaped cylindrical glass body, and the protective glass is a hollow annular cylindrical glass body, the inner ring is larger than the axial projection circle of the circular plane substrate, and the outer ring is larger than the inner ring; viewed along the optical axis, the front surface of the rectangular plate is bonded to the rear surface of the circular plane substrate by optical glue, and the side wall of the circular plane substrate and the side wall of the circular wedge-shaped substrate are bonded to the hollow cylindrical side wall of the protective glass by optical glue in turn, and during bonding, the front surface of the circular plane substrate is aligned with the front surface of the protective glass, and the rear surface of the circular wedge-shaped substrate is aligned with the rear surface of the protective glass. The front surface of the circular plane substrate and the rear surface of the circular wedge-shaped substrate are coated with an anti-reflection film with a wavelength range of 192nm to 1100nm.

4. The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 3, characterized in that: The front view of the circular wedge-shaped substrate is a trapezoid, and the wedge angle θ is 3 mard. When viewed along the optical axis, the projected circle of the circular plane substrate is the circumscribed circle of the projected rectangle of the rectangular flat plate, and the projected circle of the substrate in the optical axis direction is equal to the projected circle of the circular plane substrate in the optical axis direction. The width of the projected rectangle of the rectangular flat plate in the optical axis direction is equal to the width of the parallel light beam I, and the height of the projected rectangle is equal to the height of the parallel light beam I.

5. The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 4, characterized in that: The rectangular plate is divided into three rectangular areas. The height of the three rectangular areas is equal to the height of the projected rectangle. The width of each area in the three rectangular areas is 1 / 3 of the width of the projected rectangle. The three areas are distinguished by lines on the back surface of the rectangular plate. The width of the lines is 0.5mm. The three areas of the rectangular plate are projected onto the circular wedge-shaped substrate along the optical axis. The projections of the three areas on the front surface of the circular wedge-shaped substrate are distinguished by lines. The width of the lines is 0.5mm. Viewed along the optical axis, the three rectangular areas on the back surface of the rectangular plate and the three rectangular areas on the front surface of the circular wedge-shaped substrate are coated with spectroscopic films with a transmittance-reflection ratio of 3:7 for the three bands of 192nm to 250nm, 450nm to 1100nm, and 250nm to 450nm from left to right. The index requirements of the spectroscopic films for the three bands are as follows: λ′=192nm~250nm, T:R=3:7, T+R>96%; λ′=450nm~1100nm, T:R=3:7, T+R>99%; λ′=250nm~450nm, T:R=3:7, T+R>98%; λ′ represents the wavelength range, T represents the average transmittance, and R represents the average reflectance.

6. The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 5, characterized in that: The short-wave infrared Fizeau interferometer module has a similar substrate structure to the ultraviolet-visible Fizeau interferometer module. The differences between the short-wave infrared Fizeau interferometer module include: the rectangular plate has no area divisions, and the lines on the front surface of the circular wedge-shaped substrate are the projection of the rectangular plate along the optical axis; the coating layer is an anti-reflection film and a spectroscopic film for the short-wave infrared band of 1000nm to 2100nm; the wedge angle of the circular wedge substrate is 500mrad; the technical specifications of the spectroscopic film are as follows: λ′=1000nm~2100nm, T:R=3:7, T+R>96%; λ′ represents the wavelength range, T represents the average transmittance, and R represents the average reflectance.

7. The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 6, characterized in that: The material of the ultraviolet-visible cylindrical mirror is fused quartz, the surface of which is coated with an ultraviolet-visible antireflection film, and its width is greater than or equal to the width of the parallel beam I; the material of the short-wave infrared cylindrical mirror is fused quartz, the surface of which is coated with a short-wave infrared antireflection film, and its width is greater than or equal to the width of the parallel beam II.

8. The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 7, characterized in that: The number of pixels of the ultraviolet visible array CCD is 2048×506, the pixel size is 12μm×12μm, and the response band is 190nm~1100nm; the photosensitive surface of the ultraviolet visible array CCD is located in the plane where the focal line of the ultraviolet visible cylindrical mirror is located, and the length direction of the photosensitive surface of the ultraviolet visible array CCD is parallel to the focal line direction; the number of pixels of the shortwave infrared array CCD is 1024×256, the pixel size is 30μm×30μm, and the response band is 1000nm~2100nm; the photosensitive surface of the shortwave infrared array is located in the plane where the focal line of the shortwave infrared cylindrical mirror is located, and the length direction of the photosensitive surface of the shortwave infrared array is parallel to the focal line direction.

9. A method for calculating laser wavelength based on the ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter according to claim 8, characterized in that: The ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter is first calibrated before operation. During the calibration, a laser of known wavelength is used to calibrate the wedge angle of the Fizeau interferometer module, as shown in Formula 1: Where: θ is the wedge angle of the Fizeau interferometer module, in mrad; λ0 is the known wavelength of the calibration laser, in μm; Δx - Interference fringe spacing, in mm; During calibration, the wavelength λ0 of the calibration laser is known, and the interference fringe spacing is obtained by processing with a computer (14), thereby completing the wedge angle calibration of the interference module; Similarly, the wedge angle θ of the UV-visible Fizeau interferometer module and the short-wave infrared Fizeau interferometer module are calibrated using a UV-visible laser and a short-wave infrared laser with known wavelengths, i.e., the calibration of the UV-to-short-wave infrared laser wavelength meter. When the ultraviolet to short-wave infrared Fizeau interferometer laser wavelength meter works, it is as shown in Formula 2: Where: λ is the wavelength of the laser to be measured, in μm; θ is the wedge angle of the Fizeau interferometer module, in mrad; Δ x ——Interference fringe spacing, in mm; During operation, the wedge angle θ of the Fizeau interferometer module is known, the interference fringe spacing can be obtained by computer processing, and the wavelength of the laser to be measured can be calculated using Formula 2.

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