Optimization method and device for grating monochromator, electronic equipment and readable storage medium

Abstract

The application provides an optimization method of a grating monochromator, including obtaining a boundary wavelength satisfying a preset parameter limit condition, and determining a grating parameter ternary diagram corresponding to the boundary wavelength; in the grating parameter ternary diagram, determining a target grating line density and a to-be-corrected focal constant corresponding to a convex grating monochromator; adjusting a grating curvature radius and a variable-line-spacing parameter of the convex grating monochromator and correcting the to-be-corrected focal constant according to the preset parameter limit condition, to obtain a target variable-line-spacing parameter, a target grating curvature radius and a target focal constant; and determining grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-spacing parameter, the target grating line density, the target grating curvature radius and the target focal constant, wherein the grating parameters include one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle. The application solves the technical problem of a narrow wavelength range of the grating monochromator applied to an X-ray waveband.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical technology, and particularly relates to a grating monochromator optimization method and device, an electronic device and a readable storage medium. BACKGROUND

[0002] Synchronous radiation devices and X-ray free electron laser devices and other large scientific devices have been widely applied in the fields of basic scientific research and industrial application, and the like. By means of a grating monochromator, the incident soft X-rays can be monochromated, so as to provide high-energy and high-resolution monochromatic light for the test station.

[0003] At present, the grating monochromator applied to the soft X-rays cannot cover a very wide wavelength range when performing energy scanning. SUMMARY

[0004] The main purpose of the present application is to provide a grating monochromator optimization method and device, an electronic device and a readable storage medium, aiming at solving the technical problem of narrow applicable wavelength range of the grating monochromator applied to the X-ray band in the prior art.

[0005] To achieve the above-mentioned purpose, the present application provides a grating monochromator optimization method applied to a convex grating monochromator, and the grating monochromator optimization method comprises the following steps:

[0006] acquiring a boundary wavelength satisfying a preset parameter limit condition, and determining a grating parameter ternary diagram corresponding to the boundary wavelength;

[0007] determining a target grating line density and a to-be-corrected focal point constant corresponding to the convex grating monochromator in the grating parameter ternary diagram;

[0008] adjusting a grating curvature radius and a variable-line-spacing parameter of the convex grating monochromator, and correcting the to-be-corrected focal point constant according to the preset parameter limit condition, so as to obtain a target variable-line-spacing parameter, a target grating curvature radius and a target focal point constant;

[0009] determining grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-spacing parameter, the target grating line density, the target grating curvature radius and the target focal point constant, wherein the grating parameters include one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle.

[0010] To achieve the above-mentioned purpose, the present application further provides a grating monochromator optimization device applied to a convex grating monochromator, and the grating monochromator optimization device comprises the following steps:

[0011] an acquisition module, configured to acquire a boundary wavelength satisfying a preset parameter limit condition, and determine a grating parameter ternary diagram corresponding to the boundary wavelength;

[0012] a first determining module, configured to determine a target grating line density and a focal constant to be corrected corresponding to the convex grating monochromator in the grating parameter ternary diagram;

[0013] a correcting module, configured to adjust a grating curvature radius and a variable line spacing parameter of the convex grating monochromator according to the preset parameter limit condition, and correct the focal constant to be corrected, to obtain a target variable line spacing parameter, a target grating curvature radius and a target focal constant;

[0014] a second determining module, configured to determine grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable line spacing parameter, the target grating line density, the target grating curvature radius and the target focal constant, wherein the grating parameters include one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle.

[0015] The application further provides an electronic device, which comprises a memory, a processor and a program of the grating monochromator optimization method stored in the memory and executable on the processor, and the program of the grating monochromator optimization method can implement the steps of the grating monochromator optimization method when executed by the processor.

[0016] The application further provides a computer readable storage medium, which stores a program of the grating monochromator optimization method, and the program of the grating monochromator optimization method can implement the steps of the grating monochromator optimization method when executed by a processor.

[0017] The application further provides a computer program product, which comprises a computer program, and the computer program can implement the steps of the grating monochromator optimization method when executed by a processor.

[0018] The application provides a grating monochromator optimization method, device, electronic device and readable storage medium. After a boundary wavelength satisfying a preset parameter limit condition is determined, a grating parameter ternary diagram of a grating line density, a focal constant and the preset parameter limit condition corresponding to the boundary wavelength is made, a target grating line density and a focal constant to be corrected corresponding to the convex grating monochromator are determined in the grating parameter ternary diagram, then a variable line spacing parameter and a grating curvature radius of the convex grating monochromator are adjusted according to the preset parameter limit condition, and the focal constant to be corrected is corrected to obtain a target variable line spacing parameter, a target grating curvature radius and a target focal constant, and then grating parameters corresponding to each light wavelength in the convex grating monochromator are determined according to the target variable line spacing parameter, the target grating line density, the target grating curvature radius and the target focal constant.

[0019] Therefore, the grating monochromator optimization method provided by the application can reduce the grating parameters corresponding to long wavelengths and increase the grating parameters corresponding to short wavelengths, so that the grating parameters corresponding to different wavelengths tend to be consistent, and thus the wavelength range covered by the grating monochromator when the grating monochromator performs energy scanning under the preset parameter limitation condition is widened, thereby expanding the applicable wavelength range of the grating monochromator applied to the X-ray wavelength band. BRIEF DESCRIPTION OF DRAWINGS

[0020] The accompanying drawings, which are incorporated herein and constitute part of the specification, illustrate embodiments consistent with the application and, together with the description, serve to explain the principles of the application.

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the accompanying drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, for those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.

[0022] Figure 1 A structural schematic diagram of the grating monochromator system embodiment one of the application is provided.

[0023] Figure 2 A flowchart of the grating monochromator optimization method embodiment one of the application is provided.

[0024] Figure 3 An optical path schematic diagram of the grating monochromator optimization method embodiment one of the application is provided.

[0025] Figure 4 A grating parameter ternary diagram of the grating monochromator optimization method embodiment one of the application is provided.

[0026] Figure 5 A schematic diagram before and after the focal point constant correction of the grating monochromator optimization method embodiment one of the application is provided.

[0027] Figure 6 A flowchart of the grating monochromator optimization method embodiment two of the application is provided.

[0028] Figure 7 A structural schematic diagram of the grating monochromator optimization device embodiment three of the application is provided.

[0029] Figure 8 A device structural schematic diagram of the hardware running environment involved in the grating monochromator optimization method in the embodiments of the application is provided.

[0030] The object implementation, functional features and advantages of the application will be further described with reference to the embodiments and the accompanying drawings. DETAILED DESCRIPTION

[0031] In order to make the above objectives, characteristics and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0032] Embodiment one

[0033] Synchrotron radiation devices and X-ray free electron laser devices and other large scientific devices have been widely used in the fields of basic scientific research and industrial application, etc. By monochromatizing the incident soft X-rays through a grating monochromator, high-energy resolution monochromatic light can be provided for the test station.

[0034] At present, the grating monochromator applied to soft X-rays cannot cover a very wide wavelength range when performing energy scanning.

[0035] As an example, Figure 1 is a schematic diagram of an optical path structure of a grating monochromator system to which the embodiments of the present application are applied, as Figure 1 shown, the grating monochromator system includes a light source point 1, a front plane mirror 2, a convex grating monochromator 3 and a slit 4. The light emitted by the light source point 1 changes direction through the front plane mirror 2. The front plane mirror 2 changes the direction of the light by rotating and translating or by an off-axis rotating mechanism, and then the light is incident to the center of the convex grating monochromator 3. The convex grating monochromator disperses the incident light by rotating around the surface center to form diffracted light. The convex grating monochromator 3 focuses the diffracted light to the slit 4 to realize the output of the wavelength. The slit 4 filters out high-energy resolution X-ray light through spatial filtering, which is used for scientific research of the test station. In this example, the position of the light source point 1 is fixed, and a relatively wide light source with different center wavelengths can be generated by adjusting the undulator gap. The surface shape of the convex grating 3 can be any one of a convex spherical surface and a convex cylindrical surface. The convex grating 3 can have a fixed curvature or a press-bending mechanism with adjustable curvature. The front plane mirror 2 can be an off-axis rotating mechanism or a mechanism combining translation and rotation. In this example, the scanning parameters of the convex grating monochromator 3 are adjusted. Different wavelengths are selected by the grazing incidence angle of the grating and the front mirror. The focal length constant of the convex grating decreases with the decrease of the wavelength, thereby expanding the applicable wavelength range of the convex grating. The structure of the grating monochromator system in this example is not limited, and the grating monochromator optimization method mentioned below is also not limited to the structure of the grating monochromator system.

[0036] The grating monochromator optimization method provided by the embodiments of the present application is applied to a convex grating monochromator. In a first embodiment of the grating monochromator optimization method of the present application,Figure 2 The grating monochromator optimization method comprises:

[0037] In step S10, a boundary wavelength satisfying a preset parameter limit condition is obtained, and a grating parameter ternary graph corresponding to the boundary wavelength is determined.

[0038] It should be noted that the preset parameter limit condition refers to a grating parameter condition for configuring the convex grating monochromator. Each grating parameter condition corresponds to different light source wavelengths. The grating parameter condition can include energy resolution, pulse broadening, projection size of a light spot on the grating monochromator, optimal blaze angle, etc. Each boundary wavelength corresponds to a boundary condition. For example, it is assumed that the preset parameter limit condition is that the higher the energy resolution capability of the grating monochromator is, the better, and the energy resolution capability of a short wavelength is the smallest. Therefore, the shortest wavelength can be selected as the boundary wavelength, and the energy resolution corresponding to the shortest wavelength is taken as the boundary condition.

[0039] In addition, it should be noted that the grating parameter ternary graph refers to a ternary graph among a grating line density, a focal constant, and a grating parameter in the preset parameter limit condition. The grating parameter can include energy resolution, pulse broadening, projection size of a light spot on the grating monochromator, optimal blaze angle, etc.

[0040] In step S20, a target grating line density corresponding to the convex grating monochromator and a to-be-corrected focal constant are determined in the grating parameter ternary graph.

[0041] It should be noted that the target grating line density refers to the density of lines at the center of the grating, and the to-be-corrected focal constant refers to the focal constant that needs to be corrected. The focal constant is the ratio between a grazing reflection angle and a grazing incidence angle. The grazing reflection angle refers to the angle between a reflected light ray and a mirror surface, and the grazing incidence angle refers to the angle between an incident light ray and the mirror surface. In this example, the focal constant is not fixed and unchangeable, but decreases with the increase of the wavelength.

[0042] In step S30, the grating curvature radius and the variable line spacing parameter of the convex grating monochromator are adjusted according to the preset parameter limit condition, and the to-be-corrected focal constant is corrected to obtain a target variable line spacing parameter, a target grating curvature radius, and a target focal constant.

[0043] It should be noted that the variable line spacing parameter in this example is a fixed value in the service stage of the grating and does not change with the change of the wavelength.

[0044] As an example, the step S30 comprises: adjusting the grating curvature radius and the variable-line-space parameter of the convex grating monochromator according to the preset parameter limit condition, to obtain a target variable-line-space parameter and a target grating curvature radius; and correcting the to-be-corrected focal constant according to the target grating line density, the target variable-line-space parameter and the target grating curvature radius, to obtain the target focal constant.

[0045] The step S40 comprises: determining the grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-space parameter, the target grating line density, the target grating curvature radius and the target focal constant, wherein the grating parameters comprise one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle.

[0046] It should be noted that the grating parameters can comprise one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle, and can also comprise a reflection angle of a pre-mirror and a monochromator, a pre-mirror and grating reflectivity, a monochromator light flux, a power distribution of light absorption of a mirror, etc.

[0047] As an example, the steps S10 to S40 comprise: obtaining a boundary wavelength satisfying a preset parameter limit condition; determining a grating parameter ternary diagram corresponding to the boundary wavelength according to a boundary condition corresponding to the boundary wavelength; selecting a first reference point in the grating parameter ternary diagram, taking a grating line density corresponding to the first reference point as the target grating line density and taking a focal constant corresponding to the first reference point as the to-be-corrected focal constant; adjusting the grating curvature radius and the variable-line-space parameter of the convex grating monochromator according to the preset parameter limit condition, to obtain a target variable-line-space parameter and a target variable-line-space parameter; calculating the target focal constant according to the target variable-line-space parameter, the target grating line density and the target grating curvature radius; adjusting the focal constant corresponding to the convex grating monochromator to the target focal constant; and determining the grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-space parameter, the target grating line density, the target grating curvature radius and the target focal constant, wherein the grating parameters comprise one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle.

[0048] As an example, the formula for calculating the target focal constant according to the target variable-line-space parameter, the target grating line density and the target grating curvature radius is as follows:

[0049]

[0050] wherein r represents an object distance between a light source and a grating, C ffwherein R represents the target grating radius of curvature, n0 represents the target grating line density, m represents the diffraction order of the light wavelength, λ represents the light wavelength, and b2 represents the target blaze parameter.

[0051] The embodiment of the present application provides a grating monochromator optimization method, which comprises the following steps: obtaining a boundary wavelength satisfying a preset parameter limit condition, and determining a grating parameter ternary diagram corresponding to the boundary wavelength; in the grating parameter ternary diagram, determining a target grating line density and a to-be-corrected focal length constant corresponding to the convex grating monochromator; adjusting a grating radius of curvature and a blaze parameter of the convex grating monochromator according to the preset parameter limit condition, and correcting the to-be-corrected focal length constant to obtain a target blaze parameter, a target grating radius of curvature and a target focal length constant; and determining grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target blaze parameter, the target grating line density, the target grating radius of curvature and the target focal length constant, wherein the grating parameters include one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle. After the boundary wavelength satisfying the preset parameter limit condition is determined, the grating line density, the focal length constant and the grating parameter in the preset parameter limit condition corresponding to the boundary wavelength are drawn into a grating parameter ternary diagram, the target grating line density and the to-be-corrected focal length constant corresponding to the convex grating monochromator are determined in the grating parameter ternary diagram, the blaze parameter and the grating radius of curvature of the convex grating monochromator are adjusted according to the preset parameter limit condition, and the to-be-corrected focal length constant is corrected to obtain the target blaze parameter, the target grating radius of curvature and the target focal length constant, and then the grating parameters corresponding to each light wavelength in the convex grating monochromator are determined according to the target blaze parameter, the target grating line density, the target grating radius of curvature and the target focal length constant. In this way, the grating parameter optimization method provided by the embodiment of the present application can reduce the grating parameters corresponding to long wavelengths and increase the grating parameters corresponding to short wavelengths, so that the variation ranges of the grating parameters corresponding to different light wavelengths tend to be consistent, and the wavelength range covered by the convex grating monochromator during energy scanning under the preset parameter limit condition is widened, thereby expanding the applicable wavelength range of the grating monochromator applied to the X-ray wavelength band.

[0052] As an example, the grating parameters include the grazing incidence angle, and the step of determining the grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target blaze parameter, the target grating line density, the target grating radius of curvature and the target focal length constant comprises:

[0053] Step A41: calculating the target grazing incidence angle corresponding to each light wavelength according to the target focal length constant and the target grating line density;

[0054] It should be noted that the above description refers to Figure 3The grazing incidence angle refers to the included angle between the incident light and the mirror surface. By adjusting the grazing incidence angle, the variation range of the energy resolution, pulse broadening, and the projection size of the spot on the grating monochromator of different wavelengths can be adjusted. In actual application, the projection size of the spot on the grating monochromator and the pulse broadening are constrained by the actual processing size of the grating monochromator. It can be understood that the processing size of the grating monochromator affects the applicable range of the light source wavelength.

[0055] Step A42, adjusting the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator to the target grazing incidence angle to determine the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator.

[0056] As an example, steps A41 to A42 include: calculating the target grazing incidence angle corresponding to each light wavelength according to the target focal constant and the target grating line density; and adjusting the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator to the target grazing incidence angle to determine the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator. In this example, the target grazing incidence angle corresponding to each light wavelength is calculated by the grating line density and the corrected focal constant, and the grazing incidence angle corresponding to each light wavelength is adjusted to the target grazing incidence angle to determine the grazing incidence angle corresponding to each light wavelength, thereby increasing the grazing incidence angle of long wavelengths on the grating, reducing the grazing incidence angle of short wavelengths on the grating, making the spot size, wavelength resolution capability, and pulse broadening of different wavelengths consistent, and expanding the applicable wavelength range of the grating monochromator applied to the X-ray band.

[0057] Further, by adjusting the grazing incidence angle of different wavelengths to make the spot projection sizes of different wavelengths consistent, the demand for large-size gratings caused by the excessively large spot size of long wavelengths can be avoided, the high power density caused by the excessively small spot size of short wavelengths can be avoided, and the thermal load of the grating monochromator is reduced. By adjusting the grazing incidence angle of different wavelengths to make the resolution capabilities of different wavelengths consistent, more wavelengths can be applied to the experimental station research. By adjusting the grazing incidence angle of different wavelengths to make the pulse broadening of different wavelengths consistent, more wavelengths can be used to explore the chemical reaction process of the same time scale.

[0058] As an example, the step of calculating the target grazing incidence angle corresponding to each light wavelength according to the target focal constant and the target grating line density includes:

[0059] Step A411, calculating the target grazing incidence angle corresponding to each light wavelength according to a first preset algorithm, wherein the first preset algorithm is:

[0060]

[0061] wherein, θ i represents the target grazing angle, n0 represents the target grating line density, m represents the diffraction order of each light wavelength, λ represents the light wavelength, C ff represents the target focal constant.

[0062] As an example, the grating parameters include a grating blaze angle, and the step of determining the grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable line spacing parameters, the target grating line density, the target grating curvature radius and the target focal constant comprises:

[0063] Step B41, calculating the target grating blaze angle corresponding to each light wavelength according to the target focal constant and the target grating line density;

[0064] It should be noted that, referring to Figure 3 , the blaze angle refers to the included angle between the grating reflection surface and the grating mirror surface, and adjusting the blaze angle of the grating monochromator can optimize the diffraction efficiency of the grating monochromator.

[0065] Step B42, adjusting the grating blaze angle of the convex grating monochromator to be near the target grating blaze angle corresponding to each light wavelength to determine the grating blaze angle corresponding to each light wavelength in the convex grating monochromator.

[0066] As an example, steps B41 to B42 include: calculating the target grating blaze angle corresponding to each light wavelength according to the target focal constant and the target grating line density; adjusting the grating blaze angle of the convex grating monochromator to be near the target grating blaze angle corresponding to each light wavelength to determine the grating blaze angle corresponding to each light wavelength in the convex grating monochromator. This example calculates the target grating blaze angle corresponding to each light wavelength by the grating line density and the corrected focal constant, and adjusts the grating blaze angle corresponding to the convex grating monochromator to be near the target grating blaze angle, thereby increasing the grating blaze angle of the short wavelength on the grating, reducing the grating blaze angle of the long wavelength on the grating, making the blaze angles corresponding to different wavelengths consistent, and enabling different wavelengths to obtain high diffraction efficiency at the same time, thereby expanding the applicable wavelength range of the grating monochromator applied to the X-ray band. In addition, by increasing the grating blaze angle of the short wavelength on the grating, the problem of low diffraction efficiency of the grating caused by too small blaze angle can be avoided, and the diffraction efficiency of the short wavelength on the grating is improved.

[0067] As an example, the step of calculating the target grating blaze angle corresponding to each light wavelength according to the target focal constant and the target grating line density comprises:

[0068] In step B411, the target grating blaze angle corresponding to each light wavelength is calculated according to a second preset algorithm, wherein the second preset algorithm is:

[0069]

[0070] wherein δ represents the target grating blaze angle, n0 represents the target grating line density, m represents the diffraction order of each light wavelength, λ represents the light wavelength, and C ff represents the target focal constant.

[0071] In an implementable manner, referring to Figure 4 and Figure 5 , the preset parameter limit condition includes: the resolution capability of 1 nm wavelength is greater than 30000, the pulse broadening of 2 nm wavelength is not more than 250 fs, the maximum size of the grating is 300 mm, and the wavelength range of the light source is 1 nm-3 nm. The fixed parameters of the convex grating monochromator include: the object distance 217 m (the distance from the light source to the grating), the image distance 108 m (the distance from the grating to the slit), the slope error of the pre-positioned plane mirror and the grating is 100 nrad, and the slit size is 20 μm. The boundary conditions corresponding to the boundary wavelengths 1 nm, 2 nm and 3 nm are selected, and the contour maps of the resolution capability, the pulse broadening, the spot projection and the blaze angle are made as shown in Figure 4 , wherein the shadow area is the area meeting the preset parameter limit condition, and an arbitrary reference point is selected as a working point in each shadow overlapping area. Assuming that the focal constant corresponding to the selected working point is 1.8 and the grating line density is 300 Lines / km, further, the variable line spacing parameter and the curvature radius of the convex grating monochromator need to be optimized. The variable line spacing parameter is 1001 Lines / km and the curvature radius is 1800 m after optimization. Based on the optimized variable line spacing parameter and the curvature radius, the focal constant is corrected. After the correction of the focal constant, as shown in the right three graphs of Figure 5 , it can be seen that the spot projection, the pulse broadening and the energy resolution corresponding to the long wavelength are all reduced, while the spot projection, the pulse broadening and the energy resolution corresponding to the short wavelength are all increased, and the sizes of the spot projection, the pulse broadening and the energy resolution corresponding to each light source wavelength tend to be consistent as a whole, so the change range of the spot projection, the pulse broadening and the energy resolution will be smaller (left: before correcting the focal constant, right: after correcting the focal constant).

[0072] Example Two

[0073] Further, referring to Figure 6In another embodiment of the present application, the same or similar contents as the above embodiment one can be referred to the above description, and the subsequent description will not be repeated. On this basis, the step of determining the target grating line density corresponding to the convex grating monochromator and the focal point constant to be corrected in the grating parameter ternary diagram includes:

[0074] In step S21, the first overlapping area between each grating parameter ternary diagram is determined based on the boundary condition corresponding to the boundary wavelength.

[0075] In step S22, a first reference point is selected in the first overlapping area, the grating line density corresponding to the first reference point is taken as the target grating line density corresponding to the convex grating monochromator, and the focal point constant corresponding to the first reference point is taken as the focal point constant to be corrected corresponding to the convex grating monochromator.

[0076] As an example, steps S21 to S22 include: determining the first overlapping area between each grating parameter ternary diagram based on the boundary condition corresponding to the boundary wavelength; selecting a first reference point as a working point in the first overlapping area, taking the grating line density corresponding to the working point as the target grating line density corresponding to the convex grating monochromator, and taking the focal point constant corresponding to the working point as the focal point constant to be corrected corresponding to the convex grating monochromator. This example selects a working point in the area that meets the boundary condition corresponding to the boundary wavelength, and then takes the focal point constant and the grating line density corresponding to the working point as the focal point constant to be corrected and the target grating line density, thereby ensuring the accuracy of the target grating line density and the focal point constant to be corrected, and ensuring that the obtained grating line density and focal point constant are certainly the grating parameters that meet the preset parameter limit conditions.

[0077] The embodiment of the present application provides a grating parameter acquisition method, that is, based on the boundary condition corresponding to the boundary wavelength, the first overlapping area between each grating parameter ternary diagram is determined; a first reference point is selected in the first overlapping area, the grating line density corresponding to the first reference point is taken as the target grating line density corresponding to the convex grating monochromator, and the focal point constant corresponding to the first reference point is taken as the focal point constant to be corrected corresponding to the convex grating monochromator. The embodiment of the present application selects a working point in the area that meets the boundary condition corresponding to the boundary wavelength, and then takes the focal point constant and the grating line density corresponding to the working point as the focal point constant to be corrected and the target grating line density, thereby ensuring the accuracy of the target grating line density and the focal point constant to be corrected, and ensuring that the obtained grating line density and focal point constant are certainly the grating parameters that meet the preset parameter limit conditions.

[0078] As an example, before the step of adjusting the grating curvature radius and the variable-line-space parameter of the convex grating monochromator according to the preset parameter restriction condition, and correcting the to-be-corrected focal length constant to obtain a target variable-line-space parameter, a target grating curvature radius and a target focal length constant, the grating monochromator optimization method further comprises:

[0079] In step S31, a second overlapping region is determined according to the curvature radius relationship graph corresponding to the to-be-corrected focal length constant, the curvature radius relationship graph corresponding to the boundary wavelength and the curvature radius relationship graph corresponding to the variable-line-space parameter.

[0080] It should be noted that the curvature radius relationship graph corresponding to the to-be-corrected focal length constant is used to represent the mapping relationship between the to-be-corrected focal length constant and the grating curvature radius, the curvature radius relationship graph corresponding to the boundary wavelength is used to represent the mapping relationship between the boundary wavelength and the grating curvature radius, and the curvature radius relationship graph corresponding to the variable-line-space parameter is used to represent the mapping relationship between the variable-line-space parameter and the grating curvature radius.

[0081] In step S32, a second reference point is selected in the second overlapping region, and the grating curvature radius corresponding to the second reference point is taken as a target grating curvature radius.

[0082] As an example, steps S31 to S32 include: superimposing the curvature radius relationship graph corresponding to the to-be-corrected focal length constant, the curvature radius relationship graph corresponding to the boundary wavelength and the curvature radius relationship graph corresponding to the variable-line-space parameter to determine a second overlapping region that meets the to-be-corrected focal length constant, the boundary wavelength and the variable-line-space parameter at the same time; and selecting a second reference point as a working point in the second overlapping region, and taking the grating curvature radius corresponding to the working point as the target grating curvature radius. In this example, after the relationship graphs corresponding to the to-be-corrected focal length constant, the boundary wavelength and the variable-line-space parameter are obtained respectively with the grating curvature radius, a reference point is selected as a working point in the overlapping region of the three relationship graphs, and the grating curvature radius corresponding to the working point is taken as the target grating curvature radius, so that the accuracy of the grating curvature radius is ensured.

[0083] Embodiment three

[0084] The embodiments of the present application also provide a grating monochromator optimization device applied to a convex grating monochromator, which is used for Figure 7 , and the grating monochromator optimization device comprises:

[0085] The acquisition module 10 is configured to acquire a boundary wavelength satisfying a preset parameter restriction condition, and determine a grating parameter ternary graph corresponding to the boundary wavelength.

[0086] The first determining module 20 is configured to determine a target grating line density and a to-be-corrected focal constant corresponding to the convex grating monochromator in the grating parameter ternary diagram.

[0087] The correcting module 30 is configured to adjust a grating curvature radius and a variable-line-spacing parameter of the convex grating monochromator according to the preset parameter restriction condition, and correct the to-be-corrected focal constant to obtain a target variable-line-spacing parameter, a target grating curvature radius and a target focal constant.

[0088] The second determining module 40 is configured to determine grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-spacing parameter, the target grating line density, the target grating curvature radius and the target focal constant, wherein the grating parameters include one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle.

[0089] Optionally, the grating parameters include the grazing incidence angle, and the second determining module 40 further includes:

[0090] calculating a target grazing incidence angle corresponding to each light wavelength according to the target focal constant and the target grating line density;

[0091] adjusting the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator to the target grazing incidence angle to determine the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator.

[0092] Optionally, the second determining module 40 further includes:

[0093] calculating a target grazing incidence angle corresponding to each light wavelength according to a first preset algorithm, wherein the first preset algorithm is:

[0094]

[0095] wherein θ i represents the target grazing incidence angle, n0 represents the target grating line density, m represents a diffraction order of each light wavelength, λ represents the light wavelength, and C ff represents the target focal constant.

[0096] Optionally, the grating parameters include the grating blaze angle, and the second determining module 40 further includes:

[0097] calculating a target grating blaze angle corresponding to each light wavelength according to the target focal constant and the target grating line density;

[0098] adjusting the grating blaze angle of the convex grating monochromator to be near the target grating blaze angle corresponding to each light wavelength to determine the grating blaze angle corresponding to each light wavelength in the convex grating monochromator.

[0099] Optionally, the second determining module 40 further comprises:

[0100] calculating the target grating blaze angle corresponding to each light wavelength according to a second preset algorithm, wherein the second preset algorithm is:

[0101]

[0102] wherein δ represents the target grating blaze angle, n0 represents the target grating line density, m represents the diffraction order of each light wavelength, λ represents the light wavelength, and C ff represents the target focal point constant.

[0103] Optionally, the first determining module 20 further comprises:

[0104] determining a first overlapping area between each grating parameter ternary graph based on the boundary condition corresponding to the boundary wavelength;

[0105] selecting a first reference point in the first overlapping area, taking the grating line density corresponding to the first reference point as the target grating line density corresponding to the convex grating monochromator, and taking the focal point constant corresponding to the first reference point as the to-be-corrected focal point constant corresponding to the convex grating monochromator.

[0106] Optionally, the grating monochromator optimization device further comprises:

[0107] determining a second overlapping area according to the curvature radius relationship graph corresponding to the to-be-corrected focal point constant, the curvature radius relationship graph corresponding to the boundary wavelength, and the curvature radius relationship graph corresponding to the variable-line-spacing parameter;

[0108] selecting a second reference point in the second overlapping area, and taking the grating curvature radius corresponding to the second reference point as the target grating curvature radius.

[0109] The grating monochromator optimization device provided in the application adopts the grating monochromator optimization method in the above embodiments, and solves the technical problem of narrow application wavelength range of the grating monochromator applied to the X-ray wavelength band. Compared with the prior art, the grating monochromator optimization device provided in the embodiments of the application has the same beneficial effects as the grating monochromator optimization method provided in the above embodiments, and other technical features in the grating monochromator optimization device are the same as the features disclosed in the above embodiments, which will not be repeated here.

[0110] Embodiment Four

[0111] The electronic device provided by the embodiment of the present application comprises: at least one processor; and a memory connected with the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to perform the grating monochromator optimization method in the above embodiment one.

[0112] Reference will now be made to the following description Figure 8 which shows a structural schematic diagram of an electronic device suitable for implementing the embodiments of the present disclosure. The electronic device in the embodiments of the present disclosure can include, but is not limited to, mobile terminals such as mobile phones, notebook computers, digital broadcast receivers, PDAs (Personal Digital Assistant), PADs (Portable Application Description), PMPs (Portable Media Player), vehicle-mounted terminals (such as vehicle-mounted navigation terminals), and the like, and fixed terminals such as digital TVs, desktop computers, and the like. Figure 8 The electronic device shown is only an example and should not bring any limitation to the functions and use range of the embodiments of the present disclosure.

[0113] As shown in Figure 8 , the electronic device can include a processing device 1001 (such as a central processor, a graphics processor, etc.), which can perform various appropriate actions and processes according to programs stored in a read-only memory (ROM) 1002 or programs loaded from a storage device 1003 into a random access memory (RAM) 1004. In the RAM 1004, various programs and data required for the operation of the electronic device are also stored. The processing device 1001, the ROM 1002, and the RAM 1004 are connected to each other through a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus.

[0114] Generally, the following systems can be connected to the I / O interface 1006: input devices 1007 including, for example, a touch screen, a touch pad, a keyboard, a mouse, an image sensor, a microphone, an accelerometer, a gyroscope, etc.; output devices 1008 including, for example, a liquid crystal display (LCD), a speaker, a vibrator, etc.; storage devices 1003 including, for example, a magnetic tape, a hard disk, etc.; and communication devices 1009. The communication devices can allow the electronic device to communicate wirelessly or wiredly with other devices to exchange data. Although the electronic device is illustrated as having various systems, it is understood that all of the illustrated systems are not required to implement or have. More or less systems can alternatively be implemented or have.

[0115] In particular, according to embodiments of the present disclosure, the processes described above with reference to the flowcharts can be implemented as a computer software program. For example, embodiments of the present disclosure include a computer program product comprising a computer program carried on a computer readable medium, the computer program containing program code for executing the methods illustrated by the flowcharts. In such embodiments, the computer program can be downloaded and installed from a network through the communication devices 1009, or installed from the storage devices 1003, or installed from the ROM 1002. When the computer program is executed by the processing devices 1001, the above-mentioned functions defined in the methods of the embodiments of the present disclosure are performed.

[0116] The electronic device provided by the application adopts the grating monochromator optimization method in the above-mentioned embodiments, and solves the technical problem of narrow wavelength range of the grating monochromator applied to the X-ray waveband. Compared with the prior art, the electronic device provided by the embodiments of the present disclosure has the same beneficial effects as the grating monochromator optimization method provided by the above-mentioned embodiments, and other technical features in the electronic device are the same as the features disclosed in the above-mentioned embodiment method, which will not be repeated here.

[0117] It should be understood that parts of the present disclosure can be realized by hardware, software, firmware, or a combination thereof. In the description of the above-mentioned embodiments, specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.

[0118] The above is merely specific embodiments of the present application, and the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

[0119] Example five

[0120] The embodiment provides a computer readable storage medium having computer readable program instructions stored thereon, the computer readable program instructions being used to execute the method for optimizing a grating monochromator in the above embodiment one.

[0121] The computer readable storage medium provided by the embodiment of the application may, for example, be a U disk, but is not limited to an electric, magnetic, optical, electromagnetic, infrared, or semiconductor system, system, or device, or any combination of the above. More specific examples of the computer readable storage medium can include, but are not limited to, an electric connection having one or more conductive lines, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the embodiment, the computer readable storage medium can be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, system, or device. The program code contained on the computer readable storage medium can be transmitted by any suitable medium, including but not limited to an electric wire, an optical cable, an RF (Radio Frequency), and the like, or any suitable combination of the above.

[0122] The above computer readable storage medium can be included in an electronic device, or can exist separately without being assembled into an electronic device.

[0123] The above computer readable storage medium carries one or more programs, when the one or more programs are executed by an electronic device, the electronic device is caused to: obtain a boundary wavelength satisfying a preset parameter limit condition, and determine a grating parameter ternary graph corresponding to the boundary wavelength; in the grating parameter ternary graph, determine a target grating line density and a to-be-corrected focal point constant corresponding to the convex grating monochromator; adjust a grating curvature radius and a variable-line-spacing parameter of the convex grating monochromator according to the preset parameter limit condition, and correct the to-be-corrected focal point constant to obtain a target variable-line-spacing parameter, a target grating curvature radius, and a target focal point constant; and determine grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-spacing parameter, the target grating line density, the target grating curvature radius, and the target focal point constant, wherein the grating parameters include one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle, and a grating blaze angle.

[0124] Computer program code for carrying out operations of the present disclosure can be written in any combination of one or more programming languages, including an object oriented programming language such as Java, Smalltalk, C++ or the like, and conventional procedural programming languages, such as the "C" programming language or similar programming languages. The program code can execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the latter scenario, the remote computer can be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or the connection can be made to an external computer (for example, through the Internet using an Internet Service Provider).

[0125] The flow diagrams and the block diagrams in the drawings are illustrations of architectures, functionalities, and operations of possible implementations of systems, methods, and computer program products according to various embodiments of the present disclosure. In this regard, each block in the flow diagrams or block diagrams can represent a module, a segment, or a portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that in some alternative implementations, the functions noted in the blocks can occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently or the blocks may

[0126] The modules involved in the embodiments of the present disclosure can be implemented in the form of software or in the form of hardware. In some cases, the name of the module does not constitute a limitation on the module itself.

[0127] The computer readable storage medium provided by the present application stores computer readable program instructions for executing the above-mentioned grating monochromator optimization method, and solves the technical problem of narrow wavelength range of the grating monochromator applied to the X-ray waveband. Compared with the prior art, the computer readable storage medium provided by the embodiments of the present application has the same beneficial effects as the grating monochromator optimization method provided by the above-mentioned embodiments, and will not be described here.

[0128] Embodiment six

[0129] The application further provides a computer program product comprising a computer program which, when executed by a processor, implements the steps of the grating monochromator optimization method as described above.

[0130] The computer program product provided by the application solves the technical problem of narrow applicable wavelength range of the grating monochromator applied to the X-ray waveband. Compared with the prior art, the beneficial effects of the computer program product provided by the embodiments of the application are the same as those of the grating monochromator optimization method provided by the above-described embodiments, and are not described herein.

[0131] The above is only the preferred embodiments of the application, and does not limit the patent scope of the application, and any equivalent structure or equivalent flow transformation using the content of the specification and drawings, or direct or indirect application in other related technical fields, are also included in the patent processing scope of the application.

Claims

1. A method of optimizing a grating monochromator, characterized by, The convex grating monochromator optimization method is applied to a convex grating monochromator, and the convex grating monochromator optimization method comprises the following steps: acquiring a boundary wavelength satisfying a preset parameter limit condition, and determining a grating parameter ternary graph corresponding to the boundary wavelength; in the grating parameter ternary graph, determining a target grating line density and a to-be-corrected focal constant corresponding to the convex grating monochromator; adjusting a grating curvature radius and a variable-line-spacing parameter of the convex grating monochromator and correcting the to-be-corrected focal constant according to the preset parameter limit condition, to obtain a target variable-line-spacing parameter, a target grating curvature radius and a target focal constant; determining grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-spacing parameter, the target grating line density, the target grating curvature radius and the target focal constant, wherein the grating parameters comprise one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle and a grating blaze angle; in the case where the grating parameters comprise the grating blaze angle, the step of determining the grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-spacing parameter, the target grating line density, the target grating curvature radius and the target focal constant comprises: calculating a target grating blaze angle corresponding to each light wavelength according to the target focal constant and the target grating line density; adjusting the grating blaze angle of the convex grating monochromator to be near the target grating blaze angle corresponding to each light wavelength, to determine the grating blaze angle corresponding to each light wavelength in the convex grating monochromator; the step of calculating the target grating blaze angle corresponding to each light wavelength according to the target focal constant and the target grating line density comprises: calculating the target grating blaze angle corresponding to each light wavelength according to a second preset algorithm, wherein the second preset algorithm is: wherein δ represents the target grating blaze angle, n0 represents the target grating line density, m represents the diffraction order of each light wavelength, λ represents the light wavelength, C ff represents the target focal point constant.

2. The method of optimizing a grating monochromator of claim 1, wherein, in the case where the grating parameters comprise the grazing incidence angle, the step of determining the grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable-line-spacing parameter, the target grating line density, the target grating curvature radius and the target focal constant comprises: calculating a target grazing incidence angle corresponding to each light wavelength according to the target focal constant and the target grating line density; adjusting the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator to the target grazing incidence angle, to determine the grazing incidence angle corresponding to each light wavelength in the convex grating monochromator.

3. The method of optimizing a grating monochromator of claim 2, wherein, the step of calculating the target grazing incidence angle corresponding to each light wavelength according to the target focal constant and the target variable-line-spacing parameter comprises: calculating the target grazing incidence angle corresponding to each light wavelength according to a first preset algorithm, wherein the first preset algorithm is: wherein θ i represents the target grazing angle, n0 represents the target grating line density, m represents the diffraction order of each light wavelength, λ represents the light wavelength, C ff represents the target focal constant.

4. The method of optimizing a grating monochromator of claim 1, wherein, the step of determining the target grating line density and the to-be-corrected focal constant corresponding to the convex grating monochromator in the grating parameter ternary graph comprises: determining a first overlapping area between each grating parameter ternary graph based on a boundary condition corresponding to the boundary wavelength; Select a first reference point in the first overlapping area, take the grating line density corresponding to the first reference point as the target grating line density corresponding to the convex grating monochromator, and take the focal point constant corresponding to the first reference point as the to-be-corrected focal point constant corresponding to the convex grating monochromator.

5. The method of claim 1, wherein the grating monochromator is optimized for a wavelength of 193 nm. 5 Before the step of adjusting the grating curvature radius and the variable line spacing parameter of the convex grating monochromator and correcting the to-be-corrected focal point constant according to the preset parameter restriction condition, the grating monochromator optimization method further comprises: According to the curvature radius relationship diagram corresponding to the to-be-corrected focal point constant, the curvature radius relationship diagram corresponding to the boundary wavelength, and the curvature radius relationship diagram corresponding to the variable line spacing parameter, a second overlapping area is determined. Select a second reference point in the second overlapping area, and take the grating curvature radius corresponding to the second reference point as the target grating curvature radius.

6. A grating monochromator optimization device, characterized by being applied to a convex grating monochromator, the grating monochromator optimization device comprising: An acquisition module is configured to acquire a boundary wavelength satisfying a preset parameter restriction condition, and determine a grating parameter ternary diagram corresponding to the boundary wavelength; A first determination module is configured to determine, in the grating parameter ternary diagram, a target grating line density and a to-be-corrected focal point constant corresponding to the convex grating monochromator; A correction module is configured to adjust the grating curvature radius and the variable line spacing parameter of the convex grating monochromator according to the preset parameter restriction condition, and correct the to-be-corrected focal point constant, to obtain a target variable line spacing parameter, a target grating curvature radius, and a target focal point constant; A second determination module is configured to determine grating parameters corresponding to each light wavelength in the convex grating monochromator according to the target variable line spacing parameter, the target grating line density, the target grating curvature radius, and the target focal point constant, wherein the grating parameters include one or more of a spot size, an energy resolution, a pulse broadening, a grazing incidence angle, and a grating blaze angle; In the case where the grating parameters include the grating blaze angle, the second determination module is further configured to: Calculate the target grating blaze angle corresponding to each light wavelength according to the target focal point constant and the target grating line density; Adjust the grating blaze angle of the convex grating monochromator to be near the target grating blaze angle corresponding to each light wavelength, to determine the grating blaze angle corresponding to each light wavelength in the convex grating monochromator; The second determination module is further configured to: Calculate the target grating blaze angle corresponding to each light wavelength according to a second preset algorithm, wherein the second preset algorithm is: wherein δ represents the target grating blaze angle, n0 represents the target grating line density, m represents the diffraction order of each light wavelength, λ represents the light wavelength, C ff represents the target focal point constant.

7. An electronic device, comprising: The electronic device comprises: at least one processor; and a memory connected to the at least one processor in communication; wherein The memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to perform the steps of the grating monochromator optimization method in any one of claims 1 to 5.

8. A computer-readable storage medium, characterized in that, The computer readable storage medium has stored thereon a program implementing a method of optimizing a grating monochromator, the program being executed by a processor to implement the steps of the method of optimizing a grating monochromator according to any one of claims 1 to 5.

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